A three-degree-of-freedom vibration isolator based on magnetic-gas variable stiffness

Abstract

The present invention provides a three-degree-of-freedom vibration isolator based on magnetic-gas variable stiffness, comprising a top plate, a first air spring, a vertical piston and a vertical rocker arm, a vertical rocker arm being installed inside the vertical piston, a second air spring being installed outside the vertical piston, and transverse air springs being installed outside the second air spring in front, back, left and right, respectively. The vibration isolator of the present invention can achieve vibration isolation of three degrees of freedom, up and down, left and right, and front and back, and the vibration isolation bandwidth is wide, and vibration control of 0.1Hz~300Hz can be achieved, positioning is accurate, and it can be adapted to different types of precision instruments, and the maximum load-bearing capacity can reach 5000kg, with a wide range of applications and strong versatility.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor special devices, in particular to a three-degree-of-freedom vibration isolator based on magnetic-gas variable stiffness. Background Art

[0002] At present, the semiconductor industry is developing rapidly. The precision requirements of semiconductor production equipment are getting higher and higher, and the equipment is becoming more and more sensitive to environmental requirements such as micro-vibration. A small amount of micro-vibration will reduce the output yield of the equipment or even make the equipment unable to work normally. Therefore, the isolation of micro-vibration is becoming more and more important.

[0003] In order to solve the above problems, researchers have developed a series of active control vibration isolation systems in recent years. This type of vibration isolator is very effective in solving ultra-low frequency micro-vibration isolation. At the same time, choosing the right structure and control strategy can suppress the disturbance caused by the load. However, infinitely reducing the natural frequency of the system will also reduce the bearing capacity of the system, and cannot meet the vibration isolation requirements of large-load equipment. In addition, the stiffness of the current vibration isolator is generally immutable, and its initial stiffness cannot be adjusted according to the vibration isolation requirements or bearing capacity requirements of different types of precision instruments. It can only achieve vibration reduction of specific controlled objects and cannot meet the vibration isolation requirements of different objects. In addition, the low-stiffness displacement range of the existing vibration isolator is narrow, and the stiffness increases significantly with the increase of displacement, the nonlinearity is significantly enhanced, the initial vibration isolation frequency of the vibration isolator increases, the vibration isolation frequency band becomes narrower, and the low-frequency vibration isolation performance decreases. Summary of the invention

[0004] The purpose of the present invention is to provide a three-degree-of-freedom vibration isolator based on magnetic-pneumatic variable stiffness to solve the problems existing in the above-mentioned background technology.

[0005] The technical solution of the present invention is implemented as follows: a three-degree-of-freedom vibration isolator based on magnetic-gas variable stiffness, comprising a top plate, a first air spring, a vertical piston and a vertical rocker arm, wherein the first air spring comprises a bottom plate, vertical plates A are vertically welded around the top of the bottom plate, a support plate is connected to the inner side of the top of the vertical plate A, the support plate and the vertical plate A are connected by an air film A, a cushion block is installed in the middle of the top of the support plate, a square ring-shaped support plate A is welded to the top of the vertical plate A, the top of the cushion block is connected to the bottom of the vertical piston, a vertical rocker arm is installed inside the vertical piston, and the vertical plate A is provided with a vertical rocker arm. The top of the vertical swing arm is connected to the middle of the bottom of the top plate, a second air spring is installed on the outside of the vertical piston, the second air spring is connected to the first air spring through an air hole, and transverse air springs are installed on the front, rear, left and right sides of the second air spring respectively. A square tube is vertically welded on the top of the square ring support plate A near the inner ring, a stopper is installed on the inside of the square tube near the bottom, a lower air film is installed between the stopper and the cushion block, a square ring support plate B is vertically welded on the top of the square tube, and a support block is installed on the top of the square ring support plate B near the outside. A square ring-shaped support plate C is connected to the upper part of the vertical piston, an upper air film is connected between the square ring-shaped support plate C and the support block, a transverse piston is installed between the square ring-shaped support plate A and the square ring-shaped support plate B, a transverse air film is connected between the transverse piston and the square ring-shaped support plate A and the square ring-shaped support plate B, a transverse swing rod is vertically installed inside the transverse piston, a vertical plate B is vertically welded to the other end of the transverse swing rod, the top of the vertical plate B is vertically welded to the bottom of the top plate, permanent magnets A are respectively installed on the left and right sides of the bottom of the square ring-shaped support plate C, and the square ring-shaped support plate B Electromagnets A are installed on the left and right sides of the top at positions corresponding vertically to the permanent magnet A, permanent magnets B are installed at the upper and lower positions inside the transverse piston respectively, and electromagnets B are installed on the upper and lower sides of the outer side of the square cylinder in the same horizontal direction as the permanent magnet B. A vertical voice coil motor is installed on the top of the support block, and the top of the vertical voice coil motor is connected to the bottom of the top plate. A transverse voice coil motor is installed on the outside of the support block, and the top of the transverse voice coil motor is vertically connected to the vertical plate B. A controller is also installed on the square ring support plate A, and an acceleration sensor and a position sensor are also installed at the bottom of the top plate.

