Method for automatically adjusting movable baffle in magnetron sputtering coating process, storage medium and magnetron sputtering equipment

Abstract

The present invention discloses a method, storage medium and magnetron sputtering device for automatically adjusting a movable baffle in a magnetron sputtering coating process. The method is as follows: A. before the curved glass position point a1 reaches the coating point, the telescopic degree of the movable baffle is adjusted to the telescopic degree R1 corresponding to a1; B. Repeat the following B1 until the curved glass is coated; B1. Detect the curved glass position point a1. i Arriving at the coating point, according to the next position point a i+1 and position point a i The corresponding stretch R i+1 and R i The change between the two changes, the extension degree of the movable baffle from R i Adjust to R i+1 On the one hand, this method can automatically adjust the shielding degree of the movable baffle, and there is no need for production personnel to manually adjust the baffle when replacing curved glass with different curvature degrees. On the other hand, during the coating process, the shielding degree of the movable baffle on the target material sputtering range can be automatically adjusted, and the thickness of the coated layer is relatively uniform at various locations. This method is suitable for coating scenarios where different shielding degrees are required at various locations during the curved glass coating process.

Description

Technical Field

[0001] The invention relates to the technical field of magnetron sputtering, and in particular to a method for automatically adjusting a movable baffle in a magnetron sputtering coating process controlled by a computer program, a storage medium and a magnetron sputtering device. Background Art

[0002] Magnetron sputtering equipment is commonly used in the industry to coat glass. The coating method is usually to use a sputtering target to magnetron sputter the glass surface. Under the action of the magnetic field, the sputtering target sputters particles onto the glass surface, so that multiple layers of nanofilm are deposited on the glass surface to achieve coating. The performance of coated glass is affected by the uniformity of its film thickness. If the film thickness is uneven, the performance of the coated glass will be very poor. The existing magnetron sputtering coating process is relatively mature and can well coat flat / flat glass (whose surface to be coated is flat) evenly. However, if curved glass is to be coated, because the surface to be coated on the curved glass is a curved surface, and the degree of curvature of the curved surface is not exactly the same at different places, defects such as uneven thickness of the film layer are prone to occur. For this reason, in actual production, a shielding member is usually set in the coating chamber to cooperate with the target material to perform magnetron sputtering coating on the curved glass. For example, a curved glass coating device given in Chinese patent document CN109502989B, as shown in the attached manual Figure 1 and 3As shown, the coating device includes a workbench 1 for mounting curved glass and a target nozzle 3 for coating the curved glass. A shielding member is provided between the workbench 1 and the target nozzle 3. The shielding member includes a correction plate 2.1 and a plurality of teeth 2.2 installed side by side on one side of the correction plate 2.1. The width of these teeth 2.2 when arranged side by side is greater than or equal to the length of the curved glass. The teeth 2.2 are retractable. There are scales on the teeth 2.2, which are convenient for production personnel to accurately adjust the telescopic length of the teeth to shield the sputtering range of the target nozzle 3. Production personnel can adjust the telescopic length of each tooth 2.2 according to the degree of curvature of the curved glass to be coated in the length direction. After adjusting the length of each tooth, the production personnel can install the curved glass on the workbench 1. The rotation of the workbench 1 drives the curved glass thereon to move through the target nozzle 3 to achieve coating. The technical solution provided in the patent document, on the one hand, requires production personnel to manually adjust the length of each tooth plate on the correction plate. Different types of curved glass have different curvatures and different requirements for the degree of shielding of the sputtering range of the target nozzle 3. Therefore, the length requirements of each tooth plate are different. Therefore, each time the curved glass to be coated is replaced, the production personnel need to manually adjust the length of each tooth plate on the correction plate, which is troublesome to operate. On the other hand, in the above patent document, after each tooth plate 2.2 is adjusted, its length no longer changes during the entire coating process, that is, the degree of shielding provided by the tooth plate 2.2 remains fixed during the entire coating process. Therefore, the coating device of the patent document is only applicable to coating scenarios where the degree of shielding required at various locations of the curved glass in the coating moving direction (referring to the direction in which the curved glass moves during the coating process) remains unchanged, that is, the curved glass does not have any curvature in the coating moving direction and the degree of curvature of each cross-section along the coating moving direction remains unchanged (see Figure 1 (a) in the figure), and if the curved glass is bent in the coating moving direction (see Figure 1 (b) and (c)) mean that the degree of shielding required for curved glass at different locations in the coating moving direction is different. If the coating device of the above patent document is used for coating, the degree of shielding provided by the teeth cannot be adjusted during the coating process, and the thickness of the coated film layer is still uneven at different locations. Summary of the invention

