Reaction chamber and deposition apparatus

Abstract

The application discloses a reaction cavity and a deposition device, and relates to the technical field of deposition devices. The reaction cavity comprises a cavity side wall, a communication cavity, a side-through flange and a cooling structure. The cavity side wall is provided with a first flange and a second flange at two ends respectively. The communication cavity is arranged on one side of the cavity side wall and is communicated with the reaction cavity. The side-through flange is arranged at an end of the communication cavity away from the cavity side wall. The cooling structure comprises a liquid inlet, a liquid outlet, a first cooling channel, a second cooling channel and a cooling cavity. The liquid inlet and the liquid outlet are arranged on the first flange. The first cooling channel is arranged on the side-through flange, and the liquid inlet is communicated with an inlet of the first cooling channel through a first communication pipe. The second cooling channel is arranged in the second flange, and an outlet of the first cooling channel is communicated with an inlet of the second cooling channel through a second communication pipe. The cooling cavity is arranged in the cavity side wall, the outlet of the second cooling channel is communicated with the inlet of the cooling cavity, and the outlet of the cooling cavity is communicated with the liquid outlet.

Description

Technical Field

[0001] This invention relates to the field of deposition equipment technology, and more particularly to a reaction chamber and deposition equipment. Background Technology

[0002] Deposition equipment is used to grow single-crystal or polycrystalline semiconductor thin films on wafers. During the deposition process, the chemical reaction needs to be carried out at high temperatures. The graphite disks inside the reaction chamber generate temperatures up to 1700°C and transfer heat outwards. Some of the heat is discharged through the exhaust gas, but most of the heat acts on the chamber walls, causing the chamber wall temperature to rise. Excessive chamber wall temperature can lead to structural failure of the chamber, loss of sealing effect of the sealing rings, and excessively high external ambient temperature. Therefore, a water-cooling structure needs to be installed on the outside of the chamber walls to prevent excessive heat inside the reaction chamber from affecting its working function.

[0003] Existing deposition equipment incorporates thermal insulation layers such as graphite felt or water-cooled walls in the reaction chamber to maximize the transfer of heat from the heating device to the reactant gas while simultaneously reducing the wall temperature of the reaction chamber. Water cooling structures are typically located on the top cover, side walls, and bottom plate of the chamber. For the water cooling structure on the side walls of the reaction chamber, water flow channels are arranged circumferentially, with inlets and outlets at either end, which effectively reduces the wall temperature to some extent. However, current deposition equipment incorporates automation modules, whose connection structures are located on the chamber side walls. This alters the side wall structure, obstructing the circumferential water cooling channels and creating dead zones. This reduces the effectiveness of side wall water cooling, consequently affecting the structural strength of the chamber and the sealing performance of the sealing surfaces. Furthermore, side wall water cooling only cools the chamber walls and cannot cool the connection structures of the automation modules. The flange faces of these connections also require rubber sealing rings for sealing; therefore, water cooling is necessary to ensure that the temperature at these points remains within the effective temperature range of the sealing rings. Summary of the Invention

[0004] The purpose of this invention is to provide a reaction chamber and deposition equipment that can maintain the original cooling effect when an automation module is added, ensuring the structural strength and sealing performance of the reaction chamber; at the same time, it can also ensure the cooling effect of the connection structure of the automation module.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] The reaction chamber includes a chamber sidewall, a communicating cavity, and a side-through flange. A first flange and a second flange are respectively provided at both ends of the chamber sidewall. The communicating cavity is located on one side of the chamber sidewall and communicates with the reaction chamber. The side-through flange is located at the end of the communicating cavity away from the chamber sidewall. The reaction chamber also includes a cooling structure, which includes:

[0007] The liquid inlet and liquid outlet are located on the first flange;

[0008] A first cooling channel is provided at the side flange, and the liquid inlet is connected to the inlet of the first cooling channel through a first connecting pipe;

[0009] The second cooling channel is located inside the second flange, and the outlet of the first cooling channel is connected to the inlet of the second cooling channel through the second connecting pipe.

