Method, device, equipment and medium for restoring power after power outage in single crystal silicon production

Abstract

The present application relates to the field of semiconductor manufacturing technology, and discloses a method, device, equipment and medium for restoring power after a power outage in single crystal silicon production. The method comprises: after a power cabinet is powered off, monitoring whether the power cabinet is powered on; the power cabinet is used to connect to an external power grid and provide external power to a single crystal furnace device, and the single crystal furnace device is used to produce single crystal silicon; and the single crystal furnace device obtains electric energy from an uninterruptible power supply after the power cabinet is powered off; when it is monitored that the power cabinet is powered on, obtaining the time taken to restore power, and the time taken to restore power represents the duration from the power cabinet being powered off to being powered on; obtaining a power restoration rule based on the time taken to restore power; the power restoration rule includes restoration operation parameters corresponding to each production system corresponding to the single crystal furnace device; the production system is used to support the single crystal furnace device in producing single crystal silicon; and controlling the operation of the production system according to the restoration operation parameters in the power restoration rule.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a method, device, equipment and medium for restoring power after a power outage in single crystal silicon production. Background Art

[0002] In the Czochralski single crystal production process, the external grid electricity is generally rectified by the power cabinet and output to the single crystal furnace equipment and production systems such as heating system, control system, vacuum system, gas system, drive system, etc., and at the same time output to the uninterruptible power supply UPS (Uninterruptible Power Supply) for charging. The UPS is used to switch and provide power to the single crystal furnace equipment and related production systems in an emergency after a power outage in the external grid.

[0003] Single crystal furnace equipment is a kind of equipment that requires uninterrupted circulation of water, electricity and vacuum. If the power is cut off during the production process, it is very dangerous and will cause irreversible losses to production.

[0004] At present, if there is a power outage during the production of monocrystalline silicon, it is necessary to manually monitor whether the power is restored and resume production after the power is restored. This manual recovery method requires a high level of manual skills and may result in inaccurate recovery operations. Summary of the invention

[0005] In view of the above problems, the present application provides a method, device, equipment and medium for restoring power after a power outage in monocrystalline silicon production, so as to improve the control accuracy of restoring power after a power outage in monocrystalline silicon production. The specific scheme is as follows:

[0006] The first aspect of the present application provides a method for restoring power after a power outage in single crystal silicon production, comprising:

[0007] After the power cabinet is powered off, monitoring whether the power cabinet is powered on; the power cabinet is used to connect to the external power grid and provide the external power grid to the single crystal furnace equipment, and the single crystal furnace equipment is used to produce single crystal silicon; and the single crystal furnace equipment obtains electric energy from the uninterruptible power supply after the power cabinet is powered off;

[0008] When it is detected that the power cabinet is restored to power, the duration of the restoration of power is obtained, where the duration of the restoration of power represents the duration from the power failure to the restoration of power of the power cabinet;

[0009] According to the time taken for the power restoration, a power restoration rule is obtained; the power restoration rule includes restoration operation parameters corresponding to each production system corresponding to the single crystal furnace equipment; the production system is used to support the single crystal furnace equipment to produce single crystal silicon;

[0010] The operation of the production system is controlled according to the recovery operation parameters in the power recovery rule.

[0011] In a possible implementation, different power restoration rules are obtained when the power restoration time falls within different time ranges.

[0012] In a possible implementation, when the time taken to restore power is less than or equal to the first threshold, the restored operating parameters corresponding to each of the production systems in the power restoration rule are consistent with the historical operating parameters of the corresponding production system before the power cabinet was powered off;

[0013] In the case where the time taken for power restoration is greater than the first threshold and less than or equal to the second threshold, the power restoration rule includes: a restoration operation parameter corresponding to each production system in at least one restoration stage; the number of restoration stages corresponding to different production systems is the same or different; the restoration operation parameters corresponding to different restoration stages of the same production system are different;

[0014] When the time taken to restore power is greater than the second threshold, the power restoration rule includes: recovery operation parameters corresponding to each production system in multiple recovery stages; the number of recovery stages corresponding to each production system is the same; and the recovery operation parameters corresponding to the same production system in different recovery stages are the same or different.

[0015] In a possible implementation, the recovery phases corresponding to each of the production systems have a phase order;

[0016] Among them, when the time taken for the power restoration is greater than the first threshold, the recovery operation parameters corresponding to each of the production systems in the last recovery stage are consistent with the historical operation parameters of the corresponding production system before the power cabinet was powered off.

[0017] In a possible implementation, the production system at least includes: a vacuum system, a drive system, a gas circuit system, a heating system, and a control system; the control system is used to control the operation of the drive system, and the drive system is used to drive the single crystal furnace equipment; the heating system is used to heat the single crystal furnace equipment; the vacuum system is used to provide a pollution-free environment for the single crystal furnace equipment; the gas circuit system is used to maintain the pressure of the single crystal furnace equipment stable;

[0018] Wherein, when the time taken for the power restoration is greater than the first threshold value and less than or equal to the second threshold value, in the power restoration rule, the vacuum system corresponds to two restoration stages, and the heating system, the gas system, the control system and the drive system respectively correspond to one restoration stage; the power restoration rule includes: the first operating parameters of the vacuum system corresponding to the first restoration stage and the second operating parameters of the second restoration stage; and the restoration operating parameters of the heating system, the gas system, the control system and the drive system respectively in their restoration stages;

[0019] When the time taken to restore power is greater than the second threshold, in the power restoration rule, the vacuum system, the heating system, the gas system, the control system and the drive system respectively have four recovery stages; the power restoration rule includes: the recovery operation parameters corresponding to each of the production systems in each recovery stage.

