Dynamic calibration device and method for flexible film pressure sensor array

Abstract

The present application provides a dynamic calibration device and method for a flexible thin film pressure sensor array, belonging to the field of sensor calibration technology. The device has a pressure platform, which includes: a lower pressure platform assembly, which is provided with a first plane for placing a flexible thin film pressure sensor array; a guide shaft, which is fastened to the lower pressure platform assembly; an upper pressure platform assembly, which includes a driving member and a pressure plate assembly, the pressure plate assembly is slidably connected to the guide shaft, the pressure plate assembly is provided with a second plane that can apply pressure to the first plane, the driving member is connected to the pressure plate assembly, and is used to drive the pressure plate assembly to move up and down along the guide shaft, so that a pressure measuring space is formed between the first plane and the second plane; an adjustment assembly, which is connected to the four corner positions of the lower pressure platform assembly, and is used to adjust the parallelism between the first plane and the second plane. The present application can ensure that the flexible thin film pressure sensor array is subjected to uniform pressure during calibration, thereby improving the accuracy and consistency of the calibration.

Description

Technical Field

[0001] The present application relates to the technical field of sensor calibration, and in particular to a dynamic calibration device and method for a flexible thin film pressure sensor array. Background Art

[0002] Currently, flexible thin film pressure sensor arrays are often used for pressure measurement in wearable devices and medical devices. These sensor arrays usually contain dozens to hundreds of detection points to provide high-resolution pressure detection. In order to ensure the measurement accuracy and consistency of each detection point, all detection points must be fully calibrated and calibrated before use.

[0003] Traditionally, single-point testing with weights or ejector pins is a common calibration method. However, with the increase in the area of ​​the sensor array and the number of detection points, point-by-point calibration becomes extremely time-consuming and difficult to ensure calibration accuracy. Currently, existing technologies have proposed calibration devices for large-area multi-point testing, but these calibration devices mainly rely on hydraulic or pneumatic systems. Due to the influence of factors such as the elastic deformation of components in the system and the control accuracy limitation, it is difficult to ensure that the contact surfaces are completely parallel, resulting in additional pressure errors between different detection points due to non-parallel contact. Summary of the invention

[0004] The purpose of the present application is to provide a dynamic calibration device and method for a flexible thin film pressure sensor array to solve the above-mentioned problems.

[0005] In a first aspect, an embodiment of the present application provides a dynamic calibration device for a flexible thin film pressure sensor array, the device having a pressure platform, the pressure platform comprising:

[0006] A lower pressure platform assembly, wherein the lower pressure platform assembly is provided with a first plane for placing the flexible film pressure sensor array;

[0007] A guide shaft, fixedly connected to the lower pressure platform assembly;

[0008] An upper pressure platform assembly, the upper pressure platform assembly comprising a driving member and a pressure plate assembly, the pressure plate assembly being slidably connected to the guide shaft, the pressure plate assembly being provided with a second plane capable of applying pressure to the first plane, the driving member being connected to the pressure plate assembly and being used for driving the pressure plate assembly to move up and down along the guide shaft, so that a pressure measuring space is formed between the first plane and the second plane;

[0009] An adjusting component is connected to the four corner positions of the lower pressure platform component and is used to adjust the parallelism between the first plane and the second plane.

[0010] In some embodiments, the platen assembly comprises:

[0011] A movable plate, the movable plate being slidably connected to the guide shaft;

[0012] An upper pressure plate, the upper pressure plate is connected to the movable plate, a plurality of force sensing units are provided between the movable plate and the four corner positions of the upper pressure plate, the second plane is provided on the side of the upper pressure plate facing the first plane, and the force sensing units are used to detect the parallelism between the first plane and the second plane.

[0013] In some embodiments, the lower pressure stage assembly includes:

[0014] A bottom plate, the bottom plate is fastened to the guide shaft;

[0015] A wafer stage connected to the bottom plate;

[0016] A lower pressing plate is connected to the wafer carrier, the adjusting assembly is arranged between the wafer carrier and the four corner positions of the lower pressing plate, and the first plane is provided on the side of the lower pressing plate facing the upper pressing plate.

[0017] In some embodiments, the adjustment component includes:

[0018] A plurality of gas springs connected between the wafer stage and four corner positions of the lower pressing plate;

[0019] A plurality of gas spring adjustment devices are connected to the bottoms of the plurality of gas springs and are used to adjust the heights of the plurality of gas springs so as to adjust the parallelism between the first plane and the second plane.

[0020] In some embodiments, the plurality of gas spring adjustment devices are connected to the four angular positions of the wafer carrier via adjustable threads.

