Motion position compensation method, device, equipment and storage medium

Abstract

The present application provides a motion position compensation method, device, equipment and storage medium, which relates to the field of laser cutting technology, and solves the problem in the related technology that it is difficult to achieve low-cost and high-precision position compensation when the processing temperature changes greatly. The present application scheme calibrates the position of the calibration line at different temperatures, thereby determining the curve equation within the corresponding temperature range, and then the position error value of each calibration line at the current working temperature can be determined through the corresponding curve equation, so that the position error value is used as the compensation value to compensate the coordinate position fed back by the grating ruler, thereby achieving accurate detection of the calibration line position.

Description

Technical Field

[0001] The present application relates to the field of laser cutting technology, and in particular to a motion position compensation method, device, equipment and storage medium. Background Art

[0002] The grating ruler is a key measuring tool in laser cutting processing. It is used in precision motion control and position detection systems. The principle of the grating ruler is to detect position changes through the displacement of the grating line, thereby achieving high-precision position measurement. In actual laser cutting processing, in order to meet production efficiency, it is required that the equipment be processed and produced in the shortest time after startup to reduce the warm-up time. However, the grating ruler will produce thermal expansion or contraction with changes in ambient temperature, causing deviations in the measurement results, increasing the processing positioning error and affecting the accuracy of precision motion control. In this regard, the relevant technology usually uses materials with low thermal expansion coefficients to manufacture grating rulers, or uses complex hardware temperature compensation devices, but these methods often make the cost high and are not suitable for widespread promotion and application. Summary of the invention

[0003] The present application provides a motion position compensation method, device, equipment and storage medium, which solves the problem in the related art that it is difficult to achieve low-cost and high-precision position compensation when the processing temperature changes greatly. The present application compensates for the error in grating scale measurement caused by temperature change, thereby achieving low-cost and high-precision position compensation when the processing temperature changes greatly.

[0004] In a first aspect, the present application provides a motion position compensation method, which is applied to laser cutting equipment. A motion platform, a calibration camera, a grating ruler and a temperature sensor are arranged in a working chamber of the laser cutting equipment; the motion platform moves along a first axial direction under the drive of a linear motor; the grating ruler is arranged on one side of the motion platform and the installation direction of the grating ruler is parallel to the first axial direction, and the reading head of the grating ruler is fixed on the mover of the linear motor; the calibration camera is located above the motion platform to shoot the calibration line of the object to be measured placed on the motion platform; the temperature sensor is used to detect the temperature of the working chamber;

[0005] The motion position compensation method comprises:

[0006] Determine a plurality of temperature nodes to be set between the rated operating temperature and the maximum operating temperature, the temperature nodes including nodes corresponding to the rated operating temperature and nodes corresponding to the maximum operating temperature;

[0007] Based on multiple temperature nodes, the temperature of the working cavity is maintained at the temperature corresponding to the temperature node in turn, and the linear motor is controlled to drive the motion platform so that each calibration line of the object to be measured is aligned with the field of view center of the calibration camera in turn, and the calibration position fed back by the grating ruler is recorded in turn, and the calibration position is the coordinate of the calibration line of the object to be measured in the first axial direction;

[0008] After the position calibration of the calibration line to be measured is completed for the temperature corresponding to each temperature node, a calibration compensation table is generated, which includes the position error value between the calibration position of each calibration line at the temperature corresponding to each temperature node and the calibration position at the rated working temperature;

[0009] Based on the calibration compensation table, curve fitting is performed on the position error value of each calibration line in different temperature ranges, and the curve equation corresponding to each calibration line is determined so that the laser cutting equipment can determine the position compensation value according to the curve equation and the actual working temperature.

[0010] In the second aspect, the present application also provides a motion position compensation device, which is applied to laser cutting equipment. A motion platform, a calibration camera, a grating ruler and a temperature sensor are arranged in the working chamber of the laser cutting equipment; the motion platform moves along the first axial direction under the drive of the linear motor; the grating ruler is arranged on one side of the motion platform and the installation direction of the grating ruler is parallel to the first axial direction, and the reading head of the grating ruler is fixed on the mover of the linear motor; the calibration camera is located above the motion platform to shoot the calibration line of the object to be measured placed on the motion platform; the temperature sensor is used to detect the temperature of the working chamber;

[0011] The motion position compensation device comprises:

[0012] A node configuration module, configured to determine a plurality of temperature nodes to be set between a rated operating temperature and a maximum operating temperature, wherein the temperature nodes include nodes corresponding to the rated operating temperature and nodes corresponding to the maximum operating temperature;

[0013] A position calibration module is configured to maintain the temperature of the working cavity at the temperature corresponding to the temperature node based on multiple temperature nodes, and control the linear motor to drive the motion platform so that each calibration line of the object to be measured is aligned with the field of view center of the calibration camera in sequence, and sequentially record the calibration position fed back by the grating ruler, and the calibration position is the coordinate of the calibration line of the object to be measured in the first axial direction;

[0014] A coordinate integration module is configured to generate a calibration compensation table after completing the position calibration of the calibration line to be measured for the temperature corresponding to each temperature node, wherein the calibration compensation table includes a position error value between the calibration position of each calibration line at the temperature corresponding to each temperature node and the calibration position at the rated working temperature;

[0015] The position compensation module is configured to perform curve fitting on the position error value of each calibration line in different temperature ranges based on the calibration compensation table, and determine the curve equation corresponding to each calibration line, so that the laser cutting equipment can determine the position compensation value according to the curve equation and the actual working temperature.

