A method and system for optimizing the film-forming process of multilayer films on glass substrates

Abstract

The present invention relates to the field of coating process regulation technology, and specifically to a method and system for optimizing the film-forming process of a multilayer film on a glass substrate. The method obtains a thin film anti-reflection index based on the difference in film refractive index, film absorptivity, and the correlation between the film refractive index and film absorptivity of different glass coating samples; obtains a gain influence index based on the difference in film refractive index and film absorptivity of each glass film sample, and the difference in film refractive index and film absorptivity between each glass film sample and the other glass film samples; and optimizes the film-forming process of a multilayer film on a glass substrate based on the thin film anti-reflection index and the gain influence index. The present invention combines the relationship among the refractive index, absorptivity, and transmittance of the thin film to obtain the thin film anti-reflection index and the gain influence index, and uses the two to optimize the film-forming process of the glass substrate to ensure the ideal thickness of the film and excellent transmittance.

Description

Technical Field

[0001] The present invention relates to the technical field of coating process regulation, and in particular to a method and system for optimizing a multi-layer film forming process on a glass substrate. Background Art

[0002] Glass substrate coating process refers to coating one or more layers of alloy, metallic compound and other thin films on the surface of glass substrate to change the original optical properties of glass substrate to meet special requirements. Common multi-layer film structures, such as distributed Bragg reflector (DBR) structure, are composed of multiple layers of high refractive index and low refractive index materials alternately stacked, and interference filter is composed of thin film layers of different materials.

[0003] Generally, the multilayer film structure of a glass substrate is a structure of stacking high and low refractive index materials. The current multilayer film process generally introduces a high refractive index intermediate layer and adopts a multilayer film anti-reflection structure to increase the transmittance of the multilayer film. However, the existing technology ignores the relationship between transmittance, refractive index and absorptivity. Usually, the film layers of different thicknesses have different proportions of refraction, reflection or absorption after receiving light energy. The high refractive index intermediate layer introduced by the current multilayer film process cannot take into account the ideal thickness of the film and the excellent transmittance performance at the same time, resulting in the low quality of the produced multilayer film glass substrate. Summary of the invention

[0004] In order to solve the technical problem that the relationship between transmittance, refractive index and absorptivity is ignored during the coating process, resulting in unsatisfactory optimization of the multi-layer film forming process of a glass substrate, the purpose of the present invention is to provide a method and system for optimizing the multi-layer film forming process of a glass substrate, and the technical scheme adopted is as follows:

[0005] In a first aspect, an embodiment of the present invention provides a method for optimizing a multi-layer film forming process on a glass substrate, the method comprising:

[0006] Obtain the film refractive index and film absorptivity of different glass coating samples;

[0007] According to the difference in film refractive index and film absorptivity between each glass coating sample and other glass coating samples, and the correlation between the film refractive index and film absorptivity of all glass coating samples, the film anti-reflection index of each glass coating sample is obtained;

[0008] Obtaining a gain influence index of each glass film sample according to a film refractive index difference and a film absorptivity difference between each glass film sample and other glass film samples, and a film refractive index difference and a film absorptivity difference between all glass film samples;

[0009] The multi-layer film forming process of the glass substrate is optimized according to the thin film anti-reflection index and the gain influence index.

[0010] Furthermore, the method for obtaining the thin film anti-reflection index of each glass coating sample includes:

[0011] Obtaining the production time of each glass coating sample; obtaining the first coating sample of each glass coating sample based on the difference between the production time of each glass coating sample and the production time of the other glass coating samples;

[0012] Record the film refractive index and the film absorptivity as the film optical index; obtain the optical change goodness of each glass coating sample according to the difference between the film optical index of each glass coating sample and the first coating sample; the optical change goodness includes: refraction change goodness and absorption change goodness;

[0013] The thin film anti-reflection index of each glass coating sample is obtained according to the correlation coefficient between the thin film refractive index and the thin film absorptivity of the first coating sample of each glass coating sample, the refraction change goodness and the absorption change goodness.

[0014] Furthermore, the method for obtaining the optical change goodness of each glass coating sample includes:

[0015] For the first coating sample of each glass coating sample, an optical change sequence is constructed according to the difference in the thin film optical indicators of the first coating samples at two adjacent production moments; optical analysis elements in the optical change sequence are selected; and the optical change goodness of each glass coating sample is obtained according to the number and values ​​of the optical analysis elements.

[0016] Furthermore, the method for obtaining the gain influence index of each glass film sample includes:

[0017] Obtain a second coating sample of each glass coating sample; obtain an optical concentration value of each glass coating sample according to the thin film optical index of the second coating sample, wherein the optical concentration value includes: a refraction concentration value and an absorption concentration value;

[0018] The gain influence index of each glass film sample is obtained according to the difference between the refraction concentration value and the absorption concentration value of each glass coating sample, the difference between the film refractive index and the refraction concentration value, and the difference between the film absorptivity and the absorption concentration value.

[0019] Furthermore, the method for optimizing the film forming process of a multilayer film on a glass substrate according to the thin film anti-reflection index and the gain influence index comprises:

[0020] According to the film anti-reflection index and the gain influence index of each glass film sample, a transmittance measurement index of the corresponding glass film sample is obtained; based on the transmittance measurement index, a preferred glass coating sample is selected from all glass coating samples; and the film thickness of the preferred glass coating sample is used as the standard thickness of the multilayer film in the glass substrate molding process.

