Semiconductor production workshop dehumidification air purification equipment

Abstract

The present invention discloses dehumidification air purification equipment for a semiconductor production workshop, relates to the field of workshop dehumidification, solves the problem that existing dehumidifiers are prone to cause scale accumulation on evaporator blades, comprises: a dehumidification box body and an evaporator, a water collecting box located below the evaporator is slidably installed on the inner side of the dehumidification box body, a mounting box is fixedly installed on the top of the dehumidification box body, a mounting rod is arranged inside the mounting box, a plurality of mounting rings distributed at equal distances are fixedly connected to the outer side of the mounting rod, a plurality of sponge strips in central symmetry are fixedly connected to the outer side of the mounting ring; further comprises: a cleaning mechanism for cleaning water stains adhered to the evaporator, the cleaning mechanism is installed between the mounting box and the dehumidification box body; the present invention uses the cleaning mechanism to enable a plurality of sponge strips to quickly clean the blades, solves the problem that residual water on the evaporator blades is prone to cause scale, and thus achieves a quick cleaning effect.

Description

Technical Field

[0001] The invention relates to the field of workshop dehumidification, in particular to dehumidification air purification equipment for a semiconductor production workshop. Background Art

[0002] The semiconductor production workshop is one of the most advanced production environments in the field of modern science and technology. It is specially used for the production of semiconductor products and needs to maintain extremely high cleanliness to ensure the quality and performance of semiconductor products. The temperature and humidity need to be precisely controlled. The relative humidity is generally controlled in the range of 30% to 50% to avoid problems such as bacterial growth and static charge accumulation.

[0003] In order to control the humidity in the semiconductor production workshop, it is necessary to humidify and dehumidify the workshop respectively, so as to control the humidity in the workshop within an appropriate range and provide a stable environment for the production of semiconductors. In the dehumidification process, a dehumidifier is usually used to inhale the air in the workshop. After passing through the evaporator, the water molecules in the air will condense into water droplets due to contact with the cold surface. The treated dry air is then discharged out of the machine. With the long-term use of the dehumidifier, if the sticky water droplets on the blades of the evaporator are not cleaned immediately, scale will appear on the pipes. Due to the accumulation of scale, the dehumidification effect of the air is reduced, and it is difficult to control the humidity in the workshop. Summary of the invention

[0004] The purpose of the present invention is to provide a dehumidification air purification device for a semiconductor production workshop to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] The dehumidification air purification equipment of a semiconductor production workshop comprises: a dehumidification box and an evaporator fixedly installed inside the dehumidification box, which is used to condense water in the air into water, a water collecting box located below the evaporator is slidably installed on the inner side of the dehumidification box, which is used to collect water sliding down from the evaporator, a mounting box is fixedly installed on the top of the dehumidification box, a mounting rod is arranged inside the mounting box, a plurality of mounting rings distributed equidistantly are fixedly connected to the outer side of the mounting rod, a plurality of sponge strips symmetrically arranged at the center are fixedly connected to the outer side of the mounting ring, so as to facilitate the adsorption of water on the evaporator blades; it also comprises: a cleaning mechanism, which is used to clean the water stains stuck on the evaporator, and the cleaning mechanism is installed between the mounting box and the dehumidification box; a drainage mechanism, which is used to squeeze out the residual water on the sponge strip, and the drainage mechanism is installed inside the dehumidification box; a water collecting mechanism, which is used to absorb and collect the water in the water collecting box, and the water collecting mechanism is installed inside the water collecting box.

[0007] Preferably, the cleaning mechanism includes a water guide plate arranged on the inner side of the installation box, the top of the water guide plate is an arc-shaped structure, which is convenient for covering the sponge strip, both ends of the water guide plate are in contact with the inner side of the installation box, the top of the dehumidification box body is provided with an opening corresponding to the bottom of the installation box, both ends of the water guide plate are fixedly connected with a mounting plate, the mounting rod is located between the two mounting plates, the side of the water guide plate away from the mounting rod is fixedly connected with a moving block, and the top of the dehumidification box body is fixedly installed with a driving motor, and the driving motor can rotate forward and reverse A T-shaped bracket is fixedly installed on the inner side of the dehumidification box body, and a screw rod matching the moving block is rotatably installed on the top of the T-shaped bracket. The output end of the driving motor is connected to the end of the screw rod away from the T-shaped bracket. The screw rod is driven by the driving motor to drive the water guide plate to move along the dehumidification box body by moving. Both ends of the mounting rod are fixedly connected with a rotating rod, and a gear is fixedly connected to the outer side of the rotating rod. A double-sided rack plate matching the gear is provided on the outer side of the rotating rod, so that the gear moves along any one side of the double-sided rack plate.

