OGM product manufacturing process

Abstract

This invention discloses a manufacturing process for OGM products, comprising the following steps: S1, cleaning the substrate; S2, coating the OGM product; wherein, in step S2, during the preparation of the F-Mo layer, oxygen is supplied to the target material through multiple oxygen delivery pipelines, with at least three oxygen delivery pipelines provided. The manufacturing process for OGM products of this invention can improve production efficiency, enable continuous production, maintain a relatively stable oxygen supply during the production process, and ensure normal optical properties and film color.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor technology. Specifically, this invention relates to a manufacturing process for OGM products. Background Technology

[0002] With the development of touch technology, touchscreens are being used more and more widely, such as in mobile phones, tablets and other electronic products. Due to its advantages such as narrower bezels, higher reliability, thinner touchscreen modules, better transmittance, and lower cost, the OGM (Optical Metal Mesh) structure is widely used in touchscreen manufacturing.

[0003] OGM products require two metal coating processes, with the coating structure as follows: Figure 3 and Figure 4 As shown.

[0004] In the early stages of OGM product production, due to limitations in the coating line equipment, the MO pipeline was controlled by a single intermediate channel (because conventional metal products require less oxygen, a single channel is sufficient for production). When debugging OGM products, the oxygen flow was higher, resulting in greater sensitivity to oxygen. During single-channel O2 control debugging, there was a significant difference in the upper layer's optical color, with the upper layer appearing yellowish and the lower layer appearing bluish (ideally, the film color should be bluish). Only 2 steps per batch could be produced for the lower layer, while conventional products could be produced normally at 4 steps per batch, reducing efficiency by 50%. To improve production efficiency, it was imperative to modify the existing technology. Summary of the Invention

[0005] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention provides a manufacturing process for OGM products, with the aim of improving production efficiency.

[0006] To achieve the above objectives, the technical solution adopted by this invention is: a manufacturing process for OGM products, comprising the following steps:

[0007] S1. Clean the substrate;

[0008] S2 and OGM product coating;

[0009] In step S2, during the preparation of the F-Mo layer, oxygen is delivered to the target material through multiple oxygen delivery pipelines, with at least three oxygen delivery pipelines provided.

[0010] A flow meter is installed in the oxygen delivery pipeline.

[0011] The oxygen delivery pipeline is provided in three sections: an upper section, a middle section, and a lower section. The ratio of oxygen flow rate in the upper section, the middle section, and the lower section is 1:5:1.5.

[0012] Step S2 includes:

[0013] S201, target washing;

[0014] S202. Evaluate the thickness of each layer of the OGM product;

[0015] S203. After the thickness of each film layer meets the requirements, the first piece of the finished product of the upper and lower layers is evaluated.

[0016] In step S203, the power of the MOO3 layer is calculated to be 8KW, the power of the F-MO layer is 6KW, the power of the AL layer is 48KW, and the power of the S-MO layer is 11KW according to different target sputtering rates. After the first piece evaluation is completed, the upper and lower optical layers are measured to confirm the adjustment direction. A certain section is adjusted in time until the optical adjustment meets the requirements.

[0017] The manufacturing process of the OGM product is characterized by further including the step: S3, physical and chemical performance evaluation.

[0018] Step S3 includes:

[0019] S301, Shear resistance measurement;

[0020] S302, Optical measurement of finished film surface and non-film surface;

[0021] S303, Adhesion Assessment.

[0022] In step S301, nine points are measured according to the substrate size, and the resistance is controlled within 0.25-0.35Ω to confirm whether it is within the control range.

[0023] In step S303, when evaluating adhesion, 3M 610 tape is used to cover the film, and a cross-cut tester is used to make 100 cross-cuts in the corresponding area before peeling off with 3M tape. The cross-cut test should be ≥4B to ensure that the adhesion meets the requirements.

[0024] The manufacturing process of the OGM product of this invention can improve production efficiency, enable continuous production, ensure a relatively stable oxygen flow rate during production, and maintain normal optical properties and film color. Attached Figure Description

[0025] This manual includes the following figures, which illustrate the following:

[0026] Figure 1 This is a diagram of the oxygen pipeline layout;

[0027] Figure 2 It is a flow meter control diagram;

[0028] Figure 3 This is a diagram of the OGM film structure;

[0029] Figure 4 This is a diagram of the overall film structure of the touchscreen;

[0030] The diagram is marked as follows:

[0031] 1. Flow meter; 2. Oxygen delivery pipeline; 3. Target material; 4. MoO3 metal layer; 5. F-Mo layer; 6. Al metal layer; 7. S-Mo layer; 8. OC2; 9. Metal Mesh2; 10. OC1; 11. Metal Mesh1; 12. OC0; 13. Glass. Detailed Implementation

[0032] The specific embodiments of the present invention will be further described in detail below with reference to the accompanying drawings, in order to help those skilled in the art to have a more complete, accurate and in-depth understanding of the concept and technical solutions of the present invention, and to facilitate its implementation.

