A rib structure and a quartz cavity assembly

Abstract

The present disclosure provides a rib structure and a quartz chamber assembly. The rib structure comprises a plurality of ribs, which are connected end-to-end to form a polygonal frame structure that fits over the outer surface of the quartz chamber. The thickness of at least one rib in the rib structure is set to be less than a predetermined value, or at least one rib has a gradually varying thickness. The disclosed embodiments adjust the rib structure to reduce the rib height while maintaining the required quartz chamber strength. This reduces the shadow cast by the halogen lamp on the wafer and support structure, thereby improving the temperature field.

Description

Technical Field

[0001] The present invention relates to the technical field of quartz chambers, and in particular to a rib structure and a quartz chamber component. Background Art

[0002] Epitaxy (EPI) is a chemical vapor deposition (CVD) technique used for single crystal growth. In equipment implementing this technique, heating lamps are often used to radiatively heat the wafer within the epitaxial chamber. Epitaxial chambers can be divided into atmospheric pressure chambers (ATM) and reduced pressure chambers. Epitaxial chambers are typically integrally molded from quartz. Quartz is a vitreous silicon dioxide with a high melting point, strong temperature tolerance, excellent chemical inertness, and high optical transparency, making it an ideal material for reduced pressure chambers.

[0003] However, the outer side of the cavity wall of the decompression cavity is generally at atmospheric pressure, while the inner side of the cavity wall is in a vacuum state. Therefore, the cavity wall is always under a pressure difference of about one atmosphere during operation, which will cause the quartz cavity to be easily broken under the pressure difference. Summary of the Invention

[0004] The purpose of the embodiments of the present disclosure is to provide a rib structure and a quartz chamber assembly, which can reduce the height of the ribs while ensuring the strength of the quartz chamber, thereby reducing the shadows cast by the halogen lamp on the wafer and the support structure and improving the temperature field.

[0005] In order to solve the above technical problems, the embodiments of the present disclosure adopt the following technical solutions:

[0006] One aspect of the present disclosure provides a rib structure, comprising a plurality of ribs, wherein the plurality of ribs are sequentially connected end to end to form a polygonal frame structure to be sleeved on the outside of a quartz chamber, wherein the thickness of at least one of the ribs in the rib structure is set to be less than a predetermined value or at least one of the ribs has a gradually varying thickness structure.

[0007] In some embodiments, at least one of the ribs in the rib structure forms a structure with a thickness gradually decreasing from both ends toward the middle.

[0008] In some embodiments, a reinforcement structure is provided at the end of at least one of the ribs in the rib structure, and the reinforcement structure makes the thickness of the end of the rib larger than the thickness of other positions of the rib.

[0009] In some embodiments, the thickness of the end portion of the rib is greater than the predetermined value, and the thickness of the other positions of the rib is less than the predetermined value.

[0010] In some embodiments, the reinforcement structure is a protrusion or a rounded corner structure or a spherical structure.

[0011] In some embodiments, when the reinforcement structure is a protrusion, the protrusion includes two arc segments, the two arc segments are smoothly connected to the transverse ribs and the longitudinal ribs respectively, and a straight segment is provided between the two arc segments.

[0012] In some embodiments, the rib has a first surface and a second surface opposite to the first surface; the first surface is at least partially fixedly connected to the outer surface of the quartz chamber, and the first surface is flat; at least a portion of the second surface is at an unequal distance from the first surface to form the thickness gradient structure.

[0013] One aspect of the present disclosure provides a rib structure, comprising a plurality of ribs, wherein the plurality of ribs are sequentially connected end to end to form a polygonal frame structure to be disposed outside a quartz cavity, and at least a portion of at least one rib in the rib structure is configured to be curved.

[0014] One aspect of the present disclosure provides a quartz chamber assembly, comprising a rectangular quartz chamber, wherein a plurality of rib structures as described above are arranged at intervals on the outer side of the quartz chamber along the direction of gas flow in the quartz chamber.

[0015] In some embodiments, the plurality of rib structures include a first rib structure and a second rib structure;

[0016] The first rib structure is adjacent to the end of the quartz chamber, and the transverse ribs in the first rib structure have a first middle section, and the thickness of the first middle section is a first thickness; observed along the gas flow direction, the second rib structure is located between the first rib structures, and the transverse ribs in the second rib structure have a thickness gradient structure, and the thickness of the middle portion of the thickness gradient structure is a second thickness, which is less than the first thickness.

