Clamping device for automatic flame polishing of square quartz plates

Abstract

The application provides a clamping device for automatic flame polishing of square quartz plates, which comprises a frame body, sliding rails installed on the frame body, a first clamping piece and a second clamping piece made of graphite, wherein the first clamping piece and the second clamping piece are vertically arranged and movably installed on the sliding rails; a plurality of first protrusions are formed on one side of the first clamping piece close to the second clamping piece, and a plurality of second protrusions are formed on one side of the second clamping piece close to the first clamping piece; when the quartz plate is clamped and fixed, the first clamping piece contacts the quartz plate through the first protrusions, and the second clamping piece contacts the quartz plate through the second protrusions. The quartz plate is contacted only through the first protrusions and the second protrusions, so that the contact area with the quartz plate is greatly reduced, and the pollution to the surface of the quartz plate is greatly reduced.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a clamping device for automatic flame polishing of square quartz plates. Background Technology

[0002] For square quartz slabs, jigs are usually used to clamp and fix the quartz slabs in order to cooperate with robots for automatic flame polishing. In the existing technology, the jigs usually consist of two clamping plates to clamp and fix the quartz slabs. The surface of the clamping plates is in direct contact with the quartz slabs. This large-area contact can easily cause large-area contamination of the quartz slabs.

[0003] Therefore, it is necessary to propose a clamping device for automatic flame polishing of square quartz plates to solve the above problems. Summary of the Invention

[0004] The purpose of this invention is to provide a clamping device for automatic flame polishing of square quartz plates, in order to improve the problem that existing jigs easily cause large-area contamination of quartz plates.

[0005] This invention provides a clamping device for automatic flame polishing of square quartz plates. The clamping device includes: a frame, a slide rail mounted on the frame, and a first clamping member and a second clamping member made of graphite. The first clamping member and the second clamping member are vertically arranged and movably adjustable on the slide rail. By adjusting the position of the first clamping member or the first clamping member, the distance between the first clamping member and the second clamping member is adjusted, thereby clamping and fixing the quartz plate between the first clamping member and the second clamping member. The first clamping member has a plurality of spaced-apart first protrusions protruding on the side near the second clamping member, and the second clamping member has a plurality of spaced-apart second protrusions protruding on the side near the first clamping member. When clamping and fixing the quartz plate, the first clamping member contacts the quartz plate through the first protrusions, and the second clamping member contacts the quartz plate through the second protrusions.

[0006] In one possible embodiment, the first clamping member and the second clamping member are symmetrically arranged; the first clamping member is L-shaped and includes a first vertical portion and a first horizontal portion connected vertically, the first horizontal portion being movably and adjustablely mounted on the slide rail, and a plurality of first bosses protruding from the first vertical portion on the side near the second clamping member; the second clamping member is L-shaped and includes a second vertical portion and a second horizontal portion connected vertically, the second horizontal portion being movably and adjustablely mounted on the slide rail, and a plurality of second bosses protruding from the second vertical portion on the side near the first clamping member.

[0007] In one possible embodiment, the slide rail is provided with an adjustment hole, the adjustment hole being oriented in the same direction as the length of the slide rail; the first horizontal portion slides on the slide rail and is movable along the length of the slide rail, the first horizontal portion is provided with a first mounting hole, a first locking member passes through the first mounting hole and the adjustment hole, so that the bottom end of the first locking member extends beyond the bottom surface of the slide rail, and is threadedly connected to the bottom end of the first locking member by a first nut, so as to lock and fix the first clamping member to the slide rail; the second horizontal portion slides on the slide rail and is movable along the length of the slide rail, the second horizontal portion is provided with a second mounting hole, a second locking member passes through the second mounting hole and the adjustment hole, so that the bottom end of the second locking member extends beyond the bottom surface of the slide rail, and is threadedly connected to the bottom end of the second locking member by a second nut, so as to lock and fix the second clamping member to the slide rail.

[0008] In one possible embodiment, the first mounting hole vertically penetrates the first horizontal portion, the first mounting hole has a U-shaped cross-section and a first opening is formed at the end face of the first horizontal portion away from the first vertical portion; the second mounting hole vertically penetrates the second horizontal portion, the second mounting hole has a U-shaped cross-section and a second opening is formed at the end face of the second horizontal portion away from the second vertical portion.

