Vacuum magnetron coating rotary cathode tip

Abstract

The application discloses a kind of vacuum magnetron coating rotary cathode end, including spindle, the inside of spindle is provided with conducting ring, the front end of spindle is provided with target material connecting flange, the outside of conducting ring and the inside of target material connecting flange contact, the inside and rear end of spindle are provided with cooling assembly, the outside of spindle is provided with shell, water seal assembly is provided between the rear side of spindle and cooling assembly, true oil seal assembly is provided between the front side of spindle and shell, the rear end of shell is provided with sealing plate, and insulating pad is provided between sealing plate and cooling assembly.The application connects conducting column and conducting block on cooling assembly, so that water inlet plate and water inlet shaft in cooling assembly are used as both cooling water circulation structure and conducting structure for connecting conducting column and conducting block, which can reduce the number of internal components of end, make the structure of whole end more compact, smaller in size and occupy less space, so that it can adapt to more unconventional cavity space.

Description

Technical Field

[0001] This invention relates to the tip of a vacuum magnetron coating rotating cathode. Background Technology

[0002] The end-cap is the core component of the rotating cathode in vacuum magnetron sputtering deposition, mainly consisting of two parts: drive and hydroelectric. The drive part primarily uses a motor to rotate the end-cap spindle, thereby continuously rotating the target material. The hydroelectric part is divided into water cooling and electrical conductivity. Water cooling involves externally supplying cooling water through the end-cap to the inside of the target cylinder for circulating cooling. Electrical conductivity involves applying electricity to the target material through the end-cap, causing the target material to vaporize into atoms and deposit onto the substrate surface.

[0003] Currently used end cap structures have fixed dimensions, which are insufficient for certain cavity conditions. Therefore, it is necessary to reduce the external dimensions to adapt to the special cavity usage conditions. In addition, conventional end caps lack internal insulation, causing the outer casing to become charged, which may lead to discharge phenomena and potentially cause direct contact with the cavity, resulting in burnout. Summary of the Invention

[0004] The main objective of this invention is to provide an end of a vacuum magnetron coating rotating cathode to solve the problems mentioned in the background.

[0005] The objective of this invention can be achieved by adopting the following technical solution: An end of a vacuum magnetron coating rotating cathode includes a spindle, a conductive ring disposed on the inner side of the spindle, a target connecting flange disposed at the front end of the spindle, and the outer side of the conductive ring contacting the inner side of the target connecting flange. Cooling components are provided inside and at the rear end of the spindle. The conductive ring is sleeved on the cooling components inside the spindle, and conductive posts are provided on the cooling components at the rear end of the spindle. The spindle is provided with an outer casing, a water seal assembly is provided between the rear side of the spindle and the cooling assembly, and a true oil seal assembly is provided between the front side of the spindle and the outer casing. A rotary support assembly is provided between the main shaft and the housing, and the rotary support assembly is located between the vacuum sealing assembly and the water sealing assembly; The rear end of the housing is provided with a sealing plate, and an insulating pad is provided between the sealing plate and the cooling component.

[0006] Preferably, the cooling assembly includes a water inlet shaft, a water inlet plate, and a cooling water pipe. The water inlet shaft is disposed inside the main shaft, with its front end extending out of the main shaft and communicating with the interior of the target material. The water inlet plate is disposed at the rear end of the main shaft, and the cooling water pipe is disposed on one side of the water inlet plate. The water inlet shaft and the water inlet plate are connected by a pressure cap.

[0007] Preferably, the conductive ring is sleeved on the outside of the water inlet shaft, the conductive ring is connected to the water inlet shaft by a pin, the conductive ring is provided with an upper water passage hole, and the conductive post is connected to the water inlet plate.

[0008] Preferably, the water-sealing assembly includes a water-oil seal seat, two water-oil seals and a water-oil seal cover distributed front and back within the water-oil seal seat, a water outlet groove provided on the bottom surface of the water-oil seal seat, water inlet holes and water outlet holes provided at intervals on the side surface of the water-oil seal seat, the water outlet groove communicating with the water outlet holes, the water-oil seal seat being positioned above the water inlet plate, a sealing ring being provided between the water-oil seal seat and the water inlet plate, and the water-oil seal seat having an insulating structure.