[0021] Furthermore, a method for obtaining the optical concentration value of each glass coating sample according to the thin film optical index of the second coating sample includes:

[0022] The average value of the thin film optical indexes of all the second coating samples of each glass coating sample is taken as the optical concentration value of the corresponding glass coating sample.

[0023] Furthermore, an implementation method of selecting a preferred glass coating sample from all glass coating samples based on the transmittance measurement index includes:

[0024] All glass coating samples are clustered based on the transmittance measurement index to obtain different clusters; based on the transmittance measurement index of the glass coating samples in each cluster, a target cluster is selected; within the target cluster, the glass coating sample corresponding to the largest transmittance measurement index among the glass coating samples corresponding to the film thickness that meets the preset expected thickness is selected as the preferred glass coating sample.

[0025] Furthermore, the correlation coefficient is a Pearson correlation coefficient.

[0026] Furthermore, the method for clustering all glass coating samples based on the transmittance measurement index is a CURE hierarchical clustering algorithm.

[0027] In a second aspect, another embodiment of the present invention provides a system for optimizing a multi-layer film forming process on a glass substrate, the system comprising:

[0028] Data acquisition module, used to obtain the film refractive index and film absorptivity of different glass coating samples;

[0029] An anti-reflection analysis module, used to obtain the thin film anti-reflection index of each glass coating sample according to the difference in thin film refractive index and thin film absorptivity between each glass coating sample and other glass coating samples, and the correlation between the thin film refractive index and the thin film absorptivity of all glass film samples;

[0030] A gain analysis module, for obtaining a gain influence index of each glass film sample according to a difference in film refractive index and film absorptivity of each glass film sample, and a difference in film refractive index and film absorptivity between each glass film sample and other glass film samples;

[0031] The glass substrate film forming optimization module is used to optimize the glass substrate multilayer film forming process according to the thin film anti-reflection index and the gain influence index.

[0032] An electronic device comprises a processor, a memory and a program or instruction stored in the memory and running on the processor, wherein the program or instruction implements the steps of the impurity detection method as described above when executed by the processor.

[0033] The present invention has the following beneficial effects:

[0034] In the embodiment of the present invention, the relationship between the refractive index, absorptivity and refractive index of the film is taken into account. In this solution, the refractive index and absorptivity of the film are usually negatively correlated. The correlation between the film refractive index and the film absorptivity of the glass film sample is analyzed, and the film anti-reflection index is obtained by using the relationship between the refractive index and the refractive index, and the relationship between the absorptivity and the refractive index through the difference in the film refractive index and the film absorptivity between each glass film sample and the other glass film samples; the relative characteristics of the film refractive index and the relative characteristics of the film absorptivity of the glass film sample are presented in turn through the difference in the film refractive index and the film absorptivity between each glass film sample and the other glass film samples. The characteristics are combined with the difference in the film refractive index and the film absorptivity, so that the obtained gain influence index can accurately present the gain degree of the film maintaining good transmittance characteristics; in the process of obtaining the thin film anti-reflection index and the gain influence index, the relationship between the refractive index, absorptivity and refractive index of the film is fully utilized, and the multi-layer film forming process of the glass substrate is optimized according to the thin film anti-reflection index and the gain influence index, so that the glass substrate produced after the optimization has excellent transmittance, avoiding the high refractive index intermediate layer introduced by the current multi-layer film process, and being unable to take into account both the ideal thickness of the film and the excellent transmittance performance, resulting in the lower quality of the produced multi-layer film glass substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions and advantages in the embodiments of the present invention or the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0036] Figure 1 A flowchart of the steps of a method for optimizing a multi-layer film forming process on a glass substrate provided by one embodiment of the present invention;

[0037] Figure 2 A flowchart of the steps of a method for obtaining thin film anti-reflection index of a glass coating sample provided by an embodiment of the present invention;

[0038] Figure 3 A structural diagram of a glass substrate multilayer film forming process optimization system provided by one embodiment of the present invention;

[0039] Figure 4 A schematic diagram of a computer device for optimizing a glass substrate multilayer film forming process provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0040] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the following is a detailed description of the method and system for optimizing the film forming process of a multi-layer film on a glass substrate proposed by the present invention, its specific implementation, structure, features and effects, in combination with the accompanying drawings and preferred embodiments. In the following description, different "one embodiment" or "another embodiment" does not necessarily refer to the same embodiment. In addition, specific features, structures or characteristics in one or more embodiments may be combined in any suitable form.

[0041] Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.

[0042] The specific scheme of the method and system for optimizing the film-forming process of a multi-layer film on a glass substrate provided by the present invention is described in detail below with reference to the accompanying drawings.

[0043] Embodiment 1:

[0044] The present invention proposes a method for optimizing the film forming process of a multilayer film on a glass substrate. Figure 1 , which shows a flow chart of steps of a method for optimizing a multi-layer film forming process of a glass substrate provided by an embodiment of the present invention, the method comprising:

[0045] Step S1: Obtain the film refractive index and film absorptivity of different glass coating samples.

[0046] Specifically, the glass factory uses a vacuum magnetron sputtering coating method to coat the glass substrate, and the number of coating layers is a preset number. The glass substrate after the preset number of coatings is used as a glass coated product. Since the film thickness of different batches of glass coated products is affected by external factors, such as the influence of external temperature and humidity, the film thickness of different batches of glass coated products changes. In the embodiment of the present invention, it is considered that the same batch of glass coated products are affected by external factors to the same extent during the production process. In order to reduce the amount of calculation, one glass coated product is selected from each batch of glass coated products produced by the glass factory and recorded as a glass coated sample. The refractive index and absorptivity at the center position of each glass coated sample are collected using an ellipsometer, and are recorded as the original film refractive index and original film absorptivity of the corresponding glass coated sample in turn; at the same time, the time of producing each batch of glass coated products is obtained, and the time is recorded as the production time of the glass coated sample corresponding to each batch.

