An apparatus for depositing an isostatically pressed graphite tantalum carbide coating on an epitaxial substrate

Abstract

This invention discloses an isostatic pressing graphite tantalum carbide coating deposition apparatus for epitaxial substrates, specifically relating to the technical field of coating deposition equipment. It includes a support base, with a convergence deposition assembly mounted on top of the base. The convergence deposition assembly includes a connecting plate for support, which is located on top of the base. Through the corresponding cooperation of various structures, the two first heating plates are brought close together to initially limit the material, preventing displacement during subsequent coating deposition. The material can converge between the first and second heating plates, ensuring that the coating is concentrated between the first and second heating plates and the material during deposition, improving deposition efficiency. Furthermore, the trapezoidal cross-section formed by the combination of the second and first guide plates continuously causes the coating to converge downwards, resulting in a higher density.

Description

Technical Field

[0001] This invention relates to the field of coating deposition equipment technology, and more specifically, to an isostatic graphite tantalum carbide coating deposition equipment for epitaxial substrates. Background Technology

[0002] An isostatic pressing (OSP) tantalum carbide (TCC) coating deposition system for epitaxial substrates is used to deposit TCC coatings on epitaxial substrates. TCC coatings possess excellent corrosion resistance, high-temperature stability, and mechanical properties, and are commonly used in semiconductor, optoelectronics, and materials science applications. This system employs isostatic pressing technology, utilizing high temperature and high pressure to deposit TCC material onto the surface of the epitaxial substrate. Through heating and high pressure, the carbon source and metal source react to generate a TCC thin film, which is then deposited on the epitaxial substrate. The system typically includes a reaction chamber, heating system, static pressure system, and control system. The OSP tantalum carbide (TCC) coating deposition system for epitaxial substrates enables high-quality coating deposition, providing an effective way to improve the performance and functionality of epitaxial substrates.

[0003] Among them, a search revealed that patent application number CN202220631373.9 discloses a sintered tantalum carbide coating preparation device on a graphite substrate, including a box, a coating mixing box, a spraying assembly, a support frame and a temperature regulator. The box is provided with an air inlet and an air outlet. The device is characterized in that: a ring-shaped spray pipe is provided on the inner wall of the box, and multiple nozzles are evenly distributed on the circumferential direction of the spray pipe. The spray pipe is connected to the external coating mixing box. The support frame is connected to a rotary lifting mechanism. The rotary lifting mechanism includes a lifting cylinder, a rotary motor, a mounting plate and a connecting shaft. The connecting shaft is connected to the support frame and rotatably mounted on the mounting plate. The rotary motor is fixed on the mounting plate. The output end of the rotary motor and the connecting shaft are connected by gear or belt drive. The lifting cylinder is located below the mounting plate, and the output end of the lifting cylinder is connected to the mounting plate.

[0004] In use, this structure connects a ring-shaped spray nozzle to a support frame and a rotating lifting mechanism. During the spraying process, the various nozzles on the ring-shaped spray nozzle simultaneously spray paint. The lifting cylinder drives the graphite substrate on the support frame to slowly rise and fall, while the rotating motor also drives the graphite substrate to slowly rotate, thus ensuring uniform spraying of paint on the graphite substrate. However, this structure is not easy to accumulate on the object during deposition, resulting in poor coating deposition and affecting the molding quality. Summary of the Invention

[0005] In order to overcome the above-mentioned defects of the prior art, the present invention provides an isostatic pressing graphite tantalum carbide coating deposition apparatus for epitaxial substrates, which aims to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: an isostatic pressing graphite tantalum carbide coating deposition apparatus for epitaxial substrates, comprising a base for support, wherein a convergence deposition assembly is disposed on the top of the base;

[0007] The aggregated deposition assembly includes;

[0008] A connecting plate for support is provided on top of the base;

[0009] A frame opening for misalignment, the frame opening being disposed on the connecting plate;

[0010] A transition opening for misalignment, the transition opening being formed on both sides of the inner wall of the frame opening;

[0011] Two first heating plates that can be displaced in opposite directions, and each first heating plate is respectively disposed at the bottom of the corresponding first guide plate;

[0012] Two opposing displacement second heating plates, each of which is respectively disposed at the bottom of a corresponding second guide plate;

[0013] The cross-sectional shapes of each of the first heating plates and the second heating plates are combined to form a rectangle, and each of the first heating plates and the second heating plate is provided with a deformable sealing kit on its outer side.

