Depth of field distance measurement method, device, equipment and storage medium based on liquid microscope lens

Abstract

The present application relates to a depth of field distance measurement method, device, equipment and storage medium based on a liquid microscope lens, which is applied in the field of defect detection technology, including obtaining a fused image of the corresponding area of ​​the object to be detected, and a focal plane array corresponding to the fused image; identifying the contour of the object to be detected in the fused image, and correspondingly determining the target contour in the focal plane array; calculating the physical quantity height of each pixel in the target contour according to the focal length to physical quantity height calculation formula, and generating a plane height map corresponding to the object to be detected. The technical effect of the present application is that there is no need to perform plane height measurement, adjust the camera and other steps before acquisition, thereby saving detection time and improving the efficiency of defect detection.

Description

Technical Field

[0001] The present application relates to the field of defect detection technology, and in particular to a depth of field distance measurement method, device, equipment and storage medium based on a liquid microscope lens. Background Art

[0002] With the vigorous development of the semiconductor industry, wafers, as the basic material for manufacturing chips, have a processing quality that directly determines the yield and quality of subsequent chip products. Affected by various factors such as process and raw materials, defects may occur in processes such as crystal growth and chemical vapor deposition. The surface defects of wafers are usually very small, and the morphological structures are diverse and complex.

[0003] Chemical mechanical polishing (CMP) is a key process for achieving wafer surface flatness during integrated circuit manufacturing. The CMP process combines surface chemical action and mechanical grinding technology to remove different materials on the wafer surface at the micron / nano level, thereby achieving the requirements of nano-level wafer surface flatness, low surface roughness and low defects, allowing the next lithography process to be carried out.

[0004] Even under the CMP process, the wafer surface is not absolutely flat, and after processes such as chemical vapor deposition, physical vapor deposition, photolithography, and etching, the wafer surface undergoes fundamental changes, and it is even more impossible to be absolutely flat. In the prior art, one of the cores to ensure a high detection rate of wafer surface defects is to obtain high-precision and clear wafer surface images. Since the wafer surface is not absolutely flat, the plane height is not the same at different positions on the wafer. Therefore, in order to obtain high-precision and clear wafer surface images, before collecting the image, it is necessary to first use the ranging module to determine the plane height at the target position at the target position, and then determine the height of the camera at the target position that matches the target focal length, so as to adjust the camera and perform image acquisition to obtain the image corresponding to the target position.

[0005] The inventors have discovered that the above-mentioned method of measuring the plane height and then adjusting the camera position to collect images requires the steps of measuring the plane height and adjusting the camera before image collection. In order to ensure the accuracy and consistency of the defect detection results of the wafer, the wafer surface image acquisition stage is usually holistic, that is, the above-mentioned image acquisition method is integrated into a system, and images of various positions need to be acquired from the initial position according to a preset path until all wafers are covered. That is, after the focal length and camera height are set, the camera height of all positions on the wafer needs to be adjusted with the set focal length. If the focal length changes or there is a problem with the camera height setting, all collected images will have problems, and the wafer surface image needs to be acquired again, which will consume a lot of time and result in relatively low efficiency of defect detection. Summary of the invention

[0006] In order to help solve the problem of camera focal length change or camera height setting problem, which results in a large amount of time consumption and low efficiency of defect detection due to re-acquisition of wafer surface image, the present application provides a depth of field ranging method, device, equipment and storage medium based on a liquid microscope lens.

[0007] In a first aspect, the present application provides a depth of field ranging method based on a liquid microscope lens, adopting the following technical solution: the method is applied to a depth of field ranging system, the depth of field ranging system includes a liquid microscope lens, and the liquid microscope lens is used to obtain an image of an object to be detected, and the method includes:

[0008] Acquire a fused image of a region corresponding to the object to be detected, and a focal plane array corresponding to the fused image;

[0009] Identifying the contour of the object to be detected in the fused image, and correspondingly determining the target contour in the focal plane array;

[0010] According to the focal length to physical quantity height calculation formula, the physical quantity height of each pixel in the target contour is calculated, and a plane height map corresponding to the object to be detected is generated.