[0008] Preferably, the drainage mechanism includes a guide plate arranged on the outer side of the double-sided rack plate, the guide plate is fixedly installed on the inner side of the dehumidification box body, a slider is arranged on the outer side of the rotating rod, the slider is fixedly connected to the sliding rod at one end close to the rotating rod, a cavity for limiting the sliding movement of the sliding rod is provided on the outer side of the rotating rod, a spring is fixedly connected between the rotating rod and the slider, two guide grooves 1 are provided on the outer side of the guide plate which are centrally symmetrical for limiting the sliding movement of the slider, the double-sided rack plate is fixedly installed on the outer side of the guide plate and is located between the two guide grooves 1, and guide grooves 1 are provided between the two ends of the two guide grooves 1. The guide groove is inclined so that the slider can pass from the current guide groove to the guide groove and enter another guide groove. One end of the guide groove is fixedly connected to a guide bar at the top of the guide groove. The outer side of the guide bar is inclined so as to facilitate the movement of the slider and compress the spring. The slider can move alternately on the two guide grooves. Positioning rings are fixedly installed at both ends of the mounting rod. A spring is fixedly connected between the positioning ring and the water guide plate. A long groove is provided on the outer side of the mounting plate for the limiting sliding of the mounting rod, so that the mounting rod can drive the sponge strip on the mounting ring to stick to the water guide plate.

[0009] Preferably, the water collecting mechanism includes a filter plate arranged on the inner side of the water collecting box, a water collecting chamber for fixing the filter plate on the inner side of the water collecting box, the area of ​​the water collecting chamber is larger than the area of ​​the inner side of the water collecting box, and a water-absorbing sponge in contact with the inner side of the water collecting box is arranged on the top of the filter plate to facilitate the adsorption of falling water and prevent water vapor from returning to the dehumidification box body, and a movable plate in contact with the top of the water collecting chamber is arranged on the top of the water-absorbing sponge, and a plurality of drainage holes equidistantly distributed are arranged on the top of the movable plate, and one end of the movable plate is rotatably installed on the inner side of the water collecting chamber to facilitate the squeezing of the movable plate so that the water in the water-absorbing sponge passes through the filter plate and enters the bottom of the water collecting chamber.

[0010] Preferably, a pull plate is fixedly connected to the outer side of the water collecting box, a groove for limiting and inserting the pull plate is provided on the outer side of the dehumidification box body, and a pull groove is provided on the outer side of the pull plate to facilitate taking out the water collecting box.

[0011] Preferably, a drain outlet is provided on a side of the water collecting tank away from the pull plate, and a sealing plug is inserted into the inner limit position of the drain outlet to facilitate draining the water in the water collecting tank.

[0012] Preferably, four universal pulleys in a rectangular array are fixedly connected to the bottom of the dehumidification box to facilitate the movement of the dehumidification box.

[0013] Preferably, both ends of the mounting rod are fixedly connected with collars, and the long groove of the mounting plate is provided with a slot for limiting the sliding of the collars, so as to facilitate the positioning of the mounting rod.

[0014] Preferably, the bottom of the water-absorbing sponge and the filter plate are both inclined structures, so that the swinging movable plate can squeeze the water-absorbing sponge.

[0015] Preferably, a pressure column located directly above the movable plate is fixedly connected to the bottom of the water guide plate to facilitate the water guide plate to press the movable plate.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] The present invention uses a cleaning mechanism to move the mounting rod downward so that the sponge strips can clean the water remaining on the evaporator blades in time, and the mounting rod can keep rotating while moving so that multiple sponge strips can quickly clean the blades, thereby solving the problem that the water remaining on the evaporator blades is prone to causing scale, thereby achieving a quick cleaning effect.