[0017] In some embodiments, the reinforcement structure on the first rib structure is a protrusion, and the reinforcement structure on the second rib structure is a rounded structure.

[0018] The embodiment of the present disclosure adjusts the structure of the ribs to prevent the quartz cavity from cracking, while also ensuring a good uniformity of the surface temperature of the wafer inside the quartz cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments recorded in the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0020] Figure 1 This is a schematic diagram of the installation of a rib structure according to an embodiment of the present disclosure;

[0021] Figure 2 This is a structural diagram of a rib structure of the related technology disclosed herein;

[0022] Figure 3 This is a schematic structural diagram of a rib structure according to an embodiment of the present disclosure;

[0023] Figure 4 This is a schematic structural diagram of a rib structure according to another embodiment of the present disclosure;

[0024] Figure 5 This is a schematic structural diagram of a rib structure according to another embodiment of the present disclosure;

[0025] Figure 6 This is a schematic structural diagram of a rib structure according to another embodiment of the present disclosure;

[0026] Figure 7 This is a schematic structural diagram of a rib structure according to another embodiment of the present disclosure;

[0027] Figure 8 This is a schematic structural diagram of a rib structure according to another embodiment of the present disclosure;

[0028] Figure 9 Schematic diagram of the structure of a quartz chamber assembly according to an embodiment of the present disclosure.

[0029] In the figure: 1-rib structure; 11-rib; 111-middle section; 112-thickness gradient section; 113-connecting section; 12-reinforcement structure; 121-arc section; 122-straight section; 13-first rib structure; 131-first middle section; 14-second rib structure; 141-second middle section; 2-quartz cavity. DETAILED DESCRIPTION

[0030] Various aspects and features of the present disclosure are described herein with reference to the accompanying drawings.

[0031] It should be understood that various modifications may be made to the embodiments disclosed herein. Therefore, the above description should not be considered as limiting, but merely as an example of an embodiment. Other modifications within the scope and spirit of the present disclosure will occur to those skilled in the art.

[0032] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the present disclosure and, together with the general description of the present disclosure given above and the detailed description of the embodiments given below, serve to explain the principles of the present disclosure.

[0033] These and other characteristics of the present disclosure will become apparent from the following description of a preferred form of embodiment given as a non-limiting example with reference to the accompanying drawings.

[0034] It should also be understood that although the present disclosure has been described with reference to certain specific examples, those skilled in the art will be able to realize many other equivalent forms of the present disclosure that have the characteristics recited in the claims and are therefore within the scope of protection defined thereby.

[0035] The above and other aspects, features and advantages of the present disclosure will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings.

[0036] Specific embodiments of the present disclosure will be described hereinafter with reference to the accompanying drawings; however, it should be understood that the claimed embodiments are merely examples of the present disclosure, which may be implemented in a variety of ways. Well-known and / or repetitive functions and structures are not described in detail to avoid obscuring the present disclosure with unnecessary or redundant detail. Therefore, the specific structural and functional details claimed herein are not intended to be limiting, but rather serve merely as a basis and representative basis for teaching those skilled in the art to employ the present disclosure in a variety of ways with substantially any suitable detailed structure.

[0037] This specification may use the phrases "in one embodiment," "in another embodiment," "in a further embodiment," or "in other embodiments," which may all refer to one or more of the same or different embodiments according to the present disclosure.

[0038] The first embodiment of the present disclosure provides a rib structure for a quartz chamber, such as Figure 1 As shown, the rib structure 1 involved in this embodiment is arranged on the outside of the quartz cavity 2 to enhance the strength of the quartz cavity 2. Multiple rib structures 1 can be used for structures of different shapes of the quartz cavity 2. For example, in this embodiment, the quartz cavity 2 is a rectangular structure. Based on the shape of the quartz cavity 2, multiple rib structures 1 can be arranged at intervals along the length direction of the quartz cavity 2 (corresponding to the direction of gas flow within the quartz cavity 2). In this way, by arranging multiple rib structures 1 at intervals on the outside of the quartz cavity 2, the quartz cavity 2 is provided with sufficient strength to share the pressure on the quartz cavity 2.

[0039] Specifically, the rib structure 1 includes a plurality of ribs 11, which are connected end to end to form a polygonal frame structure and are wrapped around the outside of the quartz cavity 2. The rib structure 1 is at least partially attached to the outer surface of the quartz cavity 2. The number of ribs 11 in the rib structure 1 depends on the cross-sectional shape of the quartz cavity 2.