[0016] In a third aspect, the present application further provides a laser cutting device, the laser cutting device comprising:

[0017] one or more processors;

[0018] a storage device for storing one or more programs,

[0019] When one or more programs are executed by one or more processors, the one or more processors implement the motion position compensation method of the present application.

[0020] In a fourth aspect, the present application also provides a storage medium storing computer executable instructions, which are used to execute the motion position compensation method of the present application when executed by a processor.

[0021] The laser cutting equipment of the present application can use a grating scale made of general materials, without the need to use an expensive grating scale made of a low thermal expansion coefficient material, and can compensate for the grating scale measurement error caused by temperature changes, thereby achieving high-precision position compensation when the processing temperature changes significantly, thereby reducing production costs while improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic diagram of the structure of a laser cutting device provided in one embodiment of the present application.

[0023] Figure 2 A schematic diagram of the steps of a motion position compensation method provided in one embodiment of the present application.

[0024] Figure 3 A schematic diagram of the steps of moving a calibration line provided in one embodiment of the present application.

[0025] Figure 4 A schematic diagram of the structure of a motion position compensation device provided in one embodiment of the present application.

[0026] Figure 5 A schematic diagram of the structure of a laser cutting device provided in one embodiment of the present application. DETAILED DESCRIPTION

[0027] The embodiments of the present application are further described in detail below in conjunction with the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are only used to explain the embodiments of the present application, rather than to limit the embodiments of the present application. It should also be noted that, for ease of description, only the parts related to the embodiments of the present application rather than all structures are shown in the accompanying drawings, and those skilled in the art should be able to think of it after reading the specification of this application that as long as the technical features do not contradict each other, any combination of the technical features can constitute an optional implementation method.

[0028] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable when appropriate, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are generally a class, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally represents that the objects associated before and after are in an "or" relationship. In the description of the present application, "multiple" means two or more, and "several" means one or more.

[0029] The grating ruler is a key measuring tool in laser cutting. It is used in precision motion control and position detection systems. The principle of the grating ruler is to detect position changes through the displacement of the grating line, thereby achieving high-precision position measurement. In laser cutting, precise positioning is required according to the grating ruler to meet the processing accuracy requirements. At the same time, in order to meet the requirements of production efficiency, it is usually necessary to carry out processing and production within a short time after starting the machine to reduce the warm-up time, that is, the grating ruler must also ensure a small positioning error during the heating process.

[0030] However, the material size of the grating scale and the material to be processed will expand or contract with the change of ambient temperature, which will cause deviations in the measurement results, thereby increasing the processing positioning error and affecting the accuracy of precision motion control.

[0031] In order to solve this problem, the related technology usually uses materials with low thermal expansion coefficients to manufacture grating scales or adopts complex hardware temperature compensation devices. However, these solutions are often costly and complicated to implement, and are not suitable for widespread promotion and application.

[0032] In this regard, the present application provides a motion position compensation method, which is applied to laser cutting equipment. Figure 1 A schematic diagram of the structure of a laser cutting device provided in an embodiment of the present application is shown in FIG. Figure 1As shown, a motion platform 101, a calibration camera 102, a grating ruler 103 and a temperature sensor 104 are arranged in the working chamber of the laser cutting device. The motion platform 101 is arranged on a base, which can be a marble base.

[0033] Wherein, the motion platform 101 moves along the first axial direction under the drive of the linear motor, and an object to be measured is placed on the motion platform 101, and a wafer 105 is used as the object to be measured in the figure. The grating ruler 103 is arranged on one side of the motion platform 101 and the installation direction of the grating ruler 103 is parallel to the first axial direction, and the first axial direction is the coordinate axis direction of the coordinate system corresponding to the motion platform 101, such as the X-axis direction or the Y-axis direction. The reading head of the grating ruler 103 is fixed on the mover of the linear motor, and the calibration camera 102 is located above the motion platform 101 to shoot the calibration line of the object to be measured placed on the motion platform 101. The temperature sensor 104 is located on the motion platform 101 and is on the left side of the motion platform 101. The temperature sensor 104 is used to detect the temperature of the working cavity. It can be understood that in some implementations, the grating ruler 103 is fixedly arranged on the base.

[0034] Of course, it is conceivable that the laser cutting device also includes a processor and a memory. The processor and the memory may be connected via a bus or other means. In this regard, the motion position compensation method in the embodiment of the present application applied by the laser cutting device is executed by a processor, the number of which is one or more, and the processor may include a central processing unit (CPU), a microcontroller unit (MCU) and / or a field programmable gate array (FPGA) and other processing units.

[0035] As a computer-readable storage medium, the memory can be used to store software programs, computer executable programs and modules, such as program instructions / modules corresponding to the motion position compensation method in the embodiment of the present application. The memory can store computer programs required for at least one function, data created according to the use of the laser cutting device, etc. At present, at least the relevant computer program for implementing the motion position compensation method is stored in the memory, so that the processor implements the motion position compensation method based on the computer program stored in the memory.