[0009] Preferably, the cooling water pipe is provided with an inlet pipe and an outlet pipe at intervals, the center of the inlet plate is provided with an inlet port that communicates with the inlet shaft, the inside of the inlet plate is provided with an inlet channel that communicates with the inlet port, the inlet channel is connected to the inlet pipe through an inlet hole, and the outlet trough is connected to the outlet pipe through an outlet hole.

[0010] Preferably, the vacuum sealing assembly includes a vacuum oil seal seat and two vacuum oil seals distributed front and rear within the vacuum oil seal seat. The vacuum oil seal seat is located below the target connecting flange and is fixedly connected to the outer shell. The vacuum oil seal seat is an insulating structure.

[0011] Preferably, the rotating support assembly includes a gear, a bearing housing is provided above the gear, a bearing is provided on the outside of the bearing housing, a bearing sleeve is provided on the outside of the bearing, a baffle is provided on the bottom surface of the bearing housing, and the bearing sleeve is an insulating structure.

[0012] Preferably, an insulating support ring is sleeved on the rear side of the water inlet shaft, a limit ring is provided above the insulating support ring, and a lower water passage hole is provided on the insulating support ring.

[0013] Preferably, an insulating plate is provided at the bottom of the outer casing.

[0014] Compared with the prior art, the beneficial technical effects of the present invention are: 1. By connecting conductive pillars and conductive blocks to the cooling assembly, the water inlet plate and water inlet shaft in the cooling assembly serve as both a cooling water flow structure and a conductive structure connecting the conductive pillars and conductive blocks. This reduces the number of internal components at the end, making the entire end structure more compact, smaller in size, and occupying less space, thus enabling it to adapt to more unconventional cavity spaces.

[0015] 2. This invention utilizes an insulating pad, water-oil seal, vacuum oil seal, bearing sleeve, insulating support ring, and insulating plate with an insulating structure. The water-oil seal and insulating pad isolate the water inlet plate from the outer casing, the insulating support ring isolates the water inlet shaft from the main shaft, the bearing sleeve isolates the main shaft from the outer casing, and the vacuum oil seal isolates the target connecting flange from the outer casing. This ensures that when energized, the current is conducted to the target in the order of conductive post, water inlet plate, water inlet shaft, conductive ring, and target connecting flange. This completely isolates the charged parts from the outer casing through the insulating structure, ensuring that the outer casing is not energized and guaranteeing safe use of the end. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the end structure of an embodiment of the present invention; Figure 2 This is a bottom view of the end of an embodiment of the present invention; Figure 3 This is a cross-sectional view of the end of an embodiment of the present invention; Figure 4 This is a schematic diagram of the internal structure of the end cap in an embodiment of the present invention; Figure 5 This is a schematic diagram of the cooling water flow structure according to an embodiment of the present invention; Figure 6 This is a schematic diagram of the conductive structure of an embodiment of the present invention; Figure 7 This is a diagram of the internal structure of the spindle according to an embodiment of the present invention; Figure 8 This is a schematic diagram of the rotating support casting structure according to an embodiment of the present invention; Figure 9 This is a schematic diagram of the water inlet plate structure according to an embodiment of the present invention; Figure 10 This is a schematic diagram of the bottom structure of the water-oil seal seat according to an embodiment of the present invention.

[0017] In the diagram: 1. Spindle; 2. Conductive ring; 3. Target connecting flange; 4. Cooling assembly; 401. Water inlet shaft; 402. Water inlet plate; 403. Cooling water pipe; 404. Gland; 5. Conductive post; 6. Housing; 7. Water seal assembly; 701. Water-oil seal seat; 702. Water-oil seal; 703. Water-oil seal cover; 8. Vacuum seal assembly; 801. Vacuum oil seal seat; 802. Vacuum oil seal; 9. Rotary support assembly; 901. Gear; 902, Bearing housing; 903, Bearing; 904, Bearing sleeve; 905, Baffle plate; 10, Sealing plate; 11, Insulating pad; 12, Pin; 13, Upper water passage hole; 14, Water outlet groove; 15, Water inlet hole; 16, Water outlet hole; 17, Sealing ring; 18, Water inlet pipe; 19, Water outlet pipe; 20, Water inlet; 21, Water inlet channel; 22, Insulating support ring; 23, Limiting ring; 24, Lower water passage hole; 25, Insulating plate. Detailed Implementation