[0020] In a possible implementation, the production system at least includes: a control system and a drive system, the control system is used to control the operation of the drive system, and the drive system is used to drive the single crystal furnace equipment;

[0021] Among them, monitoring whether the power cabinet is restored to power includes at least:

[0022] Monitoring the communication status between the control system and the power cabinet;

[0023] When it is monitored that the communication status indicates that the communication between the control system and the power cabinet is smooth, it is determined that the power cabinet is powered on.

[0024] In a possible implementation, obtaining the time taken for power restoration at least includes:

[0025] Reading the recorded time from the timer to obtain the time taken for power restoration; the timer starts timing when the power cabinet detects a power outage and stops timing when the power cabinet detects power restoration;

[0026] The fact that the power supply cabinet is detected to be powered off includes: the fact that the communication status between the power supply cabinet and the control system is detected to represent that the communication between the control system and the power supply cabinet is interrupted.

[0027] A second aspect of the present application provides a device for restoring power after a power outage in single crystal silicon production, comprising:

[0028] A power restoration monitoring unit is used to monitor whether the power cabinet is restored after the power cabinet is powered off; the power cabinet is used to connect to the external power grid and provide the external power grid to the single crystal furnace equipment, and the single crystal furnace equipment is used to produce single crystal silicon; and the single crystal furnace equipment obtains electric energy from the uninterruptible power supply after the power cabinet is powered off;

[0029] A duration obtaining unit, used to obtain the duration of power restoration when monitoring that the power cabinet is restored to power, wherein the duration of power restoration represents the duration from power failure to power restoration of the power cabinet;

[0030] A rule obtaining unit, used for obtaining a power restoration rule according to the power restoration time; the power restoration rule includes a restoration operation parameter corresponding to each production system corresponding to the single crystal furnace equipment; the production system is used for supporting the single crystal furnace equipment to produce single crystal silicon;

[0031] A recovery control unit is used to control the operation of the production system according to the recovery operation parameters in the power recovery rule.

[0032] The third aspect of the present application provides a computer program product, including computer-readable instructions. When the computer-readable instructions are executed on an electronic device, the electronic device implements the method for restoring power after a power outage in single crystal silicon production according to the first aspect or any implementation of the first aspect.

[0033] A fourth aspect of the present application provides an electronic device, comprising at least one processor and a memory connected to the processor, wherein:

[0034] The memory is used to store computer programs;

[0035] The processor is used to execute the computer program so that the electronic device can implement the method for restoring power after a power outage in single crystal silicon production according to the first aspect or any implementation method of the first aspect.

[0036] A fifth aspect of the present application provides a computer storage medium, which carries one or more computer programs. When the one or more computer programs are executed by an electronic device, the electronic device can implement the method for restoring power after a power outage in single crystal silicon production according to the first aspect or any implementation of the first aspect.

[0037] By means of the above technical scheme, in the method, device, equipment and medium for power restoration after power outage in single crystal silicon production provided by the present application, after the power cabinet that provides external power to the single crystal furnace equipment is powered off, it is monitored whether the power cabinet is powered on. If it is monitored that the power is restored, the time taken to restore the power is first obtained, that is, the duration from the power failure to the restoration of the power cabinet. In this way, according to the time taken to restore the power, a power restoration rule can be obtained. The power restoration rule contains the restoration operation parameters corresponding to each production system corresponding to the single crystal furnace equipment. Finally, the operation of the production system is controlled according to the restoration operation parameters in the power restoration rule, so that the normal operation of the single crystal furnace equipment can be restored. It can be seen that in the present application, no manual participation is required, but whether the power cabinet is restored is monitored, and then the restoration operation parameters corresponding to each corresponding production system are obtained according to the duration from the power failure to the restoration of the power cabinet. In this way, the production system can be more accurately controlled to resume operation, thereby improving the control accuracy of power restoration. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0039] Figure 1 A flow chart of a method for restoring power after a power outage in single crystal silicon production provided in an embodiment of the present application;

[0040] Figure 2 This is a schematic diagram of power supply between the power cabinet, UPS and single crystal furnace equipment in the embodiment of the present application;

[0041] Figure 3 A schematic diagram of the structure of a device for restoring power after a power outage in single crystal silicon production provided in an embodiment of the present application;

[0042] Figure 4 A schematic diagram of the structure of an electronic device provided in an embodiment of the present application;

[0043] Figure 5 A schematic diagram of an automatic recovery mechanism in an embodiment of the present application;

[0044] Figure 6 The figure is a schematic diagram of the automatic recovery process in the embodiment of the present application. DETAILED DESCRIPTION

[0045] The following describes the embodiments of the present application in conjunction with the drawings in the embodiments of the present application. The terms used in the implementation method section of the present application are only used to explain the specific embodiments of the present application, and are not intended to limit the present application.

[0046] The embodiments of the present application are described below in conjunction with the accompanying drawings. Those skilled in the art will appreciate that, with the development of technology and the emergence of new scenarios, the technical solutions provided in the embodiments of the present application are also applicable to similar technical problems.