[0014] Two handles for lifting are provided, and each handle is respectively provided on the top two sides of the connecting plate. Both handles are detachably connected to the connecting plate.

[0015] Two guide slots for guiding, both of which are formed on the upper surface of the base;

[0016] The two guide grooves are staggered, and the cross-sectional shapes of the two guide grooves are combined to form a cross shape. The first heating plate and the second heating plate are slidably connected to the guide grooves respectively.

[0017] Two first guide plates for guiding, and each first guide plate is respectively disposed on both sides of the inner wall of the frame opening, the two frame openings;

[0018] Several first shaft pin connecting rods for support, and two of each first shaft pin connecting rod are respectively set on one side of the top of the corresponding first guide plate. One end of each of the two first shaft pin connecting rods extends to the connecting plate and is detachably connected to the connecting plate.

[0019] Two angle-adjustable reinforcing frames are provided, and each reinforcing frame is respectively mounted on a corresponding first shaft pin connecting rod and movably connected to the first shaft pin connecting rod;

[0020] Two first pulleys are used for transition, and each first pulley is respectively mounted on a corresponding reinforcing frame and movably connected to the reinforcing frame;

[0021] Two positioning frames for limiting the position are provided, and each positioning frame is respectively disposed on one side of the corresponding first guide plate. The positioning frame is detachably connected to the connecting plate.

[0022] Several supporting blocks are provided, and each pair of supporting blocks is respectively arranged on both sides of the top of the corresponding positioning frame. The supporting blocks are movably connected to the positioning frame.

[0023] Several extension rods for support are provided, and each pair of extension rods is set on one side of the corresponding first guide plate. The extension rods are detachably connected to the connecting plate by bolts.

[0024] Several first shaft pin seats for support, and each pair of first shaft pin seats is respectively set on the corresponding extension rod and detachably connected to the extension rod;

[0025] Several first hydraulic rods for driving are provided, and each pair of first hydraulic rods is respectively set on a corresponding first shaft pin seat and movably connected to the first shaft pin seat through shaft pins.

[0026] The output end of each of the first hydraulic rods extends to the corresponding reinforcing frame and is movably connected to the reinforcing frame via a pivot pin.

[0027] As can be seen, in the above technical solution, the material is placed between the first heating plate and the second heating plate after being guided by the first guide plate and the second guide plate. The first guide plate and the second guide plate guide the material first to ensure the stability and accuracy of the material during subsequent coating deposition. The first heating plate is displaced on the base along the guide groove due to the traction force when the first guide plate rotates, so that the two first heating plates are adjusted in position and move closer to each other to limit the material first.

[0028] Two second guide plates are used for guidance, and each second guide plate is respectively set in a corresponding transition opening;

[0029] The vertical cross-sectional shapes of each of the second guide plates and the first guide plate are combined to form a trapezoid;

[0030] Several second shaft pin connecting rods for support, and each second shaft pin connecting rod is arranged in pairs on one side of the corresponding second guide plate, and one end of each second shaft pin connecting rod extends to the connecting plate and is detachably connected to the connecting plate;

[0031] Two adjustable top plates are provided, and each top plate is respectively disposed between two corresponding second shaft pin connecting rods and is movably connected to the second shaft pin connecting rods through shaft pins.

[0032] Several second pulleys for transition are provided, and each second pulley is respectively installed on a corresponding top plate, and the second pulley is movably connected to the top plate;

[0033] Two second shaft pin seats for support are provided, and each second shaft pin seat is respectively provided on one side of the corresponding second guide plate. The second shaft pin seats are detachably connected to the connecting plate.

