Cold water table adaptive adjustment mechanism, microwave plasma equipment and use method thereof

Abstract

The invention discloses a cooling table adaptive adjustment mechanism, a microwave plasma device and a method for using the same. The cooling table comprises a cylindrical cavity with an opening on the upper surface, a primary lifting mechanism for controlling the height of the cooling table is arranged at the bottom of the cooling table, a fine adjustment mechanism for realizing vertical lifting is arranged in the cooling table cavity, a steering mechanism for angle adjustment is arranged above the fine adjustment mechanism, and a clamping mechanism is fixedly arranged above the steering mechanism. The invention can timely adjust the deposition plate temperature and deposition position required by the deposition, so as to avoid the problems of poor deposition quality and uneven thickness caused subsequently.

Description

Technical Field

[0001] The invention belongs to the technical field of microwave plasma equipment, and in particular relates to a cold water table self-adaptive adjustment mechanism, microwave plasma equipment and a use method thereof. Background Art

[0002] Microwave plasma equipment is a process device that uses microwave energy to achieve chemical vapor deposition. Its principle is that microwaves resonate with the input gas in the plasma cavity, forming a strong electromagnetic field center area, ionizing the gas to form plasma, and then forming solid material deposition on the surface of the deposition plate to obtain the desired deposit, which is generally a non-metallic material such as diamond.

[0003] Among them, the comparative document CN201811252049.0 discloses a microwave plasma CVD device and a method for synthesizing diamond using the same, which mainly solves the following problems: "The existing microwave plasma equipment has a short continuous deposition time, which is easy to bring impurities to the crystallization of the deposit, affecting the subsequent quality". However, with the widespread use of microwave plasma equipment, the following new problems have arisen: 1. The double cooling setting of the outer water-cooling jacket and the inner water-cooling table, the temperature change of the deposition plate brought about by the joint action of the two cannot be finely controlled, and when the temperature of the deposition plate needs to be further changed during the growth of the deposit, it cannot be adjusted accordingly, making it difficult to ensure the quality of the subsequent deposit; 2. In a long-term growth environment, when the thickness of the deposit changes, in order to meet the thickness of different growth surfaces, the specific adaptation angle of the excitation probe alone has certain limitations. When the thickness of the deposit is uneven, it cannot be further processed, which also affects the quality of subsequent products. In order to solve the above two problems for microwave plasma equipment, practitioners have designed a cold water table adaptive adjustment mechanism, a microwave plasma device and a method of using the same. Summary of the invention

[0004] The purpose of the present invention is to provide a cold water table adaptive adjustment mechanism, microwave plasma equipment and a method of using the same in order to solve the problems that the growth of deposits in microwave plasma equipment requires the temperature change of the deposition plate to be unable to be adaptively adjusted and the limited deposition position easily causes uneven deposition, thus affecting the subsequent quality.

[0005] The present invention achieves the above-mentioned purpose through the following technical solutions: a self-adaptive adjustment mechanism for a cold water table, comprising a cold water table, the cold water table being a cylindrical cavity with an opening on the upper surface, a primary lifting mechanism for controlling its height being arranged at the bottom of the cold water table, a fine adjustment mechanism for realizing vertical lifting and lowering being arranged in the cavity of the cold water table, a steering mechanism for angle adjustment being arranged above the fine adjustment mechanism, and a clamping mechanism being fixedly arranged above the steering mechanism.

[0006] Furthermore, the cold water table adopts a hollow side wall setting.

[0007] Furthermore, the primary lifting mechanism includes a primary lifting base, a triangular mounting groove is provided above the primary lifting base, mounting base plates are provided at the corners of the mounting grooves, lifting cylinders are rotatably provided on the mounting base plates, a first rotating member is provided on the telescopic rod of the lifting cylinder, a second rotating member cooperating therewith is provided on the first rotating member, the second rotating member is fixedly provided at the bottom of the cold water table, two groups of follower cylinder assemblies are provided between the primary lifting base and the cold water table, water inlet pipes and water outlet pipes are respectively provided on the side walls of the primary lifting base, the water inlet pipes and the water outlet pipes are respectively connected with the two groups of follower cylinder assemblies, and the follower cylinder assembly is connected with the side walls of the cold water table.

[0008] Furthermore, the follower cylinder assembly comprises a fixed base cylinder, the follower cylinder is sleeved in the fixed base cylinder, and a sealing ring is arranged between the fixed base cylinder and the follower cylinder.

[0009] Furthermore, the fine adjustment mechanism includes a driving motor arranged inside the cavity, a transmission screw is arranged on the rotating shaft of the driving motor through a coupling, a limit block is arranged on the end of the transmission screw, a ball nut base is driven on the transmission screw, a driving plate is arranged on the outer fixed sleeve of the ball nut base, auxiliary wheels are arranged at the corners of the driving plate, a guide channel steel matching the auxiliary wheels is vertically arranged on the inner wall of the cold water table cavity, two groups of heightening rods are arranged above the driving plate, and a first follow-up mounting base plate is arranged above the two groups of heightening rods.