[0047] It should be noted that in the embodiment of the present invention, the preset number is an empirical value of 5, and the glass coating samples are selected from 50 batches of glass coating products, that is, the number of glass coating samples is 50, which can be set by the implementer according to the specific situation. Other thin film methods can be used to coat the glass substrate, such as vacuum evaporation, chemical vapor deposition, and solid powder spraying.

[0048] In the process of collecting the refractive index and absorptivity of the glass coating samples, some factors may interfere. In order to improve the quality and reliability of the data, the original film refractive index and the original film absorptivity are filtered. Since the degree of interference from external factors in the production process of glass coating products in batches with similar production times is relatively similar, the original refractive index and the original absorptivity of the glass coating products in batches with similar production times are used for filtering. The specific method is as follows:

[0049] Based on the production time of the glass-coated samples, the original thin film refractive indices of all glass-coated samples are arranged in time series to obtain an original refraction sequence, and the original thin film absorptivity of all glass-coated samples are arranged in time series to obtain an original absorption sequence. The mean filtering algorithm is used to filter each element in the original refraction sequence and the original absorption sequence respectively, and the result of filtering each element in the original refraction sequence is used as the thin film refractive index of the glass-coated sample corresponding to the element, and the result of filtering each element in the original absorption sequence is used as the thin film absorptivity of the glass-coated sample corresponding to the element.

[0050] In the embodiment of the present invention, the size of the filter window in the filtering algorithm is , each element is located at the center of its filter window, and the implementer can set the length of the filter window by himself. Among them, the mean filter algorithm is a well-known technology for those skilled in the art and will not be described here.

[0051] The purpose of this scheme is to optimize the thickness of the film during the film formation process of the glass substrate, so as to ensure that the thickness has excellent transmittance performance while taking into account the ideal thickness of the film, so as to improve the quality of the multi-layer glass substrate.

[0052] Step S2: Obtain the film anti-reflection index of each glass coating sample according to the difference in film refractive index and film absorptivity between each glass coating sample and other glass coating samples, and the correlation between the film refractive index and film absorptivity of all glass coating samples.

[0053] In this scheme, the material used to coat the glass substrate is a metal material. Generally, there is a negative correlation between the absorptivity and refractive index of the metal material. The patent document with publication number CN106086813B discloses a multi-layer coating layer for a mobile phone panel and a preparation method thereof. The following basic theory is disclosed in paragraph 3 of the specification: In addition, in order to further improve the transmittance, a high refractive index intermediate layer is introduced, and a multi-layer film anti-reflection structure is adopted to increase the transmittance. Based on the above theory, it can be seen that the higher the refractive index of the metal film, the better the transmittance. At the same time, the refractive index of the metal film affects the absorptivity. It can be obtained that the higher the refractive index of the metal film and the lower the absorptivity, the better the transmittance of the multi-layer film structure metal film produced.

[0054] The difference in film refractive index and film absorptivity between each glass-coated sample and the rest of the glass-coated samples sequentially presents the degree of influence of the refractive index change on the film transmittance of the metal film of the multi-layer film structure of the glass-coated samples produced within a certain period of time, and the degree of influence of the absorptivity change on the film transmittance of the metal film; and considering the correlation between the film refractive index and the film absorptivity of the glass film sample, the more obvious the negative correlation is, the better the transmittance of the metal film of the multi-layer film structure of the glass film sample produced. Therefore, the film anti-reflection index of each glass-coated sample is obtained based on the difference in film refractive index and film absorptivity between each glass-coated sample and the rest of the glass-coated samples, as well as the correlation between the film refractive index and the film absorptivity, to quantify the goodness of the transmittance characteristics of the metal film of the multi-layer film structure.

[0055] See also Figure 2 , which shows a flow chart of the steps of a method for obtaining a thin film anti-reflection index of a glass coating sample provided by an embodiment of the present invention, the method comprising:

[0056] Step S210: obtaining the production time of each glass coating sample; obtaining the first coating sample of each glass coating sample based on the difference between the production time of each glass coating sample and the production time of other glass coating samples.

[0057] The film thickness of glass-coated samples from different batches is affected by external factors, resulting in changes in the film thickness of glass-coated samples from different batches. However, the degree of interference from external factors during the production process of glass-coated samples with similar production times is similar. In order to analyze the changes in the thin film refractive index of the glass-coated samples in a local time period, the first coating sample of each glass-coated sample is obtained based on the difference in the production time of the glass-coated samples.

[0058] Preferably, in an embodiment of the present invention, a method for obtaining a first coating sample of a glass coating sample includes: selecting any one glass coating sample as an analysis sample, taking the remaining glass coating samples except the analysis sample as selected samples, obtaining the time interval between the analysis sample and the production moment of each selected sample as a duration judgment index for each selected sample; taking the selected sample corresponding to the smallest first preset number of sample duration judgment indicators among the duration judgment indicators of all selected samples, and the analysis sample, as the first coating sample of the analysis sample.

[0059] It should be noted that the first preset sample quantity is an empirical value of 10, which can be set by the implementer according to the specific situation; the method for obtaining the first coating sample of all glass coating samples is the same as the method for obtaining the first coating sample of the analysis sample. The production time of each glass coating sample has been obtained in step S1.