[0034] Two rotatable vertical plates, each of which is respectively mounted on a corresponding second shaft pin seat and movably connected to the second shaft pin seat via a shaft pin;

[0035] Two second hydraulic rods are used for driving, and each second hydraulic rod is respectively set on one side of the corresponding vertical plate;

[0036] Each of the second hydraulic rods passes through the corresponding vertical plate and extends to the top plate, where it is movably connected to the top plate via a pivot pin.

[0037] As can be seen, in the above technical solution, when tilted, the second guide plate will be displaced and come into contact with the second heating plate, so that the two second heating plates can be displaced to the end of the first heating plate respectively, so that the material can be gathered between the first heating plate and the second heating plate, to ensure that the coating can be gathered between the first heating plate, the second heating plate and the material during deposition.

[0038] The technical effects and advantages of this invention are as follows:

[0039] 1. In use, the material is placed between the first heating plate and the second heating plate by the guidance of the first guide plate and the second guide plate. The first guide plate and the second guide plate guide the material first to ensure the stability and accuracy of the material during subsequent coating deposition.

[0040] 2. When the first pulley of the present invention is displaced, it comes into contact with the first heating plate at the bottom of the first guide plate. The first heating plate is displaced on the base along the guide groove due to the traction force when the first guide plate rotates, so that the two first heating plates are adjusted in position and the two first heating plates are brought closer to each other to limit the material first, so as to avoid the displacement of the material during the subsequent coating deposition.

[0041] 3. When the top plate is tilted, the second guide plate will be displaced and come into contact with the second heating plate. This allows the two second heating plates to be displaced to the ends of the first heating plate, so that the material can be gathered between the first heating plate and the second heating plate. This ensures that the coating can be gathered between the first heating plate, the second heating plate and the material during deposition, thereby improving deposition efficiency.

[0042] 4. The present invention uses the first pulley and the second pulley to reduce the friction generated when the top plate and the reinforcing frame come into contact with the second heating plate and the first heating plate, so that the second heating plate and the first heating plate are more smoothly brought together. Furthermore, the trapezoidal cross section formed by the combination of the second guide plate and the first guide plate can continuously cause the coating to gather downwards, making it denser.

[0043] In summary, the overall design is simple and the structure is reasonable. Through the corresponding cooperation of various structures, the first and second guide plates guide the material first to ensure the stability and accuracy of the material during subsequent coating deposition. The two first heating plates are close to each other to limit the material first, preventing the material from shifting during subsequent coating deposition. The material can gather between the first and second heating plates to ensure that the coating is gathered between the first heating plate, the second heating plate and the material during deposition, improving deposition efficiency. Furthermore, the trapezoidal cross-section formed by the combination of the second and first guide plates can continuously cause the coating to gather downwards, making it denser. Attached Figure Description

[0044] To more clearly illustrate the technical solutions in this disclosure, the accompanying drawings used in some embodiments of this disclosure will be briefly described below. Obviously, the drawings described below are only drawings of some embodiments of this disclosure, and those skilled in the art can obtain other drawings based on these drawings. In addition, the drawings described below can be regarded as schematic diagrams and are not intended to limit the actual size of the product, the actual flow of the method, the actual timing of the signals, etc. involved in the embodiments of this disclosure.

[0045] Figure 1 This is a schematic diagram of the overall structure of the present invention.

[0046] Figure 2 This is a side view of the overall structure of the present invention.

[0047] Figure 3 This is a schematic diagram of the second hydraulic rod and the first pulley of the present invention mounted on the connecting plate.

[0048] Figure 4 This is a front view of the first heating plate and the second heating plate of the present invention.

[0049] Figure 5 This is a schematic diagram of the first guide plate and the second guide plate of the present invention mounted on the connecting plate.