[0047] The terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and need not be used to describe a specific order or sequential order. It should be understood that the terms used in this way can be interchangeable under appropriate circumstances, which is only to describe the distinction mode adopted by the objects of the same attributes when describing in the embodiments of the present application. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, so that the process, method, system, product or equipment comprising a series of units need not be limited to those units, but may include other units that are not clearly listed or inherent to these processes, methods, products or equipment.

[0048] In order to solve the above problems, the embodiment of the present application provides a method for restoring power after a power outage in monocrystalline silicon production. The method for restoring power after a power outage in monocrystalline silicon production according to the embodiment of the present application is described in detail below in conjunction with the accompanying drawings.

[0049] Reference Figure 1 , is a flowchart of a method for restoring power after a power outage in single crystal silicon production provided in an embodiment of the present application, which can be applied to electronic devices that can process data and can be connected to the production system of single crystal furnace equipment, such as computers or servers. The technical solution in this embodiment is mainly used to improve the control accuracy of power restoration after a power outage in single crystal silicon production.

[0050] Specifically, the method in this embodiment may include the following steps:

[0051] Step 101: After the power cabinet is powered off, monitor whether the power cabinet is powered on. If it is detected that the power cabinet is powered on, execute step 102. If it is not detected that the power cabinet is powered on, continue to execute step 101.

[0052] Among them, the power cabinet is used to connect to the external power grid and provide the external power grid to the single crystal furnace equipment, and the single crystal furnace equipment is used to produce single crystal silicon. Figure 2 As shown in the figure, the UPS is also connected to the power cabinet. The power cabinet provides power to the UPS before the external power is cut off to charge the UPS, and also provides power to the production system corresponding to the single crystal furnace equipment. The single crystal furnace equipment obtains power from the UPS after the power cabinet is cut off, and the production system corresponding to the single crystal furnace equipment also obtains power from the UPS. For example, after the power cabinet is cut off, the vacuum system and the heating system are directly shut down, while the drive system, the control system and the gas circuit system can continue to obtain power from the UPS.

[0053] In one implementation, there may be multiple production systems corresponding to the single crystal silicon equipment, such as: vacuum system, drive system, gas system, heating system, control system. These production systems are used to support the single crystal furnace equipment to produce single crystal silicon;

[0054] Among them, the control system is used to control the operation of the drive system, and the drive system is used to drive the single crystal furnace equipment; the heating system is used to heat the single crystal furnace equipment; the vacuum system is used to provide a pollution-free environment for the single crystal furnace equipment; and the gas path system is used to maintain the pressure stability of the single crystal furnace equipment.

[0055] Based on this, if the power cabinet is powered off, that is, the external network power is powered off, the power cabinet and the control system will have a communication interruption due to the power outage. If the power cabinet is powered on, that is, the external network power is powered on, the power cabinet and the control system will resume communication, making the communication smooth. Therefore, in step 101, when monitoring whether the power cabinet is powered on, it can be achieved in the following ways:

[0056] Monitor the communication status between the control system and the power cabinet. If the monitored communication status indicates that the communication between the control system and the power cabinet is smooth, it can be determined that the power cabinet has been restored.

[0057] If the monitored communication status indicates that the communication between the control system and the power cabinet is interrupted, and the UPS detects that the external power is off, it can be determined that the power cabinet is powered off.

[0058] Specifically, in this embodiment, it can be monitored whether the control system receives a feedback signal from the power supply cabinet. If the control system does not receive the feedback signal for more than a certain period of time or the feedback signal received by the control system indicates that the communication of the power supply cabinet is abnormal, then it can be determined that the power supply cabinet is powered off. If the control system receives a feedback signal within a certain period of time or the received feedback signal indicates that the communication of the power supply cabinet is normal, then it can be determined that the power supply cabinet is powered on.

[0059] Step 102: Obtain the time required for power restoration.

[0060] The time taken to restore power represents the duration from power failure to power restoration in the power cabinet.

[0061] In one implementation, in step 102, the recorded duration can be read from the timer to obtain the duration for power restoration.

[0062] The timer starts counting when the power cabinet is detected to be powered off and stops counting when the power cabinet is detected to be powered on. In this way, the time length recorded by the timer is the time length from the power cabinet being powered off until the power cabinet is detected to be powered on. The power cabinet being detected to be powered off means that: the communication status between the power cabinet and the control system is detected to indicate that the communication between the control system and the power cabinet is interrupted, and the UPS detects that the external network power is restored.

[0063] Step 103: Obtain a power restoration rule according to the time taken to restore power.

[0064] The power restoration rules include: the restoration operation parameters corresponding to each production system corresponding to the single crystal furnace equipment.

[0065] In one implementation, the time range of the time taken to restore power is different, and the obtained power restoration rules are different. Specifically, for each production system, the time range of the time taken to restore power is different, and the corresponding recovery operation parameters in the power restoration rules are different. For example, the corresponding recovery operation parameters of the control system in the power restoration rules are different because the time range of the time taken to restore power is different. For another example, the corresponding recovery operation parameters of the gas circuit system in the power restoration rules are different because the time range of the time taken to restore power is different.

[0066] Step 104: Control the operation of the production system according to the recovery operation parameters in the power recovery rule.

[0067] Specifically, in this embodiment, each production system is controlled to resume operation according to the resume operation parameters in the power restoration rule.