[0060] In other embodiments of the present invention, the glass coating sample corresponding to the production time within the preset adjacent time period of the production time of each glass coating sample can be used as the first coating sample of each glass coating sample. It should be noted that the production time of each glass coating sample is located in the middle of its preset adjacent time period, and the duration of the preset adjacent time period is an empirical value of 1 hour.

[0061] Step S220: Record the film refractive index and the film absorptivity as the film optical indexes; obtain the optical change goodness of each glass coating sample according to the difference between the film optical indexes of each glass coating sample and the first coating sample; the optical change goodness includes: refraction change goodness and absorption change goodness.

[0062] The difference in the thin film refractive index or thin film absorptivity between each glass-coated sample and the first coated sample presents the trend change of the refractive index or absorptivity of the thin film in the local time period of producing the glass-coated sample, thereby reflecting the excellence of the transmittance of the multi-layer film structure thin film of the glass substrate, and quantifying the transmittance characteristics of the multi-layer film structure thin film by optical change goodness; the greater the optical change goodness, the better the transmittance of the multi-layer film structure thin film of the glass-coated sample.

[0063] The method for obtaining the optical change goodness is: for the first coating sample of each glass coating sample, an optical change sequence is constructed according to the difference in the thin film optical indicators of the first coating samples at two adjacent production moments; optical analysis elements in the optical change sequence are selected; and the optical change goodness of each glass coating sample is obtained according to the number and value of the optical analysis elements.

[0064] It is known that the higher the refractive index of the metal film and the lower the absorptivity, the better the transmittance of the multilayer film structure metal film produced. The film optical indicators of the first coating sample of each glass coating sample are arranged in time sequence based on the production time; if the film refractive index after sorting is on an upward trend and the film absorptivity is on a downward trend, it is more conducive to the film to maintain good transmittance performance; therefore, the optical change sequence is constructed by the difference of the film optical indicators of the first coating samples at two adjacent production moments to analyze the rising or falling trend of the film optical indicators. When the film optical indicator represents the film refractive index, the optical analysis element is an element that satisfies the film refractive index to show an upward trend. The more the number of optical analysis elements, the more the film optical indicators show an upward trend. The larger the value of the optical analysis element, the more obvious the rising trend of the film optical indicator; when the film optical indicator represents the film absorptivity, the optical analysis element is an element that satisfies the film absorptivity to show a downward trend. The more the number of optical analysis elements, the more the film optical indicators show a downward trend. The larger the value of the optical analysis element, the more obvious the downward trend of the film optical indicator; both of the above situations are more conducive to the film to maintain good transmittance performance. Therefore, the number and value of optical analysis elements in the optical change sequence are positively correlated with the goodness of the optical change.

[0065] Preferably, in an embodiment of the present invention, the method for obtaining the optical change goodness includes: arranging the thin film optical indicators of all first coating samples of each glass coating sample in a time sequence based on the production time to obtain the local optical sequence of each glass coating sample; for the local optical sequence of each glass coating sample, taking the difference between each element except the first element in the local optical sequence and its adjacent previous element as the first optical difference of the corresponding element; arranging the first optical differences of the remaining elements except the first element in the local optical sequence according to the order of elements in the local optical sequence to obtain the optical change sequence; if the thin film optical indicator is the thin film refractive index, taking the elements with positive values ​​in the optical change sequence as the optical analysis elements; if the thin film optical indicator is the thin film absorptivity, taking the elements with negative values ​​in the optical change sequence as the optical analysis elements; normalizing the number of optical analysis elements using the total number of elements in the optical change sequence to obtain the optical quantity indicator; taking the absolute value of the cumulative sum of all optical analysis elements in the optical change sequence as the optical quantity indicator; and obtaining the product of the optical quantity indicator and the optical quantity indicator as the optical change goodness of each glass coating sample.

[0066] It should be noted that the optical change sequence in this embodiment is a first-order difference sequence of the local optical sequence. In the optical change sequence of the glass-coated sample in this scheme, the film refractive index shows an upward trend and the film absorptivity shows a downward trend, which is more conducive to the film maintaining good transmittance performance; therefore, if the film optical index is the film refractive index, the elements with positive values ​​in the optical change sequence are used as optical analysis elements; if the film optical index is the film absorptivity, the elements with negative values ​​in the optical change sequence are used as optical analysis elements. The optical change goodness corresponding to the film refractive index is recorded as the refraction change goodness, and the optical change goodness corresponding to the film absorptivity is recorded as the absorption change goodness.

[0067] In other embodiments of the present invention, other normalization methods may be selected to normalize the optical quantity indicators, such as function conversion, maximum and minimum normalization, etc., which are not limited here; other basic mathematical operations may also be used to construct the correlation between the optical quantity indicators and the optical numerical indicators and the optical change goodness, such as the sum value, which are not limited or elaborated here.

[0068] In another embodiment of the present invention, after obtaining the local refraction sequence of each glass coating sample, the difference between each element except the last element in the local optical sequence and its adjacent next element can be used as the second optical difference of the corresponding element; the second optical differences of the elements except the last element in the local optical sequence are arranged according to the order of the elements in the local optical sequence to obtain an optical change sequence; if the optical index of the film is the refractive index of the film, the elements with negative values ​​in the optical change sequence are used as optical analysis elements; if the optical index of the film is the absorptivity of the film, the elements with positive values ​​in the optical change sequence are used as optical analysis elements.

[0069] Step S230: Obtain the thin film anti-reflection index of each glass coating sample according to the correlation coefficient between the thin film refractive index and the thin film absorptivity of the first coating sample of each glass coating sample, the refraction change goodness and the absorption change goodness.

