Electron beam size detection method, device, equipment and storage medium

Abstract

The present application discloses a method, device, equipment and storage medium for detecting the size of an electron beam, wherein the method comprises: dividing the cross section where the electron beam exists into a measurement area with I rows and J columns; detecting the electron beam by a non-intercepting detector and obtaining multiple sets of current detection data; solving each unit C of the measurement area by establishing an equation matrix for the multiple sets of current detection data ij The beam intensity I ij According to each of the units C ij The beam intensity I ij A distribution curve is fitted to obtain the cross-sectional distribution size of the beam current intensity of the electron beam. The electron beam current size detection method of the present invention detects the beam current intensity of the electron beam by using a non-intercepting detector, which will not affect the normal operation of the electron beam. Moreover, the electron beam current size detection method of the present invention only needs to detect the electron beam once to obtain the lateral size of the electron beam current.

Description

Technical Field

[0001] The present application relates to the field of accelerator physics beam current diagnosis, and in particular to a method, device, equipment and storage medium for detecting the size of an electron beam current. Background Art

[0002] The transverse beam size is one of the basic beam parameters of particle accelerators and transport lines. Accelerators at home and abroad attach great importance to the measurement of the transverse cross-sectional size of the beam. The commonly used detection methods currently include interception detection method and non-interception detection method. The interception detection method is to set an interception detector on the beam channel, and measure the cross-sectional distribution of the beam intensity through detector scanning or detector array and scintillation screen, but the interception detection method will affect the normal operation of the beam. The non-interception detection method is an optical measurement method based on synchronized light, which is the most widely used. The corresponding methods include synchronized light imaging method, synchronized light projection method and synchronized light interferometry method. However, the optical method based on synchronized light is only suitable for fixed-point measurement of large scientific facilities, not for distributed multi-point detection, and this synchronized light optical method can only be used for large scientific facilities, not for conventional accelerators, and has low applicability.

[0003] Application Contents

[0004] The main purpose of the present application is to provide a method, device, equipment and storage medium for detecting the size of an electron beam, aiming to solve the technical problems that the existing detection method will affect the normal operation of the beam and has low applicability.

[0005] In a first aspect, in order to achieve the above-mentioned purpose, the present application provides a method for detecting the size of an electron beam, the method comprising the following steps:

[0006] The cross section where the electron beam exists is divided into a measurement area with I rows and J columns; wherein the measurement area has a total of I*J units, and any one of the units is C ij , the corresponding beam intensity is I ij ;

[0007] The electron beam is detected by a non-intercepting detector, and a plurality of groups of current detection data are obtained; wherein, before obtaining different groups of current detection data, the corresponding non-intercepting detector is set to have different detection parameters, and the number of groups of current detection data is greater than or equal to I*J;

[0008] By establishing an equation matrix for multiple sets of current detection data, each unit C in the measurement area is solved. ij The beam intensity I ij ;

[0009] According to each of the units C ij The beam intensity I ijA distribution curve is fitted to obtain the cross-sectional distribution size of the beam intensity of the electron beam.

[0010] Optionally, the unit C located in the outer ring ij The beam intensity I ij When it falls below the set threshold,

[0011] By establishing an equation matrix for multiple sets of current detection data, each unit C is solved ij The beam intensity I ij Afterwards, the method further comprises:

[0012] A refined measurement region is established with the beam center of the electron beam as the center; wherein the refined measurement region also has I*J units, any one of which is C ij ', the corresponding beam intensity is I ij ', the refined measurement area includes as few as possible the beam current intensity I located in the outer ring ij The cell C is below the set threshold ij ;

[0013] By establishing an equation matrix for multiple sets of current detection data, the unit C of each refined measurement area is solved. ij The beam intensity I ij '.

[0014] Optionally, the measurement area and the refined measurement area are both rectangular, and the steps of establishing the refined measurement area with the beam center of the electron beam as the center and solving the unit C of each refined measurement area by establishing an equation matrix for multiple groups of current detection data are repeatedly performed. ij The beam intensity I ij ' step, until the final refined measurement area is solved to be the circumscribed rectangle with the smallest area corresponding to the electron beam.