[0009] In one possible embodiment, the number of first protrusions is four, wherein two of the first protrusions are located on both sides of the top of the first clamping member, and the remaining two of the first protrusions are located on both sides of the middle of the first clamping member; the number of second protrusions is four, wherein two of the second protrusions are located on both sides of the top of the second clamping member, and the remaining two of the second protrusions are located on both sides of the middle of the second clamping member.

[0010] In one possible embodiment, the clamping device further includes a support frame and a positioning rod; the support frame is mounted on the side of the frame, and the top surface of the support frame is provided with a plurality of insertion holes spaced apart, the insertion holes being spaced differently from the frame; the insertion holes are used to insert the bottom end of the positioning rod so that the positioning rod stands upright on the support frame; the positioning rod is used to abut the end face of the quartz plate to indicate the starting reference position of the flame polishing robotic arm; by selecting different insertion holes to insert the positioning rod, it can be adapted to quartz plates of different lengths.

[0011] In one possible embodiment, the positioning rod includes a rod portion and a plug portion connected to the bottom end of the rod portion. The cross-sectional dimension of the rod portion is larger than the cross-sectional dimension of the plug portion, and the size of the plug portion is adapted to the size of the socket and is used for insertion into the socket.

[0012] In one possible embodiment, the support frame is triangular in shape and includes a side plate, a top plate, and an inclined plate; the side plate is vertically mounted on the side of the frame; the top plate is horizontally fixedly connected to the side plate, the height of the top surface of the top plate is lower than the height of the top surface of the frame, and the insertion hole is provided on the top plate; the inclined plate is obliquely fixedly connected to the bottom end of the side plate and the end of the top plate away from the frame.

[0013] In one possible embodiment, the clamping device further includes a support block mounted on the top surface of the support frame, the support block being disposed close to the frame and used to support the quartz plate.

[0014] In one possible embodiment, the frame includes a pair of square-shaped frames and a plurality of support rods vertically connected between the pair of frames.

[0015] The beneficial effects of the clamping device for automatic flame polishing of square quartz plates of the present invention are as follows: when clamping and fixing the quartz plate, the first clamping member contacts the quartz plate through the first boss, and the second clamping member contacts the quartz plate through the second boss. On the one hand, the multi-point positioning method can effectively clamp and fix the quartz plate; on the other hand, the contact surface with the quartz plate is greatly reduced by contacting the quartz plate only through the first boss and the second boss, which can greatly reduce the contamination of the quartz plate surface. Attached Figure Description

[0016] Figure 1 This is a perspective view of the clamping device for automatic flame polishing of square quartz plates according to the present invention.

[0017] Figure 2 This is a side view of the clamping device for automatic flame polishing of square quartz plates according to the present invention.

[0018] Figure 3 This is a top view of the clamping device for automatic flame polishing of square quartz plates according to the present invention.

[0019] Figure 4 This is a schematic diagram of the positioning rod in the clamping device for automatic flame polishing of square quartz plates according to the present invention.

[0020] Explanation of reference numerals in the attached drawings: Frame 100; Base 110; Support rod 120;

[0021] Slide rail 200; Adjustment hole 210;

[0022] First clamping member 300; first vertical portion 310; first boss 311; first horizontal portion 320; first mounting hole 321;

[0023] Second clamping member 400; second vertical portion 410; second boss 411; second horizontal portion 420; second mounting hole 421; second opening 4211;

[0024] Support frame 500; side plate 510; top plate 520; socket 521; inclined plate 530;

[0025] Positioning rod 600; rod part 610; plug part 620;

[0026] Support block 700; Quartz slab 800. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0028] An embodiment of the present invention provides a clamping device for automatic flame polishing of square quartz plates, see [link to documentation]. Figure 1 and Figure 3 The clamping device includes: a frame 100, a slide rail 200 mounted on the frame 100, and a first clamping member 300 and a second clamping member 400 made of graphite. The first clamping member 300 and the second clamping member 400 are vertically arranged and movably adjustable on the slide rail 200. By adjusting the position of the first clamping member 300 or the second clamping member 400, the distance between the first clamping member 300 and the second clamping member 400 is adjusted, thereby clamping and fixing the quartz plate 800 between the first clamping member 300 and the second clamping member 400. The first clamping member 300 has a plurality of spaced-apart first protrusions 311 protruding from its side near the second clamping member 400, and the second clamping member 400 has a plurality of spaced-apart second protrusions 411 protruding from its side near the first clamping member 300. When clamping and fixing the quartz plate 800, the first clamping member 300 contacts the quartz plate 800 through the first boss 311, and the second clamping member 400 contacts the quartz plate 800 through the second boss 411.