[0006] Furthermore, the second air spring is composed of a square tube, a stopper, a lower air membrane, an upper air membrane, a vertical piston, a square ring-shaped support plate B, a support block and a square ring-shaped support plate C.

[0007] Furthermore, the transverse air spring is composed of a square ring-shaped support plate A, a square tube, a square ring-shaped support plate B, a transverse air film and a transverse piston.

[0008] Furthermore, the air holes are opened inside the support plate, the cushion block and the vertical piston.

[0009] Furthermore, an air intake pipe A is installed on one side of the vertical plate A of the first air spring, and a servo valve A is installed on the air intake pipe A.

[0010] Furthermore, a gap is left between the support plate and the square ring-shaped support plate A.

[0011] Furthermore, a gap is left between the vertical plate B and the square ring-shaped supporting plate A.

[0012] Furthermore, an air intake pipe B is provided inside the square ring-shaped support plate A and is connected to the transverse air spring, and a servo valve B is installed on the air intake pipe B.

[0013] Furthermore, the controller is connected to the electromagnet A, the electromagnet B, the vertical voice coil motor, the lateral voice coil motor, the acceleration sensor and the position sensor through cables.

[0014] The beneficial effects of the present invention are:

[0015] The present invention realizes load bearing through two air springs connected in parallel, has a greater load bearing capacity, can meet the load bearing requirements of large precision instruments, and has a maximum load bearing capacity of up to 5000kg. At the same time, the vertical and lateral stiffness can be adjusted through a magnetic drive device composed of a permanent magnet and an electromagnet.

[0016] When the present invention is directed to a vertical high-frequency vibration source, firstly, the first vibration reduction is performed by two parallel air springs, and at the same time, the parallel horizontal rocker arm realizes the secondary vibration reduction, and furthermore, the magnetic drive device performs the tertiary supplementary vibration reduction; when the present invention is directed to a vertical low-frequency vibration source, vertical low-frequency vibration reduction is realized by parallel vertical voice coil motors, the vertical vibration reduction effect is better, and the vibration reduction band is wider; when the present invention is directed to a horizontal high-frequency vibration source, firstly, high-frequency vibration reduction is realized by transverse air springs, and at the same time, the parallel vertical rocker arm plays the secondary vibration reduction role on the horizontal high-frequency vibration, and furthermore, the magnetic drive device performs the tertiary supplementary vibration reduction; when the present invention is directed to a horizontal low-frequency vibration source, low-frequency vibration reduction is realized by parallel voice coil motors, the horizontal vibration reduction effect is better, and the vibration reduction band is wider.

[0017] The vibration isolator of the present invention can realize vibration isolation in three degrees of freedom: up and down, left and right, and front and back, and the vibration isolation bandwidth is wide, and vibration control of 0.1Hz~300Hz can be achieved. It has accurate positioning and can be adapted to precision instruments of different models. The maximum load-bearing capacity can reach 5000kg, and it has a wide range of applications and strong versatility. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the present invention.