[0036] Based on this, Figure 2 This is a schematic diagram of the steps of the motion position compensation method provided in an embodiment of the present application. When the motion position compensation method is executed by the above-mentioned laser cutting device, it is specifically executed by the processor thereon. Figure 2 The motion compensation method includes steps S110 to S140:

[0037] Step S110: determining a plurality of temperature nodes to be set between the rated operating temperature and the maximum operating temperature.

[0038] It is understandable that the rated operating temperature and the maximum operating temperature are both temperatures set for the corresponding laser cutting equipment, which are associated with the temperature in the working chamber of the laser cutting equipment. It is conceivable that the laser cutting equipment can be detected by a temperature sensor located in the working chamber. Among them, for the temperature nodes determined between the rated operating temperature and the maximum operating temperature, the processor can divide the temperature range between the rated operating temperature and the maximum operating temperature into multiple segments, with the starting point and the end point of each segment as the temperature node. It should be conceivable that the temperature node includes a node corresponding to the rated operating temperature and a node corresponding to the maximum operating temperature.

[0039] Step S120, based on multiple temperature nodes, maintain the temperature of the working chamber at the temperature corresponding to the temperature node in turn, and control the linear motor to drive the motion platform so that each calibration line of the object to be measured is aligned with the field of view center of the calibration camera in turn, and record the calibration position fed back by the grating ruler in turn, the calibration position is the coordinate of the calibration line of the object to be measured in the first axial direction.

[0040] It is understandable that, in the process of motion position compensation, a standard wafer or calibration board is placed on the motion platform as the object to be tested. When the object to be tested is a standard wafer, the calibration line on the object to be tested is the cutting line on the standard wafer; when the object to be tested is a calibration board, the calibration line on the object to be tested is the calibration line on the calibration board.

[0041] It should be conceived that a temperature control device is provided in the working chamber of the laser cutting device to regulate the temperature in the working chamber. Optionally, in one embodiment, the temperature control device includes a controller and a heating element, and the temperature of the working chamber is increased by controlling the operation of the heating element to radiate heat to the working chamber, for example, using a heating wire and a semiconductor cooling sheet to regulate the temperature of the working chamber. Of course, a temperature control device in the related art can also be used, as long as it can achieve temperature regulation.

[0042] It should be noted that, in some embodiments, the temperature sequence may be to increase the temperature of the working cavity in the order of the rated working temperature to the maximum working temperature, so that the temperature of the working cavity reaches the temperature corresponding to each temperature node one by one. Of course, in other embodiments, the working cavity may be cooled in the order of the maximum working temperature to the rated working temperature, so that the temperature of the working cavity reaches the temperature corresponding to each temperature node one by one.

[0043] Each temperature node serves as a node in the temperature regulation process. Each time the laser cutting equipment adjusts the temperature to a temperature node, it maintains the temperature in the working chamber at the temperature corresponding to the temperature node, and then detects the calibration position fed back by the grating ruler corresponding to each calibration line at this temperature.

[0044] In one embodiment, the laser cutting device adjusts the temperature of the working cavity so that the temperature of the working cavity reaches the temperature corresponding to the temperature node. Then, when the temperature sensor determines that the temperature of the working cavity reaches the temperature corresponding to a temperature node, the device controls the linear motor to drive the motion platform to align the calibration line with the center of the field of view of the calibration camera based on the distance between the center of the field of view of the calibration camera and the calibration line. It is conceivable that the distance can be determined by the pixel distance between the calibration line and the center point in the image captured by the camera field of view, such as according to the mapping relationship between the pixel distance and the actual space distance, so as to determine the distance between the center of the field of view of the calibration camera and the calibration line, and then control the linear motor to drive the motion platform to align the calibration line with the center of the field of view of the calibration camera.

[0045] When each calibration line is aligned with the center of the field of view of the calibration camera, the calibration position is determined by the reading head of the grating ruler to determine the coordinates of the calibration line in the first axial direction. Specifically, taking the rated working temperature as an example, the laser cutting equipment raises the temperature in the working chamber to the rated working temperature and maintains the temperature at the rated working temperature, and then controls the linear motor to drive the motion platform to move, so that each calibration line to be measured is aligned with the center of the field of view of the calibration camera in turn. It can be imagined that the linear motor drives the motion platform through the mover on it, thereby driving the calibration line to move, and the reading head of the grating ruler is fixed on the mover of the linear motor. For this, the device can obtain the corresponding coordinates for each movement. Therefore, when the calibration line is aligned with the center of the field of view of the calibration camera, the calibration position when the calibration line is aligned with the center of the field of view of the calibration camera can be determined by the reading head, and then the position of each calibration line is calibrated.

[0046] For this, the same process as above is used for other temperature nodes to obtain the calibration position of the grating ruler corresponding to each calibration line at the corresponding temperature. Therefore, by continuously increasing the temperature and calibrating the position of each calibration line, the calibration position of each calibration line at each temperature node is determined.

[0047] Step S130, after completing the position calibration of the calibration line to be measured for the temperature corresponding to each temperature node, generate a calibration compensation table, the calibration compensation table including the position error value between the calibration position of each calibration line at the temperature corresponding to each temperature node and the calibration position at the rated working temperature.