[0015] Optionally, the step of detecting the electron beam by a non-intercepting detector and acquiring multiple sets of current detection data includes:

[0016] Distributing s non-intercepting detectors uniformly and spaced apart along the circumference of the electron beam, wherein the s non-intercepting detectors form a detection array;

[0017] k detection arrays are arranged along the axial direction of the electron beam; wherein, in any two detection arrays, the distances from the non-intercepting detector of one detection array to the electron beam are not equal to the distances from the non-intercepting detector of the other detection array, and s*k is greater than or equal to I*J;

[0018] The data measured by each of the non-intercepting detectors in each of the detection arrays is acquired to obtain a plurality of groups of the current detection data.

[0019] Optionally, the non-intercepting detector may be a coil detector and / or an electrode detector.

[0020] Optionally, any of the units C ij The corresponding beam intensity is I ij , the polar coordinates of any of the units are (r ij ,θ ij ), the current generated by each of the units on the non-intercepting detector is I skij ,

[0021] When the non-intercepting detector adopts an electrode detector,

[0022] All the units are in the electrode detector M sk The current I generated on sk for:

[0023]

[0024] Among them, the angle of the sth electrode detector is α s , the radial opening angle of each electrode detector is The distance from each electrode detector to the center of the cross section where the electron beam exists is d. sk , r ij is the radius of the detector in polar coordinates, n is a positive integer; and\or,

[0025] When the non-intercepting detector adopts a coil detector, according to the basic principle of the Biot-Savart law, the magnetic induction intensity B generated by the electron beam at a distance r sk It can be calculated by the following formula:

[0026]

[0027] Where μ0 is the magnetic permeability in vacuum, which is 4π×10^(-7) Tesla·m / ampere, I ij is the current intensity of each current element, r ijsk is the distance of each current element from the center of the detector.

[0028] In a changing magnetic field, the induced electromotive force E of the coil detector is sk for:

[0029]

[0030] The current of each coil detector is thus:

[0031]

[0032] Among them, R0 is the sampling resistor, R is the coil diameter, K b is the correction coefficient of the electron beam current on the coil detector formed by magnetic induction, which is related to the structure and is determined by calibration, μ0 is the magnetic permeability in vacuum, r ijsk is the distance of each current element from the center of the detector, and t is the time.

[0033] In a second aspect, the present application further provides an electron beam flow size detection device, the electron beam flow size detection device comprising:

[0034] A division module, used for dividing the cross section where the electron beam exists into measurement areas of I rows and J columns;

[0035] A detection module, used for performing non-interception detection on the electron beam and obtaining multiple sets of current detection data;

[0036] A calculation module is used to establish an equation matrix for multiple sets of current detection data and solve the unit C of each measurement area. ij The beam intensity I ij ;

[0037] The fitting distribution module is used to fit each of the units C ij The beam intensity I ij A distribution curve is fitted to obtain the cross-sectional distribution size of the beam intensity of the electron beam.

[0038] Optionally, the detection device further comprises an electromagnetic shielding body having a cavity, wherein the cavity has an opening facing the electron beam, and the detection module is installed in the cavity.

[0039] In a third aspect, the present application also provides an electron beam size detection device, comprising: a processor, a memory, and an electron beam size detection program stored in the memory. When the electron beam size detection program is executed by the processor, the steps of the electron beam size detection method described in the first aspect are implemented.

[0040] In a fourth aspect, the present application further provides a computer-readable storage medium storing an electron beam size detection program. When the electron beam size detection program is executed by a processor, the electron beam size detection method described in the first aspect is implemented.

[0041] In this embodiment, by dividing the cross section of the electron beam into I*J units to obtain I*J unknowns to be solved, and then obtaining multiple sets of current detection data through a non-intercepting detector, it can be understood that the sum of each unit multiplied by the corresponding coefficient is equal to the current detection data of a corresponding set of non-intercepting detectors. Therefore, when the number of sets of current detection data is greater than or equal to the number of units, the beam intensity on each unit can be solved. After solving the beam intensity on each unit, the two-dimensional distribution of the beam intensity is fitted to obtain the lateral size of the electron beam. Specifically, the coefficient corresponding to the unit is usually related to the distance from the non-intercepting detector and is a fixed constant.