[0018] The present invention uses a drainage mechanism to make the mounting rod close to the outer side of the water guide plate when the sponge bar moves upward, and keep the mounting rod rotating. The sponge bar is squeezed by utilizing the reduced distance between the mounting rod and the water guide plate, so that the water in the sponge bar can be quickly discharged, thereby achieving the effect of automatic water removal.

[0019] The present invention uses a water collecting mechanism to enable the water-absorbing sponge in the water collecting box to absorb water discharged from the sponge strip and water sliding down the evaporator, and squeezes the water-absorbing sponge through the movement of the water guide plate to make the water enter the bottom of the water collecting box, thereby preventing the water vapor in the water collecting box from returning to the water collecting box, thereby achieving the effect of facilitating water collection and storage. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0021] Figure 2 It is a schematic diagram of the structure of the evaporator and the installation box in the present invention;

[0022] Figure 3 This is a schematic diagram of the structure of the sponge strip and the water guide plate in the present invention;

[0023] Figure 4 It is a schematic diagram of the structure of the water collecting box and the filter plate in the present invention;

[0024] Figure 5 It is a schematic diagram of the structure of the mounting plate and the mounting rod in the present invention;

[0025] Figure 6 It is a schematic diagram of the structure of the slide bar and the slide block in the present invention;

[0026] Figure 7 It is a schematic diagram of the structure of the guide plate and the double-sided rack plate in the present invention;

[0027] Figure 8 It is a schematic diagram of the structure of the movable plate and the water-absorbing sponge in the present invention.

[0028] In the figure: 1. dehumidification box; 2. evaporator; 3. water collecting box; 4. installation box; 5. installation rod; 6. installation ring; 7. sponge strip; 8. water guide plate; 9. installation plate; 10. moving block; 11. T-shaped bracket; 12. screw rod; 13. rotating rod; 14. gear; 15. double-sided rack plate; 16. guide plate; 17. slider; 18. slide rod; 19. spring one; 20. guide groove one; 21. guide groove two; 22. guide baffle; 23. positioning ring; 24. spring two; 25. filter plate; 26. water-absorbing sponge; 27. movable plate; 28. pull plate; 29. ​​sealing plug; 30. universal pulley; 31. collar; 32. pressure column; 33. driving motor. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative inspiration are within the scope of protection of the present invention.

[0030] Example 1: Please refer to Figure 1-Figure 8 The semiconductor production workshop dehumidification air purification equipment shown in the figure includes a dehumidification box 1 and an evaporator 2 fixedly installed inside the dehumidification box 1, which is used to condense water in the air into water. A water collecting box 3 located below the evaporator 2 is slidably installed on the inner side of the dehumidification box 1, which is used to collect water sliding down from the evaporator 2. A mounting box 4 is fixedly installed on the top of the dehumidification box 1, and a mounting rod 5 is arranged inside the mounting box 4. A plurality of mounting rings 6 distributed equidistantly are fixedly connected to the outer side of the mounting rod 5, and a plurality of sponge strips 7 that are centrally symmetrical are fixedly connected to the outer side of the mounting ring 6, so as to facilitate the adsorption of water on the blades of the evaporator 2; it also includes: a cleaning mechanism for cleaning water stains on the evaporator 2, and the cleaning mechanism is installed between the mounting box 4 and the dehumidification box 1; a drainage mechanism for squeezing out the residual water on the sponge strip 7, and the drainage mechanism is installed inside the dehumidification box 1; a water collecting mechanism for adsorbing and collecting water in the water collecting box 3, and the water collecting mechanism is installed inside the water collecting box 3.

[0031] The cleaning mechanism includes a water guide plate 8 arranged on the inner side of the installation box 4. The top of the water guide plate 8 is an arc-shaped structure, which is convenient for covering the sponge strip 7. Both ends of the water guide plate 8 are in contact with the inner side of the installation box 4. The top of the dehumidification box body 1 is provided with an opening corresponding to the bottom of the installation box 4. Both ends of the water guide plate 8 are fixedly connected with mounting plates 9. The mounting rod 5 is located between the two mounting plates 9. The side of the water guide plate 8 away from the mounting rod 5 is fixedly connected with a moving block 10. The top of the dehumidification box body 1 is fixedly installed with a driving motor 33, and the driving motor 33 can rotate forward and reverse. The inner side of the dehumidification box body 1 is fixedly installed with a A T-shaped bracket 11 is rotatably mounted on the top of the T-shaped bracket 11 with a screw 12 that matches the moving block 10. The output end of the driving motor 33 is docked with the end of the screw 12 that is away from the T-shaped bracket 11. The driving motor 33 drives the screw 12, so that the screw 12 drives the water guide plate 8 to move along the dehumidification box body 1 through the moving block 10. Both ends of the mounting rod 5 are fixedly connected with a rotating rod 13, and the outer side of the rotating rod 13 is fixedly connected with a gear 14. The outer side of the rotating rod 13 is provided with a double-sided rack plate 15 that matches the gear 14, so that the gear 14 moves along any side of the double-sided rack plate 15;