[0048] After completing the position calibration of the calibration lines at all temperature nodes, the equipment can obtain the coordinates of each calibration line read by the grating ruler at multiple temperatures. For this, the position error value between the calibration position of the same calibration line read at different temperatures and the calibration position of each calibration line at the rated working temperature can be calculated based on the calibration position of each calibration line at the rated working temperature. It can be imagined that the position error value is the difference between the two coordinates. For this, a calibration compensation table is generated to record the above position error value, that is, the position error between the calibration position of each calibration line at the temperature corresponding to each temperature node and its calibration position at the rated working temperature is recorded on the calibration compensation table.

[0049] Step S140: Based on the calibration compensation table, curve fitting is performed on the position error value of each calibration line in different temperature ranges, and the curve equation corresponding to each calibration line is determined, so that the laser cutting equipment can determine the position compensation value according to the curve equation and the actual working temperature.

[0050] The position error value at each temperature is recorded in the calibration compensation table. For each calibration line, a curve fitting can be performed in combination with the position error and the temperature in different temperature intervals to determine the relationship between the temperature and the position error in the temperature interval, and then determine the curve equation corresponding to each calibration line. It can be imagined that the temperature interval can be an area including two temperature nodes, or an interval including three or more temperature nodes.

[0051] Optionally, in one embodiment, two temperature nodes are used as the starting point and end point of a temperature interval, that is, as the first and last nodes of the temperature interval, and multiple temperature intervals can be determined accordingly. Thus, the relationship between the temperature and the position error in the temperature interval can be further determined, that is, the curve equation corresponding to the calibration line in the temperature interval is determined, such as corresponding to each calibration line, according to the position error values ​​obtained at the first and last temperature nodes in the corresponding temperature interval, a straight line fitting is performed to determine the linear expression of the calibration line in each temperature interval, and the linear expression is used to express the relationship between the temperature and the position error value of the calibration line in the temperature interval. It can be further conceived that a multi-segment curve is formed between the temperature node of the rated operating temperature and the temperature node corresponding to the maximum operating temperature.

[0052] Optionally, in one embodiment, multiple temperature intervals can be divided between the temperature node corresponding to the rated working temperature and the temperature node corresponding to the maximum working temperature according to at least three temperature nodes. Similarly, the relationship between the temperature and the position error in the temperature interval can be further determined. For example, for each calibration line, a curve fitting is performed according to at least three position error values ​​included in the temperature interval, and a curve expression of the calibration line in each temperature interval is determined. The curve expression is used to represent the relationship between the temperature and the position error value of the calibration line in the temperature interval. In this regard, multiple curves can be formed between the temperature node of the rated working temperature and the temperature node corresponding to the maximum working temperature.

[0053] In addition, in one embodiment, the temperature node corresponding to the rated operating temperature and the temperature node corresponding to the maximum operating temperature can be used as the starting point and end point of the temperature interval, that is, the temperature interval includes all the set temperature nodes, so that the relationship between the temperature and the position error of the entire interval is curve fitted, and then the curve equation within the temperature interval is determined. It can be imagined that a curve is formed between the temperature node of the rated operating temperature and the temperature node corresponding to the maximum operating temperature.

[0054] After determining the corresponding curve equation, the device can determine the position compensation value based on the curve equation and the actual working temperature, that is, the relationship between temperature and position error can be determined through the curve equation, so as to compensate for the error generated at the current actual working temperature. It can be understood that in the specific application process, the laser cutting equipment detects the current actual working temperature through the temperature sensor, and accordingly, the processor detects the temperature range of the current actual working temperature, and then determines the corresponding position error value through the corresponding curve equation, so as to use the position error value as the compensation value to compensate for the coordinate position feedback by the grating scale, thereby realizing accurate detection of the calibration line position.

[0055] Therefore, the present application scheme can use a grating ruler made of general materials, without the need to use an expensive grating ruler made of a low thermal expansion coefficient material, and can compensate for the grating ruler measurement error caused by temperature changes, thereby achieving high-precision position compensation when the processing temperature changes significantly, thereby reducing production costs while improving production efficiency.

[0056] Figure 3 A schematic diagram of the steps of moving the calibration line provided in an embodiment of the present application is shown in FIG. Figure 3 As shown, in one embodiment, when the calibration line is aligned with the center of the field of view of the calibration camera, the device needs to determine a driving signal for the linear motor, and the driving signal is used to control the linear motor to drive the motion platform to move, so as to drive the object to be measured thereon to move. The specific steps include step S210-step S230:

[0057] Step S210: Based on the shooting field of view of the calibration camera, determine a first distance between the center of the field of view of the calibration camera and the calibration line to be detected.

[0058] Step S220: determining a second distance of the first distance in the grating coordinate system according to a mapping relationship between the coordinate system corresponding to the calibration camera and the grating coordinate system, so as to determine a driving signal for the linear motor based on the second distance.

[0059] Step S230: output a driving signal to the linear motor to control the linear motor to drive the motion platform so that the calibration line of the object to be measured is aligned with the center of the field of view of the calibration camera.

[0060] It is understandable that by calibrating the shooting field of view of the camera, an image corresponding to the shooting field of view is obtained, from which the first distance between the center of the field of view of the calibration camera and the calibration line to be detected, such as the pixel spacing between the two, can be determined. It is conceivable that the laser cutting equipment is pre-set with a mapping relationship between the coordinate system corresponding to the calibration camera and the grating coordinate system, that is, the distance between two adjacent pixels in the calibration camera in the grating coordinate system can be determined according to the above mapping relationship. In this regard, the processor of the device can convert the second distance on the grating coordinate system to identify the distance between the center of the field of view of the calibration camera and the calibration line to be detected.