[0042] The electron beam size detection method of the present invention detects the beam intensity of the electron beam by using a non-intercepting detector, which will not affect the normal operation of the electron beam and ensures the normal operation of the electron beam application equipment. In addition, the electron beam size detection method of the present invention can obtain the lateral size of the electron beam by mathematical calculation and only needs to detect the electron beam once, and has no restrictions on the stability and repeatability of the electron beam. It has high applicability and is suitable for all accelerators. For a single pulse bunch, or a beam whose beam position and lateral intensity distribution are unstable over time, the electron beam size detection method of the present invention only needs to detect the electron beam data once, and the advantage of real-time detection is more obvious. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 This is a schematic diagram of the structure of the electron beam size detection information management device of the present application;

[0044] Figure 2 A schematic diagram of the structure of an electron beam size detection device that is a hardware operating environment of the electron beam size detection method of the present application;

[0045] Figure 3 A schematic diagram of a flow chart of a first embodiment of a method for detecting the size of an electron beam provided in the present application;

[0046] Figure 4 It is a schematic diagram of the beam intensity of each unit in the measurement area;

[0047] Figure 5 A schematic flow chart of a second embodiment of a method for detecting the size of an electron beam provided in the present application;

[0048] Figure 6 A schematic flow chart of a third embodiment of a method for detecting the size of an electron beam provided in the present application;

[0049] Figure 7 A schematic diagram of the beam intensity of each unit in the detailed measurement area;

[0050] Figure 8 A schematic flow chart of a fourth embodiment of a method for detecting the size of an electron beam provided by the present application;

[0051] Fig. 9 A schematic diagram of the structure of an electron beam size detection device provided in the present application;

[0052] Fig.10 This is a schematic assembly diagram of an electromagnetic shielding body and a detection module in an electron beam size detection device provided in the present application.

[0053] The realization of the purpose, functional features and advantages of this application will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0054] It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0055] Embodiments of the present application In the following, the size detection device of the electron beam flow used in the technical implementation of the present application will be described:

[0056] like Figure 1 As shown, the electron beam size detection device may include: a processor 1001, such as a central processing unit (CPU), a communication bus 1002, a user interface 1003, a network interface 1004, and a memory 1005. Among them, the communication bus 1002 is used to realize the connection and communication between these components. The user interface 1003 may include a display screen (Display), an input unit such as a keyboard (Keyboard), and the optional user interface 1003 may also include a standard wired interface and a wireless interface. The network interface 1004 may optionally include a standard wired interface and a wireless interface (such as a wireless fidelity (WIreless-FIdelity, WI-FI) interface). The memory 1005 may be a high-speed random access memory (Random Access Memory, RAM) memory, or a stable non-volatile memory (Non-Volatile Memory, NVM), such as a disk memory. The memory 1005 may also be a storage device independent of the aforementioned processor 1001.

[0057] Those skilled in the art will understand that Figure 1 The structure shown in the figure does not constitute a limitation on the electron beam size detection device, and may include more or less components than those shown in the figure, or combine certain components, or arrange the components differently.

[0058] like Figure 1As shown, the memory 1005 as a storage medium may include an operating system, a data storage module, a network communication module, a user interface module, and an electron beam size detection program.

[0059] exist Figure 1 In the electron beam size detection device shown, the network interface 1004 is mainly used for data communication with the network server; the user interface 1003 is mainly used for data interaction with the user; the processor 1001 and the memory 1005 in the electron beam size detection device of the present application can be set in the electron beam size detection device, and the electron beam size detection device calls the electron beam size detection program stored in the memory 1005 through the processor 1001, and executes the electron beam size detection method provided in the embodiment of the present application.

[0060] Based on the hardware structure of the electron beam size detection device described above but not limited to the hardware structure described above, the present application provides a first embodiment of an electron beam size detection method. Figure 2 , Figure 2 A schematic flow chart of a first embodiment of a method for detecting the size of an electron beam is shown.

[0061] It should be noted that although a logical order is shown in the flowchart, in some cases, the steps shown or described may be performed in an order different from that shown here.

[0062] Reference Figure 2 , Figure 2 This is a schematic diagram of the structure of an electron beam size detection device in the hardware operating environment involved in the embodiment of the present application.

[0063] like Figure 2As shown, the electron beam size detection device may include: a processor 1001, such as a central processing unit (CPU), a communication bus 1002, a user interface 1003, a network interface 1004, and a memory 1005. Among them, the communication bus 1002 is used to realize the connection and communication between these components. The user interface 1003 may include a display screen (Display), an input unit such as a keyboard (Keyboard), and the optional user interface 1003 may also include a standard wired interface and a wireless interface. The network interface 1004 may optionally include a standard wired interface and a wireless interface (such as a wireless fidelity (WIreless-FIdelity, WI-FI) interface). The memory 1005 may be a high-speed random access memory (Random Access Memory, RAM) memory, or a stable non-volatile memory (Non-Volatile Memory, NVM), such as a disk memory. The memory 1005 may also be a storage device independent of the aforementioned processor 1001.