[0011] Through the above technical solution, a liquid microscope lens is used to photograph the object to be inspected, and a fused image with high definition is obtained after the photographed image is fused. Each pixel in the image has a corresponding focal length, so that the focal length plane array corresponding to the fused image can be obtained. According to the focal length plane array, the height corresponding to each pixel of the target contour of the object to be inspected can be calculated to generate a plane height map, so that depth of field ranging can be achieved through the plane height image. Using a liquid microscope lens for depth of field ranging does not require steps such as plane height measurement and camera adjustment before acquisition, thereby saving detection time and improving the efficiency of defect detection.

[0012] In a specific implementation manner, obtaining a fused image of a region corresponding to the object to be detected includes:

[0013] Acquire a focal length sequence, adjust the focal length of the liquid microscope lens in sequence according to the focal length sequence, and acquire images in sequence to generate an image set with different focal lengths corresponding to the area of ​​the object to be detected;

[0014] Perform image fusion on all images in the image set to generate a fused image of a region corresponding to the object to be detected.

[0015] Through the above technical solution, after the image of the corresponding area of ​​the object to be detected is processed by image fusion, the obtained fused image has higher clarity and resolution. Using the fused image for depth of field ranging can improve the accuracy of the ranging result.

[0016] In a specific implementation manner, the image fusion of all images in the image set includes:

[0017] Based on the image set, determining a standard image of a corresponding area of ​​the object to be detected and setting it as a target standard image;

[0018] Based on the ratio of the target standard image, converting the ratios of the images of the corresponding areas of the remaining objects to be detected in the image set into the ratio of the target standard image;

[0019] Identifying clear areas of images corresponding to areas of the object to be detected in the image set one by one;

[0020] The clear area of ​​the image corresponding to the area of ​​the object to be detected is identified and image fused.

[0021] Through the above technical solution, the clear areas in several images of different proportions obtained according to different focal length sequences are fused, and the final fused image contains more comprehensive and detailed information about the object to be detected, which improves the clarity and resolution of the fused image. After determining the target standard image, the remaining image proportions are converted to the proportions of the standard image to unify the image proportions. Due to different proportions when shooting, there may be differences in the scale of the images. If the scale alignment is not performed during the fusion process, distortion or dislocation may occur in the result image; therefore, by unifying the image proportions, image scale alignment is achieved, thereby eliminating scale differences and ensuring that the images can correspond correctly during fusion, thereby obtaining a higher quality fused image and making the fused image clearer.

[0022] In a specific implementation manner, the depth of field ranging system further includes an illumination unit, and the illumination unit is used to provide a light source for the object to be detected, and the method further includes:

[0023] When acquiring a fused image of a region corresponding to the object to be detected, the illumination unit is controlled to adjust the intensity of the irradiated light according to the height of the liquid microscope lens from the object to be detected.

[0024] In a specific implementation manner, controlling the illumination unit to adjust the illumination intensity according to the height of the liquid microscope lens from the object to be detected comprises:

[0025] The lower the height of the liquid microscope head from the object to be detected is, the stronger the light intensity irradiating the object to be detected is.

[0026] Through the above technical solution, in the process of the liquid microscope lens acquiring the image of the object to be inspected, the light intensity is adjusted in real time to ensure the lighting effect, thereby improving the quality of the acquired image, making it more helpful for subsequent defect detection work such as ranging.

[0027] In a specific possible implementation scheme, the liquid microscope lens uses time-sharing stroboscopic technology to sequentially acquire images of the object to be detected.

[0028] Through the above technical solution, the time-sharing stroboscopic technology is adopted, so that the brightness range at each time point is different, and multiple light source effect images are obtained in one shooting, thereby obtaining the best imaging effect.

[0029] In a specific possible implementation manner, the acquired fused image of the corresponding area of ​​the object to be detected is a color image.

[0030] Through the above technical solution, full-color images are directly used for ranging. Color images can obtain more detailed information of the object to be detected, avoiding errors in ranging results caused by the loss of color information in black and white images, thereby improving the accuracy of ranging results.

[0031] In a second aspect, the present application provides a depth-of-field distance measuring device based on a liquid microscope lens, adopting the following technical solution: the device is applied to a depth-of-field distance measuring system, the depth-of-field distance measuring system includes a liquid microscope lens, the liquid microscope lens is used to obtain an image of an object to be detected, and the device includes:

[0032] An information acquisition module, used to acquire a fused image of a region corresponding to the object to be detected, and a focal plane array corresponding to the fused image;

[0033] A contour recognition module, used to recognize the contour of the object to be detected in the fused image, and correspondingly determine the target contour in the focal plane array;

[0034] The distance calculation module is used to calculate the physical quantity height of each pixel in the target contour according to the focal length to physical quantity height calculation formula, and generate a plane height map corresponding to the object to be detected.