[0050] Figure 6 This is a front view of the various structures on the second guide plate of the present invention.

[0051] Figure 7 This is a front view of the various structures on the first guide plate of the present invention.

[0052] The attached figures are labeled as follows: 1. Base; 101. Connecting plate; 102. Frame opening; 103. Transition opening; 104. First heating plate; 105. Second heating plate; 106. Handle; 107. Guide groove;

[0053] 2. First guide plate; 201. First shaft pin connecting rod; 202. Reinforcing frame; 203. First pulley; 204. Positioning frame; 205. Abutment block; 206. Extension rod; 207. First shaft pin seat; 208. First hydraulic rod;

[0054] 3. Second guide plate; 301. Second shaft pin connecting rod; 302. Top plate; 303. Second pulley; 304. Second shaft pin seat; 305. Vertical plate; 306. Second hydraulic rod. Detailed Implementation

[0055] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0056] The terms "first," "second," and "third" used in the embodiments of this application are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first," "second," or "third" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or devices.

[0057] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a mutually exclusive, independent, or alternative embodiment. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0058] In the embodiments, as shown in the appendix Figure 1-7The isostatic pressing graphite tantalum carbide coating deposition equipment for epitaxial substrates shown uses a gathering deposition component on a base 1. The first guide plate 2 and the second guide plate 3 guide the material first to ensure the stability and accuracy of the material during subsequent coating deposition. The two first heating plates 104 are close to each other to limit the material first, preventing the material from shifting during subsequent coating deposition. The material can gather between the first heating plate 104 and the second heating plate 105 to ensure that the coating can gather between the first heating plate 104, the second heating plate 105 and the material during deposition, improving deposition efficiency. The trapezoidal cross section formed by the combination of the second guide plate 3 and the first guide plate 2 can continuously make the coating gather downwards, making it denser. The specific structure of the component is as follows.

[0059] The aggregated deposition components include;

[0060] A connecting plate 101 for support is disposed on the top of the base 1;

[0061] The frame opening 102 for misalignment is provided on the connecting plate 101;

[0062] The transition opening 103 for misalignment is provided on both sides of the inner wall of the frame opening 102.

[0063] Two first heating plates 104 that can be displaced in opposite directions, and each first heating plate 104 is respectively disposed at the bottom of the corresponding first guide plate 2;

[0064] Two opposing displacement second heating plates 105, and each second heating plate 105 is respectively disposed at the bottom of the corresponding second guide plate 3;

[0065] The cross-sectional shape of each first heating plate 104 and the second heating plate 105 is combined to form a rectangle, and each first heating plate 104 and the second heating plate 105 is provided with a deformable sealing kit on its outer side.

[0066] Two handles 106 for lifting are provided, and each handle 106 is respectively provided on the top two sides of the connecting plate 101. Both handles 106 are detachably connected to the connecting plate 101.

[0067] Two guide grooves 107 for guiding are provided, both of which are formed on the upper surface of the base 1.

[0068] Two guide grooves 107 are staggered, and the cross-sectional shapes of the two guide grooves 107 are combined to form a cross shape. The first heating plate 104 and the second heating plate 105 are slidably connected to the guide grooves 107 respectively.

[0069] Two first guide plates 2 are used for guidance, and each first guide plate 2 is respectively disposed on both sides of the inner wall of the frame opening 102, and the two frame openings 102;

[0070] Several first shaft pin connecting rods 201 for support, and two of each first shaft pin connecting rod 201 are respectively set on one side of the top of the corresponding first guide plate 2. One end of each of the two first shaft pin connecting rods 201 extends to the connecting plate 101 and is detachably connected to the connecting plate 101.

[0071] Two angle-adjustable reinforcing frames 202 are provided, and each reinforcing frame 202 is respectively mounted on the corresponding first shaft pin connecting rod 201 and movably connected to the first shaft pin connecting rod 201.

