Mask, display panel and preparation method of mask

Abstract

The embodiment of the present application provides a mask, a display panel and a preparation method of the mask, and relates to the technical field of display equipment. The mask comprises a frame, a supporting strip, a shielding strip and a mask strip; the supporting strip, the shielding strip and the mask strip are all arranged on the frame; the shielding strip comprises a first region; the mask strip comprises a second region; the projection of the first region and the second region along the thickness direction of the mask exists at least partial overlap; the first region of the shielding strip is provided with a first positioning hole penetrating through the thickness direction thereof; the second region of the mask strip is provided with a second positioning hole penetrating through the thickness direction thereof; the projection of the first positioning hole and the second positioning hole along the thickness direction of the mask exists at least partial overlap. The application can greatly improve the alignment accuracy of the shielding strip, and the shielding strip can more accurately shield the display region of the product.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of display devices, in particular to a mask plate, a display panel and a preparation method of the mask plate. BACKGROUND

[0002] With the development of display panel manufacturing technology, when evaporating an organic layer, the light-emitting layer and the compensation layer have very high evaporation requirements, and the whole high-precision metal mask plate is completed by screen printing.

[0003] In related technologies, a high-precision metal mask plate includes a shielding strip, a supporting strip, a precision mask strip and a frame. However, in related technologies, the screen printing alignment of the shielding strip is only controlled by the alignment holes close to the inner frame of the frame, and the alignment accuracy is low, and the display area that is intended to be achieved cannot be accurately shielded by the shielding strip, which is not conducive to the design of narrow-frame products. SUMMARY

[0004] In order to overcome the technical problems mentioned in the above technical background, the embodiments of the present application provide a mask plate, which comprises:

[0005] a frame;

[0006] a supporting strip, which is arranged on the frame and extends in a first direction;

[0007] a shielding strip, which is arranged on the frame and extends in a second direction;

[0008] a mask strip, which is arranged on the frame and extends in the second direction; wherein

[0009] the first direction intersects the second direction; the supporting strip, the shielding strip and the mask strip are arranged in a stacking manner in the thickness direction of the mask plate; the shielding strip comprises a first region, the mask strip comprises a second region, and the projections of the first region and the second region in the thickness direction of the mask plate at least partially overlap; and further comprising:

[0010] a first positioning hole, which is arranged in the first region and penetrates the shielding strip in the thickness direction of the mask plate;

[0011] a second positioning hole, which is arranged in the second region and penetrates the mask strip in the thickness direction of the mask plate; wherein the projections of the first positioning hole and the second positioning hole in the thickness direction of the mask plate at least partially overlap.

[0012] In a possible implementation manner, the opening area of the first positioning hole is greater than the opening area of the second positioning hole.

[0013] Preferably, the geometric center of the second positioning hole is projected on the first positioning hole along the thickness direction of the mask plate.

[0014] In a possible implementation, the shape of the projection of the first positioning hole and the shape of the projection of the second positioning hole are the same along the thickness direction of the mask plate.

[0015] Preferably, the projection of the first positioning hole and the projection of the second positioning hole are both circular along the thickness direction of the mask plate.

[0016] Preferably, the projection of the geometric center of the first positioning hole and the projection of the geometric center of the second positioning hole overlap along the thickness direction of the mask plate.

[0017] In a possible implementation, the support strip comprises a third region, which overlaps at least part of the first region and at least part of the second region along the thickness direction of the mask plate; the third region of the support strip is provided with a third positioning hole penetrating through the thickness direction thereof, and the geometric center of the second positioning hole and the geometric center of the first positioning hole are both located in the center of the third positioning hole along the thickness direction of the mask plate.

[0018] In a possible implementation, the opening area of the third positioning hole is greater than the opening area of the first positioning hole.

[0019] Preferably, the third positioning hole is square.

[0020] In a possible implementation, the shielding strip comprises a first side and a second side extending along the second direction, the first side is provided with a first protrusion extending in the opposite direction of the first direction, the second side is provided with a second protrusion and a third protrusion extending along the first direction, the number of the first protrusions is equal to the number of the second protrusions, and the length of the first protrusion is greater than the length of the second protrusion.

