A large diameter deposition furnace fixture

Abstract

The invention discloses a large-diameter deposition furnace charging fixture, which relates to the technical field of deposition furnace charging devices, and comprises at least three lifting rods (4), clamping feet (5) installed at the lower ends of the lifting rods (4), a lifting frame (1) rotatably connected to the upper end of each lifting rod (4), a closed synchronous belt (2) meshed with teeth on the upper ends of all the lifting rods (4), and a rotating disk (6) meshed with the synchronous belt (2). At most two of the lifting rods (4) are in a straight line, and the rotating disk (6) rotates to drive the lifting rods (4) and the clamping feet (5) to rotate synchronously, so that the clamping feet (5) lift the lifting disk or detach from the lifting disk. The large-diameter deposition furnace charging fixture is suitable for charging and uncharting large-diameter vapor deposition furnaces, and has high efficiency and safety.

Description

Technical Field

[0001] The present invention relates to the technical field of deposition furnace charging devices, in particular to a large-diameter deposition furnace charging fixture. Background Art

[0002] Chemical Vapor Deposition (CVD) is a commonly used thin film deposition technology, widely used in semiconductors, optoelectronics, materials science, and other fields. It involves placing gaseous reactants on the surface of the substrate to be coated at high temperatures, causing a chemical reaction to occur and deposit to form a thin film.

[0003] The history of vapor deposition technology dates back to the late 19th and early 20th centuries. The earliest vapor deposition method was thermal decomposition, which involved heating solid or liquid reactants, causing them to evaporate and deposit on a substrate. With the advancement of science and technology, vapor deposition technology has continued to develop and improve.

[0004] Modern vapor deposition technology mainly includes two methods: chemical vapor deposition (CVD) and physical vapor deposition (PVD). CVD forms a thin film through chemical reactions between gaseous reactants on the substrate surface, while PVD deposits materials onto the substrate surface through physical processes such as evaporation and sputtering.

[0005] Vapor deposition technology offers many advantages. First, it can be performed at relatively low temperatures, avoiding the melting or decomposition of materials at high temperatures. Second, vapor deposition can deposit thin films uniformly on complex substrate surfaces, forming high-quality coatings. Furthermore, vapor deposition can be used to prepare a wide range of materials, including metals, alloys, oxides, and nitrides.

[0006] Vapor deposition technology has a wide range of applications in various fields. In the semiconductor industry, vapor deposition is used to form insulating, metallic, and conductive layers in devices such as transistors and integrated circuits. In optoelectronics, vapor deposition is used to produce optical thin films, optical fibers, and solar cells. Additionally, vapor deposition is used in materials science research, surface coatings, and corrosion protection.

[0007] With the continuous advancement of science and technology, the importance of vapor deposition technology in material preparation and industrial applications continues to increase. It provides us with an efficient and precise method for thin film preparation, promoting the development of science and technology and the widespread promotion of its application.

[0008] Vapor deposition furnaces are becoming increasingly larger in the industry (currently, furnaces with diameters up to 4300mm and depths up to 6400mm require 7-8 columns per furnace). Existing loading and unloading fixtures are only capable of loading a single column (approximately 1200mm in diameter), requiring 7-8 loading attempts. This loading method requires operators to descend to the furnace floor, resulting in insufficient oxygen, low loading efficiency, and a high loading height. If the preforms tip over, this could result in a serious safety hazard. During unloading, the temperature must be lowered to room temperature (a lengthy cooling time), again requiring operators to descend to the furnace floor to perform this operation, posing a significant safety risk to employees. As the industry evolves, vapor deposition furnaces are becoming larger and deeper, and the existing loading and unloading fixtures are no longer able to meet production demands.

[0009] In summary, how to effectively solve the problems is an urgent problem that those skilled in the art need to solve. Summary of the Invention

[0010] The purpose of the present invention is to provide a large-diameter deposition furnace charging fixture, which is suitable for charging and uncharting a large-diameter vapor deposition furnace and has high efficiency and safety.

[0011] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0012] A large-diameter deposition furnace loading fixture includes at least three lifting rods, clamping feet installed at the lower ends of the lifting rods, a lifting frame rotatably connected to the upper end of each lifting rod, a closed synchronous belt meshing with the teeth of the upper ends of all the lifting rods, and a rotating disk meshed with the synchronous belt. At most two of the lifting rods are in a straight line, and the rotation of the rotating disk drives the lifting rods and the clamping feet to rotate synchronously, so that the clamping feet lift the lifting disk or detach from the lifting disk.

[0013] Preferably, the lifting rod is a stepped rod, comprising a large diameter rod connected to the clamping foot and a small diameter rod at the upper end, a gear is mounted on the small diameter rod, the lower end face of the gear abuts against the first step surface of the bottom face of the small diameter rod, and the teeth at the upper end of the lifting rod are the teeth of the gear.

