Versatile sintering or diffusion bonding equipment and punching tools

Abstract

The invention relates to a sintering device or diffusion soldering device for connecting components of at least one electronic component by pressure sintering, the sintering device or diffusion soldering device comprising an evacuable process chamber, in which an upper tool and a lower tool are arranged, between which the component is held and which can be displaced relative to each other in their distance to apply pressure, wherein the process chamber comprises a base body, which has an access opening on its upper side and a cover, which can be adjusted between a closed position and an open position, in which the access opening is closed by the cover, wherein the upper tool is supported on the cover in its closed position at least during the application of pressure. The invention also relates to another sintering device and a punching tool.

Description

Technical Field

[0001] The invention relates to a multifunctional diffusion soldering or sintering device for connecting parts of at least one electronic component by diffusion soldering or pressure sintering, wherein the diffusion soldering or sintering device comprises an evacuable process chamber, in which an upper tool and a lower tool are arranged, the component is held between the upper tool and the lower tool, and the upper tool and the lower tool can be displaced relative to each other in their distance to apply pressure. Background Art

[0002] Universal diffusion welding or sintering equipment is used to connect the parts of electronic components to each other mechanically, electrically and thermally. For example, universal diffusion welding or sintering equipment can be used to connect electronic semiconductor components (such as high-performance switching elements or semiconductor components) and substrates (such as PCBs, heat sinks, etc.) to each other by diffusion welding or pressure sintering. In diffusion welding, pressure is used to mix the atoms of solid basic materials with the atoms of liquid solder. This results in the formation of an alloy zone of material-material connection between the basic material and the solder. In pressure sintering, two or more components (especially electronic components and substrates) can be connected to each other in an electrically and / or thermally conductive manner by a bonding material, wherein the connection bonding material is sintered. For example, corresponding equipment and methods are known from WO 2014 / 135151 A2.

[0003] Universal diffusion welding or sintering equipment is often used in automatic welding or sintering systems, in particular in automatic multi-chamber sintering systems. EP 2 026 927 B1 describes a welding equipment with a similar structure having a process chamber divided into a plurality of zones.

[0004] The sintering of the electronic components themselves is achieved by adjusting the temperature of the components to be sintered and / or their parts and by the effect of the pressure applied by the upper tool and the lower tool. Thus, for example, in the variant of pressure sintering (low temperature pressure sintering) with silver as the bonding material, the temperatures required for connection and diffusion are generally between about 130°C and 250°C to 300°C. The sintering operation requires a duration of about 5 to 10 minutes at a pressure of up to 30 MPa. Shorter times can be achieved with new types of sintering pastes.

[0005] In order to obtain a layer with as closed pores as possible from the sintered material inserted between the components during pressure sintering, in order to ensure a mechanically stable and, in particular, shear-resistant connection as well as the required electrical and thermal conductivity, the joining layer is compacted by pressure before and during the diffusion treatment. At the end of the sintering operation, the pressure and temperature are reduced.

[0006] DE 10 2014 114 093 B4 describes a sintering device having one or more sintering chambers and an associated method.

[0007] DE 10 2017 216 545 A1 shows a device for producing a low-temperature pressure sintering connection for at least one electronic component.

[0008] DE 10 2019 134 410 A1 describes a method and a system for connecting electronic components and / or for producing workpieces.

[0009] US 2007 / 0296035 A1 shows a device for connecting semiconductor structures.

[0010] US 2013 / 0133828 A1 describes an apparatus for connecting a substrate to be treated and a supporting substrate.

[0011] One challenge is to apply the pressure required for diffusion welding or sintering to the assembly in the most uniform manner possible, so that the components of the assembly are not subjected to any local or temporary peak pressures. It is particularly necessary to prevent these local peak pressures when arranging a connection assembly of multiple electronic components of different heights on a substrate or support.

[0012] Universal diffusion soldering or sintering equipment generally employs upper and / or lower tools that are adapted to the size of the electronic assembly or its components to be manufactured. For example, suitable plungers of different lengths may be fixed to a punching tool.

[0013] Typically, not only one type of assembly can be produced using a specific diffusion welding or sintering device, but also different types of assemblies can be produced. A change in the type of assembly typically also requires a change in the associated upper and / or lower tool. This in turn requires regular access to the process chamber to allow the necessary resetting work to be performed. For other maintenance and / or cleaning work, and in the event of a malfunction, regular access to the process chamber is required. However, this type of access typically involves a greater number of work steps, in which the elements of the diffusion welding or sintering device are removed and later put back in place. This results in a considerable downtime of the diffusion welding or sintering device, which can significantly disrupt the production sequence.

[0014] It is therefore an object of the present invention to create a diffusion welding or sintering apparatus whereby access to the process chamber is simplified. Summary of the invention

[0015] This object is achieved by a diffusion soldering or sintering device having the features of claim 1. Advantageous embodiments of the sintering device are given in the dependent claims.

[0016] The present invention provides a diffusion welding or sintering device for connecting parts of at least one electronic component by diffusion welding or pressure sintering, the diffusion welding or sintering device comprising an evacuable process chamber, in which an upper tool and a lower tool are arranged, the component is held between the upper tool and the lower tool, and the upper tool and the lower tool can be shifted relative to each other in their distance to apply pressure, wherein the process chamber comprises a substrate, the substrate has an access opening and a cover on its upper side, the cover can be adjusted between a closed position and an open position, in the closed position the access opening is closed by the cover, wherein the upper tool is supported on the cover in the closed position of the cover at least during the application of pressure.

[0017] In particular, the diffusion welding or sintering device can be operated under adjustable atmospheric conditions, in particular in a vacuum. Therefore, it can also be used multifunctionally for drying purposes in a vacuum or at atmospheric pressure. The welding or sintering slurry can preferably be dried together with it, so that multiple functions such as drying, welding or sintering can be used multifunctionally under adjustable atmospheric conditions. It is also possible to use a cleaning fluid for corrosion protection for purging, for example with nitrogen (N2) and / or formic acid (HCOOH).

[0018] By arranging the access opening on the upper side of the process chamber or on its base, the interior of the process chamber, in particular the upper and / or lower tool, can be easily accessed when the cover is open. The forces generated during the application of pressure or corresponding reaction forces are transmitted to the cover in the closed position, so that the cover assumes the function of a punch yoke.

[0019] The access opening is preferably sealed gas-tight in the closed position of the cover, for example by an all-round seal provided on the cover or on the base body.

[0020] This results in a diffusion welding or sintering device which can be used for drying under adjustable atmospheric conditions, in particular in a vacuum, and which can be used multifunctionally for welding and sintering purposes, in particular for small series production or development purposes.

[0021] Preferably, the upper tool is fixed to the cover, so that the upper tool can be replaced particularly easily when the cover is opened.

[0022] According to a preferred embodiment, the cover is rotatably engaged to the base body around the tilt axis, wherein preferably, an actuating arm arranged to rotate the cover is fixed to the cover. The engagement connection of the cover with the base body ensures the guidance of the cover during opening and closing. In particular, the actuating arm, which can be used as a lever arm, simplifies the opening and closing operation. The actuating arm can be permanently fixed to the cover so that the cover can be used directly without any resetting work. Preferably, the actuating arm is detachably fixed to the cover and can be separated from the cover during its non-use period and stowed in a storage area, for example, arranged inside a diffusion welding or sintering device in a space-saving manner. During the opening and closing of the cover, the actuating arm can be supported pneumatically, hydraulically or by spring force. Alternatively or additionally, a motor drive device, for example by an electric motor or a hydraulic or pneumatic drive unit, can assist or perform the opening or closing of the cover. The actuating arm can be omitted here.

