Flexible roller for precision metal mask production

Abstract

The present application belongs to the technical field of semiconductor, and particularly relates to a flexible roller for precision metal mask production, comprising: a roller support frame; a roller shaft fixedly installed on the roller support frame; a ring groove opened on the outer sidewall of the roller shaft; an elastic bushing sleeved on the outer side of the roller shaft, and an inflatable annular accommodating cavity formed between the elastic bushing and the ring groove; and an air inlet device located on one side of the roller support frame; wherein the ring groove is coaxial with the roller shaft, and one end of the air inlet device is in communication with the annular accommodating cavity. The present application has the beneficial effect that: through the setting of the flexible roller, the shape of the pressed pattern material can be better matched, so that the pressed pattern material is uniformly stressed, and uneven material patterns can be changed into standard flat material patterns, so that the pattern material becomes more stable and flat at the micro detail level.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, in particular to a flexible roller for precision metal mask production. BACKGROUND

[0002] In the production process of the precision metal mask, the raw material Invar material (iron-nickel alloy) needs to be pressed by a straight roller before the exposure process. When the material is not flat, the straight roller contacts the material pattern, and the material pattern cannot be uniformly stressed, and cannot be flattened by the straight roller, resulting in that the material pattern cannot be in a flat state during exposure, so that the straightness of the subsequent product cannot be guaranteed. SUMMARY

[0003] In view of the defects in the prior art, the purpose of the present application is to provide a flexible roller for precision metal mask production.

[0004] The technical scheme of the present application is as follows: a flexible roller for precision metal mask production, comprising:

[0005] a roller support frame;

[0006] a roller shaft fixedly installed on the roller support frame;

[0007] a ring groove formed on the outer side wall of the roller shaft;

[0008] an elastic bushing sleeved on the outer side of the roller shaft, the elastic bushing and the ring groove forming an inflatable annular accommodating cavity therebetween;

[0009] an air inlet device located on one side of the roller support frame;

[0010] wherein the ring groove is coaxial with the roller shaft, and one end of the air inlet device is in communication with the annular accommodating cavity.

[0011] Further, the elastic bushing is made of rubber.

[0012] Further, the roller support frame comprises:

[0013] a first support base;

[0014] a second support base;

[0015] a connecting rod fixedly connected between the first support base and the second support base;

[0016] a containing box fixedly installed on the outer side of the first support base;

[0017] a stepping motor fixedly installed on the outer side of the second support base;

[0018] The air inlet device is located in the containing box, and the output shaft of the stepping motor is fixedly connected with the roller shaft through the second supporting base.

[0019] By adopting the technical scheme,.

[0020] The air inlet device comprises:

[0021] The gas storage tank is fixedly installed on one side of the bottom of the containing box.

[0022] The water storage tank is fixedly installed on one side of the bottom of the containing box and adjacent to the gas storage tank, and water is stored in the water storage tank.

[0023] The air supplementing device is fixedly installed on one side of the upper end of the water storage tank.

[0024] The air outlet pipe is connected to one side of the upper end of the gas storage tank.

[0025] One end of the roller shaft extends into the containing box through the outside of the first supporting base, the side of the roller shaft away from the second supporting base is provided with an air inlet hole, a blocking cover is rotatably connected to the air inlet hole, a pressure detection module is installed on the side of the blocking cover facing the air inlet hole, an air inlet channel is formed in the inside of the roller shaft and used for connecting the annular containing cavity and the air inlet device, one end of the air inlet channel is located at the bottom of the annular groove, the other end of the air inlet channel is located at the bottom of the air inlet hole, one end of the air outlet pipe away from the gas storage tank penetrates the blocking cover and is connected to the air inlet hole, a first electromagnetic valve used for opening and closing the air outlet pipe is fixedly installed on the air outlet pipe, the first electromagnetic valve is in a normally closed state, and a first gear used for driving the air inlet device is also key-connected to the outside of the roller shaft in the containing box.

