A magnetic levitation conveying system for semiconductor processing

Abstract

The application relates to the technical field of semiconductor production equipment, in particular to a magnetic suspension conveying system for semiconductor processing, which comprises a conveying track assembly, a suspension carrier and a feeding device, the conveying track assembly comprises an x-direction conveying track and a y-direction conveying track, is used for reciprocating conveying of workpieces in different directions, and can drive the reciprocating movement of the workpieces in the x-axis direction and the y-axis direction by adopting a non-contact magnetic suspension conveying structure as the conveying track structure, so that the reciprocating conveying between machining stations of different machining processes is realized, operation is more convenient, and conveying efficiency is high; the adverse effects of the chips or particulate matter caused by the friction of the traditional conveying assembly on the processing space and the service life of the equipment, the processing yield of the semiconductor and the like are avoided; meanwhile, the dust-free clean space of the semiconductor production can be ensured, and the maintenance cost is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor production equipment, in particular to a magnetic suspension conveying system for semiconductor processing. BACKGROUND

[0002] At present, conveying equipment is needed in each process manufacturing equipment in the semiconductor processing process. The traditional conveying process is to realize the carrying of the workpiece-loaded clamp through common transmission components such as rollers and chains. However, the existing carrying device has some problems in the working process: due to the limitations of positioning and stability, the availability of the semiconductor processing equipment is reduced; more importantly, the rollers or chains and the like will generate friction, and in the friction process, debris or particulate matter will inevitably appear, which will cause great pollution to the subsequent processing link, reduce the service life of the process chamber and the processing equipment, and reduce the processing yield of the semiconductor workpiece; for the semiconductor production environment with high cleanliness requirements, pollution will also be caused, and the maintenance cost of the dust-free workshop will be increased. Therefore, based on the above problems, the prior art needs to be further improved. SUMMARY

[0003] The purpose of the present application is to provide a magnetic suspension conveying system for semiconductor processing to solve the technical problems existing in the background art.

[0004] To solve the above technical problems, the technical scheme provided by the present application is to provide a magnetic suspension conveying system for semiconductor processing, which comprises a conveying track assembly, a suspension carrier and a feeding device. The conveying track assembly comprises an x-direction conveying track and a y-direction conveying track for reciprocating conveying of workpieces in different directions. The x-direction conveying track and the y-direction conveying track are both provided as non-contact magnetic suspension conveying structures. The suspension carrier is arranged on the x-direction conveying track for carrying a workpiece clamp. The feeding device is arranged on the y-direction conveying track for reciprocating movement of the workpiece clamp in the z-axis direction.

[0005] On the basis of the above technical scheme, the magnetic suspension conveying structure comprises a support seat, a stator assembly and a mover assembly. The stator assembly is fixedly arranged on the support seat. The mover assembly is suspended above the stator assembly and realizes reciprocating movement under the action of magnetic field force. The suspension carrier is fixedly arranged on the mover assembly of the x-direction conveying track.

[0006] On the basis of the above technical scheme, the stator assembly is a permanent magnet array, and the mover assembly is a coil assembly with a core.

[0007] On the basis of the above technical scheme, the stator assembly is a coil assembly with a core, and the mover assembly is a permanent magnet array.

[0008] On the basis of the above technical scheme, the stator assembly is a coil assembly without an iron core and is symmetrically provided with two groups, and the mover assembly is a permanent magnet array and is arranged between the stator assemblies.

[0009] On the basis of the above technical scheme, the x-direction conveying track is provided with multiple groups and is arranged side by side along the z-axis direction, and the x-direction conveying track is symmetrically arranged at two ends of the y-direction conveying track.

[0010] On the basis of the above technical scheme, the y-direction conveying track is provided with multiple rows and is arranged side by side along the x-axis direction.

[0011] On the basis of the above technical scheme, the feeding device comprises a fixed frame, a transmission assembly and a lifting cantilever, the fixed frame is fixedly arranged on the mover assembly of the y-direction conveying track, the transmission assembly is arranged in the fixed frame, the lifting cantilever is driven to slide in the z-axis direction by the transmission assembly, and the workpiece clamp is loaded on the lifting cantilever.