[0035] In a third aspect, the present application provides a computer device, which adopts the following technical solution: it includes a memory and a processor, and the memory stores a computer program that can be loaded by the processor and execute any of the above-mentioned depth of field ranging methods based on liquid microscope lenses.

[0036] In a fourth aspect, the present application provides a computer-readable storage medium, which adopts the following technical solution: storing a computer program that can be loaded by a processor and execute any of the above-mentioned depth of field ranging methods based on a liquid microscope lens.

[0037] In summary, this application has the following beneficial technical effects:

[0038] The object to be inspected is photographed with a liquid microscope lens, and the photographed images are fused to obtain a fused image with higher clarity. Each pixel in the image has a corresponding focal length, so the focal length plane array corresponding to the fused image can be obtained. The height corresponding to each pixel of the target contour of the object to be inspected can be calculated based on the focal length plane array, and a plane height map can be generated, so that depth of field ranging can be achieved through the plane height image. Using a liquid microscope lens for depth of field ranging does not require steps such as plane height measurement and camera adjustment before acquisition, thereby saving detection time and improving the efficiency of defect detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 is a flow chart of a depth of field distance measurement method based on a liquid microscope lens in an embodiment of the present application;

[0040] Figure 2 is a schematic diagram of a plane height map generated in an embodiment of the present application;

[0041] Figure 3 is a schematic diagram of a depth of field distance measuring device based on a liquid microscope lens in an embodiment of the present application;

[0042] Figure 4 It is a schematic diagram used to embody a computer device in an embodiment of the present application.

[0043] Reference numerals: 301, information acquisition module; 302, contour recognition module; 303, distance calculation module. DETAILED DESCRIPTION

[0044] The following combination Figure 1-Figure 4 This application is described in further detail.

[0045] The embodiment of the present application discloses a depth of field ranging method based on a liquid microscope lens, which is applied to a depth of field ranging system, and the depth of field ranging method is implemented based on a liquid microscope lens. After the liquid microscope lens obtains a number of images of the corresponding area of ​​the object to be detected according to the focal length sequence, the image fusion processing is performed on the several images to obtain a fused image with high clarity and resolution, and after identifying the contour of the object to be detected, the target contour is determined by the focal length corresponding to each pixel point in the fused image, and then the physical height corresponding to each pixel point in the target contour can be obtained according to the calculation method of converting the preset focal length and the physical quantity height, and a plane height map corresponding to the object to be detected is generated accordingly, and the height distance of the circuit or component can be measured according to the plane height map, thereby realizing depth of field ranging.

[0046] At present, distance measurement mainly relies on a distance measurement module, which first measures the distance and then adjusts the camera focus to capture the image. However, it takes a lot of time to completely cover the wafer by first measuring the distance and then adjusting the focus, which reduces the efficiency of wafer inspection. In order to help save wafer inspection time and improve wafer inspection efficiency, this application provides a depth of field distance measurement method based on a liquid microscope lens.

[0047] Reference Figure 1 , the method comprises the following steps:

[0048] S10, acquiring a fused image of a region corresponding to the object to be detected and a focal plane array corresponding to the fused image.

[0049] Specifically, a liquid microscope lens is used to take images of several objects to be inspected, which may be a certain circuit on a wafer or a certain device in a circuit, and several images are fused to obtain a fused image of the corresponding area of ​​the object to be inspected, as well as a focal plane array corresponding to the fused image. The focal plane array can be understood as the focal length corresponding to each pixel in the fused image, thereby forming a focal plane array.

[0050] S20, identifying the contour of the object to be detected in the fused image, and correspondingly determining the target contour in the focal length array.

[0051] Specifically, the contour of the object to be detected in the fused image obtained by image processing and other technologies can be identified and mapped to the focal plane array. The target contour of the object to be detected in the focal plane array can be determined based on the contour correspondence in the fused image, so as to calculate the height of the object to be detected.

[0052] S30, calculating the physical quantity height of each pixel in the target contour according to the focal length to physical quantity height calculation formula, and generating a plane height map corresponding to the object to be detected.

