Power supply circuit, power supply circuit control method and coating power supply

Abstract

The embodiment of the present application discloses a power supply circuit, a control method of the power supply circuit and a coating power supply, which relate to the field of power supply technology. The power supply circuit includes: a power supply module; a first switch module; a second switch module connected to the first end of the power supply module and the first end of the first switch module; a third switch module connected to the second end of the power supply module and the first end of the first switch module, and the first switch module, the second switch module and the third switch module are all used to change the power supply mode of the power supply module; an energy storage module, the first end of the energy storage module is connected to the first end of the power supply module, and the second end of the energy storage module is connected to the first end of the first switch module; a load module is connected to the second end of the power supply module; the power supply mode of the power supply module includes a first power supply mode formed by a first power supply mode including a first power supply stage, a second power supply stage and a third power supply stage; wherein different switch modules have different working states in different power supply stages.

Description

Technical Field

[0001] The present application relates to the field of power supply technology, and in particular to a power supply circuit, a control method for a power supply circuit, and a coating power supply. Background Art

[0002] The coating power supply is a power supply device used in the coating process, which is mainly used to deposit metals and other materials on the surface of the substrate to form a thin film or coating. Specifically, it controls the current and voltage so that the metal material on the anode dissolves in the form of ions and deposits the desired thin film or coating on the cathode surface.

[0003] However, due to the manufacturing process of the film-coated power supply or the design defects of its internal power supply circuit, the arc starting and arc extinguishing effects of the conventional film-coated power supply are poor.

[0004] Application Contents

[0005] In view of this, one of the objects of the present application is to provide a power supply circuit, a control method of the power supply circuit and a coating power supply, which can improve the arc starting and arc extinguishing performance of the coating power supply.

[0006] In a first aspect, an embodiment of the present application provides a power supply circuit, including:

[0007] Power module;

[0008] A first switch module;

[0009] A second switch module is connected to the first end of the power module and the first end of the first switch module;

[0010] A third switch module is connected to the second end of the power module and the first end of the first switch module, and the first switch module, the second switch module and the third switch module are all used to change the power supply mode of the power module;

[0011] An energy storage module, wherein a first end of the energy storage module is connected to a first end of the power module, and a second end of the energy storage module is connected to a first end of the first switch module;

[0012] A load module, connected to the second end of the power module, and configured to operate in different power supply modes of the power module;

[0013] The power supply mode of the power supply module includes a first power supply mode, and the first power supply mode includes a first power supply stage, a second power supply stage and a third power supply stage; wherein,

[0014] In the first power supply stage, the first switch module is turned off, and the second switch module and the third switch module are turned on;

[0015] In the second power supply stage, the first switch module and the second switch module are both turned on, and the third switch module is turned off;

[0016] In the third power supply stage, the first switch module is turned on, and the second switch module and the third switch module are both turned off.

[0017] In a possible implementation, the power supply module includes a pre-stage filter submodule, and the power supply circuit further includes:

[0018] An energy feedback module, one end of the energy feedback module is connected to the front-stage filter submodule, and the other end of the energy feedback module is connected to the second end of the power module and the second end of the first switch module, and the energy feedback module is used to feed back the energy generated at both ends of the load module to the front-stage filter submodule;

[0019] The power supply mode of the power supply module also includes a second power supply mode, and the second power supply mode includes a fourth power supply stage, a fifth power supply stage, a sixth power supply stage and a seventh power supply stage; wherein,

[0020] In the fourth power supply stage, the first switch module is turned on, and the second switch module and the third switch module are both turned off;

[0021] In the fifth power supply stage, the first switch module and the third switch module are both turned off, and the second switch module is turned on;

[0022] In the sixth power supply stage, the first switch module is turned off, and the second switch module and the third switch module are both turned on;

[0023] In the seventh power supply stage, the first switch module and the second switch module are both turned on, and the third switch module is turned off.

[0024] In a possible implementation, the energy feedback module includes:

[0025] A transformer, the transformer comprising a primary winding, wherein one end of the primary winding is connected to the second end of the power module, and the other end of the primary winding is connected to the second end of the first switch module; wherein,

[0026] In the fifth power supply stage, the transformer is used to feed back the energy generated at both ends of the load module to the pre-stage filter submodule.