[0026] Further, the air supplementing device comprises:

[0027] The first cylinder is embedded on the upper end surface of the water storage tank, the lower end of the first cylinder extends to the inner bottom of the water storage tank through the upper end surface of the water storage tank, and the upper end of the first cylinder is in a closed state.

[0028] The elastic diaphragm is fixedly connected to the inner bottom of the first cylinder.

[0029] The push plate is fixedly installed on the upper end of the elastic diaphragm.

[0030] The second cylinder is fixedly installed on the inside of the first cylinder, the lower end of the second cylinder is provided with an inverted V-shaped opening, and a limiting plate is fixedly installed in the opening.

[0031] The air inlet device is located above the first cylinder.

[0032] The push rod is fixedly installed on the upper end of the push plate.

[0033] The plug block is sleeved on the outside of the push rod and located in the second cylinder, and a spring is fixedly installed between the plug block and the limiting plate.

[0034] The first cylinder bottom and the water storage tank bottom are provided with a gap, the upper end of the push rod penetrates through the limiting plate and extends to the upper end face of the first cylinder and is in transmission connection with the air inlet device, the part of the push rod above the first cylinder is fixedly installed with gear teeth arranged along the length direction, the outer upper edge of the first cylinder is fixedly installed with a communication pipe in communication with the gas storage tank, a second electromagnetic valve for opening and closing the communication pipe is fixedly installed in the middle of the communication pipe, and the second electromagnetic valve is in a normally open state.

[0035] Further, the air inlet device comprises:

[0036] The support plate is located on the right side of the first gear and is in the shape of "L", comprising a horizontal plate fixedly installed on the rear side wall of the containing box and a vertical plate integrally formed with the horizontal plate and away from the rear side wall of the containing box;

[0037] The drive box is slidingly connected to the upper end of the horizontal plate;

[0038] The second gear is rotatably connected to one side in the drive box, and one end of the second gear protrudes from the left side wall of the drive box;

[0039] The third gear is rotatably connected to the right side of the second gear in the drive box, and the third gear is in meshing connection with the second gear;

[0040] The third cylinder is fixedly installed on the side of the drive box away from the first gear;

[0041] The second plug block is slidingly connected in the third cylinder, and a circular groove is formed in the bottom of the second plug block, and a first one-way valve is embedded in the groove opening;

[0042] The second one-way valve is fixedly installed on the bottom of the third cylinder;

[0043] The first air guide hole is formed on the inner side wall of the third cylinder, and a third one-way valve is embedded in the air inlet end of the first air guide hole;

[0044] The first transmission rod is rotatably connected to the outer side of the third gear, and the end of the first transmission rod away from the third gear extends into the third cylinder and is hingedly connected with the second plug block;

[0045] The side groove wall in the circular groove is provided with a second air guide hole matched with the first air guide hole, an air guide pipe is fixedly connected between the air outlet end of the first air guide hole and the gas storage tank, and the outer side of the support plate is provided with a pushing device for pushing the drive box to make the second gear mesh with the first gear.

[0046] Further, the pushing device comprises:

[0047] The half gear is rotatably connected to the side of the vertical plate away from the drive box;

[0048] The transmission shaft is rotatably connected to the rear side wall in the containing box and below the horizontal plate;

[0049] The fourth gear;

[0050] The fifth gear is sequentially connected with the fourth gear and the fifth gear on the transmission shaft by keys;

[0051] The fourth gear is engaged with the half gear, the fifth gear is engaged with the tooth on the push rod, a sliding groove is formed through the outer side of the vertical plate, an inclined groove corresponding to the sliding groove is formed on the half gear, and the transmission rod two is sequentially fixed and installed on the shaft center of the second gear and penetrates the sliding groove and the inclined groove.

[0052] Further, the air guide pipe is also fixedly installed with a two-position three-way electromagnetic valve, and a branch pipe is further connected between one outlet end of the two-position three-way electromagnetic valve and the sealing cover.