[0029] In this embodiment, compared to the large-area contact clamping in the prior art, which can lead to extensive contamination of the quartz plate 800 surface, this invention utilizes the first boss 311 of the first clamping member 300 and the second boss 411 of the second clamping member 400 to contact the quartz plate 800. The quartz plate 800 is clamped and fixed solely by the first boss 311 and the second boss 411. This point contact significantly reduces the contact area compared to surface contact, greatly minimizing contamination of the quartz plate surface. Furthermore, it avoids the problem of large contact areas potentially leading to an inability to achieve a tight fit (resulting in unevenness).

[0030] In a preferred embodiment, see [link to previous document]. Figure 1 The first clamping member 300 and the second clamping member 400 are symmetrically arranged. The first clamping member 300 is L-shaped and includes a first vertical portion 310 and a first horizontal portion 320 connected vertically. The first horizontal portion 320 is movably and adjustably mounted on the slide rail 200, and a plurality of first bosses 311 protrude from the side of the first vertical portion 310 near the second clamping member 400. The second clamping member 400 is L-shaped and includes a second vertical portion 410 and a second horizontal portion 420 connected vertically. The second horizontal portion 420 is movably and adjustably mounted on the slide rail 200, and a plurality of second bosses 411 protrude from the side of the second vertical portion 410 near the first clamping member 300. In this embodiment, the L-shaped first clamping member 300 and the second clamping member 400 provide better support and stability.

[0031] In a preferred embodiment, see [link to previous document]. Figure 3The slide rail 200 is provided with an adjustment hole 210, the direction of which is consistent with the length direction of the slide rail 200. The first horizontal part 320 slides on the slide rail 200 and can move along the length direction of the slide rail 200. The first horizontal part 320 is provided with a first mounting hole 321. A first locking member passes through the first mounting hole 321 and the adjustment hole 210, so that the bottom end of the first locking member extends beyond the bottom surface of the slide rail 200. The locking member is then threadedly connected to the bottom end of the first locking member by a first nut. The first clamping member 300 is locked and fixed to the slide rail 200; the second horizontal part 420 slides on the slide rail 200 and can move along the length direction of the slide rail 200. The second horizontal part 420 is provided with a second mounting hole 421. A second locking member passes through the second mounting hole 421 and the adjusting hole 210, so that the bottom end of the second locking member extends beyond the bottom surface of the slide rail 200, and is threadedly connected to the bottom end of the second locking member by a second nut, so as to lock and fix the second clamping member 400 to the slide rail 200. In this embodiment, the position of the first clamping member 300 can be easily adjusted by the cooperation of the first locking member, the adjusting hole 210 and the first mounting hole 321, while the first clamping member 300 can be firmly fixed. The position of the second clamping member 400 can be easily adjusted by the cooperation of the second locking member, the adjusting hole 210 and the second mounting hole 421, while the second clamping member 400 can be firmly fixed. By moving the first clamping member 300 and the second clamping member 400 to adjust the distance between them, the clamping requirements of the quartz plate 800 with different thicknesses can be adapted.

[0032] For a better option, see [link to previous section]. Figure 3 There are two of each of the first mounting hole 321, the second mounting hole 421, and the adjustment hole 210. The first mounting hole 321 and the adjustment hole 210 are set in a one-to-one correspondence, and the second mounting hole 421 and the adjustment hole 210 are set in a one-to-one correspondence.

[0033] In one specific embodiment, see Figure 1 and Figure 3 The first mounting hole 321 vertically penetrates the first horizontal portion 320, and the cross-section of the first mounting hole 321 is U-shaped and a first opening is formed at the end face of the first horizontal portion 320 away from the first vertical portion 310; the second mounting hole 421 vertically penetrates the second horizontal portion 420, and the cross-section of the second mounting hole 421 is U-shaped and a second opening 4211 is formed at the end face of the second horizontal portion 420 away from the second vertical portion 410.

[0034] In one specific embodiment, see Figure 1 and Figure 2 The number of first protrusions 311 is four, of which two first protrusions 311 are located on both sides of the top of the first clamping member 300, and the remaining two first protrusions 311 are located on both sides of the middle of the first clamping member 300; the number of second protrusions 411 is four, of which two second protrusions 411 are located on both sides of the top of the second clamping member 400, and the remaining two second protrusions 411 are located on both sides of the middle of the second clamping member 400.