[0021] In some embodiments, the lower pressure platform assembly further comprises:

[0022] A slide rail, the slide rail is fixedly connected to the bottom plate, and the slide stage is slidably connected to the slide rail;

[0023] A handle is connected to the wafer stage, and the wafer stage is driven to move along the slide rail by the handle, so that the wafer stage drives the lower pressure plate to enter or leave the pressure measuring space.

[0024] In some embodiments, the driving member comprises:

[0025] The electric servo push rod is used to drive the upper pressing plate to move up and down along the axial direction of the guide shaft through a torque mode, so that the second plane of the upper pressing plate applies a predetermined range of pressure to the first plane of the lower pressing plate.

[0026] In some embodiments, the electric servo actuator comprises:

[0027] A servo motor, wherein the servo motor is provided with an output terminal;

[0028] A ball screw, one end of which is connected to the output end, and the other end of which is fixedly connected to the movable plate, is used to drive the movable plate to drive the upper pressure plate to move up and down along the axial direction of the guide shaft.

[0029] In some embodiments, the dynamic calibration device of the flexible thin film pressure sensor array further comprises:

[0030] A cabinet, wherein the cabinet is formed with a storage cavity, and the pressure platform is accommodated in the storage cavity;

[0031] A control unit, the control unit is accommodated in the receiving cavity, the control unit is electrically connected to the pressure platform, and is used to control the electric servo push rod to drive the second plane of the upper pressure plate to apply a predetermined range of pressure to the first plane of the lower pressure plate based on a calibration instruction, and to sense the capacitance value of each flexible film pressure sensor in the flexible film pressure sensor array based on a capacitance-pressure conversion circuit to realize pressure calibration of the flexible film pressure sensor array;

[0032] A control panel is disposed outside the side beam of the cabinet and is electrically connected to the control unit for receiving calibration instructions input by a user and displaying pressure calibration data of the flexible film pressure sensor array in real time.

[0033] In a second aspect, an embodiment of the present application provides a dynamic calibration method for a flexible thin film pressure sensor array, which is applied to the dynamic calibration device for the flexible thin film pressure sensor array as described above, wherein the flexible thin film pressure sensor array is placed on the first plane of the lower pressure platform assembly, and the method comprises:

[0034] receiving calibration instructions and calibration parameters based on the control panel;

[0035] When the calibration instruction indicates that the current calibration mode is the automatic calibration mode, according to the pressure gradient and pressure holding time included in the calibration parameters, the upper pressing plate is controlled to apply the pressure value corresponding to the pressure gradient to the flexible film pressure sensor array incrementally or incrementally;

[0036] When the calibration instruction indicates that the current calibration mode is the manual calibration mode, according to the target pressure value included in the calibration parameter, controlling the upper pressing plate to apply the target pressure value to the flexible film pressure sensor array;

[0037] Based on the capacitance-pressure conversion circuit, the capacitance value of each flexible thin film pressure sensor in the flexible thin film pressure sensor array is sensed to realize the pressure calibration of the flexible thin film pressure sensor array;

[0038] The pressure calibration data of the flexible film pressure sensor array is displayed in real time, wherein the pressure calibration data includes a pressure variation curve diagram, sensor positions and calibration parameters.

[0039] Compared with the prior art, the beneficial effects of this application include:

[0040] The dynamic calibration device of the flexible film pressure sensor array of the present application, on the one hand, can accurately control the pressure applied to the flexible film pressure sensor array by controlling the pressure plate assembly to move up and down along the guide shaft through the driving member, thereby realizing the dynamic calibration of the sensor array. On the other hand, by arranging the adjustment components at the four corner positions of the lower pressure platform assembly, the parallelism between the first plane and the second plane can be accurately adjusted to ensure that the flexible film pressure sensor array is subjected to uniform pressure during calibration, thereby improving the accuracy and consistency of the calibration. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope of the present application.

[0042] Figure 1 is a schematic structural diagram of a pressure platform in a dynamic calibration device for a flexible thin film pressure sensor array according to the first embodiment of the present application;

[0043] Figure 2 is a schematic diagram of the overall structure of a dynamic calibration device for a flexible film pressure sensor array according to a third embodiment of the present application;

[0044] Figure 3 is a schematic diagram of a human-machine interaction interface of a control panel in a dynamic calibration device for a flexible film pressure sensor array according to a third embodiment of the present application;

[0045] Figure 4 It is a flow chart of a first embodiment of a dynamic calibration method for a flexible film pressure sensor array according to the present application.

