A support paddle and coating system

Abstract

The application discloses a supporting paddle and a coating system, and the supporting paddle is used for carrying a boat structure to enter and exit a hot furnace, wherein the boat structure has a conductive boat foot, the supporting paddle comprises a paddle body and an electrode, the paddle body is arranged through a furnace door of the hot furnace, and the paddle body is used for supporting the boat structure; a part of the electrode is arranged on the paddle body, and a part of an end of the electrode is arranged out of the paddle body and used for contacting the conductive boat foot. The supporting paddle can support the boat structure, can ensure that the electrode is in close contact with the boat structure, can ensure that the energy of a radio frequency power supply can be smoothly fed into the boat structure, can ensure that the boat structure is not discharged unevenly, and can ensure that the silicon wafer is uniformly coated, so that the final conversion efficiency of the battery piece is ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing, in particular to a supporting paddle and a coating system. BACKGROUND

[0002] PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment is applied in the multi-process of the battery piece production link, such as the polycrystalline silicon layer coating, the front surface silicon nitride anti-reflection film and the back surface silicon nitride anti-reflection film, etc. When the silicon wafer is coated in the coating equipment, the silicon wafer is usually placed on the graphite boat structure. After the graphite boat is connected with the conductive electrode rod, the graphite boat can receive the power energy fed by the external radio frequency power supply. The existing graphite boat electrode is connected with the graphite boat by inserting the electrode from the furnace tail, the conductive rod is cantilevered, and the positive and negative electrode heads are inserted into the electrode hole in the middle of the end face of the boat. Whether the connection between the electrode and the graphite boat is tight determines whether the radio frequency power energy of the external power supply can be fully fed into the graphite boat. The electrode rod of the existing structure will be deformed in the process of use, which causes the electrode head to be not tightly connected with the graphite boat, so that the radio frequency power energy cannot be smoothly fed into the graphite boat, resulting in uneven discharge of the whole boat, poor film forming uniformity of the silicon wafer, and affecting the final conversion efficiency of the battery piece. SUMMARY

[0003] The first object of the present application is to provide a supporting paddle, which can support the boat structure and ensure that the electrode is tightly contacted with the boat structure, so as to ensure that the radio frequency power energy can be smoothly fed into the boat structure, the whole boat is evenly discharged, the film forming uniformity of the silicon wafer is good, and the final conversion efficiency of the battery piece is ensured.

[0004] The second object of the present application is to provide a coating system, which has simple structure, low manufacturing cost and high operation reliability.

[0005] In order to achieve the above technical effects, the technical scheme of the present application is as follows:

[0006] The present application discloses a supporting paddle, which is used for carrying a boat structure in and out of a hot furnace, the boat structure has a conductive boat foot, and the supporting paddle comprises a paddle body and an electrode.

[0007] The support paddle of the embodiment of the present application has the following advantages: since one end of the electrode penetrates the paddle body from the surface of the paddle body and contacts the conductive boat leg of the boat structure, the support paddle not only bears the boat structure, but also provides a channel for energy feeding because the electrode on the support paddle contacts the conductive boat leg. Since the electrode and the conductive boat leg are in good contact, the energy of the radio frequency power source can be smoothly fed into the boat structure, ensuring uniform discharge of the boat structure and good uniformity of film formation of the silicon wafer, thereby ensuring the final conversion efficiency of the battery piece. In addition, during the process, it is difficult for the plasma gas to penetrate into the contact surface, so the probability of film formation on the contact surface is very small. Moreover, the electrode is arranged in the paddle body, and the paddle body provides support for the electrode, avoiding the problem of deformation of the existing cantilever electrode, so that abnormal contact between the electrode and the conductive boat leg is avoided.

[0008] In some embodiments, the electrode comprises: a conductive rod arranged in the paddle body, a first end of the conductive rod extending out of the paddle body and being used for being connected with the radio frequency power source; and an electrode contact part connected to a second end of the conductive rod, the electrode contact part penetrating the paddle body and contacting the conductive boat leg. The paddle body can support the conductive rod, the conductive rod is not prone to deformation, and the electrode contact part can be stably penetrated out of the paddle body, thereby ensuring the stability of the connection between the electrode and the conductive boat leg.