[0010] A cooling chamber is located inside the side wall of the chamber. The outlet of the second cooling channel is connected to the inlet of the cooling chamber, and the outlet of the cooling chamber is connected to the liquid outlet.

[0011] As an alternative to the reaction chamber, the cooling chamber includes at least two flow channels, with the ends of two adjacent flow channels connected to form a serpentine flow channel.

[0012] As an optional embodiment of the reaction chamber, the cooling chamber is provided with an annular baffle. The annular baffle extends from one side of the connecting chamber along the circumferential direction of the chamber sidewall to the other side of the connecting chamber. The annular baffles are spaced apart along the axial direction of the chamber sidewall. The flow channels are formed between the first flange and the annular baffle, between adjacent annular baffles, and between the annular baffle and the second flange. In two adjacent annular baffles, one annular baffle is spaced apart from one side of the connecting chamber, and the other annular baffle is spaced apart from the other side of the connecting chamber, so that the two adjacent flow channels are connected end to end.

[0013] As an optional embodiment of the reaction chamber, multiple guide plates are spaced apart in each layer of the flow channel. Two adjacent guide plates are respectively located on opposite side walls of the flow channel, and two adjacent guide plates extend from their respective side walls toward each other.

[0014] As an optional embodiment of the reaction chamber, both the inlet and the outlet are connected to the inner cavity of the chamber sidewall. A chamber partition plate and an inlet / outlet partition plate are also provided within the inner cavity of the chamber sidewall. The chamber partition plate is located on one side of the communicating chamber and is spaced apart from the sidewall of the communicating chamber. The chamber partition plate extends from the first flange to the second flange. The inlet / outlet partition plate is located between the inlet and the outlet, extending from the first flange to the communicating chamber. The chamber partition plate and the inlet / outlet partition plate divide the inner cavity of the chamber sidewall into an inlet chamber and a cooling chamber. The inlet is connected to the inlet chamber, and the inlet chamber is connected to one end of the first communicating pipe. The outlet is connected to the cooling chamber.

[0015] As an optional embodiment of the reaction chamber, a first guide partition plate is provided in the liquid inlet chamber, and a second guide partition plate is provided in the cooling chamber. The first guide partition plate is provided corresponding to the liquid inlet and is used to guide the coolant entering the liquid inlet chamber from the liquid inlet to the first connecting pipe along a first predetermined path. The second guide partition plate is provided corresponding to the liquid outlet and is used to guide the coolant in the cooling chamber to the liquid outlet along a second predetermined path.

[0016] As an alternative to the reaction chamber, both the first guide partition plate and the second guide partition plate are L-shaped. The short arm of the L-shaped first guide partition plate is located on the side of the liquid inlet away from the inlet / outlet partition plate, and the long arm of the L-shaped first guide partition plate is opposite to the liquid inlet. A first predetermined gap is left between the end of the long arm of the L-shaped first guide partition plate away from the short arm and the inlet / outlet partition plate.

[0017] The short arm of the L-shaped second guide partition is located on the side of the liquid outlet away from the inlet / outlet partition. The long arm of the L-shaped second guide partition is opposite to the liquid outlet, and a second predetermined gap is left between the end of the long arm of the L-shaped second guide partition away from the short arm of the L-shaped second guide partition and the inlet / outlet partition.

[0018] As an alternative to the reaction chamber, the second cooling channel is provided corresponding to the side flange, and one end of the second cooling channel is connected to the second connecting pipe, and the other end is connected to the cooling chamber.

[0019] As an alternative to the reaction chamber, the second flange has an arc-shaped groove on the side away from the chamber sidewall, corresponding to the side-through flange. A sealing plate is provided on the arc-shaped groove, and the arc-shaped groove and the sealing plate together form the second cooling channel.

[0020] A deposition apparatus comprising a reaction chamber as described in any of the above embodiments.