[0040] In this embodiment, the cross-section of the quartz cavity 2 is rectangular. To this end, the ribs 11 are four in number, and the four ribs 11 are connected end to end to form a "U"-shaped structure to be sleeved on the outside of the quartz cavity 2. Adjacent ribs 11 are connected by a heat welding process. In some embodiments, the inner sides of at least some of the four ribs 11 are completely in contact with the outer surface of the quartz cavity 2. In other embodiments, the inner sides of at least some of the four ribs 11 are in contact with the outer surface of the quartz cavity 2, so that they can be arranged on the outer surface of the quartz cavity 2.

[0041] In some embodiments, the inner surfaces of the ribs 11 located on the upper and lower sides of the quartz cavity 2 are fixed to the outer surface of the quartz cavity 2; the two ends of the ribs 11 located on the left and right sides of the quartz cavity 2 are respectively fixed to the ribs 11 located on the upper and lower sides of the quartz cavity 2, and the ribs 11 located on the left and right sides of the quartz cavity 2 are not fixed to the outer surface of the quartz cavity 2. Figure 6 The connection area A between the rib 11 and the surface of the quartz chamber 2 is shown, and the connection area B between two adjacent ribs 11 is also shown.

[0042] In some embodiments, the ribs 11 are provided on both the upper and lower sides of the quartz cavity 2. In other embodiments, the ribs 11 may be provided only on the upper or lower side of the quartz cavity 2. In addition, in the illustrated embodiment, the ribs 11 located on the upper and lower sides of the quartz cavity 2 have the same shape. In some other embodiments, the shape and structure of the ribs 11 located on the upper side of the quartz cavity 2 and the ribs 11 located on the lower side of the quartz cavity 2 may also be different according to actual conditions. During the manufacturing process, the rib structure 1 and the surface of the quartz cavity 2 need to undergo a fusion process, for example, by heat welding or other local heating methods on the surface of the quartz cavity 2 to achieve fusion between at least part of the ribs 11 of the rib structure 1 and the surface of the quartz cavity 2. During the fusion process, thermal annealing may be used to remove as much local stress as possible caused by the fusion process.

[0043] In actual use, the corners of the rib structure 1 will bear more local stress. Excessive concentration of local stress will cause the fracture of the rib 11, thereby increasing the maintenance cost. In addition, during the process of irradiating the inside of the quartz cavity 2 with a heating lamp, the rib structure 1 provided outside the quartz cavity 2 is equivalent to adding a certain thickness to the quartz cavity 2 at the position where the rib structure 1 is located. The light beam passing through the rib structure 1 and then through the quartz cavity 2 into the cavity will absorb more energy. That is, compared with the position where the rib structure 1 is not provided, the position where the rib structure 1 is provided will reduce the energy reaching the inside of the chamber, thereby affecting the uniformity of the wafer surface temperature. Therefore, the thickness of at least one of the ribs 11 in the rib structure 1 is set to be less than a predetermined value or at least one of the ribs 11 is a thickness-graded structure.

[0044] Specifically, considering that the greater the thickness of the rib 11, the more it will affect the effect of light radiation, resulting in uneven heating of the wafer. Therefore, in one embodiment, the thickness of at least one of the ribs 11 in the rib structure 1 is set to be less than a predetermined value, that is, the thickness of the rib 11 is synchronously reduced to a certain thickness, thereby forming a thickness-thinned structure. This can not only ensure the pressure-bearing effect of the rib structure 1, but also reduce the shadow formed by the halogen lamp on the wafer and the wafer support structure, improve the temperature field, and make the energy reaching the wafer surface more uniform. The thickness in the present disclosure refers to the degree of outward extension of the rib 11 relative to the quartz cavity 2.

