Transport apparatus and test system

Abstract

The application discloses a transfer device and a test system, wherein the transfer device comprises: a transfer box, which is provided with a first receiving space and a second receiving space for receiving target products; a displacement device, which drives the transfer box to move; a taking and placing device, which moves the target product outside the transfer device to the inside of the first receiving space or moves the target product inside the second receiving space to the outside of the transfer device through the movement of the taking and placing device; a discharging manipulator, which moves the target product inside the first receiving space to the outside of the transfer device or away from the first receiving space to avoid the taking and placing device through the movement of the discharging manipulator; and a returning manipulator, which moves the target product inside the second receiving space to the outside of the transfer device or away from the second receiving space to avoid the taking and placing device through the movement of the returning manipulator. The technical scheme improves the transfer efficiency when the target product is transferred.

Description

Technical Field

[0001] This invention relates to the field of testing system technology, and in particular to a transfer device and a testing system. Background Technology

[0002] When a product is manufactured, processed, inspected, or tested, the time required for each process varies. When there are processes with large time differences, it is difficult to produce the product using an assembly line. For these processes that require a long time, multiple identical machines are usually set up to perform the same process, thereby improving the production efficiency of the product.

[0003] This production method requires the products to be transferred between a large number of devices. In existing technologies, this is usually done by operators using their hands to move the materials or by using trolleys to push them.

[0004] This method of transportation is inefficient. Summary of the Invention

[0005] The main objective of this invention is to provide a transfer device that aims to improve the transfer efficiency when transferring target products.

[0006] To achieve the above objectives, the present invention provides a transfer device comprising:

[0007] The transfer box is provided with a first receiving space and a second receiving space, both of which are used to receive the target product.

[0008] A displacement device is located at the bottom of the transfer box and is driven to drive the transfer box to move.

[0009] A pick-and-place device is movably disposed on the displacement device and spaced apart from the transfer box. The pick-and-place device moves the target product outside the transfer equipment to the inside of the first receiving space or moves the target product inside the second receiving space to the outside of the transfer equipment through its own movement.

[0010] A feeding robot is movably positioned on one side of the transfer box. The feeding robot moves the target product inside the first receiving space to the outside of the transfer equipment or away from the first receiving space to avoid the picking and placing device; and

[0011] The unloading robot is movably located on one side of the transfer box. The unloading robot moves the target product inside the second receiving space to the outside of the transfer equipment or away from the second receiving space to avoid the picking and placing device.

[0012] Optionally, the unloading robot and the unloading robot are symmetrically arranged and located on opposite sides of the pick-and-place device.

[0013] Optionally, the unloading robot includes:

[0014] First lifting assembly;

[0015] A first telescopic assembly, wherein a first lifting assembly is driven to connect to the first telescopic assembly to move the first telescopic assembly closer to or further away from the second receiving space; and

[0016] A pusher component, wherein the first telescopic component is driven to extend into the interior of the second receiving space and push the target product out of or out of the second receiving space.

[0017] Optionally, the pick-and-place device includes:

[0018] The second lifting component is spaced apart from the transfer box;

[0019] Rotating assembly, the second lifting assembly being driven and connected to the rotating assembly; and

[0020] The pick-and-place mechanism is driven by the rotating component to rotate, so that the pick-and-place structure faces the transfer box or faces the outside of the transfer equipment.

[0021] Optionally, the picking and placing mechanism includes:

[0022] The second telescopic component is driven by the rotating component.

[0023] A material handling robot, wherein the second telescopic component drives the material handling robot to extend into or retract from the second receiving space;

[0024] A third telescopic assembly, wherein the rotating assembly drives and connects to the third telescopic assembly to cause the second telescopic assembly and the third telescopic assembly to rotate synchronously; and

[0025] A material unloading robot arm, wherein the third telescopic component drives the material unloading robot arm to extend into or retract from the first receiving space.

[0026] The present invention also proposes a testing system, comprising:

[0027] The aforementioned transfer equipment;

[0028] Storage equipment, located at one end of the transfer equipment; and

[0029] The testing equipment is located on one side of the transfer equipment. The product under test is moved to the second receiving space through the storage equipment, and the product under test inside the second receiving space is moved to the testing equipment through the transfer equipment. The tested product is moved from the testing equipment to the first receiving space through the transfer equipment, and the tested product inside the first receiving space is moved to the storage equipment through the transfer equipment.

[0030] Optionally, the storage device includes:

[0031] A transfer device is located at one end of the transfer equipment, and the transfer device is provided with a third receiving space and a fourth receiving space;

[0032] A storage device is located on the side of the transfer device opposite to the transfer equipment. The storage device includes a fifth receiving space and a sixth receiving space. The fifth receiving space is used to receive the tested product, and the sixth receiving space is used to receive the product to be tested.

[0033] The loading and unloading device is movably disposed between the transfer device and the storage device. The product to be tested is moved from the sixth receiving space to the fourth receiving space via the loading and unloading device. The product to be tested inside the fourth receiving space is moved to the second receiving space via the transfer device. The tested product is moved from the first receiving space to the third receiving space via the unloading robot. The tested product inside the third receiving space is moved to the interior of the fifth receiving space via the loading and unloading device.

