A low-temperature, high-performance stripping fluid production equipment

Abstract

This invention relates to the field of stripping fluid production technology, and provides a low-temperature, high-performance stripping fluid production device, comprising: a first raw material tank for storing N-methylpyrrolidone; a second raw material tank for storing dimethylacetamide; a third raw material tank for storing diethylene glycol butyl ether; and a fourth raw material tank for storing pure water; it also includes a feed pipe, a delivery pump, a vertical pipe, a stirring mixing vessel, a first electrically controlled valve, a second electrically controlled valve, a third electrically controlled valve, an inert gas supply device, a heater, a filter, a main gas supply pipe, a branch gas supply pipe, and an exhaust pipe. The advantages of this invention are: heating inert gas is introduced into the raw material tanks, and the heated inert gas transfers heat to the feed pipe; the N-methylpyrrolidone, dimethylacetamide, diethylene glycol butyl ether, and pure water remaining on the inner wall of the feed pipe evaporate into gas upon heating, flowing to the stirring mixing vessel, where they are centrally processed by the filter, safely producing a low-temperature, high-performance stripping fluid, and conveniently cleaning the feed pipe.

Description

Technical Field

[0001] This invention relates to the field of stripping fluid production technology, and more specifically to a low-temperature, high-performance stripping fluid production equipment. Background Technology

[0002] Photoresist, also known as photoresist stripper, works by using a chemical reaction to dissolve and remove it. The molecules in the stripper are highly reactive, capable of binding to the chemical bonds in the photoresist and disrupting its internal structure. This disruption causes the photoresist components to break down and dissolve in the stripper.

[0003] Patent application CN102566333A discloses a low-temperature aqueous positive adhesive stripping solution and its preparation method. Specifically, the method involves: first, adding a certain amount of N-methylpyrrolidone and water to a reaction vessel via an automatic feeding system and stirring thoroughly for 10-30 minutes; then, continuing to add dimethylacetamide, diethylene glycol butyl ether, and water via the automatic feeding system until the weight percentages of N-methylpyrrolidone are 29%-31%, dimethylacetamide is 23.7%-27.7%, diethylene glycol butyl ether is 24%-26%, and water is 17%-23%. Feeding is then stopped, and stirring continues for 10-30 minutes. Finally, a diaphragm pump is started, and the resulting mixture is first circulated through a 0.5 μm filter for 2-3 hours, and then filtered through a 0.2 μm filter to remove harmful particles larger than 0.2 μm, thus obtaining the low-temperature aqueous positive adhesive stripping solution. The beneficial effects are that the low-temperature aqueous positive adhesive stripping liquid and its preparation method provided by the present invention can improve the photoresist stripping performance of the product, reduce the process temperature, and avoid the damage to human body and environment caused by the previously used positive adhesive stripping liquid.

[0004] N-methylpyrrolidone, dimethylacetamide, and diethylene glycol butyl ether are all colorless liquids that are hazardous at room temperature and pressure. In traditional production, these three raw materials flow into the reactor through a feed pipe and are mixed with water. These three raw materials will remain on the inner wall of the feed pipe, and due to their hazardous nature, it is difficult for workers to clean the feed pipe.

[0005] Therefore, how to safely produce low-temperature, high-performance stripping fluid and conveniently clean the feed pipe is a technical problem that urgently needs to be solved in this field. Summary of the Invention

[0006] The technical problem to be solved by the present invention is to provide a low-temperature, high-performance stripping fluid production equipment that can safely produce low-temperature, high-performance stripping fluid and conveniently clean the feed pipe.

[0007] This invention is achieved as follows: a low-temperature, high-performance stripping fluid production device, comprising:

[0008] The first raw material tank is used to store N-methylpyrrolidone;

[0009] The second raw material tank is used to store dimethylacetamide;

[0010] The third raw material tank is used to store diethylene glycol butyl ether;

[0011] The fourth raw material tank is used to store pure water;

[0012] It also includes a conveying pipe, a conveying pump, a vertical pipe, a mixing tank, a first electrically controlled valve, a second electrically controlled valve, a third electrically controlled valve, an inert gas supply device, a heater, a filter, a main gas supply pipe, a branch gas supply pipe, and an exhaust pipe;

[0013] The bottom outlets of the first raw material tank to the fourth raw material tank are respectively connected to the inlets of the four conveying pipes, the outlets of the four conveying pipes are respectively connected to the inlets of the four conveying pumps, the outlets of the four conveying pumps are respectively connected to the lower inlets of the four vertical pipes, and the upper outlets of the four vertical pipes are all connected to the top inlet of the mixing vessel. The first electrically controlled valve is installed at the bottom outlet of the first raw material tank to the fourth raw material tank, and the filter is installed at the top air outlet of the mixing vessel.

