A fan blade scraper assembly and process waste gas treatment system

Abstract

The present invention discloses a fan blade scraper assembly and a process waste gas treatment system, which belongs to the field of waste gas treatment technology and solves the problem that the spray tower is easily blocked in the prior art. The fan blade scraper assembly of the present invention is used for dust removal on the inner wall of the spray tower of the process waste gas treatment system. The fan blade scraper assembly includes a scraper blade, a fan blade, a generator and a battery. The scraper blade contacts the inner wall of the spray tower; one end of the fan blade is fixedly connected to the scraper blade, and the other end of the fan blade is connected to the input end of the generator. The output end of the generator is electrically connected to the battery. When the process waste gas flows through the fan blade, the fan blade is driven to rotate around the input end of the generator, driving the scraper blade to move relative to the inner wall of the spray tower; the generator converts the rotational kinetic energy of the fan blade into electrical energy; the process waste gas forms a vortex after passing through the fan blade. The present invention can be used for process waste gas treatment.

Description

Technical Field

[0001] The invention belongs to the technical field of process waste gas treatment, and in particular relates to a fan blade scraper assembly and a process waste gas treatment system. Background Art

[0002] Semiconductor process waste gas contains a large amount of silane gas and nitrogen oxides. In order to remove harmful components in semiconductor process waste gas, it is usually necessary to perform thermal decomposition, capture soluble matter in a water tank and spray dust removal on the process waste gas in sequence.

[0003] However, silane gas will produce a large amount of silicon dioxide dust after combustion and oxidation. After spray dust removal, the humidity of the process exhaust gas will greatly increase. A large amount of water vapor combined with the dust that has not been removed will accumulate on the inner wall of the spray tower, causing blockage of the spray tower. Summary of the invention

[0004] In view of the above analysis, the present invention aims to provide a fan blade scraper assembly and a process waste gas treatment system to solve the problem of easy clogging of the spray tower in the prior art.

[0005] The purpose of the present invention is mainly achieved through the following technical solutions:

[0006] The present invention provides a fan blade scraper assembly, which is used for dust removal on the inner wall of a spray tower of a process waste gas treatment system. The fan blade scraper assembly comprises a scraper blade, a fan blade, a generator and a battery; the scraper blade contacts the inner wall of the spray tower; one end of the fan blade is fixedly connected to the scraper blade, and the other end of the fan blade is connected to the input end of the generator, and the output end of the generator is electrically connected to the battery. When the process waste gas flows through the fan blade, the fan blade is driven to rotate around the input end of the generator, and the scraper blade is driven to rotate relative to the inner wall of the spray tower; the generator converts the rotational kinetic energy of the fan blade into electrical energy; and the process waste gas forms a vortex after passing through the fan blade.

[0007] Furthermore, the above-mentioned fan blade scraper assembly also includes a mounting plate and a mounting shaft, the mounting plate is fixedly connected to the spray tower, one end of the mounting shaft is rotatably connected to the mounting plate, and the other end of the mounting shaft is fixedly connected to the input end of the generator.

[0008] Furthermore, the mounting plate includes a mounting ring, a support ring and a connecting rib; the support ring is located inside the mounting ring, one end of the connecting rib is fixedly connected to the mounting ring, and the other end of the connecting rib is fixedly connected to the supporting ring.

[0009] Furthermore, there are multiple scraper blades, and the multiple scraper blades are evenly arranged along the circumference of the spray tower.

[0010] The present invention also provides a process waste gas treatment system, including a fan blade scraper assembly and a reaction chamber, a water tank and a spray tower connected in sequence along the flow direction of the process waste gas. The fan blade scraper assembly is arranged in the spray tower, and the fan blade scraper assembly is the above-mentioned fan blade scraper assembly.

[0011] Furthermore, the process waste gas treatment system further comprises an ozone generator, an ozone inlet is provided on the spray tower, and the ozone generator is connected to the ozone inlet.

