A sintering ceramic surface repair process and drying apparatus

Abstract

The application discloses a sintered ceramic surface repairing process and drying equipment, and relates to the technical field of sintered ceramic surface repairing, which comprises the following steps: S1; substrate cleaning; S2; sand blasting; S3; primary cleaning and drying; S4; primary melting spraying; S6; secondary melting spraying; S7; remelting; and S8; cleaning and baking. The process can be used for repairing the sintered ceramic with surface loss, and the performance of the repaired sintered ceramic is consistent with that of the original sintered ceramic, so that the sintered ceramic with loss can be recycled and utilized, resource waste is avoided, and the production cost is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of sintered ceramic surface repair, in particular to a sintered ceramic surface repair process and drying equipment. BACKGROUND

[0002] With the popularization of semiconductor localization, customers have higher and higher requirements for the surface treatment process of parts. Existing semiconductor localization suppliers, especially etching parts, require excellent performance of good resistance to plasma bombardment. The core etching chamber top window and gas injector are affected by corrosive gas and are closer to the plasma source, so they receive more significant bombardment and corrosion erosion. Therefore, quartz or ceramic substrates are used as the first choice of materials in the industry. High-performance ceramic materials are increasingly widely used. Although sintered ceramic substrates have very good corrosion resistance, as the RF time increases and the cleaning frequency of the parts increases, the ceramic substrate will also have different degrees of corrosion, pits, size loss and other defects. Therefore, coating repair can effectively solve these defect problems of the ceramic surface and prolong the service life.

[0003] There are several common existing surface treatment methods for high-performance ceramic windows. One is to use bare ceramic directly, one is to use atmospheric plasma sprayed yttrium oxide, and one is PVD (physical vapor deposition) yttrium oxide dense coating. Their functions are to prolong the service life of the parts. Another special case is that a multi-layer co-sintering technology is used in the sintering process of the ceramic. The difficulty of this technology lies in sintering ceramic powder of two or more different materials into one body, which can be imagined as a'steamed bun', with the skin and stuffing forming a high-density functional ceramic. Currently, this technology is not mature in China. There is still a certain gap in the sintering process of the ceramic. The density, thickness, diameter size of the product are not as good as foreign products. Therefore, such ceramic windows are expensive, and as the number of uses, cleaning loss, size change and surface morphology defects increase, abnormal phenomena such as obvious defects occur. The customer's solution is to replace new parts. From the perspective of procurement cycle or cost, it is a huge cost expenditure.

[0004] Existing multilayer co-fired ceramics (comprising an alumina matrix and a YAG matrix surrounding the alumina matrix) experience surface wear with repeated use, resulting in a concave outer surface. During use, this wear-prone areas are more prone to particle-related defects. This surface inhomogeneity also affects other parameters within the chamber, such as the uniformity of plasma distribution, the risk of adsorption / deposition, increased resistance fluctuations within the etching chamber, and even the risk of unadsorbed particles arguing with other process kits. Therefore, improving and repairing the surface of the parts is crucial.

[0005] Therefore, this application provides a sintered ceramic surface repair process and drying equipment to meet the requirements. Summary of the Invention

[0006] The purpose of this application is to provide a sintered ceramic surface repair process and drying equipment for repairing the surface of sintered ceramics.

[0007] To achieve the above objectives, this application provides the following technical solution: a sintered ceramic surface repair process, the steps of which are as follows:

[0008] S1; Substrate cleaning: Wipe the surface of the component with IPA, and use high-pressure pure water to thoroughly rinse the particles on the surface of the substrate to remove physical and chemical residues, especially some attached organic matter;

[0009] S2; Sandblasting: Select 200-mesh alumina abrasive and apply 60psi pressure to remove contaminants from the substrate surface, creating a certain surface roughness to facilitate coating adhesion and ensure good bonding. YAG ceramic roughness Ra: 3~7μm;

[0010] S3; One-time cleaning and drying: After cleaning the sand particles remaining on the surface after sandblasting, use high-pressure pure water to thoroughly rinse to prevent sand dust from adhering to the surface and affecting the coating adhesion. Then use drying equipment to heat and dry at a stable temperature of 100-120℃ to remove the moisture adsorbed by the substrate and prevent the coating from peeling off due to the vaporization and expansion of hot water during spraying.