[0064] Those skilled in the art will understand that Figure 2 The structure shown in the figure does not constitute a limitation on the electron beam size detection device, and may include more or less components than those shown in the figure, or combine certain components, or arrange the components differently.

[0065] like Figure 2 As shown, the memory 1005 as a storage medium may include an operating system, a data storage module, a network communication module, a user interface module, and an electron beam size detection program.

[0066] exist Figure 2 In the electron beam size detection device shown, the network interface 1004 is mainly used for data communication with the network server; the user interface 1003 is mainly used for data interaction with the user; the processor 1001 and the memory 1005 in the electron beam size detection device of the present application can be set in the electron beam size detection device, and the electron beam size detection device calls the electron beam size detection program stored in the memory 1005 through the processor 1001, and executes the electron beam size detection method provided in the embodiment of the present application.

[0067] Based on the hardware structure of the electron beam cross-sectional dimension detection device described above but not limited to the hardware structure described above, the present application provides a first embodiment of an electron beam dimension detection method. Figure 3 , Figure 3 A schematic flow chart of a method for detecting the size of an electron beam is shown.

[0068] It should be noted that although a logical order is shown in the flowchart, in some cases, the steps shown or described may be performed in an order different from that shown here.

[0069] In this embodiment, the electron beam size detection method of the present invention includes:

[0070] Step S100, as Figure 4 As shown, the cross section where the electron beam exists is divided into a measurement area with I rows and J columns; wherein the measurement area has a total of I*J units, and any unit is C ij , the corresponding beam intensity is I ij ;

[0071] It should be understood that the executor of this embodiment is an electron beam size detection device. By dividing the cross section into I rows and J columns of measurement areas, the beam intensity of each unit is set as an unknown number to be solved, that is, there are a total of I*J unknown numbers.

[0072] Step S200, detecting the electron beam by a non-intercepting detector and acquiring multiple sets of current detection data; wherein the setting parameters of any two sets of current detection data before detection are different, and the number of sets of current detection data is greater than or equal to I*J;

[0073] It can be understood that when X unknowns need to be solved, more than X equations need to be set to solve each unknown. Therefore, by setting the setting parameters of any two sets of current detection data before detection to different parameters, it is ensured that the equations established by each set of current detection data are different, thereby ensuring that the beam intensity of each unit can be solved.

[0074] Step S300, by establishing an equation matrix for multiple sets of current detection data, solve each unit C in the measurement area ij The beam intensity I ij ;

[0075] It should be understood that the method of solving unknowns by setting multiple unknowns and obtaining multiple solutions to establish an equation matrix belongs to the prior art, and the calculation method in the prior art can be adopted as needed according to actual conditions. The present invention does not limit the method for solving the equation matrix.

[0076] Step S400, according to each unit C ij The beam intensity I ij The distribution curve is fitted to obtain the cross-sectional distribution size of the electron beam current intensity.

[0077] It is important to understand that, according to each unit C ij The beam intensity I ijThe two-dimensional distribution of the beam intensity can be obtained by fitting the distribution curve. Specifically, a Gaussian distribution or a double Gaussian distribution is usually used for fitting. The actual fitting method can be freely selected according to the actual situation, and the present invention does not impose any limitation on this.

[0078] In this embodiment, by dividing the cross section of the electron beam into I*J units to obtain I*J unknowns to be solved, and then obtaining multiple sets of current detection data through a non-intercepting detector, it can be understood that the sum of each unit multiplied by the corresponding coefficient is equal to the current detection data of a corresponding set of non-intercepting detectors. Therefore, when the number of sets of current detection data is greater than or equal to the number of units, the beam intensity on each unit can be solved. After solving the beam intensity on each unit, the two-dimensional distribution of the beam intensity is fitted to obtain the lateral size of the electron beam. Specifically, the coefficient corresponding to the unit is usually related to the distance from the non-intercepting detector and is a fixed constant.

