Multiple air chambers

Abstract

The present invention discloses a multi-reflection air chamber, comprising an incident side mirror and an aiming side mirror arranged relatively on both sides, the incident side mirror and the aiming side mirror respectively comprising a plurality of spherical mirrors spliced ​​with each other; wherein, based on the incident side mirror and the aiming side mirror, a total of n circulation components are formed, any of the circulation components comprises a field lens and an objective lens arranged relatively on both sides, and n is a positive integer greater than or equal to 2; light is suitable for incident from an incident point on one side of a field lens of one of the circulation components and aiming at the geometric center of an objective lens of the circulation component, and is suitable for being emitted from an exit point on one side of the field lens of the circulation component after n-fold circular reflection between the incident side mirror and the aiming side mirror, and finally forming a plurality of rows and columns of light spots on the aiming side mirror and the incident side mirror respectively. The present invention can achieve a synchronous improvement in the utilization rate of the mirror surface and the number of times the spatial position of the light spot is reused, thereby improving the optical path.

Description

Technical Field

[0001] The invention relates to the technical field of trace gas monitoring, in particular to a multi-reverse gas chamber. Background Art

[0002] High-precision trace gas detection is crucial to greenhouse gas monitoring, respiratory diagnosis, semiconductor processes and air pollution control. For example, long-term, continuous and high-precision measurements of background concentrations of major greenhouse gases such as CH4, CO2 and N2O are of great significance to the study of global climate change and the corresponding greenhouse gas emissions; accurate monitoring of metabolic markers in sub-ppb respiratory gases in biomedicine helps to achieve non-invasive diagnosis of human diseases and facilitates early treatment of potential diseases; special advanced semiconductor processes require the concentration of harmful gas impurities to be less than 100ppt, and accurate online monitoring can ensure the product qualification rate and safe operation of equipment; NO in the atmospheric environment X , SO2, H2S and NH3 and other key pollutants, can be deeply understood through online trace high-precision analysis, so as to achieve precise control and effectively prevent accidents that endanger human health and ecological environment. Cavity ring-down spectroscopy (CRDS) and off-axis integrated cavity output spectroscopy (OA-ICOS) can meet the strict measurement accuracy requirements of the above trace gases with the help of optical resonant cavities with kilometer-level optical paths. However, the structure of such systems is relatively complex, with high requirements for the measurement environment and high cost, so it is difficult to achieve large-scale application in complex and diverse practical scenarios. Tunable diode laser absorption spectroscopy (TDLAS) combined with the measurement scheme of multiple reflection gas chamber has the advantages of simple structure, low instrument cost and high reliability, and is the most promising candidate to overcome the above shortcomings. However, the currently designed multi-reflector chambers have low mirror utilization and low spatial position reuse of light spots, resulting in the optical path length being limited to hundreds of meters, limiting the detection accuracy of trace gases by this scheme.

[0003] Therefore, a multi-reverse air chamber is needed to solve the problems existing in the above technical solutions. Summary of the invention

[0004] To this end, the present invention provides a multi-reverse air chamber to solve or at least alleviate the above problems.

[0005] According to one aspect of the present invention, a multi-reflective air chamber is provided, comprising an incident side mirror and an aiming side mirror arranged relatively on both sides, the incident side mirror and the aiming side mirror respectively comprising a plurality of spherical mirrors spliced ​​together; wherein, based on the incident side mirror and the aiming side mirror, a total of n circulation components are formed, any of the circulation components comprises a field lens and an objective lens arranged relatively on both sides, and n is a positive integer greater than or equal to 2; light is suitable for being incident from an incident point on one side of a field lens of one of the circulation components and aiming at the geometric center of an objective lens of the circulation component, and is suitable for being emitted from an exit point on one side of the field lens of the circulation component after n-fold circular reflection between the incident side mirror and the aiming side mirror, and finally forming a plurality of rows and columns of light spots on the aiming side mirror and the incident side mirror respectively.

[0006] Optionally, in the multi-reflector air chamber according to the present invention, the geometric center of an objective lens of the circulation component is used as the original aiming point, wherein a first new spherical mirror and a second new spherical mirror are respectively added at the positions of the incident point and the exit point on one side of the field lens of one of the circulation components, based on the spherical mirror at the original aiming point, the first new spherical mirror and the second new spherical mirror are suitable for forming a new circulation component, and the spherical mirror at the original aiming point is used as the field lens of the new circulation component, and the first new spherical mirror and the second new spherical mirror are respectively used as the objective lens of the new circulation component; light is suitable for being incident from a new incident point on one side of the field lens of the new circulation component and aiming at the geometric center of the first new spherical mirror or the second new spherical mirror, and is suitable for being emitted from a new exit point on one side of the field lens of the new circulation component after n+1 cyclic reflections between the incident side mirror surface and the aiming side mirror surface, and finally forming multiple rows and columns of light spots on the aiming side mirror surface and the incident side mirror surface, respectively.

[0007] Optionally, in the multi-reflector gas chamber according to the present invention, the types of the circulation components include Pickett Bradley White cell (PBWC) components, Bernstein Herzberg White cell (BHWC) components, and Chernin multipass matrix system matrix-type multi-reflector gas chambers.

[0008] Optionally, in the multi-reflective air chamber according to the present invention, the incident side mirror surface includes a first spherical mirror and a second spherical mirror spliced ​​to each other, and the aiming side mirror surface includes a third spherical mirror, a fourth spherical mirror and a fifth spherical mirror spliced ​​to each other; wherein, a first circulation component is formed based on the third spherical mirror, the first spherical mirror and the second spherical mirror, and the third spherical mirror serves as a field lens of the first circulation component, and the first spherical mirror and the second spherical mirror serve as objective lenses of the first circulation component respectively; a second circulation component is formed based on the second spherical mirror, the fourth spherical mirror and the fifth spherical mirror, and the second spherical mirror serves as a field lens of the second circulation component, and the fourth spherical mirror serves as an objective lens of the first circulation component respectively. and the fifth spherical mirror serve as the objective lens of the second circulation component respectively; the light is suitable for being incident from the incident point on one side of the second spherical mirror and aiming at the geometric center of the fifth spherical mirror, and is suitable for being emitted from the exit point on one side of the second spherical mirror after double circular reflection between the incident side mirror and the aiming side mirror, wherein, each time the light undergoes a complete reflection process on the first circulation component, it will undergo a step reflection on the second circulation component and form a light spot on the field mirror of the second circulation component, and finally form two columns of light spots on the aiming side mirror and four columns of light spots on the incident side mirror.

[0009] Optionally, in the multi-reflective air chamber according to the present invention, the curvature radii of the first spherical mirror, the second spherical mirror, the third spherical mirror, the fourth spherical mirror and the fifth spherical mirror are equal, and the mirror spacing between the incident side mirror and the aiming side mirror is equal to the curvature radius.

[0010] Optionally, in the multi-reverse air chamber according to the present invention, the first circulation component and the second circulation component are PBWC components or BHWC components respectively.

[0011] Optionally, in the multi-reflection air chamber according to the present invention, the first circulation component and the second circulation component are respectively a PBWC component; the first spherical mirror, the second spherical mirror, the third spherical mirror, the fourth spherical mirror and the fifth spherical mirror are all rectangular concave spherical mirrors, and the projection shapes of the incident side mirror and the aiming side mirror are both rectangular; wherein each reflection includes multiple reflections.

[0012] Optionally, in the multi-reflector air chamber according to the present invention, the first curvature center of the first spherical mirror is located at the geometric center of the third spherical mirror; the second curvature center of the second spherical mirror is located directly below the first curvature center; the third curvature center of the third spherical mirror is located at the center position on the dividing line between the first spherical mirror and the second spherical mirror; the fourth curvature center of the fourth spherical mirror is located at the geometric center of the second spherical mirror and is on the same horizontal line as the third curvature center; the fifth curvature center of the fifth spherical mirror is located directly above the fourth curvature center.

[0013] Optionally, in the multi-reflective air chamber according to the present invention, each time the light undergoes a complete reflection process on the first circulation component, it is suitable to form a plurality of continuous light spots on the first circulation component.

[0014] Optionally, in the multi-reflector air chamber according to the present invention, a plurality of continuous light spots are formed on the first circulation component, including: forming a light spot sequence in sequence on the field lens of the first circulation component, the light spot sequence comprising a third number of light spots; overlapping to form a second number of light spots at the same position on the second spherical mirror of the first circulation component, the second number being used to indicate the number of times the spatial position of each light spot on the second spherical mirror is reused; and overlapping to form a first number of light spots at the same position on the first spherical mirror of the first circulation component, the first number being used to indicate the number of times the spatial position of each light spot on the first spherical mirror is reused.

[0015] Optionally, in the multi-reflective air chamber according to the present invention, each time the light undergoes a complete reflection process on the first circulation component, it is suitable for forming a continuous 2×(2×n2-1) light spots on the first circulation component, wherein n2 represents the number of rows of light spots formed by the light on the aiming side mirror; the light undergoes the first complete reflection process on the first circulation component, and is suitable for forming the 1st to 2×(2×n2-1) light spots on the first circulation component; the first number is n2-1, and the second number is n2.

[0016] Optionally, in the multi-reflector air chamber according to the present invention, the number of complete reflection processes performed by the light on the first circulation component is equal to the number of light spots formed on the field lens of the second circulation component, which is 2×n1, wherein n1 represents the number of rows of light spots formed by the light on the mirror surface on the incident side; the number of times the spatial position of each light spot on the field lens of the first circulation component is reused is equal to the number of complete reflection processes performed by the light on the first circulation component, which is 2×n1.

[0017] Optionally, in the multi-reverse air chamber according to the present invention, the total number of passes N of the multi-reverse air chamber is PP =[2×(2×n2-1)]×(2×n1)+2, wherein n1 and n2 are both positive integers; the optical path of the multi-reflection air chamber opl=N PP ×d, where d represents the mirror distance between the incident side mirror and the aiming side mirror.

[0018] Optionally, in the multi-reflector air chamber according to the present invention, the distance between the first curvature center of the first spherical mirror and the second curvature center of the second spherical mirror is d r2 / 2, where d r2represents the spot line spacing on the aiming side mirror surface; the distance between the fourth curvature center of the fourth spherical mirror and the fifth curvature center of the fifth spherical mirror is d r1 / 2, where d r1 It represents the spacing between the light spot rows on the incident side mirror.

[0019] Optionally, in the multi-reflector air chamber according to the present invention, the first circulation component and the second circulation component are respectively a BHWC component and a PBWC component; the third spherical mirror is a rectangular concave spherical mirror with two upper and lower notches; the first spherical mirror, the second spherical mirror, the fourth spherical mirror and the fifth spherical mirror are all rectangular concave spherical mirrors, and the fourth spherical mirror and the fifth spherical mirror are arranged at the two notches of the third spherical mirror, and the projection shapes of the incident side mirror surface and the aiming side mirror surface are both rectangular; the light is suitable for emitting from an exit point above the second spherical mirror and horizontally adjacent to the incident point.