[0010] Furthermore, the fine adjustment mechanism includes an adjusting bottom cylinder arranged in the cold water table cavity, a through groove is opened on the side wall of the adjusting bottom cylinder, a gear column is arranged inside the adjusting bottom cylinder cavity, a second follow-up mounting base plate is arranged on the top of the gear column, a raising platform is arranged on one side of the adjusting bottom cylinder, a bearing seat is arranged on the side wall of the raising platform, a synchronous shaft is sleeved in the bearing seat, a first gear and a second gear are respectively arranged at both ends of the synchronous shaft, the first gear is matched with the gear column through the through groove, a rotating motor is arranged on one side of the raising platform, a third gear is arranged on the rotating shaft of the rotating motor, and the third gear is matched with the second gear.

[0011] Furthermore, the steering mechanism includes a hollow rotating platform fixedly mounted on the first follower mounting base plate, a support member is arranged on the rotating axis of the hollow rotating platform, the support member is arranged in a "V" shape, support platforms are respectively arranged at both ends of the upper surface of the support member, a steering platform is arranged between the two groups of support platforms, and a rotating motor for controlling the flipping of the steering platform is arranged on one side of one group of support platforms.

[0012] Furthermore, the clamping mechanism comprises a clamping base plate arranged on the upper surface of the steering platform, and support arm assemblies are rotatably arranged at four corners of the clamping base plate, and limit bolts are arranged at the ends of the support arm assemblies through threaded connection;

[0013] The support arm assembly comprises a support arm body, an extension arm is sleeved inside the support arm body, a tension spring is arranged between the support arm body and the extension arm, and the limiting bolt is arranged at the end of the extension arm.

[0014] Microwave plasma equipment, including a plasma equipment body, a deposition plate and a cold water table adaptive adjustment mechanism;

[0015] A compartment cover is drivenly provided above the plasma equipment body, an excitation probe is provided at the bottom of the compartment cover, the excitation probe is placed in the cavity of the plasma equipment body, a temperature sensor is provided on one side of the excitation probe, a partition plate is provided on the inner wall of the cavity of the plasma equipment body, the primary lifting mechanism is placed at the bottom of the cavity of the plasma equipment body, the cold water table cooperates with the partition plate, the deposition plate is placed on the clamping mechanism, wherein a plurality of air inlets are evenly distributed on the side wall above the plasma equipment body, and a plurality of microwave windows are provided below the air inlets.

[0016] The method for using the microwave plasma cooling water table for adaptive adjustment comprises the following steps:

[0017] S01: Before work, the plasma equipment body is preset first, and the appropriate deposition plate is selected according to the amount of sediment to be cultured, and the deposition plate is placed on the clamping mechanism. The clamping mechanism realizes size adjustment by pulling the extension arm, and the outer edge of the deposition plate is clamped by the elastic deformation of the tension spring, and then the limit bolt is screwed to limit the position of the deposition plate to prevent shaking. After the deposition plate is placed, the overall sealing of the equipment is ensured by driving the bin cover, and the excitation probe is finely adjusted to be placed directly above the deposition plate. Then, the lifting cylinder is started, and the overall height of the cold water table is changed during the advancement of its telescopic rod, so that the deposition plate is preset to the best matching position with the excitation probe. During the movement of the cold water table, the side wall is fitted with the partition plate to ensure the culture sealing of the cavity above the plasma equipment body. Finally, the air inlet is connected to the air supply pipe, the water inlet pipe is connected to the cold water pipe, and the water outlet pipe is connected to the drain.

[0018] S02: During operation, a first gas raw material is delivered to the main cavity of the plasma equipment through the gas inlet. After reaching a certain amount, the excitation probe is started and microwaves are delivered from the microwave window. When the microwave window is set on the side wall, axisymmetric input is required to avoid that the microwave shape inside the cavity fails to reach the resonance condition, resulting in failure to generate plasma or asymmetric generation. Then, a second gas raw material is delivered. At this time, the two gas raw materials begin to generate deposits on the deposition plate under the action of the excitation probe and microwaves.

[0019] S03: During the working process, when the thickness of the deposit is uneven, the hollow rotating platform of the steering mechanism is started to drive the deposition plate to rotate, and the action position of the excitation probe is adjusted to ensure the thickness. In the process, the rotating motor can be further started to drive the deposition plate to make fine adjustments, so as to reach some positions where deposition is not possible to ensure the thickness;

[0020] S04: During operation, when the temperature sensor detects that the temperature of the deposition plate needs to be further adjusted, the drive motor starts and rotates the transmission screw, and the transmission screw acts on the ball nut base. The ball nut base produces a displacement on the vertical plane under the cooperation of the auxiliary wheel and the guide channel steel, thereby driving the deposition plate to shrink into the cavity of the cold water table. Under the action of the inner wall water circulation, the temperature in the cavity of the cold water table changes with the depth, thereby further affecting the surface temperature of the deposition plate, ensuring that the deposition plate is displaced to the optimal cultivation position under the detection of the temperature sensor;

[0021] S05: After the work is completed, the corresponding equipment, gas delivery and water cooling parts are disconnected, the lifting cylinder is started again, the deposition plate is sent to the top, and then the bin cover is started to open and the deposition plate is removed from the clamping mechanism.