[0035] In a preferred embodiment, see [link to previous document]. Figures 1 to 3 The clamping device also includes a support frame 500 and a positioning rod 600. The support frame 500 is installed on the side of the frame 100. The top surface of the support frame 500 is provided with a plurality of insertion holes 521 at intervals. The spacing between the plurality of insertion holes 521 and the frame 100 is different. The insertion holes 521 are used to insert the bottom end of the positioning rod 600 so that the positioning rod 600 stands upright on the support frame 500. The positioning rod 600 is used to abut against the end face of the quartz plate 800 to indicate the starting reference position of the flame polishing robotic arm. By selecting different insertion holes 521 to insert the positioning rod 600, it can be adapted to quartz plates 800 of different lengths.

[0036] In one specific embodiment, see Figure 2 and Figure 4 The positioning rod 600 includes a rod portion 610 and a plug portion 620 connected to the bottom end of the rod portion 610. The cross-sectional dimension of the rod portion 610 is larger than the cross-sectional dimension of the plug portion 620. The size of the plug portion 620 is adapted to the size of the socket 521 and is used to be inserted into the socket 521.

[0037] In one specific embodiment, see Figure 1 and Figure 2 The support frame 500 is triangular in shape and includes a side plate 510, a top plate 520, and an inclined plate 530. The side plate 510 is vertically mounted on the side of the frame 100. The top plate 520 is horizontally fixedly connected to the side plate 510, and the height of the top surface of the top plate 520 is lower than the height of the top surface of the frame 100. The insertion hole 521 is provided on the top plate 520. The inclined plate 530 is obliquely fixedly connected to the bottom end of the side plate 510 and the end of the top plate 520 away from the frame 100. In this embodiment, the triangular support frame 500 has high stability and can effectively support the positioning rod 600.

[0038] In one specific embodiment, see Figure 1 and Figure 2The clamping device further includes a support block 700 installed on the top surface of the support frame 500. The support block 700 is located close to the frame 100 and is used to support the quartz plate 800. Preferably, the support block 700 is a graphite block.

[0039] In one specific embodiment, see Figure 1 and Figure 2 The frame 100 includes a pair of square-shaped frames 110 and a plurality of support rods 120 vertically connected between the pair of frames 110, which enhances the stability and load-bearing performance of the frame 100.

[0040] The clamping process and flame polishing process of quartz plates are described in detail below with reference to the clamping device for automatic flame polishing of square quartz plates of the present invention.

[0041] When clamping and fixing the quartz plate 800, the first clamping member 300 can be installed and fixed on the slide rail 200 first, so that the first protrusion 311 of the first clamping member 300 abuts against one side of the quartz plate 800. The second clamping member 400 is moved and adjusted in the direction closer to the first clamping member 300 so that the quartz plate 800 is clamped and fixed between the first protrusion 311 of the first clamping member 300 and the first protrusion 311 of the second clamping member 400. Then, the second clamping member 400 is locked and fixed by the second locking member.

[0042] During the flame polishing process of the quartz plate 800, the upper half of the quartz plate 800 is flame polished first (at this time, the lower half of the quartz plate 800 is blocked by the first clamping member 300 and the second clamping member 400). After the flame polishing of the upper half is completed, the quartz plate 800 is turned so that the unpolished lower half of the quartz plate 800 faces upward, and then the flame polishing of the lower half of the quartz plate 800 is completed.

[0043] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways. Unless otherwise defined, the technical or scientific terms used herein should be understood in their ordinary sense by one of ordinary skill in the art to which this invention pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word encompasses the element or object listed following the word and its equivalents, but do not exclude other elements or objects.

Claims

1. A clamping device for automatic flame polishing of square quartz plates, characterized in that, The clamping device includes: a frame, a slide rail mounted on the frame, and a first clamping member and a second clamping member made of graphite; The first clamping member and the second clamping member are vertically arranged and movably and adjustablely mounted on the slide rail. By moving and adjusting the position of the first clamping member or the first clamping member, the distance between the first clamping member and the second clamping member can be adjusted, thereby clamping and fixing the quartz plate between the first clamping member and the second clamping member. The first clamping member has a plurality of first protrusions spaced apart on the side near the second clamping member, and the second clamping member has a plurality of second protrusions spaced apart on the side near the first clamping member. When clamping and fixing the quartz plate, the first clamping member contacts the quartz plate through the first protrusions, and the second clamping member contacts the quartz plate through the second protrusions.