[0070] Generally, there is a negative correlation between the absorptivity and refractive index of metal materials. The stronger the negative correlation between the absorptivity and refractive index, the better the transmittance of the multilayer metal film of the glass-coated sample. At the same time, the greater the refractive change goodness and absorption change goodness of the glass-coated sample, the better the transmittance performance of the film. The transmittance characteristics of the glass-coated sample are measured by the film anti-reflection index. Therefore, the correlation coefficient between the film refractive index and the film absorptivity, the refractive change goodness and the absorption change goodness of the first coating sample of each glass-coated sample are all positively correlated with the film anti-reflection index.

[0071] Preferably, in an embodiment of the present invention, a method for obtaining a thin film anti-reflection index includes: performing negative correlation mapping on the Pearson correlation coefficient between the thin film refractive index and the thin film absorptivity of the first coating sample of each glass coating sample to obtain a refraction-absorption related index of the corresponding glass coating sample; performing normalization processing on the product of the refraction-absorption related index, the refraction change goodness, and the absorption change goodness of each glass coating sample to obtain a thin film anti-reflection index of the corresponding glass coating sample. The Pearson correlation coefficient is a well-known technology and will not be described in detail here.

[0072] It should be noted that when the Pearson correlation coefficient between the thin film refractive index and the thin film absorptivity of the first coated sample of each glass coated sample is closer to -1, it means that the negative correlation between the absorptivity and the refractive index is stronger, and the transmittance characteristics of the multi-layer film structure metal film of the glass coated sample are better. Therefore, it is necessary to perform negative correlation mapping on the Pearson correlation coefficient between the thin film refractive index and the thin film absorptivity to obtain refraction-absorption related indicators.

[0073] In the embodiment of the present invention, other basic mathematical operations can also be used to construct the correlation between the refraction-absorption related index, the refraction change goodness and the absorption change goodness and the thin film transmittance enhancement index, such as the sum value, which is not limited or elaborated here; the Pearson correlation coefficient is negatively mapped using the exp(-) function, and the constant 1 minus the Pearson correlation coefficient can also be used to achieve negative correlation mapping, which is not limited here. Among them, exp is an exponential function with the natural constant e as the base. In other embodiments of the present invention, the correlation coefficient can also be the Spearman correlation coefficient, the kendall rank correlation coefficient, the typical correlation coefficient, etc.

[0074] Step S3: Obtain the gain influence index of each glass film sample according to the film refractive index difference and film absorptivity difference between each glass film sample and other glass film samples, and the film refractive index and film absorptivity difference of all glass film samples.

[0075] Generally speaking, the higher the film refractive index and the lower the film absorptivity of the glass coating sample, the more conducive it is to maintaining the good transmittance characteristics of the film, and the greater the gain effect on the film transmittance. The relative characteristics of the film refractive index and the film absorptivity of each glass coating sample are presented in turn through the film refractive index difference and film absorptivity difference between the glass film sample and the other glass film samples; the difference between the film refractive index and the film absorptivity of the glass film sample reflects the correlation between the refractive index and the absorptivity of the film. The stronger the negative correlation, the more conducive it is to maintaining the good transmittance characteristics of the film, which to a certain extent indicates the gain influence of the film transmittance and obtains the gain influence index.

[0076] Step S310: obtaining a second coating sample of each glass coating sample; obtaining an optical concentration value of each glass coating sample according to the thin film optical index of the second coating sample, wherein the optical concentration value includes a refraction concentration value and an absorption concentration value.

[0077] When obtaining the relative characteristics of the film refractive index and the film absorptivity of the glass-coated samples, this solution analyzes the thin film optical index of each glass-coated sample close to the other glass-coated samples, and needs to select the second coating sample of each glass-coated sample. The relative degree analysis is performed through the thin film optical index of the second coating sample of the glass-coated sample. The relative characteristic analysis actually shows the offset position of the thin film optical index of the glass-coated sample compared to the middle level of the thin film optical index of the second coating sample of the glass-coated sample; the optical concentration value shows the middle level of the thin film optical index of the second coating sample of each glass-coated sample.

[0078] Preferably, in an embodiment of the present invention, a method for obtaining an optical concentration value of a glass-coated sample includes: obtaining the absolute value of the difference between the thin film refractive index of the analysis sample and each of the candidate samples as an optical judgment index of each of the candidate samples; using the candidate sample corresponding to the smallest second preset number of sample optical judgment indicators among the optical judgment indicators of all the candidate samples as the second coating sample of the analysis sample; and using the average value of the thin film optical index of the second coating sample of each glass-coated sample as the optical concentration value of the corresponding glass-coated sample.

[0079] It should be noted that the second preset sample quantity is an empirical value of 15, which can be set by the implementer according to the specific situation; the method for obtaining the first coating sample of all glass coating samples is the same as the method for obtaining the first coating sample of the analysis sample. The optical concentration value obtained by using the film refractive index is recorded as the refraction concentration value, and the optical concentration value obtained by using the film absorptivity is recorded as the absorption concentration value.

[0080] In another embodiment of the present invention, the film refractive index in the process of obtaining the second coating sample of the analysis sample can be replaced by the film absorptivity. In other embodiments of the present invention, the mean value in the process of calculating the optical concentration value can also be replaced by the median and mode that can also reflect the middle level of a group of data.

[0081] Step S320: Obtain the gain influence index of each glass film sample according to the difference between the refraction concentration value and the absorption concentration value, the difference between the film refractive index and the refraction concentration value, and the difference between the film absorptivity and the absorption concentration value of each glass coating sample.