[0009] In some specific embodiments, the electrode contact part comprises: a flat section connected to the conductive rod and penetrating the paddle body; and a needle tip section, a large-diameter end of the needle tip section being connected to the flat section, and a small-diameter end of the needle tip section being used for being inserted into the conductive boat leg.

[0010] In some specific embodiments, the electrode contact part comprises a conductive block abutting against the conductive boat leg.

[0011] In some embodiments, the paddle body is a hollow structure, and a plurality of paddle bodies are arranged at intervals.

[0012] In some embodiments, the electrodes are arranged in pairs, and the electrodes arranged in pairs respectively contact the conductive boat legs of the boat structure.

[0013] The present application also discloses a film deposition system, a hot furnace, a boat structure and the support paddle described above, wherein the support paddle is used for bearing the boat structure.

[0014] The plating system has the following advantages. Before the process starts, the support paddle is outside the furnace. The boat moving manipulator first moves the boat structure filled with the sheets to the support paddle. The end of the electrode supports the support surface of the boat structure from the paddle body, and is inserted into the conductive boat foot of the boat structure. At this time, the support paddle not only supports the boat structure, but also the electrode on the support paddle contacts the conductive boat foot of the boat structure to provide a channel for energy input. Then the support paddle is moved horizontally into the furnace under the driving of the boat pushing mechanism. The relative position between the furnace door and the support paddle is fixed. When the furnace door tightly contacts the furnace, the boat pushing mechanism stops moving horizontally. During the plating process, the boat structure is placed on the support paddle and remains fixed. After the process ends, the support paddle and the furnace door are moved away from the furnace under the driving of the boat pushing mechanism. Then the boat moving manipulator moves the boat structure on the paddle away. In actual work, the boat pushing mechanism does not need to move up and down, and since the support paddle has the electrode, it is not necessary to install an electrode rod at the position of the furnace flange as in the prior art, which is beneficial to simplify the structure of the plating system.

[0015] In some embodiments, the boat structure comprises: a plurality of boat sheets arranged at intervals, at least one end of each boat sheet being provided with a boat ear; a plurality of conductive boat rods arranged in pairs, each conductive boat rod being arranged through the boat ears at the end of the boat structure; and a conductive boat foot mounted at both ends of the conductive boat rod, the conductive boat foot having a conductive matching part matched with the electrode. In actual assembly, when a plurality of sheets are placed on the boat sheets, the boat ears of a plurality of boat structures are then arranged through the conductive boat rods, and the conductive boat foot is mounted at both ends of the conductive boat rod. When the conductive boat foot is connected with the electrode, the two ends of the plurality of boat sheets can form a loop with the positive and negative electrodes of the radio frequency power supply to realize the plating process of the sheets.

[0016] In some specific embodiments, the conductive boat foot comprises a first matching groove and a second matching groove, the first matching groove being opened in a first direction, and the second matching groove being opened in a second direction, the first direction being perpendicular to the second direction, the first matching groove being used for accommodating the end of the conductive boat rod, and the second matching groove constituting the conductive matching part.

[0017] In some specific embodiments, each boat sheet is provided with a plurality of placement positions for placing the sheets, and each group of placement positions comprises a plurality of placement positions arranged at intervals along the length direction of the boat sheet. Each boat sheet can load more sheets, thereby facilitating to improve the production capacity of the plating system.

[0018] In some optional embodiments, a plurality of groups of placement positions are arranged at intervals along the width direction of the boat sheet. Each boat sheet can load more sheets, thereby facilitating to improve the production capacity of the plating system.

[0019] In some specific embodiments, the boat structure further comprises: an insulating boat rod, the insulating boat rod is at least one, the insulating boat rod is arranged in the plurality of boat pieces;Insulating boat feet are mounted on both ends of the insulating boat rod. The additional insulating boat rod and insulating boat feet can ensure the connection stability and insulation of the plurality of boat pieces, so as to ensure that the boat structure does not appear the phenomenon of boat piece shaking or even falling in the actual working process.