[0053] The beneficial effects of the present application are:

[0054] 1. The flexible roller can better match the shape of the pressed pattern material, so that the pressed pattern material is uniformly stressed, and the uneven material pattern can be changed into a standard flat material pattern, so that the pattern material becomes more stable and flat in the micro detail level.

[0055] 2. The material pattern can be filled according to the plate type to achieve uniform stress effect.

[0056] 3. The air inlet device can maintain the air pressure in the flexible roller containing cavity constant, and maintain the pressing pressure. BRIEF DESCRIPTION OF DRAWINGS

[0057] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0058] Fig. 1 The flexible roller overall structure diagram of the present application is shown in the specific embodiment.

[0059] Fig. 2 The flexible roller sectional view of the present application is shown in the specific embodiment.

[0060] Fig. 3 The containing box sectional structure diagram of the present application is shown in the specific embodiment.

[0061] Fig. 4 The A local enlarged view of the present application is shown in the specific embodiment. DETAILED DESCRIPTION

[0062] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts should fall within the scope of the present application.

[0063] In the description of the present application, it should be noted that the terms used herein are only intended to describe specific embodiments, and are not intended to limit the exemplary embodiments according to the present application. For ease of description, the sizes of the various parts shown in the drawings are not drawn in proportion to the actual proportions. The techniques, methods and devices known to those of ordinary skill in the relevant art can not be discussed in detail, but should be considered as part of the authorized description. In all examples shown and discussed herein, any specific value should be interpreted as merely exemplary, and not as a limitation. Therefore, other examples of exemplary embodiments can have different values. It should be noted that similar reference numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0064] Embodiment 1:

[0065] As shown in Figs. 1 to 4 The present application discloses a flexible roller for precision metal mask production, a flexible roller for precision metal mask production, comprising:

[0066] Roller support frame 1;

[0067] Roller shaft 2, fixedly installed on roller support frame 1;

[0068] Annular groove 3 is provided on the outer side wall of roller shaft 2;

[0069] Elastic bushing 4 is sleeved on the outer side of roller shaft 2, and an expandable annular accommodating cavity is formed between elastic bushing 4 and annular groove 3;

[0070] Air inlet device is located on one side of roller support frame 1;

[0071] Wherein, the annular groove 3 is coaxial with the roller shaft 2, and one end of the air inlet device is communicated with the annular accommodating cavity.

[0072] By adopting the above technical scheme, the flexible roller can better match the shape of the pressed pattern material, so that the pressed pattern material is uniformly stressed, and the uneven material pattern can be changed into a standard flat material pattern, so that the pattern material becomes more stable and flat in the microscopic detail level;

[0073] In addition, according to actual production needs, the inflatable accommodating cavity can be connected with water or other liquid medium in addition to air.

[0074] Embodiment 2:

[0075] The embodiment provides a flexible roller for precision metal mask plate production, in addition to the technical scheme of the above embodiment, further has the following technical features.

[0076] Further, the elastic bushing 4 is made of rubber.

[0077] By adopting the above technical scheme, the elastic bushing made of rubber can be filled with the plate type when the lower pressing part is flat, and the uniform stress effect is achieved.

[0078] Embodiment 3:

[0079] The embodiment provides a flexible roller for precision metal mask plate production, in addition to the technical scheme of the above embodiment, further has the following technical features.

[0080] Further, the roller support frame 1 comprises:

[0081] The first support base 5;

[0082] The second support base 51;

[0083] The connecting rod 6 is fixedly connected between the first support base 5 and the second support base 51;

[0084] The accommodating box 7 is fixedly installed outside the first support base 5;

[0085] The stepping motor 8 is fixedly installed outside the second support base 51;

[0086] The air inlet device is located in the accommodating box 7, and the output shaft of the stepping motor 8 is fixedly connected with the roller shaft 2 penetrating the second support base 51.

[0087] By adopting the above technical scheme, the first support base, the second support base and the connecting rod can stably support the flexible roller.

[0088] Embodiment 4:

[0089] The embodiment provides a flexible roller for precision metal mask plate production, in addition to the technical scheme of the above embodiment, further has the following technical features.