[0003] The purpose of the present invention is to provide a method for automatically adjusting a movable baffle during magnetron sputtering coating, a computer-readable storage medium storing a computer program that implements the method when executed, and a magnetron sputtering device that can implement the method. On the first aspect, the method can automatically adjust the shielding degree of the movable baffle, and when replacing curved glass with different degrees of curvature, there is no need for production personnel to manually adjust the baffle. On the second aspect, during the coating process, the shielding degree of the movable baffle on the sputtering range of the target material can be automatically adjusted to make the thickness of the coated layer more uniform at all locations.

[0004] In order to achieve the above object, the present invention provides a method for automatically adjusting a movable baffle in a magnetron sputtering coating process by using a computer program, which is characterized by sequentially performing the following steps:

[0005] P1. Obtain the baffle expansion and contraction corresponding to n discrete positions from the front to the back of the curved glass to be coated, n≥2, where the i-th position is recorded as a i , and the corresponding baffle expansion is recorded as R i , 1≤i≤n;

[0006] The following steps are performed during the coating process for curved glass:

[0007] A. Before the curved glass moves to its first position a1 and reaches the coating point, the telescopic degree of the movable baffle is adjusted to the telescopic degree R1 corresponding to the position a1;

[0008] B. Repeat the following step B1 until i+1=n, and the curved glass is coated;

[0009] B1. Detect that the curved glass moves to its i-th position a i When the coating point is reached, the next position a i+1 and the current coating point a i The corresponding stretch R i+1 and R i The change between the two changes, the extension degree of the movable baffle from R i Adjust to R i+1 .

[0010] Furthermore, the movable baffle has x sub-baffle extension points that can be independently extended and retracted, x≥2, specifically:

[0011] In step P1, each position point a i The corresponding baffle extension R i Specifically, it includes x sub-baffle extension degrees corresponding to x sub-baffle extension points, wherein the sub-baffle extension degree corresponding to the j-th sub-baffle extension point is recorded as R ij , 1≤j≤x;

[0012] In step A, for each sub-baffle extension point of the movable baffle, its extension degree is adjusted to the corresponding sub-baffle extension degree R 1j ;

[0013] In step B1, for each sub-baffle extension point of the movable baffle, according to the next position point a i+1 and the current coating point a i The corresponding stretch R (i+1)j and R ijThe change between R and ij Adjust to R (i+1)j .

[0014] Further, the method includes the following steps performed before step P1:

[0015] P01. Obtain the coating calibration curve of the curved glass to be coated. The coating calibration curve is determined according to the curved surface shape of the curved glass to be coated. There are n discrete reference points marked along the coating calibration curve from front to back. Each reference point on the coating calibration curve is related to each position point a on the curved glass. i One to one correspondence;

[0016] P02. According to the steepness of the coating calibration curve at each reference point, determine the baffle expansion and contraction R of each position point of the curved glass corresponding to each reference point. i , where point a i The corresponding baffle extension R i With the position point a i The steepness of the corresponding benchmark point is negatively correlated.

[0017] Furthermore, in step B1, the extension degree of the movable baffle is changed from R i Adjust to R i+1 The speed depends on the moving speed of the curved glass and R i With R i+1 The amount of change between them is determined.

[0018] Furthermore, the extension and retraction degree of the baffle is obtained by receiving user input.

[0019] Furthermore, the method includes step P0 executed before step P01. Along the horizontal forward movement trajectory of the curved glass to be coated, the coordinates of a group of position points of the curved glass are detected, and each position point in a group is located in the same vertical plane. According to the coordinates of each position point, each position point is smoothly connected to obtain the coating calibration curve, and the position points in a group are used as the reference points of the coating calibration curve.

[0020] Furthermore, in step P0, the coordinates of a group of position points on the vertical plane where the center line of the curved glass is located are specifically detected.

[0021] Furthermore, step P0 specifically detects the coordinates of multiple groups of position points, which are respectively located in multiple vertical planes, calculates the average coordinates of the coordinates of the multiple groups of position points, and smoothly connects the points corresponding to each average coordinate to form the coating calibration curve, and uses the points corresponding to each average coordinate as the reference point of the coating calibration curve.

[0022] The present invention also provides a computer-readable storage medium on which an executable computer program is stored. When the computer program is executed, the method for automatically adjusting the movable baffle in the magnetron sputtering coating process as described above is implemented.