[0033] like Figure 1 As shown, the present invention provides a manufacturing process for OGM products, comprising the following steps:

[0034] S1. Clean the substrate;

[0035] S2 and OGM product coating;

[0036] S3. Physical and chemical performance evaluation.

[0037] Specifically, OGM products involve blackening the F-Mo layer. Blackening involves introducing oxygen into the F-Mo layer, causing Mo to fully oxidize into MoO3. Due to differences in oxygen flow between the upper and lower layers, the film color varies after coating. This necessitates modifying the gas piping layout of the equipment, changing from single-stage control to three-stage control to improve optical uniformity and ultimately achieve full-load production.

[0038] The conventional Metal structure is MoAlMo (film thickness range: F-Mo layer: 300±100 Å; Al metal layer: 1800±300 Å; S-Mo layer: 500±100 Å). After stacking the conventional metal films, the non-film surface reflectivity is approximately 28%, L* value is approximately 60, a* value is approximately 0.2, and b* value is approximately -0.2. The film color appears generally pale yellow. The OGM metal structure differs somewhat from the conventional Metal structure (film thickness range: MoO3: 450±50 Å; F-Mo layer: 150±50 Å; Al metal layer: 1800±300 Å; S-Mo layer: 350±100 Å). Using the OGM film structure, the non-film surface reflectivity is 13%, L* value is approximately 43%, a* value is approximately -4.0, and b* value is approximately -4.5. The film color appears pale blue. The main adjustments are as follows:

[0039] 1. Adjustment of F-Mo layer thickness design. The OGM product includes a MoO3 metal layer, an F-Mo layer disposed on the MoO3 metal layer, an Al metal layer disposed on the F-Mo layer, and an S-Mo layer disposed on the Al metal layer. Compared with the conventional metal design, in this invention, the thickness of the bottom MO film of the OGM product is adjusted from the original 300 Å to 600 Å, of which the thickness of the MoO3 metal layer is 450 Å and the thickness of the F-Mo layer is 150 Å. During the first-piece commissioning, the thickness of each film layer needs to be evaluated separately and required to be within the specified film thickness range.

[0040] 2. The bottom MO target requires equipment modification. Compared to the original design, the normal metal process F-Mo layer requires 20-30 sccm of oxygen to improve the adhesion of the metal film. Usually, one oxygen pipeline is sufficient, and the optical difference is small. However, OGM blackening MO requires a larger oxygen supply, usually between 90-100 sccm, to ensure sufficient reaction between MO and oxygen. With a larger oxygen supply, single-channel control results in some areas being fully oxidized, while areas with insufficient oxygen are not, leading to poor overall optical uniformity. After substrate coating, the reflectance from top to bottom is 8.17-14.38%, L*: 37.13-42.25, a*: -4 to -2.05, b*: -4 to -1.03. The upper layer appears reddish, the middle area is blackish, and the lower area is bluish. To improve this anomaly, the equipment needs to be modified. The pipeline modification is as follows:

[0041] a. Change the oxygen pipeline from 1 channel to 3 channels. Specifically, the modification is as follows: First, use a tee to introduce 3 gas pipelines into the original oxygen process gas pipeline. Then, connect the 3 gas pipelines to the flow meter. Finally, introduce 3 sections of pipeline from the flow meter to the cathode door frame and connect to the process gas pipeline inside the target cavity.

[0042] b. In addition, each section of pipeline needs to be individually controlled by a 100sccm or 200sccm flow meter, with the appropriate flow meter selected based on the total oxygen flow rate. After the modification is completed, leak testing of the modified areas is required to prevent air leaks caused by loose joints or improper installation.

[0043] c. After the equipment modification is completed, the oxygen supply for each section needs to be adjusted and tested to adjust the optical uniformity of the film layer. Currently, the optimal ratio of MoO3 oxygen supply to the upper, middle, and lower layers is 1:5:1.5 (for example, if the total oxygen supply is 112 sccm, then the actual supply according to the ratio is 15 sccm, 72 sccm, and 25 sccm). For example, if the upper layer reflectivity is 10% and the lower layer reflectivity is 14%, then the oxygen supply to the upper layer needs to be reduced and the oxygen supply to the lower layer needs to be increased appropriately. Sometimes, the oxygen supply in the middle layer needs to be finely adjusted to finally meet the uniformity requirements of the upper and lower layers. After the finished product optical superposition, the full-vehicle non-film surface reflectivity is 12.93~13.68%, L* 42.37~43.29, a*: -4.16~-3.82, b*: -4.9~-3.61. After adjustment, it can meet the requirements of full-vehicle production.