[0079] The electron beam size detection method of the present invention detects the beam intensity of the electron beam by using a non-intercepting detector, which will not affect the normal operation of the electron beam and ensures the normal operation of the electron beam application equipment. In addition, the electron beam size detection method of the present invention can obtain the lateral size of the electron beam by mathematical calculation and only needs to detect the electron beam once, and has no restrictions on the stability and repeatability of the electron beam. It has high applicability and is suitable for all accelerators. For a single pulse bunch, or a beam whose beam position and lateral intensity distribution are unstable over time, the electron beam size detection method of the present invention only needs to detect the electron beam data once, and the advantage of real-time detection is more obvious.

[0080] Reference Figure 5 , Figure 5 This is a flow chart of the second embodiment of the electron beam size detection method of the present invention. Based on the first embodiment, the second embodiment of the electron beam size detection method of the present invention is proposed. As a specific implementation method, the unit C located in the outer circle ij The beam intensity I ij When the current is below the set threshold, step S300 establishes an equation matrix for multiple sets of current detection data to solve each unit C ij The beam intensity I ij Afterwards, the method also includes:

[0081] Step S301, establishing a refined measurement region with the beam center of the electron beam as the center; wherein the refined measurement region also has I*J units, any one unit is C ij ', the corresponding beam intensity is I ij ', refine the measurement area to include as few as possible the beam intensity I located in the outer circleij Cell C below the set threshold ij ;

[0082] Step S302: Establish an equation matrix for multiple sets of current detection data to solve the unit C of each refined measurement area. ij The beam intensity I ij '.

[0083] It should be understood that, since the beam current accounts for a small proportion compared to the measurement area, the beam current intensity of most of the solved units is below the set threshold, which is not enough to give the precise size of the beam current. Therefore, by establishing a new refined measurement area with the center of the beam current, eliminating the units with the beam current intensity in the outer circle below the set threshold, updating the coordinates of the units in each refined measurement area, and reusing the multiple sets of current detection data detected previously to solve the new equation matrix. It can be understood that the sum of the beam current intensity of each refined unit multiplied by the corresponding coefficient plus the sum of the beam current intensity of each unit located in the outer circle with a beam current intensity below the set threshold multiplied by the corresponding coefficient is equal to the current detection data of the corresponding set of non-intercepting detectors, wherein the beam current intensity of each refined unit is an unknown number, and the beam current intensity of the unit located in the outer circle with a beam current intensity below the set threshold is a known number. Specifically, the threshold is set according to the actual situation of the user, and can usually be set to a beam current intensity of 0 or 10% of the peak value. In addition, the beam center can be determined by using the prior art method of weighting the electron beam intensity to obtain the minimum first-order moment to determine the beam center. Specifically, different methods can be used to determine the beam center according to actual conditions, and the present invention does not limit this.

[0084] In this embodiment, by establishing a refined measurement area, the units with outer circle beam intensity below the set threshold are eliminated. Since the number of units remains unchanged and the overall area is smaller, more refined units are obtained, which improves the data accuracy of the unit beam intensity. The accuracy of the beam size obtained by the subsequent fitting curve will also be improved accordingly.

[0085] Further, refer to Figure 6 , Figure 6 The flowchart of the third embodiment of the electron beam size detection method of the present application is shown in FIG. Specifically, the measurement area and the refined measurement area are both rectangular, and the establishment of the refined measurement area with the electron beam center as the center and the establishment of the equation matrix for multiple sets of current detection data to solve the unit C of each refined measurement area are repeatedly performed. ij The beam intensity I ij ' steps until the final refined measurement area is solved to be the circumscribed rectangle with the smallest area corresponding to the electron beam.

[0086] like Figure 7As shown, by refining the measurement area multiple times and performing multiple iterative calculations, the final refined measurement area is solved to be the smallest circumscribed rectangle corresponding to the electron beam, and then the beam size with the highest accuracy can be solved. Specifically, the measurement area and the refined measurement area are both rectangular, which has the advantages of convenient area division, convenient calculation, and convenient refinement.

[0087] Based on the same application concept, the present application also provides a fourth embodiment of a method for detecting the size of an electron beam. Figure 8 This is a schematic flow chart of a fourth embodiment of a method for detecting the size of an electron beam provided in the present application.