[0090] Further, the air inlet device comprises:

[0091] The gas storage tank 9 is fixedly installed on one side of the bottom of the accommodating box 7;

[0092] A water storage tank 10 is fixedly installed on one side of the bottom of the containing tank 7 and adjacent to the gas storage tank 9, and water is stored in the water storage tank 10;

[0093] A gas supplementing device is fixedly installed on one side of the upper end of the water storage tank 10;

[0094] An air outlet pipe 201 is connected to one side of the upper end of the gas storage tank 9;

[0095] One end of the roller shaft 2 penetrates through the outer side of the first support base 5 and extends into the containing tank 7, an air inlet hole is formed on the side of the roller shaft 2 away from the second support base, a sealing cover 202 is rotatably connected to the air inlet hole, a pressure detection module is installed on the side of the sealing cover 202 facing the air inlet hole, an air inlet channel is formed in the inner side of the roller shaft 2 for connecting the annular containing cavity and the air inlet device, one end of the air inlet channel is located at the bottom of the annular groove 3, and the other end is located at the bottom of the air inlet hole, one end of the air outlet pipe 201 penetrates through the sealing cover 202 and is connected to the air inlet hole, a first electromagnetic valve for opening and closing the air outlet pipe 201 is fixedly installed on the air outlet pipe 201, the first electromagnetic valve is in a normally closed state, and a first gear for driving the air inlet device is also key-connected to the outer side of the roller shaft 2 in the containing tank 7.

[0096] By adopting the above technical scheme, the pressure detection module, the first electromagnetic valve and the gas storage tank can supplement the air in the containing cavity of the flexible roller in real time to maintain the expansion degree of the containing cavity, and the water storage tank, the gas supplementing device, the first gear and the stepping motor can supplement the air source of the gas storage tank only by cooperating with the stepping motor as a power source, so that the use effect is good.

[0097] Embodiment 5:

[0098] The embodiment provides a flexible roller for precision metal mask production, which has the following technical features in addition to the technical scheme of the above embodiment.

[0099] Further, the gas supplementing device comprises:

[0100] A first cylinder 203 is embedded on the upper end surface of the water storage tank 10, the lower end of the first cylinder 203 penetrates through the upper end surface of the water storage tank 10 and extends to the inner bottom of the water storage tank 10, and the upper end of the first cylinder 203 is closed;

[0101] An elastic diaphragm 204 is fixedly connected to the inner bottom of the first cylinder 203;

[0102] A push plate 205 is fixedly installed on the upper end of the elastic diaphragm 204;

[0103] A second cylinder 206 is fixedly installed on the inner side of the first cylinder 203, the lower end of the second cylinder 206 is provided with an inverted “V”-shaped opening, and a limiting plate is fixedly installed in the opening;

[0104] An air inlet device is located above the first cylinder 203.

[0105] A push rod 207 is fixedly installed on the upper end of the push plate 205.

[0106] A plug block is sleeved outside the push rod 207 and located in the second cylinder 206, and a spring is fixedly installed between the plug block and the limiting plate.

[0107] The gap is provided between the bottom of the first cylinder 203 and the bottom of the water storage tank 10, the upper end of the push rod 207 penetrates the limiting plate and protrudes from the upper end surface of the first cylinder 203 and is in transmission connection with the air inlet device, the part of the push rod 207 located above the first cylinder 203 is fixedly installed with a tooth arranged in the length direction thereof, a communication pipe in communication with the gas storage tank 9 is fixedly installed on one side of the outer upper edge of the first cylinder 203, a second electromagnetic valve 208 for opening and closing the communication pipe is fixedly installed in the middle of the communication pipe, and the second electromagnetic valve 208 is in a normally open state.

[0108] By adopting the above technical scheme, in the initial state, the high-pressure gas storage tank is in communication with the first cylinder, so that the elastic diaphragm breaks through the elastic force of the spring and the water pressure in the liquid storage tank to maintain the state of protruding downward, when the gas pressure in the gas storage tank slowly decreases, the elastic diaphragm slowly protrudes upward to push the push rod to cooperate with the air inlet device, so that the air inlet device is in transmission cooperation with the first gear to perform air supplement.