[0020] Additional aspects and advantages of the application will be set forth in part in the description which follows, and in part will become apparent to those skilled in the art upon examination of the following description and drawings. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is the structural schematic diagram of the support paddle of embodiment one of the application;

[0022] Figure 2 is the partial structural schematic diagram of Figure 1 ;

[0023] Figure 3 is the structural schematic diagram of the support paddle of embodiment two of the application;

[0024] Figure 4 is the side structural schematic diagram of the coating system using the support paddle shown in Figure 1 ;

[0025] Figure 5 is the front structural schematic diagram of the coating system using the support paddle shown in Figure 1 ;

[0026] Figure 6 is the structural schematic diagram of the boat structure in the coating system shown in Figure 4 ;

[0027] Figure 7 is the structural schematic diagram of the conductive boat foot of the boat structure shown in Figure 6 ;

[0028] Figure 8 is the side structural schematic diagram of the coating system using the support paddle shown in Figure 3 ;

[0029] Figure 9 is the front structural schematic diagram of the coating system using the support paddle shown in Figure 3 ;

[0030] Figure 10 is the side structural schematic diagram of the boat structure of embodiment three of the application;

[0031] Figure 11 is the structural schematic diagram of the bottom of the boat structure shown in Figure 10 ;

[0032] Reference signs:

[0033] 100, paddle body; 110, support surface; 200, electrode; 210, conductive rod; 220, electrode contact; 221, flat section; 222, needle tip section;

[0034] 300, furnace; 400, furnace door; 500, furnace end plate; 600, boat structure; 610, boat sheet; 611, boat ear; 612, placement site; 620, conductive boat rod; 630, conductive boat foot; 631, conductive matching part; 632, first matching groove; 640, insulating boat rod; 650, insulating boat foot. DETAILED DESCRIPTION

[0035] In order to make the technical problems solved by the present application, the technical solutions adopted and the technical effects reached more clear, the technical solutions of the present application will be further described below in combination with the drawings and through specific embodiments.

[0036] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms “center”, “longitudinal”, “transverse”, “length”, “width”, “thickness”, “upper”, “lower”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inner”, “outer”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential” and the like are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0037] In addition, the features defined as “first” and “second” can explicitly or implicitly include one or more of the features, for distinguishing the description of the features, without order and without difference in importance. In the description of the present application, unless otherwise specified and limited, the meaning of “a plurality of” is two or more than two.

[0038] In the description of the present application, it should be noted that, unless otherwise specified and limited, the terms “mounting”, “connection”, “connecting” should be understood in a broad sense, for example, can be fixed connection, can also be detachable connection, or integrally connected; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0039] The specific structure of the support paddle of the embodiment of the present application will be described below with reference to the drawings. Figures 1-3 The specific structure of the support paddle of the embodiment of the present application will be described below with reference to the drawings.

[0040] The application discloses a support paddle, like Figures 1-3 As shown in the figure, the support paddle is used for carrying the boat structure 600 in and out of the hot furnace 300, and the two ends of the hot furnace 300 are matched with the furnace door 400 and the furnace tail plate 500. The boat structure 600 has a conductive boat foot 630, the support paddle comprises a paddle body 100 and an electrode 200, the paddle body 100 is arranged in the furnace door 400 of the hot furnace 300, and the paddle body 100 is used for supporting the boat structure 600; a part of the electrode 200 is arranged in the paddle body 100, and a part of the end of the electrode 200 penetrates out of the paddle body 100 and is used for contacting the conductive boat foot 630.

[0041] It can be understood that before the process starts, the support paddle is located outside the hot furnace 300, and one end of the support paddle close to the furnace door 400 is fixedly connected with a boat pushing module, and the boat moving manipulator firstly moves the boat structure 600 filled with the sheet to the support paddle, and the boat pushing module pushes the support paddle into the hot furnace 300 for processing. Since one end of the electrode 200 penetrates out of the surface of the paddle body 100 and contacts the conductive boat foot 630 of the boat structure 600, at this time, the support paddle not only plays a role of carrying the boat structure 600, but also the electrode 200 on the support paddle contacts the conductive boat foot 630 of the boat structure 600, thereby providing a channel for energy feeding. Since the contact between the electrode 200 and the conductive boat foot 630 is good, the energy of the radio frequency power source can be smoothly fed into the boat structure 600, the overall discharge of the boat structure 600 is ensured to be uniform, the film forming uniformity of the silicon sheet is good, and thus the final conversion efficiency of the battery sheet is ensured. In addition, in the process, the plasma gas is difficult to penetrate into the contact surface, so the probability of film plating on the contact surface is very small, and meanwhile, the electrode 200 is arranged in the paddle body 100, the paddle body 100 provides a supporting action for the electrode 200, thereby avoiding the technical problem that the existing electrode cantilever deforms, and thus the abnormal contact between the electrode 200 and the conductive boat foot 630 is avoided.