[0012] On the basis of the above technical scheme, a guide groove is arranged on the lifting cantilever, a support rod is arranged at the top end of the workpiece clamp, a guide rod is arranged on the bottom end surface of the support rod, and the guide rod is matched with the guide groove structure.

[0013] On the basis of the above technical scheme, the suspension carrier comprises a carrier body and a suspension frame, the carrier body is fixedly arranged on the mover assembly through a connecting piece, the suspension frame is symmetrically arranged at two ends of the carrier body, and a storage groove is arranged on the suspension frame and matched with the top end of the workpiece clamp.

[0014] On the basis of the above technical scheme, a guide rail is fixedly arranged at the top end of the support seat, a sliding sleeve is arranged on the mover assembly, and the sliding sleeve is matched with the guide rail structure and is in sliding connection.

[0015] On the basis of the above technical scheme, multiple common workstations are arranged on the x-direction conveying track, and multiple machining workstations are correspondingly arranged on one side of the y-direction conveying track.

[0016] The technical scheme provided by the application has the following beneficial effects:

[0017] The magnetic suspension conveying system for semiconductor processing provided in the application adopts a non-contact magnetic suspension conveying structure as a conveying track structure, can drive the workpiece to reciprocally move in the x-axis direction and the y-axis direction, reciprocally convey between machining workstations of different machining processes, is more convenient to operate and has high conveying efficiency; avoids the adverse effects of debris or particulate matter caused by friction of a traditional conveying assembly on the service life of a process space and equipment and the yield of semiconductor processing; and can also ensure a dust-free clean space for semiconductor production and reduce maintenance costs. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 is a perspective view of the present application;

[0019] Figure 2 is a top view of the present application;

[0020] Figure 3 is a side view of the present application;

[0021] Figure 4 is a sectional view of the magnetic levitation conveying structure in the present application;

[0022] Figure 5 is a structural schematic view of the stator assembly and the rotor assembly in Embodiment 1 of the present application;

[0023] Figure 6 is a structural schematic view of the stator assembly in Embodiment 1 of the present application;

[0024] Figure 7 is a structural schematic view of the stator assembly and the rotor assembly in Embodiment 2 of the present application;

[0025] Figure 8 is a structural schematic view of the stator assembly and the rotor assembly in Embodiment 3 of the present application;

[0026] Figure 9 is a partial sectional view of the stator assembly and the rotor assembly in Embodiment 3 of the present application;

[0027] Figure 10 is a structural schematic view of the loading device in the present application;

[0028] Figure 11 is a front view of the loading device in the present application;

[0029] Figure 12 is Figure 11 is an enlarged view of part A in

[0030] Figure 13 is a structural schematic view of the suspended carrier in the present application; DETAILED DESCRIPTION

[0031] The present application will be further described below in conjunction with the accompanying drawings and embodiments:

[0032] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood in a broad sense, for example, can be fixedly connected, or can be detachably connected, or can be integrated; can be directly connected, or can be indirectly connected through an intermediate medium; can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0033] In the description of the present application, it should be understood that the terms "left", "right", "front", "back", "top", "bottom", etc. indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0034] Embodiment 1

[0035] As Figures 1 to 13 shown, a magnetic suspension conveying system for semiconductor processing includes a conveying track assembly, a suspension carrier 1, and a feeding device, the conveying track assembly includes an x-direction conveying track 2 and a y-direction conveying track 3 for reciprocating conveying of workpieces in different directions, the x-direction conveying track 2 and the y-direction conveying track 3 are both set as non-contact magnetic suspension conveying structures, the suspension carrier 1 is arranged on the x-direction conveying track for carrying a workpiece clamp 11, and the feeding device is arranged on the y-direction conveying track 3 for reciprocating movement of the workpiece clamp 11 in the z-axis direction.

[0036] The present application provides a magnetic suspension conveying system for semiconductor processing, which uses a non-contact magnetic suspension conveying structure as a conveying track structure to drive the workpiece to reciprocate in the x-axis and y-axis directions, and reciprocate between processing stations of different processing processes, which is more convenient to operate and has high conveying efficiency; avoids the adverse effects of debris or particulate matter caused by friction of traditional conveying components on the service life of the processing space and equipment and the yield of semiconductor processing; and can also ensure a dust-free clean space for semiconductor production and reduce maintenance costs.