[0045] As Figure 2 and Figure 3 shown, where Figure 2 shows the setting form of the rib structure in the related art. In Figure 2 the rib 11 in the rib structure 1 has a thickness of d0, and the thickness d0 here is the original thickness. In the art, the original thickness is 30 mm - 40 mm. Figure 3 In

[0046] In some embodiments, considering that the heating lamp usually irradiates the inside of the quartz cavity 2 from the upper and lower sides of the quartz cavity 2, therefore, the influence on the temperature of the wafer in the quartz cavity 2 mainly comes from the horizontal ribs 11 located on the upper and lower sides of the quartz cavity 2 (refer to Figure 2 , "horizontal" in the present disclosure is Figure 2extending in the left - right direction; correspondingly, "vertical" in the present disclosure means extending in the Figure 2 up - down direction in Figure 2 ). For this reason, the thickness of the ribs 11 located on the upper and lower sides of the quartz cavity 2 can be reduced, and the thickness of the vertical ribs 11 located on the left and right sides of the quartz cavity 2 can be maintained at a predetermined value or increased (the increase here is for the consideration of maintaining the overall strength). Of course, in the case of irradiating into the quartz cavity 2 only from the upper side or the lower side of the quartz cavity 2, the thickness of the ribs 11 located only on the upper side or the lower side of the quartz cavity 2 can also be reduced.

[0047] Furthermore, in order to reduce the influence of the thickness of the ribs 11 on light radiation and considering the problem of local stress concentration at the ends of the ribs 11, at least one of the ribs 11 in the rib structure 1 is a thickness - gradient structure. For example, the thickness of the rib 11 gradually decreases from its end to the middle, thus forming a structure of the rib 11 with the largest thickness at both ends and the smallest thickness in the middle.

[0048] Furthermore, the rib 11 has a first surface and a second surface opposite to the first surface; at least part of the first surface is fixedly connected to the outer surface of the quartz cavity 2, and the first surface is a plane; the distance from at least part of the second surface to the first surface is not equal to form the thickness - gradient structure.

[0049] Specifically, here in order to make the rib 11 form a thickness - gradient structure, for example, the inner side of the rib 11 can be completely fitted to the outer surface of the quartz cavity 2 (that is, the inner side of the rib 11 is a plane that completely fits the outer surface of the quartz cavity 2), and at the same time, the outer side of the rib 11 is contracted inward to achieve thickness reduction.

[0050] As Figure 4 shown, for example, the thickness of the end of the rib 11 can be set as dn, and the thickness of the middle of the rib 11 can be set as d2. Here, the thickness of the rib 11 from its end to the middle is a gradient from dn to d2, where d2 < dn, and dn can be greater than, equal to, or less than d0. Here, d0 represents the original thickness, that is, the predetermined value. That is, the thickness of the end of the rib 11 is the largest.

[0051] Furthermore, in view of the problem of local stress concentration at the ends of the ribs 11, a strengthening structure 12 is provided at the ends of at least one of the ribs 11 in the rib structure 1. Here, the strengthening structure 12 makes the thickness of the end of the rib 11 larger than the thickness at other positions of the rib 11. Here, the strengthening structure 12 can be, for example, a protrusion, a rounded - corner structure, a spherical structure, etc.

[0052] The function of providing the strengthening structure 12 at the end of the rib 11 is to reduce the risk of fracture caused by excessive local stress while maintaining the strength of the rib 11.

[0053] Specifically, in Figure 5 the embodiment, the strengthening structure 12 is a protrusion. The protrusion includes two arc segments 121. The two arc segments are smoothly connected to the transverse rib 11 and the longitudinal rib 11 respectively. A straight segment 122 is provided between the two arc segments 121. In this way, the protrusion is formed by the arc segments 121 and the straight segment 122. The straight segment 122 intersects with the transverse rib 11 or the longitudinal rib 11 at a certain angle. Preferably, the straight segment 122 intersects with the transverse rib 11 or the longitudinal rib 11 at an angle of 30-60°. In this way, the rib structure 1 can have the best strength both transversely and longitudinally through the strengthening structure 12.

[0054] Of course, the strengthening structure 12 can also be a rounded corner structure, which is formed by arranging an arc segment between the transverse rib 11 and the longitudinal rib 11.

[0055] Preferably, the thickness of the strengthening structure 12 at the end of the rib 11 is greater than the original thickness, that is, the predetermined value, and the thickness at other positions is less than the original thickness. For example Figure 5 as shown, the thickness of the middle part of the rib 11 here is d3, and the thickness of the strengthening structure 12 at its end is dm. Here, d3 < d0 < dm, where d0 represents the original thickness. When the strengthening structure 12 is a protrusion, the thickness of the strengthening structure 12 can be the distance between the connection of the arc segment 121 and the straight segment 122 and the inner side of the transverse or longitudinal rib 11; when the strengthening structure 12 is a rounded corner structure, the thickness of the strengthening structure 12 can be the distance between the center of the arc segment and the inner side of the transverse or longitudinal rib 11.