[0053] Specifically, the correspondence between the focal length and the physical quantity height is set in advance. For example, when the focal length is 1, the corresponding actual physical quantity height is 1 nanometer, when the focal length is 2, the corresponding actual physical quantity height is 2 nanometers, or when the focal length is 1, the corresponding actual physical quantity height is 0.1 nanometers. The actual correspondence can be set by the user according to the actual measured situation in actual application, and there is no restriction here; in the obtained focal length array, the focal length corresponding to the contour of the object to be detected can be obtained accordingly, and according to the correspondence between the focal length and the physical quantity height set in advance, the physical quantity height corresponding to each pixel in the target contour can be calculated, and a plane height map of the object to be detected can be generated according to the physical quantity height; the plane height map can be understood as a height map formed by different height parts in the object to be detected, for example, referring to Figure 2, is an example of a plane height map. Through height lines at different heights, the distance between different parts can be calculated, thereby realizing depth of field ranging.

[0054] In the present application, a liquid microscope lens is used to photograph the object to be inspected, and the photographed image is fused to obtain a fused image with higher clarity. Each pixel in the image has a corresponding focal length, so that the focal length plane array corresponding to the fused image can be obtained. According to the focal length plane array, the height corresponding to each pixel of the target contour of the object to be inspected can be calculated to generate a plane height map, so that depth of field ranging can be achieved through the plane height image. Using a liquid microscope lens for depth of field ranging does not require steps such as plane height measurement and camera adjustment before acquisition, thereby saving detection time and improving the efficiency of defect detection.

[0055] In one embodiment, the step of acquiring a fused image of a region corresponding to the object to be detected may be specifically performed as follows:

[0056] A focal length sequence is obtained. The value of the focal length sequence and the number of focal lengths in the focal length sequence can be set according to the actual needs of the user. After the user sets the focal length sequence, it is transmitted to the system. The system obtains the focal length sequence, controls the liquid microscope head to adjust the focal length according to the obtained focal length sequence, and acquires images in sequence according to the focal length sequence; one focal length of the liquid microscope head corresponds to one image. The user sets the number of focal lengths included in the focal length sequence, that is, adjusts the focal length of the liquid microscope head according to the focal length sequence, acquires images in sequence, and then generates a set of images with different focal lengths corresponding to the area of ​​the object to be detected.

[0057] Afterwards, all images in the image set are fused to generate a fused image of the area corresponding to the object to be detected. The obtained fused image fuses the clear areas in all images to generate a target clear image corresponding to the target area, thereby improving the clarity of the image of the object to be detected.

[0058] In the present application, after the images of the corresponding area of ​​the object to be detected are processed by image fusion, the obtained fused image has higher clarity and resolution. Using the fused image for depth of field ranging can improve the accuracy of the ranging result.

[0059] In one embodiment, the step of performing image fusion on all images in the image set may be specifically performed as follows:

[0060] First, based on the image set, a standard image of the corresponding area of ​​the object to be detected is determined and set as the target standard image, that is, a standard image is determined in the generated image set. The standard image can be determined by calculating the area of ​​the clear area in each image, and the image with the largest clear area is set as the target standard image. In addition, the method for determining the standard image can also be selected according to the image quality actually captured by the user, which is not limited here; then, based on the ratio of the standard image, the ratios of the remaining images in the image set are converted into the ratios of the standard image to unify the image ratios in the image set; images obtained at different focal lengths in the focal length sequence have different image ratios, and different ratios may cause differences in scales of the collected images. If scale alignment is not performed during the fusion process, distortion or dislocation may occur in the result image, which may reduce the image quality and thus may cause inaccurate ranging results. Therefore, it is necessary to unify the image ratios to improve the image quality.

[0061] After unifying the image ratio, all acquired images are fused. Specifically, the clear area of ​​each image in the image set is identified one by one, and the clear areas of all images are fused to finally generate a fused image with higher clarity. Since the surface of the object to be detected is uneven, the acquired image will be affected by the depth of field and cause the image to be unclear. Through image fusion, all clear areas of the images acquired at different focal lengths are fused, thereby solving the problem of unclear images and improving image quality.

[0062] In the present application, the clear areas in several images of different proportions obtained according to different focal length sequences are fused, and the final fused image contains more comprehensive and detailed information of the object to be detected, which improves the clarity and resolution of the fused image. After determining the target standard image, the remaining image proportions are converted to the proportions of the standard image to unify the image proportions. Due to different proportions when shooting, there may be differences in the scale of the images. If the scale alignment is not performed during the fusion process, distortion or misalignment may occur in the resulting image; therefore, by unifying the image proportions, image scale alignment is achieved, thereby eliminating scale differences and ensuring that the images can correspond correctly during fusion, thereby obtaining a higher quality fused image and making the fused image clearer.