[0021] Preferably, the number of the second protrusions is equal to the number of the third protrusions.

[0022] Preferably, the length of the second protrusion extending along the first direction is equal to the length of the third protrusion extending along the first direction.

[0023] In a possible implementation, the thickness of the third protrusion is less than the thickness of the first protrusion.

[0024] In a possible implementation, the contact position of the shielding strip and the support strip is at least partially welded.

[0025] In a possible implementation, the application further provides a preparation method of the mask plate, the method comprising:

[0026] providing a frame;

[0027] arranging a support strip on the frame along a first direction, arranging a shielding strip on the frame along a second direction, and arranging a mask strip on the frame along the second direction; the first direction intersects the second direction; the support strip, the shielding strip, and the mask strip are arranged in a stacking manner along a thickness direction of the mask plate; the shielding strip comprises a first region, and the mask strip comprises a second region; a projection of the first region and the second region along the thickness direction of the mask plate at least partially overlaps; the first region of the shielding strip is provided with a first positioning hole penetrating through a thickness direction thereof, and the second region of the mask strip is provided with a second positioning hole penetrating through a thickness direction thereof; a projection of the first positioning hole and the second positioning hole along the thickness direction of the mask plate at least partially overlaps.

[0028] In a possible implementation, the application further provides a display panel comprising the mask plate described in the application.

[0029] Compared with the related art, the application has at least the following beneficial effects:

[0030] The mask plate, the display panel, and the preparation method of the mask plate provided by the application can greatly improve the positioning accuracy of the shielding strip and the mask strip by aligning the first positioning hole in the first region of the shielding strip with the second positioning hole in the second region of the mask strip, and make the pattern formed by evaporation more accurate, thereby being more conducive to the design of narrow-frame products. BRIEF DESCRIPTION OF DRAWINGS

[0031] In order to more clearly illustrate the technical solutions of the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some of the embodiments of the application, and therefore should not be considered as a limitation to the scope. For those skilled in the art, other related drawings can also be obtained without creative labor.

[0032] Figure 1 a top view of the mask plate provided by an embodiment of the application;

[0033] Figure 2 a top view of the shielding strip provided by an embodiment of the application;

[0034] Figure 3 a top view of the mask strip provided by an embodiment of the application;

[0035] Figure 4A front cross-sectional view of the first and second positioning holes when they partially overlap, according to an embodiment of this application;

[0036] Figure 5 A front cross-sectional view of a first positioning hole exposing a second positioning hole, as provided in an embodiment of this application;

[0037] Figure 6 A front cross-sectional view of the first and second positioning holes when their centers overlap, according to an embodiment of this application.

[0038] Figure 7 A partial top view of a support strip provided in an embodiment of this application;

[0039] Figure 8 For this application Figure 1 The cross-sectional view along the thickness direction at point M where the first positioning hole and the second positioning hole are aligned when the support strip is located between the shielding strip and the mask strip, according to the embodiment shown;

[0040] Figure 9 For this application Figure 1 The cross-sectional view along the thickness direction at point M where the first and second positioning holes are aligned when the support bar is located closest to the first layer of the frame, as shown in the embodiment.

[0041] Figure 10 A schematic diagram of the front structure of a shielding strip provided in an embodiment of this application;

[0042] Figure 11 This is a schematic flowchart of a mask preparation method provided in an embodiment of this application.

[0043] Reference numerals: 1. Frame; 2. Mask strip; 21. Second region; 211. Second positioning hole; 3. Masking strip; 31. First region; 301. First side; 302. Second side; 311. First positioning hole; 32. First protrusion; 33. Second protrusion; 34. Third protrusion; 4. Support strip; 41. Third region; 411. Third positioning hole. Detailed Implementation

[0044] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0045] Therefore, the following detailed description of embodiments of the application provided in the accompanying drawings is not intended to limit the scope of the application as claimed, but merely represents selected embodiments of the application. Based on the embodiments in the application, all other embodiments obtained by those of ordinary skill in the art without creative labor are within the scope of protection of the application.