[0032] Starting the drive motor 33 can drive the screw 12 to rotate, so that the screw 12 drives the water guide plate 8 from the inner side of the installation box 4 into the dehumidification box body 1 through the moving block 10, and the water guide plate 8 drives the installation rod 5 to move downward synchronously through the installation plate 9, so that the installation rod 5 moves downward along the blades on the evaporator 2 through the sponge strip 7 on the installation ring 6, and when the installation rod 5 moves, it drives the gear 14 on the rotating rod 13 to move along the outer side of the double-sided rack plate 15, so that the gear 14 drives the installation rod 5 to rotate while moving, and can drive the sponge strip 7 to roll along the blades of the evaporator 2, so that the residual water on the evaporator 2 can be cleaned and sent downward into the water collecting tank 3, thereby solving the problem that the residual water on the evaporator 2 is prone to scale generation, thereby achieving a quick cleaning effect.

[0033] The drainage mechanism includes a guide plate 16 arranged on the outside of the double-sided rack plate 15, the guide plate 16 is fixedly installed on the inner side of the dehumidification box body 1, a slider 17 is arranged on the outside of the rotating rod 13, and a slider 18 is fixedly connected to one end of the slider 17 close to the rotating rod 13, and a cavity for the slider 18 to slide in a limited position is provided on the outside of the rotating rod 13, and a spring 19 is fixedly connected between the rotating rod 13 and the slider 17. Two symmetrical guide grooves 20 for the slider 17 to slide in a limited position are provided on the outside of the guide plate 16, and the double-sided rack plate 15 is fixedly installed on the outside of the guide plate 16 and is located between the two guide grooves 20, and a guide groove 21 is provided between the two ends of the two guide grooves 20, and the guide groove 21 The inclined structure enables the slider 17 to pass from the current guide groove 1 20 to the guide groove 21 and enter another guide groove 1 20. A guide bar 22 is fixedly connected to one end of the guide groove 21 at the top of the guide groove 1 20. The outer side of the guide bar 22 is an inclined structure, which is convenient for the slider 17 to move and compress the spring 19, so as to realize the alternate movement of the slider 17 on the two guide grooves 1 20. Positioning rings 23 are fixedly installed at both ends of the mounting rod 5. A spring 24 is fixedly connected between the positioning ring 23 and the water guide plate 8. A long strip groove for the mounting rod 5 to limit the sliding of the mounting plate 9 is provided on the outer side of the mounting plate 9, so that the mounting rod 5 can drive the sponge strip 7 on the mounting ring 6 to stick to the water guide plate 8.

[0034] When the mounting rod 5 moves, the mounting rod 5 drives the slide bar 18 to move through the rotating rod 13, so that the slide bar 18 drives the slider 17 to move along the guide groove 20 on the guide plate 16. When the slider 17 moves to the bottom end of the guide groove 20, the spring 24 is used to pull the mounting rod 5 through the positioning ring 23 to move along the long groove on the mounting plate 9, and the slider 17 can enter another guide groove 20 along the inclined surface of the guide groove 21. The mounting rod 5 pulls the sponge strip 7 on the mounting ring 6 to get close to the water guide plate 8, and when the water guide plate 8 moves upward, the gear 14 can mesh with the double-sided rack plate 15, so that the gear 14 drives When the mounting rod 5 rotates, the reduced distance between the mounting rod 5 and the water guide plate 8 can be utilized to squeeze out the water in the sponge strip 7 when the mounting rod 5 rotates, thereby achieving the effect of automatic water removal, and when the slider 17 moves to the top of the guide groove 20, it can move upward along the inclined surface of the guide groove 21, and along the inclined surface of the guide baffle 22, so that the slider 17 compresses the spring 19, and when the slider 17 moves to another guide groove 20, the rebound force of the spring 19 is utilized to make the slider 17 abut against the inner side of the guide groove 20, thereby, when the water guide plate 8 moves up and down, the slider 17 can be moved alternately on the two guide grooves 20.