[0068] According to the above technical solution, in a method for restoring power after a power outage in single crystal silicon production provided by an embodiment of the present application, after the power cabinet that provides external power to the single crystal furnace equipment is powered off, it is monitored whether the power cabinet is powered on. If it is monitored that the power is restored, the time taken to restore the power is first obtained, that is, the duration from the power failure to the restoration of the power cabinet. In this way, according to the time taken to restore the power, a power restoration rule can be obtained. The power restoration rule contains the restoration operation parameters corresponding to each production system corresponding to the single crystal furnace equipment. Finally, the production system operation is controlled according to the restoration operation parameters in the restoration rule. In this way, the normal operation of the single crystal furnace equipment can be restored. It can be seen that in this application, no manual participation is required, but whether the power cabinet is restored is monitored, and then the restoration operation parameters corresponding to each production system are obtained according to the duration from the power failure to the restoration of the power cabinet. In this way, the production system restoration operation can be more accurately controlled, thereby improving the control accuracy of power restoration.

[0069] In one implementation, in step 103, the duration range of the power restoration time can be judged, and then according to the duration judgment result, the corresponding recovery operation parameters of each production system in the corresponding duration range, that is, the power restoration rule, are obtained. The details are as follows:

[0070] In the case where the time taken to restore power is less than or equal to the first threshold, the restoration operation parameters corresponding to each production system in the restoration rule are consistent with the historical operation parameters of the corresponding production system before the power cabinet was powered off. Among them, the first threshold can be set as required based on the power supply performance of the uninterruptible power supply. For example, the maximum time that the uninterruptible power supply can supply power is 30 minutes, and the first threshold can be 5 minutes. In the case where the time taken to restore power is less than or equal to 5 minutes, that is, the internal and external power supply is restored 5 minutes after the external power supply is cut off, then the historical operation parameters of each production system before the power cabinet is powered off are used as the restoration operation parameters in the restoration rule. In this way, if the internal and external power supply is restored 5 minutes after the external power supply is cut off, then each production system will resume operation according to the historical operation parameters before the power outage.

[0071] For example, after the power cabinet is powered off, if power is restored within 5 minutes, the vacuum system and heating system will start directly and operate according to their historical operating parameters before the power outage, and the drive system, control system and gas system will also operate according to their historical operating parameters before the power outage.

[0072] In the case where the time taken to restore power is greater than the first threshold and less than or equal to the second threshold, the power restoration rule includes: the restoration operation parameters corresponding to each production system in at least one restoration stage. Among them, the number of restoration stages corresponding to different production systems is the same or different, and the restoration operation parameters corresponding to different restoration stages of the same production system are different. Among them, the second threshold can be set according to demand based on the power supply performance of the uninterruptible power supply, and the second threshold is greater than the first threshold. For example, the maximum time that the uninterruptible power supply can supply power is 30 minutes, the first threshold can be 5 minutes, and the second threshold is 20 minutes. In the case where the time taken to restore power exceeds 5 minutes but is less than or equal to 20 minutes, that is, the internal and external power is restored 20 minutes after 5 minutes after the external power outage, then each production system in the power restoration rule has one or more corresponding restoration stages, and each restoration stage corresponds to the restoration operation parameters corresponding to the production system. Based on this, after the power cabinet is restored, each production system resumes operation according to the restoration operation parameters corresponding to its own restoration stage.

[0073] In the specific implementation, there is a production system with multiple recovery stages, and the corresponding recovery stages have a stage order. When the time taken to restore power is greater than a first threshold, the recovery operation parameters corresponding to each production system in the last recovery stage are consistent with the historical operation parameters of the corresponding production system before the power cabinet was powered off.

[0074] Specifically, when the time taken to restore power is greater than a first threshold and less than or equal to a second threshold, the vacuum system has two corresponding recovery stages, and the heating system, the gas system, the control system and the drive system each have a recovery stage. Accordingly, the power restoration rules may include: first operating parameters of the vacuum system corresponding to the first recovery stage and second operating parameters of the second recovery stage; and, the recovery operating parameters of the heating system, the gas system, the control system and the drive system in their respective recovery stages.

[0075] For example, if the power cabinet is powered off for more than 5 minutes, the vacuum system and heating system are powered off, and the drive system, control system and gas system continue to charge the UPS to obtain power, but if the pressure in the furnace reaches a certain threshold, such as 4000Pa, the gas system is shut down. If the power cabinet is powered on within 20 minutes after 5 minutes, then: the vacuum system has two recovery stages. In the first recovery stage after the power cabinet is powered on, the main pump and ball valve of the vacuum system run at the lowest Hz (frequency) for a certain period of time, such as 5 seconds, and then in the second recovery stage, they run according to the historical operating parameters before the power cabinet is powered off; the heating system, gas system, control system and drive system each have a recovery stage. The heating system starts in the recovery stage after the power cabinet is powered on and runs according to the historical operating parameters before the power cabinet is powered off; if the gas system is not shut down, then the gas system, control system and drive system also run according to the historical operating parameters before the power cabinet is powered off; if the gas system is shut down, then the gas system starts in the recovery stage after the power cabinet is powered on and runs according to the historical operating parameters before the power cabinet is powered off.

[0076] When the time taken to restore power is greater than the second threshold, the power restoration rules may include: recovery operation parameters corresponding to each production system in multiple recovery stages; the number of recovery stages corresponding to each production system is the same, and the recovery operation parameters corresponding to the same production system in different recovery stages are the same or different.