[0046] Explanation of the accompanying drawings: 100-dynamic calibration device for flexible thin film pressure sensor array; 10-pressure platform; 1-lower pressure platform assembly; 11-bottom plate; 12-carrier stage; 13-lower pressure plate; 131-first plane; 14-slide rail; 15-handle; 2-guide shaft; 3-upper pressure platform assembly; 31-driving member; 32-pressure plate assembly; 321-moving plate; 322-upper pressure plate; 3221-second plane; 323-force sensing unit; 4-adjustment assembly; 41-gas spring; 42-gas spring adjustment device; 20-cabinet; 21-storage cavity; 30-control unit; 40-control panel. DETAILED DESCRIPTION

[0047] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0048] All terms (including technical and scientific terms) used in this application have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used here should be interpreted as having a meaning consistent with the context of this specification, and should not be interpreted in an idealized or overly rigid manner.

[0049] For example, the terms "first", "second", etc. used in this application may be used in this document to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish a first element from another element.

[0050] For another example, the terms “include”, “comprising”, etc. used in this application indicate the existence of features, steps, operations and / or components, but do not exclude the existence or addition of one or more other features, steps, operations or components.

[0051] As mentioned above, the existing technology currently proposes calibration devices for large-area multi-point testing, but these calibration devices mainly rely on hydraulic or pneumatic systems. Due to the influence of factors such as elastic deformation of components in the system and control accuracy limitations, it is difficult to ensure that the contact surface is completely parallel, resulting in additional pressure errors between different detection points due to non-parallel contact. To this end, the present application proposes a dynamic calibration device and method for a flexible film pressure sensor array, which can ensure that the flexible film pressure sensor array is subjected to uniform pressure during calibration, thereby improving the accuracy and consistency of calibration.

[0052] Figure 1 FIG. 1 is a schematic structural diagram of a pressure platform 10 in a dynamic calibration device 100 for a flexible film pressure sensor array according to a first embodiment of the present application. Figure 1As shown, the dynamic calibration device 100 of the flexible thin film pressure sensor array of this embodiment has a pressure platform 10. The pressure platform 10 is a core component for accurately calibrating the pressure of the flexible thin film pressure sensor array. The pressure platform 10 includes:

[0053] A lower pressure platform assembly 1, wherein the lower pressure platform assembly 1 is provided with a first plane 131 for placing the flexible film pressure sensor array;

[0054] A guide shaft 2, which is fixedly connected to the lower pressure platform assembly 1;

[0055] An upper pressure platform assembly 3, the upper pressure platform assembly 3 includes a driving member 31 and a pressure plate assembly 32, the pressure plate assembly 32 is slidably connected to the guide shaft 2, the pressure plate assembly 32 is provided with a second plane 3221 that can apply pressure to the first plane 131, the driving member 31 is connected to the pressure plate assembly 32, and is used to drive the pressure plate assembly 32 to move up and down along the guide shaft 2, so that a pressure measuring space is formed between the first plane 131 and the second plane 3221;

[0056] The adjusting component 4 is connected to the four corner positions of the lower pressure platform component 1 and is used to adjust the parallelism between the first plane 131 and the second plane 3221 .

[0057] In this embodiment, the lower pressure platform assembly 1 is used to provide a stable and flat surface, that is, a first plane 131, and the first plane 131 is used to place the flexible film pressure sensor array. The first plane 131 can be selected to be a rectangle, a circle or other regular shapes, so as to be able to adapt to flexible film pressure sensor arrays of different sizes and shapes.

[0058] In order to ensure that the lower pressure platform assembly 1 has sufficient rigidity and stability, the lower pressure platform assembly 1 can be made of a hard and flat material, such as steel or cast iron. In some optional embodiments, special materials or coatings can be used to further improve its flatness and wear resistance.

[0059] As an optional implementation to enhance the flatness and wear resistance of the first plane 131, a wear-resistant coating is applied to the first plane 131 of the lower pressure table assembly 1 by spraying, brushing or other methods to form a hard protective layer. Common wear-resistant coating materials include polyurethane, epoxy resin, ceramic, tungsten carbide, etc.

[0060] As another optional implementation for enhancing the flatness and wear resistance of the first plane 131, the chemical composition and microstructure of the first plane 131 of the lower pressure table assembly 1 are changed by surface treatment techniques such as quenching, carburizing, nitriding or carbonitriding, thereby improving its wear resistance.