[0063] In one embodiment, considering that different focal lengths require different lighting intensities for capturing images, the depth of field ranging system further includes an illumination unit, which is used to provide a light source for the object to be detected. The depth of field ranging method based on the liquid microscope lens can also perform the following steps:

[0064] When acquiring a fused image of an area corresponding to the object to be detected, it is necessary to sequentially acquire several images of the object to be detected according to a focal length sequence, and control the illumination unit to adjust the intensity of the irradiated light according to the height of the liquid microscope lens from the object to be detected, that is, in the process of the liquid microscope lens acquiring images according to the focal length sequence, the intensity of the illumination is adjusted; generally speaking, the lower the height of the liquid microscope lens from the material to be detected, the stronger the light irradiating the object to be detected, that is, the closer the liquid microscope lens is to the material to be detected, the stronger the illumination; the closer the liquid microscope lens is to the object to be detected, the shorter the focal length of the lens, the greater the amount of light entering, and the brighter the photo, thereby making the acquired image imaging effect better.

[0065] In the present application, during the process of the liquid microscope lens acquiring the image of the object to be inspected, the light intensity is adjusted in real time to ensure the lighting effect, thereby improving the quality of the acquired image, making it more helpful for subsequent defect detection work such as ranging.

[0066] In one embodiment, the liquid microscope lens uses time-sharing stroboscopic technology to acquire an image of the object to be detected; the time-sharing stroboscopic technology is used to make the brightness range at each time point different, and multiple light source effect images are obtained in one shot, thereby obtaining the best imaging effect.

[0067] In one embodiment, the images acquired by the liquid microscope lens in sequence according to the focal length sequence are all color images, so that the fused image with higher definition obtained after image fusion is a color image. When performing depth of field ranging, full-color images are directly used for measurement. Color images can obtain more detailed information of the material to be detected, and can avoid the problems of inaccurate ranging caused by the loss of color information of black and white images as much as possible. For example, due to the loss of color information of black and white images, when there is a slight deviation in the shooting angle, the height difference may not be displayed in the image for the user to use, while the color image has more color information, and the height difference and other information can be obtained from the image with a slight deviation in the shooting angle, thereby improving the accuracy of depth of field ranging. In addition, the use of liquid microscope lenses to collect full-color images does not require black and white image acquisition equipment in the wafer detection process, nor does it require the ranging module to first measure the distance and calculate the focal length of the camera. Therefore, the use of liquid microscope lenses can reduce the use of equipment in the defect detection process, thereby improving the efficiency of depth of field ranging and wafer defect detection.

[0068] Figure 1 FIG. 1 is a flow chart of a method for measuring depth of field based on a liquid microscope lens in one embodiment. It should be understood that although Figure 1 The steps in the flowchart are shown in sequence as indicated by the arrows, but the steps are not necessarily executed in the order indicated by the arrows; unless otherwise specified in this document, there is no strict order restriction for the execution of the steps, and the steps may be executed in other orders; and Figure 1 At least part of the steps may include multiple sub-steps or multiple stages. These sub-steps or stages are not necessarily executed at the same time, but can be executed at different times. The execution order of these sub-steps or stages is not necessarily sequential, but can be executed in turn or alternately with other steps or at least part of the sub-steps or stages of other steps.

[0069] Based on the above method, an embodiment of the present application also discloses a depth of field distance measuring device based on a liquid microscope lens.

[0070] Reference Figure 3 , the device includes the following modules:

[0071] The information acquisition module 301 is used to acquire a fused image of a region corresponding to the object to be detected and a focal plane array corresponding to the fused image;

[0072] The contour recognition module 302 is used to recognize the contour of the object to be detected in the fused image and to determine the target contour in the focal plane array accordingly;

[0073] The distance calculation module 303 is used to calculate the physical quantity height of each pixel in the target contour according to the focal length to physical quantity height calculation formula, and generate a plane height map corresponding to the object to be detected.