[0011] S4; Single-stage plasma spraying: Using a plasma spraying device, select alumina powder with a particle size D50 of 35μm, and select alumina purity of >99.9%. Adjust the plasma spraying parameters: argon 35~45 L / min, hydrogen 5~11 L / min, voltage 35~40V, current 550~600A, and control the coating thickness to 60~100μm.

[0012] S5; Secondary cleaning and drying: Clean the residual substances on the surface after spraying, rinse thoroughly with high-pressure pure water, and then use drying equipment to heat and dry at a stable temperature of 100-120℃ to remove the moisture adsorbed by the substrate and prevent the coating from peeling off due to the vaporization and expansion of hot water during spraying.

[0013] S6; Secondary plasma spraying: Select YAG powder with a particle size D50 of 35μm, and adjust the plasma spraying parameters: argon 25-35L / min, hydrogen 3-7 L / min, voltage 25-35V, current 450-550A, and control the coating thickness to 120-150μm.

[0014] S7; Remelting: Adjust plasma parameters: Argon 35~45 L / Min, Hydrogen 5~11 L / Min, Voltage 35~40V, Current 500~600A.

[0015] S8; Cleaning and baking: Use high-pressure pure water to thoroughly rinse away residual impurities on the surface, then place it in a vacuum oven and slowly heat it to 200-300℃, keep it for 2-3 hours, and then let it cool naturally to eliminate the internal stress of the substrate and coating.

[0016] Preferably, a preheating treatment is required before steps S4 and S6, in which the substrate is heated to 80-150°C before spraying.

[0017] Preferably, in step S7, the distance between the robot spray gun nozzle and the part surface is 100-140mm, the speed is set to 250-350m / s, and the process is repeated twice.

[0018] A drying device includes a chain conveyor, a vortex tube, and several placement racks mounted on the chain conveyor. The chain conveyor frame is provided with a U-shaped heating chamber and a U-shaped cooling chamber. The top of the inner cavity of both the U-shaped heating chamber and the U-shaped cooling chamber is provided with a groove. An air distribution pipe is provided in each of the two grooves. The air inlet end of the air distribution pipe located in the U-shaped heating chamber is connected to the hot end of the vortex tube, and the air inlet end of the air distribution pipe located in the U-shaped cooling chamber is connected to the cold end of the vortex tube. The air inlet end of the vortex tube is connected to the output end of a gas pressurizing pump, and the air inlet end of the gas pressurizing pump is connected to the outlet end of an air filter.

[0019] The placement rack includes a U-shaped plate fixed to the chain plate by mounting blocks. The inner cavity of the U-shaped plate is provided with a number of ceramic bearing components. Each ceramic bearing component includes two fixedly mounted bearing rods, and a number of limiting blocks are equally spaced on the two bearing rods.

[0020] Preferably, a water-blocking side plate is fixed to one side of the U-shaped plate, and two triangular guide blocks are arranged near the water-blocking side plate. A one-way valve is provided in the inner cavity of the water outlet of the water-blocking side plate. The bottom surface of the inner cavity of the U-shaped plate is set as an inclined surface, and the lowest end of the inclined surface is located near the water-blocking side plate. The side walls of the U-shaped heating chamber and the U-shaped cooling chamber are provided with through holes adapted to the water outlet, and guide pipes are installed in the inner cavities of the two through holes. The liquid outlets of the two guide pipes are connected to the same vertical pipe. The interior of the vertical pipe is provided with a guide channel. A receiving funnel is provided below the liquid outlet of the vertical pipe, and a receiving bottle is detachably installed at the liquid outlet of the receiving funnel. Elastic sealing gaskets are provided on the inner walls of the U-shaped heating chamber and the U-shaped cooling chamber.