[0019] In the figure, 1-top plate, 2-first air spring, 201-bottom plate, 202-vertical plate A, 203-support plate, 204-air film A, 205-cushion, 206-square ring support plate A, 207-intake pipe A, 208-servo valve A, 3-vertical piston, 4-vertical rocker, 5-second air spring, 501-stopper, 502-lower air film, 503-upper air film, 6-air hole, 7-square cylinder, 8-lateral air spring, 801- Transverse piston, 802-transverse air film, 803-transverse rocker arm, 804-intake pipe B, 805-servo valve B, 9-square ring support plate B, 10-support block, 11-square ring support plate C, 12-vertical plate B, 13-permanent magnet A, 14-electromagnet A, 15-permanent magnet B, 16-electromagnet B, 17-vertical voice coil motor, 18-transverse voice coil motor, 19-acceleration sensor, 20-position sensor, 21-controller. DETAILED DESCRIPTION

[0020] The technical solution of the present invention will be described clearly and completely in conjunction with the embodiments below. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] like Figure 1As shown, a magnetic-pneumatic variable stiffness three-degree-of-freedom vibration isolator comprises a top plate 1, a first air spring 2, a vertical piston 3 and a vertical swing rod 4, wherein the first air spring 2 comprises a bottom plate 201, vertical plates A202 are vertically welded around the top of the bottom plate 201, a support plate 203 is connected to the inner side of the top of the vertical plate A202, the support plate 203 and the vertical plate A202 are connected through an air film A204, a cushion block 205 is installed in the middle of the top of the support plate 203, a square ring-shaped support plate A206 is welded on the top of the vertical plate A202, the top of the cushion block 205 is connected to the bottom of the vertical piston 3, a vertical swing rod 4 is installed inside the vertical piston 3, and the vertical The top of the rocker arm 4 is connected to the middle of the bottom of the top plate 1, a second air spring 5 is installed on the outside of the vertical piston 3, the second air spring 5 is connected to the first air spring 2 through the air hole 6, and transverse air springs 8 are installed on the front, rear, left and right sides of the second air spring 5 respectively. A square tube 7 is vertically welded to the top of the square ring support plate A206 near the inner ring position, a stopper 501 is installed on the inside of the square tube 7 near the bottom, and a lower air film 502 is installed between the stopper 501 and the cushion block 205. A square ring support plate B9 is vertically welded to the top of the square tube 7, and a support block 10 is installed on the top of the square ring support plate B9 near the outside. The upper part of the vertical piston 3 is connected A square ring-shaped support plate C11 is connected, an upper air film 503 is connected between the square ring-shaped support plate C11 and the support block 10, a transverse piston 801 is installed between the square ring-shaped support plate A206 and the square ring-shaped support plate B9, a transverse air film 802 is connected between the transverse piston 801 and the square ring-shaped support plate A206 and the square ring-shaped support plate B9, a transverse swing rod 803 is vertically installed inside the transverse piston 801, a vertical plate B12 is vertically welded to the other end of the transverse swing rod 803, the top of the vertical plate B12 is vertically welded to the bottom of the top plate 1, permanent magnets A13 are respectively installed on the left and right sides of the bottom of the square ring-shaped support plate C11, and the top of the square ring-shaped support plate B9 is vertically welded to the bottom of the top plate 1. Electromagnets A14 are installed on the left and right sides at positions corresponding vertically to the permanent magnet A13, permanent magnets B15 are installed at upper and lower positions inside the transverse piston 801 respectively, and electromagnets B16 are installed on the upper and lower outer sides of the square cylinder 7 in the same horizontal direction as the permanent magnet B15, a vertical voice coil motor 17 is installed on the top of the support block 10, and the top of the vertical voice coil motor 17 is connected to the bottom of the top plate 1, a transverse voice coil motor 18 is installed on the outside of the support block 10, and the top of the transverse voice coil motor 18 is vertically connected to the vertical plate B12, a controller 21 is also installed on the square ring support plate A206, and an acceleration sensor 19 and a position sensor 20 are also installed at the bottom of the top plate 1.