[0037] On the basis of the above technical solution, the magnetic suspension conveying structure includes a support seat 4, a stator assembly 5, and a mover assembly 6, the stator assembly 5 is fixedly arranged on the support seat 4, the mover assembly 6 is suspended above the stator assembly 5 and reciprocates under the action of a magnetic field force, and the suspension carrier 1 is fixedly arranged on the mover assembly 6 of the x-direction conveying track 2.

[0038] By adopting the magnetic suspension conveying structure, the workpiece can be reciprocally conveyed in a non-contact manner, the operation is convenient, the conveying efficiency is high, the waste or particulate matter generated by friction of the traditional transmission assembly is avoided, the influence on the subsequent process space and equipment is reduced, the cleanliness of the workpiece processing workshop can be ensured, and unnecessary maintenance cost is reduced. Specifically, the mover assembly 6 is suspended above the stator assembly 5 under the action of the magnetic field generated by the stator assembly 5, and realizes reciprocating motion under the driving action of the stator assembly 5, thereby driving the conveying of the workpiece. More preferably, the y-direction conveying track and the x-direction conveying track in the embodiment adopt the same magnetic suspension conveying structure.

[0039] On the basis of the above technical solution, the stator assembly 5 is a permanent magnet array, and the mover assembly 6 is a coil assembly with a core. In the embodiment, as shown in Figure 5 and Figure 6 The stator assembly 5 adopts a permanent magnet, and the mover assembly 6 adopts a coil with a core. The permanent magnet is fixed on the support seat 4 to form a static magnetic field. The mover is installed above the stator. The installation gap between the stator and the mover is 0.2-1.5 mm. The smaller the gap, the greater the thrust of the mover. The larger the gap, the smaller the thrust of the mover. The stator is arranged in N / S pole arrangement. The drive of the mover is driven by the pulse voltage / current generated by the PLC to drive the coil to generate a magnetic field repulsive to the stator, so that the mover generates relative motion. The number of pulses and the encoder form a closed loop control, so that the distance of the motion of the mover can be accurately controlled.

[0040] On the basis of the above technical solution, the feeding device includes a fixed frame 7, a transmission assembly 8, and a lifting cantilever 9. The fixed frame 7 is fixedly arranged on the mover assembly 6 of the y-direction conveying track 3. The transmission assembly 8 is arranged in the fixed frame 7. The lifting cantilever 9 is driven to slide in the z-axis direction by the transmission assembly 8. The lifting cantilever 9 is loaded with a workpiece clamp 11. By arranging the feeding device, the reciprocating motion of the workpiece clamp 11 loaded with the workpiece in the z-axis direction can be realized, that is, the feeding of the workpiece is realized. Then, the workpiece is conveyed on the y-direction conveying track 3 to realize the processing of the workpiece in the corresponding process position. Preferably, the workpiece after feeding can be placed in the workpiece buffer area 12 to improve the processing efficiency and make the operation more convenient. In the preferred embodiment, the transmission assembly 8 adopts a driving motor and a screw nut mechanism. The lifting cantilever 9 is arranged on the nut of the screw nut mechanism to drive the lifting cantilever and the workpiece clamp 11 thereon to reciprocate in the z-axis direction. In other preferred embodiments, other commonly used mechanical transmission assemblies can also be used for driving as long as they can realize the reciprocating motion of the lifting cantilever in the vertical direction.

[0041] On the basis of the above technical scheme, the lifting cantilever 9 is provided with a guide groove 91, the workpiece clamp 11 is provided with a support rod 111 at the top end, the support rod 111 is provided with a guide rod 112 on the bottom end surface, and the guide rod 112 is matched with the structure of the guide groove 91. By being provided with the guide groove 91 and the guide rod 112, the workpiece clamp 11 and the lifting cantilever 9 are quickly positioned, the workpiece is quickly fed, and the operation is more convenient.

[0042] Preferably, the guide groove 91 is arranged on a positioning frame 92, the positioning frame 92 is fixedly arranged on the outer side wall of the lifting cantilever 9, the positioning frame 92 is symmetrically provided with a containing groove 93 on both sides, the containing groove 93 is provided with a placing frame 94 on the outer side, the placing frame 94 is fixedly arranged on the outer side wall of the lifting cantilever 9, the containing groove 93 is used for containing a connecting rod 113 of the workpiece clamp 11, the connecting rod 113 is symmetrically arranged at the bottom end of the support rod 111, and the connecting rod 113 is provided with a workpiece clamp body 114 at the bottom end.