[0021] Preferably, the vertical pipe is configured as a Tesla valve to slow down airflow and accelerate gas mixing.

[0022] Preferably, the Tesla valve has a collision chamber at its air inlet, the liquid outlets of the two guide pipes are inclined, and the collision point of the gas discharged from the two guide pipes is located above the air inlet.

[0023] Preferably, the lower end of the guide tube is fitted with a tube body, and the inner cavity of the tube body is fitted with an air extraction device.

[0024] In summary, the technical effects and advantages of this invention are as follows:

[0025] The present invention has a reasonable process structure, which can repair sintered ceramics with surface damage and make the performance of the repaired sintered ceramics consistent with that of the original sintered ceramics. This allows the damaged sintered ceramics to be recycled and reused, avoiding waste of resources and reducing production costs.

[0026] In this invention, a preheating treatment is required before each melt spraying to heat the substrate to 80-150°C. This can prevent the temperature difference from being too large when the sprayed powder comes into contact with the substrate, which could lead to thermal stress deformation of the substrate.

[0027] In this invention, a production line-style drying equipment is used, which has high drying efficiency and will not cause burns to personnel, thus avoiding accidents. In addition, this drying equipment uses a combination of vortex tubes and air pressure boosting pumps for heating and cooling, resulting in low self-manufacturing costs and operating costs.

[0028] In this invention, droplets falling from sintered ceramics can be collected, and cold air and hot humid air can be neutralized by collision mixing, which can improve the heat neutralization efficiency and avoid the direct discharge of hot or cold air from affecting the external environment temperature and the workers. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 A flowchart illustrating the preparation process for surface repair of sintered ceramics;

[0031] Figure 2 This is a schematic diagram of the drying equipment of the present invention;

[0032] Figure 3 This is a bottom view schematic diagram of the U-shaped heating chamber and U-shaped cooling chamber of the present invention;

[0033] Figure 4 For the present invention Figure 2 Enlarged structural diagram at point A in the middle;

[0034] Figure 5 For the present invention Figure 2 Top view of the centrally placed rack structure;

[0035] Figure 6 For the present invention Figure 2 Schematic diagram of the central placement rack structure;

[0036] In the diagram: 1. Chain conveyor; 2. U-shaped heating chamber; 3. U-shaped cooling chamber; 4. Placement rack; 41. U-shaped plate; 42. Water-blocking side plate; 43. Triangular guide block; 44. One-way valve; 45. Mounting block; 46. Bearing rod; 47. Limiting block; 5. Vortex tube; 6. Elastic sealing gasket; 7. Guide pipe; 8. Pipe body; 9. Air distribution pipe; 10. Receiving funnel; 11. Vertical pipe; 111. Air inlet; 112. Collision chamber. Implementation

[0037] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0038] A surface repair process for sintered ceramics, comprising the following steps:

[0039] S1; Substrate cleaning: Wipe the surface of the component with IPA, and use high-pressure pure water to thoroughly rinse the particles on the surface of the substrate to remove physical and chemical residues, especially some attached organic matter;

[0040] S2; Sandblasting: Select 200-mesh alumina abrasive and apply 60psi pressure to remove contaminants from the substrate surface, creating a certain surface roughness to facilitate coating adhesion and ensure good bonding. YAG ceramic roughness Ra: 3~7μm;

[0041] S3; One-time cleaning and drying: After cleaning the sand particles remaining on the surface after sandblasting, use high-pressure pure water to thoroughly rinse to prevent sand dust from adhering to the surface and affecting the coating adhesion. Then use drying equipment to heat and dry at a stable temperature of 100-120℃ to remove the moisture adsorbed by the substrate and prevent the coating from peeling off due to the vaporization and expansion of hot water during spraying.