[0020] Optionally, in the multi-reflector air chamber according to the present invention, the first circulation component and the second circulation component are respectively a PBWC component and a BHWC component; the second spherical mirror is a rectangular concave spherical mirror with two upper and lower notches; the first spherical mirror, the third spherical mirror, the fourth spherical mirror and the fifth spherical mirror are all rectangular concave spherical mirrors, and the projection shape of the aiming side mirror surface is a rectangle; the light is suitable for being incident from the incident point at the notch above the second spherical mirror and aiming at the geometric center of the fifth spherical mirror, and is suitable for being emitted from the exit point at the notch below the second spherical mirror.

[0021] Optionally, in the multi-reflector air chamber according to the present invention, the first circulation component and the second circulation component are respectively a BHWC component; the first spherical mirror and the second spherical mirror are respectively rectangular concave spherical mirrors with a notch on the top and are symmetrical with respect to the y-axis, and the third spherical mirror is a rectangular concave spherical mirror with two upper and lower notches; the fourth spherical mirror and the fifth spherical mirror are both rectangular concave spherical mirrors, and the fourth spherical mirror and the fifth spherical mirror are arranged at the two notches of the third spherical mirror, and the projection shape of the aiming side mirror surface is rectangular; the light is suitable for being incident from the incident point at the notch of the second spherical mirror and aiming at the geometric center of the fifth spherical mirror, and is suitable for being emitted from the exit point at the notch of the first spherical mirror.

[0022] According to the multi-reflection air chamber provided by the present invention, it includes an incident side mirror and an aiming side mirror arranged relatively on both sides, the incident side mirror and the aiming side mirror respectively include a plurality of spherical mirrors spliced ​​with each other, wherein a plurality of circulation components are formed based on the incident side mirror and the aiming side mirror, and any circulation component includes a field lens and an objective lens arranged relatively on both sides, and light can be incident from an incident point on one side of the field lens of one of the circulation components and aim at the geometric center of an objective lens of the circulation component, and after multiple circular reflections between the incident side mirror and the aiming side mirror, it is emitted from an exit point on one side of the field lens of the circulation component, and finally multiple rows and columns of light spots are formed on the aiming side mirror and the incident side mirror. It can be seen that the multi-reflection air chamber of the present invention has a simple structure, and can achieve a synchronous improvement in the utilization rate of the double-sided mirrors and the number of times the spatial position of the light spot is reused, thereby improving the optical path, and further improving the detection accuracy and stability of the multi-reflection air chamber for trace gases.

[0023] Further, according to the technical solution of the present invention, by adding two new spherical mirrors at the incident point and the exit point of one side of the field mirror of one of the circulation components, a new circulation component can be formed based on the spherical mirror at the original aiming point, the first new spherical mirror and the second new spherical mirror, and the spherical mirror at the original aiming point is used as the field mirror of the new circulation component, and the two new spherical mirrors are used as the objective lenses of the new circulation component, thereby obtaining a multi-reflector air chamber with more multiple cycles. In this way, by increasing the number of circulation components, the optical path and optical path volume ratio of the multi-reflector air chamber can be further improved.

[0024] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented according to the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] To achieve the above and related purposes, certain illustrative aspects are described herein in conjunction with the following description and accompanying drawings, which indicate various ways in which the principles disclosed herein can be practiced, and all aspects and their equivalents are intended to fall within the scope of the claimed subject matter. The above and other purposes, features and advantages of the present disclosure will become more apparent by reading the following detailed description in conjunction with the accompanying drawings. Throughout the present disclosure, the same reference numerals generally refer to the same parts or elements.

[0026] Figure 1a , Figure 1b The schematic diagram of the structure of the existing classic PBWC component and the schematic diagram of the light spot pattern formed on the field mirror are shown respectively;

[0027] Figure 2a , Figure 2bA schematic diagram of the structure of a multi-reflector air chamber 200 provided according to an embodiment of the present invention and a schematic diagram of the light spot pattern formed on the mirror surfaces on both sides of the multi-reflector air chamber 200 are respectively shown;

[0028] Figure 3 A schematic diagram showing the formation sequence of the first 28 light spots formed on the mirror surfaces on both sides of the multi-reflector gas chamber according to an embodiment of the present invention is shown;

[0029] Figure 4 A schematic diagram showing the formation sequence of 114 complete light spots (wherein the emission point "out" can be regarded as the 114th light spot) formed on the mirror surfaces on both sides of the multi-reflector gas chamber after 114 passes according to an embodiment of the present invention;

[0030] Figure 5 A schematic diagram showing the positional relationship between the light spots formed on the mirror surfaces on both sides of the multi-reflector air chamber based on PBWC-PBWC and the center of curvature of each spherical mirror according to an embodiment of the present invention;

[0031] Figure 6a , Figure 6b The schematic diagram of the structure of the existing classic BHWC component and the schematic diagram of the light spot pattern formed on the field mirror are shown respectively;

[0032] Figure 7 A schematic diagram showing the positional relationship between the light spots formed on the mirror surfaces on both sides of the multi-reflector air chamber based on BHWC-PBWC and the center of curvature of each spherical mirror according to an embodiment of the present invention;

[0033] Figure 8 A schematic diagram showing the positional relationship between the light spots formed on the mirror surfaces on both sides of the multi-reflector air chamber based on PBWC-BHWC and the curvature centers of each spherical mirror according to an embodiment of the present invention;

[0034] Fig. 9 A schematic diagram showing the positional relationship between the light spots formed on the mirror surfaces on both sides of the multi-reflector air chamber based on BHWC-BHWC and the curvature centers of each spherical mirror according to an embodiment of the present invention;

[0035] Fig.10 A schematic diagram showing a light spot pattern formed on the mirror surfaces on both sides of a multi-reflective air chamber based on PBWC-PBWC-PBWC according to an embodiment of the present invention;

[0036] Fig.11 A line graph showing the optical path and optical path volume ratio of an n-fold circulation multi-reflector gas cell with different numbers of light spot rows on the field mirror of a PBWC. DETAILED DESCRIPTION

[0037] The exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided in order to enable a more thorough understanding of the present solution and to fully convey the scope of the present disclosure to those skilled in the art.

[0038] It should be noted that the PBWC (Pickett Bradley White cell) component and the BHWC (Bernstein Herzberg White cell) component are the basic devices of the multi-reflector gas chamber.

[0039] Figure 1a , Figure 1b The schematic diagram of the structure of the existing classic PBWC component and the schematic diagram of the light spot pattern formed on the field mirror are shown respectively. Figure 1a and Figure 1b As shown in the figure, the classic PBWC component consists of three concave spherical mirrors with equal curvature radii. For the convenience of description, the side where the light is incident is called the incident side, and the side where the light is aimed is called the aiming side. The number of reflections of the same light spot spatial position, that is, the number of overlapping light spots, is called the number of times the spatial position of the light spot is reused. The spherical mirror on the incident side of the classic PBWC component is a rectangular field lens M3, and the aiming side has two circular objective lenses M1 and M2. The mirror spacing between the two sides of the mirror is equal to the curvature radius of the spherical mirror. The center of curvature C1 of the objective lens M1 and the center of curvature C2 of the objective lens M2 are located on the field lens M3 and do not overlap. The center of curvature C3 of the field lens M3 is located at the center of the objective lens M1 and the objective lens M2. The reflection law of the classic PBWC component is as follows: As a confocal resonant cavity, the gas chamber refocuses the image of the incident aperture onto the field lens until the light beam leaves the gas chamber, and finally forms two columns of light spots on the field lens M3, and the total number of light spots is 2×n PBWC , where n PBWC is the number of rows of light spots formed on the field lens M3, and the number of times the spatial position of each light spot is reused is 1. The first and second columns of light spots on the field lens M3 are focused by the objective lens M2 and the objective lens M1 respectively. The number of light spots on the objective lens M1 and the objective lens M2 is 1, and the number of times the spatial position of the light spot on the objective lens M1 is reused is n PBWC , the spatial position of the light spot on the objective lens M2 is reused n times PBWC +1. Number of passes N of the classic PBWC component PBWC for:

[0040] N PBWC =2×(2×n PBWC +1)

[0041] According to the reflection law of the classic PBWC component, the light spot on the field lens M3 of the classic PBWC component is evenly distributed, and the mirror utilization rate is high, but each light spot is only reflected once (the spatial position of each light spot on the field lens M3 is reused 1 times). On the other hand, the spatial position of the light spot on the objective lens M1 and the objective lens M2 is reused more times, but there is only one light spot, and the mirror utilization rate is low.

[0042] In view of the defects and shortcomings of the classic PBWC assembly, and in order to simultaneously increase the number of times the spatial position of the light spot on the field lens M3 is reused and the mirror utilization rate on the objective lenses M1 and M2, a multi-reflection gas chamber 200 is provided in an embodiment of the present invention.

[0043] Figure 2a , Figure 2b The following are respectively a schematic diagram of the structure of a multi-reflector air chamber 200 provided according to an embodiment of the present invention and a schematic diagram of the light spot pattern formed on the mirror surfaces on both sides of the multi-reflector air chamber 200. It should be noted that the light spot pattern formed on the mirror surface on either side can be observed by standing in the center of the multi-reflector air chamber 200 and facing the mirror surface on either side.

[0044] like Figure 2a and 2b As shown, a Cartesian coordinate system is established by taking the midpoint of the line connecting the geometric centers of the mirrors on both sides of the multi-reflector gas chamber 200 as the origin O, and taking the straight line where the line connecting the geometric centers is located as the z-axis.

[0045] In some embodiments, the present invention makes three major improvements to the classic PBWC assembly: 1) adding two rectangular spherical mirrors M4 and M5 at the original exit and incident points of the PBWC; 2) changing the objective lenses M1 and M2 from circular to rectangular, so that M2 and the newly added M4 and M5 form a new PBWC; 3) adjusting the incident point position and the exit point position from the side of the field lens M3 to the side of M2.

[0046] Based on the above improvements, five rectangular spherical mirrors can be used to form two independent PBWC components, and the multi-reflection air chamber 200 of the present invention is obtained. In the multi-reflection air chamber 200, M2 is both the objective lens of the classic PBWC component, and each light spot on M2 has a high number of spatial position reuses; at the same time, M2 is also the field lens of the newly added PBWC component, and two columns of light spots will be formed on M2, and two columns of mirror light spots will be formed on M1, thereby greatly improving the mirror utilization of M1 and M2. Utilizing the principle of optical path reversibility, by setting the newly added objective lenses M4 and M5 at the exit and incident positions of the classic PBWC component, the mutual nesting of the reflection processes of the two PBWC components can be achieved, so that the field lens M3 can maintain a high mirror utilization while effectively increasing the number of spatial position reuses of each light spot. It can be seen that the multi-reflector air chamber 200 designed in a double-circulation mode based on the double-sided field mirrors according to the present invention can achieve a simultaneous increase in the utilization rate of the double-sided mirrors and the number of times the spatial position of the light spot is reused, while maintaining a simple air chamber structure, thereby increasing the optical path.