[0043] On the basis of the above technical scheme, the suspension carrier 1 comprises a carrier body 101 and a suspension frame 102, the carrier body 101 is fixedly arranged on the mover assembly 6 through a connecting piece 103, the suspension frame 102 is symmetrically arranged at both ends of the carrier body 101, the suspension frame 102 is provided with a storage groove 104, and the storage groove 104 is matched with the top end of the workpiece clamp 11. By being provided with the storage groove 104 matched with the support rod 111 of the workpiece clamp 11, the workpiece clamp 11 can be quickly placed on the suspension carrier 1, the workpiece is quickly placed, and the working efficiency is improved. Specifically, the workpiece clamp is conveyed to one side of the x-axis conveying track 2 through the y-direction conveying track 3, at this time, the height of the workpiece clamp 11 on the feeding device is higher than the height of the handover point on the suspension carrier, the positioning device of the workpiece clamp is placed in the V-shaped positioning groove 104 in the downward movement process, positioning is realized, and then the x-direction conveying track 2 is used for transverse conveying to the corresponding machining process for machining.

[0044] On the basis of the above technical scheme, the support seat 4 is fixedly provided with a guide rail 41 at the top end, the mover assembly 6 is provided with a sliding sleeve 62, and the sliding sleeve 62 is matched with the structure of the guide rail 41 and is in sliding connection. By being provided with the sliding sleeve 62 and the guide rail 41 between the mover assembly 6 and the support seat 4 and cooperating with the action, the stable sliding of the mover assembly 6 can be realized, that is, the stable conveying of the suspension carrier 1 and the workpiece clamp 11 loaded thereon can be realized.

[0045] On the basis of the above technical scheme, the x-direction conveying track 2 is provided with a plurality of public workstations 21, and the y-direction conveying track 3 is provided with a plurality of machining workstations 31 on one side. Preferably, the x-direction conveying track 2 is provided with a plurality of public workstations 21, which play the role of temporary storage or recycling warehouse during conveying, and provide more diversified conveying for workpiece machining, and are selected according to actual machining requirements. By providing a plurality of machining workstations 31 on one side of the y-direction conveying track 3, different machining requirements of the workpiece can be met, and the operation is more convenient in cooperation with the reciprocating motion of the y-direction conveying track 3.

[0046] Embodiment 2

[0047] On the basis of the above technical scheme, different from the technical scheme of embodiment 1, the stator assembly 5 is a coil assembly with a core, and the mover assembly 6 is a permanent magnet array.

[0048] As shown in Figure 7 In this embodiment, the stator assembly 5 adopts a coil assembly, and the mover assembly 6 adopts a permanent magnet array. The coil is laid on the support seat 4, and the mover assembly can move without connecting cables, which is suitable for long-distance travel. Specifically, when alternating current passes through the coil of the stator assembly, an alternating magnetic field is generated around the coil. This magnetic field cuts the permanent magnet in the mover assembly. According to Faraday's law of electromagnetic induction, an induced current is generated inside the mover. The permanent magnet material still feels the force in the changing magnetic field. These induced currents interact with the magnetic field generated by the stator, and according to Lenz's law, an expelling or attracting force is generated, which pushes or pulls the mover to move along a straight line. By adjusting the frequency, voltage and phase of the alternating current input to the stator coil, the acceleration, speed and direction of the mover can be controlled.

[0049] Embodiment 3

[0050] On the basis of the above technical scheme, different from the technical schemes of embodiments 1 and 2, the stator assembly 5 is a coil assembly without a core and is symmetrically provided with two groups, and the mover assembly 6 is a permanent magnet array and is arranged between the stator assemblies.