[0023] According to another preferred embodiment, the processing chamber includes a locking device that can be moved between a locked position and an unlocked position, and the locking device is configured to fix the cover in its closed position on the substrate in its locked position. The pressure or the corresponding reaction force is transmitted from the cover to the substrate by the locking device in the closed position, whereby the cover is held in the closed position against the pressure or reaction force. In particular, in the locked position, the joint that enables the cover to be rotatably engaged to the substrate around the tilting axis can be released from the load by the locking device, so that the pressure or the corresponding reaction force is transmitted only between the cover and the substrate via the locking device. This allows a relatively simple design to be used for the joint, so that the joint must only bear the weight of the cover without any additional load caused by the pressure.

[0024] According to another preferred embodiment, the locking device has a plurality of rotatable locking arms, which are reliably connected to the cover and the base body in the locked position. Therefore, during the welding or sintering operation, the force is basically transmitted via the locking arms, preventing the unintentional opening of the cover by the positive connection.

[0025] According to another preferred embodiment, each locking arm is rotatably fixed to the cover at its first end around a corresponding rotation axis and has a locking portion at its second end, which is locked in the locked position using a corresponding locking bolt associated with the locking arm and is fixed to the base. The engagement between the locking portion and the locking bolt in the locked position can be released by rotating the locking arm around the corresponding rotation axis so as to move the locking device from the locked position to the unlocked position. The locking arm in this embodiment is suspended and swung from the cover due to gravity, thereby simplifying the movement of the locking arm into the locked position and can be combined with the closing operation of the cover in particular, which can be assisted by a suitably shaped insertion chamfer at the second end of the locking arm, for example.

[0026] Preferably, the axes of rotation of the access opening, the cover in its closed position and the locking arm extend in respective horizontal planes.

[0027] According to another preferred embodiment, the locking arms are arranged on two side surfaces of the cover that are opposite to each other. This ensures a uniform force transmission between the cover and the substrate, wherein the force causing the deformation or bending of the cover can be significantly reduced. The cover preferably has a cubic shape, with an upper side and a lower side parallel to the upper side, wherein the lower side can have a sealing surface that interacts with the substrate, two first side surfaces that are parallel to each other and extend perpendicularly to the upper side and the lower side, and two second side surfaces that are parallel to each other and extend perpendicularly to the upper side and the lower side and perpendicularly to the first side surface. Preferably, the tilt axis of the cover extends parallel to the first side, and the locking arms are arranged on the second side. This prevents the locking arms from obstructing access to the processing chamber when the cover is opened.

[0028] The sealing surface can be formed by a sealing ring, if necessary, of circular, square, rectangular or oval cross section, which in atmospheric conditions creates a distance between the cover and the base, whereby locking closure of the cover is not possible. When a negative pressure, preferably a vacuum, is created, the sealing ring can be compressed between the cover and the base by the negative pressure, so that the cover can be locked to the base by actuating the locking mechanism.

[0029] The locking and unlocking method of the cover can be as follows. During locking, the cover can first be pressed against the seal by the actuating arm until the locking arm automatically engages in the locking bolt. The position of the locking arm can be fixed in place by a blocking rod.

[0030] During unlocking, it is advantageous to first generate a negative pressure or vacuum in the process chamber, since the seal exerts a reaction force on the cover and thus presses the locking arm against the locking bolt in the locked position. Due to the atmospheric pressure acting on the cover, the load on the locking arm against the locking bolt is released, since the cover is pressed further into the seal by the atmospheric pressure, so that the locking arm can be moved into the unlocked position without force by the release lever. By the subsequent end of the vacuum, the expansion seal allows the cover to be gradually and automatically rotated towards the open position. The cover can then be relatively easily rotated into the open position by the actuating arm.

[0031] According to a further preferred embodiment, the locking device has exactly three locking arms, wherein the first and the second locking arm are arranged on one side surface and the third locking arm is arranged on another side surface. The above-mentioned side surface is preferably the aforementioned second side surface.

[0032] According to another preferred embodiment, the locking arm and the axis of rotation of the locking bolt associated with the locking arm are arranged so that the effective direction of the locking force, which is transmitted due to the pressure applied between the cover and the base body via the corresponding locked locking arm, extends parallel to the effective direction of the pressure at least for the first and second locking arms, and preferably extends obliquely to the effective direction of the pressure for the third locking arm. Therefore, the locking force transmitted via the first and second locking arms acts vertically on the main extension direction of the cover. This can also apply to the third locking arm, however, preferably, due to the inclined stroke of the locking force transmitted via the third locking arm relative to the effective direction of the pressure, the locking force has, in addition to the normal component extending parallel to the effective direction of the pressure, a transverse component extending perpendicularly to the effective direction of the pressure and parallel to the main extension plane of the cover. The cover is pretensioned in its main extension plane by this transverse component. Preferably, the angle generated between the effective direction of the pressure and the locking force transmitted via the third locking arm is only a few degrees, so that the transverse component is small compared to the pressure.

[0033] According to another preferred embodiment, the first locking arm and the second locking arm are connected via a connecting rod, so that the first locking arm and the second locking arm can be moved synchronously between the locked position and the unlocked position. The locking arms here form an imaginary connecting line of their rotation axes, and the connecting rod forms a parallelogram with a variable angle, which simplifies the locking and unlocking operations.

[0034] According to a further preferred embodiment, the mass distribution of the third locking arm and the position of the axis of rotation of the third locking arm and the position of the locking bolt associated with the third locking arm are selected so that the third locking arm is held in its locked position only or at least substantially by the effect of gravity when the cover is closed and without additional forces. When the locking arm is locked, the mass distribution can be asymmetrical, for example, with respect to an imaginary symmetry plane generated between the axis of rotation and an axis of symmetry of the locking bolt parallel to the axis of rotation.

[0035] According to another preferred embodiment, at least one blocking lever, preferably designed as a toggle lever and interacting with a corresponding associated locking arm, is provided, which blocking lever can be moved between a blocking position and a release position, in which the blocking lever blocks the locking arm in its locked position to prevent movement, and in which the blocking lever releases the locking arm for movement. Alternatively or additionally, at least one release lever, preferably designed as a toggle lever and interacting with a corresponding associated locking arm, is provided, which is configured to move the locking arm from its locked position to its unlocked position. The locking arm is ensured to be completely in the locked position by (one or more) blocking levers, and thus unintentional unlocking caused by pressure or any movement force acting on the locking arm is prevented. The locking arm can be released from its locked position by the release lever, and thus enables the cover to be subsequently opened. At least one blocking lever and / or at least one release lever are preferably arranged on the substrate.

[0036] In order to ensure that the locking device is always in its locking position during the application of pressure, a suitable position sensor can be provided on the blocking rod, which is connected to the control device of the diffusion welding or sintering device and prevents the drive for applying pressure from being activated when the blocking rod is not in the blocking position. Alternatively or additionally, a position sensor can also be provided on the locking arm and / or on the locking bolt and is configured to detect whether the locking arm is in its locking position.