[0047] It is worth noting that, in some embodiments, the multi-reflector air chamber 200 of the present invention can be obtained based on two PBWC components, that is, in the multi-reflector air chamber 200 of the present invention, two PBWC components can be formed based on five spherical mirrors, but the present invention is not limited thereto.

[0048] In other embodiments, in the multi-reflector air chamber 200 of the present invention, a PBWC component and a BHWC component can be formed based on five spherical mirrors, or two BHWC components can be formed based on five spherical mirrors.

[0049] In an embodiment of the present invention, Figure 2a and 2b As shown, the multi-reflective air chamber 200 includes an incident side mirror and an aiming side mirror arranged relatively on two sides (incident side and aiming side), and the incident side mirror and the aiming side mirror include a total of 5 spherical mirrors (specifically rectangular concave spherical mirrors), wherein the incident side mirror arranged on the incident side includes a first spherical mirror M1 and a second spherical mirror M2 spliced ​​to each other, and the aiming side mirror arranged on the aiming side includes a third spherical mirror M3, a fourth spherical mirror M4 and a fifth spherical mirror M5 spliced ​​to each other.

[0050] In the multi-reflector air chamber 200 of the present invention, two circulation components (a first circulation component and a second circulation component) can be formed based on five spherical mirrors. The two circulation components can be two PBWC components (PBWC-PBWC), or the two circulation components can be a PBWC component and a BHWC component (BHWC-PBWC or PBWC-BHWC), or the two circulation components are two BHWC components. That is to say, the first circulation component and the second circulation component can be a PBWC component or a BHWC component, respectively, and the present invention does not make any specific restrictions on this.

[0051] It should be noted that Figure 2a and 2b The multi-reflector gas chamber 200 based on PBWC-PBWC is shown, that is, two PBWC components are formed based on five spherical mirrors. Below, the multi-reflector gas chamber 200 based on PBWC-PBWC is taken as an example to describe the multi-reflector gas chamber 200 in the embodiment of the present invention in detail.

[0052] like Figure 2a and 2b As shown, a first circulation assembly can be formed based on the third spherical mirror M3, the first spherical mirror M1 and the second spherical mirror M2, wherein the third spherical mirror M3 serves as the field lens of the first circulation assembly, and the first spherical mirror M1 and the second spherical mirror M2 serve as the objective lenses of the first circulation assembly respectively. Furthermore, a second circulation assembly can be formed based on the second spherical mirror M2, the fourth spherical mirror M4 and the fifth spherical mirror M5, wherein the second spherical mirror M2 serves as the field lens of the second circulation assembly, and the fourth spherical mirror M4 and the fifth spherical mirror M5 serve as the objective lenses of the second circulation assembly respectively.

[0053] It should be noted that the first circulation component and the second circulation component can be a PBWC component or a BHWC component, respectively, and the present invention does not specifically limit this. In some embodiments, the first circulation component and the second circulation component can be a PBWC component, for example, the first circulation component and the second circulation component are PBWC-a and PBWC-b, respectively.

[0054] In an embodiment of the present invention, Figure 2a and 2bAs shown, light can be incident on the multi-reflection air chamber 200 from the incident point "in" on one side (for example, above) of the second spherical mirror M2 (i.e., the field lens of the second circulation component) on the incident side, and aimed at the geometric center of the fifth spherical mirror M5 (one of the objective lenses of the second circulation component) of the second circulation component, that is, the aiming point "aim" is located at the geometric center of the fifth spherical mirror M5 (one of the objective lenses of the second circulation component) on the aiming side. The incident light undergoes two cycles of reflection (wherein each cycle includes multiple reflections) between the mirrors on both sides (the incident side mirror and the aiming side mirror) and then emerges. Here, in the double cycle reflection process, each time the light undergoes a complete reflection process on the first cycle component, it will undergo a step of reflection on the second cycle component and form a light spot on the field lens M2 of the second cycle component. Finally, two columns of light spots (i.e., multiple rows and two columns of light spots) can be formed on the aiming side mirror (the third spherical mirror M3, the fourth spherical mirror M4 and the fifth spherical mirror M5), and four columns of light spots (i.e., multiple rows and four columns of light spots) can be formed on the incident side mirror (the first spherical mirror M1 and the second spherical mirror M2).

[0055] In some embodiments, the first spherical mirror M1, the second spherical mirror M2, the third spherical mirror M3, the fourth spherical mirror M4 and the fifth spherical mirror M5 have the same curvature radius (which can be expressed as R), and the mirror spacing d between the incident side mirror surface and the aiming side mirror surface is equal to the curvature radius R. In one embodiment, the curvature radius of each spherical mirror is 1m, but the present invention is not limited thereto.

[0056] In some embodiments, Figure 2a and 2b As shown, the first spherical mirror M1, the second spherical mirror M2, the third spherical mirror M3, the fourth spherical mirror M4 and the fifth spherical mirror M5 can all be rectangular concave spherical mirrors. The second circulation component formed based on the second spherical mirror M2, the fourth spherical mirror M4 and the fifth spherical mirror M5 is specifically the second PBWC component (PBWC-b), and the first circulation component formed based on the third spherical mirror M3, the first spherical mirror M1 and the second spherical mirror M2 is specifically the first PBWC component (PBWC-a), that is, the above-mentioned first circulation component and the second circulation component can be a PBWC component respectively. In addition, the projection shape of the incident side mirror surface composed of the first spherical mirror M1 and the second spherical mirror M2 is a rectangle, and the first spherical mirror M1 and the second spherical mirror M2 are symmetrical with respect to the y-axis. The projection shape of the aiming side mirror surface composed of the third spherical mirror M3, the fourth spherical mirror M4 and the fifth spherical mirror M5 is a rectangle.

[0057] Specifically, the first spherical mirror M1 and the second spherical mirror M2 have the same size and are arranged side by side on the incident side. Specifically, the first spherical mirror M1 and the second spherical mirror M2 are spliced ​​with each other along the x-axis direction, and the projection shape of the incident side mirror surface formed by the first spherical mirror M1 and the second spherical mirror M2 along the z-axis direction is a rectangle. The fourth spherical mirror M4 and the fifth spherical mirror M5 have the same size and are arranged side by side below the third spherical mirror M3 on the aiming side, spliced ​​with the bottom end of the third spherical mirror M3, and the sum of the widths of the fourth spherical mirror M4 and the fifth spherical mirror M5 is equal to the width of the third spherical mirror M3, so that the projection shape of the aiming side mirror surface formed by the splicing of the third spherical mirror M3, the fourth spherical mirror M4 and the fifth spherical mirror M5 along the z-axis direction is a rectangle.

[0058] It should be noted that Cn is used to represent the center of curvature of the spherical mirror Mn. The centers of curvature of the first spherical mirror M1, the second spherical mirror M2, the third spherical mirror M3, the fourth spherical mirror M4, and the fifth spherical mirror M5 are the first center of curvature C1, the second center of curvature C2, the third center of curvature C3, the fourth center of curvature C4, and the fifth center of curvature C5, respectively.

[0059] like Figure 2a and 2b As shown, the spatial positions of the centers of curvature of the five spherical mirrors are set as follows: the first center of curvature C1 of the first spherical mirror M1 on the incident side is located at the geometric center of the third spherical mirror M3 on the aiming side, and the second center of curvature C2 of the second spherical mirror M2 on the incident side is located directly below the first center of curvature C1. The third center of curvature C3 of the third spherical mirror M3 is located at the center position on the boundary line between the first spherical mirror M1 and the second spherical mirror M2. The fourth center of curvature C4 of the fourth spherical mirror M4 is located at the geometric center of the second spherical mirror M2 on the incident side, and is on the same horizontal line as the third center of curvature C3. The fifth center of curvature C5 of the fifth spherical mirror M5 is located directly above the fourth center of curvature C4.

[0060] The light can be incident from the incident point "in" on the side (above) of the second spherical mirror M2 (the field mirror of the second circulation component) on the incident side into the multi-reflection air chamber 200, and aim at the geometric center of the fifth spherical mirror M5 (one of the objective lenses of the second circulation component), that is, the aiming point "aim" is located at the geometric center of the fifth spherical mirror M5 (one of the objective lenses of the second circulation component) on the aiming side. After the incident light is double-circulated reflected between the mirror surfaces on both sides (the incident side mirror surface and the aiming side mirror surface), it can finally be emitted from the exit point "out" on the side (above) of the second spherical mirror M2 (wherein the exit point "out" can be the same as The incident point "in" is horizontally adjacent to the incident point "in". Here, the double-cycle reflection process includes: every time the light undergoes a complete reflection process on the first circulation component, it will be reflected on the second circulation component for one step and form a light spot on the field lens M2 of the second circulation component, and finally it is emitted after undergoing multiple complete reflection processes on the first circulation component. Finally, the light forms two columns of light spots (multiple rows and two columns of light spots) on the aiming side mirror (the third spherical mirror M3, the fourth spherical mirror M4 and the fifth spherical mirror M5), and forms four columns of light spots (multiple rows and four columns of light spots) on the incident side mirror (the first spherical mirror M1 and the second spherical mirror M2).

[0061] For ease of description, the following takes a multi-reflection air chamber 200 in which the number of light spot rows formed on the incident side mirror and the aiming side mirror is 4 and the number of passes is 114 as an example to illustrate the reflection law of light in the multi-reflection air chamber 200.

[0062] Figure 3 A schematic diagram showing the formation sequence of the first 28 light spots formed on the mirror surfaces on both sides of the multi-reflector gas chamber according to an embodiment of the present invention is shown.

[0063] Figure 4 A schematic diagram shows the formation sequence of forming 114 complete light spots (wherein the exit point "out" can be regarded as the 114th light spot) on the mirror surfaces on both sides of the multi-reflecting air chamber that passes 114 times according to an embodiment of the present invention.

[0064] It should be noted that Figure 3 and Figure 4 The numbers in are used to indicate the order in which the light spots are formed.