[0014] The outlet of the inert gas supply device is connected to the inlet of the main gas supply pipe. The main gas supply pipe passes through the heater. The inlets of the four gas supply branch pipes are all connected to the outlet of the main gas supply pipe. The outlets of the four gas supply branch pipes are respectively connected to the top of the first raw material tank to the fourth raw material tank. The four gas supply branch pipes are all equipped with the second electrically controlled valve. The top of the first raw material tank to the fourth raw material tank is equipped with the exhaust pipe, and the exhaust pipe is equipped with the third electrically controlled valve.

[0015] Furthermore, it also includes an industrial computer, which is electrically connected to the delivery pump, the mixing vessel, the first electrically controlled valve, the second electrically controlled valve, the third electrically controlled valve, the inert gas supply device, and the heater.

[0016] Furthermore, it also includes an inert gas concentration detector, which is installed in all four raw material tanks from the first to the fourth, and is electrically connected to the industrial computer.

[0017] When the concentration value detected by the inert gas concentration detector is lower than the preset concentration threshold, the industrial computer automatically opens the second electrically controlled valve and the third electrically controlled valve;

[0018] When the concentration value detected by the inert gas concentration detector is higher than or equal to the preset concentration threshold, the industrial computer automatically closes the second and third electrically controlled valves.

[0019] Furthermore, it also includes position sensors. The top of the first to fourth raw material tanks is equipped with a flip-up feed sealing cover and the position sensor is installed on each of them. The position sensor is used to detect whether the feed sealing cover is open. The position sensor is electrically connected to the industrial computer.

[0020] When the feed sealing cover is opened, the industrial computer automatically opens the second electrically controlled valve.

[0021] Furthermore, it also includes temperature sensors, which are installed in the first to fourth raw material tanks and are electrically connected to the industrial computer.

[0022] Furthermore, the inert gas supply device is a nitrogen supply device.

[0023] Further, by mass percentage, the N-methylpyrrolidone accounts for 29% to 31%, the dimethylacetamide accounts for 23.7% to 27.7%, the diethylene glycol butyl ether accounts for 24% to 26%, and the water accounts for 17% to 23%.

[0024] Compared with the prior art, the advantages of the present invention are as follows: Inert gas is introduced into the raw material tank, and inert gas can be replenished in real time during the production of the stripping liquid, so that the raw material of the stripping liquid is kept in inert gas, effectively preventing the raw material from contacting air and ensuring the quality of the raw material; the raw material flows to the mixing tank under the drive of the delivery pump, and after the production of the low-temperature high-performance stripping liquid is completed, heated inert gas is introduced into the raw material tank. During the flow of the heated inert gas, heat is transferred to the conveying pipe, and the N-methylpyrrolidone, dimethylacetamide, diethylene glycol butyl ether and pure water remaining on the inner wall of the conveying pipe evaporate into gas upon heating. The gas flows to the mixing tank with the inert gas and is finally centrally processed in the filter, realizing the safe production of low-temperature high-performance stripping liquid and convenient cleaning of the conveying pipe. Attached Figure Description

[0025] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0026] Figure 1 This is a schematic diagram of the low-temperature, high-performance stripping fluid production equipment of the present invention.

[0027] Figure 2 This is a schematic diagram showing the positions of the inert gas concentration detector, position sensor, feed sealing cover, and temperature sensor in this invention.

[0028] Figure 3 This is a schematic diagram showing the connection between the industrial computer and various devices in this invention.

[0029] Reference numerals: First raw material tank 11; Second raw material tank 12; Third raw material tank 13; Fourth raw material tank 14; Feeding pipe 21; Conveying pump 22; Vertical pipe 23; Mixing vessel 24; First electrically controlled valve 25; Second electrically controlled valve 26; Third electrically controlled valve 27; Inert gas supply device 31; Heater 32; Filter 33; Main gas supply pipe 34; Branch gas supply pipe 35; Exhaust pipe 36; Industrial computer 4; Inert gas concentration detector 41; Position sensor 42; Feed sealing cover 43; Temperature sensor 44. Detailed Implementation

[0030] This invention provides a low-temperature, high-performance stripping fluid production device, which overcomes the shortcomings of the prior art, such as the hazardous nature of the raw materials for the stripping fluid and the difficulty in cleaning the residual raw materials on the inner wall of the conveying pipe. It achieves the technical effect of safely producing low-temperature, high-performance stripping fluid and conveniently cleaning the conveying pipe.

