A support device and system for achieving stable replication of grating grooves

Abstract

The present invention relates to the field of semiconductor mechanism technology, and in particular to a support device and system for achieving stable replica grating groove type, wherein the support device comprises a support structure, a first structure, a second structure and a support plate. A rigid structure with a preset angle is provided in a partial structure within the support structure, which is used to form a replica grating groove type, so as to fix at least a part of the entire replica grating groove type. The first structure is arranged on both sides of the support structure, and plays a supporting role for the entire main body of the support structure. The second structure positions and locks the degree of freedom of replica grating groove types of different sizes. One end of the support plate is connected to a rotatable first connection point of the rigid structure, and the other end is a rotatable second connection point connected to the first structure. The second structure is arranged at different positions on the corresponding two sides of the support plate to control the positioning accuracy between the replica grating groove type and the master grating groove type. The support device of the present application ensures the consistency of the groove type between the replica grating and the master grating.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor mechanisms, and in particular to a supporting device and a system for realizing stable replication of grating grooves. Background Art

[0002] With the rapid development and application of high-precision spectroscopic instruments, the requirements for the performance of its core component, the grating, are becoming increasingly higher. In particular, the market demand for high-end gratings such as large-area medium-step gratings is increasing day by day. In order to reduce manufacturing costs and maintain high utilization of master gratings, the process requirements for replicating gratings have become a very important link.

[0003] In order to achieve the consistency of the groove shape between the master grating and the replica grating, a traditional solution is to vacuum-aluminize the surface of the master grating, then bond them with epoxy resin glue, and finally split them to achieve the replication of the master grating. However, although epoxy resin glue can achieve seamless bonding of gratings, it is difficult to solidify at room temperature and takes a long time to solidify. Therefore, in the process of replicating large-area and heavy gratings, the groove shape often appears to be squeezed and deformed, resulting in poor consistency of the groove shape between the replica grating and the master grating, which greatly affects the efficiency of grating replication.

[0004] In addition, although epoxy resin glue can solidify at high temperature, it is in liquid state and the surface of the replica grating blank is relatively smooth. Therefore, it is very easy to cause position differences between the replica grating and the master grating during the solidification process, which not only affects the grating replication efficiency, but also destroys the master grating. Summary of the invention

[0005] In order to overcome the problems of the existing process technology, a support device for realizing stable groove shape of replicated grating is provided, and the support device for realizing stable groove shape of replicated grating comprises:

[0006] A supporting structure, wherein a rigid structure with a first preset angle is provided in a partial structure within the supporting structure, and the rigid structure is used to form a replica grating groove to stably fix at least a portion of the entire replica grating groove;

[0007] A first structure is arranged on both sides of the supporting structure, and the first structure is used to support the entire body of the supporting structure;

[0008] A second structure, wherein the second structure positions and locks the degrees of freedom of the replica grating grooves of different sizes;

[0009] A support plate, one end of which is connected to a rotatable first connection point of the rigid structure, and the other end of which is connected to a rotatable second connection point of the first structure, wherein the second structure is arranged at different positions on the corresponding two sides of the support plate to control the positioning accuracy between the replica grating groove and the master grating groove.

[0010] In one embodiment, a rigid structure of a 90° isosceles right triangle is provided in a partial structure within the support structure.

[0011] In one embodiment, the rigid structure is used to form the replica grating groove to fix the overall bottom of the replica grating groove.

[0012] In one embodiment, the second structure is arranged at different positions on the corresponding two sides of the support plate through a slide rail with a variable locking position reserved, so as to control the positioning accuracy between the replica grating groove and the master grating groove.

[0013] In one embodiment, one end of the support plate is connected to a rotatable first connection point of the rigid structure and rotates a second preset angle, and the other end of the support plate is connected to a rotatable second connection point of the first structure, changing a third preset angle of the rotation axis of the second connection point; so as to adjust the support device for achieving stable replication of the grating groove to form a variety of different shapes and meet the positioning accuracy between the replication grating groove and the master grating groove.

