A multiple reflection based optical pressure measurement device and method

By using a small-aperture optical pressure sensor reflector and a hollow bracket tray design in the optical pressure measurement device, combined with a heat insulation cover and an airflow shielding shell, the problems of the optical pressure sensor reflector's own weight and the transmitted light thermal effect are solved, and the stability and accuracy of high-precision optical pressure measurement are achieved.

CN118836975BActive Publication Date: 2025-10-14NORTHWEST INST OF NUCLEAR TECH
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Patent Information

Application Number
CN202410861110.0
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-06-28
Publication Date
2025-10-14
Estimated Expiration
2044-06-28

AI Technical Summary

Technical Problem

In existing optical pressure measurement devices based on multiple reflections, the weight of the optical pressure sensing mirror and the insulation material encroaches on the high-precision balance range. In addition, the increase in the total energy of the transmitted light caused by the multiple reflections of the laser to be measured leads to a temperature rise on the balance pan surface, affecting the stability and accuracy of the measurement results.

Method used

The system uses multiple small-aperture optical pressure sensor reflectors and a hollow bracket tray design, combined with a heat insulation cover to wrap the high-precision balance. The heat of the transmitted light is absorbed by the heat insulation cover, reducing the weight of the optical pressure sensor reflector and the heat insulation bracket. A turning reflector is set in the airflow shielding shell for multiple reflections to prevent the transmitted light from irradiating the high-precision balance.

Benefits of technology

It effectively reduces the deadweight of the optical pressure sensing reflector and the thermal insulation bracket, avoids the temperature rise of the balance caused by transmitted light, ensures the stability and accuracy of the measurement results of the high-precision balance, and improves the accuracy of the optical pressure measurement.

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Abstract

The present application relates to a laser parameter measuring device and method, and in particular to a light pressure measuring device and method based on multiple reflections, to solve the technical problems that the light pressure sensing mirror and the self-weight of the heat insulation material in the existing light pressure measuring device based on multiple reflections are too large to occupy the high-precision balance range, and the total energy of the transmitted light increases due to the multiple reflections of the measured laser, which causes the temperature rise on the surface of the balance tray, and further affects the stability and accuracy of the balance measurement results, the light pressure measuring device comprises a high-precision balance, a heat insulation support, a heat insulation cover, an N-level light pressure sensing mirror and an M-level turning mirror, wherein N is greater than or equal to 2, and M is equal to N plus 1; the M-level turning mirror is arranged above the N-level light pressure sensing mirror; the heat insulation cover is arranged outside the high-precision balance to isolate the high-precision balance from the external environment, and a spacing is provided between the heat insulation support and the heat insulation cover; and a method for measuring light pressure by using the above device is also provided.
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Description

Technical Field

[0001] The present invention relates to a laser parameter measuring device and method, and in particular to a light pressure measuring device and method based on multiple reflections. Background Art

[0002] With the rapid development of high-energy laser technology, the need for simple, easy-to-use, accurate, and stable laser power measurement equipment is becoming increasingly urgent. Compared to traditional photoelectric and photothermal laser power measurement methods, optical pressure laser power measurement offers irreplaceable advantages in device size, response time, and online monitoring, making it a significant advantage in practical applications such as high-power laser power measurement.

[0003] The core of the optical pressure-based laser power measurement method is to design a pressure / weight sensor capable of measuring minute pressures, allowing for optical pressure measurements of high-power lasers. Currently, high-precision balances are widely used in optical pressure measurements of high-power lasers because they can measure weights in the milligram or even microgram range and do not require additional precision mechanical structures or mechanical design. The sensitivity of optical pressure measurements is related to the accuracy of the balance. However, the higher the balance's accuracy, the more susceptible the stability of its measurement results is to environmental influences. To address this issue, researchers proposed an optical pressure measurement method based on multiple reflections, without sacrificing balance accuracy.