[0031] The overall concept of the technical solution of this invention is as follows:

[0032] The raw materials for the low-temperature high-performance stripping fluid are N-methylpyrrolidone, dimethylacetamide, diethylene glycol butyl ether, and pure water. These raw materials are all liquids at room temperature and pressure. Inert gas is continuously introduced into the raw material tank, which is located at the top of the tank to isolate the raw materials and ensure their quality. The raw materials flow to the mixing tank driven by the pump. After the production of the low-temperature high-performance stripping fluid is completed, the raw material tank is empty, but some raw materials remain on the inner wall of the feed pipe. At this time, heated inert gas is introduced into the raw material tank. During the flow of the heated inert gas, heat is transferred to the feed pipe. The N-methylpyrrolidone, dimethylacetamide, diethylene glycol butyl ether, and pure water remaining on the inner wall of the feed pipe evaporate into gas and flow to the mixing tank with the inert gas. Finally, the gas is centrally processed by the filter, thus facilitating the cleaning of the feed pipe without the need for manual cleaning.

[0033] Heated inert gas can also clean residual liquid raw materials in raw material tanks, residual liquid raw materials in vertical pipes, and residual liquid raw materials in mixing tanks.

[0034] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0035] See Figures 1 to 3 The preferred embodiment of the present invention.

[0036] A low-temperature, high-performance stripping fluid production device, comprising:

[0037] First raw material tank 11 is used to store N-methylpyrrolidone;

[0038] The second raw material tank 12 is used to store dimethylacetamide;

[0039] The third raw material tank 13 is used to store diethylene glycol butyl ether;

[0040] The fourth raw material tank, 14, is used to store pure water;

[0041] It also includes a material conveying pipe 21, a conveying pump 22, a vertical pipe 23, a mixing tank 24, a first electrically controlled valve 25, a second electrically controlled valve 26, a third electrically controlled valve 27, an inert gas supply device 31, a heater 32, a filter 33, a main gas supply pipe 34, a branch gas supply pipe 35, and an exhaust pipe 36;

[0042] The bottom outlets of the first raw material tank 11 to the fourth raw material tank 14 are respectively connected to the inlets of the four conveying pipes 21, the outlets of the four conveying pipes 21 are respectively connected to the inlets of the four conveying pumps 22, the outlets of the four conveying pumps 22 are respectively connected to the lower inlets of the four vertical pipes 23, and the upper outlets of the four vertical pipes 23 are all connected to the top inlet of the mixing vessel 24. The bottom outlets of the first raw material tank 11 to the fourth raw material tank 14 are all equipped with the first electrically controlled valve 25, and the top air outlet of the mixing vessel 24 is equipped with the filter 33.

[0043] The outlet of the inert gas supply device 31 is connected to the inlet of the main gas supply pipe 34. The main gas supply pipe 34 passes through the heater 32. The inlets of the four gas supply branch pipes 35 are all connected to the outlet of the main gas supply pipe 34. The outlets of the four gas supply branch pipes 35 are respectively connected to the top of the first raw material tank 11 to the fourth raw material tank 14. The four gas supply branch pipes 35 are all equipped with the second electrically controlled valve 26. The top of the first raw material tank 11 to the fourth raw material tank 14 is equipped with the exhaust pipe 36. The exhaust pipe 36 is equipped with the third electrically controlled valve 27.

[0044] In this embodiment, inert gas is introduced into the raw material tank. During the production of the stripping fluid, inert gas can be replenished in real time to keep the raw material of the stripping fluid in an inert gas environment, effectively preventing the raw material from contacting air and ensuring the quality of the raw material. The raw material flows to the mixing tank 24 under the drive of the delivery pump 22. After the production of the low-temperature high-performance stripping fluid is completed, heated inert gas is introduced into the raw material tank. During the flow of the heated inert gas, heat is transferred to the feed pipe 21. The N-methylpyrrolidone, dimethylacetamide, diethylene glycol butyl ether and pure water remaining on the inner wall of the feed pipe 21 are heated and evaporated into gas. The gas flows to the mixing tank 24 with the inert gas and is finally centrally processed in the filter 33. This achieves safe production of low-temperature high-performance stripping fluid and convenient cleaning of the feed pipe 21.