[0027] In a possible implementation manner, the transformer further includes a secondary winding, and the energy feedback module further includes:

[0028] a first diode, wherein an anode of the first diode is connected to the second end of the first switch module, and a cathode of the first diode is connected to the other end of the primary winding;

[0029] a second diode, wherein an anode of the second diode is connected to one end of the secondary winding, and a cathode of the second diode is connected to the front-stage filter submodule;

[0030] A filter capacitor, one end of the filter capacitor is connected to the cathode of the second diode, and the other end of the filter capacitor is connected to the other end of the secondary winding of the transformer.

[0031] In a possible implementation manner, the power supply circuit further includes:

[0032] A first unidirectional conduction module is connected between the second end of the power module and the third switch module, wherein the first unidirectional conduction module includes a third diode.

[0033] In a possible implementation manner, the power supply circuit further includes:

[0034] The second unidirectional conduction module is connected between the first switch module and the second switch module, wherein the second unidirectional conduction module includes a fourth diode.

[0035] In a possible implementation manner, the power supply mode further includes:

[0036] A third power supply mode: in the third power supply mode, the first switch module is turned on, and the second switch module and the third switch module are both turned off.

[0037] In a possible implementation manner, at least one of the first switch module, the second switch module, and the third switch module includes a fully-controlled switch tube.

[0038] In a second aspect, an embodiment of the present application provides a control method for a power supply circuit, which is applied to the power supply circuit provided in the first aspect, and the method includes:

[0039] When it is detected that the power supply mode is in the first power supply stage, the first switch module is controlled to be turned off, and the second switch module and the third switch module are controlled to be turned on;

[0040] When it is detected that the power supply mode is in the second power supply stage, the first switch module and the second switch module are controlled to be turned on and the third switch module is turned off;

[0041] When it is detected that the power supply mode is in the third power supply stage, the first switch module is controlled to be turned on, and the second switch module and the third switch module are controlled to be turned off.

[0042] In a third aspect, an embodiment of the present application provides a coating power supply, comprising the power supply circuit of the first aspect.

[0043] The power supply circuit provided in the embodiment of the present application includes: a power supply module; a first switch module; a second switch module connected to the first end of the power supply module and the first end of the first switch module; a third switch module connected to the second end of the power supply module and the first end of the first switch module, and the first switch module, the second switch module and the third switch module are all used to change the power supply mode of the power supply module; an energy storage module, the first end of the energy storage module is connected to the first end of the power supply module, and the second end of the energy storage module is connected to the first end of the first switch module; a load module is connected to the second end of the power supply module. The embodiment of the present application uses the power supply circuit designed as above to enable the first switch module, the second switch module and the third switch module to work in different power supply modes, thereby improving the arc starting and arc extinguishing performance of the coating power supply. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. It should be understood that the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0045] Figure 1 A schematic diagram of functional modules of a power supply circuit provided in an embodiment of the present application;

[0046] Figure 2 A schematic diagram of a power supply circuit provided in an embodiment of the present application;

[0047] Figure 3 A logic control timing diagram included in a power supply circuit provided in an embodiment of the present application;

[0048] Figure 4 Another logic control timing diagram included in a power supply circuit provided in an embodiment of the present application;

[0049] Figure 5 A further logic control timing diagram included in a power supply circuit provided in an embodiment of the present application;

[0050] Figure 6 A schematic diagram of the structure of another power supply circuit provided in an embodiment of the present application;

[0051] Figure 7 A schematic diagram of the structure of another power supply circuit provided in an embodiment of the present application;

[0052] Figure 8 A flowchart of a method for controlling a power supply circuit provided in an embodiment of the present application.

[0053] Description of reference numerals:

[0054] A power module 100, a first switch module 110, a second switch module 120, a third switch module 130, an energy storage module 140, a load module 150, an energy feedback module 200, a first unidirectional conduction module 210, and a second unidirectional conduction module 220;

[0055] Transformer T, filter capacitor C, first diode D1, second diode D2, third diode D3, fourth diode D4, first switch S1, second switch S2, third switch S3;

[0056] The first power supply mode T1, the second power supply mode T2, the third power supply mode T3, the first power supply stage t1, the second power supply stage t2, the third power supply stage t3, the fourth power supply stage t4, the fifth power supply stage t5, the sixth power supply stage t6, and the seventh power supply stage t7. DETAILED DESCRIPTION

[0057] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0058] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0059] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0060] In various embodiments of the present application, the expression "or" or "at least one of A or / and B" includes any combination or all combinations of the words listed at the same time. For example, the expression "A or B" or "at least one of A or / and B" may include A, may include B, or may include both A and B.