[0023] The present invention also provides a magnetron sputtering device, comprising a cathode substrate and a target material mounted on the cathode substrate; comprising a movable baffle and a baffle driving device that drives the movable baffle to extend from outside the sputtering range of the target material into the sputtering range of the target material for local shielding; comprising a controller electrically connected to the baffle driving device and the computer-readable storage medium as described above, the controller executes the computer program in the computer-readable storage medium to implement the method for automatically adjusting the movable baffle during the magnetron sputtering coating process as described above.

[0024] In the above-mentioned method for automatically adjusting the movable baffle, step P1 obtains the baffle extension corresponding to each position point of the curved glass to be coated, and automatically adjusts the shielding degree of the movable baffle accordingly, so that when replacing curved glass with different curvatures, there is no need for production personnel to manually adjust the baffle. In addition, the method is performed during the process of coating the curved glass: Step A adjusts the extension of the movable baffle to extension R1 before the curved glass moves to its first position point a1 and reaches the coating point, and then performs step B1 until the curved glass is completely coated: B1. Detect that the curved glass moves to its i-th position point a i When the coating point is reached, the next position a i+1 and the current coating point a i The corresponding stretch R i+1 and R i The change between the two changes, the extension degree of the movable baffle from R i Adjust to R i+1 In this way, when the curved glass is moved from its position point a i Arrive at the coating point and move to its position a i+1 When the coating point is reached, the extension and contraction of the movable baffle is just from R i Extend to R i+1 , during the curved glass coating process, the telescopic degree of the movable baffle is dynamically adjusted to the telescopic degree corresponding to the current coating position of the curved glass, so as to achieve the required shielding degree at the current coating position of the curved glass, so that the thickness of the coating layer of the curved glass is relatively uniform at various locations. It is suitable for coating scenarios where the required shielding degree at various locations on the curved glass in the coating moving direction is different. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1The following are schematic diagrams of four different coating scenarios, among which (a) is a coating scenario in which the curved glass does not bend in the coating moving direction and the degree of curvature of each section along the coating moving direction remains unchanged; (b) is a coating scenario in which the curved glass is only curved in the coating moving direction; (c) is a coating scenario in which the curved glass does not bend in the coating moving direction but the degree of curvature of each section along the coating moving direction varies; (d) is a coating scenario in which the curved glass is curved in both the length direction (coating moving direction) and the width direction.

[0026] Figure 2 It is a schematic diagram comparing the curved glass surface and the coating calibration curve.

[0027] Figure 3 The present invention is a flow chart of a method for automatically adjusting a movable baffle in a magnetron sputtering coating process.

[0028] Figure 4 This is a simplified diagram from the right side when the magnetron sputtering equipment is sputtering the front of the curved glass.

[0029] Figure 5 It is a schematic diagram of the structure of the cathode substrate, target material and movable baffle of the magnetron sputtering equipment. DETAILED DESCRIPTION

[0030] The present invention is further described in detail below in conjunction with specific implementation methods.

[0031] like Figure 4 As shown, the magnetron sputtering device includes a cathode substrate 1 and a target 2 mounted on the cathode substrate 1, and also includes a movable baffle 3, a baffle driving device 4, a controller (not shown) and a computer readable storage medium (not shown). The movable baffle 3 is located beside the target 2 and is arranged along the length direction of the target 2 (refer to Figure 5 The controller is electrically connected to the baffle driving device 4 (i.e., the motor), and the baffle driving device 4 can drive the movable baffle 3 to extend obliquely upward, thereby extending from outside the target sputtering range into the target sputtering range to perform partial shielding. The computer readable storage medium stores an executable computer program, and the controller executes the computer program to achieve the following Figure 3 The method for automatically adjusting the movable baffle during magnetron sputtering coating is shown, so that different positions of the curved glass can shield the target material sputtering range to different degrees. The following example illustrates the execution process of this method.