[0061] As another optional implementation method for enhancing the flatness and wear resistance of the first plane 131, the chemical composition, organizational structure and stress state of the first plane 131 of the lower pressure platform assembly 1 are changed by surface modification techniques such as laser surface modification, ion implantation, and surface alloying, thereby improving its wear resistance.

[0062] In this embodiment, the guide shaft 2 is firmly connected to the lower pressure platform assembly 1 and provides a sliding guide for the upper pressure platform assembly 3 , thereby ensuring that the upper pressure platform assembly 3 moves smoothly in a direction perpendicular to the lower pressure platform assembly 1 .

[0063] In this embodiment, the upper pressure platform assembly 3 is a component for applying pressure to the flexible film pressure sensor array, and includes a driving member 31 and a pressure plate assembly 32. The pressure plate assembly 32 is slidably connected to the guide shaft 2, and is provided with a second plane 3221 that can apply pressure to the first plane 131. The driving member 31 is connected to the pressure plate assembly 32, and is used to drive the pressure plate assembly 32 to move up and down along the guide shaft 2, thereby forming a pressure measurement space between the first plane 131 and the second plane 3221.

[0064] In some embodiments, the pressure plate assembly 32 includes a movable plate 321 and an upper pressure plate 322. The movable plate 321 is slidably connected to the guide shaft 2. The upper pressure plate 322 is connected to the movable plate 321, and a plurality of force sensing units 323 are provided between the movable plate 321 and the four corner positions of the upper pressure plate 322. The second plane 3221 is provided on the side of the upper pressure plate 322 facing the first plane 131, and the force sensing units 323 are used to detect the parallelism between the first plane 131 and the second plane 3221.

[0065] Specifically, when the upper pressing plate 322 moves downward and begins to contact the first plane 131, the force sensing unit 323 begins to detect the forces acting on the second plane 3221 of the upper pressing plate 322. These forces are transmitted to the force sensing unit 323 through the upper pressing plate 322. Each force sensing unit 323 is located at an angular position of the upper pressing plate 322. These force sensing units 323 can convert the sensed forces into electrical signals, and the dynamic calibration device 100 of the flexible film pressure sensor array can calculate the pressure sensed by each force sensing unit 323 based on these electrical signals. If the forces measured by all force sensing units 323 are equal, it can be determined that the first plane 131 of the upper pressing plate 322 and the second plane 3221 of the lower pressure platform assembly 1 are parallel. If there is a significant difference in the forces measured by the force sensing units 323 at different positions, it means that the first plane 131 of the upper pressing plate 322 and the second plane 3221 of the lower pressure platform assembly 1 are not parallel. The parallelism deviation may be determined by comparing the readings of the force sensing units 323 to adjust the parallelism between the first plane 131 and the second plane 3221 .

[0066] In some embodiments, the driving member 31 may be electric, pneumatic or hydraulic, and is mainly responsible for providing power to control the movement of the pressing plate assembly 32. Specifically, it may be a motor, a cylinder or a hydraulic cylinder to accurately control the pressure and the moving distance.

[0067] Preferably, the driving member 31 is an electric servo push rod, which is used to drive the upper pressure plate 322 to move up and down along the axial direction of the guide shaft 2 through a torque mode, so that the second plane 3221 of the upper pressure plate 322 applies a predetermined range of pressure to the first plane 131 of the lower pressure plate 13.

[0068] In an optional embodiment, the electric servo push rod includes a servo motor and a ball screw, wherein the servo motor is provided with an output end. A ball screw, one end of which is connected to the output end, and the other end is fixedly connected to the movable plate 321, for driving the movable plate 321 to drive the upper pressing plate 322 to move up and down along the axis direction of the guide shaft 2. Specifically, the ball screw can convert the rotational motion of the servo motor into linear motion, thereby driving the movable plate 321 to move.

[0069] In an optional embodiment, the electric servo push rod may further include a reducer, specifically a 10:1 reducer, for increasing the torque and reducing the output speed to adapt to application scenarios requiring high thrust and slow movement.

[0070] For example, the servo motor converts high-speed rotation into low-speed high-torque rotation through a reducer, and then converts the rotational motion into linear motion through a ball screw to push the moving plate 321 to reciprocate. In this embodiment, through the precise control of the servo motor, the position, speed and thrust of the moving plate 321 can be precisely controlled to meet the application requirements of dynamic calibration of the flexible film pressure sensor array.

[0071] The adjustment assembly 4 in this embodiment is an adjustment mechanism with fine adjustment and locking functions, connected to the four corner positions of the lower pressure platform assembly 1, and used to adjust the parallelism between the first plane 131 and the second plane 3221. The specific design of the adjustment assembly 4 can be a threaded adjustment mechanism, a gear rack adjustment mechanism, a hydraulic adjustment mechanism, an electric adjustment mechanism, etc.