[0012] Furthermore, along the flow direction of the process exhaust gas, the fan blade is located behind the ozone inlet.

[0013] Further, the ozone generator is electrically connected to the battery.

[0014] Furthermore, the process waste gas treatment system also includes a shell and a lighting component arranged on the outer wall of the shell, and the battery is electrically connected to the lighting component.

[0015] Furthermore, the reaction chamber includes a cavity, an electromagnetic eddy current heating tube, a cooling air channel and an AC power supply; the electromagnetic eddy current heating tube includes an exhaust pipe and a conductive coil wound around the outer wall of the exhaust pipe, the AC power supply is connected to the conductive coil, the exhaust pipe passes through the cavity along the axial direction of the cavity, and the conductive coil and the cooling air channel are located in the cavity.

[0016] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects:

[0017] A) The fan blade scraper assembly provided by the present invention utilizes the flow of process waste gas, so that the fan blade scraper assembly has multiple functions of dust removal on the inner wall of the spray tower, power generation and cyclone dust removal and dehumidification of process waste gas.

[0018] B) The fan blade scraper assembly provided by the present invention has a scraper blade that is always in contact with the inner wall of the spray tower. During the rotation of the fan blade, the dust accumulated on the inner wall of the spray tower can be effectively scraped off, thereby reducing the clogging of the spray tower.

[0019] C) The fan blade scraper assembly provided by the present invention, through the setting of a generator, utilizes the flow of process exhaust gas to drive the fan blades to rotate, converts the rotational kinetic energy of the fan blades into electrical energy, can effectively utilize the rotation of the fan blades to generate electricity, and store it in a battery for use by other power-requiring components in the process exhaust gas treatment system.

[0020] D) The fan blade scraper assembly provided by the present invention actively applies a resistance to the rotation of the fan blade due to the setting of the generator and the scraper blade, thereby being able to change the flow direction of the process exhaust gas, so that the process exhaust gas forms a vortex after passing through the fan blade, and then the process exhaust gas can be cyclone-cleaned and dehumidified.

[0021] Other features and advantages of the present invention will be described in the following description, and part of them will become obvious from the description, or will be understood by practicing the present invention. The purpose and other advantages of the present invention can be realized and obtained by the structures particularly pointed out in the written description and the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings are only used for the purpose of illustrating specific embodiments and are not to be considered as limiting the present invention. In the entire drawings, the same reference symbols represent the same components;

[0023] Figure 1 A schematic diagram of the structure of the fan blade scraper assembly provided in the first embodiment of the present invention and the spray tower in the process waste gas treatment system provided in the second embodiment;

[0024] Figure 2 A schematic diagram of the structure of a mounting plate in a blade scraper assembly provided in Embodiment 1 of the present invention;

[0025] Figure 3 A schematic diagram of the structure of a process waste gas treatment system provided in Embodiment 2 of the present invention;

[0026] Figure 4 A schematic diagram of the structure of a reaction chamber in a process waste gas treatment system provided in Embodiment 2 of the present invention;

[0027] Figure 5 An axial cross-sectional view of a reaction chamber in a process waste gas treatment system provided in Embodiment 2 of the present invention;

[0028] Figure 6 This is a schematic diagram of the structure of the electromagnetic eddy current heating tube in the process waste gas treatment system provided in Example 2 of the present invention.

[0029] Reference numerals:

[0030] 1-cooling air channel; 2-exhaust pipe; 3-conductive coil; 4-inner cavity; 5-cooling interlayer; 6-exhaust gas outlet; 7-interlayer air inlet; 8-interlayer air outlet; 9-swirl plate; 10-reaction gas inlet; 11-turbine; 111-reducing pipe; 112-expanding pipe; 12-scraper blade; 13-fan blade; 14-generator; 141-input end; 15-battery; 16-mounting plate; 161-mounting ring; 162-support ring; 163-connecting rib; 17-mounting shaft; 18-water tank; 19-spray tower; 20-ozone generator. DETAILED DESCRIPTION

[0031] Preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the present invention and are used to explain the principles of the present invention together with the embodiments of the present invention.