[0032] In order to automatically adjust the movable baffle during the magnetron sputtering coating process, the controller of the magnetron sputtering device must first obtain the shielding degree of the target sputtering range required at each position during the curved glass coating process. In this embodiment, the coating process of the curved glass 5 is as follows: the curved glass 5 is located above the target 2 material, and then moves through the target 2. During the movement of the curved glass 5, the target 2 sputters upward particles and deposits them at the corresponding positions of the curved glass 5. After all positions of the curved glass 5 have moved through the position where the target 2 is located, the coating of the entire curved glass 5 is completed. The number of particles sputtered by the target 2 within a fixed time interval is usually the same, but the surface of the curved glass 5 to be coated is a curved surface with different degrees of steepness at different places. Therefore, during the movement of the curved glass 5, the area of ​​the curved glass 5 entering the target sputtering range is different. If the glass section of the curved glass 5 entering the target sputtering range is steeper, then the area of ​​the curved glass 5 located in the target sputtering range is larger. If the glass section of the curved glass 5 entering the target sputtering range is flatter, then the area of ​​the curved glass 5 located in the target sputtering range is smaller. When the film thickness is the same, the larger the coating area, the more sputtering particles are required. For example, if a film layer of target thickness is to be plated, if the area of ​​the curved glass 5 located within the target sputtering range is small, that is, the area of ​​the current coating area is small, then fewer sputtering particles are needed to plate the current coating area with a film layer of target thickness, so it is necessary to increase the shielding degree of the target sputtering range; if the area of ​​the curved glass 5 located within the target sputtering range is large, that is, the area of ​​the current coating area is large, then more sputtering particles are needed to plate the current coating area with a film layer of target thickness, so it is necessary to reduce the shielding degree of the target reduction range. It can be seen that the shielding degree required at each position of the curved glass 5 is related to the steepness of the curved surface of the curved glass 5, so this embodiment determines the shielding degree required at each position of the curved glass 5 according to the steepness of the curved surface at each position of the curved glass 5. This embodiment characterizes the curvature of the curved glass 5 by calibrating a coating calibration curve on the curved glass 5, and takes the steepness of the line segment of the coating calibration curve as the steepness of the curved surface at each position of the curved glass 5. The magnetron sputtering device is provided with a photoelectric distance sensor (not shown) for calibrating the coating calibration curve of the curved glass 5. Specifically, the calibration process is that the curved glass 5 is placed horizontally, the photoelectric distance sensor is located directly below the curved glass 5, and the curved surface to be coated of the curved glass 5 faces the photoelectric distance sensor. The photoelectric distance sensor is located on the vertical plane where the center line of the curved glass 5 is located. Then, the curved glass 5 is moved horizontally from one side above the photoelectric distance sensor to the other side at a uniform speed along the coating movement direction. During the movement, the photoelectric distance sensor takes points for measurement at fixed time intervals to obtain the distance between the photoelectric distance sensor and the corresponding position point on the center line of the curved glass and transmits it to the controller.While the photoelectric distance sensor is taking a point, the controller records the distance value of the curved glass 5 passing directly above the photoelectric distance sensor. The controller uses the distance value of the curved glass 5 passing directly above the photoelectric distance sensor as the X coordinate value and the distance measured by the photoelectric distance sensor as the Y coordinate value, thereby forming the coordinates of a position point of the curved glass 5 detected by the photoelectric distance sensor. According to the coordinates of each position point of the curved glass 5 detected by the photoelectric distance sensor, each position point is smoothly connected to obtain the coating calibration curve of the curved glass 5, and the position point detected by the photoelectric distance sensor is used as the reference point of the coating calibration curve.

[0033] This embodiment directly uses the center line of the curved glass in the same direction as the coating moving direction as the coating calibration curve. Considering that some curved glass is not only curved in the coating moving direction, but also curved in the direction perpendicular to the coating moving direction, directly using the center line of the curved glass in the same direction as the coating moving direction as the coating calibration curve does not take into account the influence of the curvature of the curved glass in the direction perpendicular to the coating moving direction on the coating. Therefore, preferably, other embodiments can be changed to take three curves in the direction perpendicular to the coating moving direction along the coating moving direction of the curved glass 5, and the final coating calibration curve is obtained based on the comprehensive process. The specific process is as follows:

[0034] The magnetron sputtering device includes three photoelectric distance measuring sensors arranged side by side. The three photoelectric sensors are located below the curved glass 5 and are respectively located on the vertical plane where the four equal lines of the curved glass 5 in the non-coating moving direction are located (in this embodiment, the coating moving direction is the length direction of the curved glass 5, and the four equal lines are Figure 2 The three horizontal dotted lines of the curved glass shown in the upper middle part) are then moved horizontally from one side above the three photoelectric distance measuring sensors to the other side along the coating moving direction. During the movement, the three photoelectric distance measuring sensors respectively take points at fixed time intervals to measure the distance between the photoelectric distance measuring sensor and the corresponding position points on the corresponding bisector of the curved glass 5 and transmit the distance to the controller. While the photoelectric distance measuring sensor takes points, the controller records the distance value of the curved glass 5 passing directly above the photoelectric distance measuring sensor. The controller uses the distance value of the curved glass 5 passing directly above the photoelectric distance measuring sensor as the X-coordinate value, and the distances measured by the three photoelectric distance measuring sensors as the Y-coordinate values, thereby forming the coordinates of the three position points of the curved glass 5 detected by the three photoelectric distance measuring sensors. Each position point detected by a photoelectric distance measuring sensor is taken as a group of position points to obtain the coordinates of three groups of position points. The controller calculates the average coordinates of the coordinates of the three groups of position points, as shown in Figure 2 As shown in the upper middle, the first set of position points is a 11 、a 21 、a 31 ……a n1 , the second set of position points is a12 、a 22 、a 32 ……a n2 , the third set of position points is a 13 、a 23 、a 33 ……a n3 Calculating the average coordinates of the three sets of position points is to calculate the average coordinates of the corresponding position points in the three sets of position points. For example, calculating a 11 、a 12 、a 13 The average coordinates of the three positions are taken as the coordinates of the first position point a1 of the coating calibration curve. 21 、a 22 、a 23 The average coordinates of the three position points are taken as the coordinates of the first position point a2 of the coating calibration curve. By analogy, all the position points a1, a2, a3, ... a of the coating calibration curve can be calculated. n The coordinates of these points a1, a2, a3...a n coordinates, and these position points are smoothly connected to form a coating calibration curve (i.e. Figure 2 The curve shown in the middle and lower part) and the position points a1, a2, a3...a n As the reference point of the coating calibration curve.

[0035] After obtaining the coating calibration curve of the curved glass 5, the controller of the magnetron sputtering device can determine the baffle expansion / contraction degree R of each position point of the curved glass 5 corresponding to each reference point according to the steepness of the coating calibration curve at each reference point. i , where point a i The higher the steepness of the corresponding reference point (i.e. the steeper it is), the higher the slope of the position point a i The corresponding baffle extension R i The smaller the value, the negative correlation between the two. i With position point a i+1 The absolute value of the slope of the line between represents the position point a i+1Specifically, the technician can pre-configure the baffle extension reference value R0 and the extension change value ΔR corresponding to each unit slope absolute value in the controller, and set the baffle extension calculation formula to R0-ΔR*|k| accordingly. The controller calculates the absolute value |k| of the slope of the line between two adjacent reference points of the coating calibration curve according to the coordinates of the two points, and then uses the baffle expansion reference value as the baffle expansion R1 of the first position point a1 of the curved glass. The absolute value |k| of the slope of the line between the first reference point of the coating calibration curve (corresponding to the curved glass position point a1) and the second reference point of the coating calibration curve (corresponding to the curved glass position point a2) is substituted into the above baffle expansion calculation formula to calculate the baffle expansion R2 corresponding to the position point a2 of the curved glass 5. The absolute value |k| of the slope of the line between the second reference point of the coating calibration curve (corresponding to the curved glass position point a2) and the third reference point of the coating calibration curve (corresponding to the curved glass position point a3) is substituted into the above baffle expansion calculation formula to calculate the baffle expansion R3 corresponding to the position point a3 of the curved glass 5. By analogy, the baffle expansion corresponding to each position point of the curved glass 5 is calculated.

[0036] In this embodiment, the magnetron sputtering equipment controller automatically determines the coating calibration curve of the curved glass to be coated and calculates the baffle expansion and contraction corresponding to each position point of the curved glass based on the coating calibration curve. It is not preferred that other embodiments can be changed to directly input the baffle expansion and contraction corresponding to each position point of the curved glass by the technician, that is, the magnetron sputtering equipment controller obtains the baffle expansion and contraction corresponding to each position point of the curved glass by receiving the input of the technician.