[0022] Beneficial effects: The invention has reasonable design, simple and stable structure, strong practicability, and has the following beneficial effects:

[0023] 1. The side wall of the cold water table is hollow, which can ensure the basic circulation of cold water passing through it, so as to reduce the temperature inside the cavity, thereby ensuring that the deposition plate will act accordingly when the position changes;

[0024] 2. The setting of the primary lifting mechanism can make preliminary adjustments to the height of the cold water table to adjust it to the best matching position with the excitation probe, or drive the cold water table to move to the highest position to facilitate the loading and unloading of the deposition plate;

[0025] 3. The fine adjustment mechanism can interact with the temperature sensor to adjust the height of the sediment adaptively during its growth, so that the sediment deposition position can be changed in the cold water table cavity;

[0026] 4. The setting of the steering mechanism can drive the deposition plate to flip at a certain angle, so that it can be adapted to the excitation probe and rotate to some positions where deposition is impossible, ensuring uniform thickness of the deposition;

[0027] 5. The setting of the clamping mechanism can be quickly adjusted to adapt it to the placement of deposition plates of different specifications, so as to avoid the deposition plate from tipping over during the operation of the steering mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 is a schematic diagram of the present invention;

[0029] Figure 2 It is a structural schematic diagram of the cold water table of the present invention;

[0030] Figure 3 This is a schematic diagram of the bottom structure of the cold water table of the present invention;

[0031] Figure 4 It is a structural schematic diagram of the follower cylinder assembly of the present invention;

[0032] Figure 5 It is a structural schematic diagram of the fine adjustment mechanism of the present invention;

[0033] Figure 6 It is a structural schematic diagram of the steering mechanism of the present invention;

[0034] Figure 7 It is a structural schematic diagram of the clamping mechanism of the present invention;

[0035] Figure 8 It is a structural schematic diagram of the support arm assembly of the present invention;

[0036] Fig. 9 This is a schematic diagram of the installation structure of the second embodiment of the present invention;

[0037] Fig.10 This is a schematic diagram of the structure of Embodiment 2 of the present invention;

[0038] Fig.11 This is a schematic diagram of the structure of the bottom cylinder adjustment part of the present invention;

[0039] Fig.12 It is a structural schematic diagram of the existing microwave plasma equipment of the present invention;

[0040] Fig.13 It is a schematic diagram of the working internal data of the existing microwave plasma equipment of the present invention.

[0041] In the figure: 1-cold water table, 2-primary lifting mechanism, 3-fine adjustment mechanism, 4-steering mechanism, 5-clamping mechanism, 6-plasma equipment body, 7-deposition plate, 8-bin cover, 9-excitation probe, 10-temperature sensor, 11-partition plate, 12-air inlet, 13-microwave window, 14-growth material;

[0042] 201-primary lifting base, 202-mounting groove, 203-mounting base plate, 204-lifting cylinder, 205-first rotating member, 206-second rotating member, 207-follower cylinder assembly, 208-water inlet pipe, 209-water outlet pipe, 2010-primary base, 2011-primary adjustment motor, 2012-primary adjustment screw rod, 2013-primary ball nut base, 2014-primary follower plate, 2015-primary guide rod;

[0043] 2071-fixed bottom cylinder, 2072-follower cylinder, 2073-sealing ring;

[0044] 301-driving motor, 302-transmission screw, 303-limiting block, 304-ball nut base, 305-driving plate, 306-auxiliary wheel, 307-guide channel steel, 308-heightening rod, 309-first follow-up mounting base plate, 3010-adjusting base cylinder, 3011-tooth column, 3012-second follow-up mounting base plate, 3013-heightening platform, 3014-bearing seat, 3015-synchronous shaft, 3016-first gear, 3017-second gear, 3018-rotating motor, 3019-third gear, 3020-fine adjustment motor, 3021-built-in rod, 3022-cold water platform;

[0045] 401-hollow rotating platform, 402-supporting member, 403-supporting platform, 404-steering platform, 405-rotating motor;

[0046] 501-clamping base plate, 502-support arm assembly, 503-limiting bolt;

[0047] 5021-support arm body, 5022-extension arm, 5023-tension spring. DETAILED DESCRIPTION

[0048] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0049] An existing microwave plasma device, see Fig.12 As shown, the primary lifting mechanism 2 and the fine adjustment mechanism 3 mainly used to control the cold water table 1 are arranged at the outer bottom of the plasma equipment body 6;

[0050] The primary lifting mechanism 2 in the device includes a primary base 2010, a primary adjusting motor 2011 is arranged in the cavity of the primary base 2010, a primary adjusting screw 2012 is arranged on the rotating shaft of the primary adjusting motor 2011 through a coupling, a primary ball nut base 2013 is sleeved on the primary adjusting screw 2012, a primary follower plate 214 is arranged on the outer side of the primary ball nut base 213, and a primary guide rod 215 is also arranged on the primary follower plate 2014. The ends of the primary adjusting screw 2012 and the primary guide rod 2015 of the mechanism are provided with contraction parts to ensure that the overall height changes accordingly;