[0042] S4; Single-stage plasma spraying: A plasma spraying device is used, and alumina powder with a particle size D50 of 35μm is selected. The purity of the alumina is selected to be >99.9%. The plasma spraying parameters are adjusted as follows: argon 35-45 L / min, hydrogen 5-11 L / min, voltage 35-40V, current 550-600A. The coating thickness is controlled to be 60-100μm. The purity of the alumina is selected to be >99.9%, and the particle size is selected to be around 35μm. Good purity and fluidity can ensure the stability of the coating porosity and good breakdown resistance.

[0043] S5; Secondary cleaning and drying: Clean the residual substances on the surface after spraying, rinse thoroughly with high-pressure pure water, and then use drying equipment to heat and dry at a stable temperature of 100-120℃ to remove the moisture adsorbed by the substrate and prevent the coating from peeling off due to the vaporization and expansion of hot water during spraying.

[0044] S6; Secondary Spraying: Select YAG powder with a particle size D50 of 35μm, and adjust the plasma spraying parameters: argon 25-35L / min, hydrogen 3-7 L / min, voltage 25-35V, current 450-550A, controlling the coating thickness to 120-150μm. The argon and hydrogen flow rates are slightly reduced compared to the first coating layer (i.e., primary spraying), resulting in a decrease in power and avoiding over-melting of the powder. The purpose of secondary spraying is to use powder of the same material as the YAG substrate, with the first layer of alumina powder acting as a bondcoating, effectively releasing the internal stress of the YAG coating, and ensuring good adhesion during remelting and high-temperature or cooling processes.

[0045] S7; Remelting: Adjust plasma parameters: Argon 35-45 L / min, Hydrogen 5-11 L / min, Voltage 35-40V, Current 500-600A. The remelting parameter power settings ensure the temperature while reducing the spray gun cooling air pressure to meet the remelting requirements. The purpose of remelting is to seal and eliminate the powder particles conveyed to the YAG surface layer and the surface microcracks, making the surface and YAG substrate state similar. The original substrate is the sintered YAG surface layer. After repair and remelting, the surface is restored to its original state, so the performance of the component is not affected.

[0046] S8; Cleaning and baking: Use high-pressure pure water to thoroughly rinse away residual impurities on the surface, then place it in a vacuum oven and slowly heat it to 200-300℃, keep it for 2-3 hours, and then let it cool naturally to eliminate the internal stress of the substrate and coating.

[0047] Before steps S4 and S6, preheating treatment is required. Before spraying, the substrate is heated to 80-150°C to prevent excessive temperature difference when the sprayed powder comes into contact with the substrate, which would cause thermal stress deformation of the substrate. Ceramics have good high temperature resistance, but the heating process needs to be controlled. Rapid heating will cause defects such as cracking and breakage of the substrate.

[0048] In step S7, the distance between the robot spray gun nozzle and the part surface is 100-140mm, and the speed is set to 250-350mm / s, repeating twice. During remelting, due to the influence of the heating rate of the ceramic substrate (rapid heating will cause defects such as substrate cracking and breakage), it is not advisable to heat rapidly. Therefore, the spray gun nozzle is controlled within this range of 100-140mm and moved at a speed of 250-350mm / s, repeating twice, which can achieve a good remelting effect.

[0049] A drying device includes a chain conveyor 1, a vortex tube 5, and several placement racks 4 mounted on the chain conveyor. The chain conveyor 1 has a U-shaped heating chamber 2 and a U-shaped cooling chamber 3 on its frame. The top of the inner cavity of the U-shaped heating chamber 2 and the U-shaped cooling chamber 3 are provided with grooves. Air distribution pipes 9 are provided in both grooves. The air inlet end of the air distribution pipe 9 in the U-shaped heating chamber 2 is connected to the hot end of the vortex tube 5, and the air inlet end of the air distribution pipe 9 in the U-shaped cooling chamber 3 is connected to the cold end of the vortex tube 5. The air inlet end of the vortex tube 5 is connected to the output end of a gas pressurizing pump, and the air inlet end of the gas pressurizing pump is connected to the outlet end of an air filter. The placement rack 4 includes a U-shaped plate 41 fixed to the chain conveyor by mounting blocks 45. The inner cavity of the U-shaped plate 41 is provided with several ceramic bearing components. The ceramic bearing components include two fixedly mounted bearing rods 46, and several limiting blocks 47 are equally spaced on the two bearing rods 46.