[0021] The beneficial effects of this invention are:

[0022] The reaction chamber provided by this invention has its sidewall connected to a side flange via a connecting cavity. The side flange is used to connect an automation module, allowing the automation module to connect to and control components within the reaction chamber through the connecting cavity. A first flange and a second flange are respectively provided at both ends of the sidewall. The first flange connects to a base plate, and the second flange connects to a top cover, forming a closed cavity with the sidewall, base plate, and top cover. The cooling structure of the reaction chamber includes an inlet, an outlet, a first cooling channel, a second cooling channel, and a cooling chamber. The inlet and outlet are located on the first flange, and the first cooling channel is located on the side flange. The inlet is connected to the inlet of the first cooling channel via a first connecting pipe, allowing coolant to enter the first cooling channel through the inlet and the first connecting pipe to dissipate heat from the side flange connected to the automation module. The second cooling channel is located within the second flange, and the outlet of the first cooling channel is connected to the inlet of the second cooling channel via a second connecting pipe. Coolant in the first cooling channel enters the second cooling channel through the second connecting pipe to dissipate heat from the second flange. The cooling chamber is located within the sidewall of the chamber. The outlet of the second cooling channel is connected to the inlet of the cooling chamber, allowing the coolant in the second cooling channel to enter the cooling chamber and dissipate heat from the sidewall before flowing out through the outlet. This cooling structure of the reaction chamber enables heat dissipation from the sidewall, the first flange, the second flange, and the side-through flange, ensuring the structural strength of the sidewall and keeping the temperature of the sealing rings on the first flange, the second flange, and the side-through flange within the normal operating temperature range, thus preventing high-temperature failure of the sealing rings from affecting the sealing performance of the reaction chamber.

[0023] The deposition equipment provided by this invention, using the above-mentioned reaction chamber, can maintain the original cooling effect, ensure the structural strength and sealing performance of the reaction chamber, and also ensure the cooling effect of the side flange connected to the automation module when an automation module is added. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the reaction chamber provided in a specific embodiment of the present invention;

[0025] Figure 2 This is a schematic diagram of the structure of the hidden upper cover and bottom plate of the reaction chamber provided in a specific embodiment of the present invention;

[0026] Figure 3 This is a schematic diagram of the internal cavity of the sidewall cavity of the reaction chamber provided in a specific embodiment of the present invention;

[0027] Figure 4 yes Figure 3 A magnified view of a section at point A in the middle;

[0028] Figure 5 This is a cross-sectional view of the side-through flange provided in a specific embodiment of the present invention.

[0029] In the picture:

[0030] 1. Cavity sidewall; 2. Connecting cavity; 3. Side flange; 4. First flange; 5. Second flange; 6. Top cover; 7. Base plate; 8. First connecting pipe; 9. Second connecting pipe; 10. Plug;

[0031] 11. Flow guide plate; 12. Annular baffle; 13. Cavity partition plate; 14. Inlet and outlet partition plate; 15. First guide partition plate; 16. Second guide partition plate; 31. First cooling channel; 32. Drain port; 41. Inlet port; 42. Outlet port; 51. Arc groove; 52. Sealing plate. Detailed Implementation

[0032] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0033] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0034] This embodiment provides a deposition apparatus, which includes a reaction chamber and an automation module, such as... Figure 1 and Figure 2 As shown, the reaction chamber includes a side wall 1, a top cover 6, and a bottom plate 7. An automation module is located on one side of the reaction chamber. A first flange 4 and a second flange 5 are respectively provided at both ends of the side wall 1. A connecting cavity 2 is provided on one side of the side wall 1, which is connected to the reaction chamber. A side flange 3 is provided at the end of the connecting cavity 2 away from the side wall 1. The side wall 1 is connected to the bottom plate 7 through the first flange 4 and to the top cover 6 through the second flange 5. The side flange 3 is connected to the automation module, so that the automation module can connect to and control the components in the reaction chamber through the connecting cavity 2. Sealing rings are provided between the first flange 4 and the bottom plate 7, between the second flange 5 and the top cover 6, and between the side flange 3 and the automation module to ensure the sealing of the reaction chamber.