[0045] The first electrically controlled valve 25 controls whether the raw material falls from the raw material tank into the conveying pipe and controls the feeding rate. The second electrically controlled valve 26 controls whether inert gas flows into the raw material tank. The third electrically controlled valve 27 controls whether the gas in the raw material tank is discharged to the outside through the exhaust pipe 36. When air is mixed in the raw material tank, inert gas is continuously introduced into the raw material tank, while the gas in the raw material tank is discharged to the outside through the exhaust pipe 36, thereby increasing the proportion of inert gas in the raw material tank, removing air, and effectively ensuring the quality of the raw material. When the proportion of inert gas reaches the required level, the second electrically controlled valve 26 and the third electrically controlled valve 27 are closed.

[0046] Heater 32 is used to heat the inert gas during the production completion stage. Filter 33 is used to filter out N-methylpyrrolidone, dimethylacetamide, and diethylene glycol butyl ether, preventing these hazardous substances from entering the outside atmosphere and improving production safety. Preferably, the filter is a water tank, in which N-methylpyrrolidone, dimethylacetamide, and diethylene glycol butyl ether are dissolved in water. The inert gas exits from the outlet of the water tank, then passes through a dryer to remove the moisture contained in the inert gas. Finally, the inert gas flows back to the inert gas supply device through a pipeline for recycling.

[0047] The system also includes an industrial computer 4, which is electrically connected to the transfer pump 22, the mixing vessel 24, the first electrically controlled valve 25, the second electrically controlled valve 26, the third electrically controlled valve 27, the inert gas supply device 31, and the heater 32. The beneficial effect of this technical solution is that the industrial computer 4 can remotely control the operating status of the mixing vessel 24, the first electrically controlled valve 25, the second electrically controlled valve 26, the third electrically controlled valve 27, the inert gas supply device 31, and the heater 32, enabling orderly production. The first electrically controlled valve 25, the second electrically controlled valve 26, the third electrically controlled valve 27, and the transfer pump 22 all operate independently, based on the raw material tank.

[0048] It also includes an inert gas concentration detector 41, which is installed in all of the first raw material tanks 11 to the fourth raw material tanks 14. The inert gas concentration detector 41 is electrically connected to the industrial computer 4.

[0049] When the concentration value detected by the inert gas concentration detector 41 is lower than the preset concentration threshold, the industrial computer 4 automatically opens the second electrically controlled valve 26 and the third electrically controlled valve 27.

[0050] When the concentration value detected by the inert gas concentration detector 41 is higher than or equal to a preset concentration threshold, the industrial computer 4 automatically closes the second electrically controlled valve 26 and the third electrically controlled valve 27. The beneficial effect of this technical solution is that it automatically replenishes inert gas to the raw material tank, which is efficient and convenient.

[0051] It also includes a position sensor 42. The top of the first raw material tank 11 to the fourth raw material tank 14 is equipped with a flip-up feed sealing cover 43 and the position sensor 42 is installed on each of them. The position sensor 42 is used to detect whether the feed sealing cover 43 is open. The position sensor 42 is electrically connected to the industrial computer 4.

[0052] When the feed sealing cover 43 is opened, the industrial computer 4 automatically opens the second electrically controlled valve 26. The beneficial effect of this technical solution is that, when the feed sealing cover 43 is opened and raw materials are added to the raw material tank, inert gas is automatically replenished as it flows out of the sealing port.

[0053] It also includes a temperature sensor 44, which is installed in all four raw material tanks from the first raw material tank 11 to the fourth raw material tank 14. The temperature sensor 44 is electrically connected to the industrial computer 4. The beneficial effect of this technical solution is that the temperature of the raw material tank is detected in real time and fed back to the computer, which then adjusts the heating temperature of the heater 32 accordingly. N-Methylpyrrolidone: a colorless liquid at room temperature, boiling point 202℃. Dimethylacetamide: a colorless liquid at room temperature, boiling point 166℃. Diethylene glycol butyl ether: a colorless liquid at room temperature, boiling point 230.4℃. When cleaning the inner wall of the conveying pipe 21, the temperature of the inert gas needs to exceed the boiling point of the raw material, so that the liquid raw material evaporates into a gaseous state upon heating.

[0054] The inert gas supply device 31 is a nitrogen supply device.

[0055] By mass percentage, the N-methylpyrrolidone accounts for 29% to 31%, the dimethylacetamide accounts for 23.7% to 27.7%, the diethylene glycol butyl ether accounts for 24% to 26%, and the water accounts for 17% to 23%.