[0072] In this embodiment, the dynamic calibration device 100 of the flexible film pressure sensor array can, on the one hand, accurately control the pressure applied to the flexible film pressure sensor array by controlling the pressure plate assembly 32 to move up and down along the guide shaft 2 through the driving member 31, thereby realizing the dynamic calibration of the sensor array. On the other hand, by arranging the adjustment assembly 4 at the four corner positions of the lower pressure platform assembly 1, the parallelism between the first plane 131 and the second plane 3221 can be accurately adjusted to ensure that the flexible film pressure sensor array is subjected to uniform pressure during calibration, thereby improving the accuracy and consistency of calibration.

[0073] On the basis of any of the above embodiments, a second embodiment of the present application is proposed. The lower pressure platform assembly 1 in this embodiment includes:

[0074] A bottom plate 11, the bottom plate 11 is fastened to the guide shaft 2 to support and fix the guide shaft 2;

[0075] A wafer stage 12, wherein the wafer stage 12 is connected to the bottom plate 11;

[0076] The lower pressing plate 13 is connected to the wafer carrier 12 , the adjusting assembly 4 is arranged between the wafer carrier 12 and the four corner positions of the lower pressing plate 13 , and the first plane 131 is provided on the side of the lower pressing plate 13 facing the upper pressing plate 322 .

[0077] In some embodiments, the adjustment component 4 includes:

[0078] A plurality of gas springs 41 are connected between the four corner positions of the wafer stage 12 and the lower pressing plate 13 to ensure stability and uniform support force;

[0079] A plurality of gas spring adjustment devices 42 are connected to the bottom of the plurality of gas springs 41 and are used to adjust the height of the plurality of gas springs 41 so as to adjust the parallelism between the first plane 131 and the second plane 3221 .

[0080] The gas spring 41 in this embodiment is an elastic element, which is filled with high-pressure nitrogen gas. The elastic force can be set according to different nitrogen pressures. In this embodiment, the gas spring 41 is not only used to connect the wafer stage 12 and the lower pressing plate 13 to provide support and fixation, but also can be used as a buffer device to avoid hard connection between the first plane 131 and the second plane 3221.

[0081] In some embodiments, the position and posture of the lower pressing plate 13 may also be adjusted by adjusting the internal pressure of the gas spring 41 .

[0082] In some embodiments, the plurality of gas spring adjustment devices 42 are connected to the four corner positions of the wafer stage 12 through adjustable threads. This not only ensures a stable connection and prevents loosening or displacement, but also adjusts the height of the gas spring 41, thereby adjusting the parallelism between the first plane 131 and the second plane 3221.

[0083] In some embodiments, the lower pressure platform assembly 1 further includes:

[0084] A slide rail 14, wherein the slide rail 14 is fixedly connected to the bottom plate 11, and the slide stage 12 is slidably connected to the slide rail 14;

[0085] A handle 15 is connected to the wafer stage 12 , and the wafer stage 12 is driven to move along the slide rail 14 by the handle 15 , so that the wafer stage 12 drives the lower pressure plate 13 to enter or leave the pressure measuring space.

[0086] The slide rail 14 in this embodiment mainly functions to provide a sliding track for the wafer stage 12 to ensure that the wafer stage 12 can move smoothly along a predetermined path so that the wafer stage 12 drives the lower pressure plate 13 to enter or leave the pressure measuring space.

[0087] In this embodiment, firstly, by connecting a plurality of gas springs 41 between the four corner positions of the stage 12 and the lower pressing plate 13, a stable and uniform supporting force can be provided. Secondly, the gas spring 41, as an elastic element, can also be used as a buffer device to avoid the hard connection between the first plane 131 and the second plane 3221, and reduce the impact of shock and vibration. Thirdly, by using the gas spring adjustment device 42, the height of the gas spring 41 can be easily adjusted, so as to accurately adjust the parallelism between the first plane 131 and the second plane 3221. Fourthly, the slide rail 14 provides a stable sliding track for the stage 12 to ensure that the stage 12 can move along a predetermined path. The design of the handle 15 allows the operator to easily drive the stage 12, thereby driving the lower pressing plate 13 to enter or leave the pressure measuring space. Fifthly, the arrangement and connection method of the bottom plate 11, the stage 12, the lower pressing plate 13 and the adjustment assembly 4 make the entire lower pressure stage assembly 1 compact in structure, good in stability, easy to operate, and suitable for dynamic calibration of various flexible film pressure sensor arrays.