[0051] As shown in Figure 8 and Figure 9As shown, in the embodiment, the stator assembly 5 is a coil assembly without a core, and the rotor assembly 6 is an array of permanent magnets, wherein the stator assembly 5 is provided with two groups and fixedly arranged on the support seat 4, and the rotor assembly 6 is fixed by the two groups of stator coils. The rotor assembly can move without connecting cables, and the operation curve is smooth, without cogging effect, and is suitable for long distance travel. Specifically, when alternating current passes through the two groups of stator coils, an alternating magnetic field is generated around the coils. According to Faraday's law of electromagnetic induction, an induced current is generated inside the rotor assembly. The permanent magnet material still feels the force in the changing magnetic field. These induced currents interact with the magnetic field generated by the stator, and according to Lenz's law, an repulsive or attractive force is generated, which pushes or pulls the rotor to move along the straight path. By adjusting the frequency, voltage and phase of the alternating current input to the stator coil, the acceleration, speed and direction of the rotor assembly can be controlled.

[0052] Embodiment 4

[0053] On the basis of the above-mentioned embodiment technical solution, the x-direction conveying track 2 is provided with multiple groups and arranged side by side along the z-axis direction.

[0054] In a preferred embodiment, the x-direction conveying track 2 is provided with two groups, that is, a double-track conveying mode is adopted in the x-axis direction as shown, and the two groups of x-direction conveying tracks 2 are arranged side by side in the z-axis direction, that is, in the height direction. By staggered arrangement in the height direction, independent conveying work can be carried out to meet the conveying needs of different workpieces in different workstations. By setting double tracks or multiple tracks to work simultaneously, the work efficiency is high, multiple workstations can be provided, and the space utilization rate is high.

[0055] On the basis of the above-mentioned technical solution, the y-direction conveying track 3 is provided with multiple columns and arranged side by side along the x-axis direction. In a preferred embodiment, the y-direction conveying track 3 is provided with multiple columns, that is, a single-track conveying mode is adopted in the y-axis direction, and multiple columns are arranged side by side, which can meet the simultaneous operation of multiple workpieces in different machining workstations, and the machining efficiency is high. In combination with the double-track conveying mode in the x-axis direction, conveying actions in different directions are realized, and the space utilization rate of the overall conveying system is also improved.

[0056] More preferably, a workpiece buffer area 12 is further arranged between the two y-direction conveying tracks 3 at the end, which is used for temporary storage of the workpiece clamp after workpiece feeding, and is more convenient to use. The corresponding feeding device is arranged on the y-direction conveying track 3, and then conveyed to the suspension carrier 1 of the x-direction conveying track 2, transported to the position needing machining, that is, the corresponding column of y-direction conveying tracks 3, and then conveyed to the corresponding workstations through the y-direction conveying tracks 3, and then conveyed between different machining workstations through the reciprocating movement of the y-direction conveying tracks 3, to complete the machining of the workpiece in different processes.

[0057] On the basis of the above technical solutions, the x-direction conveying track 2 is symmetrically arranged at two ends of the y-direction conveying track 3. Preferably, a plurality of groups of x-direction conveying tracks 2 are arranged at two ends of the y-direction conveying track 3, and more preferably, in the embodiment, double-track conveying is adopted for conveying in the x-axis direction on the two sides, which not only can realize more efficient conveying procedures and complete different machining processes, but also can use the double-track conveying on one side as a standby track to ensure normal conveying and machining when a fault occurs on one side track; at the same time, the setting of the conveying track with better openness has a good deviation rectification effect in the machining process, protects the machined workpiece, provides more possibilities for workpiece conveying, has good flexibility, and in the actual application process, more diversified selection can be selected according to the process flow.

[0058] The basic principles and main features of the present application are shown and described above, and it is obvious for those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, therefore the embodiments should be regarded as exemplary and non-limiting, the scope of the present application is defined by the appended claims rather than the above description, and it is intended to include all changes falling within the meaning and scope of the equivalent elements of the claims in the present application.

[0059] In addition, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description manner of the specification is only for the sake of clarity, those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be properly combined to form other embodiments which can be understood by those skilled in the art.