[0037] On the other hand, the present invention relates to a diffusion welding or sintering device for connecting components of at least one electronic component by diffusion welding or pressure sintering, in particular a diffusion welding or sintering device according to one of the aforementioned preferred embodiments or according to the present invention, wherein the diffusion welding or sintering device comprises an upper tool and a lower tool, the component is held between the upper tool and the lower tool, and the upper tool and the lower tool are displaceable relative to each other in their distance to apply a compressive force, wherein an elastic foil, preferably a graphite foil, is arranged between the stamping yoke and the upper tool and / or in the lower tool. The stamping yoke is a component that is arranged to absorb pressure. Preferably, the stamping yoke can be formed by the cover of the aforementioned embodiment, or can be formed as a separate component, which can be arranged, for example, between the cover and the upper tool. The lower tool can be designed as a plurality of components, in particular two components, wherein the elastic foil is arranged between the two components. The elastic foil can also be arranged below the lower tool towards the stamping device. The elastic foil is used to compensate for any non-parallelism between the upper tool and the stamping yoke and ensure the uniformity of the forces acting on the components. In particular, the gradient of the pressure on the surface of the stamping region is reduced.

[0038] According to another advantageous embodiment of the above diffusion welding or sintering device, the lower tool has a fluid-filled pressure pad on the side facing the component. The pressure pad can also consist of silicone. In addition to the elastic foil, the pressure pad also makes it possible to further homogenize the pressure and in particular compensate for any height tolerances of the components to be connected.

[0039] On the other hand, the present invention relates to a punching tool for an upper tool or a lower tool of a diffusion welding or sintering device according to one of the aforementioned preferred embodiments or according to the present invention, wherein the punching tool comprises: a rigid substrate; a membrane part, which is connected to the substrate and is formed by a flexible, preferably disc-shaped silicone membrane or a metal membrane preferably made of a steel alloy; and a pressure chamber, which preferably comprises a pressure pad, which is filled with a fluid and is arranged in the direction of the punching surface in a closed receiving area defined by the substrate and the membrane part. The pressure chamber can, for example, be filled with a fluid, or can include a supporting structure, or the pressure pad can be placed therein. The pressure pad generally has a flexible housing, which defines a volume for the fluid (e.g. silicone). The pressure pad can also be completely composed of silicone or another heat-resistant and pressure-equalizing material. The housing is generally subject to severe wear due to adaptation to the contour of the components and due to scaling caused by the components or the joining materials. In order to protect the pressure pad, conventional diffusion welding or sintering systems generally use a foil, in particular PTFE (polytetrafluoroethylene), which is arranged between the component to be connected and the pressure pad and is removed after the welding or sintering operation is completed. However, this involves additional method steps, which on the one hand prolong the processing time and on the other hand represent additional sources of failure. In an embodiment of the upper and lower tool according to the invention, the metal film has the function of such a protective foil on the one hand and of a holding device for the pressure pad on the other hand. The pressure pad is protected from damage and fouling, wherein the flexibility of the metal film ensures that the upper and / or lower tool is adequately adapted to the components to be connected.

[0040] Providing a closed receiving area for the pressure pad also reduces the requirements on the compressive strength of the pressure pad, since pressure built up in the pressure pad during the punching operation is fully absorbed via the base plate and the membrane portion and excessive stretching of the outer shell of the pressure pad is prevented.

[0041] According to a preferred embodiment, the membrane portion has a full peripheral edge portion clamped between a base plate and a clamping ring preferably bolted to the base plate. A reliable connection between the membrane portion and the base plate is achieved by the clamping ring and also allows replacement of the pressure pad or the membrane portion in the event of a defect.

[0042] The membrane section can have a uniform thickness, but can also have areas of varying thickness. In particular, depending on the arrangement and / or surface structure of the component to be pressed, thickened and thinned membrane areas can be provided to adapt the flexibility of the membrane section in the area of ​​the component. Thus, the membrane section can have a stiffness structure adapted to the arrangement of the component, in particular to the component arranged in the production cargo carrier, by means of thickness variations (i.e. thickened and thinned membrane surface areas).

[0043] In an advantageous development, a sub-region of the pressure chamber of the punching tool, in particular at least one sub-region of the pressure pad held in the pressure chamber, can be designed to be controllably filled with a fluid, in particular filled with a gas. Preferably, the fluid filling can be controlled by at least one filling valve. Due to the fluid filling (in particular gas filling) of the sub-region (in particular the sub-region) of the pressure chamber, a pressure can be generated by the fluid filled into the pressure chamber, in addition or alternatively by the pressure applied by the press machine. Thus, for example, when the pressure is reduced or a vacuum is generated in the process chamber, the pressure chamber can be expanded by the membrane portion by introducing the ambient gas of the process chamber (if necessary, also a purge gas such as nitrogen) into the sub-region of the pressure chamber. This generates a relatively low but in many cases sufficient pressure on the component without the hydraulic press mechanically operating the punching plunger, for example for bonding methods, for low-pressure sintering with silver or copper, for diffusion welding, for example up to 0.4 MPa, for example up to 0.1 MPa, etc. Thus, merely by providing a defined process environment in the process chamber and / or pressure chamber, a precisely adjustable pressure can be applied to the component, which pressure cannot be applied using mechanical pressure by moving the lower tool and the upper tool relative to each other.

[0044] In this embodiment, a stamping tool can be provided in a low-cost and easy manner for additional or alternative pressure application. This is because the required and controlled sintering pressure or diffusion welding pressure or bonding pressure can be applied to the semiconductor element using the process environment or vacuum in the process chamber usually required for the process to compensate for height differences of parts on the component.

[0045] For this purpose, no additional force measuring systems or pressure measuring systems are required, as a vacuum pressure sensor and a simple software area conversion are sufficient to obtain the required and set sintering pressure or diffusion welding pressure or bonding pressure.

[0046] Since the vacuum chamber in the vacuum exerts pressure on the component via the punching tool, it is possible to continuously monitor whether oxygen penetrates from the outside into the vacuum chamber during the process, since an unexpected chamber pressure increase can be detected immediately. This ensures that hot components, in particular copper surfaces, do not oxidize. Pressure monitoring of the component can be performed using, for example, a load cell included in the punching drive. For example, a blockage of a plunger can be detected.

[0047] In an advantageous development of the punching tool, a multi-plunger unit with a plurality of punching plungers guided in a guide frame can be arranged below the membrane section. This makes it possible to selectively exert pressure on individual parts of the component and, in particular, to compensate for height differences. The pressure energy can also be reduced, since pressure is only built up in those areas where it is required. Sub-areas of the component can be protected from overloading.