[0046] It should be noted that similar reference numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0047] In the description of the application, it should be noted that the terms "upper", "lower", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship when the product of the application is usually placed, only for the convenience of describing the application and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the application. In addition, the terms "first", "second", etc. are only used for differentiation and cannot be understood as indicating or implying relative importance.

[0048] It should be noted that the different features in the embodiments of the application can be combined with each other without conflict.

[0049] Please refer to Figure 1 The application provides a mask, which comprises a frame 1, a support strip 4, a shielding strip 3 and a mask strip 2.

[0050] The frame 1 is a frame-shaped structure with a hollow middle area, which serves as a support frame for the support strip 4, the shielding strip 3 and the mask strip 2, and plays a supporting and fixing role for the support strip 4, the shielding strip 3 and the mask strip 2.

[0051] The support strip 4 is arranged on the frame 1 and extends along a first direction A (for example, the direction indicated by the arrow A in the middle). Figure 1 For example, the two ends of the support strip 4 are connected to the frame 1 respectively.

[0052] In the embodiment, the support strip 4 can be multiple, and multiple support strips 4 are parallel to each other and arranged in sequence with intervals along a second direction B (for example, the direction indicated by the arrow B in the middle). Figure 1 The multiple support strips 4 can be fixed on the frame 1 by welding, and the multiple support strips 4 can play a supporting role for the mask strip 2.

[0053] The shielding strip 3 is disposed on the frame 1 and extends along a second direction B, which intersects with the first direction A. For example, both ends of the shielding strip 3 are respectively connected to the frame 1.

[0054] Preferably, the shielding strip 3 is perpendicular to the support strip 4. In this embodiment, there can be multiple shielding strips 3, which are parallel to each other and arranged at intervals along the first direction A. The multiple shielding strips 3 can be fixed to the frame 1 by welding.

[0055] The mask strip 2 is disposed on the frame 1 and extends along the second direction B. For example, both ends of the mask strip 2 are respectively connected and fixed to the frame 1.

[0056] The mask strip 2 includes a vapor deposition area and a blocking area. The vapor deposition area may have patterned openings or grids to allow vapor deposition material to pass through, and the blocking area is used to block vapor deposition material from passing through.

[0057] In this embodiment, the mask strip 2, the blocking strip 3, and the support strip 4 can be stacked along the thickness direction of the mask. In the direction in which the mask strip 2, the blocking strip 3, and the support strip 4 are stacked, the projection of the blocking area of ​​the mask strip 2 may overlap with the projection of the blocking strip 3 and / or the projection of the support strip 4.

[0058] In this embodiment, there can be multiple mask strips 2, which are parallel to each other and arranged sequentially along the first direction A. The multiple mask strips 2 and multiple shielding strips 3 are alternately arranged along the first direction A. The multiple mask strips 2 can be fixed to the frame 1 by welding; for example, both ends of the mask strips 2 are respectively connected to the frame 1.

[0059] Please refer to Figure 2 The shielding strip 3 includes a first region 31; please refer to Figure 3 The mask strip 2 includes a second region 21, and the projections of the first region 31 and the second region 21 along the thickness direction of the mask plate at least partially overlap (e.g., Figure 1 (The circular area indicated by the middle arrow N).

[0060] It also includes: a first positioning hole 311 and a second positioning hole 211. The first positioning hole 311 is disposed in the first region 31 and penetrates the masking strip 3 along the thickness direction of the mask. The second positioning hole 211 is disposed in the second region 21 and penetrates the masking strip 3 along the thickness direction of the mask. The first positioning hole and the second positioning hole can be used to assist in positioning when setting the masking strip 2 and the masking strip 3. For example, please refer to...Figure 4 When the projection of the first positioning hole 311 and the projection of the second positioning hole 211 along the thickness direction of the mask plate exist at least partial overlap or the overlap degree of the projection of the first positioning hole 311 and the projection of the second positioning hole 211 meets a preset condition, it is determined that the relative position of the shielding strip 3 and the mask strip 2 meets the alignment requirement. The preset condition can be set according to actual requirements.