Claims

1. A magnetic levitation transport system for semiconductor processing, characterized by, Including conveying track assembly, suspension carrier (1) and feeding device, the conveying track assembly includes x direction conveying track (2) and y direction conveying track (3), is used for the reciprocating conveying of workpiece in different directions, the x direction conveying track (2), y direction conveying track (3) are all set to the magnetic levitation conveying structure of non-contact, the suspension carrier (1) is set on the x direction conveying track, is used for carrying workpiece clamp (11), the suspension carrier (1) includes carrier body (101) and suspension frame (102), the carrier body (101) is fixedly arranged on the mover assembly (6), the suspension frame (102) is symmetrically arranged at the both ends of carrier body (101), the suspension frame (102) is all provided with the article slot (104) on, the article slot (104) is adapted to the top end of workpiece clamp (11);The feeding device is set on y direction conveying track (3), is used for the reciprocating motion of workpiece clamp (11) in z axis direction;Between the two y direction conveying tracks (3) at the end, workpiece buffer area (12) is also provided, is used for the temporary storage of workpiece clamp (11) after workpiece feeding;The feeding device includes lifting suspension arm (9), the lifting suspension arm (9) is provided with guide slot (91), the top end of workpiece clamp (11) is provided with support rod (111), the bottom end surface of support rod (111) is provided with guide rod (112), the guide rod (112) is adapted to the structure of guide slot (91).

2. The magnetic levitation transport system for semiconductor processing according to claim 1, wherein, The magnetic levitation conveying structure includes support seat (4), stator assembly (5) and mover assembly (6), the stator assembly (5) is fixedly arranged on the support seat (4), the mover assembly (6) is suspended above the stator assembly (5) and realizes reciprocating motion under the action of magnetic field force, the suspension carrier (1) is fixedly arranged on the mover assembly (6) of x direction conveying track (2).

3. The magnetic levitation transport system for semiconductor processing according to claim 2, wherein, The stator assembly (5) is a permanent magnet array, and the mover assembly (6) is a coil assembly with a core.

4. The magnetic levitation transport system for semiconductor processing according to claim 2, wherein, The stator assembly (5) is a coil assembly with a core, and the mover assembly (6) is a permanent magnet array.

5. The magnetic levitation transport system for semiconductor processing according to claim 2, wherein, The stator assembly (5) is a coil assembly without a core and is symmetrically provided with two groups, and the mover assembly (6) is a permanent magnet array and is arranged between the stator assemblies (5).

6. The magnetic levitation transport system for semiconductor processing according to claim 1, wherein, The x direction conveying track (2) is provided with multiple groups and is arranged side by side along the z axis direction, and the x direction conveying track (2) is symmetrically arranged at the two ends of the y direction conveying track (3).

7. The magnetic levitation transport system for semiconductor processing according to claim 1, wherein The y direction conveying track (3) is provided with multiple columns and is arranged side by side along the x axis direction.

8. The magnetic levitation transport system for semiconductor processing according to claim 1, wherein, The feeding device includes a fixed frame (7), a transmission assembly (8), and a lifting suspension arm (9). The fixed frame (7) is fixedly arranged on the mover assembly (6) of the y direction conveying track (3). The transmission assembly (8) is arranged in the fixed frame (7). The lifting suspension arm (9) is driven by the transmission assembly (8) to slide in the z axis direction. The lifting suspension arm (9) is loaded with the workpiece clamp (11).

9. The magnetic levitation transport system for semiconductor processing according to claim 8, wherein, The lifting cantilever (9) is provided with a guide groove (91), the workpiece clamp (11) is provided with a support rod (111) at the top end, the support rod (111) is provided with a guide rod (112) on the bottom end surface, and the guide rod (112) is matched with the guide groove (91).

10. The magnetic levitation transport system for semiconductor processing according to claim 2, wherein, The suspension carrier (1) comprises a carrier body (101) and a suspension frame (102), the carrier body (101) is fixedly arranged on the mover assembly (6) through a connecting piece (103), the suspension frame (102) is symmetrically arranged at both ends of the carrier body (101), and the suspension frame (102) is provided with a storage groove (104) at each end, which is matched with the top end of the workpiece clamp (11).

11. The magnetic levitation transport system for semiconductor processing according to claim 2, wherein The support seat (4) is provided with a guide rail (41) at the top end, the mover assembly (6) is provided with a sliding sleeve (62), and the sliding sleeve (62) is matched with the guide rail (41) in structure and is in sliding connection.

12. The magnetic levitation transport system for semiconductor processing according to any one of claims 1 to 11, wherein, The x-direction conveying track (2) is provided with a plurality of public workstations (21), and the y-direction conveying track (3) is correspondingly provided with a plurality of machining workstations (31) on one side.

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