[0014] Preferably, the lifting rod also includes a middle diameter rod arranged between the large diameter rod and the small diameter rod, and the lifting frame includes a plurality of connecting rods connected end to end, and adjacent connecting rods are connected at the ends by sleeves, and the sleeves are sleeved on the middle diameter rod, and the bottom surface of the sleeve abuts against the second step surface of the bottom surface of the middle diameter rod, and the sleeve is rotatably connected to the middle diameter rod.

[0015] Preferably, the rotating disk includes a bracket fixed on one of the connecting rods, a meshing tooth installed on the bracket, and an operating disk connected to the meshing tooth for driving the meshing tooth to rotate, the meshing tooth is engaged with the synchronous belt, the diameter of the meshing tooth is equal to the diameter of the gear, and the meshing tooth and the gears at both ends of the connecting rod that fixes the meshing tooth are on a straight line.

[0016] Preferably, the operating disk includes a circular ring, a central rod, and a plurality of connecting rods with both ends connected to the central rod and the circular ring respectively.

[0017] The operating panel also includes an operating rod, which includes a long rod and a notch tube connected to the bottom of the long rod and having a notch tube adapted to the connecting rod, and the connecting rod is clamped in the notch tube.

[0018] Preferably, it further comprises a tensioning wheel installed on the hoisting frame, wherein the axis of the tensioning wheel is along the vertical direction, and the tensioning wheel contacts the synchronous belt to tighten the synchronous belt.

[0019] Preferably, the single-side gap between the lifting frame and the precipitation furnace is 2cm-3cm, and the lifting frame also includes a support rod connected to the diagonal end of the connecting rod, and the tensioning wheel is installed on the support rod, and the tensioning wheel is connected to the smooth surface of the back side of the synchronous belt teeth.

[0020] Preferably, it also includes an adjustment seat connected to the support rod, the adjustment seat has a long hole, the length direction of the long hole is along the support rod, the connecting shaft of the tensioning wheel is connected to the long hole, and the connecting shaft is slidably connected to the long hole.

[0021] Preferably, the number of the lifting rods is four, the lifting frame is a square frame, the lifting plate is an inscribed circle of the lifting frame, the lifting rods are connected to the corners of the lifting frame, and the lifting plate has a notch at the position corresponding to the clamping foot, and the length of the clamping foot is greater than the width of the notch so that the clamping foot supports the lifting plate.

[0022] Preferably, the length of the hoisting rod is 1m-1.8m, and a reinforcing rib is provided on the hoisting rod. The hoisting rod and the reinforcing rib are in the vertical direction, and two reinforcing ribs are respectively welded to the diameter position of the two side walls of the hoisting rod, and the reinforcing rib is tangent to the hoisting plate;

[0023] The hoisting rod is a telescopic rod, and the diameter of the section connected to the clamping foot is smaller than the diameter of the section connected to the gear.

[0024] The present invention provides a large-diameter deposition furnace fixture comprising a hoisting rod, a clamping foot, a hoisting frame, a synchronous belt, and a rotating disk. The hoisting rods are at least three in number, with at most two of them aligned in a straight line. That is, n hoisting rods are connected end-to-end at their vertices to form n deformations.

[0025] The clamping foot is installed at the lower end of the lifting rod, and the clamping foot and the lifting rod are relatively fixed. The lifting frame is rotatably connected to the upper end of each lifting rod, and the lifting rod and the clamping foot can be rotated to a set angle relative to the lifting frame. Specifically, before the clamping foot lifts the lifting plate, the clamping foot rotates to the outside of the lifting plate, the clamping foot and the lifting plate do not overlap in horizontal projection, and the clamping foot detaches from the lifting plate. When lifting is required, the clamping foot rotates to the bottom of the lifting plate's edge, the clamping foot and the lifting plate overlap in horizontal projection, the clamping foot lifts the lifting plate for lifting, and the material is placed on the lifting plate.

[0026] The top of the hoisting rod has teeth, and the bottom of the hoisting rod is fixed with a clamping foot. The synchronous belt is connected to the teeth on the top of all the hoisting rods. The synchronous belt is a closed belt. When the synchronous belt rotates, the hoisting rod rotates. The rotating disk is meshed with the synchronous belt. The rotating disk acts as a driving component. The rotating disk rotates the synchronous belt. The synchronous belt rotates the hoisting rod and the clamping foot synchronously, changing the angle of the clamping foot and controlling the clamping foot to lift or detach the hoisting disk.