[0061] In the description of the present application, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear to indicate an orientation or position relationship, it is based on the orientation or position relationship shown in the drawings, or is the orientation or position relationship in which the product of the invention is usually placed when used. It is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0062] In addition, the terms “first”, “second”, etc., if used, are merely used to distinguish between the descriptions and should not be understood as indicating or implying relative importance.

[0063] It should be noted that, in the absence of conflict, the features in the embodiments of the present application can be combined with each other. Moreover, in the embodiments of the present application, the term "connection" can refer to "electrical connection" or "direct connection". "Electrical connection" can refer to direct electrical connection between two components or electrical connection between two components via one or more normally open tubes or other components.

[0064] To facilitate a better understanding of the solutions of the embodiments of the present application, the relevant technologies are first introduced below.

[0065] In the coating process, the power supply is one of the most important equipment, which can provide the required electrical energy and charge to make the coating process proceed normally. According to the current type, current intensity and power supply structure, the power supply used in the coating process can be divided into DC power supply, AC power supply and pulse power supply.

[0066] AC power supplies include variable frequency AC power supplies and AC power supplies with special waveforms, which are usually used in some special coating processes or special process requirements. Unlike DC power supplies, the voltage and current of AC power supplies are in the form of sinusoidal waves, and their polarity changes repeatedly within a cycle, so special processing and suppression are required.

[0067] A pulse power supply is a power supply device that provides pulse current or pulse voltage. It is usually used in some special coating processes that require high response speed and high peak current in many power cycles, such as pulse electroplating, pulse electrolysis and pulse magnetron sputtering.

[0068] Vacuum coating refers to a method of heating metal or non-metal materials under high vacuum conditions to evaporate and condense on the surface of the coated object (metal, semiconductor or insulator) to form a thin film.

[0069] Cathode target is a material used in the thin film preparation process such as physical evaporation deposition and sputtering deposition. These materials are usually used as targets in the thin film deposition process, and are deposited on the substrate through physical evaporation or sputtering techniques to prepare various functional films. Among them, because the cathode of the target is relative to the anode of the chamber. During the sputtering process, the atoms on the target will be collided by positively charged argon ions, and the positive charge carried by the argon ions must fly to the cathode (that is, the negative electrode in the conventional sense), so the target is called the cathode.

[0070] For more information about vacuum coating, please refer to the magnetron sputtering coating process in the related technology, which will not be introduced in more detail here.

[0071] Arcing refers to the phenomenon of plasma discharge between two electrodes. Specifically, when the voltage difference between the two electrodes is large enough, current is generated between the electrodes, forming a discharge.

[0072] Arcing is the process in which the discharge current can continue to increase and cause damage to equipment or systems once the plasma discharge is formed. Arcing usually causes the generation of high temperatures, electric fields and electromagnetic fields, which may cause surface damage to surface materials or damage to coating equipment. The duration of arcing depends on many factors, including arc energy, voltage, current and surrounding environment.

[0073] Arc extinguishing refers to the process of effectively eliminating the arc and resuming normal coating operations.

[0074] In order to solve the technical problems in the background technology, the embodiments of the present application provide a power supply circuit, a control method of the power supply circuit and a coating power supply. The power supply circuit provided by the embodiments of the present application is first introduced below.