[0051] The fine adjustment end of the fine adjustment mechanism 3 is arranged in the cavity of the plasma device body 6, and the mechanism includes a fine adjustment motor 3020 arranged in the cavity of the primary base 2010, and a built-in rod 3021 is arranged on the telescopic rod of the fine adjustment motor 3020, and a cold water platform 3022 is arranged at the end of the built-in rod 3021;

[0052] The existing microwave plasma equipment can ensure the environment in the working cavity, and when the device is in operation, microwaves are introduced into the cavity where the electromagnetic energy is large enough to form plasma. The impedance matching the plasma cavity can be improved through two-stage adjustment to maximize the absorption of microwaves, so that the generated plasma is far from the side wall components. At the same time, the contact between the plasma and the deposition plate 7 can be maximized by changing a certain height of the cold water table 1, changing the energy density of the plasma or maintaining the relative position of the deposition plate 7 and the plasma during growth, so as to ensure the continuity of the quality of the diamond crystal. However, in this device, the position of the deposition plate 7 is fixed and difficult to be finely adjusted. In addition, the adjustment mechanism involved is difficult to solve some more subtle problems compared with the microwave plasma device in the embodiment of the present application.

[0053] Embodiment 1:

[0054] Combination Figures 1 to 4The self-adaptive adjustment mechanism of the cold water table shown includes a cold water table 1. The cold water table 1 is a cylindrical cavity with an opening on the upper surface. The cylindrical cavity is convenient for placing some subsequent mechanisms in its cavity and for creating a lower environment in the cavity, thereby affecting the deposition plate 7. A primary lifting mechanism 2 for controlling its height is provided at the bottom of the cold water table 1. The mechanism can perform preliminary height adjustment on the cold water table 1 so that it reaches the best matching position with the excitation probe 9. A fine adjustment mechanism 3 for realizing vertical surface lifting is provided in the cavity of the cold water table 1. The mechanism is used for fine height adjustment of the deposition plate 7 so that it can adapt to the change of the temperature environment required by the deposition. A steering mechanism 4 for angle adjustment is provided above the fine adjustment mechanism 3. The mechanism can drive the deposition plate 7 to flip at a certain angle so that it can adapt to the rotation of the excitation probe 9 to some positions where deposition cannot be performed. A clamping mechanism 5 is fixedly provided above the steering mechanism 4. The mechanism can adapt to the placement of deposition plates 7 of different specifications.

[0055] In this embodiment, the cold water table 1 adopts a hollow side wall configuration, which can ensure the basic circulation of subsequent cold water passing through the interior thereof, and the temperature inside the cavity thereof is reduced accordingly and maintained at a certain balance.

[0056] In this embodiment, refer to Figure 2-3 The primary lifting mechanism 2 shown includes a primary lifting base 201. The primary lifting base 201 is cylindrical and can be placed on the plasma equipment body 6 without interference. A triangular mounting groove 202 is provided on the primary lifting base 201. The corners of the mounting groove 202 are provided with mounting substrates 203. The provision of the mounting groove 202 can facilitate the installation of the mounting substrate 203 and the replacement of the lifting cylinder 204 when it is damaged. The mounting substrate 203 is rotatably provided with a lifting cylinder 204. The lifting cylinder 204 ensures a follow-up state to avoid jamming during operation. The telescopic rod of the lifting cylinder 204 is provided with a first rotating member 205, and the first rotating member 205 is provided with a second rotating member 206 that cooperates with it. , the second rotating member 206 is fixedly arranged at the bottom of the cold water table 1. The cooperation between the first rotating member 205 and the second rotating member 206 is also to avoid the lifting cylinder 204 from getting stuck during the operation process. Two groups of follower cylinder assemblies 207 are arranged between the primary lifting base 201 and the cold water table 1. The follower cylinder assembly 207 can ensure that it does not affect the overall lifting of the device. The side walls of the primary lifting base 201 are respectively provided with an inlet pipe 208 and an outlet pipe 209. The inlet pipe 208 and the outlet pipe 209 are respectively connected with the two groups of follower cylinder assemblies 207. The follower cylinder assembly 207 is connected with the side wall of the cold water table 1. This arrangement can ensure the basic circulation of the water cooling part after the external water source is connected, thereby ensuring the temperature balance inside the cavity of the cold water table 1.

[0057] In this embodiment, refer to Figure 4The follower cylinder assembly 207 shown includes a fixed bottom cylinder 2071, in which a follower cylinder 2072 is sleeved, and a sealing ring 2073 is provided between the fixed bottom cylinder 2071 and the follower cylinder 2072. The follower cylinder 2072 can move telescopically within the fixed bottom cylinder 2071 to ensure that the follower cylinder assembly 207 can operate along with the change in height of the cold water table 1. At the same time, the sealing ring 2073 ensures the sealing between the two to avoid leakage after subsequent water flow.