[0027] The large-diameter deposition furnace mounting fixture provided by the present invention uses a synchronous belt to connect multiple clamps and a rotating disk. The clamps are fixed on a lifting rod to ensure that the rotating disk, the lifting rod, and the clamps can rotate synchronously, so that the rotation of the rotating disk drives the synchronous rotation of multiple clamps. There is no need to adjust the clamp angles one by one, which makes operation more convenient. The synchronization of multiple clamps is good, which prevents the problem of individual clamps being misoperated or forgotten to be adjusted. A set of drive devices connects multiple clamps at the same time, reducing the number of drive devices and making the structure simpler. The large-diameter deposition furnace mounting fixture is suitable for deposition furnaces with a diameter of 4300mm and a depth of 6400mm. According to the inner diameter of the deposition furnace, all material columns are installed on the lifting disk outside and then directly lifted into the furnace. The operator does not need to go down to the bottom of the furnace, which ensures the personal safety of employees. Personnel do not need to go down to the bottom of the furnace and can operate outside the furnace. The furnace temperature does not need to be lowered to room temperature. It can be lifted out when the temperature drops to about 60°C and cooled outside the furnace. The cooling time is shortened, production efficiency is improved, and there are no safety hazards. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0029] Figure 1 A schematic structural diagram of a large-diameter deposition furnace fixture provided in a specific embodiment of the present invention;

[0030] Figure 2 for Figure 1 A partial enlarged view of point A in the middle;

[0031] Figure 3 for Figure 2 A partial enlarged view of the middle tensioner.

[0032] The following are marked in the accompanying drawings:

[0033] Lifting frame 1, synchronous belt 2, support rod 3, lifting rod 4, clamping foot 5, rotating disk 6, sleeve 7, gear 8, tensioner 9, adjustment seat 10, lifting ear 11. DETAILED DESCRIPTION

[0034] The core of the present invention is to provide a large-diameter deposition furnace loading and unloading fixture, which is suitable for loading and unloading large-diameter vapor deposition furnaces and has high efficiency and safety.

[0035] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0036] Please refer to Figures 1 to 3 , Figure 1 A schematic structural diagram of a large-diameter deposition furnace fixture provided in a specific embodiment of the present invention; Figure 2 for Figure 1 A partial enlarged view of point A in the middle; Figure 3 for Figure 2 A partial enlarged view of the middle tensioner.

[0037] In a specific embodiment, the large-diameter deposition furnace loading fixture provided by the present invention includes at least three lifting rods 4, clamping feet 5 installed at the lower ends of the lifting rods 4, a lifting frame 1 rotatably connected to the upper end of each lifting rod 4, a closed synchronous belt 2 meshed with teeth on the upper ends of all lifting rods 4, and a rotating disk 6 meshed with the synchronous belt 2. At most two lifting rods 4 are in a straight line, and the rotation of the rotating disk 6 drives the lifting rods 4 and the clamping feet 5 to rotate synchronously, so that the clamping feet 5 lift the lifting disk or detach from the lifting disk.

[0038] In the above structure, the large-diameter deposition furnace mounting fixture includes a hoisting rod 4 , a clamping foot 5 , a hoisting frame 1 , a synchronous belt 2 and a rotating disk 6 .

[0039] The number of hoisting rods 4 is at least three, and the axis of the hoisting rods 4 is along the vertical direction. Preferably, the hoisting rods 4 are straight rods, and the vertices of the hoisting rods 4 are on the same horizontal plane. At most, there are two hoisting rods 4 on a straight line, that is, the vertices of n hoisting rods 4 connected end to end constitute n deformations.

[0040] The clamping foot 5 is mounted on the lower end of the hanging rod 4. The clamping foot 5 and the hanging rod 4 are relatively fixed and can be connected by welding to ensure a secure connection. Alternatively, the clamping foot 5 may have a threaded hole, and the lower end of the hanging rod 4 may have an external thread. The threaded rod at the lower end of the hanging rod 4 is screwed into the threaded hole of the clamping foot 5, forming a detachable threaded connection and facilitating removal and replacement. In a preferred embodiment, nuts are connected to the threaded rod at positions above and below the clamping foot 5. The nuts are tightened to prevent the threaded hole and threaded rod from loosening.

[0041] The lifting frame 1 is pivotally connected to the upper end of each lifting rod 4. The lifting rods 4 and the clamping feet 5 can be rotated to a set angle relative to the lifting frame 1. Specifically, before the clamping feet 5 lift the lifting plate, the clamping feet 5 rotate to the outside of the lifting plate, the clamping feet 5 and the lifting plate do not overlap in horizontal projection, and the clamping feet 5 are separated from the lifting plate. When lifting is required, the clamping feet 5 rotate below the edge of the lifting plate, the clamping feet 5 and the lifting plate overlap in horizontal projection, and the clamping feet 5 lift the lifting plate for lifting, and the material is placed on the lifting plate.