[0061] In addition, based on the second distance, the laser cutting equipment can determine the distance that needs to be driven to move the motion platform, and then determine the corresponding drive signal for controlling the linear motor. It is conceivable that the equipment can determine the drive signal required for the drive mover to drive the motion platform to move the second distance according to the control algorithm for the DC motor in the relevant technology. This solution will not go into details. After determining the corresponding drive signal, the processor provides the corresponding drive signal to the linear motor so that the linear motor drives the motion platform, so that the calibration line of the object to be measured is aligned with the center of the field of view of the calibration camera.

[0062] Therefore, by aligning the calibration line with the center of the camera's field of view each time, the device can combine the coordinate information fed back by the grating scale to calibrate the position of the calibration line at different temperature nodes, and determine the error of the grating scale caused by temperature, which helps to compensate the position of the grating scale.

[0063] In one embodiment, during the process of position calibration using the cutting path on the wafer as the calibration line by the laser cutting equipment, when the wafer is located on the moving platform, the equipment uses the temperature control device to control the temperature in the working chamber at the rated working temperature T0, so as to use the moving platform to align each cutting path with the center of the field of view of the calibration camera, and use the coordinates fed back by the reading head of the recording grating ruler as the calibration position. It can be imagined that the grating ruler is placed along the first axial direction, and accordingly, the acquired coordinates are also located in the same axial direction. For example, the grating ruler is placed along the X-axis, and for this, the coordinates corresponding to each cutting path record its coordinates on the Y-axis.

[0064] After completing the position calibration of each cutting path at the rated working temperature, the temperature control device is used again to heat the working chamber and stabilize the temperature to temperature T1 (temperature T1 is the temperature corresponding to the next temperature node), and then the position calibration of each cutting path is restarted.

[0065] Repeat the above process to determine the coordinates of the calibration line in the first axial direction at each temperature node, thereby calculating the difference between the coordinates of the calibration line at the current temperature node and the coordinates of the calibration line at the rated operating temperature, and use it as the position error value in the calibration compensation table. The position error values ​​determined by the above process are identified in the form of a table below:

[0066]

[0067] The row headers of the table represent the cutting paths, 01 Corresponding to the first cutting path, y 02 Corresponding to the second cutting path, ..., y 0n Corresponds to the last cutting path; the column title of the table indicates the temperature, temperature T0 corresponds to the rated working temperature, temperature T1 corresponds to the temperature of the next temperature node, ..., temperature T m corresponds to the maximum operating temperature; and e 11 To e 1n Then the position error value of each cutting path corresponding to temperature T1 is, ..., e m1 To e mn Then it corresponds to the temperature T m The position error value of each cutting path under .

[0068] In this regard, the corresponding temperature intervals can be divided. For example, a temperature interval is determined by two adjacent temperature nodes, such as temperature T0 to temperature T1 corresponding to temperature interval I, and so on, multiple temperature intervals are obtained, and then the relationship between the position error value and the temperature in the temperature interval can be calculated. For example, for the nth cutting path, at the corresponding temperature T （m-1） and T m In the temperature range, the calculation formula of the error compensation value e is as follows:

[0069]

[0070] Where T is the current temperature value, T （m-1） and T m is the temperature value corresponding to the temperature node in the temperature interval where the current temperature value is located, e （m-1）n and e mn They correspond to the position error values ​​of the same calibration line at two temperature nodes within the temperature range.

[0071] Furthermore, the position error compensation value e corresponding to each cutting path at the current temperature can be determined by the above error compensation value calculation formula, and the error compensation value is added to the feedback position y of the grating ruler to obtain the actual position of the cutting path. :

[0072]

[0073] Therefore, after calibrating the position of each calibration line through the above scheme, the equipment can obtain a calibration compensation table for position compensation, thereby compensating for the error caused by the grating scale affected by temperature changes and realizing accurate detection of the calibration line position.

[0074] Figure 4 This is a schematic diagram of the structure of a motion position compensation device provided in an embodiment of the present application. The device can be applied to the above-mentioned laser cutting equipment and is used to execute the motion position compensation method provided in the above-mentioned embodiment, and has the corresponding functional modules and beneficial effects of the execution method. As shown in the figure, the device includes a node configuration module 301, a position calibration module 302, a coordinate integration module 303 and a position compensation module 304.

[0075] The node configuration module 301 is configured to determine a plurality of temperature nodes to be set between the rated operating temperature and the maximum operating temperature, wherein the temperature nodes include nodes corresponding to the rated operating temperature and nodes corresponding to the maximum operating temperature;

[0076] The position calibration module 302 is configured to maintain the temperature of the working cavity at the temperature corresponding to the temperature node based on multiple temperature nodes, and control the linear motor to drive the motion platform so that each calibration line of the object to be measured is aligned with the field of view center of the calibration camera in sequence, and record the calibration position fed back by the grating ruler in sequence, and the calibration position is the coordinate of the calibration line of the object to be measured in the first axial direction;

[0077] The coordinate integration module 303 is configured to generate a calibration compensation table after completing the position calibration of the calibration line to be measured for the temperature corresponding to each temperature node, the calibration compensation table including the position error value between the calibration position of each calibration line at the temperature corresponding to each temperature node and the calibration position at the rated working temperature;

[0078] The position compensation module 304 is configured to perform curve fitting on the position error value of each calibration line in different temperature ranges based on the calibration compensation table, and determine the curve equation corresponding to each calibration line, so that the laser cutting device can determine the position compensation value according to the curve equation and the actual working temperature.