[0032] Embodiment 1

[0033] This embodiment provides a fan blade scraper assembly for dust removal on the inner wall of the spray tower 19 of the process waste gas treatment system, see Figure 1 , including a scraper blade 12, a fan blade 13, a generator 14 and a battery 15. When the process waste gas treatment system is in operation, after the process waste gas flows through the fan blade 13, the wind direction after the fan blade 13 rotates is the same as the flow direction of the process waste gas. One end of the fan blade 13 is fixedly connected to the scraper blade 12, and the other end of the fan blade 13 is connected to the input end 141 of the generator 14. The output end of the generator 14 is connected to the battery 15, and the scraper blade 12 is in contact with the inner wall of the spray tower 19.

[0034] by Figure 1 Taking the setting direction as an example, during implementation, the process exhaust gas flows into the spray tower 19 from bottom to top, and when flowing through the fan blades 13, it can drive the fan blades 13 to rotate around the input end 141 of the generator 14, thereby driving the scraper blades 12 to rotate relative to the inner wall of the spray tower 19 to scrape off the dust accumulated on the inner wall of the spray tower 19; the fan blades 13 are connected to the input end 141 of the generator 14, and the rotation of the fan blades 13 drives the input end 141 of the generator 14 to rotate, and the generator 14 converts the rotational kinetic energy of the fan blades 13 into electrical energy, which flows out from the output end of the generator 14 and is stored in the battery 15; at the same time, the process exhaust gas forms a vortex after passing through the fan blades 13, and the process exhaust gas is subjected to vortex dust removal and dehumidification.

[0035] Compared with the prior art, the fan blade scraper assembly provided in this embodiment utilizes the flow of process exhaust gas, so that the fan blade scraper assembly has multiple functions of dust removal on the inner wall of the spray tower 19, power generation and cyclone dust removal and dehumidification of process exhaust gas. Specifically, on the one hand, the scraper blade 12 is always in contact with the inner wall of the spray tower 19. During the rotation of the fan blade 13, the dust accumulated on the inner wall of the spray tower 19 can be effectively scraped off, thereby reducing the blockage of the spray tower 19; on the other hand, through the setting of the generator 14, the flow of process exhaust gas is used to drive the fan blade 13 to rotate, and the rotational kinetic energy of the fan blade 13 is converted into electrical energy, which can effectively utilize the rotation of the fan blade 13 to generate electricity and store it in the battery 15 for use in other power-requiring components in the process exhaust gas treatment system; on the other hand, due to the setting of the generator 14 and the scraper blade 12, a resistance is actively applied to the rotation of the fan blade 13, thereby changing the flow direction of the process exhaust gas, so that the process exhaust gas forms a cyclone after passing through the fan blade 13, and then the process exhaust gas can be cyclone dust removal and dehumidification.

[0036] In order to improve the efficiency of dust removal, there are multiple scraper blades 12 , and the multiple scraper blades 12 are evenly arranged along the circumference of the spray tower 19 .

[0037] In order to appropriately reduce the rotational resistance of the fan blades 13 while ensuring the dust removal efficiency, illustratively, the number of the scraper blades 12 is two, and the two scraper blades 12 are symmetrically arranged relative to the axis of the spray tower 19 .

[0038] It can be understood that in order to achieve the installation between the above-mentioned fan blade scraper assembly and the spray tower 19, the above-mentioned fan blade scraper assembly also includes a mounting plate 16 and a mounting shaft 17. The mounting plate 16 is fixedly connected to the spray tower 19 and is located at the air outlet of the spray tower 19. One end of the mounting shaft 17 is rotatably connected to the mounting plate 16, and the other end of the mounting shaft 17 is fixedly connected to the input end 141 of the generator 14, so that the fan blade scraper assembly is mounted in the inner cavity of the spray tower 19.