[0042] The upper end of the lifting rod 4 has teeth, and the bottom of the lifting rod 4 is fixed with a clamping foot 5. The synchronous belt 2 is engaged with the teeth on the upper ends of all the lifting rods 4. The synchronous belt 2 is a closed belt. When the synchronous belt 2 rotates, it drives the lifting rod 4 to rotate, that is, the lifting rod 4 is driven to rotate by the synchronous belt 2, thereby driving the clamping foot 5 to rotate.

[0043] The rotating disc 6 meshes with the timing belt 2, acting as the driving component. Rotating the rotating disc 6 drives the timing belt 2, which in turn rotates the lifting rod 4 and the clamping foot 5. This causes the clamping foot 5 to change its angle, controlling the clamping foot 5 to lift or detach the lifting disc. Materials are loaded onto the lifting disc, and the clamping foot 5 lifts the disc. Lifting lugs 11 are provided on the lifting frame 1, from which the sling's straps or chains are suspended. The sling is used to lift the items held by the clamp.

[0044] The large-diameter deposition furnace loading fixture provided by the present invention uses a synchronous belt 2 to connect multiple clamps 5 and a rotating disk 6. The clamps 5 are fixed to a hoisting rod 4 to ensure that the rotating disk 6, the hoisting rod 4, and the clamps 5 can rotate synchronously, so that the rotation of the rotating disk 6 drives the synchronous rotation of multiple clamps 5. There is no need to adjust the rotation angles of the clamps 5 one by one, which is more convenient to operate. The multiple clamps 5 have good synchronization, preventing the problem of individual clamps 5 being misoperated or forgotten to adjust. A set of drive devices simultaneously connects multiple clamps 5, reducing the number of drive devices and simplifying the structure. The large-diameter deposition furnace loading fixture is suitable for deposition furnaces with a diameter of 4300mm and a depth of 6400mm. According to the inner diameter of the deposition furnace, all material columns are mounted on the hoisting disk outside and then directly hoisted into the furnace. The operator does not need to go down to the bottom of the furnace, ensuring the personal safety of employees. Personnel do not need to go down to the furnace and can operate outside the furnace. The furnace temperature does not need to be lowered to room temperature. It can be hoisted out when the temperature drops to about 60°C and cooled outside the furnace. The cooling time is shortened, improving production efficiency, and there are no safety hazards.

[0045] The above-mentioned large-diameter deposition furnace loading fixture is only a preferred solution and is not limited to it. On this basis, targeted adjustments can be made according to actual needs to obtain different implementation methods. The lifting rod 4 is a stepped rod, including a large-diameter rod connected to the clamping foot 5 and a small-diameter rod at the upper end. A gear 8 is installed on the small-diameter rod, and the lower end face of the gear 8 abuts against the first step surface of the bottom face of the small-diameter rod. The teeth on the upper end of the lifting rod 4 are the teeth of the gear 8.

[0046] In a specific embodiment, the hoisting rod 4 is a stepped rod, including a large diameter rod and a small diameter rod. The large diameter rod is located at the bottom and connected to the clamping foot 5. The small diameter rod is located at the top. A gear 8 is installed on the small diameter rod. The teeth on the upper end of the hoisting rod 4 are the teeth of the gear 8. There is a first step surface between the large diameter rod and the small diameter rod. The lower end face of the gear 8 abuts against the first step surface. The upper end of the small diameter rod is provided with an external thread. The small diameter rod is connected to a nut on the upper end face of the gear 8. The nuts are used to position the gear 8 and the small diameter rod axially. Preferably, there are two nuts for better anti-loosening effect. The gear 8 and the small diameter rod can be connected by a key to achieve circumferential positioning of the gear 8 and the small diameter rod, preventing the gear 8 and the small diameter rod from rotating relative to each other, thereby achieving a fixed connection between the small diameter rod and the gear 8.

[0047] Of course, the teeth on the upper end of the lifting rod 4 being the teeth of the gear 8 is only a preferred embodiment, not the only one. It is also possible that the lifting rod 4 is a gear shaft, and there is no need to connect the gear 8 to the upper end of the small-diameter rod. The structure is simpler and the connection process is omitted.

[0048] In the above embodiment, the hoisting rod 4 is provided with a gear 8. The rotation of the synchronous belt 2, through the gear 8, drives the hoisting rod 4 in synchronous rotation. The width of the gear 8 and the synchronous belt 2 can be equal, which increases the meshing contact area, resulting in smoother meshing and more stable movement. Of course, the teeth can also be those of a sprocket, which is lighter and reduces the lifting load.