[0074] In one embodiment, the information acquisition module 301 is specifically used to obtain a focal length sequence, adjust the focal length of the liquid microscope lens in sequence according to the focal length sequence, and acquire images in sequence to generate an image set with different focal lengths corresponding to the area of ​​the object to be detected; perform image fusion on all images in the image set to generate a fused image corresponding to the area of ​​the object to be detected.

[0075] In one embodiment, the information acquisition module 301 is specifically used to determine, based on an image set, a standard image of a corresponding area of ​​an object to be detected and set it as a target standard image; based on the ratio of the target standard image, convert the ratio of the images of the corresponding areas of the remaining objects to be detected in the image set into the ratio of the target standard image; identify the clear areas of the images of the corresponding areas of the objects to be detected in the image set one by one; and perform image fusion on the clear areas of the images of the corresponding areas of the objects to be detected that are identified.

[0076] In one embodiment, the depth of field distance measuring device based on the liquid microscope lens is also used to control the illumination unit to adjust the intensity of the irradiated light according to the height of the liquid microscope lens from the object to be detected when acquiring a fused image of the area corresponding to the object to be detected.

[0077] In one embodiment, the depth of field distance measuring device based on the liquid microscope lens is also used for that the lower the height of the liquid microscope lens from the object to be detected, the stronger the light intensity irradiating the object to be detected.

[0078] In one embodiment, in a depth-of-field distance measuring device based on a liquid microscope lens, the liquid microscope lens uses a time-sharing stroboscopic technique to sequentially acquire images of the object to be detected.

[0079] In one embodiment, the fused image of the corresponding area of ​​the object to be detected acquired in the information acquisition module 301 is a color image.

[0080] The depth of field ranging device based on the liquid microscope lens provided in the embodiment of the present application can be applied to the depth of field ranging method based on the liquid microscope lens provided in the above embodiment. For relevant details, refer to the above method embodiment. The implementation principle and technical effect are similar and will not be repeated here.

[0081] It should be noted that: when the depth of field ranging device based on the liquid microscope lens provided in the embodiment of the present application performs depth of field ranging, only the division of the above-mentioned functional modules / functional units is used as an example for illustration. In practical applications, the above-mentioned functional distribution can be completed by different functional modules / functional units as needed, that is, the internal structure of the depth of field ranging device based on the liquid microscope lens is divided into different functional modules / functional units to complete all or part of the functions described above. In addition, the implementation method of the depth of field ranging method based on the liquid microscope lens provided in the above method embodiment and the implementation method of the depth of field ranging device based on the liquid microscope lens provided in this embodiment belong to the same concept. The specific implementation process of the depth of field ranging device based on the liquid microscope lens provided in this embodiment is detailed in the above method embodiment, and will not be repeated here.

[0082] The embodiment of the present application also discloses a computer device.

[0083] Specifically, if Figure 4As shown, the computer device can be a computer device such as a desktop computer, a laptop computer, a PDA, and a cloud server. The computer device may include, but is not limited to, a processor and a memory. The processor and the memory may be connected via a bus or otherwise. The processor may be a central processing unit (CPU). The processor may also be other general-purpose processors, digital signal processors (DSP), application-specific integrated circuits (ASIC), field-programmable gate arrays (FPGA) or other programmable logic devices, graphics processors (GPU), embedded neural network processors (NPU) or other dedicated deep learning coprocessors, discrete gates or transistor logic devices, discrete hardware components and other chips, or a combination of the above-mentioned various chips.

[0084] As a non-transient computer-readable storage medium, the memory can be used to store non-transient software programs, non-transient computer executable programs and modules, such as program instructions / modules corresponding to the methods in the above-mentioned embodiments of the present application. The processor executes various functional applications and data processing of the processor by running the non-transient software programs, instructions and modules stored in the memory, that is, the method in the above-mentioned method implementation is realized. The memory may include a program storage area and a data storage area, wherein the program storage area may store an operating system, an application required for at least one function; the data storage area may store data created by the processor, etc. In addition, the memory may include a high-speed random access memory, and may also include a non-transient memory, such as at least one disk storage device, a flash memory device, or other non-transient solid-state storage device. In some embodiments, the memory may optionally include a memory remotely arranged relative to the processor, and these remote memories may be connected to the processor via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network and a combination thereof.

[0085] The embodiment of the present application also discloses a computer-readable storage medium.