[0034] Optionally, the transfer device includes:

[0035] A transfer container, located at one end of the transfer equipment, is provided with the third receiving space and the fourth receiving space; and

[0036] A transfer robot is movably located on the side of the transfer box away from the transfer equipment. The transfer robot moves the product to be tested inside the fourth receiving space to the second receiving space or away from the fourth receiving space to avoid the loading and unloading device.

[0037] Optionally, the loading and unloading device includes:

[0038] A third lifting assembly is disposed between the transfer device and the storage device;

[0039] A loading / unloading assembly, wherein the third lifting assembly is driven and connected to the loading / unloading assembly so that the loading / unloading assembly is located between the fourth and sixth receiving spaces or between the third and fifth receiving spaces; and

[0040] An orientation adjustment component is rotatably disposed on the loading and unloading component. The product under test adjusts its own direction through the orientation adjustment component. The product under test moves from inside the sixth receiving space to inside the fourth receiving space through the loading and unloading component.

[0041] Optionally, the orientation component includes:

[0042] A steering platform is rotatably mounted on the loading and unloading assembly. The product to be tested is moved to the steering platform via the loading and unloading assembly, and the steering platform, through its own rotation, causes the product to be tested to change direction; and

[0043] A scanner, electrically connected to the orientation stage, is spaced apart on the side of the product under test away from the orientation stage, and is used to detect the orientation of the product under test.

[0044] One embodiment of the present invention includes a transfer device comprising a transfer box, a displacement device, a pick-and-place device, a feeding mechanism, and a retracting robot. The target product can be transferred via the transfer device to a target location for a target process. The transfer box has a first receiving space and a second receiving space, both capable of holding the target product. The first receiving space holds the target product after the target process, while the second receiving space holds the target product before the target process. When the second receiving space contains the target product, the transfer box moves to the target location via the displacement device. The pick-and-place device first moves the target product that has not yet undergone the target process from inside the second receiving space to outside the transfer device for the target process. Then, the pick-and-place device moves the target product that has completed the target process from outside to inside the first receiving space. Finally, the feeding robot removes the target product that has completed the target process from inside the first receiving space, facilitating storage or the next process. When an error occurs when a product is placed into the second receiving space, the unloading robot in the transfer equipment can remove the product from the second receiving space, preventing the transfer equipment from moving the incorrect product to the target location. This avoids performing the target process on the incorrect product, thereby improving the yield rate, avoiding wasted production time, and increasing production efficiency. The unloading robot is movably positioned on one side of the transfer box. When the pick-and-place device places the target product into the first receiving space, the unloading robot can move to avoid the pick-and-place device. Similarly, the unloading robot is movably positioned on one side of the transfer box. When the pick-and-place device removes the product from the second receiving space, the unloading robot can move to avoid the pick-and-place device. By changing the positions of the unloading and unloading robots, interference between multiple robots can be avoided, ensuring smooth transfer of the target product. On the other hand, when there are multiple target locations, the operation frequency of the pick-and-place device is higher than that of the unloading and unloading robots. Compared to the pick-and-place device avoiding the unloading and unloading robots, this solution requires fewer avoidance maneuvers, thereby improving the efficiency of the pick-and-place device in picking up or placing the target product, and thus increasing production efficiency. Attached Figure Description

[0045] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0046] Figure 1 This is a schematic diagram of the structure of an embodiment of the transfer device of the present invention. Figure 1 ;

[0047] Figure 2This is a schematic diagram of the structure of an embodiment of the transfer device of the present invention. Figure 2 ;

[0048] Figure 3 This is a partial structural schematic diagram of an embodiment of the transfer device of the present invention;

[0049] Figure 4 This is a schematic diagram of the unloading robot arm of the transfer device of the present invention;

[0050] Figure 5 This is a schematic diagram of the pick-and-place device of the transfer equipment of the present invention. Figure 1 ;

[0051] Figure 6 This is a schematic diagram of the pick-and-place device of the transfer equipment of the present invention. Figure 2 ;

[0052] Figure 7 This is a schematic diagram of the structure of an embodiment of the testing system of the present invention. Figure 1 ;

[0053] Figure 8 This is a schematic diagram of the structure of an embodiment of the testing system of the present invention. Figure 2 ;

[0054] Figure 9 This is a schematic diagram of the storage device of the test system of the present invention;

[0055] Figure 10 This is a partial structural schematic diagram of an embodiment of the testing system of the present invention;

[0056] Figure 11 This is a partial structural diagram of the storage device of the test system of the present invention;

[0057] Figure 12 This is a partial structural diagram of the loading and unloading device of the storage equipment in the test system of the present invention.

[0058] Explanation of icon numbers:

[0059]

[0060]

[0061] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0062] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0063] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indication will also change accordingly.

[0064] In this invention, unless otherwise explicitly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0065] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the meaning of "and / or" throughout the text includes three parallel solutions; for example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0066] This invention proposes a transfer device. This transfer device is suitable for transferring various types of products, such as wafers, circuit boards, and substrates. This specification uses wafers as an example for illustration.