[0037] After obtaining the baffle extension corresponding to each position of the curved glass 5, during the coating process of the curved glass 5, before the curved glass 5 moves to its first position a1 and reaches the coating point (i.e., the position of the target material), the controller adjusts the extension of the movable baffle 3 to the extension R1 corresponding to the position a1. The controller measures the moving distance of the curved glass 5 through the moving speed and moving time of the curved glass 5, and when it detects that the curved glass 5 moves to its first position a1 and reaches the coating point, it adjusts the moving speed V of the curved glass 5 to 1. s , the distance D between the next position point a2 and the position point a1, and the change between the extension degrees R2 and R1 corresponding to the next position point a2 and the position point a1, respectively, are substituted into the following formula: D / V s =(R i+1 -R i) / V, calculate the extension speed V of the movable baffle 3, and adjust the extension degree of the movable baffle 3 from R1 to R2 according to the extension speed V. The controller detects that the curved glass 5 moves to its first position a2 and reaches the coating point, and then adjusts the moving speed V of the curved glass 5 s , the distance D between the next position point a3 and the position point a2, and the change between the extension degrees R3 and R2 corresponding to the next position point a3 and the position point a2, respectively, are substituted into the following formula: D / V s =(R i+1 -R i ) / V, the expansion and contraction speed V of the movable baffle 3 is calculated, and the expansion and contraction degree of the movable baffle 3 is adjusted from R2 to R3 according to the expansion and contraction speed V, and so on, until the curved glass 5 is completely coated. In this way, the present embodiment can automatically adjust the shielding degree of the movable baffle according to the expansion and contraction degree of the baffle corresponding to each position point of the curved glass to be coated, so when replacing curved glass with different curvatures, there is no need for production personnel to manually adjust the baffle. In addition, the present embodiment adjusts the shielding degree of the movable baffle from its position point a to the curved glass 5. i Reach the coating point and move to its position a i+1 When the coating point is reached, the extension and contraction of the movable baffle is just from R i Extend to R i+1 , during the curved glass coating process, the telescopic degree of the movable baffle is dynamically adjusted to the telescopic degree corresponding to the current coating position of the curved glass, so as to achieve the required shielding degree at the current coating position of the curved glass, so that the thickness of the coating layer of the curved glass is relatively uniform at various locations. It is suitable for coating scenarios where the required shielding degree at various locations on the curved glass in the coating moving direction is different.

[0038] In this embodiment, the expansion and contraction degree corresponding to the movable baffle is determined according to the absolute value of the slope |k| of the line connecting the two reference points of the coating calibration curve, that is, the expansion and contraction degree corresponding to the movable baffle is determined simply according to the steepness in a single direction (coating moving direction) of the curved glass. The movable baffle is expanded and contracted as a whole according to the single expansion and contraction degree, and the shielding degree of different positions of the coating area of ​​the curved glass currently located in the target sputtering range is the same. Because some curved glass is curved in both the length direction and the width direction, such as Figure 1 As shown in (c) in FIG. 1 , for this type of curved glass, the coating area within the target sputtering range is curved in both the length direction and the width direction. If the movable baffle is extended and retracted as a whole according to the single extension degree, only the influence of the curvature of the curved glass in the coating moving direction (length direction) on the target sputtering particle quantity requirement is considered, and the influence of the curvature of the curved glass in the width direction on the target sputtering particle quantity requirement is not considered. The uniformity of the coating layer will be affected. Therefore, preferably, as Figure 5As shown, other embodiments can be changed to a movable baffle having a plurality of sub-baffle extension points 31 that can be independently extended and retracted, and these sub-baffle extension points 31 are driven by different motors. These sub-baffle extension points 31 are arranged at intervals along the non-coating moving direction (width direction) of the curved glass, and the extension degree of each sub-baffle extension point 31 is determined according to the steepness of the curved glass in the non-coating moving direction (width direction). The controller needs to obtain the sub-baffle extension degree R of each sub-baffle extension point 31 corresponding to each position point of the curved glass. ij , i is the serial number of the position point, j is the serial number of the sub-baffle extension point 31, which is obtained specifically in the following manner:

[0039] Normally, curved glass is steeper near the edge and flatter near the center, and is usually symmetrical about the center. Therefore, the number of sputtered particles required near the edge is greater than that near the center, so the required shielding degree is lower, and the corresponding baffle expansion degree should be smaller. Therefore, the present embodiment can be changed to directly use the baffle expansion degree calculated according to the baffle expansion degree calculation formula mentioned above as the sub-baffle expansion degree of the sub-baffle expansion point 31 in the middle position among each sub-baffle expansion point 31 (hereinafter referred to as the central sub-baffle expansion point), and multiply the baffle expansion degree calculated by the baffle expansion degree calculation formula by the corresponding expansion coefficient to obtain the final expansion degree as the sub-baffle expansion degree of the sub-baffle expansion point 31 located on both sides of the central sub-baffle expansion point 31. The farther away from the central sub-baffle expansion point, the smaller the expansion coefficient. Figure 5 As shown, the movable baffle has 6 sub-baffle extension points. If there are an even number of sub-baffle extension points, the 3rd and 4th sub-baffle extension points located in the middle are both central sub-baffle extension points (if there are an odd number of sub-baffle extension points, only the middle sub-baffle extension point is the central sub-baffle extension point). Therefore, the sub-baffle extension degrees of each sub-baffle extension point corresponding to the first position point a1 of the curved glass are as follows: The sub-baffle extension degrees of the 3rd and 4th sub-baffle extension points located in the middle are the baffle extension degrees calculated according to the above baffle extension degree calculation formula R0-ΔR*|k|, recorded as R 13 , R 14 The extension degree of the sub-baffle at the second and fifth sub-baffle extension points is the extension degree of the baffle calculated by the baffle extension calculation formula multiplied by 0.9 (extension coefficient is 0.9), respectively denoted as R 12 and R 15 The expansion degree of the sub-baffle at the first and sixth sub-baffle expansion points is the expansion degree of the baffle calculated by the expansion degree calculation formula multiplied by 0.8 (expansion coefficient is 0.8), which are respectively denoted as R 11 and R 16The extension degrees of the sub-baffles at the extension points of the sub-baffles corresponding to the second position point a2, the third position point a3, etc. of the curved glass are calculated in the same way as above.