[0035] Specifically, the cavity sidewall 1 includes an inner sidewall cylinder and an outer sidewall cylinder. The inner sidewall cylinder is fitted inside the outer sidewall cylinder, and the inner wall of the inner sidewall cylinder is the inner wall of the reaction chamber. The inner sidewall cylinder and the outer sidewall cylinder form the inner cavity of the cavity sidewall 1. Notches are provided at corresponding positions on the inner and outer sidewall cylinders. The two notches are circumferentially connected by a connecting plate. The connecting plate extends out of the notch of the inner sidewall cylinder and connects to the side flange 3. The circumferential connecting plate encloses and forms the communicating cavity 2.

[0036] The chemical reaction inside the reaction chamber generates a high temperature of 1700℃, which will cause the temperature of the sidewall 1 of the chamber to be too high. The excessive temperature of the sidewall 1 of the chamber will affect the structural strength of the sidewall 1, causing the sealing effect of the sealing ring to fail, and will also increase the temperature of the external environment, thereby affecting the working function of the reaction chamber.

[0037] This embodiment provides a reaction chamber applied to the aforementioned deposition equipment, such as... Figures 2-5 As shown, the reaction chamber also includes a cooling structure, which includes an inlet 41, an outlet 42, a first cooling channel 31, a second cooling channel, and a cooling chamber. The inlet 41 and outlet 42 are located on the first flange 4. The first cooling channel 31 is located on the side flange 3, and the inlet 41 is connected to the inlet of the first cooling channel 31 via a first connecting pipe 8. The second cooling channel is located within the second flange 5, and the outlet of the first cooling channel 31 is connected to the inlet of the second cooling channel via a second connecting pipe 9. The cooling chamber is located within the chamber sidewall 1, and the outlet of the second cooling channel is connected to the inlet of the cooling chamber, while the outlet of the cooling chamber is connected to the outlet 42.

[0038] In the cooling structure provided in this embodiment, the coolant enters the reaction chamber through the inlet 41 of the first flange 4, enters the first cooling channel 31 of the side flange 3 through the first connecting pipe 8, then enters the second cooling channel inside the second flange 5 through the second connecting pipe 9, then enters the cooling chamber of the side wall 1, and finally exits through the outlet 42 of the first flange 4. The coolant entering the reaction chamber through the first flange 4 dissipates heat from the sealing ring between the first flange 4 and the base plate 7. It then first enters the side flange 3 to dissipate heat from the sealing ring between the side flange 3 and the automation module; then it enters the second flange 5 to dissipate heat from the sealing ring between the second flange 5 and the upper cover 6; finally, it enters the side wall 1 to dissipate heat from the side wall 1. Simultaneously, the coolant in the side wall 1 also dissipates heat from the sealing rings on the first flange 4 and the second flange 5. The cooling structure of the reaction chamber enables heat dissipation from the chamber sidewall 1, the first flange 4, the second flange 5, and the side-through flange 3, ensuring the structural strength of the chamber sidewall 1 and keeping the temperature of the sealing rings on the first flange 4, the second flange 5, and the side-through flange 3 within the normal operating temperature range, thus preventing the sealing rings from failing at high temperatures and affecting the sealing performance of the reaction chamber.

[0039] Furthermore, the cooling chamber includes at least two interconnected flow channels, with adjacent flow channels connected end-to-end to form a serpentine flow channel. This arrangement allows the coolant in the cooling chamber to circulate and flow within the serpentine flow channel, increasing the contact area and contact time between the coolant and the chamber sidewall 1, thereby improving heat exchange efficiency and resulting in better cooling performance.