[0067] Reference Figures 1 to 3 , Figure 1 This is a schematic diagram of the structure of an embodiment of the transfer device of the present invention. Figure 1 , Figure 2 This is a schematic diagram of the structure of an embodiment of the transfer device of the present invention. Figure 2 , Figure 3 This is a partial structural schematic diagram of an embodiment of the transfer device of the present invention.

[0068] In this embodiment of the invention, the transfer device 100 includes:

[0069] The transfer box 110 is provided with a first receiving space 111 and a second receiving space 112, both of which are used to receive the target product.

[0070] The displacement device 120 is located at the bottom of the transfer box 110 and is driven to drive the transfer box 110 to move.

[0071] The pick-and-place device 130 is movably disposed on the displacement device 120 and spaced apart from the transfer box 110. The pick-and-place device 130 moves the target product outside the transfer equipment 100 to the inside of the first receiving space 111 or moves the target product inside the second receiving space 112 to the outside of the transfer equipment 100 through its own movement.

[0072] A material handling robot 140 is movably positioned on one side of the transfer box 110. The robot 140 moves the target product inside the first receiving space 111 to the outside of the transfer equipment 100 or away from the first receiving space 111 to avoid the picking and placing device 130.

[0073] The unloading robot 150 is located on one side of the transfer box 110. The unloading robot 150 moves the target product inside the second receiving space 112 to the outside of the transfer equipment 100 or away from the second receiving space 112 to avoid the pick-and-place device 130.

[0074] In one embodiment of the present invention, a transfer device 100 includes a transfer box 110, a displacement device 120, a pick-and-place device 130, a material unloading mechanism, and a material unloading robot 150. The target product can be transferred through the transfer device 100 to move it to a target location for a target process. The transfer box 110 has a first receiving space 111 and a second receiving space 112, both of which can receive the target product. The first receiving space 111 is used to receive the target product after the target process, and the second receiving space 112 is used to receive the target product before the target process. When the second receiving space 112 contains the target product, the transfer box 110 moves to the target position via the displacement device 120. The pick-and-place device 130 first moves the target product that has not yet undergone the target process from inside the second receiving space 112 to outside the transfer equipment 100 for the target process. Then, the pick-and-place device 130 moves the target product that has completed the target process from outside to inside the first receiving space 111. Then, the unloading robot 140 removes the target product that has completed the target process from inside the first receiving space 111, facilitating the storage of the target product or its progress to the next process. When an error occurs in the product placed in the second receiving space 112, the unloading robot 150 in the transfer equipment 100 can remove the product from the second receiving space 112, preventing the transfer equipment 100 from transferring the incorrect product to the target position, avoiding the target process on the incorrect product, thereby improving the yield rate, avoiding wasted production time, and improving production efficiency. The unloading robot 140 is movably positioned on one side of the transfer box 110. When the pick-and-place device 130 places the target product into the first receiving space 111, the unloading robot 140 can move to avoid the pick-and-place device 130. The unloading robot 150 is movably positioned on one side of the transfer box 110. When the pick-and-place device 130 takes the product out from the second receiving space 112, the unloading robot 150 can move to avoid the pick-and-place device 130. By changing the positions of the unloading robot 140 and the unloading robot 150, interference between multiple robots can be avoided, ensuring that the target product can be transferred smoothly. On the other hand, when there are multiple target positions, the operation frequency of the pick-and-place device 130 is higher than that of the unloading robot 140 and the unloading robot 150. Compared with the pick-and-place device 130 avoiding the unloading robot 140 and the unloading robot 150, this solution avoids fewer obstacles, thereby improving the efficiency of the pick-and-place device 130 in picking up or placing the target product, and thus improving production efficiency.

[0075] Combination Figures 2 to 3In this embodiment, both the first receiving space 111 and the second receiving space 112 can accommodate multiple target products. Specifically, in this embodiment, the target product is a wafer, which is attached to a film material, such as a blue film or a white film. The film material is then attached to an iron ring. During the actual transfer process, the wafer is transferred by transferring the iron ring. Multiple grooves are provided on the two opposing inner walls of the first receiving space 111, with the grooves on the two inner walls facing each other. The two ends of the iron ring are inserted into the two grooves, thus placing the iron ring inside the first receiving space 111, thereby accommodating the wafer. The second receiving space 112 adopts the same configuration as the first receiving space 111, resulting in a simple structure that is easy to manufacture. The displacement device 120 can be a combination of a motor and wheels, or a combination of a motor and a rack and pinion structure. A rack-equipped guide rail is provided, and a motor and gear are provided at the bottom of the transfer box 110. The motor drives the gear to rotate, and the gear and rack mesh to make the transfer box 110 move along the guide rail. The specific structural form can be adjusted and designed as needed to meet the functional requirements, and is not limited here.

[0076] Optionally, the unloading robot 140 and the unloading robot 150 are symmetrically arranged and located on opposite sides of the pick-and-place device 130.

[0077] Reference Figure 3 In this embodiment, the unloading robot 140 and the unloading robot 150 are symmetrically arranged. By adopting similar structures, the types of parts in the transfer equipment 100 are reduced, thereby facilitating the processing and assembly of the transfer equipment 100, improving the manufacturing efficiency of the transfer equipment 100, and reducing the manufacturing cost of the transfer equipment 100. The unloading robot 140 and the unloading robot 150 are arranged on opposite sides of the pick-and-place device 130, making it easier and more convenient to avoid the pick-and-place device 130.