[0042] It needs to be additionally explained that in the actual working process, in the film plating process, the boat structure 600 is placed on the support paddle and kept fixed. After the process is completed, the support paddle and the furnace door 400 are driven by the boat pushing mechanism to move away from the hot furnace 300, at this time, the electrode 200 can move out of the hot furnace 300 along with the paddle body 100, and thus the end of the electrode 200 extending out of the support surface 110 of the boat structure 600 and the conductive boat foot 630 of the boat structure 600 can be conveniently cleaned outside, thereby avoiding the phenomenon that in the conventional equipment, the electrode contact part of the electrode rod is long-term located in the hot furnace and cannot be cleaned, and the long-term accumulated film layer affects the current transmission between the electrode rod and the graphite boat.

[0043] Preferably, the paddle body 100 has a supporting surface 110 for supporting the boat structure 600, and one end of the electrode 200 extends out of the supporting surface 110. In this way, the paddle body 100 can stably support the boat structure 600, and the electrode 200 and the conductive boat leg 630 can be in close contact, so that the plasma gas is difficult to penetrate into the contact surface. Of course, in other embodiments of the present application, one end of the electrode 200 can also extend out of the side wall of the paddle body 100 other than the supporting surface 110 to contact the conductive boat leg 630, which can be adjusted according to actual needs.

[0044] In some embodiments, as shown in Figure 1 and Figure 3 , the electrode 200 includes a conductive rod 210 and an electrode contact portion 220, the conductive rod 210 is arranged in the paddle body 100, the first end of the conductive rod 210 extends out of the paddle body 100 and is connected to the radio frequency power supply, and the electrode contact portion 220 is connected to the second end of the conductive rod 210, and the electrode contact portion 220 extends out of the paddle body 100 and contacts the conductive boat leg 630. It can be understood that, according to the above-mentioned electrode 200 extending out of the paddle body 100 and directly connected to the conductive boat leg 630, the connection stability between the two will directly affect the power-on condition of the boat structure 600. At the same time, the paddle body 100 can support the conductive rod 210, and the conductive rod 210 is not easy to deform, which can ensure that the electrode contact portion 220 stably extends out of the paddle body 100, thereby ensuring the connection stability of the electrode 200 and the conductive boat leg 630.

[0045] In some specific embodiments, as shown in Figure 1 , the extension direction of the electrode contact portion 220 is arranged perpendicular to the extension direction of the conductive rod 210. It can be understood that, in actual work process, the supporting surface 110 of the paddle body 100 usually horizontally supports the boat structure 600, and the extension direction of the electrode contact portion 220 is arranged perpendicular to the extension direction of the conductive rod 210, so that the electrode contact portion 220 is arranged in the vertical direction, so that when the boat moving manipulator moves the boat structure 600 to the paddle body 100, the electrode contact portion 220 can be in relatively smooth contact with the conductive boat leg 630.

[0046] In some specific embodiments, as shown in Figure 2As shown, the electrode contact portion 220 includes a flat section 221 and a needle tip section 222, the flat section 221 is connected with the conductive rod 210 and penetrates the paddle body 100, the large diameter end of the needle tip section 222 is connected with the flat section 221, and the small diameter end of the needle tip section 222 is used to be inserted into the conductive boat leg 630. It can be understood that when the boat structure 600 is moved to the paddle body 100 by the boat moving robot, the needle tip section 222 can be more smoothly inserted into the conductive boat leg 630, so as to facilitate the insertion of the electrode contact portion 220 and the conductive boat leg 630. In addition, the flat section 221 can improve the strength of the electrode contact portion 220 to some extent, so as to avoid the phenomenon of breaking of the electrode contact portion 220 in the working process. In addition, the small diameter end of the needle tip section 222 is wrapped by the conductive boat leg 630, avoiding the problem that the existing electrode rod is exposed outside, and the polycrystalline silicon film layer is grown on the conductive electrode rod, which will lead to the conduction of the conductive ring and the metal furnace door, thereby affecting the operation of the equipment.