[0077] Specifically, when the time taken to restore power is greater than the second threshold, in the power restoration rule, the vacuum system, heating system, drive system, control system and gas system have four restoration stages respectively. Accordingly, the power restoration rule may include: restoration operation parameters corresponding to each production system in each restoration stage. It should be noted that there is a stage order between these restoration stages, and the restoration operation parameters in the last restoration stage are the historical operation parameters of the corresponding production system before the power cabinet was powered off.

[0078] For example, more than 20 minutes after the power cabinet is powered off, the vacuum system and the heating system are powered off and shut down. If the pressure in the furnace reaches a certain threshold, such as 4000Pa, the gas system is shut down, and the control system exits the automatic control state. The drive system performs the following emergency operations according to the emergency instructions previously sent by the control system: lowering the crucible distance, raising the heat shield distance, shutting down the crystal rotation, and the crucible rotation. If the power cabinet is powered on at this time, then each production system in the power-on recovery rule at this time contains four recovery stages. The first recovery stage is 3 minutes after power-on, the second recovery stage is 2 minutes after the first recovery stage, the third recovery stage is 5 minutes after the second recovery stage, and the fourth recovery stage is the subsequent time of the third recovery stage. The various production systems of the single crystal furnace equipment can be automatically restored according to the recovery operation parameters of the four recovery stages in the power-on recovery rules shown in Table 1:

[0079] Table 1 Power restoration rules

[0080]

[0081] Among them, the main pump frequency is the operating parameter of the vacuum system, the crucible rotation and crystal rotation are the operating parameters of the drive system, the furnace pressure control and argon flow are the operating parameters of the gas system, and the main heating power and auxiliary heating power are the operating parameters of the heating system. The recovery operating parameters of each production system in the fourth recovery stage are the historical operating parameters of the corresponding production system before the power cabinet was powered off.

[0082] It can be seen that in this embodiment, the time taken for power restoration can be used to obtain the corresponding power restoration recovery rules, and the power restoration recovery rules can be used to achieve recovery control of the production system of the single crystal furnace equipment without human intervention, which can improve the accuracy of recovery control.

[0083] A method for restoring power after a power outage in monocrystalline silicon production provided in an embodiment of the present application is introduced above. A device for executing the above method for restoring power after a power outage in monocrystalline silicon production will be introduced below.

[0084] See also Figure 3 , is a schematic diagram of the structure of a device for restoring power after a power outage in monocrystalline silicon production provided in an embodiment of the present application. The device can be deployed in an electronic device that can process data and can be connected to a production system of a single crystal furnace device, such as a computer or a server. The technical solution in this embodiment is mainly used to improve the control accuracy of restoring power after a power outage in monocrystalline silicon production.

[0085] Specifically, the device in this embodiment may include the following units:

[0086] The power restoration monitoring unit 301 is used to monitor whether the power cabinet is restored after the power cabinet is powered off; the power cabinet is used to connect to the external power grid and provide the external power grid to the single crystal furnace equipment, and the single crystal furnace equipment is used to produce single crystal silicon; and the single crystal furnace equipment obtains electric energy from the uninterruptible power supply after the power cabinet is powered off;

[0087] The duration obtaining unit 302 is used to obtain the duration of power restoration when the power cabinet is detected to be restored, wherein the duration of power restoration represents the duration from power failure to power restoration of the power cabinet;

[0088] A rule obtaining unit 303 is used to obtain a power restoration rule according to the power restoration time; the power restoration rule includes a restoration operation parameter corresponding to each production system corresponding to the single crystal furnace equipment; the production system is used to support the single crystal furnace equipment to produce single crystal silicon;

[0089] The recovery control unit 304 is used to control the operation of the production system according to the recovery operation parameters in the power recovery rule.

[0090] According to the above technical scheme, in a power restoration device after a power outage in single crystal silicon production provided by an embodiment of the present application, after the power cabinet that provides external power to the single crystal furnace equipment is powered off, it is monitored whether the power cabinet is powered on. If it is monitored that the power is restored, the time taken to restore the power is first obtained, that is, the duration from the power failure to the restoration of the power cabinet. In this way, according to the time taken to restore the power, a power restoration rule can be obtained. The power restoration rule contains the restoration operation parameters corresponding to each production system corresponding to the single crystal furnace equipment. Finally, the production system operation is controlled according to the restoration operation parameters in the power restoration rule, so that the normal operation of the single crystal furnace equipment can be restored. It can be seen that in this application, no manual participation is required, but whether the power cabinet is restored is monitored, and then the restoration operation parameters corresponding to each production system are obtained according to the duration from the power failure to the restoration of the power cabinet. In this way, the production system restoration operation can be more accurately controlled, thereby improving the control accuracy of power restoration.

[0091] In one implementation, the power restoration time falls within different time ranges, and the obtained power restoration rules are different.

[0092] Specifically, when the time taken for power restoration is less than or equal to the first threshold, the restoration operation parameters corresponding to each of the production systems in the power restoration rule are consistent with the historical operation parameters of the corresponding production system before the power cabinet was powered off;

[0093] In the case where the time taken for power restoration is greater than the first threshold and less than or equal to the second threshold, the power restoration rule includes: a restoration operation parameter corresponding to each production system in at least one restoration stage; the number of restoration stages corresponding to different production systems is the same or different; the restoration operation parameters corresponding to different restoration stages of the same production system are different;

[0094] When the time taken to restore power is greater than the second threshold, the power restoration rule includes: recovery operation parameters corresponding to each production system in multiple recovery stages; the number of recovery stages corresponding to each production system is the same; and the recovery operation parameters corresponding to the same production system in different recovery stages are the same or different.