[0088] Step S200, detecting the electron beam by a non-intercepting detector and obtaining multiple sets of current detection data includes:

[0089] Step S201, distributing s non-intercepting detectors evenly at intervals along the circumference of the electron beam, wherein the s non-intercepting detectors form a detection array;

[0090] Step S202, setting k detection arrays along the axial direction of the electron beam; wherein, in any two detection arrays, the distances from the non-intercepting detectors of one detection array to the electron beam are not equal to the distances from the non-intercepting detectors of the other detection array, and s*k is greater than or equal to I*J;

[0091] It should be understood that by making the distances from the non-intercepting detectors of one detection array to the electron beam unequal between the non-intercepting detectors of another detection array in any two detection arrays, it is ensured that the parameters of the data obtained by each non-intercepting detector are different, that is, it is ensured that there are s*k different equations to solve for the beam intensity of each unit.

[0092] Step S203 , acquiring data measured by each non-intercepting detector in each detection array to obtain multiple groups of current detection data.

[0093] In this embodiment, multiple sets of current detection data are obtained by setting multiple detection arrays including multiple non-intercepting detectors, and the setting is simple, ingenious and reasonable. In addition, it can be understood that, under the premise that s*k is greater than or equal to I*J, the larger the value of s*k, the higher the accuracy of the beam intensity of each unit solved, and the smaller the value of s*k, the fewer the number of non-intercepting detectors required, and the lower the cost. Therefore, the number of unit divisions for the measurement area and the number of non-intercepting detectors can be flexibly set according to the actual accuracy requirements and cost requirements.

[0094] Furthermore, the non-intercepting detector can be a coil detector and / or an electrode detector. When charged particles move, they form a beam, which will induce an electric induction current or a magnetic induction current on the adjacent conductor electrode or coil. Therefore, the use of a coil detector and / or an electrode detector will not affect the normal operation of the electron beam, thus achieving non-intercepting detection of the electron beam.

[0095] Furthermore, any unit C ij The corresponding beam intensity is I ij , the polar coordinates of any unit are (r ij ,θ ij ), the current generated by each unit on the non-intercepting detector is I skij When the non-intercepting detector uses an electrode detector, all units are in the electrode detector M sk The current I generated on sk for:

[0096]

[0097] Among them, the angle of the sth electrode detector is ɑ s The radial angle of each electrode detector is φ, and the distance from each electrode detector to the center of the cross section where the electron beam exists is D sk .

[0098] It can be understood that according to the basic theory of electromagnetism, the current is I ij Unit C ij In the electrode detector M sk The current I generated on skij for:

[0099]

[0100] Electrode Detector M sk The current I generated on sk For all units C ij In the electrode detector M sk The current I generated on skij The sum of all cells C ij In the electrode detector M sk The current I generated on skij Then all units can be obtained in the electrode detector M sk The current I generated on sk for:

[0101]

[0102] Because I sk is a known number that can be obtained by looking at the electrode detector, so substituting all the data into it gives the value of Iij The multiple equations related to I ij Solving multiple equations related to any unit C ij The corresponding beam intensity is I ij , thereby achieving the beam intensity of each unit.

[0103] In another embodiment, when the non-intercepting detector is a coil detector, all units are in the coil detector M' sk The current I′ generated on sk for:

[0104]

[0105] Among them, E sk is the induced electromotive force generated by the magnetic field in the coil detector, R0 is the sampling resistor, R is the coil diameter, and B sk is the average magnetic induction intensity in the coil, K b is the correction coefficient of the electron beam current on the coil detector through magnetic induction, μ0 is the magnetic permeability in vacuum, r ijsk is the distance of each current element from the center of the detector, and t is the time.

[0106] Based on the same application concept, the present application also provides a device for detecting the size of an electron beam. Fig. 9 , Fig. 9 A schematic diagram of the structure of an electron beam size detection device provided in the present application, the device specifically comprises:

[0107] A division module, used for dividing the cross section where the electron beam exists into measurement areas of I rows and J columns;

[0108] The detection module 10 is used to perform non-interception detection on the electron beam and obtain multiple sets of current detection data;

[0109] The calculation module is used to establish the equation matrix for multiple sets of current detection data and solve the unit C of each measurement area. ij The beam intensity I ij ;

[0110] Fitting distribution module is used to fit each unit C ij The beam intensity I ij The distribution curve is fitted to obtain the cross-sectional distribution size of the electron beam current intensity.

[0111] The technical solution of this embodiment finally obtains the size of the electron beam current through the mutual cooperation among various functional modules.