[0004] Chinese patent application number CN 114323273 A, "An Optical Pressure Measurement Device and Method Based on Multiple Reflections," discloses a method for improving the sensitivity of optical pressure measurements. This method involves installing a high-reflectivity mirror parallel to the optical pressure sensor reflector, enabling multiple reflections of the laser light to be measured between the two parallel reflectors. This achieves optical pressure signal gain, thereby increasing the sensitivity of optical pressure measurements without changing the accuracy of the balance. While this multiple-reflection optical pressure measurement method effectively improves the accuracy of the laser light to be measured, multiple reflections inevitably lead to a corresponding increase in the total energy of the transmitted light radiated from the optical pressure sensor reflector to the balance plate surface, which in turn causes a temperature rise on the balance plate surface. Balances, especially high-precision balances, have extremely high environmental requirements, and changes in ambient temperature can significantly affect the measurement results of high-precision balances. Therefore, in this multiple-reflection optical pressure measurement method, the temperature rise on the balance plate surface caused by the increased transmitted light energy can significantly affect the stability and accuracy of the measurement results. A common solution to this problem is to place thermal insulation material under the optical pressure sensor reflector. However, the higher the accuracy of the balance, the smaller its range, and the deadweight of the optical pressure sensor mirror and the thermal insulation material will inevitably encroach on the balance range; in addition, the more times the laser to be measured is reflected, the greater the total energy of the transmitted light, and the more difficult it is for the thermal insulation material to completely isolate the temperature rise caused by the transmitted light. Summary of the Invention

[0005] The purpose of the present invention is to solve the technical problems in the existing optical pressure measurement device based on multiple reflections, such as the excessive weight of the optical pressure sensor reflector and the thermal insulation material encroaching on the high-precision balance range, and the increase in the total energy of the transmitted light caused by the multiple reflections of the laser to be measured, which leads to a temperature rise on the surface of the balance tray, thereby affecting the stability and accuracy of the balance measurement results. The present invention provides an optical pressure measurement device and method based on multiple reflections.

[0006] To achieve the above objectives, the present invention provides the following technical solutions:

[0007] A light pressure measuring device based on multiple reflections is special in that it includes a light source assembly, a high-precision balance, a heat-insulating bracket, a heat-insulating cover, an N-level light pressure sensing reflector and an M-level turning reflector, wherein N≥2, M=N+1; the light source assembly is used to emit a laser to be measured; the M-level turning reflector is arranged above the N-level light pressure sensing reflector, and the first-level turning reflector is located on the outgoing light path of the laser to be measured, the first-level light pressure sensing reflector is located on the reflected light path of the first-level turning reflector, the second-level turning reflector is located on the reflected light path of the first-level light pressure sensing reflector, and so on, the N-level light pressure sensing reflector is located on the reflected light path of the M-1-level turning reflector, and the M-level turning reflector is located on the The N-level optical pressure sensor reflector is located on the reflection light path of the N-level optical pressure sensor reflector; the diameters of the turning reflector and the optical pressure sensor reflector are larger than the spot diameter of the laser to be measured on their surfaces; the thermal insulation bracket includes a connecting rod connected to the measuring surface of the high-precision balance at one end and a bracket tray arranged at the other end of the connecting rod, and the bracket tray is provided with N mounting holes corresponding to the positions of the N-level optical pressure sensor reflectors; the N-level optical pressure sensor reflectors are respectively installed in the N mounting holes; the thermal insulation cover is provided outside the high-precision balance to isolate the high-precision balance from the external environment, and a through hole is provided on the thermal insulation cover, and the connecting rod is provided through the through hole, and a gap is provided between the lower surface of the bracket tray and the upper surface of the thermal insulation cover; the measuring range of the high-precision balance satisfies the following relationship:

[0008]

[0009] Where m0 is the total weight of the N-level optical pressure sensor reflector and the thermal insulation bracket, g is the local gravity acceleration value; F max The pressure value generated by the light source component emitting laser at maximum power and reflected by the N-level optical pressure sensor reflector, m max It is the upper limit of measurement for high-precision balances.

[0010] Furthermore, it also includes an airflow shielding shell; the thermal insulation bracket, high-precision balance, thermal insulation cover, N-level optical pressure sensor reflector and M-level turning reflector are all arranged in the airflow shielding shell;

[0011] The airflow shielding shell is provided with an incident window at a position corresponding to the to-be-tested laser; the to-be-tested laser is incident to the first-stage turning mirror through the incident window.

[0012] Further, the N is an even number, and the N-stage light pressure sensing mirrors are symmetrically arranged about the center of the support tray two by two.

[0013] The incident angles of the to-be-tested laser on the N-stage light pressure sensing mirrors are the same.

[0014] Further, the light source assembly comprises a high-power laser, and a diaphragm and a beam shaping mirror group arranged in sequence on an outgoing light path of the high-power laser.