[0088] Figure 2 FIG. 1 is a schematic diagram of the overall structure of a dynamic calibration device 100 for a flexible film pressure sensor array according to a third embodiment of the present application. Figure 2 As shown, the dynamic calibration device 100 of the flexible film pressure sensor array in this embodiment, based on any of the above embodiments, further includes:

[0089] A cabinet 20, wherein the cabinet 20 is formed with a storage cavity 21, and the storage cavity 21 accommodates the pressure platform;

[0090] A control unit 30, the control unit 30 is accommodated in the storage cavity 21, the control unit 30 is electrically connected to the pressure platform, and is used to control the electric servo push rod to drive the second plane 3221 of the upper pressing plate 322 to apply a predetermined range of pressure to the first plane 131 of the lower pressing plate 13 based on a calibration instruction, and to sense the capacitance value of each flexible film pressure sensor in the flexible film pressure sensor array based on a capacitance-pressure conversion circuit to realize pressure calibration of the flexible film pressure sensor array;

[0091] A control panel 40 is disposed outside the side beam of the cabinet 20 and is electrically connected to the control unit 30 for receiving calibration instructions input by a user and for displaying pressure calibration data of the flexible film pressure sensor array in real time.

[0092] The cabinet 20 in this embodiment is a support frame with a solid structure, and a storage cavity 21 is formed inside the cabinet 20. The storage cavity 21 is used to accommodate and protect the precision equipment inside, namely the pressure platform and the control unit 30.

[0093] The control unit 30 in this embodiment is the core of the calibration device. It is placed in the storage cavity 21 of the cabinet 20 and connected to the pressure platform through wires. The main task of the control unit 30 is to receive the calibration instructions from the control panel 40 and control the action of the electric servo push rod according to the calibration instructions. Among them, the electric servo push rod is an actuator, which can accurately drive the second plane 3221 of the upper pressing plate 322 to apply a predetermined pressure to the first plane 131 of the lower pressing plate 13. This pressure range is set in advance to cover the measurement range of the flexible film pressure sensor array. While applying pressure, the control unit 30 monitors the capacitance change of each flexible film pressure sensor through a capacitance-pressure conversion circuit. Since the capacitance value of the flexible film pressure sensor is proportional to the pressure it is subjected to, the pressure calibration of the sensor array can be achieved by monitoring the change in capacitance value.

[0094] The control panel 40 in this embodiment is located on the external side beam of the cabinet 20 and is connected to the control unit 30 through wires. It provides a human-machine interaction interface. Figure 3 FIG. 4 is a schematic diagram of a human-machine interaction interface of a control panel 40 in a dynamic calibration device 100 for a flexible film pressure sensor array according to a third embodiment of the present application. Figure 3As shown, the user can input calibration instructions through the control panel 40, such as setting the pressure range, starting the calibration program, etc. At the same time, the control panel 40 can also display the pressure calibration data of the flexible film pressure sensor array in real time, including the pressure value corresponding to the capacitance value of each sensor, so that the user can immediately understand the calibration progress and results.

[0095] In this embodiment, efficient and accurate calibration of the flexible film pressure sensor array is achieved through the integrated cabinet 20, pressure platform 10, control unit 30 and control panel 40. This embodiment not only improves the automation of the calibration process, but also enhances the convenience of operation and the transparency of data.

[0096] also, Figure 4 4 is a flow chart of a first embodiment of a dynamic calibration method for a flexible film pressure sensor array according to the present application. As shown in FIG4 , the present application also proposes a dynamic calibration method for a flexible film pressure sensor array, which is applied to a dynamic calibration device 100 for a flexible film pressure sensor array in a third embodiment. The flexible film pressure sensor array is placed on the first plane 131 of the lower pressure platform assembly 1. The method includes steps S10 to S50:

[0097] Step S10 : receiving calibration instructions and calibration parameters based on the control panel 40 .

[0098] It should be understood that the calibration instruction in this embodiment is an instruction for selecting or setting a calibration mode, wherein the calibration mode refers to an automatic calibration mode or a manual calibration mode. The calibration parameters refer to the parameters that need to be set after the calibration mode is selected. Specifically, in the automatic calibration mode, the calibration parameters include the pressure gradient and the pressure holding time of each gradient pressure. In the manual calibration mode, the calibration parameters include the target pressure value.

[0099] Step S20, when the calibration instruction indicates that the current calibration mode is the automatic calibration mode, the upper pressure plate 322 is controlled to apply the pressure value corresponding to the pressure gradient to the flexible film pressure sensor array incrementally or incrementally according to the pressure gradient and pressure holding time included in the calibration parameters.