[0039] In order to reduce the influence of the installation of the mounting plate 16 on the flow of process exhaust gas, the structure of the mounting plate 16 is specifically described in detail. Figure 2 , which includes a mounting ring 161, a support ring 162 and connecting ribs 163. Exemplarily, the number of connecting ribs 163 is 6 to 10 (for example, 8). The support ring 162 is located in the mounting ring 161 and is coaxially arranged with the mounting ring 161. There is a gap between the support ring 162 and the mounting ring 161. One end of the connecting rib 163 is fixedly connected to the mounting ring 161, and the other end of the connecting rib 163 is fixedly connected to the support ring 162. In this way, while ensuring the installation of the fan blade scraper assembly, sufficient gap is reserved for the flow of process exhaust gas.

[0040] In order to thoroughly remove dust from the inner wall of the spray tower 19, the length ratio of the scraper blade 12 to the spray tower 19 is 0.8~0.95:1. Limiting the length ratio between the two within the above range can reduce the rotational resistance of the scraper blade 12 and the interference with other components while ensuring that the scraper blade 12 can thoroughly remove dust from the spray tower 19.

[0041] Embodiment 2

[0042] This embodiment provides a process waste gas treatment system, see Figure 3 , including a reaction chamber, a water tank 18 and a spray tower 19 which are connected in sequence along the flow direction of the process exhaust gas. The fan blade scraper assembly is arranged in the spray tower 19 to remove dust from the inner wall of the spray tower 19.

[0043] Specifically, the reaction chamber and the spray tower 19 are both located above the water tank 18 . The upper wall of the water tank 18 is provided with a box air inlet and a box air outlet. The reaction chamber is connected to the box air inlet, and the spray tower 19 is connected to the box air outlet of the water tank 18 .

[0044] Compared with the prior art, the beneficial effects of the process waste gas treatment system provided in this embodiment are substantially the same as the beneficial effects of the fan blade scraper assembly provided in the first embodiment, and are not described in detail here.

[0045] It is worth noting that the process waste gas contains not only a large amount of dust, but also nitrogen oxides. In order to remove nitrogen oxides, the process waste gas treatment system further includes an ozone generator 20. An ozone inlet is provided on the spray tower 19, and the ozone generator 20 is connected to the ozone inlet. In this way, the ozone generated by the ozone generator 20 is supplied to the spray tower 19, reacts with the process waste gas, generates nitrogen dioxide that is easily soluble in water, and then is removed by water washing in the spray tower 19; in addition, the supply of ozone can also increase the flow rate of the process waste gas, thereby increasing the driving force for the rotation of the fan blades 13.

[0046] From the perspective of uniformity of mixing of ozone and process waste gas, the fan blade 13 is located behind the ozone inlet along the flow direction of the process waste gas. In this way, when ozone and process waste gas flow through the fan blade 13, the rotation of the fan blade 13 can increase the disturbance of the ozone and process waste gas airflows, thereby promoting sufficient mixing of the two.

[0047] Since the ozone generator 20 is an electrical device, the ozone generator 20 is electrically connected to the battery 15 , and the electrical energy generated by the rotation of the fan blades 13 is used to power the ozone generator 20 .

[0048] In practical applications, considering that the process waste gas treatment system needs to be repaired during a power outage, the maintenance environment requires lighting. Therefore, the above-mentioned process waste gas treatment system also includes a shell (not shown in the figure) and a lighting component (for example, a lamp, not shown in the figure) arranged on the shell. The battery 15 is electrically connected to the lighting component, and the electric energy generated by the rotation of the fan blades 13 is used for lighting the process waste gas treatment system.