[0048] The diffusion welding or sintering device preferably has a cooling and / or heating device, which is advantageously arranged at least in the lower tool of the punching tool. The cooling and / or heating device can include induction and / or convection heaters, but also radiation heaters or contact heaters. In addition, fluid cooling can be provided, in particular by water, air or oil. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] Further advantages emerge from the following description of the drawings. The drawings show examples of the invention. The drawings, the description and the claims contain many features in combination. A person skilled in the art will also consider these features individually and combine them into useful further combinations. In the drawings:

[0050] Figure 1 and 2 shows a schematic perspective view of a diffusion welding or sintering device according to an example in different working positions,

[0051] Figure 3a , 3b Shows Figure 1 and Figure 2 Side view of a diffusion welding or sintering device in a closed position and an open position,

[0052] Figure 4 yes Figure 1 To the partial cross-sectional perspective view of the diffusion welding or sintering apparatus in FIG. 3,

[0053] Figure 5 yes Figures 1 to 4 3D semi-transparent view of a diffusion-bonded or sintered device in

[0054] Figure 6a , 6b yes Figures 1 to 5 Schematic side view and detailed view of a locking device for a diffusion welding or sintering device in;

[0055] Figure 7 is Figure 1 6 to the schematic diagram of the open and locked positions of the cover of the diffusion welding or sintering device;

[0056] Figure 8 is an exploded perspective view of a punching tool for a diffusion welding or sintering device according to an example; Figure 9a ,9b yes Figure 8 A cross-sectional view of the punch tool in FIG. 1 , and

[0057] Fig.10 , Figures 11a to 11d is a schematic side view of a diffusion welding or sintering apparatus according to a further example;

[0058] Figure 12a-12c is another punching tool in a plurality of method stages of a diffusion welding or sintering apparatus according to an example;

[0059] The same reference numerals are used hereinafter for identical or similar elements. DETAILED DESCRIPTION

[0060] Figure 1 and Figure 2 A diffusion welding or sintering device 10 according to an example is shown, which has a housing 12 surrounding an evacuable process chamber 20 and various auxiliary units and auxiliary devices of the diffusion welding or sintering device 10, which are not mentioned in detail. The housing 12 has a rotatable lid 14, which in its open position provides further access to the interior of the housing 12 and in particular to the process chamber 20. The process chamber 20 can be cleaned with a cleaning fluid, such as nitrogen (N2) or formic acid. Pressure conditions from positive pressure, atmospheric pressure to negative pressure and vacuum can be set in the process chamber 20. In particular, welding or sintering methods in a vacuum or oxygen-free environment prevent undesirable corrosion effects.

[0061] In addition, as in Figure 3a , 3b As shown more specifically in FIGS. 4 and 5 , the process chamber 20 further comprises a base body 22 having an access opening 23 on its upper side, which can be opened in a closed position ( Figure 1 , Figure 3a ) and open position ( Figure 2 , Figure 3b ) are sealed by rotation between the two ends. The cover 24 has a generally cubic shape, wherein the upper side and the lower side parallel to the main direction of the cover 24 extend in a horizontal plane in the closed position of the cover 24, while the longitudinal side surfaces and the transverse side surfaces of the cover 24 extend in a vertical plane. The cover 24 is joined to the base 22 using a joint 36 arranged on the rear longitudinal side surface.

[0062] The access opening 23 is defined by a sealing surface that interacts with a full-circumference sealing ring 28 disposed on the lower side of the cover 24. The sealing ring 28 has been slightly pressed against the sealing surface of the substrate 22 by the weight of the cover 24, so that the access opening 23 is already airtightly closed at the beginning of the evacuation operation, and no vacuum leakage occurs. Due to the establishment of a negative pressure of, for example, less than 800 hPa, the cover 24 is pressed more forcefully against the substrate 22, wherein the sealing ring 28 can be slightly deformed. If no negative pressure is applied, the sealing ring 28, which is preferably designed as an O-ring, can be stable and create a distance between the cover 24 and the substrate 22, so that the cover 24 cannot be locked. The joint 36 can have a certain gap so that the deformation of the joint 36 pressed against the cover 24 or the sealing ring 28 is not hindered. By a negative pressure of 800 hPa or less, the cover 24 can already be in close contact with the substrate 22.

[0063] To actuate the cover 24, an actuation arm 26 is provided which acts as a lever arm and which is preferably detachably connected to the cover 24 and which can be removed and stored within the housing 12 when not in use (see Figure 1 and Figure 2 ).

[0064] Especially from Figure 3a , 3b As can be seen in 5, the process chamber 20 may have a further access opening allowing additional access to the interior of the process chamber 20. This further access opening may be sealed by means of an additional cover, for example using a lid 14, in particular using an airtight cover or an air lock, such as a sliding partition, etc., which may be opened and closed using an actuation and locking device not mentioned in detail, or may be fixed to the base 22 (see Figure 3a and Figure 3b ).

[0065] The upper tool 30 ( Figure 2 and 4 ) is fixed to the cover 24. In addition, the diffusion welding or sintering device 10 has a lower tool 32 arranged opposite to the upper tool 30, wherein the electronic component parts to be connected are arranged between the upper tool 30 and the lower tool 32 for performing the diffusion welding or sintering operation. It can be, for example, through a workpiece carrier 38 ( Figure 4 ) Place the components to be connected into the processing chamber 20.

[0066] For applying pressure, the lower tool 32 is mounted vertically movably and is linked to a punch drive 34 which is arranged below the process chamber 20 and is connected to the base body 22 .

[0067] During the punching operation, the lower tool 32 is moved closer to the upper tool 30 by the drive 34, resulting in very high pressures acting on the upper tool 30 and therefore also on the cover 24, so that when a certain pressure is exceeded, opening of the cover 24 cannot be prevented solely by the negative pressure prevailing in the process chamber 20.

[0068] Therefore, the diffusion welding or sintering device 10 has a locking device 40, Figure 5 , Figure 6a and Figure 6b As detailed in the Figure 1, the locking device 40 fixes the cover 24 in its locked position in a closed position on the base body 22 and comprises a plurality of rotatable locking arms 42.1-42.3 provided on both lateral side surfaces of the cover 24. Each of the locking arms 42.1-42.3 is rotatably fixed to the cover 24 around a respective rotation axis 44.1-44.3 by its first end and has a respective locking portion 46.1-46.3 at its second end opposite to the first end, which is locked in the locked position and fixed to the base body 22 using a locking bolt 50.1-50.3 associated with the respective locking arm 42.1-42.3. The association of the rotation axis 44.1-44.3, the locking portion 46.1-46.3 and the locking bolt 50.1-50.3 with the locking arm 42.1-42.3 is indicated by the last digit after the dot in the reference numeral. According to the example shown, the axes of rotation 44 . 1 - 44 . 3 may extend in a common plane extending parallel to a main extension plane of the cover 24 .

[0069] like Figure 5 The stereogram and Figure 6a As shown in the plan view of the cover 24d, the locking arms 42.1-42.3 include a first locking arm 42.1 and a second locking arm 42.3 arranged on one lateral side surface of the cover 24d, and a third locking arm 42.3 arranged on a lateral side surface opposite to the aforementioned lateral side surface. The rotation axes 44.1, 44.2 of the first locking arm 42.1 and the second locking arm 42.3 and the symmetry axes of the associated locking bolts 50.1, 50.2 respectively form the corners of an imaginary rectangle, in particular as shown in FIG. Figure 6a The first locking arm 42.1 and the second locking arm 42.3 are fixed by a connecting rod 64 ( Figure 3a , 3b and 4) so ​​that the locking arms 42.1, 42.2 can be rotated synchronously between their locked position and unlocked position, wherein the locking arms 42.1, 42.2 perform a parallelogram movement here.