[0018] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0019] Please see Figures 1 to 10 The present invention provides an embodiment of the end of a vacuum magnetron sputtering rotary cathode: an end of a vacuum magnetron sputtering rotary cathode includes a spindle 1, a conductive ring 2 disposed on the inner side of the spindle 1, and a target connecting flange 3 disposed at the front end of the spindle 1. The outer side of the conductive ring 2 contacts the inner side of the target connecting flange 3. During operation, a target is connected to the target connecting flange 3. The spindle 1 drives the target connecting flange 3 to rotate. The conductive ring 2 is energized and conducts electricity to the target through continuous friction with the target connecting flange 3, thereby causing the target to rotate for sputtering coating. A cooling assembly 4 is provided inside the spindle 1 and at its rear end. A conductive ring 2 is sleeved on the cooling assembly 4 inside the spindle 1. A conductive post 5 is provided on the cooling assembly 4 at the rear end of the spindle 1. Electricity is conducted from the conductive post 5 through the cooling assembly 4 to the conductive ring 2. The spindle 1 is provided with a housing 6. A water seal assembly 7 is provided between the rear side of the spindle 1 and the cooling assembly 4 to prevent the cooling water in the cooling assembly 4 from leaking and contacting the housing 6. A vacuum seal assembly 8 is provided between the front side of the spindle 1 and the housing 6 to prevent external air from entering the end. A rotary support assembly 9 is provided between the spindle 1 and the housing 6. The rotary support assembly 9 is located between the vacuum sealing assembly 8 and the water sealing assembly 7. The spindle 1 is rotated through the rotary support assembly 9. A sealing plate 10 is provided at the rear end of the outer casing 6, and an insulating pad 11 is provided between the sealing plate 10 and the cooling component 4 to prevent the outer casing 6 from being charged.

[0020] Furthermore, the cooling assembly 4 includes a water inlet shaft 401, a water inlet plate 402, and a cooling water pipe 403. The water inlet shaft 401 is located inside the main shaft 1, with its front end extending out of the main shaft 1 and communicating with the interior of the target material. The water inlet plate 402 is located at the rear end of the main shaft 1, and the cooling water pipe 403 is located on one side of the water inlet plate 402. The water inlet shaft 401 and the water inlet plate 402 are connected by a pressure cap 404. When water is introduced, the cooling water flows through the cooling water pipe 403, the interior of the water inlet plate 402, the interior of the water inlet shaft 401, and then into the interior of the target material. When water is discharged, the cooling water flows through the exterior of the water inlet shaft 401, the surface of the water inlet plate 402, and then into the cooling water pipe 403 and is discharged.

[0021] Furthermore, the conductive ring 2 is sleeved on the outside of the water inlet shaft 401, and the conductive ring 2 is connected to the water inlet shaft 401 through the pin 12. The conductive ring 2 is provided with an upper water passage hole 13, and the conductive post 5 is connected to the water inlet plate 402, so that the conductive post 5, the water inlet plate 402, the water inlet shaft 401 and the conductive ring 2 form a conductive channel to energize the target material.

[0022] Furthermore, the water-sealing assembly 7 includes a water-oil seal seat 701, two water-oil seals 702 distributed front to back within the water-oil seal seat 701, and a water-oil seal cover 703 to prevent cooling water leakage. The bottom surface of the water-oil seal seat 701 is provided with a water outlet groove 14, and the side of the water-oil seal seat 701 is provided with a water inlet hole 15 and a water outlet hole 16 spaced apart. The water outlet groove 14 communicates with the water outlet hole 16. The water-oil seal seat 701 is positioned above the water inlet plate 402, and a sealing ring 17 is provided between the water-oil seal seat 701 and the water inlet plate 402 to prevent cooling water from leaking out between the water-oil seal seat 701 and the water inlet plate 402 when it flows out. The water-oil seal seat 701 is an insulating structure that separates the cooling assembly 4 from the outer casing 6, so that the outer casing 6 is not electrified.