[0065] In some embodiments, Figure 3As shown, the reflection mode of light in the multi-reflection air chamber 200 is as follows: the light enters the multi-reflection air chamber 200 from the incident point "in" of the second circulation component, takes the geometric center "1" of the fifth spherical mirror M5 (objective lens) of the second circulation component (PBWC-b) as the aiming point and undergoes the first reflection, and then the light forms a light spot "2" at a new position on the field mirror M2 (second spherical mirror) of the second circulation component. The light spot "2" is symmetrical with the incident point "in" about the curvature center C5 of the fifth spherical mirror M5, which can be understood as the first and second step reflections performed on the second circulation component. Since the fifth spherical mirror M5 of the second circulation component is exactly set at the incident position of the first circulation component, the process of light from the light spot "1" position on the fifth spherical mirror M5 to the light spot "2" position on the second spherical mirror M2 is equivalent to the light being incident on the first circulation component (PBWC-a). Next, the first complete reflection process will be performed on the first circulation component: starting from the starting light spot "1" of the first circulation component, a light spot sequence "1-3-5-7-9-11-13" is formed in sequence on the field lens side (third spherical mirror side) of the first circulation component, and the light spot sequence includes 7 light spots; and 4 light spots "2-6-10-14" are overlapped at the same position on the second spherical mirror M2 (objective lens) of the first circulation component, that is, the spatial position of the light spots on the second spherical mirror M2 is reused 4 times, and 3 corresponding light spots "4-8-12" are overlapped at the same position on the first spherical mirror M1 (objective lens) of the first circulation component, that is, the spatial position of the light spots on the first spherical mirror M1 is reused 3 times. The 1st to 14th light spots can represent the first complete reflection process formed on the first circulation component.

[0066] Since the fourth spherical mirror M4 (objective lens) of the second circulation component is set at the exit position of the first circulation component, when the light continues to be emitted from the light spot "14" position on the second spherical mirror M2 to the light spot "15" position on the fourth spherical mirror M4, a new light spot "16" will be formed on the field lens M2 (second spherical mirror) of the second circulation component, and the light spots "16" and "14" are symmetrical about the curvature center C4 of the fourth spherical mirror M4. This can be understood as the third step of reflection performed on the second circulation component. At the same time, according to the principle of reversibility of the optical path, the process of the light ray being emitted from the light spot "15" position on M4 to the light spot "16" position on M2 is equivalent to the light ray being incident on the first circulation component again, and the second complete reflection process on the first circulation component will begin: starting from the starting light spot "15" of the first circulation component, a light spot sequence "15-17-19-21-23-25-27" is formed in sequence on the field lens side (third spherical mirror side) of the first circulation component, and the light spot sequence includes 7 light spots; 4 light spots "16-20-24-28" are overlapped at the same position on the second spherical mirror M2 (objective lens) of the first circulation component, and 3 corresponding light spots "18-22-26" are overlapped at the same position on the first spherical mirror M1 (objective lens) of the first circulation component. The 15th to 28th light spots can represent the second complete reflection process formed on the first circulation component.

[0067] It can be found that during the process of multiple reflections between the incident side mirror and the aiming side mirror, that is, before the light is emitted, each time the light undergoes a complete reflection process (that is, a small cycle acell) on the first circulation component, it will undergo a step reflection on the second circulation component (that is, a step reflection of the large cycle b cell), and form a new light spot on the field lens M2 (the second spherical mirror) of the second circulation component (one step reflection corresponds to one light spot). In other words, each light spot on the field lens of the second circulation component corresponds to a complete reflection process of the light on the first circulation component. Moreover, the one-step reflection on the second circulation component (one-step reflection of the large cycle b cell) is also the first step reflection of the next complete reflection process (the next small cycle a cell) on the first circulation component. Finally, the light is emitted after undergoing multiple complete reflection processes on the first circulation component. Here, the second circulation component corresponds to the large cycle bcell, and the first circulation component corresponds to the small cycle acell.

[0068] It should be noted that each time the light undergoes a complete reflection process on the first circulation component, a plurality of continuous light spots will be formed on the first circulation component. For example, the light undergoes the first complete reflection process on the first circulation component and can form the 1st to 14th light spots (14 continuous light spots) on the first circulation component.

[0069] Furthermore, each time the light undergoes a complete reflection process on the first circulation component, a plurality of continuous light spots are formed on the first circulation component, specifically including: forming a light spot sequence in sequence on the field lens side of the first circulation component, the light spot sequence includes a third number of light spots; overlapping to form a second number of light spots at the same position on the second spherical mirror M2 of the first circulation component; overlapping to form a first number of light spots at the same position on the first spherical mirror M1 of the first circulation component. Here, it can be understood that the second number is used to indicate the number of times the spatial position of each light spot on the second spherical mirror M2 is reused, and the first number is used to indicate the number of times the spatial position of each light spot on the first spherical mirror M1 is reused. It should be noted that the order in which the light spots are formed on the first circulation component can be found in Figure 3 and Figure 4 The numbers in .

[0070] Repeat the above process until the eighth complete reflection process of the first cycle component is completed. Figure 4 As shown, the 114th light spot finally formed (wherein the exit point "out" can be regarded as the 114th light spot) is symmetrical with the 112th light spot on the second spherical mirror M2 about the curvature center C5 of the fifth spherical mirror M5, that is, the exit point "out" reaching the field lens side of the second circulation component.

[0071] In some embodiments, it is assumed that the number of rows of light spots ultimately formed by the light on the aiming side mirror (including the third spherical mirror M3, the fourth spherical mirror M4, and the fifth spherical mirror M5) is n2. Then, each time the light undergoes a complete reflection process on the first circulation component, a continuous 2×(2×n2-1) number of light spots will be formed on the first circulation component, where n2 represents the number of rows of light spots formed by the light on the aiming side mirror. In other words, the above-mentioned continuous multiple light spots can specifically be a continuous 2×(2×n2-1) number of light spots. Wherein, n2 represents the number of rows of light spots formed by the light on the aiming side mirror, and n2 is a positive integer.

[0072] Accordingly, the light undergoes the first complete reflection process on the first circulation component, and the 1st to 2×(2×n2-1)th light spots are formed on the first circulation component. The light undergoes the second complete reflection process on the first circulation component, and the 2×(2×n2-1)th to 4×(2×n2-1)th light spots are formed on the first circulation component.

[0073] In some embodiments, assuming that the incident light undergoes multiple reflections between the incident side mirror and the aiming side mirror and emerges from the exit point of the second spherical mirror M2, the number of light spot rows finally formed on the incident side mirror (including the first spherical mirror M1 and the second spherical mirror M2) is n1. Then, after the light undergoes the 2×n1th complete reflection process on the first circulation component, the position of the 2×(2×n2-1)×2×n1+2th light spot formed is the position of the exit point "out" above the second spherical mirror M2.

[0074] Since the second spherical mirror M2 is used as the field lens of the second circulation component, each light spot on the field lens of the second circulation component corresponds to a complete reflection process of the light on the first circulation component. Therefore, the number of complete reflection processes of the light on the first circulation component is equal to the number of light spots formed on the field lens M2 (second spherical mirror) of the second circulation component, 2×n1. Among them, n1 represents the number of rows of light spots formed on the incident side mirror surface of the light, and n1 is a positive integer. In addition, the number of times the spatial position of each light spot on the field lens M3 (third spherical mirror) of the first circulation component is reused is equal to the number of complete reflection processes of the light on the first circulation component, 2×n1. It can be understood that every time the light undergoes a complete reflection process on the first circulation component, the number of times the spatial position of each light spot on the field lens of the first circulation component is reused is increased by 1.

[0075] It should be noted that, based on the theory of classical cyclic components, in the first cyclic component, the number of times the spatial position of each light spot on the first spherical mirror M1 (objective lens) is reused (i.e., the first number) is n2-1, and the number of times the spatial position of each light spot on the first spherical mirror M1 (objective lens) is reused (i.e., the second number) is n2. In other words, the first number is n2-1, and the second number is n2, where n2 represents the number of rows of light spots formed by the light on the aiming side mirror surface.

[0076] Based on the theory of classical cyclic components, in the second cyclic component, the spatial position of each light spot on the fourth spherical mirror M4 (objective lens) is reused n1 times, and the spatial position of each light spot on the fifth spherical mirror M5 (objective lens) is reused n1+1 times. Among them, n1 represents the number of light spot rows formed by the light on the incident side mirror surface.

[0077] Based on this, the total number of passes of the multi-reflector gas chamber 200 of the present invention is equal to the product of the number of passes of the first circulation component and the number of complete reflection processes of the light on the first circulation component (that is, the number of light spots formed on the field lens of the second circulation component 2×n1) plus 2. That is, the total number of passes of the multi-reflector gas chamber 200 N PP =[2×(2×n2-1)]×(2×n1)+2. Where N PPrepresents the total number of passes of the multi-reflection air chamber 200, and n1 and n2 are both positive integers. Here, the number of passes of the first circulation component refers to the number of passes of the light in a complete reflection process on the first circulation component, that is, the number of light spots formed on the first circulation component when the light undergoes a complete reflection process on the first circulation component is 2×(2×n2-1).

[0078] In determining the total number of passes N of the multi-reverse air chamber 200 PP Then, based on the total number of passes N PP and the mirror spacing between the incident side mirror and the aiming side mirror to calculate the optical path opl of the multi-reflector air cell 200. Specifically, the optical path opl of the multi-reflector air cell 200 = N PP ×d=[2×(2×n2-1)]×(2×n1)×d+2×d. Wherein, d represents the mirror distance between the incident side mirror and the aiming side mirror.

[0079] It can be seen that the optical path opl of the multi-reflector air chamber is related to the following parameters: the number of light spot rows n1 formed by the light on the incident side mirror, the number of light spot rows n2 formed by the light on the aiming side mirror, and the mirror spacing d between the incident side mirror and the aiming side mirror (equal to the curvature radius of each spherical mirror). In this way, when the mirror spacing d between the incident side mirror and the aiming side mirror is determined, the multi-reflector air chambers with different optical paths can be obtained by adjusting the number of light spot rows n1 formed by the light on the incident side mirror and the number of light spot rows n2 formed by the light on the aiming side mirror.

[0080] Figure 5 A schematic diagram showing the positional relationship between the light spots formed on the mirror surfaces on both sides of the multi-reflector air chamber based on PBWC-PBWC and the curvature centers of each spherical mirror according to an embodiment of the present invention.

[0081] like Figure 5 As shown, on the aiming side, the distance between the centers of curvature C1 and C2 of the two objective lenses M1 and M2 of the first circulation assembly is the spot line spacing d on the field lens M3. r2 That is, the distance between the first curvature center C1 of the first spherical mirror M1 and the second curvature center C2 of the second spherical mirror M2 is the spot line spacing d on the aiming side mirror surface. r2 That is, the distance between the first curvature center C1 of the first spherical mirror M1 and the second curvature center C2 of the second spherical mirror M2 is d r2 / 2, where d r2Indicates the spacing of the light spot rows on the aiming side mirror. Based on this, by adjusting the positions of the first curvature center C1 and the second curvature center C2, the spacing of the light spot rows on the aiming side mirror can be adjusted, thereby increasing or decreasing the number of light spot rows formed on the aiming side mirror. In addition, the distance between the aiming point "aim" and C1C2 in the x direction is the spacing d of the light spot columns on the aiming side mirror. c2 half.