[0050] This equipment uses a gas pressurization pump to pressurize and deliver purified gas into the vortex tube 5. The vortex tube 5 utilizes its structural characteristics to generate hot and cold air. The hot air is used to heat and dry the sintered ceramics (which are placed vertically on the rack 4) entering the U-shaped heating chamber 2. After drying, the sintered ceramics on the rack 4 are moved into the next U-shaped cooling chamber 3 by the movement of the chain plate for cooling. This ensures the cooling temperature of the sintered ceramics and facilitates their removal from the rack 4, effectively preventing burns. While the U-shaped heating chamber 2 and U-shaped cooling chamber 3 are drying and cooling the sintered ceramics, operators can load and unload the two racks 4 located on either side of the U-shaped heating chamber 2 and U-shaped cooling chamber 3. When the rack 4 enters the U-shaped heating chamber 2 and U-shaped cooling chamber 3, the sides of its U-shaped plates 41 will contact the inner wall of the U-shaped heating chamber 2 or U-shaped cooling chamber 3, preventing the loss of internal heat and cold air.

[0051] It is important to note the following: First, this equipment requires two operators, one on each side of the U-shaped heating chamber 2 and U-shaped cooling chamber 3. One operator feeds the material, and the other moves it up and down. This equipment uses a streamlined drying process, which significantly improves work efficiency compared to traditional drying boxes. Second, the U-shaped plate 41 is made of heat-insulating material to prevent heat or cold air loss. Third, the gas pressurization pump only starts working when the placement rack 4 enters the U-shaped heating chamber 2 or U-shaped cooling chamber 3. A photoelectric switch can be installed inside the U-shaped heating chamber 2 or U-shaped cooling chamber 3 to detect whether the placement rack 4 is in place. The gas pressurization pump, photoelectric switch, and chain conveyor 1 are all electrically connected to the PLC controller. Fourth, the vertical placement of the sintered ceramics facilitates the dripping of cleaning water, promoting rapid drying. Fifth, this drying equipment uses a combination of vortex tubes and a gas pressurization pump for heating and cooling, resulting in lower manufacturing and operating costs.

[0052] In this embodiment, a water-blocking side plate 42 is fixed to one side of the U-shaped plate 41. Two triangular guide blocks 43 are arranged near the water-blocking side plate 42. A one-way valve 44 is arranged in the inner cavity of the water outlet of the water-blocking side plate 42. The bottom surface of the inner cavity of the U-shaped plate 41 is set as an inclined surface, and the lowest end of the inclined surface is located near the water-blocking side plate 42. The side walls of the U-shaped heating chamber 2 and the U-shaped cooling chamber 3 are provided with through holes adapted to the water outlets, and guide pipes 7 are installed in the inner cavities of the two through holes. The liquid outlets of the two guide pipes 7 are connected to the same vertical pipe 11. The interior of the vertical pipe 11 is provided with a guide channel. A receiving funnel 10 is arranged below the liquid outlet of the vertical pipe 11. The outlet of the material funnel 10 is detachably equipped with a receiving bottle. The inner walls of the U-shaped heating chamber 2 and the U-shaped cooling chamber 3 are provided with elastic sealing gaskets 6. When the placement rack 4 is located in the U-shaped heating chamber 2 or the U-shaped cooling chamber 3, its U-shaped plate 41 will contact the elastic sealing gasket 6 to form a seal. When the vortex tube 5 is working, when there is too much gas inside the U-shaped heating chamber 2 or the U-shaped cooling chamber 3, it will push up the internal seal of the one-way valve 44, so that the gas inside the U-shaped heating chamber 2 or the U-shaped cooling chamber 3 can be discharged to the outside through the guide pipe 7. At the same time, the droplets dripping from the sintered ceramic can flow into the guide pipe 7 through the one-way valve 44 and finally flow into the receiving bottle for collection.