[0049] For the structure of the reaction chamber, see Figures 4 to 5 , including a cavity and at least one electromagnetic eddy current heating tube and at least one cooling air channel 1 arranged in the cavity, the electromagnetic eddy current heating tube includes an exhaust pipe 2 (for example, a ferromagnetic exhaust pipe made of ferromagnetic material) and a conductive coil 3 wound around the outer wall of the exhaust pipe 2, the air inlet end of the exhaust pipe 2 is connected to the exhaust outlet of the process exhaust gas generating equipment, the exhaust pipe 2 passes through the cavity along the axial direction of the cavity, and the conductive coil 3 and the cooling air channel 1 are located in the cavity.

[0050] The reaction chamber of this structure is used to heat and react the waste gas discharged from the process waste gas generating equipment by using electromagnetic eddy current heating tubes. The electromagnetic eddy current heating is based on the principle of electromagnetic induction, and uses the eddy current loss under the action of the alternating magnetic field to generate heat. It can achieve rapid heating to a higher temperature, greatly improving the heating temperature, heating speed and process waste gas treatment efficiency of the process waste gas treatment system. At the same time, through the setting of the cooling air channel 1, the conductive coil 3 and the cavity can be quickly cooled and dissipated to prevent the conductive coil 3 from being damaged by excessive temperature, avoid overheating, reduce the cooling time of the process waste gas, extend the service life of the spray tower 19, and improve the maintenance efficiency.

[0051] In order to extend the cooling air flow path in the reaction chamber and thus improve the cooling effect, for the structure of the chamber, see Figure 5 Specifically, it includes an inner cavity 4 and a cooling interlayer 5 sleeved outside the inner cavity 4, an exhaust pipe 2 is located in the inner cavity 4, an exhaust outlet hole 6 is provided on the bottom wall of the inner cavity 4, the exhaust pipe 2 is communicated with the exhaust outlet hole 6, and is communicated with the water tank 18 through the exhaust outlet hole 6, a gap is provided between the cooling air channel 1 and the bottom wall of the inner cavity 4, an interlayer air inlet hole 7 is provided on the inner cavity 4, the inner cavity 4 is communicated with the cooling interlayer 5 through the interlayer air inlet hole 7, an interlayer air outlet hole 8 is provided on the cooling interlayer 5, and the cooling interlayer 5 is communicated with the water tank 18 through the interlayer air outlet hole 8. In this way, by providing the cooling interlayer 5, the interlayer air inlet hole 7 and the interlayer air outlet hole 8, the flow path of the cooling air can be greatly extended.

[0052] Exemplarily, the interlayer air inlet 7 is located at the top of the inner layer, and the interlayer air outlet 8 is located at the bottom of the cooling interlayer 5. Based on the gap between the cooling air channel 1 and the bottom wall of the inner cavity 4 and the setting positions of the interlayer air inlet 7 and the interlayer air outlet 8, the specific flow path of the cooling air is as follows:

[0053] The cooling air enters the cooling air channel 1 from the top of the cooling air channel 1, flows downward along the cooling air channel 1 to the bottom of the cooling air channel 1, and enters the inner cavity 4 from the gap between the cooling air channel 1 and the bottom wall of the inner cavity 4; the cooling air flows upward along the gap between the cooling channel and the exhaust pipe 2, the gap between the exhaust pipe 2 and the exhaust pipe 2, and the gap between the exhaust pipe 2 and the inner cavity 4, and enters the cooling interlayer 5 through the interlayer air inlet hole 7; the cooling air flows downward in the cooling interlayer 5, and finally flows out of the cooling interlayer 5 (i.e., the reaction chamber) from the interlayer air outlet hole 8, and enters the water tank 18.

[0054] In order to further extend the flow path of the cooling air in the reaction chamber, the reaction chamber further includes a swirl plate 9 arranged in the cooling air channel 1. Exemplarily, the swirl plate 9 is located at the air inlet end of the cooling air channel 1. Thus, the cooling air generates a swirl through the arrangement of the swirl plate 9. The swirl cooling air can always rotate and flow in the inner cavity 4 and the cooling interlayer 5, thereby effectively extending the flow path of the cooling air in the reaction chamber.