[0095] Among them, there is a stage order between the recovery stages corresponding to each of the production systems; when the time taken to restore power is greater than the first threshold, the recovery operation parameters corresponding to each of the production systems in the last recovery stage are consistent with the historical operation parameters of the corresponding production system before the power cabinet was powered off.

[0096] In one implementation, the production system at least includes: a vacuum system, a drive system, a gas circuit system, a heating system, and a control system; the control system is used to control the operation of the drive system, and the drive system is used to drive the single crystal furnace equipment; the heating system is used to heat the single crystal furnace equipment; the vacuum system is used to provide a pollution-free environment for the single crystal furnace equipment; the gas circuit system is used to maintain the pressure of the single crystal furnace equipment stable;

[0097] Wherein, when the time taken for the power restoration is greater than the first threshold value and less than or equal to the second threshold value, in the power restoration rule, the vacuum system corresponds to two restoration stages, and the heating system, the gas system, the control system and the drive system respectively correspond to one restoration stage; the power restoration rule includes: the first operating parameters of the vacuum system corresponding to the first restoration stage and the second operating parameters of the second restoration stage; and the restoration operating parameters of the heating system, the gas system, the control system and the drive system respectively in their restoration stages;

[0098] When the time taken to restore power is greater than the second threshold, in the power restoration rule, the vacuum system, the heating system, the gas system, the control system and the drive system respectively have four recovery stages; the power restoration rule includes: the recovery operation parameters corresponding to each of the production systems in each recovery stage.

[0099] In one implementation, the production system at least includes: a control system and a drive system, wherein the control system is used to control the operation of the drive system, and the drive system is used to drive the single crystal furnace equipment;

[0100] The power restoration monitoring unit 301 is specifically used to: monitor the communication status between the control system and the power cabinet; and determine that the power cabinet is restored to power when the communication status indicates that the communication between the control system and the power cabinet is smooth.

[0101] In one implementation, the duration acquisition unit 302 is specifically used to: read the recorded duration from the timer to obtain the duration used for power restoration; the timer starts timing when the power cabinet is detected to be powered off and stops timing when the power cabinet is detected to be powered on; wherein, the power cabinet is detected to be powered off, including: the communication status between the power cabinet and the control system is detected to indicate that the communication between the control system and the power cabinet is interrupted.

[0102] It should be noted that the specific implementation of each unit in this embodiment can refer to the corresponding content in the previous text and will not be described in detail here.

[0103] An embodiment of the present application further provides an electronic device, comprising at least one processor and a memory connected to the processor, wherein:

[0104] The memory is used to store computer programs;

[0105] The processor is used to execute the computer program so that the electronic device can implement any one of the methods for restoring power after a power outage in single crystal silicon production provided in the embodiments of the present application.

[0106] refer to Figure 4 As shown, it shows a schematic diagram of the structure of an electronic device suitable for implementing the embodiment of the present application. The electronic device in the embodiment of the present application may include but is not limited to fixed terminals such as mobile phones, laptops, PDAs (personal digital assistants), PADs (tablet computers), desktop computers, etc. Figure 4 The electronic device shown is merely an example and should not bring any limitation to the functions and scope of use of the embodiments of the present application.

[0107] like Figure 4As shown, the electronic device may include a processing device (e.g., a central processing unit, a graphics processing unit, etc.) 401, which can perform various appropriate actions and processes according to a program stored in a read-only memory (ROM) 402 or a program loaded from a storage device 408 to a random access memory (RAM) 403. When the electronic device is powered on, various programs and data required for the operation of the electronic device are also stored in the RAM 403. The processing device 401, the ROM 402, and the RAM 403 are connected to each other via a bus 404. An input / output (I / O) interface 405 is also connected to the bus 404.

[0108] Typically, the following devices may be connected to the I / O interface 405: an input device 406 including, for example, a touch screen, a touch pad, a keyboard, a mouse, a camera, a microphone, an accelerometer, a gyroscope, etc.; an output device 407 including, for example, a liquid crystal display (LCD), a speaker, a vibrator, etc.; a storage device 408 including, for example, a memory card, a hard disk, etc.; and a communication device 409. The communication device 409 may allow the electronic device to communicate with other devices wirelessly or by wire to exchange data. Although Figure 4 An electronic device having various devices is shown, but it should be understood that it is not required to implement or possess all the devices shown. More or fewer devices may be implemented or possessed instead.

[0109] Also provided in an embodiment of the present application is a computer program product including computer-readable instructions. When the computer-readable instructions are executed on an electronic device, the electronic device implements any one of the methods for restoring power after a power outage in single crystal silicon production provided in an embodiment of the present application.

[0110] A computer storage medium is also provided in an embodiment of the present application. The storage medium carries one or more computer programs. When the one or more computer programs are executed by an electronic device, the electronic device can implement any one of the methods for restoring power after a power outage in single crystal silicon production provided in the embodiments of the present application.