[0040] Specifically, an annular baffle 12 is provided inside the cooling chamber. The annular baffle 12 extends from one side of the connecting chamber 2 along the circumferential direction of the chamber sidewall 1 to the other side of the connecting chamber 2. The annular baffles 12 are spaced apart along the axial direction of the chamber sidewall 1, and flow channels are formed between the first flange 4 and the annular baffle 12, between adjacent annular baffles 12, and between the annular baffle 12 and the second flange 5. In two adjacent annular baffles 12, one annular baffle 12 is spaced apart from one side of the connecting chamber 2, and the other annular baffle 12 is spaced apart from the other side of the connecting chamber 2, so that the two adjacent flow channels are connected end to end. With this arrangement, the cooling effect of the chamber sidewall 1 is not affected by the presence of a dead zone in the coolant due to the connection chamber 2, thus ensuring the cooling effect of the chamber sidewall 1.

[0041] In this embodiment, an annular baffle 12 is provided inside the cooling chamber to form two layers of flow channels. In other embodiments, two annular baffles 12 can be provided at intervals along the axial direction of the cavity sidewall 1 to form three layers of flow channels, depending on the height of the cavity sidewall 1. Alternatively, three or more annular baffles 12 can be provided to form four or more layers of flow channels.

[0042] Furthermore, multiple guide plates 11 are spaced apart in each flow channel. Two adjacent guide plates 11 are respectively located on opposite side walls of the flow channel, and two adjacent guide plates 11 extend from their respective side walls in a direction that approaches each other. This arrangement makes the guiding directions of two adjacent guide plates 11 opposite. The coolant in the flow channel flows under the guidance of multiple guide plates 11, forming a turbulent state, which increases the contact area between the coolant and the cavity side wall 1, and improves the cooling effect when the coolant flow rate is the same.

[0043] Specifically, such as Figures 3-5 As shown, both the inlet 41 and the outlet 42 are connected to the inner cavity of the cavity sidewall 1. The inner cavity of the cavity sidewall 1 is also provided with a cavity partition plate 13 and an inlet / outlet partition plate 14. The cavity partition plate 13 is located on one side of the connecting cavity 2 and is spaced apart from the sidewall of the connecting cavity 2. The cavity partition plate 13 extends from the first flange 4 to the second flange 5. The inlet / outlet partition plate 14 is located between the inlet 41 and the outlet 42. The inlet / outlet partition plate 14 extends from the first flange 4 to the connecting cavity 2. The cavity partition plate 13 and the inlet / outlet partition plate 14 divide the inner cavity of the cavity sidewall 1 into an inlet cavity and a cooling cavity. The inlet 41 is connected to the inlet cavity, and the inlet cavity is connected to one end of the first connecting pipe 8. The outlet 42 is connected to the cooling cavity.

[0044] In this embodiment, the first flange 4 includes an inner sleeve, the inner diameter of which is the same as the inner diameter of the outer sleeve. The inner wall of the inner sleeve, the inner wall of the outer sleeve, and the outer wall of the inner sleeve together form the inner cavity of the cavity sidewall 1. The inlet 41 and outlet 42 extend from the outer wall of the inner sleeve to the inner wall, both communicating with the inner cavity of the cavity sidewall 1. The first connecting pipe 8 and the second connecting pipe 9 are located on the same side of the connecting cavity 2. The first connecting pipe 8 connects the inner cavity of the cavity sidewall 1 to the first cooling channel 31 of the side flange 3, and the second connecting pipe 9 connects the first cooling channel 31 and the second cooling channel. A cavity partition plate 13 is located on one side of the connecting cavity 2, and a preset interval space is left between the cavity partition plate 13 and one side of the connecting cavity 2. The connection port between the first connecting pipe 8 and the inner cavity of the cavity sidewall 1 is located within this preset interval space. Since the temperature of the coolant flowing into the inner cavity of the cavity sidewall 1 from the inlet 41 is lower than the temperature of the coolant flowing into the outlet 42, in order to avoid the large temperature difference between the inlet 41 and the outlet 42 affecting the structural strength of the cavity sidewall 1 and the sealing performance of the sealing ring, the inlet 41 and the outlet 42 are separated by an inlet / outlet partition plate 14. The cavity partition plate 13 and the inlet / outlet partition plate 14 divide the inner cavity of the cavity sidewall 1 into an inlet cavity and a cooling cavity. Since the outlet 42 is to discharge the coolant that has circulated in the serpentine flow channel in the cooling cavity, the outlet 42 is located in the cooling cavity, and the inlet 41 is located in the inlet cavity. One end of the first connecting pipe 8 is connected to the inlet cavity. In other embodiments, the inlet 41 and the first connecting pipe 8 can also be connected by a hose. The coolant that enters the inner cavity of the cavity sidewall 1 from the inlet 41 enters the first connecting pipe 8 through the hose. This also achieves the same effect: the coolant flows into the first cooling channel 31 after entering from the inlet 41, and the separation between the inlet 41 and the outlet 42.