[0061] In one example, referring again to Figure 4 When the shielding strip 3 and the mask strip 2 are installed on the frame 1, a CCD (Charge Coupled Device) camera can be used to shoot and identify the first positioning hole 311 in the shielding strip 3 and the second positioning hole 211 in the mask strip 2 in the direction indicated by arrow C in Figure 4 According to the shooting result, it is determined whether the projection of the first positioning hole 311 and the projection of the second positioning hole 211 exist at least partial overlap or the overlap degree of the projection of the first positioning hole 311 and the projection of the second positioning hole 211 meets a preset condition.

[0062] Optionally, the first positioning hole 311 and the second positioning hole 211 can be multiple, and the multiple first positioning holes 311 and the multiple second positioning holes 211 correspond one by one. The second region 21 of the mask strip 2 is the shielding region mentioned above, and the first region 31 of the shielding strip 3 is a region shielding at least part of the corresponding second region 21 of the mask strip 2.

[0063] Along the thickness direction of the mask plate, the support strip 4, the shielding strip 3 and the mask strip 2 can be stacked in sequence, or the shielding strip 3, the support strip 4 and the mask strip 2 can be stacked in sequence.

[0064] Based on the above design, in the scheme provided in the embodiment, by aligning the first positioning hole 311 on the first region 31 of the shielding strip 3 with the second positioning hole 211 on the second region 21 of the mask strip 2, the positioning accuracy of the shielding strip 3 and the mask strip 2 can be greatly improved, the pattern formed by evaporation is more accurate, and thus it is more conducive to the design of narrow frame products.

[0065] In some possible implementations, referring again to Figure 4 As long as the projection of the first positioning hole 311 and the projection of the second positioning hole 211 exist overlap or the overlap degree of the projection of the first positioning hole 311 and the projection of the second positioning hole 211 meets a preset condition along the thickness direction of the mask plate, it is considered that the shielding strip 3 and the mask strip 2 meet the alignment accuracy requirement.

[0066] In another possible implementation, referring to Figure 5 , the geometric center of the second positioning hole 211 is projected in the first positioning hole 311 along the thickness direction of the mask plate. By setting the first positioning hole 311 to fully expose the second positioning hole 211, the positioning accuracy of the first positioning hole 311 and the second positioning hole 211 can be improved.

[0067] In yet another possible implementation, referring to Figure 6 , the geometric center of the first positioning hole 311 is projected in the geometric center of the second positioning hole 211 along the thickness direction of the mask plate. The most ideal case of the alignment of the first positioning hole 311 and the second positioning hole 211 is that the geometric center of the first positioning hole 311 is projected in the geometric center of the second positioning hole 211. Therefore, by setting the geometric center of the first positioning hole 311 to be projected in the geometric center of the second positioning hole 211, the alignment accuracy of the first positioning hole 311 and the second positioning hole 211 can be further improved.

[0068] In a possible implementation, referring again to Figure 4 , the opening area of the first positioning hole 311 is larger than the opening area of the second positioning hole 211. Since the second positioning hole 211 opened on the second area 21 of the mask strip 2 is too large, it may affect the performance of the mask plate, and therefore, by setting the second positioning hole 211 to be relatively smaller than the first positioning hole 311, the influence of the second positioning hole 211 on the performance of the mask strip 2 can be reduced. For example, the diameter of the first positioning hole 311 can be set to 0.05mm-0.1mm, and the diameter of the second positioning hole 211 can be set to 0.02mm-0.05mm.

[0069] Since the CCD camera captures the coordinate information of the center of the first positioning hole 311 and the coordinate information of the center of the second positioning hole 211 from the direction close to the frame 1 to the direction away from the frame 1, and the mask strip 2 is arranged in the direction away from the frame 1, and the shielding strip 3 is arranged in the direction close to the frame 1. Therefore, by setting the second positioning hole 211 to be smaller than the first positioning hole 311, the first positioning hole 311 can be exposed, thereby making it more convenient to detect whether the first positioning hole 311 and the second positioning hole 211 are accurately aligned.