[0109] Embodiment 6:

[0110] The embodiment provides a flexible roller for precision metal mask production, in addition to the technical scheme of the above-mentioned embodiment, further has the following technical features.

[0111] Further, the air inlet device comprises:

[0112] A support plate 301 is located on the right side of the first gear and is in the shape of "L", comprising a horizontal plate fixedly installed on the rear side wall of the containing box 7 and a vertical plate integrally formed with the horizontal plate and away from the rear side wall of the containing box 7;

[0113] A drive box 302 is slidingly connected to the upper end of the horizontal plate;

[0114] A second gear 303 is rotatably connected to one side in the drive box 302, and one end of the second gear 303 protrudes from the left side wall of the drive box 302;

[0115] A third gear 304 is rotatably connected to the right side of the second gear 303 in the drive box 302, and the third gear 304 is in meshing connection with the second gear 303;

[0116] A third cylinder 305 is fixedly installed on the side of the drive box 302 away from the first gear;

[0117] The second plug 306 is slidingly connected in the third cylinder 305, and a circular groove is formed in the bottom of the second plug 306, and a first one-way valve 307 is embedded in the groove.

[0118] The second one-way valve 308 is fixedly installed at the bottom of the third cylinder 305.

[0119] The first air guide hole 309 is formed in the inner side wall of the third cylinder 305, and a third one-way valve is embedded in the air inlet end of the first air guide hole 309.

[0120] The first transmission rod 310 is rotatably connected to one side of the third gear 304, and the end of the first transmission rod 310 away from the third gear 304 is hingedly connected to the second plug 306 in the third cylinder 305.

[0121] The second air guide hole is formed in the groove wall on one side of the circular groove, the air outlet end of the first air guide hole 309 is fixedly connected with the gas storage tank 9 through a gas guide pipe 311, and the outer side of the supporting plate 301 is provided with a pushing device for pushing the driving box 302 to make the second gear 303 mesh with the first gear.

[0122] Through the above technical scheme, the pushing device can push the driving box to make the second gear mesh with the first gear when the gas storage tank needs to be replenished, and the second gear drives the third gear to rotate after the second gear meshes with the first gear. Since the second plug is connected with the third gear through the first transmission rod, the second plug reciprocates in the third cylinder, and the three one-way valves can squeeze external air into the gas guide pipe and then into the gas storage tank to complete the air replenishment.

[0123] Embodiment 7:

[0124] The embodiment provides a flexible roller for precision metal mask production, which comprises the technical scheme of the above-mentioned embodiment and has the following technical features.

[0125] Further, the pushing device comprises:

[0126] The half gear 401 is rotatably connected to one side of the vertical plate away from the driving box 302.

[0127] The transmission shaft is rotatably connected to the rear side wall in the containing box 7 and located below the horizontal plate.

[0128] The fourth gear 402;

[0129] The fifth gear 403 is sequentially keyed to the transmission shaft.

[0130] The fourth gear 402 is engaged with the half gear 401, the fifth gear 403 is engaged with the tooth on the push rod 207, a sliding groove is formed through the outer side of the vertical plate, a slant groove corresponding to the sliding groove is formed on the half gear 401, and the second gear 303 is fixedly installed with a transmission rod two penetrating through the sliding groove and the slant groove.

[0131] By adopting the above technical scheme, when the push rod rises and the tooth on the push rod drives the fourth gear to rotate counterclockwise through the fifth gear, the half gear can rotate clockwise, and when the half gear rotates, the transmission rod two is extruded through the slant groove to drive the drive box to displace to the left side, so that the second gear is engaged with the third gear.