[0078] Optionally, the unloading robot 150 includes:

[0079] First lifting assembly 151;

[0080] A first telescopic assembly 152, and a first lifting assembly 151 are driven to connect the first telescopic assembly 152, so that the first telescopic assembly 152 moves closer to or further away from the second receiving space 112; and

[0081] The pusher 153 is driven by the first telescopic component 152. The pusher 153 extends into the interior of the second receiving space 112 and pushes the target product out of or out of the second receiving space 112.

[0082] Combination Figure 3 and Figure 4In this embodiment, the unloading robot 150 includes a first lifting component 151, a first telescopic component 152, and a pusher component 153. The specific operation process is as follows: the first lifting component 151 rises, driving the first telescopic component 152 to rise, which in turn drives the pusher component 153 to approach the second receiving space 112. When the pusher component 153 is aligned with the second receiving space 112, the first telescopic component 152 extends, driving the pusher component 153 to extend, thereby pushing the target product inside the second receiving space 112 away from the second receiving space 112. Then the first telescopic component 152 retracts, driving the pusher component 153 to retract, avoiding the pusher component 153 from colliding with the transfer box 110 during subsequent descent. Then the first lifting component 151 descends, driving the first telescopic component 152 to descend, thereby driving the pusher component 153 away from the second receiving space 112, thereby avoiding the action of the pick-and-place device 130. Both the first lifting assembly 151 and the first telescopic assembly 152 are linear reciprocating motion mechanisms, with simple structures and easy implementation. They can be implemented using cylinders, electric push rods, or lead screw and nut mechanisms, respectively. The specific structure of the pusher 153 can be adjusted according to needs to meet functional requirements, and is not limited here. When the unloading robot 150 moves the wafer, the pusher 153 simultaneously pushes all the iron rings inside the second receiving space 112 out of the second receiving space 112. Similarly, when the unloading robot 140 moves the wafer, it also simultaneously pushes all the iron rings inside the first receiving space 111 out of the first receiving space 111. This results in high transfer efficiency, thereby improving production efficiency.

[0083] Optionally, the pick-and-place device 130 includes:

[0084] The second lifting component 131 is spaced apart from the transfer box 110;

[0085] Rotating assembly 132, second lifting assembly 131 is driven and connected to rotating assembly 132; and

[0086] The pick-and-place mechanism 133 is driven by the rotating component 132 to rotate, so that the pick-and-place mechanism 133 is oriented toward the transfer box 110 or toward the outside of the transfer device 100.

[0087] Combination Figure 5 and Figure 6In this embodiment, the pick-and-place device 130 includes a second lifting assembly 131, a rotating assembly 132, and a pick-and-place mechanism 133. The rotation of the rotating assembly 132 can drive the pick-and-place mechanism 133 to rotate. First, the pick-and-place mechanism 133 is aligned with the second receiving space 112. The pick-and-place mechanism 133 takes out the target product that has not undergone the target process from inside the second receiving space 112. Then, the rotating assembly 132 rotates, driving the pick-and-place mechanism 133 to rotate, so that the pick-and-place mechanism 133 is aligned with the outside of the transfer device 100. The pick-and-place mechanism 133 places the target product that has not undergone the target process into the target position. Then, the pick-and-place mechanism 133 removes the target product that has completed the target process from the target position. Then, the rotating assembly 132 rotates, driving the pick-and-place mechanism 133 to rotate, so that the pick-and-place mechanism 133 is aligned with the first receiving space 111. The pick-and-place mechanism 133 puts the target product that has completed the target process into the first receiving space 111. During this process, the second lifting component 131 rises and falls, driving the rotating component 132 to rise and fall, which in turn drives the pick-and-place mechanism 133 to rise and fall, allowing the pick-and-place mechanism 133 to be aligned with the first receiving space 111 or the second receiving space 112. Specifically, in this embodiment, the rotating component 132 rotates 90° so that the pick-and-place mechanism 133 faces the transfer box 110 or the outside of the transfer device 100. The angle is easy to control, facilitating the setting of the relative positions of the transfer device 100 and the testing device 300.

[0088] Optionally, the picking and placing mechanism 133 includes:

[0089] The second telescopic component 1331 is driven and connected to the rotating component 132.

[0090] The material handling robot 1332 is driven and connected to the second telescopic component 1331 so that the material handling robot 1332 can extend into or out of the second receiving space 112;

[0091] The third telescopic component 1333 is driven and connected to the rotating component 132 so that the second telescopic component 1331 and the third telescopic component 1333 rotate synchronously; and

[0092] The unloading robot 1334 is driven and connected to the third telescopic component 1333 so that the unloading robot 1334 extends into or out of the first receiving space 111.