[0082] It is known that the higher the film refractive index of the glass-coated sample is and the lower the film absorptivity is, the more conducive it is to maintaining the good transmittance characteristics of the film, the greater the gain effect on the transmittance of the film of the glass-coated sample is, and the greater the gain index is; the relative characteristic analysis is actually the offset position of the film optical index of the glass-coated sample compared to the middle level of the film optical index of the second coated sample of the glass-coated sample. Therefore, the higher the film refractive index of the glass-coated sample exceeds the middle level of the film optical index of the second coated sample, and the greater the degree of the film refractive index is lower than the middle level of the film optical index of the second coated sample, the greater the gain effect on the transmittance of the film of the glass-coated sample; the difference between the refractive concentration value and the absorption concentration value reflects the local correlation between the refractive index and the absorptivity of the multilayer structure film of each glass-coated sample. The larger the difference is, the stronger the negative correlation between the refractive index and the absorptivity is, the more conducive it is to maintaining the good transmittance characteristics of the film, and to a certain extent reflects the greater the gain effect of the film transmittance. Therefore, the difference between the refractive concentration value and the absorption concentration value of each glass coating sample, the difference between the film refractive index and the refractive concentration value, and the difference between the film absorptivity and the absorption concentration value are all positively correlated with the gain impact index.

[0083] Preferably, in an embodiment of the present invention, a method for obtaining a gain influence index includes: recording the difference between a refraction concentration value and an absorption concentration value of each glass coating sample as a refraction breathing difference; recording the difference between a thin film refractive index and a refraction concentration value of each glass coating sample as a refraction concentration difference; recording the difference between an absorption concentration value and a thin film absorptivity of each glass coating sample as an absorption concentration difference; and normalizing the sum of the refraction breathing difference, the refraction concentration difference and the absorption concentration difference to obtain a gain influence index of each glass film sample.

[0084] In another embodiment of the present invention, the refractive breathing difference, refractive concentration difference and absorption concentration difference of each glass coating sample can be normalized respectively, and the product of the normalized refractive breathing difference, refractive concentration difference and absorption concentration difference can be used as the gain influence index. Other basic mathematical operations can also be used to construct a correlation between the refractive breathing difference, refractive concentration difference and absorption concentration difference and the gain influence index, such as the sum value, which is not limited or elaborated here.

[0085] In the embodiment of the present invention, the normalization function Norm() is selected to normalize the refractive breathing difference, the refractive concentration difference, the absorption concentration difference and the sum of the three. In other embodiments of the present invention, other normalization methods may also be selected, such as maximum and minimum normalization and other normalization methods, which are not limited here.

[0086] Step S4: Optimizing the multi-layer film forming process of the glass substrate according to the thin film anti-reflection index and the gain influence index.

[0087] The film anti-reflection index shows how good the transmittance characteristics of the multi-layer film structure of the glass-coated sample are, and the gain influence index shows how much gain the film has to maintain good transmittance characteristics. A comprehensive analysis of the two can improve the accuracy of the transmittance of the multi-layer film structure of the glass-coated sample.

[0088] According to the film anti-reflection index and the gain influence index of each glass film sample, a transmittance measurement index of the corresponding glass film sample is obtained; and based on the transmittance measurement index, a preferred glass coating sample is selected from all glass coating samples.

[0089] When the thin film anti-reflection index and the gain influence index of each glass film sample are both larger, the transmittance characteristics of the metal film of the multilayer film structure of the glass film sample are better and more conducive to maintaining good transmittance, then the thin film anti-reflection index and the gain influence index are both positively correlated with the transmittance measurement index. In the embodiment of the present invention, the product of the thin film anti-reflection index and the gain influence index of each glass coating sample is normalized to obtain the transmittance measurement index of each glass coating sample.

[0090] In the embodiment of the present invention, the correlation between the film anti-reflection index and the gain influence index and the transmittance measurement index, such as the sum value, can also be constructed through other basic mathematical operations, which are not limited or elaborated here.

[0091] It should be noted that in the embodiment of the present invention, the Sigmoid function is used to normalize the product of the thin film transmittance enhancement index and the gain influence index. In the embodiment of the present invention, other normalization methods may also be selected, such as function conversion, maximum and minimum normalization, etc., which are not limited here.

[0092] The larger the transmittance index, the better the light transmittance of the multilayer film structure of the corresponding glass coating sample. The purpose of this scheme is to ensure that the thickness has excellent transmittance performance while taking into account the ideal thickness of the film, and the preferred glass coating sample is selected through the transmittance index.

[0093] Preferably, in an embodiment of the present invention, a method for obtaining a preferred glass coating sample includes: clustering all glass coating samples based on the transmittance measurement index to obtain different clustering clusters; calculating the mean of the transmittance measurement index of the glass coating samples in each clustering cluster as the transmittance concentration value of each clustering cluster; recording the clustering cluster corresponding to the largest transmittance concentration value as a target clustering cluster; within the target clustering cluster, selecting a glass coating sample corresponding to the largest transmittance measurement index from glass coating samples whose film thickness is equal to a preset expected thickness as a preferred glass coating sample.

[0094] It should be noted that the transmittance of the multilayer film structure of the glass coating samples in each cluster is relatively close. In order to select a multilayer film structure that takes into account both the ideal thickness of the film and the performance of excellent transmittance, the cluster corresponding to the largest transmittance concentration value is used as the target cluster, and the preferred glass coating sample that meets the preset expected thickness and transmittance is selected from the target cluster. In this embodiment, the preset expected thickness is an empirical value of 85nm, and the implementer can set it according to the specific situation.