[0022] The second air spring 5 is composed of a square tube 7, a stopper 501, a lower air membrane 502, an upper air membrane 503, a vertical piston 3, a square ring-shaped support plate B9, a support block 10 and a square ring-shaped support plate C11.

[0023] The transverse air spring 8 is composed of a square ring-shaped support plate A206 , a square tube 7 , a square ring-shaped support plate B9 , a transverse air film 802 and a transverse piston 801 .

[0024] The air hole 6 is opened inside the support plate 203 , the cushion block 205 and the vertical piston 3 .

[0025] An air intake pipe A207 is installed on one side of the vertical plate A202 of the first air spring 2, and a servo valve A208 is installed on the air intake pipe A207.

[0026] A gap is left between the support plate 203 and the square ring support plate A206.

[0027] A gap is left between the vertical plate B12 and the square ring-shaped supporting plate A206.

[0028] An air intake pipe B804 is provided inside the square ring-shaped support plate A206 and is connected to the transverse air spring 8, and a servo valve B805 is installed on the air intake pipe B804.

[0029] The controller 21 is connected to the electromagnet A 14 , the electromagnet B 16 , the vertical voice coil motor 17 , the horizontal voice coil motor 18 , the acceleration sensor 19 and the position sensor 20 through cables.

[0030] During installation, the precision instrument is installed on the top plate 1, and the weight of the precision instrument is borne in parallel by the first air spring 2 and the second air spring 5. According to the weight requirements of different types of precision instruments, the air intake of the intake pipe A207 can be controlled by the servo valve A208 to adjust the internal air pressure of the first air spring 2 and the second air spring 5 to meet the load-bearing requirements of different types of precision instruments; at the same time, the current size and direction of the electromagnet A14 are adjusted by the controller 21 to control the size and direction of the magnetic field between it and the permanent magnet A13, so as to adjust the vertical stiffness of the system; in addition, the air intake of the intake pipe B804 is controlled by the servo valve B805 to adjust the internal air pressure of the transverse air spring 8, and the current size and direction of the electromagnet B16 are adjusted by the controller 21 to control the size and direction of the magnetic field between it and the permanent magnet B15. The transverse air spring 8 and the transverse magnetic drive device composed of the permanent magnet B15 and the electromagnet B16 constitute a parallel system to adjust the transverse stiffness of the system.

[0031] When working, the precision instrument generates vibration, and the vertical and horizontal vibration signals are collected by the acceleration sensor 19 and the position sensor 20, and then the vibration signals are transmitted to the controller 21. When the vertical high-frequency vibration source is used, high-frequency vibration reduction is achieved by the first air spring 2 and the second air spring 5 connected in parallel, and the vertical secondary vibration reduction is achieved by the parallel lateral swing rod 803, and the magnetic field force formed between the permanent magnet A13 and the electromagnet A14 is used to perform three-times supplementary vibration reduction; when the vertical low-frequency vibration source is used, the controller 21 controls the parallel vertical voice coil motor 17 to achieve low-frequency vibration reduction, and the vertical vibration reduction effect is better and the vibration reduction band is wider; when the horizontal high-frequency vibration source is used, the high-frequency vibration reduction is first achieved by the lateral air spring 8, and the parallel vertical swing rod 4 plays a secondary vibration reduction role on the horizontal high-frequency vibration, and the magnetic field force formed between the permanent magnet B15 and the electromagnet B16 is used to perform three-times supplementary vibration reduction; when the horizontal low-frequency vibration source is used, the controller 21 controls the lateral voice coil motor 18 to achieve low-frequency vibration reduction, and the lateral vibration reduction effect is better and the vibration reduction band is wider. The vibration isolator of the present invention can realize vibration isolation in three degrees of freedom: up and down, front and back, and left and right.