[0070] The rotation axis 44.3 of the third locking arm 42.3 is in the same plane as the rotation axes 44.1, 44.2, wherein the third rotation axis 44.3 is equidistant from the first rotation axis 44.1 and the second rotation axis 44.2 (see Figure 6b ). The symmetry axis of the third locking bolt 50.3 is in the same plane as the symmetry axis of the first locking bolt 50.1 and the second locking bolt 50.2, but the distance A between the symmetry axis of the third locking bolt 50.3 and the symmetry axis of the second locking bolt 50.2 is smaller than the distance between the symmetry axis of the third locking bolt 50.3 and the symmetry axis of the first locking bolt 50.1.

[0071] Due to the symmetrical arrangement of exactly three locking arms 42.1-42.3 with their axes of rotation 44.1-44.3 on the cover, the most uniform locking possibility of the cover 24 is ensured, while twisting or deformation of the cover 24 is largely prevented. It is thus ensured that the upper tool 30 also remains free of deformations or distortions, which could lead to a negative impact on the uniformity of the components to be connected thereto.

[0072] In particular, if Figure 6b As can be easily seen in the figure, the rotation axis 44.3 of the third locking arm 42.3 and the symmetry axis of the locking bolt 50.3 are observed to be slightly offset from each other in the transverse direction. Although the effective direction of the locking force transmitted due to the pressure exerted between the cover 24 and the base body 22 via the corresponding locked locking arms 42.1-42.3 extends parallel to the effective direction of the pressure generated by the movement of the lower tool 32 for the first locking arm 42.1 and the second locking arm 42.2, the locking force extends obliquely relative to the effective direction of the pressure of the third locking arm 42.3. Therefore, the locking force transmitted via the third locking arm 42.3 has, in addition to a normal component parallel to the effective direction of the pressure, a transverse component perpendicular to the effective direction of the pressure and therefore parallel to the main extension plane of the cover. As a result, the cover 24 is slightly supported in its main extension plane, so that in particular the play in the joint installation of the locking arms 42.1-42.3 on the cover 24 in the locked position can be reduced, so that the cover 24 is in a precisely defined position during the punching operation.

[0073] However, the lateral component of the pressure or locking force applied via the third locking arm 42 . 3 does not produce any twisting of the cover 24 about an axis extending in its main extension direction, so that the planarity of the cover 24 is not impaired.

[0074] from Figure 5 and 6aAs can be easily seen in the figure, the third locking arm 42.3 has a disc shape, thereby achieving an asymmetrical distribution of mass, so that the third locking arm 42.3 moves to its locking position under the effect of gravity when the cover 24 is closed and without additional force and remains in this locking position. This facilitates the closing and locking of the cover 24 at the base 22.

[0075] In order to ensure that the locking arms 42.1-42.3 are completely in their locking position and remain in this locking position, even when pressure begins and cannot accidentally slide out, the respective blocking levers 60.1, 60.3 are arranged on the side of the base body 22 and can be designed as toggle levers and have an actuating element provided with a signal color, thereby allowing the user to reliably recognize whether the locking arms 42.1-42.3 are actually in their locking position and blocked in this position by the respective blocking levers 60.1, 60.3. The blocking levers 60.3 arranged on the opposite side of the base body 22 interact with the locking arms 42.3 while the blocking levers 60.1 interact with the locking arms 42.1 and indirectly via the coupling rods 64 also with the locking arms 42.2.

[0076] When the blocking lever 60.1 is in its release position (see Figure 3b ), the locking arms 42.1-42.3 can be rotated from their locked position to their unlocked position by means of a release lever 62, which is also designed as a toggle lever. Such a release lever can also be omitted for the third locking arm 42.3, since the unlocking is automatic here when the cover 24 is opened. For this purpose, the locking part 46.3 can be moved from its locked position to the unlocked position, for example by pulling out the chamfer 48 and with the aid of gravity, and thus disengage from the third locking bolt 50.3.

[0077] In order to ensure additional monitoring of the locked position of the locking arms 42.1-42.3, a locking sensor can be provided on one or more of the locking arms 42.1-42.3, which can be designed, for example, as an optical, magnetic, electrostatic or mechanical sensor and detects whether the respective locking arm 42.1-42.3 is engaged with the associated locking bolt 50.1-50.3. In the present example, such a locking sensor 66 is provided on the second locking arm 42.2 ( Figure 3a , 3b and 4).

[0078] As shown in FIG. 7 , the opening and closing of the cover 24 may be assisted by a negative pressure of, for example, 800 hPa or less and a sealing ring 76. Figure 7bAs shown, the cover 24 can first be held at a certain distance in the direction of the base body 22 by the sealing ring 76, which initially does not allow the locking arms 42.1-42.3 to be in the locked position. By evacuating the vacuum chamber 20, the atmospheric pressure indicated by the arrow on the cover 24 can press the sealing ring 76 in the direction of the process chamber 20, so that the locking arms 42.1-42.3 automatically move to the locked position under the effect of gravity, see Figure 7a One or more locking sensors 66 monitor whether the correct locking position is in place. The position of the locking arms 42.1-42.3 can be locked by the blocking rods 60.1-60.3, so that it is not possible to open the cover in a pressure-free state, because the sealing ring 76 presses the cover against the locking device 40. In order to allow the locked position, a gap 51 is provided in at least one locking portion 46.1-46.3 of at least one locking arm 42.1-42.3 for receiving a locking bolt 50.1-50-3.

[0079] According to another aspect of the present invention, Figure 8 and 9a 9b shows a stamping tool 70 for a diffusion welding or sintering device, in particular the diffusion welding or sintering device 10 of the above example. The stamping tool 70 can be designed as an upper tool and a lower tool, and includes a base plate 72 and a cylindrical wall portion 74 extending away from the base plate 72. The square shape of the base plate 72 and the cylindrical shape of the wall portion 74 in the example are only examples, and they can each have a divergent shape.

[0080] The hollow space defined by the substrate 72 and the wall portion 74 is closed by the membrane portion 80. The membrane portion 80 can be made flat or disc-shaped, for example, by deep drawing from a metal film or metal foil, wherein a steel alloy (e.g., a chromium-nickel-steel alloy) is provided as a preferred material for the membrane portion 80. The membrane portion 80 adjoins the hollow space on its side facing away from the substrate 72, wherein, for example, a pressure pad 90 can be received as a pressure chamber. Alternatively, a supporting structure, such as a mechanical soft metal, a fluid chamber or a silicone pad can also be received in the hollow space. The membrane portion 80 can have a full-circumferential edge portion extending to the wall portion 74 on the side, and it is clamped, for example, between the substrate 72 and a clamping ring 84. The clamping ring 84 can be bolted to the substrate 72, in particular fixed to the opening portion of the wall portion 74, and can fix the preferably disc-shaped edge portion of the membrane portion 80. Alternatively, the membrane portion 80 can be fixed directly to the wall portion 74. A sealing ring 76 , which may interact with the inner circumferential surface of the wall portion 74 , may be placed in a circumferential groove arranged in the clamping ring 84 .