[0100] The automatic calibration mode is suitable for situations where calibration is required over the entire pressure range, and can complete the full linearity calibration of the array multi-point pressure sensor with one click. The dynamic calibration device 100 of the flexible film pressure sensor array automatically applies and maintains pressures of different gradients, which can reduce manual operations and improve the accuracy and efficiency of calibration.

[0101] Step S30, when the calibration instruction indicates that the current calibration mode is the manual calibration mode, according to the target pressure value included in the calibration parameter, the upper pressing plate 322 is controlled to apply the target pressure value to the flexible film pressure sensor array.

[0102] The manual calibration mode is suitable for situations where the sensor array needs to be accurately calibrated at a target pressure value. The accuracy at the target pressure value can be measured by applying pressure at a single point.

[0103] Step S40 , sensing the capacitance value of each flexible thin film pressure sensor in the flexible thin film pressure sensor array based on the capacitance-pressure conversion circuit to implement pressure calibration of the flexible thin film pressure sensor array.

[0104] During the process of applying pressure, the capacitance-pressure conversion circuit monitors the capacitance change of each flexible film pressure sensor in real time. Since the capacitance of the flexible film pressure sensor has a certain functional relationship with the pressure, the response of the sensor to pressure can be determined by measuring the change in capacitance, thereby completing the accurate calibration of the functional relationship between the capacitance and pressure of the flexible film pressure sensor.

[0105] Step S50, displaying the pressure calibration data of the flexible film pressure sensor array in real time, wherein the pressure calibration data includes a pressure variation curve, sensor positions and calibration parameters.

[0106] For each sensor distributed at various positions, its response under different pressures is calculated and a pressure change curve is generated. A graphical user interface (GUI) based on the control panel 40 displays the pressure change curve, sensor position and related calibration parameters in real time to help the user monitor and adjust the calibration process in real time.

[0107] In this embodiment, by introducing the automatic calibration mode and the manual calibration mode, the calibration efficiency and accuracy are significantly improved. The automatic calibration mode can complete the full-scale linearity calibration of the array multi-point pressure sensor with one click, greatly reducing the time and labor intensity of manual operation. At the same time, by accurately controlling the pressure gradient and the pressure holding time, the error caused by human operation is reduced, and the calibration accuracy is improved. The manual calibration mode is suitable for situations where the sensor array needs to be accurately calibrated at a specific pressure point. By manually setting the target pressure value, the reading of the sensor at the pressure point can be ensured to be accurate. In addition, the function of displaying the pressure calibration data in real time allows the user to monitor the calibration process in real time, understand the calibration results in time, and make adjustments when necessary, which not only improves the transparency of the calibration, but also makes the calibration process more flexible and controllable. In summary, this embodiment significantly improves the calibration efficiency and accuracy through automation and real-time monitoring means, and at the same time provides flexible calibration mode selection and a friendly user interface, which has broad application prospects and practical value.

[0108] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

[0109] In addition, those skilled in the art will appreciate that, although some embodiments herein include certain features included in other embodiments but not other features, the combination of features of different embodiments is meant to be within the scope of the present application and form different embodiments. For example, in the above claims, any one of the claimed embodiments may be used in any combination. The information disclosed in this background technology section is intended only to deepen the understanding of the overall background technology of the present application and should not be regarded as an admission or in any form of implication that the information constitutes prior art known to those skilled in the art.

Claims

1. A dynamic calibration device for a flexible thin film pressure sensor array, It is characterized in that A pressure platform is provided, the pressure platform comprising: A lower pressure platform assembly, wherein the lower pressure platform assembly is provided with a first plane for placing the flexible film pressure sensor array; A guide shaft, which is fastened to the lower pressure platform assembly; the lower pressure platform assembly comprises: a bottom plate, which is fastened to the guide shaft; a wafer stage, which is connected to the bottom plate; and a lower pressure plate, which is connected to the wafer stage; An upper pressure platform assembly, the upper pressure platform assembly comprising a driving member and a pressure plate assembly, the pressure plate assembly being slidably connected to the guide shaft, the pressure plate assembly being provided with a second plane capable of applying pressure to the first plane, the driving member being connected to the pressure plate assembly and being used for driving the pressure plate assembly to move up and down along the guide shaft, so that a pressure measuring space is formed between the first plane and the second plane; An adjustment component, the adjustment component is connected to the four angular positions of the lower pressure platform assembly, is arranged between the four angular positions of the wafer carrier and the lower pressure plate, and is used to adjust the parallelism between the first plane and the second plane. The adjustment component includes: a plurality of gas springs, connected between the four angular positions of the wafer carrier and the lower pressure plate; a plurality of gas spring adjustment devices, connected to the bottom of the plurality of gas springs, and are used to adjust the height of the plurality of gas springs to adjust the parallelism between the first plane and the second plane.