[0093] In this embodiment, the picking and placing mechanism 133 includes a second telescopic component 1331, a picking robot 1332, a third telescopic component 1333, and a placing robot 1334. When the rotating component 132 drives the picking and placing mechanism 133 to rotate, the rotating component 132 actually drives the second telescopic component 1331 and the third telescopic component 1333 to rotate synchronously, so that the second telescopic component 1331 and the third telescopic component 1333 can be synchronously aligned with the outside of the transfer device 100 or the transfer box 110. First, the second telescopic component 1331 is aligned with the second receiving space 112. The second telescopic component 1331 drives the picking robot 1332 to extend and retract, removing the target product from the second receiving space 112. Then, the rotating component 132 drives the second telescopic component 1331 and the third telescopic component 1333 to rotate, so that the second telescopic component 1331 and the third telescopic component 1333 face the target position. The third telescopic component 1333 drives the unloading robot 1334 to extend and retract, thereby removing the target product that has completed the target process at the target position. Then, the second telescopic component 1331 drives the picking robot 1332 to extend and retract, thereby placing the target product on the picking robot 1332 at the target position for the target process. Then, the rotating component 132 drives the second telescopic component 1331 and the third telescopic component 1333 to rotate, so that the third telescopic component 1333 is aligned with the first receiving space 111. Then, the third telescopic component 1333 drives the unloading robot 1334 to extend and retract, thereby placing the target product on the unloading robot 1334 into the first receiving space 111. Specifically, in this embodiment, the picking robot 1332 and the unloading robot 1334 only transfer one iron ring containing a wafer. The second telescopic component 1331 and the third telescopic component 1333 can be implemented using cylinders, electric push rods, or lead screw and nut mechanisms, etc. Specifically, in this embodiment, the second telescopic component 1331 and the third telescopic component 1333 are mounted on the same bracket. The rotating component 132 drives the bracket to rotate, thereby causing the second telescopic component 1331 and the third telescopic component 1333 to rotate synchronously. Both the second telescopic component 1331 and the third telescopic component 1333 are in the form of synchronous belts, and mounting structures are provided on the synchronous belts. When the pulley drives the synchronous belt to move, the mounting... The structure moves with the synchronous belt, causing forward and reverse rotation, which enables the installation structure to achieve linear reciprocating motion. The second telescopic component 1331 is connected to the picking robot 1332 through the installation structure, and the third telescopic component 1333 is connected to the unloading robot 1334 through the installation structure, thereby driving the picking robot 1332 and the unloading robot 1334 to extend and retract respectively. The use of a synchronous belt ensures that the second telescopic component 1331 and the third telescopic component 1333 have precise transmission, high positioning accuracy and repeatability, thus ensuring accurate positioning when picking up or placing the target product.

[0094] The present invention also proposes a testing system, comprising:

[0095] The aforementioned transfer equipment 100;

[0096] Storage device 200 is located at one end of transfer device 100; and

[0097] The testing device 300 is located on one side of the transfer device 100. The product under test is moved to the second receiving space 112 through the storage device 200. The product under test inside the second receiving space 112 is moved to the testing device 300 through the transfer device 100. The tested product is moved from the testing device 300 to the first receiving space 111 through the transfer device 100. The tested product inside the first receiving space 111 is moved to the storage device 200 through the transfer device 100.

[0098] Reference Figure 7 and Figure 8The present invention also proposes a testing system, which includes a transfer device 100, a storage device 200, and a testing device 300. The specific structure of the transfer device 100 is as described in the above embodiments. Since the testing system adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be described in detail here. The storage device 200 is located at one end of the transfer device 100, and the testing device 300 is located on one side of the transfer device 100. The storage device 200 is used to store products to be tested that have not yet been tested and products that have completed testing. First, the storage device 200 moves the products to be tested to the second receiving space 112 of the transfer device 100. Then, the transfer device 100 moves closer to the testing device 300, and the pick-and-place device 130 transfers the products to be tested from the inside of the second receiving space 112 to the testing device 300 for testing. For the products that have completed testing in the testing device 300, the pick-and-place device 130 moves the products to the inside of the first receiving space 111. Then, the transfer device 100 moves closer to the storage device 200, and the unloading robot 140 moves the products to the inside of the storage device 200 from the inside of the first receiving space 111. Specifically, in this embodiment, the displacement device 120 includes a track, and the transfer box 110 moves linearly along the track. Multiple testing devices 300 are arranged on both sides of the track, and a storage device 200 is located at one end of the track. When the transfer box 110 approaches the storage device 200, the storage device 200 simultaneously moves multiple iron rings containing wafers into the second receiving space 112. Then, the transfer box 110 moves between the corresponding positions of the multiple testing devices 300, distributing the iron rings into the multiple testing devices 300 and collecting the iron rings from the multiple testing devices 300 into the first receiving space 111. Then, the transfer box 110 returns to the position of the storage device 200, and the unloading robot 140 simultaneously moves the iron rings on the inner wall of the first receiving space 111 into the storage device 200. During this process, the exchange time between the transfer box 110 and the storage device 200 is short, thereby improving the transfer efficiency.

[0099] Optionally, the storage device 200 includes:

[0100] The transfer device 210 is located at one end of the transfer equipment 100, and the transfer device 210 is provided with a third containment space 2111 and a fourth containment space 2112;

[0101] Storage device 220 is located on the side of transfer device 210 away from transfer equipment 100. Storage device 220 has a fifth receiving space 2211 and a sixth receiving space 2212. The fifth receiving space 2211 is used to receive tested products, and the sixth receiving space 2212 is used to receive products to be tested.