[0058] In this embodiment, refer to Figure 5 The fine adjustment mechanism 3 shown includes a driving motor 301 arranged inside the cavity, a transmission screw 302 is arranged on the rotating shaft of the driving motor 301 through a coupling, a limit block 303 is arranged at the end of the transmission screw 302, a ball nut base 304 is arranged on the transmission screw 302, a driving plate 305 is arranged on the outer fixed sleeve of the ball nut base 304, and auxiliary wheels 306 are arranged at the corners of the driving plate 305, and a guide channel steel 307 matched with the auxiliary wheel 306 is arranged vertically on the inner wall of the cavity of the cold water table 1. This setting method starts the driving motor 301, and then Under the action, the transmission screw 302 is rotated, and then the transmission screw 302 rotates and interacts with the ball nut base 304. At this time, due to the interaction between the auxiliary wheel 306 and the guide channel steel 307, the ball nut base 304 is prevented from idling, ensuring its operation on the vertical plane. The operation process drives the driving plate 305 to be displaced. Two groups of cushion rods 308 are arranged above the driving plate 305, and a first follow-up mounting base plate 309 is arranged above the two groups of cushion rods 308. Therefore, the first follow-up mounting base plate 309 is also displaced, thereby driving the deposition plate 7 arranged above it to be displaced.

[0059] In this embodiment, refer to Figure 6 The steering mechanism 4 shown includes a hollow rotating platform 401 fixedly arranged on the first follower mounting base plate 309. The hollow rotating platform 401 can ensure basic driving while lowering the height of the steering mechanism 4. A support member 402 is arranged on the rotating axis of the hollow rotating platform 401. The support member 402 is arranged in a "V" shape. The "V" shape can avoid interference during the flipping of the steering platform 404. Support platforms 403 are respectively arranged at both ends of the upper surface of the support member 402. A steering platform 404 is arranged between the two groups of support platforms 403. A rotating motor 405 for controlling the flipping of the steering platform 404 is arranged on one side of one group of support platforms 403. The cooperation between the hollow rotating platform 401 and the rotating motor 405 is utilized to drive the steering platform 404 to achieve some special angles of the coordinated excitation probe 9.

[0060] In this embodiment, refer to Figure 7-8The clamping mechanism 5 shown includes a clamping base plate 501 arranged on the upper surface of the turning platform 404, and the four corners of the clamping base plate 501 are rotatably provided with support arm assemblies 502, and the support arm assembly 502 is an adjustable component, so that it can be adapted to the placement of deposition plates 7 of different specifications, and the end of the support arm assembly 502 is provided with a limit bolt 503 through a threaded connection, and the deposition plate 7 can be quickly adjusted and clamped by simply screwing the limit bolt 503;

[0061] The support arm assembly 502 includes a support arm body 5021, an extension arm 5022 is sleeved in the support arm body 5021, a tension spring 5023 is arranged between the support arm body 5021 and the extension arm 5022, and a limiting bolt 503 is arranged at the end of the extension arm 5022. This arrangement can easily achieve adaptation to deposition plates 7 of different specifications by simply pulling the extension size of the extension arm 5022 and then elastically deforming the tension spring 5023.

[0062] The microwave plasma device comprises a plasma device body 6, a deposition plate 7 and a cold water table adaptive adjustment mechanism;

[0063] A bin cover 8 is driven and arranged above the plasma equipment body 6. The driving arrangement facilitates the opening of the bin cover 8 and ensures the sealing effect after it is driven and closed. An excitation probe 9 is arranged at the bottom of the bin cover 8. The excitation probe 9 can perform some subtle angle adjustments. The excitation probe 9 is placed in the cavity of the plasma equipment body 6. A temperature sensor 10 is arranged on one side of the excitation probe 9. The temperature sensor 10 is used to monitor the temperature of the surface of the cavity deposition plate 7, and to give a feedback to the terminal when the deposit requires a certain temperature change. The terminal starts the subtle adjustment mechanism 3 to make it self-adjustable. A partition plate 11 is arranged on the inner wall of the cavity of the plasma equipment body 6, and the primary lifting mechanism 2 is placed at the bottom of the cavity of the plasma equipment body 6. The cold water table 1 cooperates with the partition plate 11. This arrangement can ensure that under the action of the partition plate 11, etc. The ion device body 6 forms two cavities, the upper end of which is the cultivation cavity, and the lower end is the installation position of the primary lifting mechanism 2, and the partition plate 11 is in contact with the side wall of the cold water table 1, which can ensure the sealing of the upper end cultivation cavity. The deposition plate 7 is placed on the clamping mechanism 5 to ensure that it can be adjusted in position and angle with the mechanism. Among them, a number of air inlets 12 are evenly distributed on the upper side wall of the plasma device body 6, and a number of microwave windows 13 are arranged below the air inlet 12 to ensure that the microwave window 13 emits microwaves like the cavity of the plasma device body 6, and resonates with the gas injected from the air inlet 12 under the action of the excitation probe 9, forming a strong electromagnetic field center area, ionizing the gas to form plasma, and then forming solid matter deposition on the surface of the deposition plate 7, thereby obtaining the desired sediment.