[0075] See also Figure 1 , Figure 1 A schematic diagram of a functional module of a power supply circuit provided in an embodiment of the present application, wherein the power supply circuit includes:

[0076] Power module 100;

[0077] A first switch module 110;

[0078] The second switch module 120 is connected to the first end of the power module 100 and the first end of the first switch module 110;

[0079] The third switch module 130 is connected to the second end of the power module 100 and the first end of the first switch module 110. The first switch module 110, the second switch module 120 and the third switch module 130 are all used to change the power supply mode of the power module 100;

[0080] An energy storage module 140, wherein a first end of the energy storage module 140 is connected to a first end of the power module 100, and a first end of the energy storage module 140 is connected to a first end of the first switch module 110;

[0081] A load module 150, connected to the second end of the power module 100, and configured to operate in different power supply modes of the power module 100;

[0082] The power supply mode of the power supply module 100 includes a first power supply mode T1, and the first power supply mode T1 includes a first power supply stage t1, a second power supply stage t2 and a third power supply stage t3; wherein,

[0083] In the first power supply stage t1, the first switch module 110 is turned off, and the second switch module 120 and the third switch module 130 are turned on;

[0084] In the second power supply stage t2, the first switch module 110 and the second switch module 120 are both turned on, and the third switch module 130 is turned off;

[0085] In the third power supply stage t3 , the first switch module 110 is turned on, and the second switch module 120 and the third switch module 130 are both turned off.

[0086] The embodiment of the present application uses the power supply circuit designed as above to enable the first switch module, the second switch module and the third switch module to operate in different power supply modes, thereby improving the arc starting and arc extinguishing performance of the coating power supply.

[0087] The following will Figure 1 Each component of the power supply circuit in the corresponding embodiment is introduced in detail.

[0088] The power module 100 can be used to input AC voltage from a power grid. Specifically, the power module 100 is connected to a Figure 2 The AC in the figure represents the AC voltage of the power grid, which works in a constant current or constant power state. In some embodiments, the first end of the power module 100 is the negative electrode of the power module 100 , and the second end of the power module 100 is the positive electrode of the power module 100 .

[0089] In some embodiments, the power module 100 can use an isolated switching power supply, combined with the following first switch module 110, second switch module 120 and third switch module 130 to realize power control, which can reduce energy loss and thus improve the conversion efficiency of the isolated switching power supply.

[0090] The first switch module 110, the second switch module 120 and the third switch module 130 can change the power supply mode of the power module 100 in different working states. In some embodiments, at least one of the first switch module 110, the second switch module 120 and the third switch module 130 includes a fully controlled switch tube.

[0091] The first power supply mode T1 is a pulse DC output working mode of the power supply circuit.

[0092] Among them, the fully controlled switch tube includes at least one of a bipolar transistor, a power field effect transistor, and an insulated gate bipolar transistor. In some embodiments, the first switch module 110, the second switch module 120, and the third switch module 130 are all fully controlled switch tubes of the same type, which not only ensures the consistency and reliability of the power supply circuit, but also does not need to consider the differences that may be caused by different types of switch tubes, and can simplify the process of circuit design and debugging. Moreover, when a switch module has a problem and needs to be replaced, the same type of switch tube can be directly used for replacement without redesigning the circuit, which can also improve the efficiency of maintenance and repair.

[0093] The energy storage module 140 stores energy when current passes through it, and releases energy when the current decreases or is interrupted. The energy storage module 140 plays a role in reducing or increasing the voltage in the power supply circuit by storing or releasing energy.

[0094] The load module 150 may be a part directly used for coating, and the load module 150 includes a vacuum chamber, and a cathode target is arranged in the vacuum chamber. Specifically, the first end of the power module 100 may be connected to the outer shell of the vacuum chamber through the first switch module 110, and the outer shell of the vacuum chamber may be regarded as a shielding cover, and may also be referred to as an anode shielding cover, and the second end of the power module 100 may be connected to the cathode target. Among them, the vacuum chamber included in the load module 150 and the cathode target arranged in the vacuum chamber are not shown in the drawings, and the details may refer to the introduction of related technologies such as magnetron sputtering.

[0095] In some embodiments, the shell of the vacuum chamber can be connected to the first end of the power module 100 through a transmission line, and the cathode target can also be connected to the second end of the power module 100 through the transmission line and the first switch module 110. The transmission line can be a cable of a certain length with a certain amount of parasitic inductance and distributed capacitance.

[0096] See also Figure 2 , Figure 2 A schematic diagram of a power supply circuit provided in an embodiment of the present application. In some embodiments, the power supply circuit further includes:

[0097] The second unidirectional conduction module 220 is connected between the first switch module 110 and the second switch module 120 , wherein the second unidirectional conduction module 220 includes a fourth diode D4 .