[0056] The operating method of the low-temperature high-performance stripping fluid production equipment of the present invention is as follows: Inert gas is continuously introduced into the raw material tank. The inert gas is located at the top of the raw material tank, isolating the raw material and ensuring its quality. N-methylpyrrolidone, dimethylacetamide, diethylene glycol butyl ether, and pure water flow to the mixing vessel 24 under the drive of their respective feed pipes 21 and the delivery pump 22 to prepare the low-temperature high-performance stripping fluid. After production is completed, the delivery pump 22 empties the raw material tank, and the heater 32 is started. The heated inert gas enters the raw material tank and flows to the feed pipe 21 to heat the feed pipe 21. The liquid raw material remaining on the inner wall of the feed pipe 21 evaporates into gas upon heating and flows to the mixing vessel 24 with the inert gas. The gas is then centrally processed by the filter 33. The heated inert gas can also clean the liquid raw material remaining in the raw material tank and the mixing vessel 24. The gaseous raw material is absorbed by the filter 33, preventing these hazardous substances from entering the outside atmosphere and improving production safety.

[0057] While specific embodiments of the present invention have been described above, those skilled in the art should understand that the specific embodiments described are merely illustrative and not intended to limit the scope of the present invention. Equivalent modifications and variations made by those skilled in the art in accordance with the spirit of the present invention should be covered within the scope of protection of the claims of the present invention.

Claims

1. A low-temperature, high-performance stripping fluid production device, characterized in that, include: The first raw material tank is used to store N-methylpyrrolidone; The second raw material tank is used to store dimethylacetamide; The third raw material tank is used to store diethylene glycol butyl ether; The fourth raw material tank is used to store pure water; It also includes a conveying pipe, a conveying pump, a vertical pipe, a mixing tank, a first electrically controlled valve, a second electrically controlled valve, a third electrically controlled valve, an inert gas supply device, a heater, a filter, a main gas supply pipe, a branch gas supply pipe, and an exhaust pipe; The bottom outlets of the first raw material tank to the fourth raw material tank are respectively connected to the inlets of the four conveying pipes, the outlets of the four conveying pipes are respectively connected to the inlets of the four conveying pumps, the outlets of the four conveying pumps are respectively connected to the lower inlets of the four vertical pipes, and the upper outlets of the four vertical pipes are all connected to the top inlet of the mixing vessel. The first electrically controlled valve is installed at the bottom outlet of the first raw material tank to the fourth raw material tank, and the filter is installed at the top air outlet of the mixing vessel. The outlet of the inert gas supply device is connected to the inlet of the main gas supply pipe. The main gas supply pipe passes through the heater. The inlets of the four gas supply branch pipes are all connected to the outlet of the main gas supply pipe. The outlets of the four gas supply branch pipes are respectively connected to the top of the first raw material tank to the fourth raw material tank. The four gas supply branch pipes are all equipped with the second electrically controlled valve. The top of the first raw material tank to the fourth raw material tank is equipped with the exhaust pipe, and the exhaust pipe is equipped with the third electrically controlled valve.

2. The low-temperature high-performance stripping fluid production equipment according to claim 1, characterized in that, It also includes an industrial computer, which is electrically connected to the delivery pump, the mixing vessel, the first electrically controlled valve, the second electrically controlled valve, the third electrically controlled valve, the inert gas supply device, and the heater.

3. The low-temperature high-performance stripping fluid production equipment according to claim 2, characterized in that, It also includes an inert gas concentration detector, which is installed in all four raw material tanks from the first to the fourth, and is electrically connected to the industrial computer. When the concentration value detected by the inert gas concentration detector is lower than the preset concentration threshold, the industrial computer automatically opens the second electrically controlled valve and the third electrically controlled valve; When the concentration value detected by the inert gas concentration detector is higher than or equal to the preset concentration threshold, the industrial computer automatically closes the second electrically controlled valve and the third electrically controlled valve.

4. The low-temperature high-performance stripping fluid production equipment according to claim 2, characterized in that, It also includes position sensors. The top of the first to fourth raw material tanks has a flip-up feed sealing cover and is equipped with the position sensor. The position sensor is used to detect whether the feed sealing cover is open. The position sensor is electrically connected to the industrial computer. When the feed sealing cover is opened, the industrial computer automatically opens the second electrically controlled valve.

5. The low-temperature high-performance stripping fluid production equipment according to claim 2, characterized in that, It also includes temperature sensors, which are installed in the first to fourth raw material tanks and are electrically connected to the industrial computer.

6. The low-temperature high-performance stripping fluid production equipment according to claim 1, characterized in that, The inert gas supply device is a nitrogen supply device.

7. The low-temperature high-performance stripping fluid production equipment according to claim 1, characterized in that, By mass percentage, the N-methylpyrrolidone accounts for 29% to 31%, the dimethylacetamide accounts for 23.7% to 27.7%, the diethylene glycol butyl ether accounts for 24% to 26%, and the pure water accounts for 17% to 23%.

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