[0015] The high-power laser is configured to emit the to-be-tested laser.

[0016] The diaphragm is configured to allow the emitted to-be-tested laser to pass through.

[0017] The beam shaping mirror group is configured to shape the to-be-tested laser passing through the diaphragm.

[0018] Further, the mounting hole is a stepped hole, the large-diameter end of the stepped hole is located upward, and the large-diameter end is in interference fit with the light pressure sensing mirror.

[0019] Further, the heat insulation support further comprises a base, and one end of the connecting rod is connected to the high-precision balance measuring surface through the base.

[0020] A spacing is provided between the outer sidewall of the connecting rod and the sidewall of the heat shield through hole.

[0021] Further, the heat shield is made of copper or aluminum material.

[0022] The tray, the connecting rod and the base are all made of Teflon, glass steel, glass fiber or polyimide material.

[0023] The M-stage turning mirrors are all high-reflectivity mirrors with reflectivity ≥ 99.9%.

[0024] The N-stage light pressure sensing mirrors are all high-reflectivity mirrors with reflectivity ≥ 99.9%.

[0025] The incident window and the exit window are all high-transmittance lenses with transmittance ≥ 99.9%.

[0026] The high-precision balance is an ultramicro electronic balance, a microbalance or a semimicrobalance.

[0027] Further, the M-stage turning mirrors are fixed to the airflow shielding shell through a tooling.

[0028] The heat insulation cover is fixedly connected to the airflow shielding shell.

[0029] At the same time, the present invention also provides a method for measuring light pressure based on multiple reflections, which is special in that it includes the following steps:

[0030] Step 1: Build the above-mentioned optical pressure measurement device based on multiple reflections;

[0031] Step 2: Record the initial reading m0 of the high-precision balance. The initial reading m0 satisfies the following formula:

[0032]

[0033] Where m0 is the total weight of the N-level optical pressure sensor reflector and the thermal insulation bracket, g is the local gravity acceleration value; F max The pressure value generated by the light source component emitting laser at maximum power and reflected by the N-level optical pressure sensor reflector, m max It is the upper limit of measurement for high-precision balance;

[0034] Step 3: Control the light source assembly to emit the laser to be tested so that it is incident on the surface of the first-stage turning reflector;

[0035] Step 4: After the laser to be measured is running stably, record the balance reading m0'; calculate the optical pressure value F of the laser to be measured by the following formula 光压 :

[0036] F 光压 =(m0'-m0)·g.

[0037] Beneficial effects of the present invention:

[0038] 1. The present invention provides multiple optical pressure sensing mirrors larger than the spot diameter, replacing the large-size mirrors used in traditional optical pressure measurement devices with small-aperture optical pressure sensing mirrors equivalent to the spot diameter. The bracket tray is hollowed out and no additional thermal insulation material is required, effectively reducing the weight of the optical pressure sensing mirrors and the thermal insulation bracket, and fully utilizing the effective range of the high-precision balance.

[0039] 2. The present invention adopts a bracket tray with hollow openings to place the optical pressure sensor reflector, and cooperates with a heat insulation cover to wrap the high-precision balance, which can effectively prevent the transmitted light of the optical pressure sensor reflector from irradiating the high-precision balance surface during the measurement process, causing it to produce a significant temperature rise, thereby ensuring the stability and accuracy of the high-precision balance test results. While utilizing the multiple reflection method to improve the measurement accuracy of the laser power to be measured, the negative impact of the enhanced thermal effect of the transmitted light caused by multiple reflections on the reliability of the high-precision balance measurement results is eliminated.

[0040] 3. The heat shield is made of metal material, which is easy to conduct heat and has high reflectivity, so that the heat of the transmitted light is isolated outside the high-precision balance as much as possible, and the high-precision balance is prevented from being heated by the transmitted light.

[0041] 4. The light pressure measurement method based on multiple reflections obtains the difference of the readings of the high-precision balance before and after the incident of the to-be-measured laser, so as to calculate the corresponding light pressure value, and the measurement method is simple and convenient, and the measurement precision is high. BRIEF DESCRIPTION OF DRAWINGS

[0042] Figure 1 is a structural schematic diagram of an embodiment of the light pressure measurement device based on multiple reflections.