[0044] 3. An additional MO target is needed after MoO3 to complete the preparation of the S-Mo layer. The overall structure of the OGM film is: MoO3+F-MO+AL+S-MO. Because the AL metal layer and the MoO3 metal layer react chemically to produce abnormal discharge, it will cause lightning-shaped "patterns" on the substrate surface, the so-called "discharge marks". At this time, an S-Mo layer needs to be added between the two to block the reaction between the MoO3 metal layer and the AL metal layer.

[0045] In step S1 above, a 5% KOH solution by volume is added to the cleaning machine, the upper and lower brushes are pressed in normally, the AP machine is turned on normally, and the organic matter and dirt on the substrate surface are cleaned.

[0046] like Figure 1 As shown, in step S2 above, when preparing the F-Mo layer, oxygen is delivered to the target material through multiple oxygen delivery pipelines, with at least three oxygen delivery pipelines provided.

[0047] like Figure 1 As shown, a flow meter is installed in the oxygen delivery pipeline.

[0048] like Figure 1As shown, in this embodiment, three oxygen delivery pipelines are provided, and the inlets of all oxygen delivery pipelines are connected to the same main pipeline. The three oxygen delivery pipelines are the upper section pipeline, the middle section pipeline, and the lower section pipeline, and the ratio of the oxygen flow rate of the upper section pipeline, the middle section pipeline, and the lower section pipeline is 1:5:1.5. For example, if the total oxygen flow in the main pipeline is 112 sccm, then according to the proportions, the actual flow rates in the upper, middle, and lower sections of the pipeline are 15 sccm, 72 sccm, and 25 sccm, respectively. For instance, if the upper layer reflectivity is 10% and the lower layer reflectivity is 14%, then the oxygen flow rate in the upper layer needs to be reduced, while the oxygen flow rate in the lower layer needs to be appropriately increased. Sometimes, the oxygen flow rate in the middle section needs to be fine-tuned to ultimately meet the uniformity requirements of the upper and lower layers. After optical superposition, the full-vehicle non-film surface reflectivity is 12.93–13.68%, L* 42.37–43.29, a*: -4.16–-3.82, b*: -4.9–-3.61. After adjustment, it can meet the requirements of full-vehicle production.

[0049] Step S2 above includes:

[0050] S201, target washing;

[0051] S202. Evaluate the thickness of each layer of the OGM product;

[0052] S203. After the thickness of each film layer meets the requirements, the first piece of the finished product of the upper and lower layers is evaluated.

[0053] In the above S201, the target material will be turned on normally according to the required power, so as to remove organic matter from the target surface and prevent it from sputtering onto the substrate surface during the production process.

[0054] In the above S202, the thickness of each layer of the OGM product is evaluated. 5ST plain glass is prepared and bonded to the substrate at equal intervals according to the substrate size using high-temperature tape. The thickness of MOO3, F-MO, AL, and S-MO films are evaluated respectively.

[0055] In step S203 above, the power of the MOO3 layer is calculated to be 8KW, the power of the F-MO layer is 6KW, the power of the AL layer is 48KW, and the power of the S-MO layer is 11KW according to different target sputtering rates. After the first piece evaluation is completed, the upper and lower optical layers are measured to confirm the adjustment direction and adjust a certain section in a timely manner until the optical adjustment meets the requirements.

[0056] Step S3 above includes:

[0057] S301, Shear resistance measurement;

[0058] S302, Optical measurement of finished film surface and non-film surface;

[0059] S303, Adhesion Assessment.

[0060] In step S301 above, nine points are measured according to the substrate size, and the resistance is controlled within 0.25-0.35Ω to confirm whether it is within the control range.

[0061] In step S303 above, when evaluating adhesion, 3M 610 tape is used to cover the film, and a cross-cut tester is used to make 100 cross-cuts in the corresponding area before peeling it off with 3M tape. The cross-cut test should be ≥4B to ensure that the adhesion meets the requirements.

[0062] Finally, a full-load trial production was carried out, with five consecutive full-load finished products. After production, all products were tested for optics to confirm the optical stability of continuous production and the optical uniformity of upper and lower layers. Both of these conditions were met for subsequent continuous film loading production. The optical stability was monitored during the process, and adjustments were made in a timely manner if the conditions were not met.