[0014] The present invention specifically further includes: a support system for realizing stable replication of grating grooves, the support system for realizing stable replication of grating grooves is applicable to a support device for realizing stable replication of grating grooves, the support system for realizing stable replication of grating grooves includes:

[0015] A first setting module controls a partial structure in the support structure to be provided with a rigid structure with a first preset angle, wherein the rigid structure is used to form a replica grating groove profile, so as to stably fix at least a portion of the entirety of the replica grating groove profile;

[0016] A second setting module controls the first structure to be set on both sides of the supporting structure, wherein the first structure is used to support the entire body of the supporting structure;

[0017] A positioning module controls the second structure to position and lock the degrees of freedom of the replica grating grooves of different sizes;

[0018] A first connection module controls one end of the support plate to be connected to a rotatable first connection point of the rigid structure, and the other end of the support plate is a rotatable second connection point connected to the first structure, wherein the second structure is arranged at different positions on the corresponding two sides of the support plate to control the positioning accuracy between the replica grating groove and the master grating groove.

[0019] In one embodiment, the support system for achieving stable groove shape of the replicated grating comprises:

[0020] The third setting module controls the partial structure within the support structure to be provided with a rigid structure of a 90° isosceles right triangle.

[0021] In one embodiment, the support system for achieving stable groove shape of the replicated grating comprises:

[0022] The fixing module controls the rigid structure to form the replica grating groove, so as to fix the bottom of the entire replica grating groove.

[0023] In one embodiment, the support system for achieving stable groove shape of the replicated grating comprises:

[0024] The fourth setting module controls the second structure to be set at different positions on the corresponding two sides of the support plate through a slide rail with a variable clamping position reserved, so as to control the positioning accuracy between the replica grating groove and the master grating groove.

[0025] In one embodiment, the support system for achieving stable groove shape of the replicated grating comprises:

[0026] The second connection module controls the first rotatable connection point connected to the rigid structure at one end of the support plate to rotate to a second preset angle and the second rotatable connection point connected to the first structure at the other end of the support plate to change the third preset angle of the rotation axis of the second connection point; so as to adjust the support device to form a variety of different shapes and meet the positioning accuracy between the replica grating groove and the master grating groove.

[0027] Compared with the prior art, the present invention can achieve the following beneficial effects:

[0028] A support device for achieving stable replica grating grooves comprises a support structure, a first structure, a second structure and a support plate. A rigid structure with a preset angle is provided in a partial structure within the support structure, which is used to form a replica grating groove, so as to stably fix at least a part of the entire replica grating groove. The first structure is arranged on both sides of the support structure, and is used to support the entire main body of the support structure. The second structure positions and locks the degrees of freedom of replica grating grooves of different sizes. One end of the support plate is connected to a rotatable first connection point of the rigid structure, and the other end is a rotatable second connection point connected to the first structure. The second structure is arranged at different positions on the corresponding two sides of the support plate to control the positioning accuracy between the replica grating groove and the master grating groove. The support device for achieving stable replica grating grooves proposed in the present application can achieve position fixation between the master grating and the replica grating and reduce the effect of gravity, thereby ensuring the consistency of the grooves between the replica grating and the master grating. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a schematic diagram of the structural stress condition of a supporting device for realizing stable grating groove replication according to an embodiment of the present invention;

[0030] Figure 2 is a top view of a supporting device for achieving stable groove shape of a replicated grating according to an embodiment of the present invention;

[0031] Figure 3 is a front view of a supporting device for achieving stable groove shape of a replicated grating according to an embodiment of the present invention;

[0032] Figure 4 It is a block diagram of a support system for achieving stable groove shape of a replicated grating according to an embodiment of the present invention.

[0033] Reference numerals:

[0034] 100-support device; 1-support structure; 2-first structure; 3-second structure; 4-support plate; 400-support system for achieving stable replication of grating groove; 410-first setting module; 420-second setting module; 430-positioning module; 440-first connection module. DETAILED DESCRIPTION

[0035] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description, the same modules are represented by the same reference numerals. In the case of the same reference numerals, their names and functions are also the same. Therefore, the detailed description thereof will not be repeated.

[0036] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation of the present invention.