[0098] In some embodiments, the energy storage module 140 includes an inductor L.

[0099] The first power supply stage t1, the second power supply stage t2 and the third power supply stage t3 in the first power supply mode T1 are executed alternately, the second power supply stage t2 is between the first power supply stage t1 and the third power supply stage t3, and the first power supply stage t1, the second power supply stage t2 and the third power supply stage t3 can be regarded as a switching cycle.

[0100] The first switch module 110 may include a first switch S1 , the second switch module 120 may include a second switch S2 , and the third switch module 130 may include a third switch S3 .

[0101] See also Figure 3 , Figure 3 A logic control timing diagram included in a power supply circuit provided in an embodiment of the present application, wherein the first power supply mode T1 includes a first power supply stage t1, a second power supply stage t2, and a third power supply stage t3. U0 represents the voltage across the load module, and I0 represents the current flowing through the load module. Taking the first switch module 110 as an example, on represents that the first switch module 110 is turned on at a high level, and off represents that the first switch module 110 is turned off at a low level.

[0102] In the first power supply stage t1, the first switch module 110 is turned off, and the second switch module 120 and the third switch module 130 are turned on. Current flows through the second switch module 120 and the fourth diode D4 in the energy storage module 140 to form a closed loop, which can also be called inductive voltage clamping.

[0103] In the second power supply stage t2, the first switch module 110 and the second switch module 120 are both turned on, and the third switch module 130 is turned off. The current output by the power module 100 reaches the load module 150 through the transmission line. The inductor L in the energy storage module 140 has two parts of current, namely, self-inductance current and mutual inductance current. The power module 100 works in a constant current state, and the current passing through the inductor L in the energy storage module 140 has a weakening process. It can be understood that the inductor L in the energy storage module 140 will generate a self-inductance voltage and superimpose it on the output voltage of the power module 100, which is beneficial to improve the arc starting performance of the plasma.

[0104] In the third power supply stage t3, the first switch module 110 is turned on, and the second switch module 120 and the third switch module 130 are both turned off. The load module 150 works normally for an on time in the third power supply mode T3.

[0105] At the first power supply stage t1 of the next switching cycle, the first switch module 110 is turned off, and the second switch module 120 and the third switch module 130 are turned on. The current in the transmission line passes through the third switch module 130 and the load module 150 to form a closed loop. There is a current increase process in a short time, and a small negative voltage is formed at both ends of the load module 150, which is conducive to improving the arc extinguishing performance inside the load module 150.

[0106] See also Figure 4 , Figure 4 Another logic control timing diagram included in a power supply circuit provided in an embodiment of the present application. In a possible implementation, the power supply module 100 includes a pre-stage filter submodule, and the power supply circuit further includes:

[0107] An energy feedback module 200, one end of the energy feedback module 200 is connected to the pre-stage filter submodule, and the other end of the energy feedback module 200 is connected to the second end of the power module 100 and the second end of the first switch module 110. The energy feedback module 200 is used to feed back the energy generated at both ends of the load module 150 to the pre-stage filter submodule;

[0108] The power supply mode of the power supply module 100 further includes a second power supply mode T2, and the second power supply mode T2 includes a fourth power supply stage t4, a fifth power supply stage t5, a sixth power supply stage t6 and a seventh power supply stage t7; wherein,

[0109] In the fourth power supply stage t4, the first switch module 110 is turned on, and the second switch module 120 and the third switch module 130 are both turned off;

[0110] In the fifth power supply stage t5, the first switch module 110 and the third switch module 130 are both turned off, and the second switch module 120 is turned on;

[0111] In the sixth power supply stage t6, the first switch module 110 is turned off, and the second switch module 120 and the third switch module 130 are both turned on;

[0112] In the seventh power supply stage t7 , the first switch module 110 and the second switch module 120 are both turned on, and the third switch module 130 is turned off.

[0113] In this embodiment, by controlling the first switch module 110, the second switch module 120 and the third switch module 130 to operate in the second power supply mode T2, the energy on the transmission line can be fed back to the pre-stage filter sub-module of the power module 100 through the energy feedback module 200, thereby avoiding the energy on the transmission line being left on the surface of the coating material and affecting the coating quality.