[0070] In a possible implementation, the shape of the projection of the first positioning hole 311 and the shape of the projection of the second positioning hole 211 are the same along the thickness direction of the mask plate. In some examples, the shape of the projection of the first positioning hole 311 and the shape of the projection of the second positioning hole 211 can both be polygonal, and in other examples, the shape of the projection of the first positioning hole 311 and the shape of the projection of the second positioning hole 211 can both be circular. By setting the shapes of the first positioning hole 311 and the second positioning hole 211 to be the same, the same method is used to obtain the center of the first positioning hole 311 and the center of the second positioning hole 211, thereby facilitating the obtaining of the center of the first positioning hole 311 and the center of the second positioning hole 211, and further facilitating the alignment of the first positioning hole 311 and the second positioning hole 211.

[0071] Preferably, the projection of the first positioning hole 311 and the projection of the second positioning hole 211 are both circular along the thickness direction of the mask plate. Since it is easier to obtain the center of a circle, it is easier to obtain the center of the first positioning hole 311 and the center of the second positioning hole 211, thereby further improving the alignment accuracy of the first positioning hole 311 and the second positioning hole 211.

[0072] In a possible implementation, please refer to Figure 7 The support strip 4 includes a third region 41, which overlaps at least part of the first region 31 and at least part of the second region 21 along the thickness direction of the mask plate (as shown by the elliptical region indicated by arrow M in Figure 1 The third region 41 of the support strip 4 is provided with a third positioning hole 411 that penetrates the thickness direction thereof, please refer to Figure 8 The third positioning hole 411 exposes at least the geometric center of the second positioning hole 211 and the geometric center of the first positioning hole 311 along the thickness direction of the mask plate.

[0073] The third region 41 of the support strip 4 is a region that shields part of the second region 21 of the mask strip 2, and the third region 41 of the support strip 4 and the first region 31 of the shielding strip 3 together completely shield the second region 21 of the mask strip 2.

[0074] In the thickness direction of the mask plate, there is an area where the support strip 4, the shielding strip 3 and the mask strip 2 overlap. Since the alignment of the first positioning hole 311 and the second positioning hole 211 is detected by the CCD camera capturing the information of the first positioning hole 311 and the second positioning hole 211 from the frame 1 to the direction away from the frame 1, and the mask strip 2 is arranged on the layer farthest away from the frame 1. Therefore, in the position where the support strip 4 overlaps with the mask strip 2 and the shielding strip 3, the third area 41 of the support strip 4 will shield the alignment of the first positioning hole 311 and the second positioning hole 211. Therefore, a third positioning hole 411 needs to be arranged in the third area 41 of the support strip 4, and the third positioning hole 411 needs to expose at least the center of the second positioning hole 211 and the center of the first positioning hole 311, so that the third area 41 of the support strip 4 does not affect the alignment of the first positioning hole 311 and the second positioning hole 211 in the position where the support strip 4, the mask strip 2 and the shielding strip 3 overlap. In this way, more groups of the first positioning hole 311 and the second positioning hole 211 can be aligned, and the shielding strip 3 and the mask strip 2 can be positioned more accurately.

[0075] In a possible implementation, the opening area of the third positioning hole 411 is greater than the opening area of the first positioning hole 311. Please refer again to Figure 8 When the support strip 4 is located between the shielding strip 3 and the mask strip 2, the opening area of the third positioning hole 411 is greater than the opening area of the first positioning hole 311, so that the first positioning hole 311 is completely exposed by the third positioning hole 411, and the CCD camera can more easily capture the information of the center of the first positioning hole 311 and the information of the center of the second positioning hole 211 from the direction of arrow C, thereby facilitating the alignment of the first positioning hole 311 and the second positioning hole 211.

[0076] Please refer to Figure 9 When the support strip 4 is located on the layer closest to the frame 1, the third positioning hole 411 completely exposes the first positioning hole 311 and the second positioning hole 211, and the CCD camera can more easily capture the information of the center of the first positioning hole 311 and the information of the center of the second positioning hole 211 from the direction of arrow C, thereby facilitating the alignment of the first positioning hole 311 and the second positioning hole 211.