[0055] Exemplarily, a reaction gas inlet hole 10 is provided on the exhaust pipe 2 , and the reaction gas inlet hole 10 is located at the inlet end of the exhaust pipe 2 . The reaction gas supply unit is connected with the exhaust pipe 2 through the reaction gas inlet hole 10 .

[0056] Considering that the mixing uniformity of the process exhaust gas and the air in the exhaust pipe 2 will affect the treatment effect of the process exhaust gas, the above-mentioned reaction chamber further includes a spoiler pipe 11, see Figure 6 The spoiler pipe 11 is arranged on the inner wall of the exhaust pipe 2 and is coaxial with the exhaust pipe 2. For example, the spoiler pipe 11 is located at the air inlet end of the exhaust pipe 2, and along the flow direction of the process exhaust gas, the spoiler pipe 11 is located behind the reaction gas inlet hole 10. Through the setting of the spoiler pipe 11, the fluid state of the process exhaust gas can be changed, and the sufficient mixing of the process exhaust gas and the air is promoted, thereby ensuring the sufficient decomposition of the heating reaction.

[0057] As for the structure of the spoiler tube 11, specifically, it includes a reducing tube 111 and an expanding tube 112 which are sequentially connected along the flow direction of the process waste gas. In this way, the flow rate of the process waste gas and the reaction gas can be increased through the reducing tube 111, so that the turbulence of the process waste gas and the reaction gas is increased, and the two are fully mixed. Then, after passing through the expanding tube 112, the flow rate of the process waste gas and the reaction gas is reduced, and the reaction time of the process waste gas and the reaction gas in the waste gas pipe 2 is extended to ensure sufficient decomposition of the heating reaction.

[0058] Taking into account that the setting of the spoiler may cause dust accumulation, in order to reduce the dust accumulation, the inner wall of the above-mentioned spoiler tube 11 is in an arc shape, so as to minimize the position where dust accumulation is easily caused on the inner wall of the spoiler tube 11, and avoid the situation where dust blocks the spoiler tube 11 under the working condition of high dust content in the process exhaust gas.

[0059] Based on the structure of the process waste gas treatment system of this embodiment, the specific process of process waste gas treatment is as follows: the process waste gas is introduced into the waste gas pipe 2 of the reaction chamber and flows in the waste gas pipe 2, the cooling air is introduced into the cooling air channel 1 and flows in the cooling air channel 1, and the AC power supply introduces AC power to the conductive coil 3 to generate electromagnetic eddy current heating. In the waste gas pipe 2, harmful gases in the process waste gas undergo thermal decomposition, so that the content of harmful gases is reduced. The waste gas discharged from the waste gas pipe 2 contains dust and gases that are easily soluble in water. At the same time, the cooling air exchanges heat with the conductive coil 3 and the cavity through the side wall of the cooling air channel 1, and quickly cools and dissipates the conductive coil 3 and the cavity. Then, on the one hand, the process waste gas after the reaction flows into the water tank 18 through the air inlet of the box body, and the water in the water tank 18 captures part of the dust and water-soluble gases in the waste gas after the reaction, and flows into the spray tower 19 from the box body air outlet of the water tank 18 and flows in the spray tower 19; in the spray tower 19, the spray water sprayed from the nozzle of the spray tower 19 transfers mass with the process waste gas, further capturing the dust and water-soluble gases in the waste gas, and the spray water and dust flow downward to the water tank 18; on the other hand, the process waste gas flows through When the fan blades 13 are rotated, they can be driven to rotate around the input end 141 of the generator 14, thereby driving the scraper blades 12 to move relative to the inner wall of the spray tower 19 to scrape off the dust accumulated on the inner wall of the spray tower 19. At the same time, the rotation of the fan blades 13 drives the input end 141 of the generator 14 to rotate. The generator 14 converts the rotational kinetic energy of the fan blades 13 into electrical energy, which flows out from the output end of the generator 14 and is stored in the battery 15. The process exhaust gas forms a vortex after passing through the fan blades 13, and the process exhaust gas is subjected to vortex dust removal and dehumidification.