[0095] In another embodiment of the present invention, among all glass coating samples, the glass coating sample corresponding to the largest transmittance measurement index among the glass coating samples corresponding to the film thickness that meets the preset expected thickness is selected as the preferred glass coating sample.

[0096] The film thickness at the center of the preferred glass coating sample is collected using an ellipsometer, and the film thickness of the preferred glass coating sample is used as the standard thickness of the multi-layer film in the glass substrate molding process, thereby completing the optimization control of the multi-layer film thickness in the subsequent glass substrate film forming process, so as to ensure that the glass coating products produced subsequently have excellent transmittance performance while taking into account the ideal thickness of the film, thereby improving the quality of the multi-layer film glass substrate.

[0097] Since the number of coating layers on the glass substrate is multiple, the standard thickness is the thickness of the last coating layer of the multi-layer film structure after completion. Directly controlling the subsequent production with the standard thickness cannot guarantee the thickness of each coating layer of the glass substrate, resulting in the failure to ensure the high transmittance of the subsequently produced glass coating products. In another embodiment of the present invention, for each glass coating sample corresponding to the glass substrate, during the coating process of the glass substrate, after each coating of the glass substrate is completed, the thickness of each coating at the center position of the glass substrate after each coating is completed is collected using an ellipsometer; after obtaining the preferred glass coating sample through the steps S1-S4 method, the thickness of each film of the glass substrate corresponding to the preferred glass coating sample is used as the standard thickness of each coating in the subsequent glass substrate film forming process, thereby achieving optimized control of the thickness of each coating in the process of the glass substrate multi-layer film structure.

[0098] It should be noted that, in the present embodiment, the refractive index and absorptivity of the glass coating sample are acquired in step S1 after the last coating layer of the glass coating sample is completed.

[0099] So far, the present invention is completed.

[0100] In summary, in the embodiments of the present invention, a thin film anti-reflection index is obtained based on the difference in film refractive index, film absorptivity and the correlation between the film refractive index and film absorptivity of different glass coating samples; a gain influence index is obtained based on the difference in film refractive index and film absorptivity of each glass film sample, and the difference in film refractive index and film absorptivity between each glass film sample and other glass film samples; and a glass substrate multilayer film forming process is optimized based on the thin film anti-reflection index and the gain influence index. The present invention combines the relationship between the refractive index, absorptivity and transmittance of the thin film to obtain the thin film anti-reflection index and the gain influence index, and uses the two to optimize the glass substrate film forming process to ensure the ideal thickness of the film and excellent transmittance.

[0101] Embodiment 2:

[0102] The present invention proposes a glass substrate multilayer film forming process optimization system, please refer to Figure 3 , which shows a structural diagram of a glass substrate multilayer film forming process optimization system provided by an embodiment of the present invention, the system comprising:

[0103] Data acquisition module 510, used to obtain the film refractive index and film absorptivity of different glass coating samples;

[0104] The anti-reflection analysis module 520 is used to obtain the thin film anti-reflection index of each glass coating sample according to the difference in the thin film refractive index and the difference in the thin film absorptivity between each glass coating sample and the other glass coating samples, and the correlation between the thin film refractive index and the thin film absorptivity of all glass film samples;

[0105] A gain analysis module 530, for obtaining a gain influence index of each glass film sample according to a difference in film refractive index and film absorptivity of each glass film sample, and a difference in film refractive index and film absorptivity between each glass film sample and other glass film samples;

[0106] The glass substrate film forming optimization module 540 is used to optimize the glass substrate multi-layer film forming process according to the thin film anti-reflection index and the gain influence index.

[0107] It should be noted that the device provided in the above embodiment is only illustrated by the division of the above functional modules. In actual applications, the above functions can be assigned to different functional modules as needed, that is, the internal structure of the computer device is divided into different functional modules to complete all or part of the functions described above. In addition, the glass substrate multi-layer film forming process optimization system and the glass substrate multi-layer film forming process optimization method embodiment provided in the above embodiment belong to the same concept. The specific implementation process is detailed in the method embodiment and will not be repeated here.

[0108] Embodiment 3:

[0109] Figure 4 A computer device schematic diagram of a glass substrate multilayer film forming process optimization device provided by an embodiment of the present invention. Figure 4 As shown, the computer device includes: a memory 601, a processor 602, and a computer program 603 stored in the memory 601 and running on the processor 602, wherein when the processor 602 executes the computer program 603, the computer device can execute any one of the glass substrate multi-layer film forming process optimization methods introduced above.

[0110] In addition, an embodiment of the present application also protects a device, which may include a memory and a processor, wherein the memory stores executable program code, and the processor is used to call and execute the executable program code to execute a method for optimizing the multi-layer film forming process of a glass substrate provided in an embodiment of the present application.

[0111] In this embodiment, the functional modules of the device can be divided according to the above method example. For example, each functional module can be corresponded, or two or more functions can be integrated into one processing module. The above integrated module can be implemented in the form of hardware. It should be noted that the division of modules in this embodiment is schematic and is only a logical function division. There may be other division methods in actual implementation.

[0112] It should be understood that the device provided in this embodiment is used to execute the above-mentioned method for optimizing the film-forming process of a multi-layer film on a glass substrate, and thus can achieve the same effect as the above-mentioned implementation method.

[0113] In the case of an integrated unit, the device may include a processing module and a storage module. When the device is applied to a device, the processing module may be used to control and manage the actions of the device. The storage module may be used to support the device to execute mutual program codes, etc.