[0045] In this embodiment, the annular partition plate and the cavity partition plate 13 are spaced apart to form a communication port between the two flow channels.

[0046] To prevent dead zones from forming in the areas of the inlet 41 and outlet 42, which would affect the cooling effect, a first guide partition 15 is provided in the inlet chamber, and a second guide partition 16 is provided in the cooling chamber. The first guide partition 15 is positioned corresponding to the inlet 41 and guides the coolant entering the inlet chamber from the inlet 41 to the first connecting pipe 8 along a first predetermined path. The second guide partition 16 is positioned corresponding to the outlet 42 and guides the coolant in the cooling chamber to the outlet 42 along a second predetermined path. By setting the first guide partition 15, the coolant entering the inlet chamber through the inlet 41 flows into the first connecting pipe 8 along the first predetermined path, preventing the coolant from stagnating at a certain position in the inlet chamber and affecting the circulation of the coolant. Similarly, the second guide partition 16 allows the coolant in the cooling chamber to flow to the outlet 42 along the second predetermined path, preventing the coolant from staying near the outlet 42 for too long and being unable to be discharged. The first set path is a path formed along the extension direction of the first guide partition 15, and the second set path is a path formed along the extension direction of the second guide partition 16.

[0047] Specifically, both the first guide partition 15 and the second guide partition 16 are L-shaped. The short arm of the L-shaped first guide partition 15 is located on the side of the liquid inlet 41 away from the inlet / outlet partition 14. The long arm of the L-shaped first guide partition 15 is opposite to the liquid inlet 41, and a first predetermined gap is left between the end of the long arm of the L-shaped first guide partition 15 away from the short arm and the inlet / outlet partition 14. In this embodiment, after the coolant enters the cooling chamber from the liquid inlet 41, the first predetermined path is to flow along the inner side of the short arm of the L-shaped first guide partition 15 to the inner side of the long arm of the L-shaped first guide partition 15, then along the inner side of the long arm of the L-shaped first guide partition 15 to the inlet / outlet partition 14. After being blocked by the inlet / outlet partition 14, it flows out from the first predetermined gap and then along the outer side of the long arm of the L-shaped first guide partition 15 to the communication port between the first connecting pipe 8 and the liquid inlet chamber.

[0048] The short arm of the L-shaped second guide partition 16 is located on the side of the outlet 42 away from the inlet / outlet partition 14. The long arm of the L-shaped second guide partition 16 is positioned opposite the outlet 42, and a second predetermined gap is left between the end of the long arm of the L-shaped second guide partition 16 away from the short arm and the inlet / outlet partition 14. The coolant circulated in the cooling chamber flows to the outlet 42 along the second predetermined path. The second predetermined path is as follows: first, it flows along the outside of the long arm of the L-shaped second guide partition 16 to the inlet / outlet partition 14, then enters the inside of the long arm of the L-shaped second guide partition 16 through the second predetermined gap, and then flows along the inside of the long arm of the L-shaped second guide partition 16 to the outlet 42 located near the short arm of the L-shaped second guide partition 16.

[0049] Of course, in other embodiments, the first guide partition 15 and the second guide partition 16 may both be configured as two guide plates arranged at an angle, which may be an acute angle or an obtuse angle.