[0102] The loading and unloading device 230 is movably located between the transfer device 210 and the storage device 220. The product to be tested is moved from the sixth storage space 2212 to the fourth storage space 2112 via the loading and unloading device 230. The product to be tested inside the fourth storage space 2112 is moved to the second storage space 112 via the transfer device 210. The tested product is moved from the first storage space 111 to the third storage space 2111 via the unloading robot 140. The tested product inside the third storage space 2111 is moved to the fifth storage space 2211 via the loading and unloading device 230.

[0103] Reference Figures 7 to 10In this embodiment, the storage device 200 includes a transfer device 210, a storage device 220, and a loading / unloading device 230. The fifth receiving space 2211 in the storage device 220 is used to receive tested products, and the sixth receiving space 2212 in the storage device 220 is used to receive products to be tested. An operator places an iron ring containing untested wafers into the sixth receiving space 2212 and removes the iron ring containing tested wafers from the fifth receiving space 2211. The storage device 220 can have multiple fifth receiving spaces 2211, allowing a large number of products to be tested to be loaded at once and distributed to multiple testing devices 300 by the transfer device 100, reducing the number of loading operations. Alternatively, it can have multiple sixth receiving spaces 2212, allowing for the unified removal of a large number of tested products, reducing the number of unloading operations. The number and size of the fifth and sixth receiving spaces 2211 and 2212 can be the same or different. Specifically, in this embodiment, the storage device 220 is provided with eight identical storage boxes 221, of which four storage boxes 221 each have a fifth receiving space 2211, and the other four storage boxes 221 each have a sixth receiving space 2212. This reduces the types of parts in the storage device 220, lowers the processing difficulty, and improves the assembly efficiency of the storage device 220. The products to be tested in the multiple fifth receiving spaces 2211 are pre-transferred to the interior of the third receiving space 2111 by the loading and unloading device 230. The third receiving space 2111 of the transfer device 210 adopts the same structure as the first receiving space 111 of the transfer device 100, which facilitates docking with the first receiving space 111 and thus speeds up the transfer of the products to be tested between the storage device 200 and the transfer device 100, shortening the transfer time. The fourth receiving space 2112 of the transfer device 210 adopts the same structure as the second receiving space 112 of the transfer device 100, which facilitates docking with the second receiving space 112, thereby accelerating the transfer speed of the product under test between the storage device 200 and the transfer device 100 and shortening the transfer time. The tested product entering the fourth receiving space 2112 is then transferred to multiple sixth receiving spaces 2212 by the loading and unloading device 230. During the process of the loading and unloading device 230 transferring the target product between the transfer box 211 and the storage box 221, the transfer box 110 can move away from the transfer box 211 to distribute and collect the target product to multiple testing devices 300. The two transfer processes are independent of each other and can be carried out simultaneously, thereby improving the transfer efficiency of the target product.

[0104] Optionally, the transfer device 210 includes:

[0105] The transfer container 211 is located at one end of the transfer equipment 100 and has a third receiving space 2111 and a fourth receiving space 2112; and

[0106] The transfer robot 212 is located on the side of the transfer box 211 away from the transfer equipment 100. The transfer robot 212 moves the product to be tested inside the fourth receiving space 2112 to the second receiving space 112 or away from the fourth receiving space 2112 to avoid the loading and unloading device 230.

[0107] In this embodiment, the transfer device 210 includes a transfer box 211 and a transfer robot 212. When the transfer box 110 approaches the transfer box 211, the first receiving space 111 of the transfer box 110 and the third receiving space 2111 of the transfer box 211 are opposite to each other, so that the unloading robot 140 can move the tested product inside the first receiving space 111 to the inside of the third receiving space 2111. The second receiving space 112 of the transfer box 110 and the fourth receiving space 2112 of the transfer box 211 are opposite to each other, so that the transfer robot 212 can move the product to be tested inside the fourth receiving space 2112 to the inside of the second receiving space 112. The transfer robot 212 is movably positioned on one side of the transfer box 211. When the loading / unloading device 230 places the product to be tested into the fourth receiving space 2112, the transfer robot 212 can move to avoid the loading / unloading device 230. By changing the position of the transfer robot 212, interference between the transfer robot 212 and the loading / unloading device 230 can be avoided, ensuring that the target product can be smoothly transferred. Specifically, in this embodiment, the transfer robot 212 is positioned on the side of the transfer box 211 away from the transfer box 110. The transfer robot 212 and the unloading robot 150 have the same structure, thereby reducing the types of parts, facilitating the processing and assembly of the entire testing system, improving the manufacturing efficiency of the testing system, and reducing manufacturing costs.

[0108] Optionally, the loading and unloading device 230 includes:

[0109] The third lifting assembly 231 is located between the transfer device 210 and the storage device 220;

[0110] The loading / unloading assembly 232 and the third lifting assembly 231 are driven and connected to the loading / unloading assembly 232 so that the loading / unloading assembly 232 is located between the fourth receiving space 2112 and the sixth receiving space 2212 or between the third receiving space 2111 and the fifth receiving space 2211; and

[0111] The orientation component 233 is rotatably mounted on the loading and unloading component 232. The product under test adjusts its own direction through the orientation component 233. The product under test moves from inside the sixth receiving space 2212 to inside the fourth receiving space 2112 through the loading and unloading component 232 via the orientation component 233.