[0063] Table 1. Differences between conventional metal and OGM metal sputtering materials:

[0064] type 4# 5# 6# 7# 8# Conventional design F-MO AL AL AL S-MO OGM Design MOO3 F-MO AL AL S-MO

[0065] Table 2. Adjustment status of optical uniformity across the entire vehicle:

[0066] type L* a* b* Re* Before improvement 37.13～42.25 -4～-2.05 -4～-1.03 8.17～14.38 After improvement 42.37～44.29 -4.16～-3.82 -4.9~-3.61 12.93～14.68

[0067] The manufacturing process for the above-mentioned OGM products has the following advantages:

[0068] 1. Production efficiency increased from 2ST / vehicle to 4ST / vehicle, resulting in a 50% increase in capacity;

[0069] 2. It can be produced continuously, and the oxygen flow rate is relatively stable during the production process, with normal optical properties and film color.

[0070] The present invention has been described above by way of example with reference to the accompanying drawings. Obviously, the specific implementation of the present invention is not limited to the above-described manner. Any non-substantial improvements made using the inventive concept and technical solution; or the direct application of the inventive concept and technical solution to other situations without modification, are all within the protection scope of the present invention.

Claims

1. The manufacturing process of OGM products, characterized in that, Including the following steps: S1. Clean the substrate; S2 and OGM product coating; In step S2, when preparing the F-Mo layer, oxygen is delivered to the target material through multiple oxygen delivery pipelines, with at least three oxygen delivery pipelines provided. The OGM product includes a MoO3 metal layer, an F-Mo layer disposed on the MoO3 metal layer, an Al metal layer disposed on the F-Mo layer, and an S-Mo layer disposed on the Al metal layer. The S-Mo layer blocks the reverse reaction between the MoO3 metal layer and the Al metal layer. The film thickness ranges as follows: MoO3: 450±50 Å; F-Mo layer: 150±50 Å; Al metal layer: 1800±300 Å; S-Mo layer: 350±100 Å. Step S2 includes: S201, target washing; S202. Evaluate the thickness of each layer of the OGM product; S203. After the thickness of each film layer meets the requirements, the first piece of the finished product of the upper and lower layers will be evaluated. In step S202, the thickness of each layer of the OGM product is evaluated. 5ST plain glass is prepared and bonded to the substrate at equal intervals according to the substrate size using high-temperature tape. The thicknesses of MoO3, F-Mo, Al, and S-Mo are evaluated respectively. In step S203, the power of the MoO3 layer is calculated to be 8KW, the power of the F-Mo layer is 6KW, the power of the Al layer is 48KW, and the power of the S-Mo layer is 11KW according to different target sputtering rates. After the first piece evaluation is completed, the upper and lower optical layers are measured to confirm the adjustment direction and a certain section is adjusted in time until the optical adjustment meets the requirements. The oxygen delivery pipeline is provided in three sections: an upper section, a middle section, and a lower section. The ratio of oxygen flow rate in the upper section, the middle section, and the lower section is 1:5:1.

5.

2. The manufacturing process of the OGM product according to claim 1, characterized in that, A flow meter is installed in the oxygen delivery pipeline.

3. The manufacturing process of the OGM product according to claim 1, characterized in that, In step S203, the power of the MoO3 layer is calculated to be 8KW, the power of the F-Mo layer is 6KW, the power of the Al layer is 48KW, and the power of the S-Mo layer is 11KW according to different target sputtering rates. After the first piece evaluation is completed, the upper and lower optical layers are measured to confirm the adjustment direction. A certain section is adjusted in time until the optical adjustment meets the requirements.

4. The manufacturing process of the OGM product according to any one of claims 1 to 3, characterized in that, It also includes the following steps: S3. Physical and chemical performance evaluation.

5. The manufacturing process of the OGM product according to claim 4, characterized in that, Step S3 includes: S301, Shear resistance measurement; S302, Optical measurement of finished film surface and non-film surface; S303, Adhesion Assessment.

6. The manufacturing process of the OGM product according to claim 5, characterized in that, In step S301, nine points are measured according to the substrate size, and the resistance is controlled within 0.25-0.35Ω to confirm whether it is within the control range.

7. The manufacturing process of the OGM product according to claim 5, characterized in that, In step S303, when evaluating adhesion, 3M 610 tape is used to cover the film, and a cross-cut tester is used to make 100 cross-cuts in the corresponding area before peeling off with 3M tape. The cross-cut test should be ≥4B to ensure that the adhesion meets the requirements.

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