[0053] It should be noted that: First, during the feeding process, the one-way valve 44 on the placement rack 4 is closed to prevent the dripping liquid from the sintered ceramic from flowing out of the outlet; Second, the two triangular guide blocks 43 serve to guide the flow, which can concentrate the dripping liquid towards the outlet. The purpose of the inclined bottom surface of the inner cavity of the U-shaped plate 41 is also to concentrate the dripping liquid towards the outlet.

[0054] In a preferred embodiment of this invention, the vertical pipe 11 is configured as a Tesla valve to slow down airflow and accelerate gas mixing. When hot and humid air and cold air that has absorbed heat and still has a cooling function are injected into the Tesla valve at the same time, the internal structure of the Tesla valve allows the hot and humid air to collide and mix with the cold air, which can slow down airflow to prolong heat exchange time. At the same time, it is conducive to the full heat exchange between the hot and humid air and the cold air. The droplets generated after the hot and humid air cools down fall into the receiving bottle, which can avoid excessive humidity in the indoor environment. At the same time, the heat is neutralized, which can prevent the discharge of hot or cold air from affecting the external ambient temperature and affecting the staff. It can make the discharged gas as close as possible to the room temperature.

[0055] In this embodiment, the Tesla valve has a collision chamber 112 at the air inlet 111, the liquid outlets of the two guide pipes 7 are inclined, and the collision point of the gas discharged from the two guide pipes 7 is located above the air inlet 111. Hot and humid gas and cold gas will collide and mix before entering the air inlet 111, further improving the heat neutralization efficiency.

[0056] As a preferred embodiment of this example, the lower end of the guide pipe 7 is equipped with a pipe body 8, and the inner cavity of the pipe body 8 is equipped with an air extraction device. The air extraction device can be used to assist in air extraction, which can prevent the overflow of hot and humid air and cold air when the placement rack 5 is moved out of the U-shaped heating chamber 2 or the U-shaped cooling chamber 3.