[0082] On the incident side, the distance between the centers of curvature C4 and C5 of the two objective lenses M4 and M5 of the second circulation assembly is the spot line spacing d on the incident side mirror surface. r1 That is, the distance between the fourth curvature center C4 of the fourth spherical mirror M4 and the fifth curvature center C5 of the fifth spherical mirror M5 is the spot line spacing d on the incident side mirror surface. r1 That is, the distance between the fourth curvature center C4 of the fourth spherical mirror M4 and the fifth curvature center C5 of the fifth spherical mirror M5 is d r1 / 2, where d r1 Indicates the spot row spacing on the incident side mirror. Based on this, by adjusting the positions of the fourth curvature center C4 and the fifth curvature center C5, the spot row spacing on the incident side mirror can be adjusted, thereby increasing or decreasing the number of spot rows formed on the incident side mirror. In addition, the distance between the incident point "in" and C4C5 in the x direction is the spot column spacing d on the incident side mirror (M1 and M2). c1 In addition, the distance between the third curvature center C3 and C4C5 in the x direction is equal to the spot column spacing d on the incident side mirror surface. c1 .

[0083] It can be understood that based on the above reflection law and the optical path calculation formula opl = N PP ×d=[2×(2×n2-1)]×(2×n1)×d+2×d, and a multi-reflection air chamber with different optical paths can be designed according to actual needs. Specifically, by adjusting the positions of the fourth center of curvature C4 and the fifth center of curvature C5, the spacing of the light spot rows on the incident side mirror can be adjusted, and then the number of light spot rows n1 formed on the incident side mirror can be increased or decreased; by adjusting the positions of the first center of curvature C1 and the second center of curvature C2, the spacing of the light spot rows on the aiming side mirror can be adjusted, and then the number of light spot rows n2 formed on the aiming side mirror can be increased or decreased. Based on this, a multi-reflection air chamber with different numbers of light spot rows and different spacing of light spot rows can be obtained. The number of light spot rows n1 formed by the light on the incident side mirror and the number of light spot rows n2 formed by the light on the aiming side mirror can affect the optical path of the multi-reflection air chamber, so that a multi-reflection air chamber with different optical paths can be obtained. For example, when the mirror spacing d=1m, n1=20, and n2=20, a multi-reflection air chamber with an optical path of three kilometers can be obtained.

[0084] As mentioned above, the multi-reflective air chamber includes a first spherical mirror M1, a second spherical mirror M2, a third spherical mirror M3, a fourth spherical mirror M4 and a fifth spherical mirror M5. The curvature radii (expressed as R) of the first spherical mirror M1, the second spherical mirror M2, the third spherical mirror M3, the fourth spherical mirror M4 and the fifth spherical mirror M5 are equal, and the mirror spacing between the incident side mirror and the aiming side mirror is equal to the curvature radius R.

[0085] See also Figure 5 The mirror coordinate axes shown in the figure and the various parameters of the multi-reflection gas chamber based on PBWC-PBWC are shown in Table 1 below. spots Indicates the number of light spots on each spherical mirror, n re represents the number of times the spatial position of the light spot on each spherical mirror is reused, and d represents the mirror distance between the incident side mirror and the aiming side mirror. Figure 5 As shown, in the multi-reflection air chamber, the first curvature center C1 of the first spherical mirror M1 and the second curvature center C2 of the second spherical mirror M2 are located on the aiming side mirror surface. The third curvature center C3 of the third spherical mirror M3, the fourth curvature center C4 of the fourth spherical mirror M4, and the fifth curvature center C5 of the fifth spherical mirror M5 are located on the incident side mirror surface. The incident point "in" is located on one side (above) of the second spherical mirror M2 (i.e., the field lens of the second circulation component), and the aiming point "aim" is located at the geometric center of the fifth spherical mirror M5 (i.e., one of the objective lenses of the second circulation component).

[0086] Table 1 Parameters of multi-reverse gas chamber based on PBWC-PBWC

[0087]

[0088] It should also be noted that the optical path stability of the multi-reflector air chamber is the main factor that restricts its performance and long-term reliability in actual measurement. In practical applications, interference from the external environment may have a certain impact on the optical path. For example, factors such as vibrations at the production site may cause slight changes in the direction of the incident light. Local deformation of the air chamber caused by changes in natural ambient temperature may cause deviations in the center of curvature of the spherical mirror, etc. The multi-reflector air chamber based on PBWC-PBWC in the present invention is a typical confocal cavity structure, which has the following two main advantages: (1) The optical path is insensitive to the angle of the incident light. Specifically, the aiming point "aim" is located on the fifth spherical mirror M5. A slight deviation in the position of the aiming point will only affect the spatial position of the two columns of light spots on the third spherical mirror M3, the fourth spherical mirror M4 and the fifth spherical mirror M5 on the aiming side, and has almost no effect on the position and measurement of the outgoing light spot. Therefore, the optical path adjustment is extremely simple, and is insensitive to slight disturbances in the direction of the incident light caused by environmental factors. In addition, the light spot on the aiming side is The larger the spacing, the less sensitive the optical path is to the angle of the incident light; (2) the beam quality is good and the spot shape is reduced. Specifically, in the multi-reflection air chamber provided in the embodiment of the present invention, the radius of curvature of each spherical mirror is 1000 mm, and the long optical path air chamber strictly satisfies the paraxial approximation condition. The four columns of light spots on the incident side including the exit point "out" light spot are all perfect mirror images of the incident point "in" light spot, while the two columns of light spots on the aiming side are perfect mirror images of the aiming point "aim" light spot. The shape and size of the light spots on both sides can be adjusted by adjusting the collimation degree of the incident light, which has the advantages of reduced spot shape and good beam quality.

[0089] In addition, the position deviation of the center of curvature is an important factor affecting the performance of the multi-reflector air chamber based on PBWC-PBWC. Since the five spherical mirrors have different functions in the PBWC assembly, they are also sensitive to environmental factors such as temperature and vibration. The first spherical mirror M1 and the second spherical mirror M2 are the objective lenses of the first PBWC assembly (PBWC-a). Their centers of curvature C1 and C2 are located on the field lens M3 of the first PBWC assembly (PBWC-a). The function of the centers of curvature C1 and C2 is to form two columns of light spots of the classic PBWC assembly on the aiming side, and the distance between the centers of curvature C1 and C2 determines the row spacing of the light spots on the aiming side. In practical applications, the adjusted first spherical mirror M1 and the second spherical mirror M2 can be fixed as a whole to ensure that the row spacing of the light spots on the aiming side remains unchanged. The overall offset or deflection of the spatial position of the centers of curvature C1 and C2 in the x-direction and y-direction will cause the synchronous offset or deflection of the two columns of light spots on the aiming side. During the offset or deflection process, if there is no light spot emitting from the mirror surface or hitting the interface of the spherical mirror, it will not have a significant impact on the position of the emitted light spot, will not affect the use of the air chamber, and will show excellent stability. The third spherical mirror M3 is the field mirror of the first PBWC assembly (PBWC-a), and its center of curvature C3 is located at the center of the objective lens M1 and M2 of the incident side PBWC-b. Its function is to achieve the mirror mapping of the light spot on M2 on M1, and it shows the best stability in the x and y directions. The offset of the spatial position of the center of curvature C3 will mainly affect the spatial position of the mirror light spot on M1. In the case that the light spot does not emit from the mirror surface or hit the interface of the spherical mirror, the position of the emitted light is almost not affected by the initial disturbance. The fourth spherical mirror M4 and the fifth spherical mirror M5 are the objective lenses of the second PBWC assembly (PBWC-b), and their curvature centers C4 and C5 are located on the field lens M2 of the second PBWC assembly (PBWC-b) on the incident side. Since the air chamber exit light spot "out" is located at the exit position of PBWC-a, the position offset or deflection of the curvature centers C4 and C5 will directly lead to the offset or deflection of the exit light spot position, and the offset amount is positively correlated with the number of reflections. The curvature centers C4 and C5 are most sensitive to the x-direction and y-direction disturbances caused by the environment. Therefore, in order to reduce the impact of the position deviation of the center of curvature on the air chamber, after completing the optical path adjustment, the first spherical mirror M1 and the second spherical mirror M2 on the incident side can be fixed as a whole, and the third spherical mirror M3, the fourth spherical mirror M4 and the fifth spherical mirror M5 on the aiming side can be fixed as a whole to ensure that the centers of curvature on both sides change synchronously, and an optical mirror frame with excellent structural stability and good adjustability is adopted to improve the stability and reliability of the multi-reflector air chamber in practical applications.

[0090] Figure 6a , Figure 6bA schematic diagram of the structure of an existing classic BHWC component and a schematic diagram of the light spot pattern formed on the field mirror are shown respectively.

[0091] like Figure 6a and Figure 6b As shown in the figure, the classic BHWC assembly is also composed of three concave spherical mirrors with equal curvature radii. The spherical mirror on the incident side is a rectangular field lens M3 with two notches. The two notches correspond to the incident position and the exit position respectively. The aiming side has two circular objective lenses M1 and M2. The reflection law of the classic BHWC assembly is basically the same as that of the classic PBWC assembly. In the end, two rows of cross-arranged light spots will be obtained on the field lens M3, and the light spots are distributed in a trapezoidal shape. The total number of light spots is 2×n BHWC -1, where n BHWC represents the number of light spots on the short bottom side of the trapezoid, and the number of times the spatial position of each light spot is reused is 1. In Figure 6, the first and second columns of light spots on the field lens M3 are focused by the objective lens M2 and the objective lens M1 respectively. The number of light spots on the objective lens M1 and the objective lens M2 is 1, and the number of times the spatial position of the light spots on the objective lens M1 and the objective lens M2 is reused is n. BHWC The number of passes N of the classic BHWC component BHWC for:

[0092] N BHWC =2×(2×n BHWC )

[0093] It should be pointed out that the mirror utilization rate of each spherical mirror and the number of times the spatial position of the light spot of the classic BHWC component are reused have the same defects as the classic PBWC component. Therefore, the classic BHWC component is also suitable for the design strategy of the double-sided field mirror. Unlike the adjacent positions of the incident point and the exit point of the classic PBWC component, the incident point and the exit point of the classic BHWC component are located at both ends of the field mirror, which can provide more installation space for the TDLAS technology laser transmitting and receiving devices.