[0032] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A three-degree-of-freedom vibration isolator based on magnetic-pneumatic variable stiffness, comprising a top plate, a first air spring, a vertical piston and a vertical rocker, characterized in that: The first air spring comprises a bottom plate, a vertical plate A is vertically welded around the top of the bottom plate, a support plate is connected to the inner side of the top of the vertical plate A, the support plate and the vertical plate A are connected by an air film A, a cushion block is installed in the middle of the top of the support plate, a square ring-shaped support plate A is welded on the top of the vertical plate A, the top of the cushion block is connected to the bottom of the vertical piston, a vertical swing arm is installed inside the vertical piston, the top of the vertical swing arm is connected to the middle of the bottom of the top plate, a second air spring is installed on the outside of the vertical piston, the second air spring is connected to the first air spring through an air hole, and transverse air springs are respectively installed on the front, rear, left and right sides of the outside of the second air spring, a square tube is vertically welded on the top of the square ring-shaped support plate A near the inner ring position, a block is installed on the inner side of the square tube near the bottom, a lower air film is installed between the block and the cushion block, a square ring-shaped support plate B is vertically welded on the top of the square tube, a support block is installed on the top of the square ring-shaped support plate B near the outside, a square ring-shaped support plate C is connected to the upper part of the vertical piston, and the square ring-shaped support plate C An upper air film is connected to the support block, a transverse piston is installed between the square ring support plate A and the square ring support plate B, a transverse air film is connected between the transverse piston and the square ring support plate A and the square ring support plate B, a transverse swing arm is vertically installed inside the transverse piston, a vertical plate B is vertically welded to the other end of the transverse swing arm, the top of the vertical plate B is vertically welded to the bottom of the top plate, permanent magnets A are installed on the left and right sides of the bottom of the square ring support plate C respectively, electromagnets A are installed on the left and right sides of the top of the square ring support plate B at positions vertically corresponding to the permanent magnet A, permanent magnets B are installed in the upper and lower positions inside the transverse piston respectively, electromagnets B are installed on the upper and lower sides of the outer side of the square cylinder in the same horizontal direction as the permanent magnet B, a vertical voice coil motor is installed on the top of the support block, the top of the vertical voice coil motor is connected to the bottom of the top plate, a transverse voice coil motor is installed on the outside of the support block, the top of the transverse voice coil motor is vertically connected to the vertical plate B, a controller is also installed on the square ring support plate A, and an acceleration sensor and a position sensor are also installed at the bottom of the top plate.

2. The three-degree-of-freedom vibration isolator based on magnetic-gas variable stiffness according to claim 1 is characterized in that: The second air spring is composed of a square tube, a stopper, a lower air membrane, an upper air membrane, a vertical piston, a square ring-shaped support plate B, a support block and a square ring-shaped support plate C.

3. The three-degree-of-freedom vibration isolator based on magnetic-gas variable stiffness according to claim 1 is characterized in that: The transverse air spring is composed of a square ring-shaped support plate A, a square tube, a square ring-shaped support plate B, a transverse air film and a transverse piston.

4. The three-degree-of-freedom vibration isolator based on magnetic-gas variable stiffness according to claim 1 is characterized in that: The air holes are arranged inside the support plate, the cushion block and the vertical piston.

5. The three-degree-of-freedom vibration isolator based on magnetic-gas variable stiffness according to claim 1 is characterized in that: An air intake pipe A is installed on one side of the vertical plate A of the first air spring, and a servo valve A is installed on the air intake pipe A.

6. The three-degree-of-freedom vibration isolator based on magnetic-gas variable stiffness according to claim 1, characterized in that: A gap is left between the support plate and the square ring support plate A.

7. The three-degree-of-freedom vibration isolator based on magnetic-gas variable stiffness according to claim 1, characterized in that: A gap is left between the vertical plate B and the square ring-shaped supporting plate A.

8. The three-degree-of-freedom vibration isolator based on magnetic-gas variable stiffness according to claim 1, characterized in that: An air intake pipe B is provided inside the square ring-shaped support plate A and is connected to the transverse air spring. A servo valve B is installed on the air intake pipe B.

9. The three-degree-of-freedom vibration isolator based on magnetic-gas variable stiffness according to claim 1, characterized in that: The controller is connected with the electromagnet A, the electromagnet B, the vertical voice coil motor, the horizontal voice coil motor, the acceleration sensor and the position sensor through cables.

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