[0111] The following is an example of the technical solution of this application:

[0112] First, the embodiment of the present application can optimize the trigger mechanism of external network power outage, improve the action mechanism from power outage period to emergency triggering, and provide an automatic recovery mechanism for power restoration after triggering emergency action, such as Figure 5 Shown is the automatic recovery mechanism.

[0113] Among them, the furnace equipment is in the equal diameter state, and the vacuum system, drive system, heating system, gas system, and electric control system (i.e., control system) are normal. If the crystal pulling furnace equipment (i.e., single crystal furnace equipment) is running normally and encounters an external power outage, it will be powered by UPS, and the power cabinet will generate a communication interruption alarm to the furnace control system through communication. UPS will also generate a mains (external power) alarm.

[0114] Specifically, if the external power supply is cut off, two conditions are met:

[0115] ① The communication between the power cabinet and the electric control system is interrupted, and the alarm heating communication is interrupted; ② The UPS alarm indicates that the mains power is off.

[0116] Based on this, reference Figure 6 The figure shows the process flow of automatic recovery. The electric control system triggers the power failure alarm and starts counting the power failure time. The control system is powered by the UPS battery pack. The vacuum system (main pump) and the heating system (power cabinet) are powered by the external network and are in the off state. The control system controls the normal production inside the single crystal furnace equipment.

[0117] Afterwards, if the power-off time is less than the set time 1 (the reuse time is less than or equal to the first threshold), after power is restored, the electric control system starts the corresponding recovery mechanism according to the historical operating parameters before the shutdown.

[0118] If the power outage time is greater than the set time 1 and less than the set time 2 (the time used for reuse is greater than the first threshold and less than or equal to the second threshold), when the power is restored, the electronic control system executes according to the historical operating parameters before the corresponding shutdown and continues to resume production.

[0119] If the power-off time is greater than the set time 2 (the reuse time is greater than the second threshold), the power is restored. At this time, the electronic control system performs the corresponding emergency mechanism and restores certain actions according to the recovery operation parameters shown in Table 1.

[0120] Since the UPS can only supply power for about 30 minutes, if the power outage time is greater than the set time 2, the electric control system will actively start the main pump and open the main chamber ball valve (the main pump operating status is greater than the set time) to perform the following recovery mechanism.

[0121] It should also be noted that the device embodiments described above are merely schematic, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed over multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of this embodiment. In addition, in the drawings of the device embodiments provided by the present application, the connection relationship between the modules indicates that there is a communication connection between them, which may be specifically implemented as one or more communication buses or signal lines.

[0122] Through the description of the above implementation mode, the technicians in the field can clearly understand that the present application can be implemented by means of software plus necessary general hardware, and of course, it can also be implemented by special hardware including special integrated circuits, special CPUs, special memories, special components, etc. In general, all functions completed by computer programs can be easily implemented by corresponding hardware, and the specific hardware structure used to implement the same function can also be various, such as analog circuits, digital circuits or special circuits. However, for the present application, software program implementation is a better implementation mode in more cases. Based on such an understanding, the technical solution of the present application is essentially or the part that contributes to the prior art can be embodied in the form of a software product, which is stored in a readable storage medium, such as a computer floppy disk, a U disk, a mobile hard disk, a ROM, a RAM, a disk or an optical disk, etc., including a number of instructions to enable a computer device (which can be a personal computer, a training device, or a network device, etc.) to execute the methods described in each embodiment of the present application.

[0123] In the above embodiments, all or part of the embodiments may be implemented by software, hardware, firmware or any combination thereof. When implemented by software, all or part of the embodiments may be implemented in the form of a computer program product.

[0124] The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the process or function described in the embodiment of the present application is generated in whole or in part. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices. The computer instructions may be stored in a computer-readable storage medium, or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, the computer instructions may be transmitted from a website site, a computer, a training device, or a data center by wired (e.g., coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) mode to another website site, computer, training device, or data center. The computer-readable storage medium may be any available medium that a computer can store or a data storage device such as a training device, a data center, etc. that includes one or more available media integrations. The available medium may be a magnetic medium, (e.g., a floppy disk, a hard disk, a tape), an optical medium (e.g., a DVD), or a semiconductor medium (e.g., a solid-state drive (SSD)), etc.

Claims

1. A method for restoring power after a power outage in single crystal silicon production, characterized in that: include: After the power cabinet is powered off, monitoring whether the power cabinet is powered on; the power cabinet is used to connect to the external power grid and provide the external power grid to the single crystal furnace equipment, and the single crystal furnace equipment is used to produce single crystal silicon; and the single crystal furnace equipment obtains electric energy from the uninterruptible power supply after the power cabinet is powered off; When it is detected that the power cabinet is restored to power, the duration of the restoration of power is obtained, where the duration of the restoration of power represents the duration from the power failure to the restoration of power of the power cabinet; According to the time taken for the power restoration, a power restoration rule is obtained; the power restoration rule is different when the time taken for the power restoration is in a different time range; the power restoration rule includes a restoration operation parameter corresponding to each production system corresponding to the single crystal furnace equipment; the production system is used to support the single crystal furnace equipment in producing single crystal silicon; The production system at least includes: a vacuum system, a drive system, a gas circuit system, a heating system, and a control system; the control system is used to control the operation of the drive system, and the drive system is used to drive the single crystal furnace equipment; the heating system is used to heat the single crystal furnace equipment; the vacuum system is used to provide a pollution-free environment for the single crystal furnace equipment; the gas circuit system is used to maintain the pressure of the single crystal furnace equipment stable; Controlling the operation of the production system according to the recovery operation parameters in the power restoration rule; Wherein, when the time taken for power restoration is less than or equal to the first threshold, the restoration operation parameters corresponding to each of the production systems in the power restoration rule are consistent with the historical operation parameters of the corresponding production system before the power cabinet was powered off; When the time taken for power restoration is greater than the first threshold value and less than or equal to the second threshold value, in the power restoration rule, the vacuum system corresponds to two restoration stages, and the heating system, the gas circuit system, the control system and the drive system respectively correspond to one restoration stage; the power restoration rule includes: the first operating parameters of the vacuum system corresponding to the first restoration stage and the second operating parameters of the second restoration stage; and the restoration operating parameters of the heating system, the gas circuit system, the control system and the drive system in their respective restoration stages; When the time taken to restore power is greater than the second threshold, in the power restoration rule, the vacuum system, the heating system, the gas system, the control system and the drive system respectively have four recovery stages; the power restoration rule includes: recovery operation parameters corresponding to each recovery stage of each production system; there is a stage order between the four recovery stages, and the recovery operation parameters in the last recovery stage of the four recovery stages are the historical operation parameters of the corresponding production system before the power cabinet is powered off.