[0081] The hollow space formed between the base plate 72 and the membrane portion 80 defines a receiving space which is closed on all sides for a pressure pad or pressure chamber 90, see Figure 9a , 9bThe receiving space may form, for example, a pressure chamber 90 filled with a fluid, such as silicone or oil, see Figure 9a , or a pressure pad 90 may be inserted, see Figure 9b , wherein the pressure pad 90 may be, for example, an oil-filled pad or a silicone pad, etc. The pressure pad 90 may, for example, have a threaded insert, thereby allowing the pressure pad 90 to be bolted to the base plate 72 .

[0082] The thickness of the membrane part 80 is selected so that the membrane part 80 in the area of ​​the stamping surface 92 interacting with the electronic component parts to be connected has sufficient elasticity to deform to the appropriate size and to provide pressure compensation between adjacent parts via the pressure pad 90. The membrane part 80 can have a uniform thickness, but can also have areas of different thickness. Therefore, the membrane part 80 can be thickened or thinned in some areas and thus have a structure corresponding to different pressure areas depending on the arrangement structure of the parts 130 to be stamped. The total height of the sintering tool 70 can be 40 mm, wherein, Figure 8 The dimensional ratios shown in Figure 9 are not necessarily to scale. In particular, the thickness of the membrane portion 80 can also be smaller than shown.

[0083] The sealing ring 76 may have a multi-layer structure, wherein: Figure 8 , Figure 9a , Figure 9b The illustration of the sealing ring 76 in FIG. 8 is simplified. It is generally conceivable that the clamping ring 84 is designed as multiple parts instead of having an insertable sealing ring groove.

[0084] refer to Figure 10 to Figure 1 2, describes a further diffusion welding or sintering device 110, 210, 310, wherein the features described in this connection can be combined with the previously described Figure 1 The features of the diffusion welding or sintering apparatus 10 to FIG. 7 are implemented in conjunction with and used in other generally similar sintering apparatuses.

[0085] Fig.10The diffusion welding or sintering device 110 shown schematically and not to scale in the figure comprises a stamping yoke 112 of an upper tool and a stamping plunger 114 of a lower tool arranged below the stamping yoke, the stamping yoke 112 and the stamping plunger 114 being movable relative to each other by a drive in order to apply a compressive force to an electronic component part 130 to be connected and arranged between the stamping yoke 112 and the stamping plunger 114. The drive can act on the stamping yoke 112 and the stamping plunger 114 and can be designed as a hydraulic press, for example. An upper hard tool 120 is arranged on the lower side of the stamping yoke 112, and a graphite sheet 140 is arranged between the stamping yoke 112 and the upper hard tool 120, so that a pressure or gradient compensation degree between the stamping yoke 112 and the upper hard tool 120 can be achieved. The graphite foil 140 can be adapted in its type and thickness so that, when pressure is applied between the upper tool and the lower tool, it can, like an elastic foil, achieve a planar alignment between the upper hard tool 120 and the lower tool 122. As a result, a precise parallel alignment of the upper tool and the lower tool can be achieved by the graphite foil 140.

[0086] On the upper side of the punching plunger 114 is a heating plate 124, which in addition to one or more heating devices can also have one or more cooling devices. The lower tool 122 has a receptacle for an elastic pressure pad 90 on its upper surface, and the lower tool 122 is arranged on the upper side of the heating plate 124. Alternatively or additionally, a pressure pad designed as a soft tool can be arranged in the upper tool 120, so that the upper hard tool 120 and / or the lower tool 122 can be replaced by a punching tool 70, such as Figure 8 , Figure 9a or Figure 9b shown.

[0087] The components 130 to be connected are arranged on the pressure pad 90. In order to prevent damage and / or contamination of the pressure pad 90 and the upper hard tool 120 and the lower tool 122, separation foils 132.1, 132.2 are arranged above and below the components 130, respectively, and can be formed, for example, by correspondingly cutting a metal foil or a PTFE film (polytetrafluoroethylene film) and have, for example, a thickness of about 250 μm. In order to prevent any accidental sliding of the separation foils 132.1, 132.2, a pressure ring 126 pre-tensioned by a compression spring 128 can be provided on the upper hard tool 120, which ring contacts the full circumferential edge portion of the lower tool 122 when the stamping yoke 112 and the stamping plunger 114 are brought together, thereby clamping the separation foils 132.1, 132.2. Alternatively, in particular when using according to Figure 8 , Figure 9a , Figure 9b When the metal foil 80 is designed, the separation foil 132 can be distributed.

[0088] Further exemplary diffusion welding or sintering apparatus 210 is Figures 11a to 11d As shown in the figure, their design corresponds in principle to Fig.10 The design of the diffusion welding or sintering device 110 in FIG. 1 is similar to that in FIG. 1 , but is simplified and even not shown to scale. Therefore, in the following, only the main differences are explained. Fig.11a In the illustration of , the stamping yoke and the stamping plunger are not shown. An upper hard tool 120 of a two-piece design comprising a first upper hard tool 120.1 and a second upper hard tool 120.2 is arranged on the stamping yoke. No elastic compensation foil, for example a graphite foil, is provided. The lower tool 122 has an embedded pressure pad 90 similar to the diffusion welding or sintering device 110, on which the component 130 to be connected is stored. Above the component 130 is a separating foil 132.1 (not shown to scale), and below the component 130 is a further separating foil 132.2 corresponding to the design of the diffusion welding or sintering device 110. The thickness of the separating foils 132.1, 132.2 can be, for example, 250 μm. Pressure rings for fixing the separating foils 132.1, 132.2 are not shown, but can be provided in a similar manner to the diffusion welding or sintering device 110. Alternatively, the pressure pad 90 can be delimited by a metal foil 80, such as Figure 8 , 9a As shown in FIG. 9 b , the metal foil 80 corresponds to the component 130 .

[0089] Fig.11b A diffusion welding or sintering apparatus 310 is shown, which in turn represents Fig.10 or Fig.11a A variation of the diffusion welding or sintering apparatus 110, 210 in FIG. The punch yoke and punch plunger are not shown. The design of the upper hard tool is two-part, similar to Fig.11a The diffusion welding or sintering device 210 in FIG. 1 includes a first upper hard tool 120.1 and a second upper hard tool 120.2 arranged therebelow. Fig.11a Unlike the diffusion welding or sintering device 210 in the embodiment of the present invention, the elastic foil 140 is arranged between the first upper hard tool 120.1 and the second upper hard tool 120.2 to achieve parallelism between the upper tool and the lower tool. Another difference is that only a single separating foil 132 is provided which is arranged between the component 130 and the lower tool 122 and whose thickness can be, for example, 500 μm.

[0090] Fig.11c The embodiment of the diffusion welding or sintering device 410 in the embodiment corresponds substantially to Fig.11aThe design in the embodiment 410 is different in that an elastic foil 140 is arranged between the first upper hard tool 120.1 and the second upper hard tool 120.2 to achieve parallelism between the upper tool and the lower tool. To this extent, the embodiment 410 corresponds to a combination of the embodiments 210 and 310.

[0091] Fig.11d Another embodiment of a diffusion welding or sintering apparatus 510 is shown. This corresponds essentially to Fig.11c , with the difference that the pressure pad 90 is not arranged in the lower tool 122, but in the upper tool on the underside of the second tool 120.2.