[0112] The electron beam size detection device of the present invention detects the beam intensity of the electron beam by using a non-intercepting detector, which will not affect the normal operation of the electron beam and ensures the normal operation of the electron beam application equipment. In addition, the electron beam size detection device of the present invention can obtain the lateral size of the electron beam by mathematical calculation and only needs to detect the electron beam once, and has no restrictions on the stability and repeatability of the electron beam. It has high applicability and is suitable for all accelerators. For a single pulse bunch, or a beam whose beam position and lateral intensity distribution are unstable over time, the electron beam size detection device of the present invention only needs to detect the electron beam data once, and the advantage of real-time detection is more obvious.

[0113] Furthermore, if Fig.10 As shown, the detection device also includes an electromagnetic shielding body 20 having a cavity, the cavity having an opening toward the electron beam, and the detection module 10 is installed in the cavity. The electromagnetic shielding body 20 is used to shield the induced electric field of the particle beam at other positions to ensure that the detected induced current is the contribution of the particles on the beam segment 30 at the measurement position, thereby improving the reliability of the electron beam size detection device of the present invention and the accuracy of the measured results.

[0114] In addition, an embodiment of the present application further proposes a computer storage medium, on which an electron beam size detection program is stored. When the electron beam size detection program is executed by a processor, the steps of the electron beam size detection method as described above are implemented. Therefore, it will not be repeated here. In addition, the description of the beneficial effects of using the same method will not be repeated. For technical details not disclosed in the computer-readable storage medium embodiment involved in the present application, please refer to the description of the method embodiment of the present application. As an example, program instructions can be deployed to be executed on one computing device, or on multiple computing devices located at one location, or on multiple computing devices distributed at multiple locations and interconnected by a communication network.

[0115] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiments can be implemented by instructing the relevant hardware through a computer program, and the above-mentioned program can be stored in a computer-readable storage medium, and when the program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, the above-mentioned storage medium can be a disk, an optical disk, a read-only memory (ROM) or a random access memory (RAM), etc.

[0116] It should also be noted that the device embodiments described above are merely schematic, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of this embodiment. In addition, in the accompanying drawings of the device embodiments provided by the present application, the connection relationship between the modules indicates that there is a communication connection between them, which may be specifically implemented as one or more communication buses or signal lines. A person of ordinary skill in the art may understand and implement it without paying any creative effort.

[0117] Through the description of the above implementation mode, the technicians in the field can clearly understand that the present application can be implemented by means of software plus necessary general hardware, and of course, it can also be implemented by special hardware including special integrated circuits, special CPUs, special memories, special components, etc. In general, all functions completed by computer programs can be easily implemented by corresponding hardware, and the specific hardware structure used to implement the same function can also be various, such as analog circuits, digital circuits or special circuits. However, for the present application, software program implementation is a better implementation mode in more cases. Based on such an understanding, the technical solution of the present application is essentially or the part that contributes to the prior art can be embodied in the form of a software product, which is stored in a readable storage medium, such as a computer floppy disk, a U disk, a mobile hard disk, a read-only memory (ROM, Read-Only Memory), a random access memory (RAM, Random Access Memory), a disk or an optical disk, etc., including a number of instructions to enable a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the method of each embodiment of the present application.

[0118] The above are only preferred embodiments of the present application, and are not intended to limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A method for detecting the size of an electron beam, It is characterized in that The method comprises: The cross section where the electron beam exists is divided into a measurement area with I rows and J columns; wherein the measurement area has a total of I*J units, and any one of the units is C ij , the corresponding beam intensity is I ij ; The electron beam is detected by a non-intercepting detector, and a plurality of groups of current detection data are obtained; wherein, before obtaining different groups of current detection data, the corresponding non-intercepting detector is set to have different detection parameters, and the number of groups of current detection data is greater than or equal to I*J; By establishing an equation matrix for multiple sets of current detection data, each unit C in the measurement area is solved. ij The beam intensity I ij ; According to each of the units C ij The beam intensity I ij Fitting a distribution curve to obtain a cross-sectional distribution size of the beam intensity of the electron beam; The unit C located in the outer circle ij The beam intensity I ij When it falls below the set threshold, By establishing an equation matrix for multiple sets of current detection data, each unit C is solved ij The beam intensity I ij Afterwards, the method further comprises: A refined measurement region is established with the beam center of the electron beam as the center; wherein the refined measurement region also has I*J units, any one of which is C ij ', the corresponding beam intensity is I ij ', the refined measurement area includes as few as possible the beam current intensity I located in the outer ring ij The cell C is below the set threshold ij ; By establishing an equation matrix for multiple sets of current detection data, the unit C of each refined measurement area is solved. ij The beam intensity I ij '; Wherein, I and J are both positive integers.