[0037] Please also see Figure 1-Figure 3 , Figure 1 is a schematic diagram of the structural stress of a supporting device for realizing stable grating groove replication according to an embodiment of the present invention, Figure 2 is a top view of a support device according to an embodiment of the present invention, Figure 3 1 is a front view of a supporting device for realizing stable replication of grating grooves according to an embodiment of the present invention. The present invention provides a supporting device for realizing stable replication of grating grooves (hereinafter referred to as "supporting device") 100. The supporting device 100 includes a supporting structure 1, a first structure 2, a second structure 3 and a supporting plate 4.

[0038] In one embodiment, a rigid structure with a first preset angle is provided in a partial structure in the support structure 1, and the rigid structure is used to form a replica grating groove to stably fix at least a part of the entire replica grating groove. Figure 1 , the support structure may refer to a triangular area, and the two adjacent sides of the triangle may be relatively adjusted to have the same side length or different side lengths according to the structure of the replica grating groove, and the present application is not limited thereto. The structure connecting the middle positions of the two adjacent sides of the triangle is to adjust the angle relatively according to the structure of the replica grating groove based on the connection point as the rotation axis. According to a similar principle, the two opposite vertices of the base of the triangle are connected to form different structures relative to the middle positions of each adjacent side. This structure may be parallel or non-parallel to the plane space in the vector direction. This structure may also relatively adjust the angle of its relative vector according to the structure of the replica grating groove. The function of the different structures is to support this support structure 1. In other words, the support device 100 of the present application mainly includes a triangular support structure 1, a structure with the same or different vectors, and a structure supporting the ground. The corresponding shapes are relatively adjusted according to the structure of the replica grating groove. According to the present invention, this purpose can be achieved by a spider-shaped support device, and the innermost body of the support device 100 is an isosceles right triangle for balancing the structure itself and providing support stability.

[0039] In one embodiment, the first structure 2 is disposed on both sides of the support structure 1, and the first structure 2 is used to support the entire body of the support structure 1. The second structure 3 positions and locks the degrees of freedom of replicating grating grooves of different sizes. For further details, please see Figure 2The second structure 3 is fixed in position by sliding forward or backward to a fixed point through a slide rail with a variable position set at different positions on both sides of the support plate 4 to control the positioning accuracy between the replica grating groove and the master grating groove. For example, the stepper motor can be used to control the replica grating groove and the master grating groove to almost the same shape with a positioning accuracy of several microns.

[0040] In one embodiment, one end of the support plate 4 is connected to a rotatable first connection point of the rigid structure, and the other end of the support plate 4 is a rotatable second connection point connected to the first structure 2. The second structure 3 is disposed at different positions on the corresponding two sides of the support plate 4 to control the positioning accuracy between the replica grating groove and the master grating groove, and further adjust the angles of the first, second, and third connection points according to the structure of the replica grating groove. A rigid structure of a 90° isosceles right triangle is disposed in a partial structure within the support structure 1. It should be noted that the rigid structure of the isosceles right triangle is only an example of this embodiment. In other embodiments, the triangle may also have a side length of The corresponding angles are 30°, 60°, and 90°, respectively. The present application is not limited to the shape of the triangle, and the shape of the triangle can be relatively adjusted according to the structural shape of the replica grating groove. The rigid structure is used to form the replica grating groove to fix the overall bottom of the replica grating groove. One end of the support plate 4 is connected to a rotatable first connection point of the rigid structure to rotate a second preset angle (for example, plus or minus 90°) and the other end of the support plate 4 is connected to a rotatable second connection point of the first structure 2 to change the third preset angle of the rotation axis of the second connection point (for example, 0° to 360°); so as to adjust the support device 100 to form a variety of different shapes and meet the positioning accuracy between the replica grating groove and the master grating groove.

[0041] As described above, the support frame used in the present application and the hypotenuse of the main triangle are connected at 90 degrees to carry the replicated grating pair. The support unit body adopts a rigid structure, and each independent support unit provides constraints in two directions: parallel to the side direction of the main body and tangential to the side direction of the main body, thereby completing the precise constraint and support functions.