[0114] The second power supply mode T2 can be understood as a protection and energy feedback control working mode under an arcing state.

[0115] The fourth power supply stage t4, the fifth power supply stage t5, the sixth power supply stage t6 and the seventh power supply stage t7 are executed alternately in sequence, and the fourth power supply stage t4, the fifth power supply stage t5, the sixth power supply stage t6 and the seventh power supply stage t7 form a switching cycle.

[0116] The pre-stage filter submodule may include a pre-stage filter capacitor C, which is inside the power module 100 and is not shown in the drawings. The pre-stage filter submodule is combined with the energy feedback module 200 to realize the feedback of energy on the transmission line and improve the coating quality.

[0117] In a possible implementation, the energy feedback module 200 includes:

[0118] The transformer T includes a primary winding, wherein one end of the primary winding is connected to the second end of the power module 100, and the other end of the primary winding is connected to the second end of the first switch module 110; wherein,

[0119] In the fifth power supply stage t5 , the transformer T is used to feed back the energy generated at both ends of the load module 150 to the pre-stage filter submodule.

[0120] In this embodiment, the energy feedback module 200 is formed through the transformer T, which can quickly feed back the energy on the transmission line to the front-stage filter submodule of the power module 100, avoiding the energy on the transmission line to remain on the surface of the coating material and affect the coating quality.

[0121] The transformer T includes a high-frequency transformer.

[0122] On the one hand, the use of a high-frequency transformer can respond more quickly to changes in the input end and quickly feed back the energy on the transmission line to the front-stage filter submodule of the power module 100, thereby avoiding leaving the energy on the transmission line on the surface of the coating material and affecting the coating quality.

[0123] On the other hand, a high frequency transformer is used, where high frequency means that the magnetic core of the transformer T changes faster in the direction of the magnetic flux, thereby reducing the hysteresis loss of the magnetic flux. In addition, high frequency can also reduce the resistance loss of the coil. Therefore, high frequency transformers usually have higher energy conversion efficiency than low frequency transformers.

[0124] In a possible implementation, the transformer T further includes a secondary winding, and the energy feedback module 200 further includes:

[0125] a first diode D1, wherein an anode of the first diode D1 is connected to the second end of the first switch module 110, and a cathode of the first diode D1 is connected to the other end of the primary winding;

[0126] A second diode D2, wherein the anode of the second diode D2 is connected to one end of the secondary winding, and the cathode of the second diode D2 is connected to the pre-stage filter submodule;

[0127] A filter capacitor C, one end of the filter capacitor C is connected to the cathode of the second diode D2, and the other end of the filter capacitor is connected to the other end of the secondary winding of the transformer T.

[0128] In a possible implementation manner, the power supply circuit further includes:

[0129] The first unidirectional conduction module 210 is connected between the second end of the power module 100 and the third switch module 130 , wherein the first unidirectional conduction module 210 includes a third diode D3 .

[0130] In the above embodiment, the first diode D1 , the second diode D2 and the third diode D3 are all diodes of the same type.

[0131] The following will be combined Figure 4 The working process of each switch module when arcing occurs inside the load module 150 is described in detail.

[0132] Specifically, when the coating power supply including the power supply circuit is not working, the first switch module 110, the second switch module 120 and the third switch module 130 are all turned off. Under normal working conditions, the first switch module 110, the second switch module 120 and the third switch module 130 enter the fourth power supply stage t4.

[0133] When arcing occurs inside the load module 150, the current output by the power module 100 will suddenly increase, and each switch module will enter the fifth power supply stage t5 from the fourth power supply stage t4: the first switch module 110 and the third switch module 130 are both turned off, and the second switch module 120 is turned on. The inductor L can realize clamping energy storage, thereby reducing the current output by the power module 100.

[0134] The power module 100 no longer outputs current, and the current of the transmission line will continue to excite the transformer T through the loop formed by the primary winding of the transformer T and the first diode D1. The secondary winding of the transformer T induces a voltage, which is rectified by the second diode D2 and filtered by the filter capacitor C before being fed back to the pre-stage filter submodule.

[0135] Subsequently, each switch module enters the sixth power supply stage t6 from the fifth power supply stage t5: the first switch module 110 is turned off, and the second switch module 120 and the third switch module 130 are turned on. A negative voltage is generated in the loop formed by the third switch module 130 and the load module 150 to achieve rapid arc extinguishing.