[0064] The method for using the microwave plasma cooling water table adaptive adjustment includes the following steps:

[0065] S01: Before work, the plasma equipment body 6 is preset first, and a suitable deposition plate 7 is selected according to the amount of sediment to be cultured, and the deposition plate 7 is placed on the clamping mechanism 5. The clamping mechanism 5 realizes size adjustment by pulling out the extension arm 5022, and the outer edge of the deposition plate 7 is clamped by the elastic deformation of the tension spring 5023, and then the limit bolt 503 is screwed to limit the position of the deposition plate 7 to prevent shaking. After the deposition plate 7 is placed, the overall sealing of the equipment is ensured by driving the compartment cover 8, and the excitation probe 9 is finely adjusted to be placed directly above the deposition plate 7. Then, the lifting cylinder 204 is started, and the overall height of the cold water table 1 is changed during the advancement of its telescopic rod, so that the deposition plate 7 is preset to the best matching position with the excitation probe 9. During the movement of the cold water table 1, the side wall and the partition plate 11 are fitted to ensure the culture sealing of the cavity above the plasma equipment body 6. Finally, the air inlet 12 is externally connected to the air supply pipeline, the water inlet pipeline 208 is externally connected to the cold water pipeline, and the water outlet pipeline 209 is externally connected to the drainage outlet;

[0066] S02: During the working process, the first gas raw material is delivered to the cavity of the plasma equipment body 6 through the gas inlet 12. After reaching a certain amount, the excitation probe 9 is started and microwaves are delivered from the microwave window 13. When the microwave window 13 is set on the side wall, it needs to be input axially symmetrically to avoid the microwave shape in the cavity not reaching the resonance condition, resulting in the failure to generate plasma or asymmetric generation. Then the second gas raw material is delivered. At this time, the two gas raw materials begin to generate deposits on the deposition plate 7 under the action of the excitation probe 9 and microwaves;

[0067] S03: During the working process, when the thickness of the deposit is uneven, the hollow rotating platform 401 of the steering mechanism 4 is started to drive the deposition plate 7 to rotate, and the action position of the excitation probe 9 is adjusted to ensure the thickness. In the process, the rotating motor 405 can be further started to drive the deposition plate 7 to make fine adjustments, so as to reach some positions where deposition is not possible to ensure the thickness;

[0068] S04: During the working process, when the temperature sensor 10 detects that the temperature of the deposition plate 7 needs to be further adjusted, the driving motor 301 is started and rotates the transmission screw 302, and the transmission screw 302 interacts with the ball nut base 304. The ball nut base 304 produces a displacement on the vertical plane under the cooperation of the auxiliary wheel 306 and the guide channel steel 307, thereby driving the deposition plate 7 to shrink into the cavity of the cold water table 1. Under the action of the inner wall water circulation of the cold water table 1, the temperature in the cavity changes with the depth, thereby further affecting the surface temperature of the deposition plate 7, ensuring that the deposition plate 7 is displaced to the optimal cultivation position under the detection of the temperature sensor 10;

[0069] S05: After the work is completed, the corresponding equipment, gas delivery and water cooling parts are disconnected, and the lifting cylinder 204 is started again to send the deposition plate 7 to the top, and then the bin cover 8 is started to open and the deposition plate 7 is removed from the clamping mechanism 5.

[0070] In this embodiment, refer to Fig.13 As shown in the experimental data graph, when the cold water table 1 moves up and down during the test, we can conclude by observing the growing material 14 in the image that the shape and density of the sediment are almost unchanged, and in the long-term growth and cultivation process, the sediment material can be given a stable growth environment, can grow very thick, and maintain the sediment quality, and under the joint action of the fine adjustment mechanism 3 and the steering mechanism 4, a horizontal cross-section of the sediment can be found, so that the difference between the maximum and minimum sediment density is less than 10%, and the temperature error is also small during the overall control process;

[0071] In addition, the microwave plasma equipment will not be subject to some frequency restrictions during use and is suitable for a certain frequency range, including the common 2.4-2.5GHz and 910-930MHz ranges.

[0072] Wherein: the diameter of the deposition plate 7 = 0.35-0.5*microwave wavelength, the total thickness of the growth material + the deposition plate 7 > 0.12*microwave wavelength.

[0073] Embodiment 2: The fine adjustment mechanism 3 in the embodiment 2 is improved on the basis of the above embodiment. The technical contents disclosed in the above embodiment are not described repeatedly. The contents of the above disclosed embodiment also belong to the contents disclosed in the embodiment 2.