[0040] After obtaining the extension and retraction degrees of each sub-baffle corresponding to each position point of the curved glass, during the coating process of the curved glass, before the curved glass moves to its first position point a1 and reaches the coating point (i.e., the position point where the target material is located), the controller adjusts the extension and retraction degree of each sub-baffle extension and retraction point 31 of the movable baffle to the corresponding sub-baffle extension and retraction degree R 1j , j is the serial number of the sub-baffle extension point. The controller measures the moving distance of the curved glass through the moving speed and moving time of the curved glass. When it is detected that the curved glass moves to its first position a1 and reaches the coating point, the moving speed V of the curved glass is set for each sub-baffle extension point 31 of the movable baffle. s , the distance D between the next position point a2 and the position point a1, and the extension degree R of the sub-baffle corresponding to the next position point a2 and the position point a1 respectively 2j and R 1j The change between R 变 , substitute into the following formula: D / V s =R 变 / V, calculate the extension speed V of the jth sub-baffle extension point 31 j , according to the expansion and contraction speed V j Change the extension degree of the sub-baffle at the extension point j from R 1j Adjust to R 2j For example, the telescopic speed of the first sub-baffle telescopic point 31 is calculated to be V1, the telescopic speed of the second sub-baffle telescopic point 31 is calculated to be V2, the telescopic speed of the third sub-baffle telescopic point 31 is calculated to be V3, the telescopic speed of the fourth sub-baffle telescopic point 31 is calculated to be V4, the telescopic speed of the fifth sub-baffle telescopic point 31 is calculated to be V5, and the telescopic speed of the sixth sub-baffle telescopic point 31 is calculated to be V6. The controller then controls the motor of the first sub-baffle telescopic point 31 to extend the R of the first sub-baffle telescopic point 31 according to V1. 11 Adjust to R 21 , control the motor at the extension point 31 of the second sub-baffle to adjust the R of the extension point 31 of the second sub-baffle according to V2 12 Adjust to R 22 , control the motor of the third sub-baffle extension point 31 according to V3 to adjust the R of the second sub-baffle extension point 31 13 Adjust to R 23 , control the motor of the fourth sub-baffle extension point 31 according to V4 to adjust the R of the second sub-baffle extension point 31 14 Adjust to R 24, control the motor of the fifth sub-baffle extension point 31 according to V5 to adjust the R of the second sub-baffle extension point 31 15 Adjust to R 25 , control the motor of the sixth sub-baffle extension point 31 according to V6 to adjust the R of the second sub-baffle extension point 31 16 Adjust to R 26 The controller detects that the curved glass moves to its second position a2 and reaches the coating point, and then adjusts the moving speed V of the curved glass to each sub-baffle extension point j of the movable baffle. s , the distance D between the next position point a3 and the position point a2, and the extension degree R of the sub-baffle corresponding to the next position point a3 and the position point a2 respectively 3j and R 2j The change between R 变 , substitute into the following formula: D / V s =R 变 / V, calculate the extension speed V of the jth sub-baffle extension point j , according to the expansion and contraction speed V j Change the extension degree of the sub-baffle at the extension point j from R 2j Adjust to R 3j , and so on, until the curved glass is completely coated.

[0041] The above is only an implementation method of the invention, and does not limit the scope of patent protection. Those skilled in the art can make non-substantial changes or substitutions based on the invention, which still fall within the scope of patent protection.