[0049] On the basis of the above-mentioned specific embodiments, the lifting rod 4 also includes a middle diameter rod arranged between the large diameter rod and the small diameter rod, and the lifting frame 1 includes a plurality of connecting rods connected end to end, and adjacent connecting rods are connected at the ends by sleeves 7, and the sleeves 7 are sleeved on the middle diameter rod, and the bottom surface of the sleeves 7 abuts against the second step surface of the bottom surface of the middle diameter rod, and the sleeves 7 are rotatably connected to the middle diameter rod.

[0050] In one specific embodiment, the hoisting rod 4 further includes a medium-diameter rod disposed between the large-diameter rod and the small-diameter rod, with the diameters of the large-diameter rod, the medium-diameter rod, and the small-diameter rod decreasing in order. In this case, the connecting surface between the large-diameter rod and the medium-diameter rod is a second stepped surface, while the connecting surface between the medium-diameter rod and the small-diameter rod is a first stepped surface. The gear 8 is connected to the small-diameter rod and abuts against the first stepped surface.

[0051] The hanging frame 1 includes a plurality of connecting rods, which can be of the same length and have equal angles between them. The connecting rods are connected end to end to form a regular polygonal frame. Preferably, the number of connecting rods is the same as the number of hanging rods 4, and the connection points of the connecting rods are connected to the corresponding hanging rods 4.

[0052] Adjacent connecting rods are connected at the ends by sleeves 7, and the ends of adjacent connecting rods are respectively welded to two points of sleeves 7, with a set angle between them. Of course, adjacent connecting rods can also be connected between the ends, and sleeves 7 can be welded to the sides of the connecting rods to reduce the difficulty of connection.

[0053] The sleeve 7 is sleeved on the middle diameter rod, and the bottom surface of the sleeve 7 abuts against the second step surface. The sleeve 7 and the middle diameter rod are clearance-matched, and the middle diameter rod can rotate in the sleeve 7 to realize the rotation connection between the lifting rod 4 and the lifting frame 1.

[0054] In the above embodiment, the hanging rod 4 is designed as a stepped rod, which is connected to the sleeve 7 and the gear 8 in layers and sections, with a simple structure and convenient connection.

[0055] In a preferred embodiment, a gasket is provided at the upper end of the sleeve 7, which is mounted on the middle diameter rod to separate the sleeve 7 and the gear 8 above it, preventing friction between the sleeve 7 and the gear 8 when the lifting rod 4 and the gear 8 rotate relative to the sleeve 7.

[0056] In another preferred embodiment, a bearing is connected between the sleeve 7 and the middle diameter rod, the inner ring of the bearing is interference fit with the middle diameter rod, and the outer ring is interference fit with the sleeve 7, so that the sleeve 7 and the lifting rod 4 rotate more smoothly and reduce wear.

[0057] Based on the above-mentioned specific embodiments, the rotating disk 6 includes a bracket fixed on one of the connecting rods, meshing teeth installed on the bracket, and an operating disk connected to the meshing teeth for driving the meshing teeth to rotate. The meshing teeth are engaged with the synchronous belt 2, the diameter of the meshing teeth is equal to the diameter of the gear 8, and the meshing teeth and the gears 8 at both ends of the connecting rod that fixes the meshing teeth are on a straight line.

[0058] In one embodiment, the rotating disk 6 includes a bracket, meshing teeth, and an operating disk. The bracket is fixed to one of the connecting rods, the meshing teeth are mounted on the bracket, and the operating disk is connected to the meshing teeth. Manual rotation of the operating disk drives the meshing teeth to rotate via the bracket. The meshing teeth mesh with the synchronous belt 2, and the rotation of the meshing teeth drives the synchronous belt 2 to rotate, thereby enabling the rotating disk 6 to drive the synchronous belt 2 to rotate.

[0059] It should be noted that the operating disk can be rotated not only manually but also driven by a motor, which is within the protection scope of the present invention.

[0060] The diameter of the meshing teeth is equal to the diameter of the gear 8. The meshing teeth and the gears 8 at both ends of the connecting rod that fix the meshing teeth are on a straight line. In other words, the meshing teeth on the connecting rod and the gears 8 at both ends are on a straight line and have the same diameter. The synchronous belt 2 that meshes with the meshing teeth and the gears 8 at both ends is in a straight line in this section. The length of the synchronous belt 2 is relatively short and the transmission distance is short.

[0061] In a preferred embodiment, the meshing teeth and the gears 8 at both ends of the connecting rod that fixes the meshing teeth are on two straight lines, and the synchronous belt 2 that meshes with the meshing teeth and the gears 8 at both ends has an angle at the meshing teeth. At this time, the wrap angle between the gears 8 and the meshing teeth and the synchronous belt 2 is larger, the contact area is larger, and the meshing stability is better.