[0074] One embodiment of the present invention, in combination with Figure 9-11The fine adjustment mechanism 3 shown includes an adjustment bottom cylinder 3010 arranged in the cavity of the cold water table 1, a through slot is opened on the side wall of the adjustment bottom cylinder 3010, a tooth column 3011 is arranged inside the cavity of the adjustment bottom cylinder 3010, a second follow-up mounting bottom plate 3012 is arranged on the top of the tooth column 3011, a padding platform 3013 is arranged on one side of the adjustment bottom cylinder 3010, a bearing seat 3014 is arranged on the side wall of the padding platform 3013, a synchronous shaft 3015 is sleeved in the bearing seat 3014, a first gear 3016 and a second gear 3017 are respectively arranged at both ends of the synchronous shaft 3015, the first gear 3016 cooperates with the tooth column 3011 through the through slot, a rotating motor 3018 is arranged on one side of the padding platform 3013, and a third gear 3019 is arranged on the rotating shaft of the rotating motor 3018 , the third gear 3019 cooperates with the second gear 3017. The mechanism drives the third gear 3019 to rotate by driving the rotating motor 3018, and then the third gear 3019 meshes with the second gear 3017 to rotate it. The second gear 3017 rotates the first gear 3016 under the action of the synchronous shaft 3015, thereby realizing the cooperation between the first gear 3016 and the tooth column 3011, so that the tooth column 3011 can operate vertically in the adjusting bottom cylinder 3010, and the height change of the second follow-up mounting bottom plate 3012 is realized. Compared with the setting of Example 1, the drive adjustment of this mechanism makes the height change of the deposition plate 7 faster and quicker, but in the long-term use process, when the weight of the sediment is high, the meshing lock between the gears may cause a slight risk of rollback.

[0075] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations within the meaning and range of equivalents of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0076] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A water cooling table self-adaptive adjustment mechanism, comprising a water cooling table (1), characterized in that: The water cooling table (1) is a cylindrical cavity with an opening on the upper surface. A primary lifting mechanism (2) for controlling the height of the water cooling table (1) is provided at the bottom. A fine adjustment mechanism (3) for realizing vertical lifting is provided in the cavity of the water cooling table (1). A steering mechanism (4) for angle adjustment is provided above the fine adjustment mechanism (3). A clamping mechanism (5) is fixedly provided above the steering mechanism (4). The fine adjustment mechanism (3) comprises a driving motor (301) arranged inside the cavity, a transmission screw (302) is arranged on the rotating shaft of the driving motor (301) through a coupling, a limit block (303) is arranged at the end of the transmission screw (302), a ball nut base (304) is arranged on the transmission screw (302), a driving plate (305) is arranged on the outer fixed sleeve of the ball nut base (304), and auxiliary wheels (306) are arranged at the corners of the driving plate (305), a guide channel steel (307) matched with the auxiliary wheel (306) is vertically arranged on the inner wall of the cavity of the cold water table (1), two groups of padding rods (308) are arranged above the driving plate (305), and a first follow-up mounting base plate (309) is arranged above the two groups of padding rods (308); The steering mechanism (4) comprises a hollow rotating platform (401) fixedly arranged on the first follower mounting base plate (309); a support member (402) is arranged on the rotating shaft of the hollow rotating platform (401); the support member (402) is arranged in a "V" shape; support platforms (403) are respectively arranged at both ends of the upper surface of the support member (402); a steering platform (404) is arranged between two groups of the support platforms (403); and a rotating motor (405) for controlling the turning of the steering platform (404) is arranged on one side of one group of the support platforms (403).

2. The self-adaptive adjustment mechanism for a cold water table according to claim 1, characterized in that: The cold water table (1) is configured with a hollow side wall.

3. The self-adaptive adjustment mechanism for a cold water table according to claim 2, characterized in that: The primary lifting mechanism (2) comprises a primary lifting base (201), a triangular mounting groove (202) is provided on the top of the primary lifting base (201), a mounting base (203) is provided at the corner of the mounting groove (202), a lifting cylinder (204) is rotatably provided on the mounting base (203), a first rotating member (205) is provided on the telescopic rod of the lifting cylinder (204), a second rotating member (206) cooperating therewith is provided on the first rotating member (205), and the first rotating member (206) is provided on the first rotating member (205). Two rotating members (206) are fixedly arranged at the bottom of the cold water table (1); two groups of follower cylinder assemblies (207) are arranged between the primary lifting base (201) and the cold water table (1); a water inlet pipe (208) and a water outlet pipe (209) are respectively arranged on the side wall of the primary lifting base (201); the water inlet pipe (208) and the water outlet pipe (209) are respectively connected to the two groups of follower cylinder assemblies (207); and the follower cylinder assembly (207) is connected to the side wall of the cold water table (1).

4. The self-adaptive adjustment mechanism for a cold water table according to claim 3, characterized in that: The follower cylinder assembly (207) comprises a fixed base cylinder (2071), a follower cylinder (2072) is sleeved in the fixed base cylinder (2071), and a sealing ring (2073) is provided between the fixed base cylinder (2071) and the follower cylinder (2072).

5. The self-adaptive adjustment mechanism for a cold water table according to claim 1, characterized in that: The fine adjustment mechanism (3) comprises an adjustment bottom cylinder (3010) arranged in the cavity of the cold water table (1), a through groove is opened on the side wall of the adjustment bottom cylinder (3010), a tooth column (3011) is arranged inside the cavity of the adjustment bottom cylinder (3010), a second follow-up mounting base plate (3012) is arranged on the top of the tooth column (3011), a raised platform (3013) is arranged on one side of the adjustment bottom cylinder (3010), a bearing seat (3014) is arranged on the side wall of the raised platform (3013), and the bearing seat A synchronous shaft (3015) is sleeved inside (3014), and a first gear (3016) and a second gear (3017) are respectively arranged at both ends of the synchronous shaft (3015), and the first gear (3016) is matched with the gear column (3011) through the through groove, and a rotating motor (3018) is arranged on one side of the raising platform (3013), and a third gear (3019) is arranged on the rotating shaft of the rotating motor (3018), and the third gear (3019) is matched with the second gear (3017).