[0092] Figures 12a to 12c An embodiment of a diffusion welding or sintering device 610 is shown in combination with a stamping tool 70, such as Figure 8 and 9a , 9b. The folded open processing chamber 20 comprises a substrate 22 and a cover 24. Through the previously described rotation axis 44, wherein shafts 44.1 and 44.3 are shown, the cover 24 can be fixed on the substrate 22 and rotated, i.e. folded open, so that the interior of the processing chamber 20 and the lower and upper tools are accessible. Inside the substrate 22, a punch drive 34 is arranged, which can apply a feed motion on a component 130 held in a workpiece carrier (not shown) relative to a punch tool 70 arranged in an upper tool via a punch plunger 114. A plurality of parts 142 (e.g., power semiconductor components, such as IGBTs or the like) are arranged on the component 130. The parts 142 of the component 130 can have different heights and should be connected on the component 130 by diffusion welding, bonding or sintering processes, for example, by using cooling structures and connecting wires. Here, the component 130 can be covered with a process cover (not shown), such as a foil or the like, to prevent scaling and protection. Fluid ducts 156 for temperature regulation, ie for conducting a heating or cooling fluid, such as oil or air, are integrated into the cover 24 .

[0093] A heating plate 124, which may have the same fluid conduits for heating or cooling, is arranged in the stamping tool 70. The heating plate 124 is the lower limit of the pressure chamber 90, in which a pressure pad may be placed. The pressure chamber 90 has a chamber region 144 which is controllably filled with a fluid. The fluid may be a gas or a liquid. In this embodiment, a chamber region 144 is provided which is filled with the ambient gas of the process chamber 20, for example with a clean gas such as nitrogen or air. For this purpose, two filling valves 146 are provided in the cover 24 to achieve a fluid-tight closing or opening of the chamber region 144 of the pressure chamber 90 relative to the process chamber 20 via a valve actuator 148.

[0094] Furthermore, the pressure chamber 90 is also limited in the direction of the lower tool with a metal membrane as membrane part 80. The metal membrane can be, for example, a steel membrane, for example a steel plate formed in a disk shape. Due to the fluid filling of the chamber area 144, the metal membrane can bulge downward in the direction of the process chamber 20.

[0095] The multi-plunger unit 150 is arranged below the membrane portion 80. The multi-plunger unit 150 comprises a guide plate 154 that receives and guides a plurality of punch plungers 152. The pressure plungers 152 are used to selectively introduce pressure into a predefinable region of the component 130 and can be adapted in shape and size to the varying geometries of the part 142 into which the pressure is to be introduced. During the application of pressure (i.e., activation of the punch drive 34), the punch plungers 152 move in the guide frame 154 in the direction of the component 130 to selectively apply pressure.

[0096] exist Figures 12a to 12c In the sequence shown, due to the pressure difference between the process chamber 20 and the fluid-fillable chamber area 144 of the pressure chamber 90, the pressure application should be carried out by the protruding membrane part 80 regardless of the pressure generated by the punch drive 34. The magnitude of the compressive force is determined by the pressure difference between the chamber area 144 and the process chamber 20, which causes the membrane part 80 to be displaced in the direction of the lower tool, thereby exerting pressure on the component 130.

[0097] exist Fig.12a In the first process step shown, the filling valve 146 is in the upper position, so that the chamber area 144 is fluidly connected to the process chamber 20. In the second process step, a vacuum is generated in the process chamber 20, which also causes a vacuum in the chamber area 144. The first and second process steps are Fig.12a Shown in.

[0098] In a subsequent third process step, the process chamber 20 is filled with a cleaning gas, such as nitrogen, which penetrates into the chamber region 144 of the fluid chamber 90. In a fourth process step, the filling valve 146 is then fluidically tightly separated from the process chamber 20 by the valve actuator 148. Thereafter, in a fifth process step, the punch drive 34 can be activated until the workpiece carrier (not shown) with the component 130 and the positioned process cover (also not shown) is in adjacent contact with the multi-plunger unit 154. Steps three to five are performed in Figure 12b Shown in.

[0099] exist Fig.12cIn the subsequent sixth process step shown, the process chamber 20 is evacuated. Here, due to the pressure difference between the chamber region 144 of the pressure chamber 90 and the process chamber 20, the membrane portion 80 bulges downward and moves the stamping plunger 152 in the guide frame 154 in the direction of the component 130, so that the compressive force is selectively applied to the individual parts 142. This allows to compensate for the height differences of the parts 142, wherein, depending on the pressure difference, the pressure can be finely adjusted.

[0100] The pressure exerted by the pressure difference between the process chamber 20 and the pressure chamber 90 can be applied alternatively or additionally to the pressure exerted by the punch drive 34. The pressure thus produced is generally lower and more finely adjustable than the mechanical compression force exerted by the punch drive 34. A joining method, a diffusion welding method or a low-pressure sintering method can be effectively supported.

[0101] Obviously, the different features of the diffusion welding or sintering devices 110, 210, 310, 410, 510, 610 can be combined with each other to obtain further variations. For example, the first upper hard tool 120.1 can be replaced by a stamped yoke 112. In addition, the upper separation foil 132.1 can also be in the diffusion welding or sintering device 110 ( Fig.10 ) is distributed, similar to the diffusion welding or sintering device 310. According to a further variant, the combination of the lower tool 122 and the pressure pad 90 can also be replaced by a stamping tool 70 ( Figure 8 In a further variant, the punching tool 70 may alternatively or additionally replace the upper hard tool 120 or 120.2 or a combination of the upper hard tools 120.1, 120.2. In a further variant, the punching yoke 112 may be formed by the rotatable cover 24 ( Figure 1 7). Other embodiments are conceivable, which for example integrate the pressure pads in the upper tool and the lower tool. The elastic foil 140 can also be arranged in the lower tool, in the upper tool or in the lower and upper tools.