[0132] In addition, when the first gear is engaged with the second gear, the second electromagnetic valve is switched to a normally closed state to maintain the extension state of the push rod, and after the gas tank is filled, the second electromagnetic valve is switched to a normally open state to make the push rod return, and the opening and closing control of the second electromagnetic valve can be inductively controlled by the pressure sensor installed in the gas tank, and the latter is provided with a displacement sensor on the drive box to cooperate with a time relay for control.

[0133] Embodiment 8:

[0134] The embodiment provides a flexible roller for precision metal mask production, in addition to the technical solutions of the above-mentioned embodiments, further having the following technical features.

[0135] Further, the gas guide pipe 311 is further fixedly installed with a two-position three-way electromagnetic valve 501, and a sub pipe is further connected between one outlet end of the two-position three-way electromagnetic valve and the sealing cover 202.

[0136] By adopting the above technical scheme, when the gas tank leaks and cannot store gas, the two-position three-way electromagnetic valve can be used to regulate the flow path to make the gas sent by the air inlet device pass through the air inlet hole for temporary air supplement, so as to maintain the air pressure, and after the air supplement is completed, the regulated flow path is cut off.

[0137] The above only describes the preferred embodiments of the present application and should not be used to limit the present application, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. A flexible roller for precision metal mask production, characterized by, The utility model relates to a kind of air supply device and air supply device for air supply device. Including: Roller support frame (1); Roller shaft (2), fixedly installed on roller support frame (1); Annular groove (3), is opened in the outer side wall of roller shaft (2); Elastic bushing (4), sleeve is set to the outer side of roller shaft (2), and the inflatable annular accommodating cavity is formed between elastic bushing (4) and annular groove (3); Air inlet device, located one side outside roller support frame (1); Wherein, annular groove (3) is coaxial with roller shaft (2), and one end of air inlet device is communicated with annular accommodating cavity; Roller support frame (1) includes: First support base (5); Second support base (51); Connecting rod (6), fixedly connected between first support base (5) and second support base (51); Accommodation box (7), fixedly installed on the outer side of first support base (5); Stepping motor (8), fixedly installed on the outer side of second support base (51); Wherein, air inlet device is located in accommodation box (7), and the output shaft of stepping motor (8) is fixedly connected with roller shaft (2) by penetrating second support base (51); Air inlet device includes: Gas storage tank (9), fixedly installed on one side of the bottom of accommodation box (7); Water storage tank (10), fixedly installed on one side of the bottom of accommodation box (7) and adjacent to gas storage tank (9), water is stored in water storage tank (10); Air supplement device, fixedly installed on one side of the upper end of water storage tank (10); Air outlet pipe (201), connected to one side of the upper end of gas storage tank (9); 2. The flexible roller for producing a precision metal mask according to claim 1, wherein Wherein, one end of roller shaft (2) penetrates the outer side of first support base (5) and extends into accommodation box (7), and the side, away from second support base, of roller shaft (2) is provided with air inlet hole, the air inlet hole is rotatably connected with blocking cover (202), the side, facing air inlet hole, of blocking cover (202) is provided with pressure detection module, the inner side of roller shaft (2) is provided with air inlet channel for connecting annular accommodating cavity and air inlet device, one end of air inlet channel is located in groove bottom of annular groove (3), the other end is located in hole bottom of air inlet hole, one end of air outlet pipe (201), away from gas storage tank (9), penetrates blocking cover (202) and is communicated with air inlet hole, first electromagnetic valve for opening and closing air outlet pipe (201) is fixedly installed on air outlet pipe (201), first electromagnetic valve is in normally closed state, the outer side of roller shaft (2) in accommodation box (7) is further keyed connected with first gear for driving air inlet device.