[0023] Furthermore, the cooling water pipe 403 is provided with an inlet pipe 18 and an outlet pipe 19 at intervals. The center of the inlet plate 402 is provided with an inlet port 20 that communicates with the inlet shaft 401. The inside of the inlet plate 402 is provided with an inlet channel 21 that communicates with the inlet port 20. The inlet channel 21 is connected to the inlet pipe 18 through the inlet hole 15. The outlet trough 14 is connected to the outlet pipe 19 through the outlet hole 16, forming a complete water inlet and outlet passage.

[0024] Furthermore, the vacuum sealing assembly 8 includes a vacuum oil seal seat 801 and two vacuum oil seals 802 distributed front and rear within the vacuum oil seal seat 801. The vacuum oil seal seat 801 is located below the target connecting flange 3 and is fixedly connected to the housing 6 to prevent external air from entering the end. The vacuum oil seal seat 801 is an insulating structure that separates the housing 6 and ensures that the housing 6 is not electrified.

[0025] Furthermore, the rotating support assembly 9 includes a gear 901, which is driven by a motor to rotate, thereby causing the main shaft 1 to rotate. A bearing seat 902 is provided above the gear 901, and a bearing 903 is provided on the outside of the bearing seat 902 to support the rotation of the main shaft 1. A bearing sleeve 904 is provided on the outside of the bearing 903. A baffle 905 is provided on the bottom surface of the bearing seat 902 to prevent the bearing 903 from shifting. The bearing sleeve 904 is an insulating structure that separates the outer shell 6 to ensure that the outer shell 6 is not electrified.

[0026] Furthermore, an insulating support ring 22 is sleeved on the rear side of the water inlet shaft 401 to separate the water inlet shaft 401 from the main shaft 1, prevent current from being conducted to the main shaft 1, and fix and support the water inlet shaft 401. A limit ring 23 is provided above the insulating support ring 22 to prevent the insulating support ring 22 from being displaced. A lower water passage hole 24 is provided on the insulating support ring 22. When water is discharged, the cooling water will pass through the lower water passage hole 24 and finally flow out of the end.

[0027] Furthermore, an insulating plate 25 is provided at the bottom of the outer casing 6 to further separate the outer casing 6 from other components and ensure that it is not electrified.

[0028] A method for operating the tip of a rotating cathode in vacuum magnetron coating includes the following steps: a. Cooling method Step a1: Cooling water is introduced into the inlet pipe 18 of the cooling water pipe 403. The cooling water flows into the inlet channel 21 through the inlet hole 15, and then into the inlet shaft 401 through the inlet 20. Step a2: Cooling water flows into the target material through the inlet shaft 401, circulates through the target material once, and then flows back to the outside of the inlet shaft 401. Step a3: Cooling water enters the space between the main shaft 1 and the water inlet shaft 401 through the upper water passage hole 13 of the conductive ring 2, then flows out of the main shaft 1 through the lower water passage hole 24 of the insulating support ring 22 and flows into the water outlet tank 14, then enters the water outlet pipe 19 through the water outlet hole 16 and flows out, completing one cooling cycle. b. Conductive methods Step b1: Energize the conductive post 5, so that the water inlet plate 402 connected to the conductive post 5 is energized, and in turn, the water inlet shaft 401 connected to the water inlet plate 402 is energized; Step b2: Electricity is introduced into the conductive ring 2 through the water inlet shaft 401. The conductive ring 2 and the target material connecting flange 3 conduct electricity to the target material through continuous friction.