[0072] Two first pulleys 203 are used for transition, and each first pulley 203 is respectively mounted on the corresponding reinforcing frame 202 and movably connected to the reinforcing frame 202;

[0073] Two positioning frames 204 for limiting the position are provided, and each positioning frame 204 is respectively set on one side of the corresponding first guide plate 2. The positioning frame 204 is detachably connected to the connecting plate 101.

[0074] Several support blocks 205 are provided, and each pair of support blocks 205 are respectively set on both sides of the top of the corresponding positioning frame 204. The support blocks 205 are movably connected to the positioning frame 204.

[0075] Several extension rods 206 for support are provided, and each pair of extension rods 206 are respectively set on one side of the corresponding first guide plate 2. The extension rods 206 are detachably connected to the connecting plate 101 by bolts.

[0076] Several first shaft pin seats 207 for support, and each pair of first shaft pin seats 207 are respectively set on the corresponding extension rod 206 and detachably connected to the extension rod 206;

[0077] Several first hydraulic rods 208 for driving are provided, and each pair of first hydraulic rods 208 are respectively set on the corresponding first shaft pin seat 207 and are movably connected to the first shaft pin seat 207 through shaft pins.

[0078] Among them, the output end of each first hydraulic rod 208 extends to the corresponding reinforcing frame 202 and is movably connected to the reinforcing frame 202 through a shaft pin;

[0079] Two second guide plates 3 are used for guidance, and each second guide plate 3 is respectively set in the corresponding transition port 103;

[0080] The vertical cross-sectional shapes of each second guide plate 3 and the first guide plate 2 are combined to form a trapezoid;

[0081] Several second shaft pin connecting rods 301 for support are provided, and each pair of second shaft pin connecting rods 301 are respectively provided on one side of the corresponding second guide plate 3, and one end of each second shaft pin connecting rod 301 extends to the connecting plate 101 and is detachably connected to the connecting plate 101.

[0082] Two adjustable top plates 302 are provided, and each top plate 302 is respectively disposed between two corresponding second shaft pin connecting rods 301 and is movably connected to the second shaft pin connecting rods 301 through shaft pins.

[0083] Several second pulleys 303 are used for transition, and each second pulley 303 is respectively set on the corresponding top plate 302, and the second pulley 303 is movably connected to the top plate 302;

[0084] Two second shaft pin seats 304 are used for support, and each second shaft pin seat 304 is respectively disposed on one side of the corresponding second guide plate 3. The second shaft pin seat 304 is detachably connected to the connecting plate 101.

[0085] Two rotatable vertical plates 305 are provided, and each vertical plate 305 is respectively mounted on a corresponding second shaft pin seat 304 and is movably connected to the second shaft pin seat 304 via a shaft pin.

[0086] Two second hydraulic rods 306 for driving are provided, and each second hydraulic rod 306 is respectively provided on one side of the corresponding vertical plate 305;

[0087] Each of the second hydraulic rods 306 passes through the corresponding vertical plate 305 and extends to the top plate 302, where it is movably connected to the top plate 302 via a pivot pin.

[0088] According to the above structure, when in use, the staff will install it at the designated position. When depositing coating on the epitaxial substrate, the staff will place the material between the first heating plate 104 and the second heating plate 105, guided by the first guide plate 2 and the second guide plate 3. The first guide plate 2 and the second guide plate 3 will guide the material first to ensure the stability and accuracy of the material during subsequent coating deposition.

[0089] Simultaneously, the first hydraulic rod 208 is activated, and the output end of the first hydraulic rod 208 drives the reinforcing frame 202 to rotate along the axis point where the reinforcing frame 202 is connected to the first shaft pin connecting rod 201. When the reinforcing frame 202 rotates, it will drive the first pulley 203 to move. When the first pulley 203 moves, it will contact the first heating plate 104 at the bottom of the first guide plate 2. The first heating plate 104 is moved on the base 1 along the guide groove 107 due to the traction force when the first guide plate 2 rotates, so that the two first heating plates 104 are adjusted in position, so that the two first heating plates 104 are close to each other to limit the material first.