[0094] In some embodiments, any one or both of the first circulation component and the second circulation component may also be a BHWC component. Specifically, the first circulation component and the second circulation component may be a BHWC component and a PBWC component, respectively, so that a multi-reverse air chamber based on BHWC-PBWC may be obtained. The first circulation component and the second circulation component may also be a PBWC component and a BHWC component, respectively, so that a multi-reverse air chamber based on PBWC-BHWC may be obtained. In addition, the first circulation component and the second circulation component may be a BHWC component, respectively, so that a multi-reverse air chamber based on BHWC-BHWC may be obtained. It should be noted that the multi-reflector air chamber based on BHWC-PBWC, the multi-reflector air chamber based on PBWC-BHWC and the multi-reflector air chamber based on BHWC-BHWC all use 5 spherical mirrors (for example, rectangular concave spherical mirrors), and the incident side mirror includes 2 spherical mirrors, and the aiming side mirror includes 3 spherical mirrors. Specifically, the incident side mirror includes a first spherical mirror M1 and a second spherical mirror M2 spliced ​​to each other, and the aiming side mirror includes a third spherical mirror M3, a fourth spherical mirror M4 and a fifth spherical mirror M5 spliced ​​to each other. The mirror spacing d between the incident side mirror and the aiming side mirror is equal to the curvature radius of each spherical mirror, and the above-mentioned reflection law is also applicable (each time the light undergoes a complete reflection process on the first circulation component, it will undergo a step of reflection on the second circulation component and form a new light spot on the field mirror M2 of the second circulation component), and is applicable to the calculation formula of the total number of passes and the optical path.

[0095] It should be noted that the number of light spot rows formed by the light on the incident side mirror is represented by n1, and the spacing between the light spot rows on the incident side mirror is represented by d r1 , the spot spacing on the incident side mirror is expressed as d c1 The number of light spot rows formed by the light on the aiming side mirror is expressed as n2, and the spacing between the light spot rows on the aiming side mirror is expressed as d r2 , the spot spacing on the aiming side mirror is expressed as d c2 .

[0096] Figure 7 A schematic diagram showing the positional relationship between the light spots formed on the mirror surfaces on both sides of the multi-reflector air chamber based on BHWC-PBWC and the curvature centers of each spherical mirror according to an embodiment of the present invention.

[0097] like Figure 7 As shown, in some embodiments, the first circulation component and the second circulation component can be a BHWC component and a PBWC component respectively, so that a multi-reverse air chamber based on BHWC-PBWC can be obtained.

[0098] Specifically, in the multi-reflection air chamber based on BHWC-PBWC, the third spherical mirror M3 is a rectangular concave spherical mirror with two upper and lower notches.

[0099] The first spherical mirror M1, the second spherical mirror M2, the fourth spherical mirror M4 and the fifth spherical mirror M5 are all rectangular concave spherical mirrors, and the fourth spherical mirror M4 and the fifth spherical mirror M5 are arranged (embedded) at the two gaps of the third spherical mirror M3, filling one gap respectively. In this way, the projection shape of the incident side mirror surface composed of the first spherical mirror M1 and the second spherical mirror M2 (the projection shape along the z-axis direction) is a rectangle, and the projection shape of the aiming side mirror surface composed of the third spherical mirror M3, the fourth spherical mirror M4 and the fifth spherical mirror M5 (the projection shape along the z-axis direction) is a rectangle.

[0100] In this embodiment, light can be incident from an incident point above the second spherical mirror M2 and aimed at the geometric center of the fifth spherical mirror M5, and after the incident light is reflected multiple times between the incident side mirror and the aiming side mirror, it can be emitted from an exit point "out" above the second spherical mirror M2 that is horizontally adjacent to the incident point "in".

[0101] Figure 8 A schematic diagram showing the positional relationship between the light spots formed on the mirror surfaces on both sides of the multi-reflector air chamber based on PBWC-BHWC and the curvature centers of each spherical mirror according to an embodiment of the present invention.

[0102] like Figure 8 As shown, in some embodiments, the first circulation component and the second circulation component can be a PBWC component and a BHWC component respectively, so that a multi-reverse gas chamber based on PBWC-BHWC can be obtained.

[0103] Specifically, in the multi-reflection air chamber based on PBWC-BHWC, the second spherical mirror M2 is a rectangular concave spherical mirror with two upper and lower notches.

[0104] The first spherical mirror M1, the third spherical mirror M3, the fourth spherical mirror M4 and the fifth spherical mirror M5 are all rectangular concave spherical mirrors, and the projection shape of the aiming side mirror surface is rectangular. Among them, the fourth spherical mirror M4 and the fifth spherical mirror M5 have the same size and are arranged side by side below the third spherical mirror M3 on the aiming side, spliced ​​with the bottom end of the third spherical mirror M3, and the sum of the widths of the fourth spherical mirror M4 and the fifth spherical mirror M5 is equal to the width of the third spherical mirror M3, so that the projection shape of the aiming side mirror surface (the projection shape along the z-axis direction) composed of the third spherical mirror M3, the fourth spherical mirror M4 and the fifth spherical mirror M5 is rectangular. The first spherical mirror M1 and the second spherical mirror M2 are spliced ​​with each other along the x-axis direction.

[0105] In this embodiment, light can be incident from the incident point "in" at the notch above the second spherical mirror M2 and aimed at the geometric center of the fifth spherical mirror M5, and after the incident light is reflected multiple times between the incident side mirror and the aiming side mirror, it can be emitted from the exit point "out" at the notch below the second spherical mirror M2.

[0106] Fig. 9 A schematic diagram showing the positional relationship between the light spots formed on the mirror surfaces on both sides of the BHWC-BHWC based multi-reflector air chamber and the curvature centers of the spherical mirrors according to an embodiment of the present invention.

[0107] like Fig. 9 As shown, in some embodiments, the first circulation component and the second circulation component can be a BHWC component respectively, so that a multi-reverse air chamber based on BHWC-BHWC can be obtained.

[0108] Specifically, in the multi-reflector air chamber based on BHWC-BHWC, the first spherical mirror M1 and the second spherical mirror M2 are rectangular concave spherical mirrors with a notch on the top, the first spherical mirror M1 and the second spherical mirror M2 are spliced ​​with each other along the x-axis direction and are symmetrical with respect to the y-axis. The third spherical mirror M3 is a rectangular concave spherical mirror with two notches on the top and the bottom.

[0109] The fourth spherical mirror M4 and the fifth spherical mirror M5 are both rectangular concave spherical mirrors, and the fourth spherical mirror M4 and the fifth spherical mirror M5 are arranged at the two notches of the third spherical mirror M3. In this way, the projection shape (projection shape along the z-axis direction) of the aiming side mirror surface composed of the third spherical mirror M3, the fourth spherical mirror M4 and the fifth spherical mirror M5 is a rectangle.

[0110] In this embodiment, light can be incident from the incident point "in" at the notch of the second spherical mirror M2 and aimed at the geometric center of the fifth spherical mirror M5, and after the incident light is reflected multiple times between the incident side mirror and the aiming side mirror, it can be emitted from the exit point "out" at the notch of the first spherical mirror M1.

[0111] like Figures 7 to 9 As shown, in the multi-reflection air chamber based on BHWC-PBWC, PBWC-BHWC and BHWC-BHWC, the first curvature center C1 of the first spherical mirror M1 and the second curvature center C2 of the second spherical mirror M2 are located on the aiming side mirror surface. The third curvature center C3 of the third spherical mirror M3, the fourth curvature center C4 of the fourth spherical mirror M4, and the fifth curvature center C5 of the fifth spherical mirror M5 are located on the incident side mirror surface. The incident point "in" is located on one side (above) of the second spherical mirror M2, and the aiming point "aim" is located at the geometric center of the fifth spherical mirror M5.

[0112] See also Figures 7 to 9The mirror coordinate axes shown in the figure, and the various parameters of the multi-reflection gas chambers based on BHWC-PBWC, PBWC-BHWC and BHWC-BHWC are shown in Table 2 below. Among them, the first circulation component corresponds to the small circulation a cell, and the second circulation component corresponds to the large circulation b cell. spots Indicates the number of light spots on each spherical mirror, n re N represents the number of times the spatial position of the light spot on each spherical mirror is reused, and d represents the mirror distance between the incident side mirror and the aiming side mirror. BP represents the number of passes through the multi-reverse air chamber based on BHWC-PBWC, N PB represents the number of passes through the multi-reverse air chamber based on PBWC-BHWC, N BB Indicates the number of passes through the multi-reverse air chamber based on BHWC-BHWC.

[0113] Table 2 Parameters of multi-reverse gas chambers based on BHWC-PBWC, PBWC-BHWC and BHWC-BHWC

[0114]

[0115]

[0116] The multi-reflector air chambers based on PBWC-PBWC, BHWC-PBWC, PBWC-BHWC and BHWC-BHWC provided according to the above embodiments of the present invention are all based on a dual-circulation reflection mode and consist of two circulation components.

[0117] In the embodiment of the present invention, the multi-reverse gas chamber based on two circulation components can be expanded to three or more circulation components.

[0118] Specifically, in an embodiment of the present invention, the multi-reflective air chamber may include an incident side mirror and an aiming side mirror arranged relatively on both sides, and the incident side mirror and the aiming side mirror respectively include a plurality of spherical mirrors (rectangular concave spherical mirrors) spliced ​​to each other. Wherein, a total of n circulation components are formed based on the incident side mirror and the aiming side mirror. Any of the n circulation components includes a field lens and an objective lens arranged relatively on both sides, that is, any circulation component may be a matrix-type multi-reflective air chamber having the characteristics of "one side is a field lens and one side is an objective lens". The present invention does not limit the specific type of the circulation component, as long as it meets the characteristics of "one side is a field lens and one side is an objective lens". Here, n can be a positive integer greater than or equal to 2.

[0119] Light can be incident from an incident point on one side of the field lens of one of the circulation components (hereinafter referred to as "the circulation component") and aimed at the geometric center of an objective lens of the circulation component (the geometric center is the current aiming point). After the light undergoes n-fold circular reflection between the incident side mirror and the aiming side mirror (wherein each circular reflection includes multiple reflections), it can be emitted from an exit point on one side of the field lens of the circulation component, and finally forms multiple rows and columns of light spots on the aiming side mirror and the incident side mirror, respectively.

[0120] It can be understood that the above-mentioned multi-reflector gas chamber is also an “n-fold circulation multi-reflector gas chamber.” In the n-fold circulation multi-reflector gas chamber, the incident point and the exit point are respectively located on one side of the field mirror of one of the circulation components.