[0102] Reference numerals list

[0103] 10, 110, 210,

[0104] 310, 410, 510, 610 diffusion welding or sintering equipment

[0105] 12 Housing

[0106] 14 Lid

[0107] 20 Processing Room

[0108] 22 Matrix

[0109] 23 Enter the opening

[0110] 24 Cover

[0111] 26 Drive arm

[0112] 28 Sealing ring

[0113] 30 Upper tool

[0114] 32 Lower tool

[0115] 34 Punch Driver

[0116] 36 Connectors

[0117] 38 Workpiece carrier

[0118] 40 Lock device

[0119] 42.1-42.3 Locking arm

[0120] 44.1-44.3 Axis of rotation

[0121] 46.1-46.3 Locking section

[0122] 48 Chamfering

[0123] 50.1-50.3 Locking bolt

[0124] 51 Bolt Clearance

[0125] 60.1, 60.3 blocking rod

[0126] 62 Release lever

[0127] 64 Connecting rod

[0128] 66 Lock sensor

[0129] 70 Punching tools

[0130] 72 substrate

[0131] 74 Wall section

[0132] 76 Sealing ring

[0133] 80 membrane part

[0134] 84 Clamping ring

[0135] 90 Pressure Chamber / Pressure Pad

[0136] 92 Stamping surface

[0137] 112 Stamped yoke

[0138] 114 Stamping plunger

[0139] 120, 120.1, 120.2 Upper hard tool

[0140] 122 Lower tool

[0141] 124 Heating Plate

[0142] 126 Pressure Ring

[0143] 128 Compression spring

[0144] 130 Components

[0145] 132, 132.1, 132.2 Separation foil

[0146] 140 Elastic foil / graphite foil

[0147] 142 Parts on Components

[0148] 144 fillable chamber area of ​​the fluid chamber

[0149] 146 Filling valve

[0150] 148 Valve Actuator

[0151] 150 Multi-Plunger Unit

[0152] 152 Stamping plunger

[0153] 154 Bootstrap Framework

[0154] 156 Fluid pipes for temperature regulation

Claims

1. A sintering device or diffusion welding device (10, 110, 210, 310, 410, 510) for connecting parts of at least one electronic component by pressure sintering or diffusion welding, comprising an evacuable process chamber (20), an upper tool (30) and a lower tool (32) being arranged in the evacuable process chamber (20), the component being held between the upper tool (30) and the lower tool (32), and the upper tool (30) and the lower tool (32) being displaceable relative to each other in their distance to apply pressure, wherein The process chamber (20) comprises a base body (22) having an access opening (23) and a cover (24) on its upper side, the cover (24) being adjustable between a closed position and an open position, in which the access opening (23) is closed by the cover (24), wherein the upper tool (30) is supported on the cover (24) in the closed position of the cover (24) at least during the application of the pressure, and characterized in that the process chamber (20) comprises a locking device (40) which is movable between a locked position and an unlocked position, wherein the locking device (40) in its locked position is configured to fix the cover (24) in the closed position on the base body (22), wherein the locking device (40) has a plurality of rotatable locking members. Arms (42.1-42.3), wherein the locking arms (42.1-42.3) are positively connected to the cover (24) and the base (22) in the locking position, wherein each of the locking arms (42.1-42.3) is rotatably fixed to the cover (24) around a corresponding rotation axis (44.1-44.3) with its first end and is mounted on the cover (24) so ​​as to oscillate due to gravity, and has a corresponding locking portion (46.1-46.3) at its second end, and an insertion chamfer is formed on the locking portion (46.1-46.3), so that in the locking position the locking portion (46.1-46.3) is locked with a corresponding locking bolt (50.1-50.3) assigned to the locking arm (42.1-42.3) and fixed to the base (22).

2. The sintering device or diffusion welding device (10, 110, 210, 310, 410, 510) according to claim 1, characterized in that: The cover (24) is rotatably coupled to the base body (22) about a tilting axis.

3. The sintering device or diffusion welding device (10, 110, 210, 310, 410, 510) according to claim 1, characterized in that: The access opening (23), the cover (24) in its locked position and the rotation axes (44.1-44.3) of the locking arms (42.1-42.3) extend in respective horizontal planes.

4. The sintering device or diffusion welding device (10, 110, 210, 310, 410, 510) according to claim 1 or 3, characterized in that: The locking arms (42.1-42.3) are arranged on two opposite sides of the cover (24).

5. The sintering device or diffusion welding device (10, 110, 210, 310, 410, 510) according to claim 4, characterized in that: The locking device (40) has three locking arms (42.1-42.3), wherein the first and second locking arms (42.1-42.3) are arranged on one of the sides and the third locking arm (42.1-42.3) is arranged on the other side.

6. The sintering device or diffusion welding device (10, 110, 210, 310, 410, 510) according to claim 5, characterized in that: The rotation axis (44.1-44.3) of the locking arm (42.1-42.3) and the locking bolt (50.1-50.3) associated with the locking arm (42.1-42.3) are arranged so that the effective direction of the locking force, at least for the first locking arm (42.1) and the second locking arm (42.2), extends parallel to the effective direction of the pressure, which is transmitted due to the pressure applied between the cover (24) and the base (22) through the corresponding locking arm (42.1-42.3).

7. The sintering device or diffusion welding device (10, 110, 210, 310, 410, 510) according to claim 5 or 6, characterized in that: The first locking arm and the second locking arm (42.1-42.3) are connected via a connecting rod (64), so that the first locking arm and the second locking arm (42.1, 42.2) can move synchronously between the locking position and the unlocking position.

8. The sintering device or diffusion welding device (10, 110, 210, 310, 410, 510) according to claim 5, characterized in that: The mass distribution of the third locking arm (42.3) and the position of the locking bolt (50.3) associated with the third locking arm (42.1-42.3) and the rotation axis of the third locking arm (42.3) are asymmetrical relative to an imaginary symmetry plane, which is arranged between the rotation axis and the symmetry axis of the locking bolt (50.3). When the locking arm (42.3) is locked, the symmetry axis of the locking bolt (50.3) extends parallel to the rotation axis, so that the third locking arm (42.3) is maintained in its locked position only by the action of gravity when the cover (24) is closed and in the absence of additional force.

9. The sintering device or diffusion welding device (10, 110, 210, 310, 410, 510) according to claim 1, characterized in that: At least one blocking rod (60.1, 60.3) interacting with a corresponding associated locking arm (42.1-42.3) is provided, and the at least one blocking rod (60.1, 60.3) is capable of moving between a blocking position and a release position, in which the blocking position the blocking rod (60.1, 60.3) blocks the locking arm (42.1-42.3) in its locked position to prevent movement, and in the release position the blocking rod (60.1, 60.3) releases the locking arm (42.1-42.3) to move, and / or wherein at least one release rod (62) interacting with a corresponding associated locking arm (42.1-42.3) is provided, and the at least one release rod (62) is configured to move the locking arm (42.1-42.3) from its locked position to its unlocked position.

10. The sintering device or diffusion welding device (10, 110, 210, 310, 410, 510) according to claim 1, comprising a stamping yoke (112), on which the upper tool (30, 120, 120.1, 120.2) is arranged, wherein: An elastic foil (140) is arranged between the stamping yoke (112) and the upper tool (30, 120, 120.1, 120.2) and / or in a lower tool (32, 122).

11. The sintering device or diffusion welding device (10, 110, 210, 310, 410, 510) according to claim 10, characterized in that: The lower tool (32, 122) has a fluid-filled pressure pad (90) on the side facing the assembly.

12. The sintering device or diffusion welding device (10, 110, 210, 310, 410, 510) according to claim 1 further includes a stamping tool (70) for the upper tool (30, 120, 120.1, 120.2) or the lower tool (32, 122), the stamping tool (70) including a rigid substrate (72), a membrane part (80), and containing a pressure chamber, the membrane part (80) being connected to the substrate (72) in the direction of the stamping surface (92) and being formed by a flexible membrane.

13. The sintering device or diffusion welding device (10, 110, 210, 310, 410, 510) according to claim 12, characterized in that: The membrane portion (80) has a full-circumferential edge portion clamped between the base plate (72) and a clamping ring (84) connected to the base plate (72).

14. The sintering device or diffusion welding device (10, 110, 210, 310, 410, 510) according to claim 12, characterized in that: At least one subregion of the pressure chamber is controllably fillable with a fluid.

15. The sintering device or diffusion welding device (10, 110, 210, 310, 410, 510) according to claim 12, characterized in that: A multi-plunger unit (150) having a plurality of stamping plungers (152) is arranged below the membrane section (80) and is guided in a guide frame (154).

Images