Claims

1. A method for automatically adjusting a movable baffle in a magnetron sputtering coating process using a computer program, characterized in that Follow these steps in order: P1. Obtain the baffle expansion and contraction corresponding to n discrete positions from the front to the back of the curved glass to be coated, n≥2, where the i-th position is recorded as a i , and the corresponding baffle expansion is recorded as R i , 1≤i≤n; The following steps are performed during the coating process for curved glass: A. Before the curved glass moves to its first position a1 and reaches the coating point, the telescopic degree of the movable baffle is adjusted to the telescopic degree R1 corresponding to the position a1; B. Repeat the following step B1 until i+1=n, and the curved glass is coated; B1. Detect that the curved glass moves to its i-th position a i Arriving at the coating point, according to the next position point a i+1 and the current coating point a i The corresponding stretch R i+1 and R i The change between the two changes, the extension degree of the movable baffle from R i Adjust to R i+1 .

2. The method for automatically adjusting the movable baffle during magnetron sputtering coating according to claim 1, wherein the movable baffle There are x sub-baffle extension points that can be independently extended and retracted, x ≥ 2, specifically: In step P1, each position point a i The corresponding baffle extension R i Specifically, it includes x sub-baffle extension degrees corresponding to x sub-baffle extension points, wherein the sub-baffle extension degree corresponding to the j-th sub-baffle extension point is recorded as R ij , 1≤j≤x; In step A, for each sub-baffle extension point of the movable baffle, its extension degree is adjusted to the corresponding sub-baffle extension degree R 1j ; In step B1, for each sub-baffle extension point of the movable baffle, according to the next position point a i+1 and the current coating point a i The corresponding stretch R (i+1)j and R ij The change between R and ij Adjust to R (i+1)j .

3. The method for automatically adjusting the movable baffle during magnetron sputtering coating as claimed in claim 1, characterized in that: The process includes the following steps performed before step P1: P01. Obtain the coating calibration curve of the curved glass to be coated. The coating calibration curve is determined according to the curved surface shape of the curved glass to be coated. There are n discrete reference points marked along the coating calibration curve from front to back. Each reference point on the coating calibration curve is related to each position point a on the curved glass. i One to one correspondence; P02. According to the steepness of the coating calibration curve at each reference point, determine the baffle expansion and contraction R of each position point of the curved glass corresponding to each reference point. i , where point a i The corresponding baffle extension R i With the position point a i The steepness at the corresponding reference point is negatively correlated.

4. The method for automatically adjusting the movable baffle during magnetron sputtering coating as claimed in claim 1, characterized in that: In step B1, the extension degree of the movable baffle is changed from R i Adjust to R i+1 The speed depends on the moving speed of the curved glass and R i With R i+1 The amount of change between them is determined.

5. The method for automatically adjusting the movable baffle during magnetron sputtering coating as claimed in claim 1, characterized in that: The baffle extension degree is obtained by receiving user input.

6. The method for automatically adjusting the movable baffle during magnetron sputtering coating as claimed in claim 3, characterized in that: The method includes step P0 executed before step P01. Detecting the coordinates of a group of position points of the curved glass along the horizontal forward movement trajectory when the curved glass is to be coated, wherein each position point in a group is located in the same vertical plane, and smoothly connecting each position point according to the coordinates of each position point to obtain the coating calibration curve, and taking the position points in a group as the reference points of the coating calibration curve.

7. The method for automatically adjusting the movable baffle during magnetron sputtering coating as claimed in claim 6, characterized in that: In step P0, the coordinates of a group of position points on the vertical plane where the center line of the curved glass is located are specifically detected.

8. The method for automatically adjusting the movable baffle during magnetron sputtering coating as claimed in claim 6, characterized in that: Step P0 specifically detects the coordinates of multiple groups of position points, which are respectively located in multiple vertical planes, calculates the average coordinates of the coordinates of the multiple groups of position points, and smoothly connects the points corresponding to each average coordinate to form the coating calibration curve, using the points corresponding to each average coordinate as the reference points of the coating calibration curve.

9. A computer-readable storage medium having an executable computer program stored thereon, characterized in that: When the computer program is executed, the method for automatically adjusting the movable baffle in the magnetron sputtering coating process as described in any one of claims 1 to 8 is implemented.

10. A magnetron sputtering device, characterized in that: It includes a cathode substrate and a target material mounted on the cathode substrate; it includes a movable baffle and a baffle driving device for driving the movable baffle to extend from outside the sputtering range of the target material into the sputtering range of the target material for partial shielding; It includes a controller electrically connected to a baffle driving device and a computer-readable storage medium as described in claim 9, wherein the controller executes a computer program in the computer-readable storage medium to implement a method for automatically adjusting a movable baffle during a magnetron sputtering coating process as described in any one of claims 1 to 8.

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