2. The dynamic calibration device for the flexible thin film pressure sensor array according to claim 1, It is characterized in that The pressure plate assembly comprises: A movable plate, the movable plate being slidably connected to the guide shaft; An upper pressure plate, the upper pressure plate is connected to the movable plate, a plurality of force sensing units are provided between the movable plate and the four corner positions of the upper pressure plate, the second plane is provided on the side of the upper pressure plate facing the first plane, and the force sensing units are used to detect the parallelism between the first plane and the second plane.

3. The dynamic calibration device for the flexible thin film pressure sensor array according to claim 2, It is characterized in that The first plane is provided on a side of the lower pressing plate facing the upper pressing plate.

4. The dynamic calibration device for the flexible thin film pressure sensor array according to claim 3, It is characterized in that The multiple gas spring adjustment devices are connected to the four corner positions of the carrier stage through adjustable threads.

5. The dynamic calibration device for the flexible thin film pressure sensor array according to claim 4, It is characterized in that The lower pressure platform assembly also includes: A slide rail, the slide rail is fixedly connected to the bottom plate, and the slide stage is slidably connected to the slide rail; A handle is connected to the wafer stage, and the wafer stage is driven to move along the slide rail by the handle, so that the wafer stage drives the lower pressure plate to enter or leave the pressure measuring space.

6. The dynamic calibration device for the flexible thin film pressure sensor array according to claim 3, It is characterized in that The driving member comprises: The electric servo push rod is used to drive the upper pressing plate to move up and down along the axial direction of the guide shaft through a torque mode, so that the second plane of the upper pressing plate applies a predetermined range of pressure to the first plane of the lower pressing plate.

7. The dynamic calibration device for the flexible thin film pressure sensor array according to claim 6, It is characterized in that The electric servo push rod comprises: A servo motor, wherein the servo motor is provided with an output terminal; A ball screw, one end of which is connected to the output end, and the other end of which is fixedly connected to the movable plate, is used to drive the movable plate to drive the upper pressure plate to move up and down along the axial direction of the guide shaft.

8. The dynamic calibration device for the flexible thin film pressure sensor array according to claim 7, It is characterized in that Also includes: A cabinet, wherein the cabinet is formed with a storage cavity, and the pressure platform is accommodated in the storage cavity; A control unit, the control unit is accommodated in the receiving cavity, the control unit is electrically connected to the pressure platform, and is used to control the electric servo push rod to drive the second plane of the upper pressure plate to apply a predetermined range of pressure to the first plane of the lower pressure plate based on a calibration instruction, and to sense the capacitance value of each flexible film pressure sensor in the flexible film pressure sensor array based on a capacitance-pressure conversion circuit to realize pressure calibration of the flexible film pressure sensor array; A control panel is disposed outside the side beam of the cabinet and is electrically connected to the control unit for receiving calibration instructions input by a user and displaying pressure calibration data of the flexible film pressure sensor array in real time.

9. A method for dynamic calibration of a flexible thin film pressure sensor array, applied to the dynamic calibration device for a flexible thin film pressure sensor array as claimed in claim 8, It is characterized in that The flexible film pressure sensor array is placed on a first plane of the lower pressure platform assembly, and the method comprises: receiving calibration instructions and calibration parameters based on the control panel; When the calibration instruction indicates that the current calibration mode is the automatic calibration mode, according to the pressure gradient and pressure holding time included in the calibration parameters, the upper pressing plate is controlled to apply the pressure value corresponding to the pressure gradient to the flexible film pressure sensor array incrementally or incrementally; When the calibration instruction indicates that the current calibration mode is the manual calibration mode, according to the target pressure value included in the calibration parameter, controlling the upper pressing plate to apply the target pressure value to the flexible film pressure sensor array; Based on the capacitance-pressure conversion circuit, the capacitance value of each flexible thin film pressure sensor in the flexible thin film pressure sensor array is sensed to realize the pressure calibration of the flexible thin film pressure sensor array; The pressure calibration data of the flexible film pressure sensor array is displayed in real time, wherein the pressure calibration data includes a pressure variation curve diagram, sensor positions and calibration parameters.

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