[0086] Specifically, a computer-readable storage medium is used to store a computer program, and when the computer program is executed by a processor, the method in the above-mentioned method implementation is implemented. Those skilled in the art will understand that the implementation of all or part of the process in the above-mentioned implementation method of the present application can be completed by instructing the relevant hardware through a computer program, and the program can be stored in a computer-readable storage medium, and the program, when executed, may include the process of the implementation of the above-mentioned methods. Among them, the storage medium may be a disk, an optical disk, a read-only memory (ROM), a random access memory (RAM), a flash memory (Flash Memory), a hard disk (Hard Disk Drive, abbreviated as: HDD) or a solid-state drive (SSD), etc.; the storage medium may also include a combination of the above-mentioned types of memory.

[0087] This specific embodiment is merely an explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed. However, as long as they are within the scope of the claims of the present invention, they are protected by the patent law.

Claims

1. A depth of field distance measurement method based on a liquid microscope lens, characterized in that: The method is applied to a depth of field ranging system, wherein the depth of field ranging system comprises a liquid microscope lens, and the liquid microscope lens is used to obtain an image of an object to be detected. The method comprises: Acquire a fused image of a region corresponding to the object to be detected, and a focal plane array corresponding to the fused image, wherein the focal plane array is a focal plane array formed by the focal length corresponding to each pixel in the fused image; Identifying the contour of the object to be detected in the fused image, and correspondingly determining the target contour in the focal plane array; According to the focal length to physical quantity height calculation formula, the physical quantity height of each pixel in the target contour is calculated, and a plane height map corresponding to the object to be detected is generated.

2. The method according to claim 1, characterized in that: The acquiring of a fused image of a region corresponding to the object to be detected comprises: Acquire a focal length sequence, adjust the focal length of the liquid microscope lens in sequence according to the focal length sequence, and acquire images in sequence to generate an image set with different focal lengths corresponding to the area of ​​the object to be detected; Perform image fusion on all images in the image set to generate a fused image of a region corresponding to the object to be detected.

3. The method according to claim 2, characterized in that: The image fusion of all images in the image set comprises: Based on the image set, determining a standard image of a corresponding area of ​​the object to be detected and setting it as a target standard image; Based on the ratio of the target standard image, converting the ratios of the images of the corresponding areas of the remaining objects to be detected in the image set into the ratio of the target standard image; Identifying clear areas of images corresponding to areas of the object to be detected in the image set one by one; The clear area of ​​the image corresponding to the area of ​​the object to be detected is identified and image fused.

4. The method according to claim 1, characterized in that: The depth of field ranging system further includes an illumination unit, and the illumination unit is used to provide a light source for the object to be detected. The method further includes: When acquiring a fused image of a region corresponding to the object to be detected, the illumination unit is controlled to adjust the intensity of the irradiated light according to the height of the liquid microscope lens from the object to be detected.

5. The method according to claim 4, characterized in that: The step of controlling the illumination unit to adjust the illumination intensity according to the height of the liquid microscope lens from the object to be detected comprises: The lower the height of the liquid microscope head from the object to be detected is, the stronger the light intensity irradiating the object to be detected is.

6. The method according to claim 2, characterized in that: The liquid microscope lens uses time-sharing stroboscopic technology to sequentially acquire images of the object to be detected.

7. The method according to claim 1, characterized in that: The acquired fused image of the corresponding area of ​​the object to be detected is a color image.

8. A depth-of-field distance measuring device based on a liquid microscope lens, characterized in that: The device is applied to a depth of field ranging system, wherein the depth of field ranging system comprises a liquid microscope lens, wherein the liquid microscope lens is used to obtain an image of an object to be detected, and the device comprises: An information acquisition module (301) is used to acquire a fused image of a region corresponding to the object to be detected, and a focal plane array corresponding to the fused image, wherein the focal plane array is a focal plane array formed by the focal length corresponding to each pixel in the fused image; A contour recognition module (302), used to recognize the contour of the object to be detected in the fused image, and correspondingly determine the target contour in the focal plane array; The distance calculation module (303) is used to calculate the physical quantity height of each pixel in the target contour according to the focal length to physical quantity height calculation formula, and generate a plane height map corresponding to the object to be detected.

9. A computer device, characterized in that: The method comprises a memory and a processor, wherein the memory stores a computer program which can be loaded by the processor and executes the method according to any one of claims 1 to 7.

10. A computer-readable storage medium, characterized in that: A computer program is stored which can be loaded by a processor and execute the method according to any one of claims 1 to 7.

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