[0090] Then, through the second hydraulic rod 306, the output end of the second hydraulic rod 306 drives the top plate 302 to rotate along the axis point where the top plate 302 is connected to the second shaft pin connecting rod 301. When the top plate 302 is tilted, it will cause the second guide plate 3 to be displaced and come into contact with the second heating plate 105, so that the two second heating plates 105 can be displaced to the end of the first heating plate 104 respectively, so that the material can be gathered between the first heating plate 104 and the second heating plate 105, to ensure that the coating can be gathered between the first heating plate 104, the second heating plate 105 and the material during the deposition process.

[0091] Furthermore, when the top plate 302 and the reinforcing frame 202 come into contact with the second heating plate 105 and the first heating plate 104 respectively, the first pulley 203 and the second pulley 303 are provided to reduce the friction generated when the top plate 302 and the reinforcing frame 202 come into contact with the second heating plate 105 and the first heating plate 104, making the second heating plate 105 and the first heating plate 104 smoother when they are brought together.

[0092] Unlike existing technologies, this application discloses an isostatic pressing graphite tantalum carbide coating deposition apparatus for epitaxial substrates. The apparatus uses a first guide plate 2 and a second guide plate 3 to guide the material initially, ensuring stability and accuracy during subsequent coating deposition. Two first heating plates 104 are brought close together to initially limit the material, preventing displacement during deposition. The material can gather between the first heating plate 104 and the second heating plate 105, ensuring that the coating remains concentrated between them during deposition, improving deposition efficiency. Furthermore, the trapezoidal cross-section formed by the second guide plate 3 and the first guide plate 2 continuously allows the coating to gather downwards, resulting in higher density.

[0093] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An isostatic pressing graphite tantalum carbide coating deposition apparatus for epitaxial substrates, comprising a base (1) for support, characterized in that: The top of the base (1) is provided with a gathering deposition component; The aggregated deposition assembly includes; A connecting plate (101) for support is disposed on top of the base (1); A frame opening (102) for misalignment is provided on the connecting plate (101); A transition opening (103) for misalignment is provided on both sides of the inner wall of the frame opening (102); Two first guide plates (2) are used for guidance, and each first guide plate (2) is respectively disposed on both sides of the inner wall of the frame opening (102), the two frame openings (102). Two second guide plates (3) are used for guidance, and each second guide plate (3) is respectively disposed in the corresponding transition port (103); The vertical cross-sectional shapes of each of the second guide plate (3) and the first guide plate (2) are combined to form a trapezoid; The aggregated deposition assembly also includes; Two first heating plates (104) that can be displaced in opposite directions, and each first heating plate (104) is respectively disposed at the bottom of the corresponding first guide plate (2); Two opposing displacement second heating plates (105) are provided, and each second heating plate (105) is respectively disposed at the bottom of the corresponding second guide plate (3); The cross-sectional shapes of each of the first heating plate (104) and the second heating plate (105) are combined to form a rectangle, and each of the first heating plate (104) and the second heating plate (105) is provided with a deformable sealing kit on its outer side. Several second shaft pin connecting rods (301) for support, and each second shaft pin connecting rod (301) is arranged in pairs on one side of the corresponding second guide plate (3), and one end of each second shaft pin connecting rod (301) extends to the connecting plate (101) and is detachably connected to the connecting plate (101); Two angle-adjustable top plates (302), and each top plate (302) is respectively disposed between two corresponding second shaft pin connecting rods (301) and is movably connected to the second shaft pin connecting rods (301) through shaft pins; Two second hydraulic rods (306) for driving, and each second hydraulic rod (306) is respectively disposed on one side of the corresponding vertical plate (305); The output end of the second hydraulic rod (306) drives the top plate (302) to rotate along the axis point where the top plate (302) is connected to the second shaft pin connecting rod (301). When the top plate (302) tilts, it will cause the second guide plate (3) to move and come into contact with the second heating plate (105).