[0077] Preferably, the third positioning hole 411 is square. The third positioning hole 411 can be a circular hole or a polygonal hole, and preferably a square hole. By arranging the third positioning hole 411 to be square, the center of the first positioning hole 311 and the center of the second positioning hole 211 can be more easily exposed.

[0078] In a possible implementation form, referring again to Figure 2 , the shielding strip 3 comprises a first side surface 301 and a second side surface 302 extending along the second direction B, the first side surface 301 is provided with first protrusions 32 extending along the opposite direction of the first direction A, the second side surface 302 is provided with second protrusions 33 and third protrusions 34 extending along the first direction A, the number of the first protrusions 32 is equal to the number of the second protrusions 33, and the length of the first protrusions 32 extending along the opposite direction of the first direction A is greater than the length of the second protrusions 33 extending along the first direction A.

[0079] The first region 31 of the shielding strip 3 comprises the first protrusions 32, the second protrusions 33 and the third protrusions 34, the first protrusions 32 and the second protrusions 33 can be oppositely arranged, and the total number of the second protrusions 33 and the third protrusions 34 on the second side surface 302 is greater than the total number of the first protrusions 32 on the first side surface 301. Therefore, the length of the first protrusions 32 extending along the opposite direction of the first direction A is set to be greater than the length of the second protrusions 33 extending along the first direction A, i.e. Figure 2 D1>D2 in the above formula, the weight of a single first protrusion 32 can be increased, so that the total weight of the first protrusions 32 on the first side surface 301 can be equivalent to the total weight of the second protrusions 33 and the third protrusions 34 on the second side surface 302, so that the shielding strip 3 can be more balanced, and the possibility of the shielding strip 3 overturning can be reduced.

[0080] Preferably, referring again to Figure 2 , the number of the second protrusions 33 is equal to the number of the third protrusions 34. One second protrusion 33 is arranged, and one third protrusion 34 is correspondingly arranged, so that the second protrusions 33 and the third protrusions 34 are arranged more regularly, and the second protrusions 33 and the third protrusions 34 are more convenient to arrange.

[0081] Preferably, referring again to Figure 2 , the length of the second protrusions 33 extending along the first direction A is equal to the length of the third protrusions 34 extending along the first direction A. The length of the second protrusions 33 and the length of the third protrusions 34 are set to be the same, which can further facilitate the arrangement of the second protrusions 33 and the third protrusions 34, and the manufacturing of the shielding strip 3 is more convenient.

[0082] In a possible implementation form, referring to Figure 10 , the thickness H2 of the third protrusions 34 is less than the thickness H1 of the first protrusions 32. That is Figure 10H1>H2, by setting the thickness H2 of the third protrusion 34 to be smaller than the thickness H1 of the first protrusion 32, the total weight of the second protrusion 33 and the third protrusion 34 on the second surface can be relatively reduced, so that the shielding strip 3 can be more balanced, and the possibility of the shielding strip 3 being turned over can be further reduced.

[0083] It is worth noting that the length of the first protrusion 32 extending in the opposite direction of the first direction A can be set to be greater than the length of the second protrusion 33 extending in the first direction A, the thickness of the third protrusion 34 and / or the second protrusion 33 can be set to be smaller than the thickness of the first protrusion 32, or both the length of the first protrusion 32 extending in the opposite direction of the first direction A can be set to be greater than the length of the second protrusion 33 extending in the first direction A, and the thickness of the third protrusion 34 and / or the second protrusion 33 can be set to be smaller than the thickness of the first protrusion 32. In summary, the shielding strip 3 can be balanced as a whole, and can not be turned over.

[0084] In a possible implementation, the contact position of the shielding strip 3 and the support strip 4 is at least partially welded. The shielding strip 3 and the support strip 4 intersect, so there is an overlapping position between the shielding strip 3 and the support strip 4. By welding the contact position of the shielding strip 3 and the support strip 4 at least partially, the stability of the connection between the shielding strip 3 and the support strip 4 can be greatly improved, so that the stability of the mesh surface (evaporation area) of the mask strip 2 can be increased. The welding position should not affect the normal performance of the mask, so as to achieve better shielding and supporting effect, increase the evaporation yield, and also improve the service life of the mask.