[0062] In another preferred embodiment, the diameter of the meshing teeth is not equal to the diameter of the gear 8. For example, the diameter of the meshing teeth is larger than the diameter of the gear 8. The meshing teeth and the gears 8 at both ends of the connecting rod that fixes the meshing teeth are on a straight line. At this time, the synchronous belt 2 that meshes with the meshing teeth and the gears 8 at both ends also has an angle at the meshing teeth. Similarly, the wrap angle between the gear 8 and the meshing teeth and the synchronous belt 2 is larger, the contact area is larger, and the meshing stability is better.

[0063] Based on the above embodiments, the operating panel includes a ring, a center rod, and a plurality of connecting rods connected to the center rod and the ring at both ends.

[0064] The operating panel also includes an operating rod, which includes a long rod and a notch tube connected to the bottom of the long rod and having a notch tube adapted to the connecting rod, and the connecting rod is clamped in the notch tube.

[0065] In a specific embodiment, the operating disk includes a circular ring, a center rod and multiple connecting rods. The center rod is connected to the bracket. The center rod is the center of the circular ring. The two ends of the multiple connecting rods are respectively connected to the center rod and the circular ring. The connecting rods connect the circular ring and the center rod into a whole. The center rod connects the operating disk and the meshing teeth.

[0066] The operating disk also includes an operating lever, which includes a long rod and a notched barrel. The notched barrel is connected to the bottom of the long rod and has a groove that matches the connecting rod. When the rotating disk 6 is driven to rotate, the groove of the notched barrel engages with the connecting rod. Holding the long rod and rotating it drives the operating disk through the notched barrel, thereby driving the rotating disk 6, which in turn drives the gear 8 and the lifting rod 4.

[0067] In the above embodiment, the rotary disk 6 is provided with an operating lever that abuts against an extension arm, thereby compensating for the insufficient arm length. When the material layer height exceeds the operator's height, the rotary disk 6 can be driven to rotate by connecting the extension lever. This facilitates operation and eliminates the need for the operator to descend to the furnace floor, thus ensuring employee safety.

[0068] In a preferred embodiment, the center rod is a telescopic rod with an adjustable length. The loading height of each layer is determined according to the height of the material, and then the length of the center rod is adjusted so that the operator can operate the rotating disk 6 at the top of the furnace without going down to the bottom of the furnace, thereby ensuring the personal safety of employees.

[0069] In another more reliable embodiment, based on any of the above embodiments, it also includes a tensioning pulley 9 installed on the lifting frame 1, the axis of the tensioning pulley 9 is along the vertical direction, and the tensioning pulley 9 contacts the synchronous belt 2 to tighten the synchronous belt 2.

[0070] In a specific embodiment, the large-diameter deposition furnace loading fixture also includes a tensioning pulley 9. The connecting shaft of the tensioning pulley 9 is installed on the lifting frame 1. The axis of the tensioning pulley 9 is in the vertical direction, that is, the axis direction of the tensioning pulley 9 is parallel to the synchronous belt 2. The side wall of the tensioning pulley 9 is in contact with the synchronous belt 2. The tensioning pulley 9 tightens the synchronous belt 2 to prevent the synchronous belt 2 from being too loose and slipping.

[0071] In a preferred embodiment, the tensioner 9 is a pulley that is rotatable and in smooth contact with the synchronous belt 2, thereby preventing the tensioner 9 from interfering with the movement of the synchronous belt 2 and causing poor movement and jamming.

[0072] Based on the above-mentioned specific embodiments, the single-sided gap between the lifting frame 1 and the precipitation furnace is 2cm-3cm. The lifting frame 1 also includes a support rod 3 connected to the diagonal end of the connecting rod. The tensioner 9 is installed on the support rod 3, and the tensioner 9 is connected to the smooth surface on the back of the teeth of the synchronous belt 2.

[0073] In a specific embodiment, the hoisting frame 1 further includes a support rod 3, which is connected to the end of the connecting rod at a diagonal angle. The support rod 3 supports the center of the hoisting frame 1. The support rod 3 reinforces the hoisting frame 1 to prevent the hoisting frame 1 from being crushed or torn inward or outward by external forces. The support rod 3 can be connected by welding, bolts, or clamping.

[0074] The single-sided gap between the lifting frame 1 and the precipitation furnace is only 2cm-3cm. The tensioner 9 is installed on the support rod 3. The tensioner 9 is connected to the smooth surface on the back of the teeth of the synchronous belt 2. The tensioner 9 is built into the internal space of the lifting frame 1 and does not occupy the external space of the lifting frame 1. The structure is more compact, reducing the footprint, ensuring that the lifting frame 1 moves smoothly in the precipitation furnace, and preventing the tensioner 9 from colliding with the inner wall of the precipitation furnace.

[0075] On the basis of the above-mentioned specific embodiments, it also includes an adjustment seat 10 connected to the support rod 3, and the adjustment seat 10 has a long hole. The length direction of the long hole is along the support rod 3, and the connecting shaft of the tensioning wheel 9 is connected to the long hole, and the connecting shaft is slidably connected to the long hole.