[0035] The water collecting mechanism includes a filter plate 25 arranged on the inner side of the water collecting box 3. A water collecting chamber for fixing the filter plate 25 is provided on the inner side of the water collecting box 3. The area of ​​the water collecting chamber is larger than the area of ​​the inner side of the water collecting box 3. A water absorbing sponge 26 in contact with the inner side of the water collecting box 3 is provided on the top of the filter plate 25 to facilitate the absorption of falling water and prevent the water vapor from returning to the dehumidification box 1. A movable plate 27 in contact with the top of the water collecting chamber is provided on the top of the water absorbing sponge 26. A plurality of drainage holes equidistantly distributed are provided on the top of the movable plate 27. One end of the movable plate 27 is rotatably installed on the inner side of the water collecting chamber to facilitate squeezing the movable plate 27 so that the water in the water absorbing sponge 26 passes through the filter plate 25 and enters the bottom of the water collecting chamber.

[0036] When the water guide plate 8 moves downward, the bottom of the water guide plate 8 contacts the top of the movable plate 27, causing the movable plate 27 to swing downward, squeezing the water-absorbing sponge 26, so that the water in the water-absorbing sponge 26 passes through the filter plate 25 and is discharged downward into the bottom of the water collecting box 3, so that the water-absorbing sponge 26 can quickly catch the water falling from the evaporator 2, thereby improving the cleanliness of the dehumidification box 1, and the water-absorbing sponge 26 can provide a shield for the bottom of the water collecting box 3 to prevent water vapor from returning to the dehumidification box 1, thereby achieving the effect of facilitating water collection and storage.

[0037] Working principle: First, the dehumidification box 1 cooperates with the evaporator 2 to dehumidify and purify the air in the workshop. Then, the user starts the driving motor 33, and the driving motor 33 drives the screw 12 to rotate, so that the screw 12 drives the water guide plate 8 along the inner side of the installation box 4 and enters the dehumidification box 1 through the moving block 10. At the same time, the water guide plate 8 drives the installation rod 5 to move downward synchronously through the installation plate 9, and the installation rod 5 drives the sponge strip 7 on the installation ring 6 to move downward along the blades on the evaporator 2, and the installation rod 5 drives the rotating rod 13 to move synchronously, so that the rotating rod 13 passes The slide bar 18 drives the slide block 17 to move downward along the inner side of the guide groove 20, and the gear 14 on the rotating rod 13 moves along the outer side of the double-sided rack plate 15, so that the gear 14 drives the mounting rod 5 to rotate, and the mounting rod 5 drives the sponge strip 7 to rotate through the mounting ring 6, so that the multiple sponge strips 7 on the mounting ring 6 roll along the blades of the evaporator 2, so that the residual water on the evaporator 2 can be cleaned and sent downward into the water collecting box 3. When the slide block 17 moves to the bottom end of the guide groove 20, the spring 24 is used to make the spring 24 pass through the spring 24 to release the water. The mounting rod 5 is pulled by the positioning ring 23 to move along the long groove on the mounting plate 9, and the slider 17 can enter another guide groove 1 20 along the inclined surface of the guide groove 21. The mounting rod 5 pulls the sponge strip 7 on the mounting ring 6 to be close to the water guide plate 8. At this time, the bottom of the water guide plate 8 contacts the top of the movable plate 27, so that the water guide plate 8 presses the movable plate 27 to swing downward, squeezes the water-absorbing sponge 26, and makes the water in the water-absorbing sponge 26 pass through the filter plate 25 and discharge downward into the bottom of the water collecting box 3. Finally, the driving motor 33 rotates in the opposite direction to make the water guide plate 8 close to the water guide plate 8. The plate 8 moves upward, the slider 17 moves upward along the corresponding guide groove 20, and the gear 14 on the rotating rod 13 is meshed with the double-sided rack plate 15, so that the gear 14 drives the mounting rod 5 to rotate, and the reduced distance between the mounting rod 5 and the water guide plate 8 can be utilized to make the mounting rod 5 squeeze out the water in the sponge strip 7 when rotating, and the water-absorbing sponge 26 quickly catches the falling water, thereby achieving the effect of rapid water removal and automatic drainage, solving the problem that the scale remaining on the evaporator 2 is easy to cause scale, and maintaining the dehumidification efficiency of the dehumidification box 1 on the air in the workshop.