[0085] In a possible implementation, please refer to Figure 11 The application further provides a preparation method of a mask, and the method comprises the following steps:

[0086] S10: providing a frame 1.

[0087] In the embodiment, the size of the frame 1 can be selected according to actual needs, the frame 1 is preferably rectangular, and the material of the frame 1 can be metal or other high-temperature-resistant and corrosion-resistant materials.

[0088] S11: disposing the support strip 4 on the frame 1 along a first direction A, disposing the shielding strip 3 on the frame 1 along a second direction B, and disposing the mask strip 2 on the frame 1 along the second direction B; wherein the first direction A intersects the second direction B; the support strip 4, the shielding strip 3, and the mask strip 2 are disposed in a stacking manner along a thickness direction of the mask plate; the shielding strip 3 comprises a first region 31, and the mask strip 2 comprises a second region 21; a projection of the first region 31 and the second region 21 along the thickness direction of the mask plate at least partially overlaps; the first region 31 of the shielding strip 3 is provided with a first positioning hole 311 penetrating through a thickness direction of the first region 31, and the second region 21 of the mask strip 2 is provided with a second positioning hole 211 penetrating through a thickness direction of the second region 21; a projection of the first positioning hole 311 and the second positioning hole 211 along the thickness direction of the mask plate at least partially overlaps.

[0089] In the embodiment, the number of the support strip 4, the shielding strip 3, and the mask strip 2 can be selected according to actual needs. The support strip 4 can be sequentially welded on the frame 1 along the second direction B by welding, the shielding strip 3 can be sequentially welded on the frame 1 along the first direction A by welding, or the shielding strip 3 can be sequentially welded on the frame 1 along the first direction A by welding, and then the support strip 4 can be sequentially welded on the frame 1 along the second direction B by welding. Finally, the mask strip 2 can be welded on the frame 1 along the first direction A.

[0090] In this process, the coordinate information of the first positioning hole 311 and the coordinate information of the second positioning hole 211 are captured by a CCD camera. Whether the first positioning hole 311 and the second positioning hole 211 at least partially overlap, that is, whether the first positioning hole 311 and the second positioning hole 211 are accurately aligned, is detected based on the information of the shielding strip 3 and the mask strip 2 captured by the CCD camera. Finally, when the shielding strip 3 and the mask strip 2 are installed on the frame 1, the first positioning hole 311 and the second positioning hole 211 at least partially overlap.

[0091] In summary, in the scheme provided in the embodiment, the first positioning hole 311 on the first region 31 of the shielding strip 3 and the second positioning hole 211 on the second region 21 of the mask strip 2 are aligned, which greatly improves the positioning accuracy of the shielding strip 3 and the mask strip 2, makes the pattern formed by evaporation more accurate, and is more conducive to the design of narrow-frame products.

[0092] In a possible implementation, the application further provides a display panel comprising the mask plate. Since the mask strip 2 of the mask plate is positioned by the first positioning hole 311 on the shielding strip 3 and the second positioning hole 211 on the mask strip 2, the shielding strip 3 can shield the corresponding shielding area on the mask strip 2 more accurately, thereby improving the screen precision of the mask plate, improving the evaporation yield, and ensuring that the display area of the display panel is accurately shielded by the high-precision shielding strip 3. Therefore, the display panel has better performance.

[0093] Any combination of the technical features of the above-described embodiments can be made. In order to make the description simple, all possible combinations of the technical features in the above-described embodiments are not described, however, as long as the combination of the technical features does not exist, it should be considered as the scope of the description.

[0094] The above-described embodiments only express several implementation manners of the application, and the description is more specific and detailed, but it should not be understood as a limitation on the scope of the patent. It should be pointed out that, for those skilled in the art, without departing from the concept of the application, some modifications and improvements can be made, which are all within the protection scope of the application. Therefore, the protection scope of the patent of the application should be subject to the appended claims.