[0079] Based on the above embodiment, the position calibration module 302 is specifically configured as follows:

[0080] Adjusting the temperature of the working chamber so that the temperature of the working chamber reaches the temperature corresponding to the temperature node;

[0081] When the temperature of the working cavity reaches a temperature corresponding to a temperature node as determined by the temperature sensor, based on the distance between the center of the field of view of the calibration camera and the calibration line, the linear motor is controlled to drive the motion platform to align the calibration line with the center of the field of view of the calibration camera;

[0082] When each calibration line is aligned with the center of the field of view of the calibration camera, the calibration position is determined by the reading head of the grating ruler to determine the coordinates of the calibration line in the first axial direction.

[0083] Based on the above embodiment, the position calibration module 302 is specifically configured as follows:

[0084] Based on the shooting field of view of the calibration camera, determining a first distance between the center of the field of view of the calibration camera and the calibration line to be detected;

[0085] Determine a second distance of the first distance on the grating coordinate system according to a mapping relationship between a coordinate system corresponding to the calibration camera and the grating coordinate system, so as to determine a driving signal for the linear motor based on the second distance;

[0086] A driving signal is output to the linear motor to control the linear motor to drive the motion platform so that the calibration line of the object to be measured is aligned with the center of the field of view of the calibration camera.

[0087] Based on the above embodiment, the position calibration module 302 is specifically configured as follows:

[0088] The temperature of the working chamber is adjusted in the order from the rated working temperature to the maximum working temperature, so that the temperature of the working chamber reaches the temperature corresponding to each temperature node one by one;

[0089] Alternatively, the working cavity is cooled and regulated in the order from the highest working temperature to the rated working temperature, so that the temperature of the working cavity reaches the temperature corresponding to each temperature node one by one.

[0090] Based on the above embodiment, the coordinate integration module 303 is specifically configured as follows:

[0091] After determining the coordinates of the calibration line in the first axial direction at each temperature node, the difference between the coordinates of the calibration line at the current temperature node and the coordinates of the calibration line at the rated working temperature is calculated and used as the position error value in the calibration compensation table.

[0092] Based on the above embodiment, the position compensation module 304 is specifically configured as follows:

[0093] In the case where two consecutive temperature nodes are used as the head and tail nodes of a temperature interval, a plurality of temperature intervals are determined according to the plurality of temperature nodes that are set;

[0094] Based on each calibration line, a straight line fitting is performed according to the two position error values ​​corresponding to the first and last nodes of each temperature interval to determine the linear expression of the calibration line in each temperature interval. The linear expression is used to represent the relationship between the temperature and the position error value of the calibration line in the temperature interval.

[0095] Based on the above embodiment, the position compensation module 304 is specifically configured as follows:

[0096] When the number of temperature nodes included in the divided temperature interval is at least 3, determining a plurality of temperature intervals according to the set plurality of temperature nodes;

[0097] Based on each calibration line, curve fitting is performed according to at least three position error values ​​included in the temperature interval, and a curve expression of the calibration line in each temperature interval is determined. The curve expression is used to represent the relationship between the temperature and the position error value of the calibration line in the temperature interval.

[0098] It is worth noting that in the embodiment of the above-mentioned device, the modules included are only divided according to functional logic, but are not limited to the above-mentioned division, as long as the corresponding functions can be achieved; in addition, the specific names of the modules are only for the convenience of distinguishing each other, and are not used to limit the protection scope of the embodiments of the present application.

[0099] Figure 5The schematic diagram of the structure of the laser cutting equipment provided in one embodiment of the present application is used to execute the motion position compensation method provided in the above embodiment, and has the functional modules and beneficial effects corresponding to the execution method. As shown in the figure, the laser cutting equipment also includes a processor 401, a memory 402, an input device 403 and an output device 404. The number of processors 401 can be one or more, and one processor 401 is taken as an example in the figure; the processor 401, the memory 402, the input device 403 and the output device 404 can be connected by a bus or other means, and the figure takes the connection through a bus as an example. The memory 402, as a computer-readable storage medium, can be used to store software programs, computer executable programs and modules, such as program instructions / modules corresponding to the motion position compensation method in the embodiment of the present application. The processor 401 executes various corresponding functional applications and data processing by running the software programs, instructions and modules stored in the memory 402, that is, realizing the above-mentioned motion position compensation method.

[0100] The memory 402 may mainly include a program storage area and a data storage area, wherein the program storage area may store an operating system and at least one application required for a function; the data storage area may store data recorded or created during use, etc. In addition, the memory 402 may include a high-speed random access memory, and may also include a non-volatile memory, such as at least one disk storage device, a flash memory device, or other non-volatile solid-state storage device. In some embodiments, the memory 402 may further include a memory remotely arranged relative to the processor 401, and these remotely arranged memories may be connected to the device via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0101] The input device 403 can be used to input corresponding digital or character information to the processor 401, and to generate key signal input related to the user settings and function control of the device; the output device 404 can be used to send or display key signal output related to the user settings and function control of the device.