[0121] In an embodiment of the present invention, under the premise that n is a positive integer greater than or equal to 2, for any n-fold circulating multi-reflector air chamber, taking the geometric center of an objective lens of one of the circulating components ("the circulating component") as the original aiming point, a new circulating component can be added on the basis of the n-fold circulating multi-reflector air chamber to form an n+1-fold circulating multi-reflector air chamber in the following manner: by respectively adding a first new spherical mirror and a second new spherical mirror at the incident point and the exit point positions on one side of the field lens of the above-mentioned one of the circulating components ("the circulating component") (or, respectively adding a first new spherical mirror and a second new spherical mirror at the above-mentioned exit point and the incident point positions), a new circulating component can be formed based on the spherical mirror at the original aiming point, the first new spherical mirror and the second new spherical mirror, and the spherical mirror at the original aiming point serves as the field lens of the new circulating component, and the first new spherical mirror and the second new spherical mirror serve as the objective lens of the new circulating component. In this way, a new circulation component is formed on the basis of the n-fold circulation multi-reflector air chamber, and on the basis of adding two new spherical mirrors to the original incident side mirror, a total of n+1 circulation components are formed based on the original incident side mirror (including the added first new spherical mirror and the second new spherical mirror) and the original aiming side mirror to obtain an n+1-fold circulation multi-reflector air chamber.

[0122] It is worth noting that it is sufficient to add two new spherical mirrors at the incident point and the exit point on one side of the field lens of one of the above-mentioned circulation components ("the circulation component"). In the embodiment of the present invention, in order to facilitate distinction, the two new spherical mirrors are respectively named as the first new spherical mirror and the second new spherical mirror.

[0123] Based on the above-mentioned n+1-fold circulation multi-reflection air chamber, light can be incident from a new incident point on the field lens side of the new circulation component (i.e., the spherical mirror where the original aiming point is located) and aim at the geometric center of the first new spherical mirror or the second new spherical mirror (i.e., any objective lens of the new circulation component) (as a new aiming point), and after the light undergoes n+1-fold circulation reflection between the incident side mirror surface and the aiming side mirror surface, it can be emitted from a new exit point on the field lens side of the new circulation component, and finally forms multiple rows and columns of light spots on the aiming side mirror surface and the incident side mirror surface, respectively. It can be understood that in the n+1-fold circulation multi-reflection air chamber, the new incident point and the new exit point are respectively located on the field lens side of the new circulation component.

[0124] It should be noted that, in the embodiments of the present invention, the types of circulation components may include PBWC components, BHWC components, and Chernin matrix multi-reflector gas chambers, but are not limited to these three types. The circulation component in the present invention may be any matrix multi-reflector gas chamber having the characteristics of "one side is a field lens and the other side is an objective lens".

[0125] Taking the double multi-reflector air chamber based on PBWC-PBWC as an example, it can be expanded into a triple multi-reflector air chamber based on PBWC-PBWC-PBWC by the following method: two new spherical mirrors (rectangular concave spherical mirrors) are respectively added at the current exit point "out" and incident point "in" of the original multi-reflector air chamber based on PBWC-PBWC: the sixth spherical mirror M6 (corresponding to the above-mentioned "second new spherical mirror") and the seventh spherical mirror M7 (corresponding to the above-mentioned "first new spherical mirror"). In this way, the fifth spherical mirror M5, the sixth spherical mirror M6 and the seventh spherical mirror M7 based on the original aiming point (the original aiming point of the double multi-reflector air chamber based on PBWC-PBWC) can form a new circulation component (the third circulation component PBWC-c), and the sixth spherical mirror M6 and the seventh spherical mirror M7 serve as the two objective lenses of the new circulation component (the third circulation component PBWC-c), and the fifth spherical mirror M5 serves as the field lens of the new circulation component (the third circulation component PBWC-c). In this way, a new circulation component (the third circulation component PBWC-c) is formed on the basis of the double circulation multi-reflector air chamber based on PBWC-PBWC, and two new spherical mirrors are added to the original incident side mirror. Based on the original incident side mirror (including the added sixth spherical mirror M6 and the seventh spherical mirror M7) and the original aiming side mirror, three circulation components (PBWC) are formed in total, and a triple multi-reflector air chamber based on PBWC-PBWC-PBWC is obtained.

[0126] Furthermore, the sixth curvature center C6 of the sixth spherical mirror M6 can be adjusted to the center position of the fifth spherical mirror M5, the seventh curvature center C7 of the seventh spherical mirror M7 can be adjusted to the right side of C6 on the fifth spherical mirror M5, the incident light is adjusted to the right side of the fifth spherical mirror M5, and the center position of the seventh spherical mirror M7 is used as the aiming point. Accordingly, a triple multi-reflection air chamber based on PBWC-PBWC-PBWC can be constructed.

[0127] By adopting the above method, a PBWC-PBWC based multi-reverse air chamber with a pass number of 114 can be expanded to a PBWC-PBWC-PBWC based multi-reverse air chamber with a pass number of 398. Fig.10 A schematic diagram of light spot patterns formed on the mirror surfaces on both sides of a multi-reflective gas chamber based on PBWC-PBWC-PBWC according to an embodiment of the present invention is shown.

[0128] Fig.11 The line graph shows the optical path and optical path volume ratio of n-fold circulation multi-reflector gas chambers with different numbers of light spot rows on the field mirror of PBWC. Fig.11 As shown, by increasing the number of circulation components and the number of times the circulation components are passed, the optical path and optical path volume ratio of the gas cell are significantly improved.

[0129] In summary, the multi-reflection air chamber provided according to the embodiment of the present invention comprises incident side mirrors and aiming side mirrors arranged relatively on both sides, the incident side mirrors and aiming side mirrors respectively comprise a plurality of spherical mirrors spliced ​​to each other, wherein a plurality of circulation components are formed based on the incident side mirrors and the aiming side mirrors, and any circulation component comprises a field lens and an objective lens arranged relatively on both sides, and light can be incident from an incident point on one side of the field lens of one of the circulation components and aim at the geometric center of an objective lens of the circulation component, and after multiple circular reflections between the incident side mirror and the aiming side mirror, it is emitted from an exit point on one side of the field lens of the circulation component, and finally multiple rows and columns of light spots are formed on the aiming side mirror and the incident side mirror respectively. It can be seen that the multi-reflection air chamber of the present invention has a simple structure, and can achieve a synchronous improvement in the utilization rate of the double-sided mirrors and the number of times the spatial position of the light spot is reused, thereby improving the optical path, and further improving the detection accuracy and stability of the multi-reflection air chamber for trace gases.

[0130] Further, according to the technical solution of the present invention, by adding two new spherical mirrors at the incident point and the exit point of one side of the field mirror of one of the circulation components, a new circulation component can be formed based on the spherical mirror at the original aiming point, the first new spherical mirror and the second new spherical mirror, and the spherical mirror at the original aiming point is used as the field mirror of the new circulation component, and the two new spherical mirrors are used as the objective lenses of the new circulation component, thereby obtaining a multi-reflector air chamber with more multiple cycles. In this way, by increasing the number of circulation components, the optical path and optical path volume ratio of the multi-reflector air chamber can be further improved.

[0131] In addition, the present invention also includes the following embodiments: A11, a multi-reflector air chamber as described in A9 or A10, wherein each time the light undergoes a complete reflection process on the first circulation component, it is suitable for forming a continuous 2×(2×n2-1) light spots on the first circulation component, wherein n2 represents the number of light spot rows formed by the light on the aiming side mirror surface; the light undergoes the first complete reflection process on the first circulation component, which is suitable for forming the first to 2×(2×n2-1) light spots on the first circulation component; the first number is n2-1, and the second number is n2. A12, a multi-reflector air chamber as described in A11, wherein the number of complete reflection processes performed by the light on the first circulation component is equal to the number of light spots formed on the field lens of the second circulation component, 2×n1, wherein n1 represents the number of light spot rows formed by the light on the incident side mirror surface; the number of times the spatial position of each light spot on the field lens of the first circulation component is reused is equal to the number of complete reflection processes performed by the light on the first circulation component, 2×n1. A13. The multi-reflection air chamber as described in A12, wherein the total number of passes of the multi-reflection air chamber is N. PP =[2×(2×n2-1)]×(2×n1)+2, wherein n1 and n2 are both positive integers; the optical path of the multi-reflection air chamber opl=N PP ×d, where d represents the mirror distance between the incident side mirror and the aiming side mirror. A14. A multi-reflector air chamber as described in any one of A4-A13, wherein the distance between the first curvature center of the first spherical mirror and the second curvature center of the second spherical mirror is d r2 / 2, where d r2 represents the spot line spacing on the aiming side mirror surface; the distance between the fourth curvature center of the fourth spherical mirror and the fifth curvature center of the fifth spherical mirror is d r1 / 2, where d r1Indicates the spot row spacing on the incident side mirror. A15. A multi-reflector air chamber as described in A6, wherein the first circulation component and the second circulation component are respectively a BHWC component and a PBWC component; the third spherical mirror is a rectangular concave spherical mirror with two upper and lower notches; the first spherical mirror, the second spherical mirror, the fourth spherical mirror and the fifth spherical mirror are all rectangular concave spherical mirrors, and the fourth spherical mirror and the fifth spherical mirror are arranged at the two notches of the third spherical mirror, and the projection shapes of the incident side mirror and the aiming side mirror are both rectangular; the light is suitable for emitting from an exit point above the second spherical mirror and horizontally adjacent to the incident point. A16. A multi-reflector air chamber as described in A6, wherein the first circulation component and the second circulation component are respectively a PBWC component and a BHWC component; the second spherical mirror is a rectangular concave spherical mirror with two upper and lower notches; the first spherical mirror, the third spherical mirror, the fourth spherical mirror and the fifth spherical mirror are all rectangular concave spherical mirrors, and the projection shape of the aiming side mirror surface is a rectangle; the light is suitable for being incident from the incident point at the notch above the second spherical mirror and aiming at the geometric center of the fifth spherical mirror, and is suitable for being emitted from the exit point at the notch below the second spherical mirror. A17. A multi-reflector air chamber as described in A6, wherein the first circulation component and the second circulation component are respectively a BHWC component; the first spherical mirror and the second spherical mirror are respectively rectangular concave spherical mirrors with a notch on the top and are symmetrical with respect to the y-axis, and the third spherical mirror is a rectangular concave spherical mirror with two upper and lower notches; the fourth spherical mirror and the fifth spherical mirror are both rectangular concave spherical mirrors, and the fourth spherical mirror and the fifth spherical mirror are arranged at the two notches of the third spherical mirror, and the projection shape of the aiming side mirror surface is a rectangle; the light is suitable for being incident from the incident point at the notch of the second spherical mirror and aiming at the geometric center of the fifth spherical mirror, and is suitable for being emitted from the exit point at the notch of the first spherical mirror.