2. The isostatic pressing graphite tantalum carbide coating deposition equipment for epitaxial substrates according to claim 1, characterized in that: The aggregated deposition assembly also includes; Two handles (106) for lifting are provided, and each handle (106) is respectively provided on the top two sides of the connecting plate (101). Both handles (106) are detachably connected to the connecting plate (101). Two guide grooves (107) for guiding are provided on the upper surface of the base (1).

3. The isostatic pressing graphite tantalum carbide coating deposition equipment for epitaxial substrates according to claim 1, characterized in that: The aggregated deposition assembly also includes; Several first shaft pin connecting rods (201) for support, and two of each first shaft pin connecting rod (201) are respectively set on one side of the top of the corresponding first guide plate (2). One end of each of the two first shaft pin connecting rods (201) extends to the connecting plate (101) and is detachably connected to the connecting plate (101). Two angle-adjustable reinforcing frames (202), and each reinforcing frame (202) is respectively mounted on the corresponding first shaft pin connecting rod (201) and movably connected to the first shaft pin connecting rod (201); Two first pulleys (203) are used for transition, and each first pulley (203) is respectively mounted on a corresponding reinforcing frame (202) and movably connected to the reinforcing frame (202); Two positioning frames (204) for limiting the position are provided, and each positioning frame (204) is respectively disposed on one side of the corresponding first guide plate (2). The positioning frame (204) is detachably connected to the connecting plate (101).

4. The isostatic pressing graphite tantalum carbide coating deposition equipment for epitaxial substrates according to claim 3, characterized in that: The aggregated deposition assembly also includes; Several abutments (205) for support are provided, and each abutment (205) is arranged in pairs on both sides of the top of the corresponding positioning frame (204). The abutments (205) are movably connected to the positioning frame (204). Several extension rods (206) for support are provided, and each pair of extension rods (206) are respectively set on one side of the corresponding first guide plate (2). The extension rods (206) are detachably connected to the connecting plate (101) by bolts. Several first shaft pin seats (207) for support, and each first shaft pin seat (207) is arranged in pairs on the corresponding extension rod (206) and detachably connected to the extension rod (206); A plurality of first hydraulic rods (208) for driving, and each of the first hydraulic rods (208) is arranged in pairs on the corresponding first shaft pin seat (207) and is movably connected to the first shaft pin seat (207) by a shaft pin; The output end of each of the first hydraulic rods (208) extends to the corresponding reinforcing frame (202) and is movably connected to the reinforcing frame (202) via a pivot pin.

5. The isostatic pressing graphite tantalum carbide coating deposition equipment for epitaxial substrates according to claim 1, characterized in that: The aggregated deposition assembly also includes; Several second pulleys (303) are used for transition, and each second pulley (303) is respectively set on the corresponding top plate (302), and the second pulley (303) is movably connected to the top plate (302).

6. The isostatic pressing graphite tantalum carbide coating deposition equipment for epitaxial substrates according to claim 1, characterized in that: The aggregated deposition assembly also includes; Two second shaft pin seats (304) are used for support, and each second shaft pin seat (304) is respectively disposed on one side of the corresponding second guide plate (3). The second shaft pin seat (304) is detachably connected to the connecting plate (101). Two rotatable vertical plates (305), each of which is respectively mounted on a corresponding second shaft pin seat (304) and is movably connected to the second shaft pin seat (304) via a shaft pin; Each of the second hydraulic rods (306) passes through the corresponding vertical plate (305) and extends to the top plate (302), where it is movably connected to the top plate (302) via a pivot pin.

7. The isostatic pressing graphite tantalum carbide coating deposition equipment for epitaxial substrates according to claim 2, characterized in that: The two guide grooves (107) are staggered, and the cross-sectional shapes of the two guide grooves (107) are combined to form a cross shape. The first heating plate (104) and the second heating plate (105) are slidably connected to the guide grooves (107) respectively.

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