[0102] An embodiment of the present application also provides a storage medium storing computer executable instructions, which, when executed by a processor, are used to perform relevant operations in the motion position compensation method provided in any embodiment of the present application.

[0103] Computer-readable storage media include permanent and non-permanent, removable and non-removable media that can be implemented by any method or technology to store information. Information can be computer-readable instructions, data structures, program modules or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, compact disk read-only memory (CD-ROM), digital versatile disk (DVD) or other optical storage, magnetic cassettes, magnetic disk storage or other magnetic storage devices or any other non-transmission media that can be used to store information that can be accessed by a computing device.

[0104] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, commodity or device including the elements.

[0105] Note that the above are only preferred embodiments of the present application and the technical principles used. Those skilled in the art will understand that the present application is not limited to the specific embodiments described herein, and that various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the scope of protection of the present application. Therefore, although the present application is described in more detail through the above embodiments, the present application is not limited to the above embodiments, and may include more other equivalent embodiments without departing from the concept of the present application, and the scope of the present application is determined by the scope of the appended claims.

Claims

1. A motion position compensation method, characterized in that: Applied to laser cutting equipment, a motion platform, a calibration camera, a grating ruler and a temperature sensor are arranged in the working chamber of the laser cutting equipment; the motion platform moves along the first axial direction under the drive of the linear motor; the grating ruler is arranged on one side of the motion platform and the installation direction of the grating ruler is parallel to the first axial direction, and the reading head of the grating ruler is fixed on the mover of the linear motor; the calibration camera is located above the motion platform to shoot the calibration line of the object to be measured placed on the motion platform; The temperature sensor is used to detect the temperature of the working cavity; The motion position compensation method comprises: Determining a plurality of temperature nodes to be set between a rated operating temperature and a maximum operating temperature, wherein the temperature nodes include a node corresponding to the rated operating temperature and a node corresponding to the maximum operating temperature; Based on the multiple temperature nodes, the temperature of the working chamber is maintained at the temperature corresponding to the temperature node in turn, and based on the distance between the center of the field of view of the calibration camera and the calibration line, the linear motor is controlled to drive the motion platform so that each calibration line of the object to be measured is aligned with the center of the field of view of the calibration camera in turn, and the calibration position fed back by the grating ruler is recorded in turn, the calibration position is the coordinate of the calibration line of the object to be measured in the first axial direction, and the distance between the center of the field of view of the calibration camera and the calibration line is the distance between the center of the field of view of the calibration camera and the calibration line in the grating coordinate system determined according to the mapping relationship between the coordinate system corresponding to the calibration camera and the grating coordinate system; After the position calibration of the calibration line of the object to be measured is completed for the temperature corresponding to each temperature node, a calibration compensation table is generated, wherein the calibration compensation table includes the position error value between the calibration position of each calibration line at the temperature corresponding to each temperature node and the calibration position at the rated working temperature; Based on the calibration compensation table, curve fitting is performed on the position error value of each calibration line in different temperature ranges, and a curve equation corresponding to each calibration line is determined, so that the laser cutting device can determine the position compensation value according to the curve equation and the actual working temperature; Wherein, based on the calibration compensation table, curve fitting is performed on the position error value of each calibration line in different temperature ranges, and the relationship between the temperature and the position error value corresponding to each calibration line is determined, so that the laser cutting device can determine the position compensation value according to the curve equation and the actual working temperature, including: When the number of temperature nodes included in the divided temperature interval is at least 3, determining a plurality of temperature intervals according to the set plurality of temperature nodes; Based on each calibration line, curve fitting is performed according to at least three position error values ​​included in the temperature interval, and a curve expression of the calibration line in each temperature interval is determined, wherein the curve expression is used to represent the relationship between the temperature and the position error value of the calibration line in the temperature interval; or, In the case where two consecutive temperature nodes are used as the head and tail nodes of a temperature interval, multiple temperature intervals are determined according to the multiple temperature nodes that are set; Based on each calibration line, a straight line fitting is performed according to the two position error values ​​corresponding to the first and last nodes of each temperature interval to determine the linear expression of the calibration line in each temperature interval. The linear expression is used to represent the relationship between the temperature and the position error value of the calibration line in the temperature interval.

2. The motion position compensation method according to claim 1, characterized in that: Based on the multiple temperature nodes, the temperature of the working chamber is maintained at the temperature corresponding to the temperature node in turn, and based on the distance between the center of the field of view of the calibration camera and the calibration line, the linear motor is controlled to drive the motion platform so that each calibration line of the object to be measured is aligned with the center of the field of view of the calibration camera in turn, and the calibration position fed back by the grating ruler is recorded in turn, and the calibration position is the coordinate of the calibration line of the object to be measured in the first axial direction, including: Adjusting the temperature of the working chamber so that the temperature of the working chamber reaches the temperature corresponding to the temperature node; When it is determined by the temperature sensor that the temperature of the working chamber reaches a temperature corresponding to a temperature node, based on the distance between the center of the field of view of the calibration camera and the calibration line, the linear motor is controlled to drive the motion platform to align the calibration line with the center of the field of view of the calibration camera; When each calibration line is aligned with the center of the field of view of the calibration camera, the calibration position is determined by the reading head of the grating ruler to determine the coordinates of the calibration line in the first axial direction.