[0112] Reference Figure 11In this embodiment, the loading / unloading device 230 includes a third lifting component 231, a loading / unloading component 232, and a reversing component 233. The third lifting component 231 moves up and down, driving the loading / unloading component 232 to move up and down as well. This allows the product under test in the sixth receiving space 2212 to enter the fourth receiving space 2112 through the loading / unloading component 232, and the tested product in the fifth receiving space 2211 to enter the sixth receiving space 2212 through the loading / unloading component 232. The structure is simple and easy to implement. The reversing component 233 is located in the loading / unloading component 232. When the product under test passes through the loading / unloading component 232, it must pass through the reversing component 233. The reversing component 233 detects the placement direction of the product under test. If the placement direction of the product under test does not meet the testing requirements of the testing equipment 300, the reversing component 233 adjusts the placement direction of the product under test so that the placement direction meets the testing requirements before it enters the fourth receiving space 2112 through the loading / unloading component 232. This reduces testing problems caused by incorrect placement direction and improves the accuracy of the test. The loading and unloading assembly 232 can be designed to move the target product according to the type of the target product. In this embodiment, a guide rail and a belt mechanism are provided on the lifting platform. The belt mechanism adopts the form of synchronous belt drive. A mounting structure is provided on the synchronous belt. A robot arm is provided on the mounting structure. The robot arm moves linearly back and forth following the synchronous belt. The robot arm drives the iron ring to move along the guide rail by pushing and pulling, thereby moving the wafer on the iron ring.

[0113] In this embodiment, the loading / unloading device 230 further includes a moving component 234, which drives the third lifting component 231 to move linearly. The third lifting component 231 includes two synchronously lifting platforms, each platform corresponding to a loading / unloading component 232, and each loading / unloading component 232 corresponding to a steering component 233. The interval between the two loading / unloading components 232 corresponds to the interval between the two storage boxes 221. When one loading / unloading component 232 docks with the transfer box 211, the other loading / unloading component 232 simultaneously docks with the storage box 221, so that one loading / unloading component 232... When transferring the target product between the unloading component 232 and the transfer box 211, another loading / unloading component 232 can transfer the target product between the storage box 221. Then, through the movement of the moving component 234, the loading / unloading component 232 docked with the storage box 221 switches to docking with the transfer box 211, and the loading / unloading component 232 docked with the transfer box 211 switches to docking with the storage box 221. The two loading / unloading components 232 alternately transfer the target product, increasing the number of target products transferred between the transfer box 211 and the storage box 221 per unit time, thereby improving the transfer efficiency. Both the moving component 234 and the third lifting component 231 are linear reciprocating movement mechanisms, which can be implemented by means of cylinders, electric push rods, or lead screw and nut mechanisms, etc., as long as the functional requirements are met, no limitation is made here.

[0114] Optionally, the orientation component 233 includes:

[0115] A reversing stage 2331 is rotatably mounted on the loading / unloading assembly 232. The product to be tested is moved from the loading / unloading assembly 232 to the reversing stage 2331, and the reversing stage 2331, through its own rotation, causes the product to be tested to change direction; and

[0116] The scanner 2332 is electrically connected to the orientation stage 2331 and is spaced apart on the side of the product under test away from the orientation stage 2331 to detect the orientation of the product under test.

[0117] Reference Figure 12 In this embodiment, the orientation component 233 includes an orientation stage 2331 and a scanner 2332. The product to be tested is first moved to the orientation stage 2331 via the loading and unloading component 232. The scanner 2332 detects the placement orientation of the product to be tested on the orientation stage 2331. Specifically, in this embodiment, a barcode is provided on the iron ring. When the scanner 2332 cannot scan the barcode, it indicates that the wafer placement orientation is incorrect. The orientation stage 2331 then rotates, causing the iron ring to rotate, until the scanner 2332 scans the barcode, indicating that the wafer placement orientation is correct. If the orientation stage 2331 rotates more than one revolution and the scanner 2332 still does not detect the barcode, it indicates that there is no barcode and an error will be reported.

[0118] Reference Figure 7 In this embodiment, the testing system also includes a control device 400, which is electrically connected to the transfer device 100, the storage device 200, and the testing device 300. The control device 400 enables the transfer device 100, the storage device 200, and the testing device 300 to operate automatically, improving the overall efficiency of the testing system and reducing errors caused by human operation. The control device 400 can control the timing of the transfer of the target product between the transfer device 100 and the testing device 300, allowing for regular material transfer between them, thereby improving the working efficiency of each testing device 300. Furthermore, during the testing process of the testing device 300, the transfer device 100 can transfer materials with the transfer unit 210, thereby improving transfer efficiency and ultimately enhancing the overall efficiency of the testing system.

[0119] Reference Figure 7In this embodiment, the testing system also includes a safety door 500, which is located at the end of the transfer device 100 away from the storage device 200. The safety door 500, the storage device 200, and the testing device 300 surround and form a transfer area. The transfer box 110 moves within this transfer area. The safety door 500 and the displacement device 120 are interlocked. When the safety door 500 is closed, the transfer box 110 of the transfer device 100 can move through the displacement device 120. When the safety door 500 is open, the transfer box 110 cannot move.