[0056] As Figure 6 shown, Figure 6A rib structure 1 having a thickness gradient structure is shown. In the rib structure 1, the rib 11 includes a middle section 111, and thickness gradient sections 112 are provided at both ends of the middle section 111. The thickness of the thickness gradient section 112 gradually increases in the direction away from the middle section 111. In addition, a connecting section 113 is provided on the outside of the thickness gradient section 112. The connecting section 113 is transitionally connected to the reinforcement structure 12. The middle section 111, the thickness gradient section 112, and the connecting section 113 here correspond to a thickness gradient structure. In other embodiments, the thickness gradient structure can also be set to other gradient forms.

[0057] In addition, in other embodiments, Figure 7 As shown, the reinforcement structure 12 provided at the end of the rib 11 can also increase the width of the end of the rib 11, making the width of the end of the rib 11 larger than the width of other positions of the rib 11, which also has the same technical effect as above. The width direction here is perpendicular to the thickness direction, see Figure 7 , the width direction is Figure 7 In this embodiment, the reinforcing structure 12 is a spherical structure, and the diameter of the spherical structure is greater than the thickness of the rib 11. The connection between the spherical structure and the adjacent rib 11 has a smooth transition.

[0058] like Figure 8 As shown, in addition to adjusting the thickness and / or width of the ribs 11, in other embodiments, at least one rib 11 in the rib structure 1 may be configured to have a wavy shape. This can balance the stress distribution of the entire rib structure 1, further reducing the risk of fracture of the rib structure 1 and lowering maintenance costs. Preferably, all four ribs 11 may have the same wavy shape, or they may have different wavy shapes, which is not limited here.

[0059] It should be noted that the ribs 11 are configured to be wavy in shape, and the thickness or width adjustment in any of the above embodiments can also be implemented simultaneously, which will not be described in detail here.

[0060] The second embodiment of the present disclosure provides a quartz chamber component, such as Figure 9 As shown, it includes a quartz cavity 2, and a plurality of rib structures 1 described in any one of the above embodiments are arranged at intervals on the outside of the quartz cavity 2.

[0061] Furthermore, the quartz cavity 2 is a rectangular parallelepiped structure, and the plurality of rib structures 1 are arranged at intervals along the length direction of the quartz cavity 2 (that is, the direction of gas flow).

[0062] Furthermore, the quartz cavity 2 here has two ends 2a, and the gas flows from one end 2a to the other end 2a. The multiple rib structures arranged outside the quartz cavity 2 include two first rib structures 13 close to the two ends 2a and multiple second rib structures 14 located between the two first rib structures 13.

[0063] In the first rib structure 13, the transverse ribs 11 located on the upper and lower sides of the quartz chamber 2 include a first middle section 131, and the thickness of the first middle section 131 is the first thickness. Figure 6 The structure shown in FIG is the same, and the transverse ribs 11 located on the upper and lower sides of the quartz chamber 2 include a second middle section 141, and the thickness of the second middle section 141 is a second thickness, wherein the second thickness is less than the first thickness.

[0064] Considering that the rib structures 1 at both ends of the quartz cavity 2 are farther away from the wafer when viewed in the direction of gas flow, their absorption of light and the shadows formed inside the cavity have little effect on the wafer. Therefore, the first middle section has a larger thickness, which can improve the overall strength of the quartz cavity 2 without affecting the temperature uniformity of the wafer surface.

[0065] Furthermore, considering that the stress at the end 2a of the quartz cavity 2 is relatively large, in the first rib structure 13 adjacent to the end 2a, the ribs 11 located on the upper and lower sides of the quartz cavity 2 further include protrusions at both ends of the first middle section 131. The specific structure of the protrusions here is described in detail. Figure 5 The embodiment shown.

[0066] In the second rib structure 14 , the ribs 11 located on the upper and lower sides of the quartz chamber 2 further include rounded corner structures.

[0067] For example, see Figure 9 The reinforcing structures 12 on the two first rib structures 13 close to the end 2a of the quartz chamber 2 are protrusions, and the reinforcing structures 12 on the remaining eight second rib structures 14 are rounded structures.

[0068] exist Figure 9 In the illustrated embodiment, there are two first rib structures 13. In other embodiments of the present disclosure, multiple first rib structures 13 may be provided, with the multiple first rib structures 13 being located near both ends of the quartz chamber 2. It should be understood that, viewed along the gas flow direction, the first rib structures 13 may be located outside the periphery of the wafer.