Claims

1. A photomask, characterized in that, The mask includes: frame; A support bar, which is disposed on the frame and extends along a first direction; A shielding strip is disposed on the frame and extends along a second direction; A mask strip, the mask strip being disposed on the frame and extending along the second direction; wherein, The first direction intersects with the second direction; the support strip, the shielding strip, and the mask strip are stacked along the thickness direction of the mask; the shielding strip includes a first region, the mask strip includes a second region, and the projections of the first region and the second region along the thickness direction of the mask at least partially overlap; it also includes: A first positioning hole is provided in the first region and extends through the masking strip along the thickness direction of the mask. The second positioning hole is disposed in the second region and penetrates the mask strip along the thickness direction of the mask; wherein the projections of the first positioning hole and the second positioning hole along the thickness direction of the mask at least partially overlap. The shielding strip includes a first side and a second side extending along the second direction. The first side has a first protrusion extending in the opposite direction to the first direction, and the second side has a second protrusion extending along the first direction. The length of the first protrusion is greater than the length of the second protrusion.

2. The photomask according to claim 1, characterized in that, The opening area of ​​the first positioning hole is larger than the opening area of ​​the second positioning hole.

3. The photomask according to claim 1, characterized in that, Along the thickness direction of the mask, the projection of the geometric center of the second positioning hole is located within the first positioning hole.

4. The photomask according to claim 1, characterized in that, Along the thickness direction of the mask, the shape of the projection of the first positioning hole is the same as the shape of the projection of the second positioning hole.

5. The photomask according to claim 1, characterized in that, Along the thickness direction of the mask, the projections of the first positioning hole and the second positioning hole are both circular.

6. The photomask according to claim 1, characterized in that, Along the thickness direction of the mask, the projection of the geometric center of the first positioning hole overlaps with the projection of the geometric center of the second positioning hole.

7. The photomask according to any one of claims 1-6, characterized in that, The support strip includes a third region. Along the thickness direction of the mask, the third region overlaps with at least a portion of the first region and at least a portion of the second region. The third region of the support strip is provided with a third positioning hole that penetrates its thickness direction. Along the thickness direction of the mask, the projection of the geometric center of the second positioning hole and the projection of the geometric center of the first positioning hole are both located within the third positioning hole.

8. The photomask according to claim 7, characterized in that, The opening area of ​​the third positioning hole is larger than the opening area of ​​the first positioning hole. The third positioning hole is square.

9. The photomask according to any one of claims 1-6, characterized in that, The number of the first protrusion is equal to the number of the second protrusion.

10. The photomask according to claim 1, characterized in that, The second side is provided with a third protrusion extending along the first direction, and the number of the second protrusion and the number of the third protrusion are equal.

11. The photomask according to claim 10, characterized in that, The length of the second protrusion extending along the first direction is equal to the length of the third protrusion extending along the first direction.

12. The photomask according to claim 10, characterized in that, The thickness of the third protrusion is less than the thickness of the first protrusion.

13. The photomask according to claim 1, characterized in that, The contact points between the shielding strip and the support strip are at least partially welded.

14. A method for preparing a photomask, characterized in that, The method includes: Provide a framework; A support strip is disposed on the frame along a first direction, a shielding strip is disposed on the frame along a second direction, and a mask strip is disposed on the frame along a second direction; wherein the first direction and the second direction intersect; the support strip, the shielding strip, and the mask strip are stacked along the thickness direction of the mask; the shielding strip includes a first region, the mask strip includes a second region, and the projections of the first region and the second region along the thickness direction of the mask overlap at least partially; the first region of the shielding strip is provided with a first positioning hole penetrating its thickness direction, and the second region of the mask strip is provided with a second positioning hole penetrating its thickness direction; the projections of the first positioning hole and the second positioning hole along the thickness direction of the mask overlap at least partially; the shielding strip includes a first side surface and a second side surface extending along the second direction, the first side surface is provided with a first protrusion extending in the opposite direction to the first direction, and the second side surface is provided with a second protrusion extending along the first direction, the length of the first protrusion being greater than the length of the second protrusion.

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