2. The method according to claim 1, characterized in that There is a stage order between the recovery stages corresponding to each of the production systems; Among them, when the time taken for the power restoration is greater than the first threshold, the recovery operation parameters corresponding to each of the production systems in the last recovery stage are consistent with the historical operation parameters of the corresponding production system before the power cabinet was powered off.

3. The method according to claim 1, characterized in that Monitoring whether the power cabinet is restored to power includes at least: Monitoring the communication status between the control system and the power cabinet; When it is monitored that the communication status indicates that the communication between the control system and the power cabinet is smooth, it is determined that the power cabinet is powered on.

4. The method according to claim 3, characterized in that The time required to obtain power restoration shall include at least: Reading the recorded time from the timer to obtain the time taken for power restoration; the timer starts timing when the power cabinet detects a power outage and stops timing when the power cabinet detects power restoration; The fact that the power supply cabinet is detected to be powered off includes: the fact that the communication status between the power supply cabinet and the control system is detected to represent that the communication between the control system and the power supply cabinet is interrupted.

5. A device for restoring power after a power outage in single crystal silicon production, characterized in that: include: A power restoration monitoring unit is used to monitor whether the power cabinet is restored after the power cabinet is powered off; the power cabinet is used to connect to the external power grid and provide the external power grid to the single crystal furnace equipment, and the single crystal furnace equipment is used to produce single crystal silicon; and the single crystal furnace equipment obtains electric energy from the uninterruptible power supply after the power cabinet is powered off; A duration obtaining unit, used to obtain the duration of power restoration when monitoring that the power cabinet is restored to power, wherein the duration of power restoration represents the duration from power failure to power restoration of the power cabinet; A rule obtaining unit, used for obtaining a power restoration rule according to the power restoration time; the power restoration time is different in the time range, and the obtained power restoration rule is different; the power restoration rule includes the recovery operation parameters corresponding to each production system corresponding to the single crystal furnace equipment; the production system is used to support the single crystal furnace equipment to produce single crystal silicon; The production system at least includes: a vacuum system, a drive system, a gas circuit system, a heating system, and a control system; the control system is used to control the operation of the drive system, and the drive system is used to drive the single crystal furnace equipment; the heating system is used to heat the single crystal furnace equipment; the vacuum system is used to provide a pollution-free environment for the single crystal furnace equipment; the gas circuit system is used to maintain the pressure of the single crystal furnace equipment stable; A recovery control unit, used to control the operation of the production system according to the recovery operation parameters in the power recovery rule; Wherein, when the time taken for power restoration is less than or equal to the first threshold, the restoration operation parameters corresponding to each of the production systems in the power restoration rule are consistent with the historical operation parameters of the corresponding production system before the power cabinet was powered off; When the time taken for power restoration is greater than the first threshold value and less than or equal to the second threshold value, in the power restoration rule, the vacuum system corresponds to two restoration stages, and the heating system, the gas circuit system, the control system and the drive system respectively correspond to one restoration stage; the power restoration rule includes: the first operating parameters of the vacuum system corresponding to the first restoration stage and the second operating parameters of the second restoration stage; and the restoration operating parameters of the heating system, the gas circuit system, the control system and the drive system in their respective restoration stages; When the time taken to restore power is greater than the second threshold, in the power restoration rule, the vacuum system, the heating system, the gas system, the control system and the drive system respectively have four recovery stages; the power restoration rule includes: recovery operation parameters corresponding to each recovery stage of each production system; there is a stage order between the four recovery stages, and the recovery operation parameters in the last recovery stage of the four recovery stages are the historical operation parameters of the corresponding production system before the power cabinet is powered off.

6. An electronic device, characterized in that: The method comprises at least one processor and a memory connected to the processor, wherein: The memory is used to store computer programs; The processor is used to execute the computer program so that the electronic device can implement the method for restoring power after a power outage in single crystal silicon production as described in any one of claims 1 to 4.

7. A computer storage medium, characterized in that: The storage medium carries one or more computer programs, which, when executed by an electronic device, enable the electronic device to implement the method for restoring power after a power outage in single crystal silicon production as described in any one of claims 1 to 4.

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