[0043] The reference signs are as follows:

[0044] 1-to-be-measured laser, 2-gas flow shielding shell, 3-incidence window, 4-first-order turning mirror, 5-second-order turning mirror, 6-third-order turning mirror, 7-emission window, 8-first-order light pressure sensing mirror, 9-second-order light pressure sensing mirror, 10-support tray, 11-connecting rod, 12-base, 13-first-order transmitted light, 14-second-order transmitted light, 15-heat shield, 16-high-precision balance. DETAILED DESCRIPTION

[0045] The light pressure measurement device based on multiple reflections comprises a light source assembly, a heat insulation support, a high-precision balance 16, a heat shield 15, N-order light pressure sensing mirrors, and M-order turning mirrors, as shown in the figure. Figure 1 N≥2, and M=N+1.

[0046] The light source assembly comprises a high-power laser, a diaphragm, and a beam shaping mirror group arranged in sequence on the emission light path of the high-power laser, wherein the high-power laser is used for emitting the to-be-measured laser 1; the diaphragm is used for making more than 90% of the to-be-measured laser 1 pass through the diaphragm hole thereof; and the beam shaping mirror group is used for shaping the to-be-measured laser 1.

[0047] The heat insulation support comprises a base 12 arranged on the measurement surface of the high-precision balance 16, a connecting rod 11 connected to one end of the base 12, and a support tray 10 arranged on the other end of the connecting rod 11. The support tray 10, the connecting rod 11, and the base 12 are all made of heat insulation materials such as Teflon, glass fiber reinforced plastic, glass fiber, and polyimide.

[0048] The high-precision balance 16 is an ultramicro electronic balance, a microbalance, a semimicrobalance, or other types of precision balances.

[0049] The heat insulation cover 15 is arranged outside the high-precision balance 16 to isolate the high-precision balance 16 from the external environment. The heat insulation cover 15 is made of high thermal conductivity materials such as copper or aluminum. A through hole is opened on the heat insulation cover 15, and the connecting rod 11 is set through the through hole, and there is a distance between the through hole side wall of the heat insulation cover 15. The diameter of the through hole should be slightly larger than the cross-sectional diameter of the connecting rod 11 to avoid interference between the connecting rod 11 and the heat insulation cover 15, resulting in increased heat transfer from the connecting rod 11 to the high-precision balance 16, and affecting the reading of the high-precision balance 16; there is a distance between the lower surface of the bracket tray 10 and the upper surface of the heat insulation cover 15.

[0050] N-level optical pressure sensor reflectors are arranged on the bracket tray 10, and the bracket tray 10 has N mounting holes corresponding to the positions of the N-level optical pressure sensor reflectors. The N-level optical pressure sensor reflectors are horizontally arranged in the N mounting holes respectively. The diameter of the mounting hole is slightly smaller than the diameter of the optical pressure sensor reflector to achieve an interference fit. The diameter of the optical pressure sensor reflector is larger than the spot diameter of the laser 1 to be measured on its surface.

[0051] In order to ensure that the transmitted light of the laser 1 to be measured through the N-level optical pressure sensor reflectors can be completely absorbed by the heat insulation cover 15, the value of N is preferably an even number. Furthermore, the N-level optical pressure sensor reflectors can be set symmetrically about the center of the bracket tray 10 in pairs, and avoid being set at the center position of the bracket tray 10, thereby preventing the laser 1 to be measured from being absorbed by the connecting rod 11 of the heat insulation bracket after transmission, and transferring heat to the high-precision balance 16 through the connecting rod 11.

[0052] In order to improve the installation stability of the optical pressure sensor reflector, the installation hole is a stepped hole, the large diameter end of the stepped hole is located at the top, and the large diameter end is interference fit with the optical pressure sensor reflector.

[0053] The M-level turning reflector is arranged above the N-level optical pressure sensing reflector, and the laser 1 to be measured is incident on the first-level turning reflector 4, reflected by it to the first-level optical pressure sensing reflector 8, and then reflected to the second-level turning reflector 5, reflected by it to the second-level optical pressure sensing reflector 9, and so on, until it is reflected and emitted by the M-level turning reflector; the reflectivity of the turning reflector and the optical pressure sensing reflector is ≥99.9%; to facilitate the measurement and calculation of light power, in this embodiment, the turning reflectors all use the same high-reflection mirror, the optical pressure sensing reflectors all use the same high-reflection mirror, and the incident angle of the laser 1 to be measured on the N-level optical pressure sensing reflectors is set to the same angle.