[0120] The above description is merely an optional embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made using the contents of the present invention's specification and drawings under the inventive concept of the present invention, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present invention.

Claims

1. A transfer device, characterized in that, include: The transfer box is provided with a first receiving space and a second receiving space, both of which are used to receive the target product. A displacement device is located at the bottom of the transfer box and is driven to drive the transfer box to move. A pick-and-place device is movably disposed on the displacement device and spaced apart from the transfer box. The pick-and-place device moves the target product outside the transfer equipment to the inside of the first receiving space or moves the target product inside the second receiving space to the outside of the transfer equipment through its own movement. A material unloading robot is movably located on one side of the transfer box. The material unloading robot moves the target product inside the first receiving space to the outside of the transfer equipment or away from the first receiving space to avoid the picking and placing device. as well as The unloading robot is movably located on one side of the transfer box. The unloading robot moves the target product inside the second receiving space to the outside of the transfer equipment or away from the second receiving space to avoid the picking and placing device.

2. The transfer equipment as described in claim 1, characterized in that, The unloading robot and the unloading robot are symmetrically arranged and located on opposite sides of the pick-and-place device.

3. The transfer equipment as described in claim 2, characterized in that, The unloading robot includes: First lifting assembly; A first telescopic assembly, wherein a first lifting assembly is driven to connect to the first telescopic assembly to move the first telescopic assembly closer to or further away from the second receiving space; and A pusher component, wherein the first telescopic component is driven to extend into the interior of the second receiving space and push the target product out of or out of the second receiving space.

4. The transfer device as described in claim 1, characterized in that, The pick-and-place device includes: The second lifting component is spaced apart from the transfer box; Rotating assembly, the second lifting assembly being driven and connected to the rotating assembly; and The pick-and-place mechanism is driven by the rotating component to rotate, so that the pick-and-place mechanism is oriented toward the transfer box or toward the outside of the transfer equipment.

5. The transfer device as described in claim 4, characterized in that, The picking and placing mechanism includes: The second telescopic component is driven by the rotating component. A material handling robot, wherein the second telescopic component drives the material handling robot to extend into or retract from the second receiving space; A third telescopic assembly, wherein the rotating assembly drives and connects to the third telescopic assembly to cause the second telescopic assembly and the third telescopic assembly to rotate synchronously; and A material unloading robot arm, wherein the third telescopic component drives the material unloading robot arm to extend into or retract from the first receiving space.

6. A testing system, characterized in that, include: The transfer equipment as described in any one of claims 1-5; A storage device is located at one end of the transfer device; as well as The testing equipment is located on one side of the transfer equipment. The product under test is moved to the second receiving space through the storage equipment, and the product under test inside the second receiving space is moved to the testing equipment through the transfer equipment. The tested product is moved from the testing equipment to the first receiving space via the transfer equipment, and the tested product inside the first receiving space is moved to the storage device via the transfer equipment.

7. The testing system as described in claim 6, characterized in that, The storage device includes: A transfer device is located at one end of the transfer equipment, and the transfer device is provided with a third receiving space and a fourth receiving space; A storage device is located on the side of the transfer device opposite to the transfer equipment. The storage device includes a fifth receiving space and a sixth receiving space. The fifth receiving space is used to receive the tested product, and the sixth receiving space is used to receive the product to be tested. The loading and unloading device is movably disposed between the transfer device and the storage device. The product to be tested is moved from the sixth receiving space to the fourth receiving space via the loading and unloading device. The product to be tested inside the fourth receiving space is moved to the second receiving space via the transfer device. The tested product is moved from the first receiving space to the third receiving space via the unloading robot. The tested product inside the third receiving space is moved to the interior of the fifth receiving space via the loading and unloading device.

8. The testing system as described in claim 7, characterized in that, The transfer device includes: A transfer container, located at one end of the transfer equipment, is provided with the third receiving space and the fourth receiving space; and A transfer robot is movably located on the side of the transfer box away from the transfer equipment. The transfer robot moves the product to be tested inside the fourth receiving space to the second receiving space or away from the fourth receiving space to avoid the loading and unloading device.

9. The testing system as described in claim 7, characterized in that, The loading and unloading device includes: A third lifting assembly is disposed between the transfer device and the storage device; A loading / unloading assembly, wherein the third lifting assembly is driven and connected to the loading / unloading assembly so that the loading / unloading assembly is located between the fourth and sixth receiving spaces or between the third and fifth receiving spaces; and An orientation adjustment component is rotatably disposed on the loading and unloading component. The product under test adjusts its own direction through the orientation adjustment component. The product under test moves from inside the sixth receiving space to inside the fourth receiving space through the loading and unloading component.

10. The testing system as described in claim 9, characterized in that, The orientation component includes: A steering platform is rotatably mounted on the loading and unloading assembly. The product to be tested is moved to the steering platform via the loading and unloading assembly, and the steering platform, through its own rotation, causes the product to be tested to change direction; and A scanner, electrically connected to the orientation stage, is spaced apart on the side of the product under test away from the orientation stage, and is used to detect the orientation of the product under test.

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