[0076] In one specific embodiment, the large-diameter deposition furnace loading fixture further includes an adjustment seat 10, which is connected to the support rod 3. The adjustment seat 10 and the support rod 3 can be bolted together. The adjustment seat 10 has an elongated hole, the length of which runs along the support rod 3. The connecting shaft of the tensioner 9 is connected to the elongated hole. Depending on the usage, the connecting shaft is moved along the elongated hole. After the position of the connecting shaft is adjusted, the connecting shaft and the adjustment seat 10 are tightened with a nut. Adjusting the position of the tensioner 9 adjusts the tightness of the timing belt 2, making adjustment more convenient.

[0077] In another more reliable embodiment, based on any one of the above embodiments, the number of lifting rods 4 is four, the lifting frame 1 is a square frame, the lifting plate is an inscribed circle of the lifting frame 1, the lifting rods 4 are connected to the corners of the lifting frame 1, and the lifting plate has a notch at the position corresponding to the clamping foot 5, and the length of the clamping foot 5 is greater than the width of the notch, so that the clamping foot 5 supports the lifting plate.

[0078] In a specific embodiment, the lifting frame 1 is a square frame, and the number of lifting rods 4 is four. The lifting frame 1 is connected to the middle diameter rod of the lifting rod 4 through the sleeve 7. The lifting rod 4 is connected to the corners of the lifting frame 1, and the lifting rod 4 is connected to the four vertices of the lifting frame 1.

[0079] The hoisting plate is the inscribed circle of the hoisting frame 1, that is, the inscribed circle of the four hoisting rods 4. The hoisting plate has a notch corresponding to the clamping legs 5 to prevent the plate's edge from interfering with the clamping legs 5. The notch allows the clamping legs 5 to move slightly away from the hoisting plate, eliminating the need to rotate until they are tangential to the plate, thus reducing the rotation angle and saving time.

[0080] The length of the clamping foot 5 is greater than the width of the notch. When the clamping foot 5 rotates along the radius of the lifting plate, the clamping foot 5 can hold the bottom surface of the lifting plate to provide lifting support for the lifting plate.

[0081] On the basis of the above-mentioned specific embodiments, the length of the hoisting rod 4 is 1m-1.8m, and a reinforcing rib is provided on the hoisting rod 4. The hoisting rod 4 and the reinforcing rib are in the vertical direction, and the two reinforcing ribs are welded to the diameter position of the two side walls of the hoisting rod 4, and the reinforcing rib is tangent to the hoisting plate;

[0082] The hoisting rod 4 is a telescopic rod, and multiple sections of sleeve rods are connected in a sleeve manner, and the diameter of the section connecting the clamping foot 5 is smaller than the diameter of the section connecting the gear 8.

[0083] In a specific embodiment, the length of the lifting rod 4 is any value between 1m-1.8m, including endpoint values, such as 1.2m and 1.5m. The length of the lifting rod 4 is not easy to be too long to prevent the lifting rod 4 from expanding outward due to being too long.

[0084] At the same time, since the single-sided gap between the lifting frame 1 and the precipitation furnace is cm-3cm, the gap is relatively small. In order to further prevent the lifting rod 4 from expanding outward, reinforcing ribs are provided on the lifting rod 4. The reinforcing ribs are along the vertical direction. The reinforcing ribs reinforce the lifting rod 4 to reduce deformation and make the lifting rod 4 along the vertical direction to prevent the lower end of the lifting rod 4 from expanding outward and colliding with the inner wall of the precipitation furnace during long-term use, thereby ensuring that the large-diameter deposition furnace loading fixture moves smoothly in the precipitation furnace.

[0085] Specifically, two reinforcing ribs are welded on each hoisting rod 4 , and the two reinforcing ribs are respectively welded at the diameter position of the two side walls of the hoisting rod 4 . The reinforcing ribs are tangent to the hoisting plate, and the reinforcing ribs do not contact the edge of the hoisting plate.

[0086] In order to adapt to precipitation furnaces of different depths, the hoisting rod 4 can be designed as a telescopic rod, which is more convenient to adjust the length. The diameter of the section of the hoisting rod 4 connected to the clamping foot 5 is smaller than the section connected to the gear 8. In other words, the hoisting rod 4 is thinner at one end of the clamping foot 5, leaving a larger space between the clamping foot 5 and the hoisting plate, so that the clamping foot 5 can better avoid the hoisting plate.