[0047] In some embodiments, the electrode contact portion 220 includes a conductive block abutting against the conductive boat leg 630. The conductive block can stably contact the conductive boat leg 630, thereby ensuring that the boat structure 600 is stably supported and the energy is stably fed into the boat structure 600.

[0048] In some embodiments, as shown in Figure 1 and Figure 3 The paddle body 100 is a hollow structure, and a plurality of paddle bodies 100 are arranged at intervals. It can be understood that the hollow structure of the paddle body 100 facilitates the penetration of the electrode 200, and can reduce the weight of the support paddle, and the plurality of paddle bodies 100 can ensure the stable support of the boat structure 600.

[0049] In some embodiments, the paddle body 100 is a silicon carbide paddle. Of course, in other embodiments of the present application, other high-temperature-resistant materials can also be selected according to actual needs, and are not limited to the silicon carbide of the present embodiment.

[0050] In some embodiments, the electrodes 200 are arranged in pairs, and each pair of electrodes 200 includes a positive electrode and a negative electrode, and the positive electrode and the negative electrode are respectively in contact with the conductive boat leg 630 of the boat structure 600. The positive electrode and the negative electrode of the pair of electrodes 200 can be arranged on two paddle bodies 100 respectively. The positive electrode and the negative electrode of the pair of electrodes 200 can also be arranged at intervals on one paddle body 100, and correspond to the conductive boat leg 630 of the boat structure 600 respectively. It can be understood that when the length of the boat structure 600 increases, the simultaneous connection of the electrodes 200 at both ends of the boat structure 600 can make the whole boat structure 600 discharge uniformly, improve the uniformity of the silicon wafer film formation, and increase the final conversion efficiency of the battery sheet.

[0051] The following will be described with reference to Figures 4-11The specific structure of the coating system of the embodiment of the present application is described.

[0052] The present application also discloses a coating system, as shown in Figure 4 and Figure 8 The coating system comprises a furnace 300, a support paddle as described above, and at least one boat structure 600 placed on the support paddle. It can be understood that, since the coating system comprises the support paddle described above, before the process starts, the support paddle is located outside the furnace 300, and the boat-moving manipulator first moves the boat structure 600 filled with the sheet onto the support paddle. Since one end of the electrode 200 is supported by the support surface 110 of the paddle body 100 of the support paddle, the electrode 200 penetrates the paddle body 100 and is inserted into the conductive boat leg 630 of the boat structure 600. At this time, the support paddle not only serves as a carrier for the boat structure 600, but also the electrode 200 on the support paddle is in contact with the conductive boat leg 630 of the boat structure 600, thereby providing a channel for energy feeding. Then, the support paddle is moved horizontally into the furnace 300 under the driving of the boat-pushing mechanism, and the relative position between the furnace door 400 and the support paddle remains unchanged. When the furnace door 400 tightly abuts against the furnace 300, the horizontal movement of the boat-pushing mechanism stops. During the coating process, the boat structure 600 is kept fixed on the support paddle. After the process ends, the support paddle and the furnace door 400 are moved away from the furnace 300 under the driving of the boat-pushing mechanism. Then, the boat-moving manipulator moves the boat structure 600 on the support paddle away. Therefore, in the actual working process, the boat-pushing mechanism does not need to move up and down, and since the support paddle is provided with the electrode 200, it is not necessary to install an electrode rod at the position of the furnace opening flange as in the prior art, which is beneficial to simplify the structure of the coating system.

[0053] It should be noted that, the coating system of the embodiment is produced in a paddle-supported process, which avoids the up-and-down movement of the boat structure 600 in the furnace 300, reduces the consumption of the safety allowance between the boat structure 600 and the furnace 300, means that a larger boat structure 600 can be placed in the same size furnace 300, increases the sheet processing capacity, and is beneficial to improve the equipment productivity.