[0054] The measuring range of the high-precision balance 16 satisfies the following relationship:

[0055]

[0056] Where m0 is the total weight of the N-level optical pressure sensor reflector and the thermal insulation bracket, g is the local gravity acceleration value; F maxThe pressure value generated by the light source component emitting laser at maximum power and reflected by the N-level optical pressure sensor reflector, m max It is the upper limit of measurement for high-precision balance 16.

[0057] To prevent airflow from affecting measurement accuracy, the present invention further comprises an airflow shielding housing 2. A thermal insulation bracket, a high-precision balance 16, a heat shield 15, an N-stage optical pressure sensing mirror, and an M-stage deflection mirror are all disposed within the airflow shielding housing. The M-stage deflection mirror and the heat shield 15 are each fixedly connected to the airflow shielding housing 2. An incident window 3 and an exit window 7 are provided on the airflow shielding housing 2. The laser light 1 to be measured is incident on the first-stage deflection mirror 4 through the incident window 3, and the reflected light from the M-stage deflection mirror is emitted through the exit window 7. In other embodiments of the present invention, the heat shield 15 and the airflow shielding housing 2 can each be fixedly connected to the test platform.

[0058] The present invention sets a corresponding number of small-aperture optical pressure sensor reflectors according to the number of reflections of the laser light 1 to be measured on the surface of the high-precision balance 16, replacing the whole reflector used in the traditional multi-reflection optical pressure measuring device, thereby achieving multiple reflections of the laser light 1 to be measured and reducing the weight of the optical pressure sensor reflector; the present invention adopts a hollow-designed bracket tray 10 to set the optical pressure sensor reflector, and the optical pressure sensor reflector is located above the heat insulation cover 15, and the high-precision balance 16 is wrapped by the heat insulation cover 15 to absorb the transmitted light generated when the laser light 1 to be measured is reflected by the surface of the optical pressure sensor reflector, so as to prevent the transmitted light from irradiating the high-precision balance 16, causing it to generate a temperature rise and thus affecting the stability of the measurement results.

[0059] In this embodiment, the high-power laser adopts a 5kW single-mode fiber laser. The diaphragm is adjusted so that more than 90% of the laser light 1 to be measured passes through the diaphragm hole. The beam shaping lens group is adjusted so that the spot diameter of the laser light 1 to be measured is within 5m. 激光 <15mm. The airflow shielding shell 2 is made of an aluminum alloy with excellent thermal conductivity. The entrance window 3 and exit window 7 are both mounted on the side panels of the airflow shielding shell 2. The first-stage turning reflector 4, the second-stage turning reflector 5, and the third-stage turning reflector 6 are fixed to the airflow shielding shell 2 via tooling. The heat shield 15 is a rectangular metal shell made of brass. The high-precision balance 16 is a Sartorius Secura225D-1CN high-precision electronic balance with a high-precision measurement range of 0 to 60g and a measurement accuracy of 0.01mg. The incident window 3 and the exit window 7 use a multilayer dielectric anti-reflection film high lens with a transmittance of 99.9%, and the first-stage turning reflector 4, the second-stage turning reflector 5, the third-stage turning reflector 6, the first-stage optical pressure sensing reflector 8, and the second-stage optical pressure sensing reflector 9 all use a multilayer dielectric film high reflective mirror with a reflectivity of 99.95%; in this embodiment, the diameter of the first-stage optical pressure sensing reflector 8 and the second-stage optical pressure sensing reflector 9 is 16 mm.

[0060] In this embodiment, N=2, M=3, the laser light 1 to be measured is transmitted through the incident window 3, reflected by the first-stage turning reflector 4, and then incident on the surface of the first-stage optical pressure sensing reflector 8 at an incident angle θ, and then reflected by the first-stage optical pressure sensing reflector 8 and the second-stage turning reflector 5, and then incident on the surface of the second-stage optical pressure sensing reflector 9 at an incident angle θ, and then reflected by the third-stage turning reflector 6 and emitted from the exit window 7.