[0136] In the seventh power supply stage t7: the first switch module 110 and the second switch module 120 are both turned on, and the third switch module 130 is turned off. The current output by the power module 100 returns to normal.

[0137] In some embodiments, when arcing occurs inside the load module 150 , the current output by the power module 100 will suddenly increase, and when it exceeds a preset threshold, each switch module will enter the fifth power supply stage t5 from the fourth power supply stage t4 .

[0138] See also Figure 5 , Figure 5 Another logic control timing diagram included in a power supply circuit provided in an embodiment of the present application. In a possible implementation, the power supply mode also includes:

[0139] The third power supply mode T3: In the third power supply mode T3, the first switch module 110 is turned on, and the second switch module 120 and the third switch module 130 are both turned off.

[0140] Specifically, the third power supply mode T3 is a DC output working mode of the power supply circuit. The third power supply mode T3 can also be regarded as the fourth power supply stage t4 in the second power supply mode T2, which will not be described in detail here.

[0141] In some embodiments, some capacitors and / or inductors may be connected in parallel to the transmission line. Figure 6 , Figure 6 A schematic diagram of another power supply circuit provided in an embodiment of the present application. In the transmission line at both ends of the load module 150, an inductor L may be connected in series or a capacitor may be connected in parallel. Figure 6 In the figure, an inductor L is connected in series on the transmission line at both ends of the load module 150, which may be the same type of inductor as the inductor L included in the energy storage module 140 in the above embodiment, and thus may be represented by the same symbol “L”.

[0142] In some embodiments, a grounding process may be performed at a point where the load module 150 is connected to the second end of the power module 100 to eliminate the adverse effects of static electricity on the power supply circuit.

[0143] See also Figure 7 , Figure 7 A schematic diagram of the structure of another power supply circuit provided in an embodiment of the present application. Figure 7 The power supply circuit in Figure 2 A variation of the power supply circuit. Figure 7 and Figure 2 The difference lies in the different connection modes of the transformer T. It should be understood that circuit structures based on similar deformations are all within the protection scope of the present application.

[0144] The present application also provides a method for controlling a power supply circuit. Figure 8 , Figure 8 A schematic flow chart of a control method for a power supply circuit provided in an embodiment of the present application. The control method for a power supply circuit includes steps 810 to 830.

[0145] Step 810, when it is detected that the power supply mode is in the first power supply stage, control the first switch module to be turned off, and the second switch module and the third switch module to be turned on;

[0146] Step 820, when it is detected that the power supply mode is in the second power supply stage, control the first switch module and the second switch module to be turned on and the third switch module to be turned off;

[0147] Step 830: When it is detected that the power supply mode is in the third power supply stage, the first switch module is controlled to be turned on, and the second switch module and the third switch module are controlled to be turned off.

[0148] The control method of the power supply circuit provided in the embodiment of the present application can improve the arc starting and arc extinguishing performance of the coating power supply by controlling the first switch module, the second switch module and the third switch module in the power supply circuit to operate in different power supply modes.

[0149] The embodiment of the present application also provides a coating power supply, including the power supply circuit in the above embodiment. The coating power supply provided by the embodiment of the present application can also improve arc starting and arc extinguishing performance.

[0150] The coating power supply provided in the embodiment of the present application has the beneficial effects and implementation methods of the control method of the power supply circuit provided in the embodiment of the present application. For details, please refer to the specific description of the control method of the power supply circuit in the above embodiment, and this embodiment will not be repeated here.

[0151] Those of ordinary skill in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be implemented by instructing related hardware through a computer program, and the program can be stored in a non-volatile computer-readable storage medium. When the program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, storage, database or other media used in the embodiments provided in this application may include non-volatile and / or volatile memory. Non-volatile memory may include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM) or flash memory. Volatile memory may include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in many forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link (Synchlink) DRAM (SLDRA M), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRD RAM), and memory bus dynamic RAM (RDRAM), etc.