[0042] For a single support frame part, there is a slotted slideway and an auxiliary support structure in the middle, which is used for accurate positioning and fixing of different sizes of replicated gratings and master gratings. The support device of the present application can realize efficient use of limited space, so that the oven can store more gratings in the replication process during the grating replication process, and can effectively reduce the groove shape changes caused by gravity extrusion of the grating blank glass as much as possible, thereby effectively ensuring the consistency of the groove shape, and can also effectively accurately position the replicated grating pair, effectively avoiding the position deviation caused by the thermal curing process of the colloid.

[0043] Among them, a rigid structure with a 90° connection is provided to ensure that the replica grating is fixed to the bottom. This method can well decompose the influence of the gravity of the large-sized and heavy grating blank itself. In each support plate unit, a slide rail with a variable position is reserved in the middle, and a structure is provided to position and lock another degree of freedom of gratings of different sizes, thereby ensuring the positioning accuracy between the replica grating and the master grating. The first structure 2 can effectively support the entire main body, thereby achieving the balance of the spider support device. All materials of the support structure are made of alloy Invar with a low thermal expansion coefficient, the linear expansion coefficient is 0.0000015, and the volume expansion coefficient is 0.0000045 to ensure the stability and applicability of the support device at high temperatures.

[0044] Please see Figure 1-Figure 4 , Figure 4 1 is a block diagram of a support system for stabilizing the groove shape of a replica grating according to an embodiment of the present invention. The present application proposes a support system for stabilizing the groove shape of a replica grating, and the support system 400 for stabilizing the groove shape of a replica grating includes:

[0045] A first setting module 410 controls a partial structure in the support structure to be provided with a rigid structure with a first preset angle (90°), wherein the rigid structure is used to form a replica grating groove to stably fix at least a portion of the entire replica grating groove;

[0046] A second setting module 420 controls the first structure 2 to be set on both sides of the support structure 1, wherein the first structure 2 is used to support the entire body of the support structure 1;

[0047] A positioning module 430 controls the second structure 3 to position and lock the degrees of freedom of the replica grating grooves of different sizes;

[0048] The first connection module 440 controls one end of the support plate 4 to be connected to a rotatable first connection point of the rigid structure, and the other end of the support plate 4 is connected to a rotatable second connection point of the first structure 2, wherein the second structure 3 is arranged at different positions on the corresponding two sides of the support plate 4 to control the positioning accuracy between the replica grating groove and the master grating groove.

[0049] In one embodiment, the support system 400 for achieving stable groove shape of replicated gratings comprises:

[0050] The third setting module (not shown) controls a partial structure in the support structure 1 to be provided with a rigid structure of a 90° isosceles right triangle.

[0051] In one embodiment, the support system 400 for achieving stable groove shape of replicated gratings comprises:

[0052] A fixing module (not shown) controls the rigid structure to form the replica grating groove, so as to fix the bottom of the entire replica grating groove.

[0053] In one embodiment, the support system 400 for achieving stable groove shape of replicated gratings comprises:

[0054] The fourth setting module (not shown) controls the second structure 3 to be set at different positions on the corresponding two sides of the support plate 4 through a slide rail with a variable position reserved, so as to control the positioning accuracy between the replica grating groove and the master grating groove.

[0055] In one embodiment, the support system 400 for achieving stable groove shape of replicated gratings comprises:

[0056] The second connection module (not shown) controls the first rotatable connection point at which one end of the support plate 4 is connected to the rigid structure to rotate to a second preset angle (for example, plus or minus 90°) and the second rotatable connection point at which the other end of the support plate 4 is connected to the first structure 2 to change a third preset angle (for example, 0° to 360°) of the rotation axis of the second connection point; so as to adjust the support device 100 to form a variety of different shapes and meet the positioning accuracy between the replica grating groove type and the master grating groove type.

[0057] It should be noted that those skilled in the art can clearly understand that, for the convenience and simplicity of description, the specific working process of the above-described device and unit can refer to the corresponding process in the aforementioned method embodiment, and will not be repeated here. In several embodiments provided in the present application, the coupling between modules can be electrical, mechanical or other forms of coupling. In addition, each functional module in each embodiment of the present application can be integrated in a processing module, or each module can exist physically separately, or two or more modules can be integrated in one module. The above-mentioned integrated module can be implemented in the form of hardware or in the form of software functional modules.