[0060] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by any technician familiar with the technical field within the technical scope disclosed by the present invention should be covered within the protection scope of the present invention.

Claims

1. A process waste gas treatment system, characterized in that: It comprises a fan blade scraper assembly and a reaction chamber, a water tank and a spray tower which are sequentially connected along the flow direction of the process exhaust gas, wherein the fan blade scraper assembly is arranged in the spray tower; The fan blade scraper assembly is used for dust removal on the inner wall of the spray tower of the process waste gas treatment system, and the fan blade scraper assembly includes a scraper blade, a fan blade, a generator and a battery; the scraper blade contacts the inner wall of the spray tower; one end of the fan blade is fixedly connected to the scraper blade, and the other end of the fan blade is fixedly connected to the input end of the generator, and the output end of the generator is electrically connected to the battery. When the process waste gas flows through the fan blade, the fan blade is driven to rotate around the input end of the generator, and the scraper blade is driven to rotate relative to the inner wall of the spray tower; the generator converts the rotational kinetic energy of the fan blade into electrical energy; the process waste gas forms a vortex after passing through the fan blade; The reaction chamber comprises a chamber body, an electromagnetic eddy current heating tube, a cooling air channel and an AC power supply; the electromagnetic eddy current heating tube comprises an exhaust pipe and a conductive coil wound around the outer wall of the exhaust pipe, the AC power supply is connected to the conductive coil, the exhaust pipe penetrates the chamber body along the axial direction of the chamber body, and the conductive coil and the cooling air channel are located in the chamber body; The number of the electromagnetic eddy current heating tubes is multiple, and the number of the cooling air channel is one; The cavity comprises an inner cavity and a cooling interlayer sleeved outside the inner cavity, the exhaust pipe is located in the inner cavity, an exhaust outlet hole is provided on the bottom wall of the inner cavity, the exhaust pipe is connected to the water tank through the exhaust outlet hole, a gap is provided between the cooling air channel and the bottom wall of the inner cavity, an interlayer air inlet hole is provided on the inner cavity, the inner cavity is connected to the cooling interlayer through the interlayer air inlet hole, an interlayer air outlet hole is provided on the cooling interlayer, and the cooling interlayer is connected to the water tank through the interlayer air outlet hole; The interlayer air inlet hole is located at the top end of the inner cavity, and the interlayer air outlet hole is located at the bottom end of the cooling interlayer.

2. The process waste gas treatment system according to claim 1, characterized in that: It also includes a mounting plate and a mounting shaft, wherein the mounting plate is fixedly connected to the spray tower, one end of the mounting shaft is rotatably connected to the mounting plate, and the other end of the mounting shaft is fixedly connected to the input end of the generator.

3. The process waste gas treatment system according to claim 2, characterized in that: The mounting plate comprises a mounting ring, a supporting ring and connecting ribs; The support ring is located inside the mounting ring, one end of the connecting rib is fixedly connected to the mounting ring, and the other end of the connecting rib is fixedly connected to the support ring.

4. The process waste gas treatment system according to claim 1, characterized in that: There are multiple scraper blades, and the multiple scraper blades are evenly arranged along the circumference of the spray tower.

5. The process waste gas treatment system according to claim 1, characterized in that: It also includes an ozone generator. An ozone air inlet is arranged on the spray tower, and the ozone generator is connected to the ozone air inlet.

6. The process waste gas treatment system according to claim 5, characterized in that: Along the flow direction of the process exhaust gas, the fan blade is located behind the ozone inlet.

7. The process waste gas treatment system according to claim 5, characterized in that: The ozone generator is electrically connected to the battery.

8. The process waste gas treatment system according to claim 1, characterized in that: It also includes a shell and a lighting component arranged on the outer wall of the shell, and the battery is electrically connected to the lighting component.

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