[0152] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

Claims

1. A power supply circuit, characterized in that: The power supply circuit comprises: Power module; A first switch module; A second switch module, connected to the first end of the power module and the first end of the first switch module; a third switch module, connected to the second end of the power module and the first end of the first switch module, wherein the first switch module, the second switch module and the third switch module are all used to change a power supply mode of the power module; An energy storage module, wherein a first end of the energy storage module is connected to a first end of the power module, and a second end of the energy storage module is connected to a first end of the first switch module; A load module, connected to the second end of the power module, and configured to operate under different power supply modes of the power module; A first unidirectional conduction module, wherein the first unidirectional conduction module is connected between the second end of the power module and the third switch module, wherein the first unidirectional conduction module comprises a third diode, an anode of the third diode is connected to the third switch module, and a cathode of the third diode is connected to the second end of the power module; A second unidirectional conduction module, wherein the second unidirectional conduction module is connected between the first switch module and the second switch module, wherein the second unidirectional conduction module comprises a fourth diode, an anode of the fourth diode is connected to the second switch module, and a cathode of the fourth diode is connected to a first end of the first switch module; The power supply mode of the power supply module includes a first power supply mode, and the first power supply mode includes a first power supply stage, a second power supply stage and a third power supply stage; wherein, In the first power supply stage, the first switch module is turned off, and the second switch module and the third switch module are turned on; In the second power supply stage, the first switch module and the second switch module are both turned on, and the third switch module is turned off; In the third power supply stage, the first switch module is turned on, and the second switch module and the third switch module are both turned off.

2. The power supply circuit according to claim 1, characterized in that: The power supply module includes a pre-stage filter submodule, and the power supply circuit also includes: An energy feedback module, one end of which is connected to the pre-stage filter submodule, and the other end of which is connected to the second end of the power module and the second end of the first switch module, and the energy feedback module is used to feed back the energy generated at both ends of the load module to the pre-stage filter submodule; The power supply mode of the power supply module also includes a second power supply mode, and the second power supply mode includes a fourth power supply stage, a fifth power supply stage, a sixth power supply stage and a seventh power supply stage; wherein, In the fourth power supply stage, the first switch module is turned on, and the second switch module and the third switch module are both turned off; In the fifth power supply stage, the first switch module and the third switch module are both turned off, and the second switch module is turned on; In the sixth power supply stage, the first switch module is turned off, and the second switch module and the third switch module are both turned on; In the seventh power supply stage, the first switch module and the second switch module are both turned on, and the third switch module is turned off.

3. The power supply circuit according to claim 2, characterized in that: The energy feedback module comprises: A transformer, the transformer comprising a primary winding, wherein one end of the primary winding is connected to the second end of the power module, and the other end of the primary winding is connected to the second end of the first switch module; wherein, In the fifth power supply stage, the transformer is used to feed back the energy generated at both ends of the load module to the pre-stage filter submodule.

4. The power supply circuit according to claim 3, characterized in that: The transformer further includes a secondary winding, and the energy feedback module further includes: a first diode, wherein an anode of the first diode is connected to the second end of the first switch module, and a cathode of the first diode is connected to the other end of the primary winding; a second diode, wherein an anode of the second diode is connected to one end of the secondary winding, and a cathode of the second diode is connected to the pre-stage filter submodule; A filter capacitor, one end of which is connected to the cathode of the second diode, and the other end of which is connected to the other end of the secondary winding of the transformer.

5. The power supply circuit according to claim 1, characterized in that: The power supply mode also includes: A third power supply mode, in which the first switch module is turned on, and the second switch module and the third switch module are both turned off.

6. The power supply circuit according to claim 1, characterized in that: At least one of the first switch module, the second switch module and the third switch module includes a fully-controlled switch tube.

7. A method for controlling a power supply circuit, characterized in that: Applied to the power supply circuit according to any one of claims 1 to 6, the method comprises: When it is detected that the power supply mode is in the first power supply stage, controlling the first switch module to be turned off and the second switch module and the third switch module to be turned on; When it is detected that the power supply mode is in the second power supply stage, controlling the first switch module and the second switch module to be turned on and the third switch module to be turned off; When it is detected that the power supply mode is in the third power supply stage, the first switch module is controlled to be turned on, and the second switch module and the third switch module are controlled to be turned off.

8. A coating power supply, characterized in that: A power supply circuit comprising the power supply circuit according to any one of claims 1 to 6.

Images