[0038] Example 2: Please refer to Figure 1 and Figure 8 The present embodiment further explains the first embodiment. A pull plate 28 is fixedly connected to the outer side of the water collecting box 3 in the figure. A groove for limiting and inserting the pull plate 28 is provided on the outer side of the dehumidification box body 1. A pull groove is provided on the outer side of the pull plate 28 to facilitate taking out the water collecting box 3. A drain outlet is provided on the side of the water collecting box 3 away from the pull plate 28. A sealing plug 29 is limitedly inserted on the inner side of the drain outlet to facilitate draining the water in the water collecting box 3. Four universal pulleys 30 in a rectangular array are fixedly connected to the bottom of the dehumidification box body 1 to facilitate moving the dehumidification box body 1.

[0039] In this embodiment: the user can remove the water collecting box 3 from the dehumidification box body 1 through the pull groove on the pull plate 28, and open the sealing plug 29 on the water collecting box 3 to drain the water in the water collecting box 3, and push the dehumidification box body 1 to drive the universal pulley 30 to move along the ground, which is convenient for mobile transportation and improves the convenience of using the dehumidification box body 1.

[0040] Example 3: Please refer to Figure 6 and Figure 8 This embodiment further illustrates other embodiments. Both ends of the mounting rod 5 shown in the figure are fixedly connected with a ring 31. The long groove of the mounting plate 9 is provided with a slot for the ring 31 to limit the sliding of the ring 31, which is convenient for positioning the mounting rod 5. The bottom of the water-absorbing sponge 26 and the filter plate 25 are both inclined structures, which is convenient for the swinging movable plate 27 to squeeze the water-absorbing sponge 26. The bottom of the water guide plate 8 is fixedly connected with a pressure column 32 located directly above the movable plate 27, which is convenient for the water guide plate 8 to press the movable plate 27.

[0041] In this embodiment: when the mounting rod 5 rotates or moves, it can drive the ring 31 to rotate or move along the groove on the mounting plate 9, thereby improving the stability of the installation of the mounting rod 5, and when the water guide plate 8 moves downward, the top of the movable plate 27 can be pressed by the pressure column 32, so that the movable plate 27 is tilted to squeeze the water-absorbing sponge 26, thereby facilitating the drainage downward along the inclined filter plate 25.