2. The clamping device for automatic flame polishing of square quartz plates according to claim 1, characterized in that, The first clamping member and the second clamping member are arranged symmetrically; The first clamping member is L-shaped and includes a first vertical portion and a first horizontal portion connected vertically. The first horizontal portion is movably and adjustably mounted on the slide rail. A plurality of first bosses protrude from the side of the first vertical portion near the second clamping member. The second clamping member is L-shaped and includes a second vertical portion and a second horizontal portion connected vertically. The second horizontal portion is movably and adjustably mounted on the slide rail. A plurality of second bosses protrude from the second vertical portion on the side near the first clamping member.

3. The clamping device for automatic flame polishing of square quartz plates according to claim 2, characterized in that, The slide rail is provided with adjustment holes, and the direction of the adjustment holes is consistent with the length direction of the slide rail; The first horizontal part slides on the slide rail and can move along the length of the slide rail. The first horizontal part is provided with a first mounting hole. A first locking member passes through the first mounting hole and the adjustment hole, so that the bottom end of the first locking member extends out of the bottom surface of the slide rail. The first nut is threadedly connected to the bottom end of the first locking member to lock and fix the first clamping member on the slide rail. The second horizontal part slides on the slide rail and can move along the length of the slide rail. The second horizontal part is provided with a second mounting hole. A second locking member passes through the second mounting hole and the adjustment hole, so that the bottom end of the second locking member extends out of the bottom surface of the slide rail. The second nut is threadedly connected to the bottom end of the second locking member to lock and fix the second clamping member on the slide rail.

4. The clamping device for automatic flame polishing of square quartz plates according to claim 3, characterized in that, The first mounting hole extends vertically through the first horizontal portion, and the cross-section of the first mounting hole is U-shaped with a first opening formed at the end face of the first horizontal portion away from the first vertical portion. The second mounting hole extends vertically through the second horizontal portion, and the cross-section of the second mounting hole is U-shaped with a second opening formed at the end face of the second horizontal portion away from the second vertical portion.

5. The clamping device for automatic flame polishing of square quartz plates according to any one of claims 1-4, characterized in that, The number of the first protrusions is four, with two of the first protrusions located on both sides of the top of the first clamping member, and the remaining two first protrusions located on both sides of the middle of the first clamping member; The number of the second protrusions is four, with two of the second protrusions located on both sides of the top of the second clamping member, and the remaining two second protrusions located on both sides of the middle of the second clamping member.

6. The clamping device for automatic flame polishing of square quartz plates according to any one of claims 1-4, characterized in that, It also includes a support frame and a positioning rod; The support frame is installed on the side of the frame body. The top surface of the support frame is provided with a number of insertion holes at intervals. The distance between the insertion holes and the frame body is different. The insertion holes are used to insert the bottom end of the positioning rod so that the positioning rod stands upright on the support frame. The positioning rod is used to abut the end face of the quartz plate to indicate the starting reference position of the flame polishing robotic arm. The positioning rod can be inserted into different holes to adapt to quartz plates of different lengths.

7. The clamping device for automatic flame polishing of square quartz plates according to claim 6, characterized in that, The positioning rod includes a rod portion and a plug portion connected to the bottom end of the rod portion. The cross-sectional dimension of the rod portion is larger than the cross-sectional dimension of the plug portion. The size of the plug portion is adapted to the size of the socket and is used to be inserted into the socket.

8. The clamping device for automatic flame polishing of square quartz plates according to claim 6, characterized in that, The support frame is triangular in shape and includes side plates, a top plate, and an inclined plate; The side panels are vertically installed on the side of the frame. The top plate is horizontally fixed to the side plate, the height of the top surface of the top plate is lower than the height of the top surface of the frame, and the insertion hole is provided on the top plate; The inclined plate is fixedly connected at an angle to the bottom end of the side plate and the end of the top plate away from the frame.

9. The clamping device for automatic flame polishing of square quartz plates according to claim 6, characterized in that, It also includes a support block installed on the top surface of the support frame, the support block being positioned close to the frame and used to support the quartz plate.

10. The clamping device for automatic flame polishing of square quartz plates according to any one of claims 1-4, characterized in that, The frame includes a pair of square-shaped frames and a number of support rods vertically connected between the pair of frames.

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