2. The method for detecting the size of an electron beam according to claim 1, It is characterized in that The measurement area and the refined measurement area are both rectangular, and the steps of establishing a refined measurement area with the beam center of the electron beam as the center and solving the unit C of each refined measurement area by establishing an equation matrix for multiple groups of current detection data are repeated. ij The beam intensity I ij ' step, until the final refined measurement area is solved to be the circumscribed rectangle with the smallest area corresponding to the electron beam.

3. The method for detecting the size of an electron beam according to claim 1, It is characterized in that The step of detecting the electron beam by a non-intercepting detector and acquiring multiple sets of current detection data comprises: Distributing s non-intercepting detectors uniformly and spaced apart along the circumference of the electron beam, wherein the s non-intercepting detectors form a detection array; k detection arrays are arranged along the axial direction of the electron beam; wherein, in any two detection arrays, the distances from the non-intercepting detector of one detection array to the electron beam are not equal to the distances from the non-intercepting detector of the other detection array, and s*k is greater than or equal to I*J; Acquire data measured by each of the non-intercepting detectors in each of the detection arrays to obtain multiple sets of current detection data; Wherein, s and k are both positive integers.

4. The method for detecting the size of an electron beam according to claim 3, It is characterized in that The non-intercepting detector may be a coil detector and / or an electrode detector.

5. The method for detecting the size of an electron beam according to claim 4, It is characterized in that Any of the units C ij The corresponding beam intensity is I ij , the polar coordinates of any of the units are (r ij ,θ ij ), the current generated by each of the units on the non-intercepting detector is I skij , When the non-intercepting detector adopts an electrode detector, All the units are in the electrode detector M sk The current I generated on sk for: Among them, the angle of the sth electrode detector is α s , the radial opening angle of each electrode detector is The distance from each electrode detector to the center of the cross section where the electron beam exists is d. sk , r ij is the radius of the detector in polar coordinates, n is a positive integer; and\or, When the non-intercepting detector is a coil detector, s coil detectors are evenly spaced along the circumference of the electron beam, and the current I′ of each coil detector is sk for: Among them, E sk is the induced electromotive force generated by the magnetic field in the coil detector, R 0 is the sampling resistor, R is the coil diameter, B sk is the average magnetic induction intensity in the coil, K b is the correction factor of the electron beam current on the coil detector through magnetic induction, μ 0 is the magnetic permeability in vacuum, r ijsk is the distance of each current element from the center of the detector, and t is the time.

6. A device for detecting the size of an electron beam, It is characterized in that include: A division module, used for dividing the cross section where the electron beam exists into measurement areas of I rows and J columns; A detection module, used for performing non-interception detection on the electron beam and obtaining multiple sets of current detection data; A calculation module is used to establish an equation matrix for multiple sets of current detection data and solve the unit C of each measurement area. ij The beam intensity I ij ; The fitting distribution module is used to fit each of the units C ij The beam intensity I ij Fitting a distribution curve to obtain a cross-sectional distribution size of the beam intensity of the electron beam; Among them, the unit C located in the outer circle ij The beam intensity I ij When it falls below the set threshold, By establishing an equation matrix for multiple sets of current detection data, each unit C is solved ij The beam intensity I ij After that, it also includes: A refined measurement region is established with the beam center of the electron beam as the center; wherein the refined measurement region also has I*J units, any one of which is C ij ', the corresponding beam intensity is I ij ', the refined measurement area includes as few as possible the beam current intensity I located in the outer ring ij The cell C is below the set threshold ij ; By establishing an equation matrix for multiple sets of current detection data, the unit C of each refined measurement area is solved. ij The beam intensity I ij '; I and J are both positive integers.

7. The electron beam size detection device according to claim 6, It is characterized in that The detection device further comprises an electromagnetic shielding body having a cavity, wherein the cavity has an opening facing the electron beam, and the detection module is installed in the cavity.

8. An electron beam size detection device, It is characterized in that include: A processor, a memory and an electron beam size detection program stored in the memory. When the electron beam size detection program is executed by the processor, the steps of the electron beam size detection method according to any one of claims 1 to 5 are implemented.

9. A computer-readable storage medium, It is characterized in that The computer-readable storage medium stores an electron beam size detection program, and when the electron beam size detection program is executed by the processor, the electron beam size detection method according to any one of claims 1 to 5 is implemented.

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