[0058] The present application also proposes a computer-readable storage medium, on which a computer program is stored, and when the computer program is executed by a processor, the steps of executing each module as described above are implemented. For example, a computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, each process of the data security interaction method embodiment of the above-mentioned device command is implemented, and the same technical effect can be achieved. To avoid repetition, it is not repeated here. Among them, the computer-readable storage medium is, for example, a read-only memory (ROM), a random access memory (RAM), a disk or an optical disk, etc.

[0059] Although the embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and cannot be understood as limiting the present invention. Those skilled in the art may change, modify, replace and modify the above embodiments within the scope of the present invention.

[0060] The above specific implementations of the present invention do not constitute a limitation on the protection scope of the present invention. Any other corresponding changes and modifications made based on the technical concept of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A support device for achieving stable groove shape of replicated grating, characterized in that: The supporting device for realizing stable replication of grating grooves comprises: A supporting structure, wherein a rigid structure with a first preset angle is provided in a partial structure within the supporting structure, and the rigid structure is used to form a replica grating groove to stably fix at least a portion of the entire replica grating groove; A first structure is arranged on both sides of the supporting structure, and the first structure is used to support the entire body of the supporting structure; A second structure, wherein the second structure positions and locks the degrees of freedom of the replica grating grooves of different sizes; A support plate, one end of which is connected to a rotatable first connection point of the rigid structure, and the other end of which is connected to a rotatable second connection point of the first structure, wherein the second structure is arranged at different positions on corresponding sides of the support plate to control the positioning accuracy between the replica grating groove and the master grating groove.

2. The supporting device for achieving stable groove shape of replicated grating according to claim 1, characterized in that: A rigid structure of a 90° isosceles right triangle is arranged in a partial structure within the support structure.

3. The supporting device for achieving stable groove shape of replicated grating according to claim 1, characterized in that: The rigid structure is used to form the replica grating groove to fix the overall bottom of the replica grating groove.

4. The supporting device for achieving stable groove shape of replicated grating according to claim 1, characterized in that: The second structure is arranged at different positions on the corresponding two sides of the support plate through a slide rail with a variable clamping position reserved, so as to control the positioning accuracy between the replica grating groove and the master grating groove.

5. A support system for achieving stable grating groove replication, characterized in that: The support system for achieving stable replica grating groove shape is applicable to a support device for achieving stable replica grating groove shape according to any one of claims 1 to 4, and the support system for achieving stable replica grating groove shape comprises: A first setting module controls a partial structure in the support structure to be provided with a rigid structure with a first preset angle, wherein the rigid structure is used to form a replica grating groove profile, so as to stably fix at least a portion of the entirety of the replica grating groove profile; A second setting module controls the first structure to be set on both sides of the supporting structure, wherein the first structure is used to support the entire body of the supporting structure; A positioning module controls the second structure to position and lock the degrees of freedom of the replica grating grooves of different sizes; A first connection module controls one end of the support plate to be connected to a rotatable first connection point of the rigid structure, and the other end of the support plate to be connected to a rotatable second connection point of the first structure, wherein the second structure is arranged at different positions on the corresponding two sides of the support plate to control the positioning accuracy between the replica grating groove and the master grating groove.

6. The support system for achieving stable groove shape of replicated gratings as claimed in claim 5, characterized in that: The support system for achieving stable replication of the grating groove profile comprises: The third setting module controls the partial structure within the support structure to be provided with a rigid structure of a 90° isosceles right triangle.

7. The support system for achieving stable groove shape of replicated gratings as claimed in claim 5, characterized in that: The support system for achieving stable replication of the grating groove profile comprises: The fixing module controls the rigid structure to form the replica grating groove, so as to fix the bottom of the entire replica grating groove.

8. The support system for achieving stable groove shape of replicated gratings as claimed in claim 5, characterized in that: The support system for achieving stable replication of the grating groove profile comprises: The fourth setting module controls the second structure to be set at different positions on the corresponding two sides of the support plate through a slide rail with a variable clamping position reserved, so as to control the positioning accuracy between the replica grating groove and the master grating groove.

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