[0087] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0088] The above is a detailed introduction to the large-diameter deposition furnace fixture provided by the present invention. Specific examples are used herein to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method and core ideas of the present invention. It should be pointed out that for ordinary technicians in this technical field, without departing from the principles of the present invention, several improvements and modifications can be made to the present invention, and these improvements and modifications also fall within the scope of protection of the claims of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A large diameter deposition furnace fixture, characterized in that: The invention comprises at least three hoisting rods (4), clamping feet (5) installed at the lower ends of the hoisting rods (4), a hoisting frame (1) rotatably connected to the upper ends of each hoisting rod (4), a closed synchronous belt (2) meshed with the teeth of the upper ends of all the hoisting rods (4), and a rotating disk (6) meshed with the synchronous belt (2). At most two of the hoisting rods (4) are in a straight line. The rotating disk (6) rotates to drive the hoisting rods (4) and the clamping feet (5) to rotate synchronously, so that the clamping feet (5) can lift the hoisting disk or detach from the hoisting disk. The hoisting rods (4) are step rods, including a large-diameter rod connected to the clamping feet (5). and a small-diameter rod at the upper end, a gear (8) being mounted on the small-diameter rod, the hoisting rod (4) further comprising a medium-diameter rod arranged between the large-diameter rod and the small-diameter rod, the hoisting frame (1) comprising a plurality of connecting rods connected end to end, the rotating disk (6) comprising a bracket fixed on one of the connecting rods, meshing teeth mounted on the bracket, and an operating disk connected to the meshing teeth for driving the meshing teeth to rotate, the meshing teeth being meshed with the synchronous belt (2), the diameter of the meshing teeth being equal to the diameter of the gear (8), and the meshing teeth and the gears (8) at both ends of the connecting rod fixing the meshing teeth being in a straight line.

2. The large diameter deposition furnace fixture according to claim 1, characterized in that: The lower end surface of the gear (8) abuts against the first step surface of the bottom surface of the small-diameter rod, and the teeth on the upper end of the hanging rod (4) are the teeth of the gear (8).

3. The large diameter deposition furnace fixture according to claim 2, characterized in that: Adjacent connecting rods are connected at their ends by sleeves (7), the sleeves (7) are sleeved on the middle diameter rods, the bottom surface of the sleeves (7) abuts against the second step surface of the bottom surface of the middle diameter rod, and the sleeves (7) are rotatably connected to the middle diameter rods.

4. The large diameter deposition furnace fixture according to claim 1, characterized in that: The operating disk includes a circular ring, a central rod, and a plurality of connecting rods whose ends are respectively connected to the central rod and the circular ring. The operating panel also includes an operating rod, which includes a long rod and a notch tube connected to the bottom of the long rod and having a notch tube adapted to the connecting rod, and the connecting rod is clamped in the notch tube.

5. The large diameter deposition furnace fixture according to claim 3, characterized in that: It also includes a tensioning wheel (9) installed on the hoisting frame (1), the axis of the tensioning wheel (9) is along the vertical direction, and the tensioning wheel (9) contacts the synchronous belt (2) to tighten the synchronous belt (2).

6. The large diameter deposition furnace fixture according to claim 5, characterized in that: The single-side gap between the hoisting frame (1) and the precipitation furnace is 2 cm-3 cm. The hoisting frame (1) also includes a support rod (3) connected to the diagonal end of the connecting rod. The tensioning wheel (9) is installed on the support rod (3). The tensioning wheel (9) is connected to the smooth surface of the back of the teeth of the synchronous belt (2).

7. The large diameter deposition furnace fixture according to claim 6, characterized in that: It also includes an adjustment seat (10) connected to the support rod (3), the adjustment seat (10) has an elongated hole, the length direction of the elongated hole is along the support rod (3), the connecting shaft of the tensioning wheel (9) is connected to the elongated hole, and the connecting shaft is slidably connected to the elongated hole.

8. The large diameter deposition furnace fixture according to any one of claims 2 to 7, characterized in that: The number of the hoisting rods (4) is four, the hoisting frame (1) is a square frame, the hoisting plate is an inscribed circle of the hoisting frame (1), the hoisting rods (4) are connected to the corners of the hoisting frame (1), the hoisting plate has a notch at a position corresponding to the clamping foot (5), and the length of the clamping foot (5) is greater than the width of the notch, so that the clamping foot (5) supports the hoisting plate.

9. The large diameter deposition furnace fixture according to claim 8, characterized in that: The length of the hoisting rod (4) is 1m-1.8m, and a reinforcing rib is provided on the hoisting rod (4). The hoisting rod (4) and the reinforcing rib are in a vertical direction, and two reinforcing ribs are respectively welded to the diameter position of the two side walls of the hoisting rod (4), and the reinforcing rib is tangent to the hoisting plate; The hoisting rod (4) is a telescopic rod, and the diameter of the section connected to the clamping foot (5) is smaller than the diameter of the section connected to the gear (8).

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