3. The motion position compensation method according to claim 2, characterized in that: When it is determined by the temperature sensor that the temperature of the working chamber reaches a temperature corresponding to a temperature node, based on the distance between the center of the field of view of the calibration camera and the calibration line, controlling the linear motor to drive the motion platform to align the calibration line with the center of the field of view of the calibration camera comprises: Based on the shooting field of view of the calibration camera, determining a first distance between the center of the field of view of the calibration camera and the calibration line to be detected; Determine a second distance of the first distance on the grating coordinate system according to a mapping relationship between the coordinate system corresponding to the calibration camera and the grating coordinate system, so as to determine a driving signal for the linear motor based on the second distance; The driving signal is output to the linear motor to control the linear motor to drive the motion platform so that the calibration line of the object to be measured is aligned with the center of the field of view of the calibration camera.

4. The motion position compensation method according to claim 2 or 3, characterized in that: The step of adjusting the temperature of the working cavity so that the temperature of the working cavity reaches a temperature corresponding to a temperature node includes: In the order from the rated working temperature to the maximum working temperature, the working cavity is heated and regulated so that the temperature of the working cavity reaches the temperature corresponding to each temperature node one by one; Alternatively, the working cavity is cooled and regulated in the order from the maximum working temperature to the rated working temperature, so that the temperature of the working cavity reaches the temperature corresponding to each temperature node one by one.

5. The motion position compensation method according to claim 1, characterized in that: After the position calibration of the calibration line of the object to be measured is completed for the temperature corresponding to each temperature node, a calibration compensation table is generated, including: After determining the coordinates of the calibration line in the first axial direction at each temperature node, the difference between the coordinates of the calibration line at the current temperature node and the coordinates of the calibration line at the rated working temperature is calculated and used as the position error value in the calibration compensation table.

6. A motion position compensation device, characterized in that: Applied to laser cutting equipment, a motion platform, a calibration camera, a grating ruler and a temperature sensor are arranged in the working chamber of the laser cutting equipment; the motion platform moves along the first axial direction under the drive of the linear motor; the grating ruler is arranged on one side of the motion platform and the installation direction of the grating ruler is parallel to the first axial direction, and the reading head of the grating ruler is fixed on the mover of the linear motor; the calibration camera is located above the motion platform to shoot the calibration line of the object to be measured placed on the motion platform; The temperature sensor is used to detect the temperature of the working cavity; The motion position compensation device comprises: A node configuration module, configured to determine a plurality of temperature nodes to be set between a rated operating temperature and a maximum operating temperature, wherein the temperature nodes include a node corresponding to the rated operating temperature and a node corresponding to the maximum operating temperature; A position calibration module is configured to maintain the temperature of the working chamber at the temperature corresponding to the temperature node in turn based on the multiple temperature nodes, and based on the distance between the center of the field of view of the calibration camera and the calibration line, control the linear motor to drive the motion platform so that each calibration line of the object to be measured is aligned with the center of the field of view of the calibration camera in turn, and record the calibration position fed back by the grating ruler in turn, the calibration position is the coordinate of the calibration line of the object to be measured in the first axial direction, and the distance between the center of the field of view of the calibration camera and the calibration line is the distance between the center of the field of view of the calibration camera and the calibration line in the grating coordinate system determined according to the mapping relationship between the coordinate system corresponding to the calibration camera and the grating coordinate system; A coordinate integration module is configured to generate a calibration compensation table after completing the position calibration of the calibration line of the object to be measured at the temperature corresponding to each temperature node, wherein the calibration compensation table includes a position error value between the calibration position of each calibration line at the temperature corresponding to each temperature node and the calibration position at the rated working temperature; A position compensation module, configured to perform curve fitting on the position error value of each calibration line in different temperature intervals based on the calibration compensation table, and determine a curve equation corresponding to each calibration line, so that the laser cutting device can determine the position compensation value according to the curve equation and the actual working temperature; Wherein, the position compensation module is specifically configured as follows: When the number of temperature nodes included in the divided temperature interval is at least 3, determining a plurality of temperature intervals according to the set plurality of temperature nodes; Based on each calibration line, curve fitting is performed according to at least three position error values ​​included in the temperature interval, and a curve expression of the calibration line in each temperature interval is determined, wherein the curve expression is used to represent the relationship between the temperature and the position error value of the calibration line in the temperature interval; Or, the position compensation module is further configured as: In the case where two consecutive temperature nodes are used as the head and tail nodes of a temperature interval, multiple temperature intervals are determined according to the multiple temperature nodes that are set; Based on each calibration line, a straight line fitting is performed according to the two position error values ​​corresponding to the first and last nodes of each temperature interval to determine the linear expression of the calibration line in each temperature interval. The linear expression is used to represent the relationship between the temperature and the position error value of the calibration line in the temperature interval.

7. A laser cutting device, characterized in that: include: one or more processors; A storage device for storing one or more programs, when the one or more programs are executed by the one or more processors, the one or more processors implement the motion position compensation method as described in any one of claims 1-5.

8. A storage medium storing computer executable instructions, characterized in that: When the computer executable instructions are executed by a processor, they are used to perform the motion position compensation method according to any one of claims 1 to 5.

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