[0132] In the description of this specification, unless otherwise clearly specified and limited, the terms "connected", "fixed", etc. should be understood in a broad sense. In addition, the directions or positional relationships indicated by the terms "front", "rear", "upper", "lower", "inner", "outer", "top", "bottom", etc. are based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the equipment or unit referred to must have a specific direction, be constructed and operated in a specific orientation, and therefore, cannot be understood as limiting this application.

[0133] In the description provided herein, a large number of specific details are described. However, it is understood that the embodiments of the present application can be practiced without these specific details. In some instances, well-known methods, structures and techniques are not shown in detail so as not to obscure the understanding of this description.

[0134] Similarly, it should be understood that in order to streamline the disclosure and help understand one or more of the various application aspects, in the above description of the exemplary embodiments of the present application, the various features of the present application are sometimes grouped together into a single embodiment, figure, or description thereof. However, the disclosed method should not be interpreted as reflecting the following intention: the claimed application requires more features than the features clearly stated in each claim. Therefore, the claims following the specific embodiment are hereby expressly incorporated into the specific embodiment, wherein each claim itself serves as a separate embodiment of the present application.

[0135] Those skilled in the art will appreciate that the modules or units or components of the devices in the examples disclosed herein may be arranged in the devices described in the embodiment, or alternatively may be located in one or more devices different from the devices in the examples. The modules in the foregoing examples may be combined into one module or may be divided into multiple submodules.

[0136] Those skilled in the art will appreciate that the modules in the devices in the embodiments may be adaptively changed and arranged in one or more devices different from the embodiments. The modules or units or components in the embodiments may be combined into one module or unit or component, and furthermore may be divided into a plurality of submodules or subunits or subcomponents.

Claims

1. A multi-reflection air chamber, comprising an incident side mirror and an aiming side mirror arranged on both sides, wherein the incident side mirror and the aiming side mirror respectively comprise a plurality of spherical mirrors spliced ​​together; in, Based on the incident side mirror and the aiming side mirror, a total of n circulation components are formed, and any of the circulation components includes a field lens and an objective lens arranged relatively on two sides, and n is a positive integer greater than or equal to 2; The light is suitable for incident from an incident point on one side of a field lens of one of the circulation components and aiming at the geometric center of an objective lens of the circulation component, and is suitable for being emitted from an exit point on one side of the field lens of the circulation component after n-fold circular reflection between the incident side mirror surface and the aiming side mirror surface, and finally forming a plurality of rows and columns of light spots on the aiming side mirror surface and the incident side mirror surface respectively; The incident side mirror surface includes a first spherical mirror and a second spherical mirror spliced ​​together, and the aiming side mirror surface includes a third spherical mirror, a fourth spherical mirror and a fifth spherical mirror spliced ​​together; a first circulation component is formed based on the third spherical mirror, the first spherical mirror and the second spherical mirror, and the third spherical mirror serves as a field lens of the first circulation component, and the first spherical mirror and the second spherical mirror serve as objective lenses of the first circulation component respectively; A second circulation component is formed based on the second spherical mirror, the fourth spherical mirror and the fifth spherical mirror, and the second spherical mirror serves as the field lens of the second circulation component, and the fourth spherical mirror and the fifth spherical mirror serve as the objective lenses of the second circulation component respectively.

2. The multi-reflection air chamber as claimed in claim 1, wherein the geometric center of an objective lens of the circulation assembly is used as the original aiming point. in, A first new spherical mirror and a second new spherical mirror are respectively added at the positions of the incident point and the exit point on one side of the field mirror of one of the circulation components, based on the spherical mirror at the original aiming point, the first new spherical mirror and the second new spherical mirror are suitable for forming a new circulation component, and the spherical mirror at the original aiming point serves as the field mirror of the new circulation component, and the first new spherical mirror and the second new spherical mirror serve as the objective lenses of the new circulation component; The light is suitable for being incident from a new incident point on one side of the field lens of the new circulation component and aiming at the geometric center of the first new spherical mirror or the second new spherical mirror, and is suitable for being emitted from a new exit point on one side of the field lens of the new circulation component after n+1 cycles of reflection between the incident side mirror and the aiming side mirror, and finally forming multiple rows and columns of light spots on the aiming side mirror and the incident side mirror respectively.

3. The multi-reflector gas chamber as described in claim 1 or 2, wherein the types of the circulation components include Pickett Bradley White cell (PBWC) components, Bernstein Herzberg White cell (BHWC) components, and Chernin multipass matrix system matrix multi-reflector gas chamber.

4. The multi-reverse gas chamber according to claim 1, wherein: The light is suitable for being incident from the incident point on one side of the second spherical mirror and aiming at the geometric center of the fifth spherical mirror, and is suitable for being emitted from the exit point on one side of the second spherical mirror after undergoing two-fold circular reflection between the incident side mirror and the aiming side mirror, wherein each time the light undergoes a complete reflection process on the first circulation component, it will undergo a step reflection on the second circulation component and form a light spot on the field mirror of the second circulation component, ultimately forming two columns of light spots on the aiming side mirror and four columns of light spots on the incident side mirror.

5. The multi-reverse gas chamber according to claim 4, wherein: The curvature radii of the first spherical mirror, the second spherical mirror, the third spherical mirror, the fourth spherical mirror and the fifth spherical mirror are equal, and the mirror spacing between the incident side mirror surface and the aiming side mirror surface is equal to the curvature radius.

6. The multi-reverse gas chamber according to claim 4, wherein: The first circulation component and the second circulation component are respectively a PBWC component or a BHWC component.

7. The multi-reverse gas chamber according to claim 6, wherein: The first circulation component and the second circulation component are each a PBWC component; The first spherical mirror, the second spherical mirror, the third spherical mirror, the fourth spherical mirror and the fifth spherical mirror are all rectangular concave spherical mirrors, and the projection shapes of the incident side mirror surface and the aiming side mirror surface are all rectangular; Each reflection includes multiple reflections.

8. The multi-reverse gas chamber according to claim 7, wherein: The first curvature center of the first spherical mirror is located at the geometric center of the third spherical mirror; The second curvature center of the second spherical mirror is located directly below the first curvature center; The third curvature center of the third spherical mirror is located at the center position of the boundary line between the first spherical mirror and the second spherical mirror; The fourth curvature center of the fourth spherical mirror is located at the geometric center of the second spherical mirror and is on the same horizontal line as the third curvature center; The fifth curvature center of the fifth spherical mirror is located directly above the fourth curvature center.

9. The multi-reverse gas chamber according to claim 4, wherein: Each time the light undergoes a complete reflection process on the first circulation component, it is suitable for forming a plurality of continuous light spots on the first circulation component.

10. The multi-reverse gas chamber according to claim 9, wherein: Forming a plurality of continuous light spots on the first circulation component, comprising: sequentially forming a light spot sequence on the field lens of the first circulation component, wherein the light spot sequence includes a third number of light spots; Overlapping a second number of light spots at the same position on the second spherical mirror of the first circulation component, the second number is used to represent the number of times the spatial position of each light spot on the second spherical mirror is reused; and A first number of light spots are overlapped at the same position on the first spherical mirror of the first circulation component, and the first number is used to represent the number of times the spatial position of each light spot on the first spherical mirror is reused.

11. The multi-reverse gas chamber according to claim 10, wherein: Each time the light undergoes a complete reflection process on the first circulation component, it is suitable for forming 2×(2×n2-1) continuous light spots on the first circulation component, where n2 represents the number of light spot rows formed by the light on the aiming side mirror surface; The light undergoes a first complete reflection process on the first circulation component, and is suitable for forming the first to 2×(2×n2-1) light spots on the first circulation component; The first number is n2-1, and the second number is n2.

12. The multi-reflector gas chamber according to claim 11, wherein: The number of complete reflection processes of the light on the first circulation component is equal to the number of light spots formed on the field mirror of the second circulation component, 2×n1, where n1 represents the number of light spot rows formed by the light on the incident side mirror surface; The number of times the spatial position of each light spot on the field lens of the first circulation component is reused is equal to the number of complete reflection processes of the light on the first circulation component (2×n1).

13. The multi-reverse gas chamber according to claim 12, wherein: The total number of times N the multi-reverse air chamber passes through PP =[2×(2×n2-1)]×(2×n1)+2, where n1 and n2 are both positive integers; The optical path of the multi-reflection air chamber opl=N PP ×d, where d represents the mirror distance between the incident side mirror and the aiming side mirror.

14. The multi-reverse gas chamber according to claim 4, wherein: The distance between the first curvature center of the first spherical mirror and the second curvature center of the second spherical mirror is d r2 / 2, where d r2 Indicates the spot row spacing on the aiming side mirror surface; The distance between the fourth curvature center of the fourth spherical mirror and the fifth curvature center of the fifth spherical mirror is d r1 / 2, where d r1 It represents the spacing between the light spot rows on the incident side mirror.

15. The multi-reverse gas chamber according to claim 6, wherein: The first circulation component and the second circulation component are respectively a BHWC component and a PBWC component; The third spherical mirror is a rectangular concave spherical mirror with two upper and lower notches; The first spherical mirror, the second spherical mirror, the fourth spherical mirror and the fifth spherical mirror are all rectangular concave spherical mirrors, and the fourth spherical mirror and the fifth spherical mirror are arranged at two notches of the third spherical mirror, and the projection shapes of the incident side mirror surface and the aiming side mirror surface are both rectangular; The light is suitable for emitting from an emission point above the second spherical mirror and horizontally adjacent to the incident point.

16. The multi-reverse gas chamber according to claim 6, wherein: The first circulation component and the second circulation component are respectively a PBWC component and a BHWC component; The second spherical mirror is a rectangular concave spherical mirror with two upper and lower notches; The first spherical mirror, the third spherical mirror, the fourth spherical mirror and the fifth spherical mirror are all rectangular concave spherical mirrors, and the projection shape of the aiming side mirror surface is a rectangle; The light is suitable for being incident from an incident point at the notch above the second spherical mirror and aiming at the geometric center of the fifth spherical mirror, and is suitable for being emitted from an exit point at the notch below the second spherical mirror.

17. The multi-reverse gas chamber according to claim 6, wherein: The first circulation component and the second circulation component are each a BHWC component; The first spherical mirror and the second spherical mirror are respectively rectangular concave spherical mirrors with a notch on the top and symmetrical with respect to the y-axis, and the third spherical mirror is a rectangular concave spherical mirror with two notches on the top and the bottom; The fourth spherical mirror and the fifth spherical mirror are both rectangular concave spherical mirrors, and the fourth spherical mirror and the fifth spherical mirror are arranged at two notches of the third spherical mirror, and the projection shape of the aiming side mirror surface is a rectangle; The light is suitable for being incident from the incident point at the notch of the second spherical mirror and aiming at the geometric center of the fifth spherical mirror, and is suitable for being emitted from the exit point at the notch of the first spherical mirror.

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