[0114] The processing module may be a processor or a controller, which may implement or execute various exemplary logic blocks, modules and circuits disclosed in the present application. The processor may also be a combination that implements computing functions, such as a combination of one or more microprocessors, a combination of digital signal processing (DSP) and a microprocessor, etc. The storage module may be a memory.

[0115] It should be noted that the sequence of the above embodiments of the present invention is only for description and does not represent the advantages and disadvantages of the embodiments. The processes depicted in the accompanying drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0116] The various embodiments in this specification are described in a progressive manner, and the same or similar parts between the various embodiments can be referenced to each other, and each embodiment focuses on the differences from other embodiments.

[0117] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A method for optimizing the film forming process of a multilayer film on a glass substrate, characterized in that: The method includes: Obtain the film refractive index and film absorptivity of different glass coating samples; According to the difference in film refractive index and film absorptivity between each glass coating sample and other glass coating samples, and the correlation between the film refractive index and film absorptivity of all glass coating samples, the film anti-reflection index of each glass coating sample is obtained; Obtain a gain influence index of each glass coating sample according to a film refractive index difference and a film absorptivity difference between each glass coating sample and other glass coating samples, and a film refractive index difference and a film absorptivity difference between all glass coating samples; Optimizing the multi-layer film forming process of the glass substrate according to the thin film anti-reflection index and the gain influence index; The method for obtaining the thin film anti-reflection index of each glass coating sample comprises: Obtaining the production time of each glass coating sample; obtaining the first coating sample of each glass coating sample based on the difference between the production time of each glass coating sample and the production time of the other glass coating samples; Record the film refractive index and the film absorptivity as the film optical index; obtain the optical change goodness of each glass coating sample according to the difference between the film optical index of each glass coating sample and the first coating sample; the optical change goodness includes: refraction change goodness and absorption change goodness; Obtaining a thin film anti-reflection index of each glass coating sample according to a correlation coefficient between the thin film refractive index and the thin film absorptivity of the first coating sample of each glass coating sample, the refraction change goodness, and the absorption change goodness; The method for obtaining the optical change goodness of each glass coating sample comprises: For the first coating sample of each glass coating sample, construct an optical change sequence according to the difference of the thin film optical indexes of the first coating samples at two adjacent production moments; select optical analysis elements in the optical change sequence; and obtain the optical change goodness of each glass coating sample according to the number and value of the optical analysis elements; The method for obtaining the gain influence index of each glass coating sample includes: Obtain a second coating sample of each glass coating sample; obtain an optical concentration value of each glass coating sample according to the thin film optical index of the second coating sample, wherein the optical concentration value includes: a refraction concentration value and an absorption concentration value; Obtaining a gain influence index of each glass coating sample according to the difference between the refraction concentration value and the absorption concentration value, the difference between the film refractive index and the refraction concentration value, and the difference between the film absorptivity and the absorption concentration value of each glass coating sample; The method for optimizing the film forming process of a multilayer film on a glass substrate according to the thin film anti-reflection index and the gain influence index comprises: According to the thin film anti-reflection index and the gain influence index of each glass coating sample, the transmittance measurement index of the corresponding glass coating sample is obtained; based on the transmittance measurement index, a preferred glass coating sample is selected from all glass coating samples; and the film thickness of the preferred glass coating sample is used as the standard thickness of the multilayer film in the glass substrate molding process.

2. The method for optimizing the film forming process of a multilayer film on a glass substrate according to claim 1, characterized in that: An implementation method of obtaining the optical concentration value of each glass coating sample according to the thin film optical index of the second coating sample includes: The average value of the thin film optical indexes of all the second coating samples of each glass coating sample is taken as the optical concentration value of the corresponding glass coating sample.

3. The method for optimizing the film forming process of a multilayer film on a glass substrate according to claim 1, characterized in that: An implementation method of selecting a preferred glass coating sample from all glass coating samples based on the transmittance measurement index includes: All glass coating samples are clustered based on the transmittance measurement index to obtain different clusters; based on the transmittance measurement index of the glass coating samples in each cluster, a target cluster is selected; within the target cluster, the glass coating sample corresponding to the largest transmittance measurement index among the glass coating samples corresponding to the film thickness that meets the preset expected thickness is selected as the preferred glass coating sample.

4. The method for optimizing the film forming process of a multilayer film on a glass substrate according to claim 1, characterized in that: The correlation coefficient is the Pearson correlation coefficient.

5. The method for optimizing the film forming process of a multilayer film on a glass substrate according to claim 3, characterized in that: The method for clustering all glass coating samples based on the transmittance measurement index is a CURE hierarchical clustering algorithm.

6. A glass substrate multilayer film forming process optimization system, implementing the method as claimed in claim 1, characterized in that: The system includes: Data acquisition module, used to obtain the film refractive index and film absorptivity of different glass coating samples; An anti-reflection analysis module, used to obtain the thin film anti-reflection index of each glass coating sample according to the difference in thin film refractive index and thin film absorptivity between each glass coating sample and other glass coating samples, and the correlation between the thin film refractive index and thin film absorptivity of all glass coating samples; A gain analysis module, for obtaining a gain influence index of each glass coating sample according to a difference in a film refractive index and a film absorptivity of each glass coating sample, and a difference in a film refractive index and a film absorptivity between each glass coating sample and other glass coating samples; The glass substrate film forming optimization module is used to optimize the glass substrate multilayer film forming process according to the thin film anti-reflection index and the gain influence index.

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