[0061] In this embodiment, only two reflections of the laser light 1 to be measured are required. Therefore, two symmetrical mounting holes are provided on the surface of the support tray 10, respectively housing the first-stage optical pressure sensing mirror 8 and the second-stage optical pressure sensing mirror 9. This ensures that the first-stage transmitted light 13 and the second-stage transmitted light 14 generated by the first-stage optical pressure sensing mirror 8 and the second-stage optical pressure sensing mirror 9 are absorbed by the heat shield 15. In this embodiment, the mounting hole diameter is 14 mm.

[0062] The present invention provides a novel optical pressure measurement method based on multiple reflections, which specifically comprises the following steps:

[0063] Step 1: Build the above-mentioned optical pressure measurement device based on multiple reflections.

[0064] Step 2: Turn on the high-precision balance 16, perform preheating and self-test, and after the self-test is completed, select the 60g high-precision range working mode and record its initial reading m0. The initial reading m0 satisfies the following formula:

[0065]

[0066] Where m0 is the total weight of the N-level optical pressure sensor reflector and the thermal insulation bracket, g is the local gravity acceleration value; F max The pressure value generated by the light source component emitting laser at maximum power and reflected by the N-level optical pressure sensor reflector, m max It is the upper limit of measurement of high-precision balance 16;

[0067] In this embodiment, g is 9.8N / kg, m0 is 30.000g, and the maximum pressure generated by double reflection of a 5kW single-mode fiber laser at full power is approximately 62.6μN, that is, F in the above formula is max The value is 62.6μN,m max =60g, meeting the above requirements.

[0068] Step 3: Control the light source assembly to emit the laser light 1 to be measured, which is incident on the center of the first-stage turning reflector 4 at an incident angle θ;

[0069] In this embodiment, θ=20°.

[0070] Step 4: After the laser 1 to be measured is running stably, record the balance reading m0'; calculate the optical pressure value F of the laser 1 to be measured by the following formula: 光压 :

[0071] F 光压 =(m0'-m0)·g

[0072] In this embodiment, m0' is taken as 30.004g, and F is calculated from this. 光压 It is 39.2μN.

[0073] According to the above light pressure value F 光压 The power P of the laser 1 to be measured is calculated as 3130W by the following formula:

[0074]

[0075] Wherein, c is the speed of light; R is the reflectivity of the optical pressure sensing reflector. In this embodiment, R=0.9995; A is the absorptivity of the optical pressure sensing reflector. In this embodiment, A=0.0001; n is the number of times the laser light 1 to be measured is reflected on the surface of the optical pressure sensing reflector. In this embodiment, n=2.

[0076] In other embodiments of the present invention, the optical pressure sensing mirrors may have different reflectivities, and the laser to be measured may have different incident angles on the N-level optical pressure sensing mirrors. In this case, the power calculation method needs to be adjusted accordingly.

Claims

1. A light pressure measurement device based on multiple reflections, characterized in that: It includes a light source assembly, a high-precision balance (16), a heat insulation bracket, a heat insulation cover (15), an N-level light pressure sensing reflector and an M-level turning reflector, wherein N≥2, M=N+1; The light source assembly is used to emit laser light to be measured (1); The M-stage turning reflector is arranged above the N-stage optical pressure sensing reflector, and the first-stage turning reflector is located on the outgoing optical path of the laser (1) to be measured, the first-stage optical pressure sensing reflector is located on the reflected optical path of the first-stage turning reflector, the second-stage turning reflector is located on the reflected optical path of the first-stage optical pressure sensing reflector, and so on, the N-stage optical pressure sensing reflector is located on the reflected optical path of the M-1-stage turning reflector, and the M-stage turning reflector is located on the reflected optical path of the N-stage optical pressure sensing reflector; The diameters of the deflection reflector and the optical pressure sensing reflector are larger than the spot diameters of the laser (1) to be measured on their surfaces; The heat-insulating bracket comprises a connecting rod (11) having one end connected to the measuring surface of the high-precision balance (16) and a bracket tray (10) arranged at the other end of the connecting rod (11); the bracket tray (10) has N mounting holes corresponding to the positions of the N-level optical pressure sensing reflectors; the N-level optical pressure sensing reflectors are respectively mounted in the N mounting holes; The heat shield (15) is arranged outside the high-precision balance (16) to isolate the high-precision balance (16) from the external environment. A through hole is provided on the heat shield (15), and the connecting rod (11) is arranged through the through hole. A gap is provided between the lower surface of the support tray (10) and the upper surface of the heat shield (15); The measuring range of the high-precision balance (16) satisfies the following relationship: Where m0 is the total weight of the N-level optical pressure sensor reflector and the thermal insulation bracket, g is the local gravity acceleration value; F max The pressure value generated by the light source component emitting laser at maximum power and reflected by the N-level optical pressure sensor reflector, m max It is the upper limit of measurement of the high-precision balance (16).