6. The self-adaptive adjustment mechanism for a cold water table according to claim 4, characterized in that: The clamping mechanism (5) comprises a clamping base plate (501) arranged on the upper surface of the turning platform (404), and support arm assemblies (502) are rotatably arranged at four corners of the clamping base plate (501), and limit bolts (503) are arranged at the ends of the support arm assemblies (502) through threaded connection; The support arm assembly (502) comprises a support arm body (5021), an extension arm (5022) is sleeved inside the support arm body (5021), a tension spring (5023) is arranged between the support arm body (5021) and the extension arm (5022), and the limiting bolt (503) is arranged at the end of the extension arm (5022).

7. Microwave plasma equipment, characterized in that: It comprises a plasma equipment body (6), a deposition plate (7) and a cold water table adaptive adjustment mechanism as claimed in any one of claims 1 to 6; A chamber cover (8) is driven and arranged above the plasma equipment body (6); an excitation probe (9) is arranged at the bottom of the chamber cover (8); the excitation probe (9) is placed in the cavity of the plasma equipment body (6); a temperature sensor (10) is arranged on one side of the excitation probe (9); a partition plate (11) is arranged on the inner wall of the cavity of the plasma equipment body (6); the primary lifting mechanism (2) is arranged at the bottom of the cavity of the plasma equipment body (6); the cold water table (1) cooperates with the partition plate (11); the deposition plate (7) is placed on the clamping mechanism (5); and a plurality of air inlets (12) are evenly distributed on the upper side wall of the plasma equipment body (6); and a plurality of microwave windows (13) are arranged below the air inlets (12).

8. The method for using the microwave plasma device according to claim 7, characterized in that: The steps include: S01: Before work, the plasma equipment body (6) is preset, and the appropriate deposition plate (7) is selected according to the amount of sediment to be cultivated, and the deposition plate (7) is placed on the clamping mechanism (5). The clamping mechanism (5) is adjusted in size by pulling the extension arm (5022), and the outer edge of the deposition plate (7) is clamped by the elastic deformation of the tension spring (5023), and then the limit bolt (503) is screwed to limit the position of the deposition plate (7) to avoid shaking. After the deposition plate (7) is placed, the overall sealing of the equipment is ensured by driving the bin cover (8), and the fine The excitation probe (9) is adjusted so that it is placed directly above the deposition plate (7), and then the lifting cylinder (204) is started. During the advancement of the telescopic rod, the overall height of the cold water table (1) is driven to change, thereby presetting the deposition plate (7) to the best matching position with the excitation probe (9). During the movement of the cold water table (1), the side wall is fitted with the partition plate (11) to ensure the culture sealing of the cavity above the plasma equipment body (6). Finally, the air inlet (12) is connected to an air supply pipe, the water inlet pipe (208) is connected to a cold water pipe, and the water outlet pipe (209) is connected to a drain port. S02: During operation, a first gas raw material is delivered to the cavity of the plasma equipment body (6) through the gas inlet (12). After reaching a certain amount, the excitation probe (9) is started and microwaves are delivered from the microwave window (13). When the microwave window (13) is arranged on the side wall, axisymmetric input is required to avoid that the microwaves fail to reach the resonance condition in the shape inside the cavity, resulting in failure to generate plasma or asymmetric generation. Then, a second gas raw material is delivered. At this time, the two gas raw materials begin to generate deposits on the deposition plate (7) under the action of the excitation probe (9) and microwaves; S03: During operation, when the thickness of the deposit is uneven, the hollow rotating platform (401) of the steering mechanism (4) is started to drive the deposition plate (7) to rotate, and the action position of the excitation probe (9) is adjusted to ensure the thickness. In the process, the rotating motor (405) is started to drive the deposition plate (7) to make fine adjustments, so as to reach some positions where deposition is not possible, and ensure the thickness. S04: During operation, when the temperature sensor (10) detects that the temperature of the deposition plate (7) needs to be further adjusted, the drive motor (301) starts and rotates the transmission screw (302), and the transmission screw (302) interacts with the ball nut base (304). The ball nut base (304) produces a displacement on a vertical plane under the cooperation of the auxiliary wheel (306) and the guide channel steel (307), thereby driving the deposition plate (7) to shrink into the cavity of the cold water table (1). Under the action of the inner wall water circulation, the temperature in the cavity of the cold water table (1) changes with the depth, thereby further affecting the surface temperature of the deposition plate (7), ensuring that under the detection of the temperature sensor (10), the deposition plate (7) is displaced to the optimal cultivation position; S05: After the work is completed, the corresponding equipment, gas delivery and water cooling parts are disconnected, and the lifting cylinder (204) is started again to send the deposition plate (7) to the top, and then the bin cover (8) is started to open and the deposition plate (7) is removed from the clamping mechanism (5).

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