[0029] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A tip for a vacuum magnetron sputter coating rotary cathode, characterized in that: Includes a main shaft (1), a conductive ring (2) is provided on the inner side of the main shaft (1), and a target connecting flange (3) is provided at the front end of the main shaft (1). The outer side of the conductive ring (2) is in contact with the inner side of the target connecting flange (3). The spindle (1) is provided with a cooling assembly (4) inside and at its rear end. The conductive ring (2) is sleeved on the cooling assembly (4) inside the spindle (1). The cooling assembly (4) at the rear end of the spindle (1) is provided with a conductive post (5). The spindle (1) is provided with a housing (6) on its outside, a water seal assembly (7) is provided between the rear side of the spindle (1) and the cooling assembly (4), and a vacuum seal assembly (8) is provided between the front side of the spindle (1) and the housing (6). A rotary support assembly (9) is provided between the main shaft (1) and the outer casing (6), and the rotary support assembly (9) is located between the vacuum sealing assembly (8) and the water sealing assembly (7); The rear end of the outer shell (6) is provided with a sealing plate (10), and an insulating pad (11) is provided between the sealing plate (10) and the cooling assembly (4).

2. A tip for a vacuum magnetron sputter coating rotary cathode according to claim 1, characterized in that: The cooling assembly (4) includes a water inlet shaft (401), a water inlet plate (402), and a cooling water pipe (403). The water inlet shaft (401) is located inside the main shaft (1). The front end of the water inlet shaft (401) extends out of the main shaft (1) and connects to the inside of the target material. The water inlet plate (402) is located at the rear end of the main shaft (1). The cooling water pipe (403) is located on one side of the water inlet plate (402). The water inlet shaft (401) and the water inlet plate (402) are connected by a pressure cap (404).

3. A tip for a vacuum magnetron sputter coating rotary cathode according to claim 2, characterized in that: The conductive ring (2) is sleeved on the outside of the water inlet shaft (401). The conductive ring (2) is connected to the water inlet shaft (401) by a pin (12). The conductive ring (2) is provided with an upper water passage hole (13). The conductive post (5) is connected to the water inlet plate (402).

4. The end of a vacuum magnetron coating rotary cathode according to claim 2, characterized in that: The water seal assembly (7) includes a water-oil seal seat (701), two water-oil seals (702) distributed in the water-oil seal seat (701) and a water-oil seal cover (703). The bottom surface of the water-oil seal seat (701) is provided with a water outlet groove (14). The side surface of the water-oil seal seat (701) is provided with a water inlet hole (15) and a water outlet hole (16) spaced apart. The water outlet groove (14) is connected to the water outlet hole (16). The water-oil seal seat (701) is located above the water inlet plate (402). A sealing ring (17) is provided between the water-oil seal seat (701) and the water inlet plate (402). The water-oil seal seat (701) is an insulating structure.

5. A tip for a vacuum magnetron sputter coating rotary cathode according to claim 4, characterized in that: The cooling water pipe (403) is provided with an inlet pipe (18) and an outlet pipe (19) at intervals. The center of the inlet plate (402) is provided with an inlet port (20) that communicates with the inlet shaft (401). The interior of the inlet plate (402) is provided with an inlet channel (21) that communicates with the inlet port (20). The inlet channel (21) is connected to the inlet pipe (18) through an inlet hole (15). The outlet trough (14) is connected to the outlet pipe (19) through an outlet hole (16).

6. The end of a vacuum magnetron coating rotating cathode according to claim 1, characterized in that: The vacuum sealing assembly (8) includes a vacuum oil seal seat (801) and two vacuum oil seals (802) distributed in the front and back of the vacuum oil seal seat (801). The vacuum oil seal seat (801) is located below the target connecting flange (3) and is fixedly connected to the outer shell (6). The vacuum oil seal seat (801) is an insulating structure.

7. The end of a vacuum magnetron coating rotating cathode according to claim 1, characterized in that: The rotating support assembly (9) includes a gear (901), a bearing seat (902) is provided above the gear (901), a bearing (903) is provided on the outside of the bearing seat (902), a bearing sleeve (904) is provided on the outside of the bearing (903), a baffle (905) is provided on the bottom surface of the bearing seat (902), and the bearing sleeve (904) is an insulating structure.

8. The end of a vacuum magnetron coating rotating cathode according to claim 2, characterized in that: An insulating support ring (22) is sleeved on the rear side of the water inlet shaft (401), a limit ring (23) is provided above the insulating support ring (22), and a lower water passage hole (24) is provided on the insulating support ring (22).

9. The end of a vacuum magnetron coating rotating cathode according to claim 1, characterized in that: An insulating plate (25) is provided below the outer casing (6).

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