3. The flexible roller for producing a precision metal mask according to claim 1, wherein Elastic bushing (4) is made of rubber. Air supplement device includes: First cylinder body (203), embedded on the upper end surface of water storage tank (10), the lower end of first cylinder body (203) extends to the inner bottom of water storage tank (10) by penetrating the upper end surface of water storage tank (10), and the upper end of first cylinder body (203) is closed; Elastic diaphragm (204), fixedly connected to the inner bottom of first cylinder body (203); Push plate (205), fixedly installed on the upper end of elastic diaphragm (204); Second cylinder body (206), fixedly installed on the inner side of first cylinder body (203), and the lower end of second cylinder body (206) is provided with inverted "V" shaped opening, and the opening is fixedly installed with limiting plate; Air inlet device, located above first cylinder body (203); Push rod (207), fixedly installed on the upper end of push plate (205); The plug is sleeved outside the push rod (207) and located in the second cylinder (206), and the spring is fixedly installed between the plug and the limiting plate; The gap is provided between the bottom of the first cylinder (203) and the bottom of the water storage tank (10), the upper end of the push rod (207) penetrates through the limiting plate, extends out of the upper end surface of the first cylinder (203) and is in transmission connection with the air inlet device, the part of the push rod (207) above the first cylinder (203) is fixedly installed with the teeth arranged along the length direction, the communication pipe in communication with the gas storage tank (9) is fixedly installed on one side of the outer upper edge of the first cylinder (203), the second electromagnetic valve (208) for opening and closing the communication pipe is fixedly installed in the middle of the communication pipe, and the second electromagnetic valve (208) is in a normally open state.

4. The flexible roller for producing a precision metal mask according to claim 3, wherein The air inlet device comprises: The support plate (301) is located on the right side of the first gear, is in the shape of "L", comprises a horizontal plate fixedly installed on the rear side wall of the containing box (7) and a vertical plate integrally formed with the horizontal plate and away from the rear side wall of the containing box (7); The drive box (302) is slidingly connected to the upper end of the horizontal plate; The second gear (303) is rotatably connected to one side in the drive box (302), and one end of the second gear (303) protrudes out of the left side wall of the drive box (302); The third gear (304) is rotatably connected to the right side of the second gear (303) in the drive box (302), and the third gear (304) is in mesh with the second gear (303); The third cylinder (305) is fixedly installed on the side of the drive box (302) away from the first gear; The second plug (306) is slidingly connected in the third cylinder (305), and the bottom of the second plug (306) is provided with a circular groove, and the first one-way valve (307) is embedded in the groove opening of the circular groove; The second one-way valve (308) is fixedly installed on the bottom of the third cylinder (305); The first air guide hole (309) is provided on the inner side wall of the third cylinder (305), and the air inlet end of the first air guide hole (309) is embedded with the third one-way valve; The first transmission rod (310) is rotatably connected to the outer side of the third gear (304), and the end of the first transmission rod (310) away from the third gear (304) extends into the third cylinder (305) and is hingedly connected with the second plug (306); The second air guide hole is provided on the groove wall on one side in the circular groove and matched with the first air guide hole (309), the air outlet end of the first air guide hole (309) is fixedly connected with the air guide pipe (311) between the air guide pipe (311) and the gas storage tank (9), and the outer side of the support plate (301) is provided with a pushing device for pushing the drive box (302) to make the second gear (303) mesh with the first gear.

5. The flexible roller for producing a precision metal mask according to claim 4, wherein The pushing device comprises: The half gear (401) is rotatably connected to the side of the vertical plate away from the drive box (302); The transmission shaft is rotatably connected to the rear side wall in the containing box (7) and located below the horizontal plate; The fourth gear (402); The fifth gear (403) is sequentially keyed connected to the transmission shaft with the fourth gear (402); The fourth gear (402) is engaged with the half gear (401), the fifth gear (403) is engaged with the tooth on the push rod (207), a sliding groove is vertically and outwardly formed through the vertical plate, an inclined groove corresponding to the sliding groove is formed on the half gear (401), and a transmission rod two is fixedly installed on the shaft center of the second gear (303) and sequentially penetrates the sliding groove and the inclined groove.

6. The flexible roller for producing a precision metal mask according to claim 4, wherein The air guide pipe (311) is also fixedly installed with a two-position three-way electromagnetic valve (501), and a branch pipe is further connected between one outlet end of the two-position three-way electromagnetic valve and the blocking cover (202).

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