2. The optical pressure measurement device based on multiple reflections according to claim 1, characterized in that: It also includes an airflow shielding shell (2); the heat insulation bracket, high-precision balance (16), heat insulation cover (15), N-level optical pressure sensor reflector and M-level turning reflector are all arranged in the airflow shielding shell (2); An incident window (3) is provided on the airflow shielding shell (2) at a position corresponding to the laser to be measured (1), and the laser to be measured (1) is incident on the first-order turning reflector through the incident window (3); and an exit window (7) is provided on the airflow shielding shell (2) at a position corresponding to the reflected light of the Mth-order turning reflector.

3. The optical pressure measurement device based on multiple reflections according to claim 2, characterized in that: The value of N is an even number, and the N-level optical pressure sensing reflectors are symmetrically arranged in pairs about the center of the support tray (10); The incident angles of the laser light (1) to be measured on the N-level optical pressure sensing mirrors are the same.

4. The optical pressure measurement device based on multiple reflections according to claim 2 or 3, characterized in that: The light source assembly includes a high-power laser, and an aperture and a beam shaping lens assembly sequentially arranged on the output light path of the high-power laser; The high-power laser is used to emit the laser to be tested (1); The aperture is used to allow the emitted laser light (1) to be measured to pass through; The beam shaping lens assembly is used to shape the laser light (1) to be measured that passes through the aperture.

5. The optical pressure measurement device based on multiple reflections according to claim 4, characterized in that: The mounting hole is a stepped hole, the large diameter end of the stepped hole is located at the top, and the large diameter end is interference fit with the optical pressure sensor reflector.

6. The optical pressure measurement device based on multiple reflections according to claim 5, characterized in that: The heat-insulating bracket further includes a base (12), and one end of the connecting rod (11) is connected to a measuring surface of a high-precision balance (16) via the base (12); A distance is provided between the outer side wall of the connecting rod (11) and the side wall of the through hole of the heat insulation cover (15).

7. The optical pressure measurement device based on multiple reflections according to claim 6, characterized in that: The heat insulation cover (15) is made of copper or aluminum; The tray, connecting rod (11) and base (12) are all made of Teflon, glass fiber reinforced plastic, glass fiber or polyimide material; The turning reflector of the M-level adopts the same high-reflectivity mirror with a reflectivity of ≥99.9%; The optical pressure sensing reflector of level N adopts the same high-reflectivity mirror with a reflectivity of ≥99.9%; The incident window (3) and the exit window (7) both use high-transmittance lenses with a transmittance of ≥99.9%; The high-precision balance (16) is an ultra-micro electronic balance, a micro balance or a semi-micro balance.

8. The optical pressure measurement device based on multiple reflections according to claim 7, characterized in that: The M-level turning reflector is fixedly connected to the airflow shielding shell (2) via a tool; The heat insulation cover (15) is fixedly connected to the airflow shielding shell (2).

9. A method for measuring light pressure based on multiple reflections, characterized in that: The following steps are involved: Step 1: constructing the optical pressure measurement device based on multiple reflections according to any one of claims 1 to 8; Step 2: Record the initial reading m0 of the high-precision balance (16). The initial reading m0 satisfies the following formula: Where m0 is the total weight of the N-level optical pressure sensor reflector and the thermal insulation bracket, g is the local gravity acceleration value; F max The pressure value generated by the light source component emitting laser at maximum power and reflected by the N-level optical pressure sensor reflector, m max is the upper limit of measurement of the high-precision balance (16); Step 3: Control the light source assembly to emit the laser to be measured (1) so that it is incident on the surface of the first-stage turning reflector; Step 4: After the laser (1) to be measured is running stably, record the balance reading m0'; calculate the optical pressure value F of the laser (1) to be measured by the following formula: 光压 : F 光压 =(m0'-m0)·g。

Citation Information

Patent Citations

  • Light pressure measuring device and method based on multiple reflections

    CN114323273A

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