[0050] like Figure 5 As shown, the first cooling channel 31 is arranged circumferentially along the side flange 3, and the first cooling channel 31 is interrupted in the middle. One end of the first cooling channel 31 is set as an inlet, which is connected to the first connecting pipe 8; the other end is set as an outlet, which is connected to the second connecting pipe 9. Since the first cooling channel 31 is interrupted in the middle, in order to prevent the liquid accumulated at both ends of the first cooling channel 31 from being unable to drain, two drain ports 32 are provided at the top of the side flange 3, which are connected to the corners of the first cooling channel 31. The drain ports 32 are sealed by plugs 10. When liquid accumulates in the first cooling channel 31, the plugs 10 are removed, and the liquid is drained through the two drain ports 32.

[0051] Furthermore, continue to refer to Figure 2 and Figure 3 The second cooling channel is provided corresponding to the side flange 3, with one end connected to the second connecting pipe 9 and the other end connected to the cooling chamber. The second cooling channel allows coolant to flow into the side flange 3 connected to the automation module, dissipating heat from the sealing ring on the side flange 3; at the same time, the first cooling channel 31 can be connected to the cooling chamber through the second connecting pipe 9 and the second cooling channel, allowing coolant to flow from the side flange 3 to the second flange 5 and then into the chamber sidewall 1, realizing the circulation of coolant in the reaction chamber.

[0052] Specifically, an arc-shaped groove 51 is provided on the side of the second flange 5 away from the cavity sidewall 1, corresponding to the side-through flange 3. A sealing plate 52 is provided on the arc-shaped groove 51, and the arc-shaped groove 51 and the sealing plate 52 together form a second cooling channel. By forming a second cooling channel by opening an arc-shaped groove 51 on the sealing surface of the second flange 5 and the upper cover 6, the cooling effect of the sealing ring on the second flange 5 is improved.

[0053] To ensure sufficient coolant in the reaction chamber, the areas of the inlet 41 and outlet 42 can be appropriately increased to reduce friction resistance. Furthermore, the distance between the inlet 41 and outlet 42 should be as small as possible, provided there is sufficient installation space for their connection to the piping. This reduces the length of the long arm of the first guide partition 15 and the long arm of the second guide partition 16, further decreasing friction resistance during coolant flow.

[0054] In this embodiment, the connection between the sealing plate 52 and the second flange 5, and the connection between the first connecting pipe 8 and the second connecting pipe 9 and the side wall outer cylinder and the side flange 3 are all welded.

[0055] The above description is only a preferred embodiment of the present invention. For those skilled in the art, there will be changes in the specific implementation and application scope based on the ideas of the present invention. The content of this specification should not be construed as a limitation of the present invention.