[0054] In some embodiments, as shown in Figures 6-7 and Figures 10-11As shown, the boat structure 600 comprises boat pieces 610, conductive boat rods 620 and conductive boat feet 630, the boat pieces 610 are arranged in intervals, each boat piece 610 is provided with boat ears 611 at at least one end, the conductive boat rods 620 are arranged in pairs, each conductive boat rod 620 is arranged through the boat ears 611 at one end of the boat structure 600. The conductive boat feet 630 are arranged at both ends of the conductive boat rods 620, and the conductive boat feet 630 are provided with conductive matching parts 631 which are matched with the electrodes 200. It can be understood that, in the actual assembly process, the sheet materials are placed on the boat pieces 610, then the boat ears 611 of the plurality of boat structures 600 are arranged through by the conductive boat rods 620, and the conductive boat feet 630 are arranged at both ends of the conductive boat rods 620, when the conductive boat feet 630 are connected with the electrodes 200, the two ends of the plurality of boat pieces 610 can form a loop with the positive and negative electrodes of the radio frequency power source to realize the sheet material coating process.

[0055] In some specific embodiments, two conductive boat rods 620 are arranged at both ends of the boat structure 600, and each conductive boat rod 620 is arranged through the boat ears 611 at one end of the boat structure 600.

[0056] In some alternative embodiments, two conductive boat rods 620 are arranged at the same end of the boat structure 600, and each conductive boat rod 620 is arranged through the boat ears 611 at one end of the boat structure 600.

[0057] It should be noted that, the boat ears 611 of the adjacent two boat pieces 610 are arranged in intervals, which has various possibilities in practice, for example, the boat ears 611 of the adjacent two boat pieces 610 are arranged at different ends of the boat pieces 610, specifically, the boat ears 611 of one boat piece 610 are arranged at a first end of the boat piece 610 along the length direction, and the boat ears 611 of another boat piece 610 are arranged at a second end of the boat piece 610 along the length direction; for another example, the boat ears 611 of the adjacent two boat pieces 610 are arranged at the same end of the boat pieces 610 but are arranged in intervals, specifically, the boat ears 611 of the two boat pieces 610 are arranged at a first end of the boat pieces 610 along the length direction, and the boat ears 611 of one boat piece 610 are arranged at the upper part of the boat piece 610, and the boat ears 611 of another boat piece 610 are arranged at the lower part of the boat piece 610. In addition, in other embodiments of the present application, the number of boat ears 611 on each boat piece 610 can be adjusted according to actual needs.

[0058] In some specific embodiments, the conductive boat leg 630 has a first matching groove 632 and a second matching groove, the first matching groove 632 is opened along a first direction, the second matching groove is opened along a second direction, the first direction and the second direction are perpendicular to each other, the first matching groove 632 is used to accommodate the end of the conductive boat rod 620, and the second matching groove constitutes the conductive matching part 631. It can be understood that the first matching groove 632 can ensure the stable matching of the conductive boat leg 630 and the conductive boat rod 620, ensure that the conductive boat leg 630 can smoothly feed the energy of the radio frequency power supply to the conductive boat rod 620, and thus ensure that the boat structure 600 is uniformly discharged. The second matching groove constitutes the conductive matching part 631, and the conductive boat leg 630 can wrap the end of the electrode 200 extending out of the paddle body 100. On the one hand, it avoids the problem that the existing electrode rod has a conductive ring part exposed outside, and after the polycrystalline silicon film layer is grown on the conductive electrode rod, the conductive ring and the metal furnace door are connected, thereby affecting the operation of the equipment. On the other hand, it ensures that the plasma gas is difficult to penetrate into the contact surface of the electrode 200 and the conductive boat rod 620, and the probability of film plating on the contact surface is very small, thereby reducing the probability of unstable conduction of the electrode 200 and the conductive boat rod 620 due to film plating on the contact surface.