[0057] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A surface repair process for sintered ceramics, comprising the following steps: S1; Substrate cleaning: Wipe the surface of the component with IPA, and use high-pressure pure water to thoroughly rinse the particles on the surface of the substrate to remove some attached organic matter that is physically and chemically residual; S2； Sandblasting: Select 200-mesh alumina abrasive and apply 60 psi pressure to remove contaminants from the substrate surface, creating a certain surface roughness to facilitate coating adhesion and ensure good bonding. YAG ceramic roughness Ra: 3~7μm; S3; One-time cleaning and drying: After cleaning the sand particles remaining on the surface after sandblasting, use high-pressure pure water to thoroughly rinse to prevent sand dust from adhering to the surface and affecting the coating adhesion. Then use drying equipment to heat and dry at a stable temperature of 100-120℃ to remove the moisture adsorbed by the substrate and prevent the coating from peeling off due to the vaporization and expansion of hot water during spraying. S4; Single-stage plasma spraying: Using a plasma spraying device, select alumina powder with a particle size D50 of 35μm, and select alumina purity of >99.9%. Adjust the plasma spraying parameters: argon 35~45 L / min, hydrogen 5~11 L / min, voltage 35~40V, current 550~600A, and control the coating thickness to 60~100μm. S5; Secondary cleaning and drying: Clean the residual substances on the surface after spraying, rinse thoroughly with high-pressure pure water, and then use drying equipment to heat and dry at a stable temperature of 100-120℃ to remove the moisture adsorbed by the substrate and prevent the coating from peeling off due to the vaporization and expansion of hot water during spraying. S6; Secondary spraying: Select YAG powder with a particle size D50 of 35μm, and adjust the plasma spraying parameters: argon 25~35 L / Min, hydrogen 3~7 L / Min, voltage 25~35V, current 450~550A, and control the coating thickness to 120~150μm. S7； Remelting: Adjust plasma parameters: argon 35-45 L / min, hydrogen 5-11 L / min, voltage 35-40V, current 500-600A; S8; Cleaning and baking: Use high-pressure pure water to thoroughly rinse away residual impurities on the surface, then place it in a vacuum oven and slowly heat it to 200-300℃, keep it for 2-3 hours, and then let it cool naturally to eliminate the internal stress of the substrate and coating. The drying equipment includes a chain conveyor (1), a vortex tube (5), and several placement racks (4) installed on the chain. The frame of the chain conveyor (1) is provided with a U-shaped heating chamber (2) and a U-shaped cooling chamber (3). The top of the inner cavity of the U-shaped heating chamber (2) and the U-shaped cooling chamber (3) are provided with grooves. Air distribution pipes (9) are provided in both grooves. The air inlet end of the air distribution pipe (9) located in the U-shaped heating chamber (2) is connected to the hot end of the vortex tube (5). The air inlet end of the air distribution pipe (9) located in the U-shaped cooling chamber (3) is connected to the cold end of the vortex tube (5). The air inlet end of the vortex tube (5) is connected to the output end of the gas pressurizing pump. The air inlet end of the gas pressurizing pump is connected to the air outlet end of the air filter. The placement rack (4) includes a U-shaped plate (41) fixed on the chain plate by a mounting block (45). The inner cavity of the U-shaped plate (41) is provided with a number of ceramic bearing components. The ceramic bearing components include two fixed bearing rods (46), and a number of limiting blocks (47) are provided at equal intervals on the two bearing rods (46).

2. The sintered ceramic surface repair process according to claim 1, characterized in that: Before steps S4 and S6, a preheating treatment is required, in which the substrate is heated to 80-150°C before spraying.

3. The sintered ceramic surface repair process according to claim 1, characterized in that: In step S7, the distance between the robot spray gun nozzle and the part surface is 100-140mm, the speed is set to 250-350m / s, and the process is repeated twice.

4. The sintered ceramic surface repair process according to claim 1, characterized in that: A water-blocking side plate (42) is fixed on one side of the U-shaped plate (41). Two triangular guide blocks (43) are provided near the water-blocking side plate (42). A one-way valve (44) is provided in the inner cavity of the water outlet of the water-blocking side plate (42). The bottom surface of the inner cavity of the U-shaped plate (41) is set as an inclined surface, and the lowest end of the inclined surface is set near the water-blocking side plate (42). The side walls of the U-shaped heating chamber (2) and the U-shaped cooling chamber (3) are provided with through holes that are compatible with the water outlet. The inner cavities of the two through holes are equipped with guide pipes (7). The liquid outlets of the two guide pipes (7) are connected to the same vertical pipe (11). The interior of the vertical pipe (11) is provided with a guide channel. A receiving funnel (10) is provided below the liquid outlet of the vertical pipe (11), and a receiving bottle is detachably installed at the liquid outlet of the receiving funnel (10).

5. The sintered ceramic surface repair process according to claim 4, characterized in that: The vertical pipe (11) is configured as a Tesla valve to slow down the airflow and accelerate the mixing of gases.

6. The sintered ceramic surface repair process according to claim 5, characterized in that: The Tesla valve has a collision chamber (112) at the air inlet (111), the outlets of the two guide pipes (7) are inclined, and the collision point of the gas discharged from the two guide pipes (7) is located above the air inlet (111).

7. The sintered ceramic surface repair process according to claim 4, characterized in that: The lower end of the guide tube (7) is fitted with a tube body (8), and the inner cavity of the tube body (8) is fitted with an air extraction device.

Images