Claims

1. A reaction chamber, comprising a sidewall (1), a connecting cavity (2), and a side flange (3), wherein a first flange (4) and a second flange (5) are respectively provided at both ends of the sidewall (1), the connecting cavity (2) is located on one side of the sidewall (1) and communicates with the reaction chamber, and the side flange (3) is located at the end of the connecting cavity (2) away from the sidewall (1), the side flange (3) is connected to an automation module, enabling the automation module to connect to and control components within the reaction chamber through the connecting cavity (2), and a sealing ring is provided between the side flange (3) and the automation module, characterized in that, The reaction chamber further includes a cooling structure, which comprises: The inlet (41) and outlet (42) are located on the first flange (4); The first cooling channel (31) is provided on the side flange (3), and the liquid inlet (41) is connected to the inlet of the first cooling channel (31) through the first connecting pipe (8); The second cooling channel is located inside the second flange (5), and the outlet of the first cooling channel (31) is connected to the inlet of the second cooling channel through the second connecting pipe (9); A cooling chamber is provided inside the side wall (1) of the chamber. The outlet of the second cooling channel is connected to the inlet of the cooling chamber, and the outlet of the cooling chamber is connected to the liquid outlet (42). The second cooling channel is provided corresponding to the side flange (3), and one end of the second cooling channel is connected to the second connecting pipe (9), and the other end is connected to the cooling chamber. The inner cavity of the cavity sidewall (1) is further provided with a cavity partition plate (13) and an inlet / outlet partition plate (14). The cavity partition plate (13) and the inlet / outlet partition plate (14) divide the inner cavity of the cavity sidewall (1) into a liquid inlet cavity and a cooling cavity. The liquid inlet (41) is connected to the liquid inlet cavity, and the liquid inlet cavity is connected to one end of the first connecting pipe (8). The liquid outlet (42) is connected to the cooling cavity. All are connected to the inner cavity of the cavity sidewall (1). The cavity partition plate (13) is located on one side of the communicating cavity (2) and is spaced apart from the sidewall of the communicating cavity (2). The cavity partition plate (13) extends from the first flange (4) to the second flange (5). The inlet and outlet partition plate (14) is located between the liquid inlet (41) and the liquid outlet (42). The inlet and outlet partition plate (14) extends from the first flange (4) to the communicating cavity (2). A first guide partition plate (15) is provided in the liquid inlet chamber, and a second guide partition plate (16) is provided in the cooling chamber. The first guide partition plate (15) is provided corresponding to the liquid inlet (41) and is used to guide the coolant entering the liquid inlet chamber from the liquid inlet (41) to the first connecting pipe (8) along a first predetermined path. The second guide partition plate (16) is provided corresponding to the liquid outlet (42) and is used to guide the coolant in the cooling chamber to the liquid outlet (42) along a second predetermined path.

2. The reaction chamber according to claim 1, characterized in that, The cooling chamber includes at least two flow channels, and the ends of two adjacent flow channels are connected to form a serpentine flow channel.

3. The reaction chamber according to claim 2, characterized in that, The cooling chamber is provided with an annular partition (12). The annular partition (12) extends from one side of the connecting chamber (2) along the circumferential direction of the sidewall (1) to the other side of the connecting chamber (2). The annular partition (12) is spaced apart along the axial direction of the sidewall (1). The flow channel is formed between the first flange (4) and the annular partition (12), between adjacent annular partitions (12), and between the annular partition (12) and the second flange (5). Among two adjacent annular partitions (12), one annular partition (12) is spaced apart from one side of the connecting chamber (2), and the other annular partition (12) is spaced apart from the other side of the connecting chamber (2), so that the two adjacent flow channels are connected end to end.

4. The reaction chamber according to claim 3, characterized in that, Each layer of the flow channel is provided with a plurality of guide plates (11) spaced apart. Two adjacent guide plates (11) are respectively located on opposite side walls of the flow channel, and two adjacent guide plates (11) extend from their respective side walls toward each other.

5. The reaction chamber according to claim 1, characterized in that, Both the first guide partition plate (15) and the second guide partition plate (16) are L-shaped. The short arm of the L-shaped first guide partition plate (15) is located on the side of the liquid inlet (41) away from the inlet / outlet partition plate (14). The long arm of the L-shaped first guide partition plate (15) is opposite to the liquid inlet (41). A first set gap is left between the end of the long arm of the L-shaped first guide partition plate (15) away from the short arm of the L-shaped first guide partition plate (15) and the inlet / outlet partition plate (14). The short arm of the L-shaped second guide partition (16) is located on the side of the outlet (42) away from the inlet / outlet partition (14). The long arm of the L-shaped second guide partition (16) is opposite to the outlet (42), and a second set gap is left between the end of the long arm of the L-shaped second guide partition (16) away from the short arm of the L-shaped second guide partition (16) and the inlet / outlet partition (14).

6. The reaction chamber according to claim 1, characterized in that, The second flange (5) has an arc-shaped groove (51) on the side away from the cavity sidewall (1) corresponding to the side-through flange (3). The arc-shaped groove (51) is covered with a sealing plate (52). The arc-shaped groove (51) and the sealing plate (52) together form the second cooling channel.

7. A deposition apparatus, characterized in that, Includes the reaction chamber as described in any one of claims 1-6.

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