[0042] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0043] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. Dehumidification air purification equipment for semiconductor production workshop, characterized in that: include: A dehumidification box (1) and an evaporator (2) fixedly mounted inside the dehumidification box (1); a water collecting box (3) located below the evaporator (2) is slidably mounted on the inner side of the dehumidification box (1); a mounting box (4) is fixedly mounted on the top of the dehumidification box (1); a mounting rod (5) is arranged inside the mounting box (4); a plurality of mounting rings (6) distributed at equal distances are fixedly connected to the outer side of the mounting rod (5); a plurality of sponge strips (7) in a centrally symmetrical manner are fixedly connected to the outer side of the mounting ring (6); and further comprising: A cleaning mechanism is used to clean water stains on the evaporator (2), and the cleaning mechanism is installed between the installation box (4) and the dehumidification box (1); the cleaning mechanism comprises a water guide plate (8) arranged on the inner side of the installation box (4), the top of the dehumidification box (1) is provided with an opening corresponding to the bottom of the installation box (4), a moving block (10) is fixedly connected to the side of the water guide plate (8) away from the installation rod (5), a driving motor (33) is fixedly installed on the top of the dehumidification box (1), and the dehumidification box (1) is provided with a driving motor (33). 1) is fixedly mounted on the inner side of a T-shaped bracket (11), a screw rod (12) cooperating with the moving block (10) is rotatably mounted on the top of the T-shaped bracket (11), an output end of the driving motor (33) is butted against an end of the screw rod (12) away from the T-shaped bracket (11), both ends of the mounting rod (5) are fixedly connected to a rotating rod (13), a gear (14) is fixedly connected to the outer side of the rotating rod (13), and a double-sided rack plate (15) cooperating with the gear (14) is arranged on the outer side of the rotating rod (13); A drainage mechanism is used to squeeze out the residual water on the sponge strip (7), and the drainage mechanism is installed inside the dehumidification box (1); the drainage mechanism includes a guide plate (16) arranged on the outside of the double-sided rack plate (15), and the guide plate (16) is fixedly installed on the inside of the dehumidification box (1); a slider (17) is arranged on the outside of the rotating rod (13), and the slider (17) is fixedly connected to the end of the slider (17) close to the rotating rod (13) with a slider (18); the outside of the rotating rod (13) is provided with a cavity for the slider (18) to slide in a limited position; a spring (19) is fixedly connected between the rotating rod (13) and the slider (17); the outside of the guide plate (16) is provided with two centrally symmetrical guide grooves (20) for the slider (17) to slide in a limited position; the double-sided rack plate (15) is fixedly installed on the outside of the guide plate (16) and is located at the two ends. A second guide groove (21) is provided between the two ends of the two guide grooves (20), the second guide groove (21) is in an inclined structure, one end of the second guide groove (21) located at the top of the first guide groove (20) is fixedly connected with a guide bar (22), the outer side of the guide bar (22) is in an inclined structure, positioning rings (23) are fixedly installed at both ends of the mounting rod (5), a second spring (24) is fixedly connected between the positioning ring (23) and the water guide plate (8), the top of the water guide plate (8) is an arc structure, both ends of the water guide plate (8) are in contact with the inner side of the mounting box (4), both ends of the water guide plate (8) are fixedly connected with a mounting plate (9), the mounting rod (5) is located between the two mounting plates (9), and the outer side of the mounting plate (9) is provided with a long strip groove for limiting the sliding of the mounting rod (5); The water collecting mechanism is used for absorbing and collecting the water in the water collecting box (3); the water collecting mechanism is installed inside the water collecting box (3).

2. The semiconductor production workshop dehumidification air purification equipment according to claim 1, characterized in that: The water collecting mechanism comprises a filter plate (25) arranged on the inner side of the water collecting box (3); a water collecting cavity for fixing the filter plate (25) is provided on the inner side of the water collecting box (3); the area of ​​the water collecting cavity is larger than the area of ​​the inner side of the water collecting box (3); a water absorbing sponge (26) in contact with the inner side of the water collecting box (3) is provided on the top of the filter plate (25); a movable plate (27) in contact with the top of the water collecting cavity is provided on the top of the water absorbing sponge (26); a plurality of drainage holes equidistantly distributed are provided on the top of the movable plate (27); one end of the movable plate (27) is rotatably mounted on the inner side of the water collecting cavity.

3. The semiconductor production workshop dehumidification air purification equipment according to claim 1, characterized in that: A pull plate (28) is fixedly connected to the outer side of the water collecting box (3), a groove for limiting insertion of the pull plate (28) is provided on the outer side of the dehumidification box body (1), and a pull groove is provided on the outer side of the pull plate (28).

4. The dehumidification air purification equipment for semiconductor production workshop according to claim 3, characterized in that: The water collecting box (3) is provided with a drainage outlet on a side away from the pull plate (28), and a sealing plug (29) is inserted into the inner side of the drainage outlet.

5. The semiconductor production workshop dehumidification air purification equipment according to claim 1, characterized in that: Four universal pulleys (30) in a rectangular array are fixedly connected to the bottom of the dehumidification box (1).

6. The semiconductor production workshop dehumidification air purification equipment according to claim 1, characterized in that: Both ends of the mounting rod (5) are fixedly connected with a collar (31), and the long groove of the mounting plate (9) is provided with a slot for limiting the sliding of the collar (31).

7. The dehumidification air purification equipment for semiconductor production workshop according to claim 2, characterized in that: The bottom of the water-absorbing sponge (26) and the filter plate (25) are both inclined structures.

8. The dehumidification air purification equipment for semiconductor production workshop according to claim 2, characterized in that: The bottom of the water guide plate (8) is fixedly connected to a pressure column (32) located directly above the movable plate (27).

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