[0069] The embodiment of the present disclosure adjusts the structure of the ribs to prevent the quartz cavity from cracking, while also ensuring uniform heating of the wafer surface inside the quartz cavity.

[0070] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used herein to describe the spatial positional relationship of a device or feature to other devices or features as shown in the figures. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figures. For example, if the device in the drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways, rotated 90 degrees or in other orientations, and the spatially relative descriptions used herein are interpreted accordingly.

[0071] In addition to the above, it should be noted that references to "one embodiment," "another embodiment," "an embodiment," and the like in this specification refer to specific features, structures, or characteristics described in conjunction with that embodiment as included in at least one embodiment generally described in this application. The appearance of the same expression in multiple places in the specification does not necessarily refer to the same embodiment. Furthermore, when a specific feature, structure, or characteristic is described in conjunction with any embodiment, it is intended that such feature, structure, or characteristic be implemented in conjunction with other embodiments and fall within the scope of this disclosure.

[0072] In the above embodiments, the description of each embodiment has its own focus. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0073] The foregoing description is merely a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Those skilled in the art will readily appreciate that various modifications and variations are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present disclosure shall be included within the scope of protection of the present disclosure.

Claims

1. A rib structure, characterized in that: The rib structure includes a plurality of ribs, which are connected end to end in sequence to form a polygonal frame structure to be sleeved on the outside of a quartz cavity. The cross-section of the quartz cavity is rectangular. At least one of the ribs in the rib structure includes a thickness gradient structure. The rib has a first surface and a second surface opposite to the first surface. The first surface is at least partially fixedly connected to the outer surface of the quartz cavity, and the first surface is a plane. The thickness gradient structure is a structure in which the thickness of the rib gradually decreases from its two ends to the middle. A reinforcement structure is provided at the end of at least one of the ribs in the rib structure. The reinforcement structure makes the thickness of the end of the rib larger than the thickness of other positions of the rib and / or makes the width of the end of the rib larger than the width of other positions of the rib.

2. The rib structure according to claim 1, characterized in that: The thickness of the end portion of the rib is greater than the predetermined value, and the thickness of other positions of the rib is less than the predetermined value.

3. The rib structure according to claim 1, characterized in that: The reinforcement structure is a protrusion, a rounded structure or a spherical structure.

4. The rib structure according to claim 3, characterized in that: When the reinforcement structure is a spherical structure, along the direction of gas flow in the quartz cavity, the length of the reinforcement structure is greater than the length of the rib at other positions.

5. The rib structure according to claim 3, characterized in that: When the reinforcement structure is a protrusion, the protrusion includes two arc segments, the two arc segments are smoothly connected to the transverse ribs and the longitudinal ribs respectively, and a straight segment is provided between the two arc segments.

6. A rib structure, characterized in that: The rib structure includes a plurality of ribs, which are connected end to end in sequence to form a polygonal frame structure to be arranged on the outside of a quartz cavity. The cross-section of the quartz cavity is rectangular. At least a portion of at least one of the ribs in the rib structure is configured to be wavy. At least one of the ribs in the rib structure includes a thickness gradient structure. The rib has a first surface and a second surface opposite to the first surface. The first surface is at least partially fixedly connected to the outer surface of the quartz cavity, and the first surface is a plane. The thickness gradient structure is a structure in which the thickness of the rib gradually decreases from its two ends to the middle.

7. A quartz chamber assembly, characterized in that: It comprises a rectangular parallelepiped quartz cavity, wherein a plurality of rib structures according to any one of claims 1 to 6 are arranged at intervals on the outer side of the quartz cavity along the direction of gas flow in the quartz cavity.

8. The quartz chamber assembly according to claim 7, wherein: The plurality of rib structures include a first rib structure and a second rib structure; The first rib structure is adjacent to an end of the quartz cavity, the transverse ribs in the first rib structure have a first middle section, and the thickness of the first middle section is a first thickness; Observing along the gas flow direction, the second rib structure is located between the first rib structures, the transverse ribs in the second rib structure have a thickness gradient structure, the thickness of the middle part of the thickness gradient structure is a second thickness, and the second thickness is less than the first thickness.

9. The quartz chamber assembly according to claim 8, characterized in that: The reinforcement structure on the first rib structure is a protrusion, and the reinforcement structure on the second rib structure is a rounded structure.

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