[0059] In some specific embodiments, as shown in Figure 6 each boat piece 610 is provided with a placing position 612 for placing a sheet, and the placing position 612 includes a plurality of placing positions 612 arranged along the length direction of the boat piece 610. In this way, more sheets can be loaded on each boat piece 610, thereby facilitating the improvement of the production capacity of the film plating system.

[0060] In some more specific embodiments, the placing positions 612 are arranged in multiple groups along the width direction of the boat piece 610.

[0061] In some specific embodiments, as shown in Figure 6 the boat structure 600 further includes an insulating boat rod 640 and an insulating boat leg 650, the insulating boat rod 640 is at least one, the insulating boat rod 640 is arranged in the plurality of boat pieces 610, and the insulating boat leg 650 is installed at both ends of the insulating boat rod 640. It can be understood that the added insulating boat rod 640 and insulating boat leg 650 can ensure the connection stability and insulation of the plurality of boat pieces 610, thereby ensuring that the boat pieces 610 will not shake or even fall during actual work.

[0062] In the description of the specification, reference to terms "some embodiments", "other embodiments", etc. indicate that the expression being referred to contains specific features, structures, materials, or characteristics combined in particular ways. The

[0063] The foregoing is considered as illustrative only of the principles of the application. Further, since numerous modifications and changes will readily occur to those skilled in the art, it is not desired to limit the application to the exact construction and application described. Accordingly, all such variations are intended to be included within the scope of the present application as defined in the claims below.

Claims

1. A support paddle for carrying a boat structure into and out of a hot furnace, characterised in that, The boat structure has conductive boat feet, the support paddle includes: a paddle body, the paddle body is provided in the furnace door of the furnace, and the paddle body is used for supporting the boat structure; an electrode, part of the electrode is arranged on the paddle body, and a part of the electrode end extends out of the paddle body and is used for contacting the conductive boat feet; the electrode includes: a conductive rod, the conductive rod is arranged on the paddle body, the first end of the conductive rod extends out of the paddle body and is used for being connected with the radio frequency power supply; an electrode contact part connected to the second end of the conductive rod, the electrode contact part extends out of the paddle body and contacts the conductive boat feet; the electrode contact part includes: a flat section connected with the conductive rod and extending out of the paddle body; a needle tip section, the large diameter end of the needle tip section is connected with the flat section, and the small diameter end of the needle tip section is used for inserting into the conductive boat feet.

2. The support paddle of claim 1, wherein, The electrode contact part includes a conductive block abutting against the conductive boat feet.

3. The support paddle of any one of claims 1-2, wherein, The paddle body is a hollow structure, and a plurality of paddle bodies are arranged at intervals.

4. The support paddle of any one of claims 1-2, wherein, The electrodes are arranged in pairs, and the electrodes arranged in pairs respectively contact at least two conductive boat feet of the boat structure.

5. A coating system, characterized by It includes: a furnace; a boat structure; and the support paddle of any one of claims 1-4 is used for carrying the boat structure.

6. The coating system of claim 5, wherein, The boat structure includes: a plurality of boat pieces arranged at intervals, at least one end of each boat piece is provided with a boat ear; a pair of conductive boat rods, each conductive boat rod is provided in a plurality of boat ears at the end of the boat structure; conductive boat feet are installed on both ends of the conductive boat rod, and the conductive boat feet have conductive matching parts matched with the electrodes.

7. The coating system of claim 6, wherein, The conductive boat feet have a first matching groove and a second matching groove, the first matching groove is opened along a first direction, the second matching groove is opened along a second direction, the first direction and the second direction are perpendicular to each other, the first matching groove is used for accommodating the end of the conductive boat rod, and the second matching groove constitutes a conductive matching part.

8. The coating system of claim 6, wherein, Each boat piece is provided with a placement site for placing a sheet, and the placement site includes a plurality of placement sites arranged at intervals along the length direction of the boat piece.

9. The coating system of claim 8, wherein, The placement sites are arranged in groups, and the groups of placement sites are arranged at intervals along the width direction of the boat piece.

10. The coating system of claim 6, wherein, The boat structure further includes: at least one insulating boat rod, the insulating boat rod is provided in a plurality of boat pieces; insulating boat feet are installed on both ends of the insulating boat rod.

Images