A grating replication device and method for improving verticality

Abstract

The present invention relates to the technical field of precision manufacturing of optical devices, and specifically to a grating replication device and method for improving verticality, wherein the device specifically comprises a laser, a half-reflecting half-mirror, a grating carrying device and a display plane, wherein the laser is used to emit a laser beam; the half-reflecting half-mirror is tiltedly arranged in front of the laser, and the half-reflecting half-mirror is used to split the laser beam to generate reflected light and transmitted light; the grating carrying device is used to carry a master grating, and the grating carrying device is arranged in the direction of the reflected light so that the reflected light can be emitted to the surface of the master grating; the display plane is arranged in front of the half-reflecting half-mirror, and the display plane is used to receive the diffracted light and transmitted light generated by the reflected light on the surface of the master grating. Thus, whether the engraved lines of the master grating are perpendicular to the reference plane can be corrected in real time during the grating replication process, and the multi-dimensional posture of the master grating can be adjusted, thereby improving the detection and correction efficiency and the qualified rate of the finished product replication grating.

Description

Technical Field

[0001] The invention relates to the technical field of optical device precision manufacturing, and specifically provides a grating replication device and method for improving verticality. Background Art

[0002] As a new non-destructive testing method, spectroscopy can obtain microscopic information of materials, including composition, internal energy level structure, chemical bond properties, etc., through spectral analysis of materials. Compared with other testing technologies, spectroscopy has the advantages of high sensitivity and non-destructive testing, while providing rich information and more reasonable and effective processing methods for spectral data processing. Therefore, it is widely used in agriculture, food, medicine, metallurgy, astronomy, petrochemicals and other fields. Diffraction gratings have excellent dispersion capabilities, as well as polarization, beam splitting, and phase matching properties, playing a key role in the above fields.

[0003] At present, most finished gratings are made through grating replication technology, which is the process of using gratings made by holography, carving, etc. as the master to make replicas. In the grating replication process, due to the influence of factors such as human factors, there is a phenomenon that the grating lines are not perpendicular to the bottom surface, which causes cone diffraction and affects the use. Therefore, the perpendicularity between the grating lines and the bottom surface is an indicator that requires high attention.

[0004] At present, the more mature way to measure the verticality between the grating lines and the bottom surface is to observe the wavefront index of the grating diffraction wave through an interferometer and measure and observe by means of a collimator after the grating is copied and the finished grating is obtained, so as to qualitatively analyze the tilt and bending of the grating lines. Its main disadvantage is that the inspection process is complicated and the dynamic interference fringes need to be adjusted, which brings inconvenience to the measurement, and the inspection cycle is long, which greatly reduces the effectiveness and is not conducive to the mass production of copied gratings. Summary of the invention

[0005] In order to solve the above problems, the present invention provides a grating replication device and method with improved verticality, which can correct in real time whether the engraved lines of the master grating are perpendicular to the reference plane during the grating replication process, and adjust the multi-dimensional posture of the master grating, thereby improving the detection and correction efficiency and the qualified rate of the finished product replication grating.

[0006] An embodiment of the first aspect of the present invention provides a grating replication device with improved verticality, which specifically includes a laser, a half-reflecting half-mirror, a grating carrying device and a display plane, wherein the laser is used to emit a laser beam; the half-reflecting half-mirror is tiltedly arranged in front of the laser, and the half-reflecting half-mirror is used to split the laser beam to generate reflected light and transmitted light; the grating carrying device is used to carry a master grating, and the grating carrying device is arranged in the direction of the reflected light so that the reflected light can be emitted to the surface of the master grating; the display plane is arranged in front of the half-reflecting half-mirror, and the display plane is used to receive the diffracted light and transmitted light generated by the reflected light on the surface of the master grating.

[0007] Preferably, the grating carrying device includes a three-dimensional translation stage, a rotating stage, a coupled angle stage, an adapter plate and a grating clamping plate, the three-dimensional translation stage is provided with an X-axis guide rail, a Y-axis guide rail and a Z-axis guide rail; the rotating stage is connected to the three-dimensional translation stage so that the X-axis guide rail, the Y-axis guide rail and the Z-axis guide rail can be used to move the rotating stage along the X-axis direction, the Y-axis direction and the Z-axis direction respectively, and the rotating stage is used to adjust the yaw of the master grating; the coupled angle stage is connected to the rotating stage through the adapter plate, and the coupled angle stage is used to adjust the pitch of the master grating; the grating clamping plate is used to clamp the master grating.

[0008] The embodiment of the second aspect of the present invention provides a grating replication method for improving verticality, which specifically includes:

[0009] S102: Assembling the grating replication device with improved verticality provided by the embodiment of the first aspect;

[0010] S104: using a half-reflecting half-mirror to correct the optical path of the grating replication device for improving verticality;

[0011] S106: Using the substrate glass to process and replicate the grating.

[0012] Preferably, using a half-reflecting half-mirror to correct the optical path of a grating replication device for improving verticality comprises:

[0013] S104-2: Clamp the master grating on the grating clamping plate so that the grating lines of the master grating are arranged along the Y-axis direction;

[0014] S104-4: adjusting the pitch of the master grating so that the bright spots of the reflected light and the transmitted light on the display plane coincide with each other, and determining contour lines according to the laser emission points of the laser, the bright spots on the master grating, and the bright spots on the display plane;

[0015] S104-6: Adjust the position of the master grating so that the bright spots of the -2nd, -1st, 1st and 2nd order diffraction lights coincide with the contour lines, determine the position of the master grating and fix the master grating.

[0016] Preferably, using the substrate glass to process the replica grating comprises:

[0017] S106-2: Apply reagent on the bottom surface of the master grating and the substrate glass, and apply UV curing glue on the bottom surface of the master grating;

[0018] S106-4: Adjust the Z-axis guide rail so that the bottom surface of the master grating contacts the substrate glass;

[0019] S106-6: performing optical path calibration again on the grating replication device for improving verticality;

[0020] S106-8: Use an ultraviolet light source to irradiate the ultraviolet curing adhesive until it is completely cured, and separate the master grating from the substrate glass to obtain a replica grating.

[0021] Preferably, the offset angle of the lines of the replica grating is quantitatively analyzed and calculated:

[0022] sin -1 ( AC / AB 1)≈tan -1 ( AC / B 1 C )= θ ,

[0023] in, AC is the distance between the diffraction point on the master grating and the laser beam emitted by the laser in the Y-axis direction, AB 1 is the distance between the diffraction point on the master grating and the diffraction spot on the display plane, B 1 C To display the distance between the diffraction spot on the plane and the diffraction point on the master grating in the X-axis direction, θ Offset angle for replicating the lines of the grating.

[0024] Compared with the prior art, the present invention can achieve the following beneficial effects: a grating replication device for improving verticality, specifically comprising a laser, a half-reflecting half-mirror, a grating carrying device and a display plane, the laser is used to emit a laser beam; the half-reflecting half-mirror is tiltedly arranged in front of the laser, and the half-reflecting half-mirror is used to split the laser beam to generate reflected light and transmitted light; the grating carrying device is used to carry the master grating, and the grating carrying device is arranged in the direction of the reflected light so that the reflected light can be emitted to the surface of the master grating; the display plane is arranged in front of the half-reflecting half-mirror, and the display plane is used to receive the diffracted light and the transmitted light generated by the reflected light on the surface of the master grating. Thus, by constructing an optical path to perform a spectroscopic inspection on the master grating, and setting a grating carrying device to perform a multi-dimensional calibration on the master grating, it is possible to calibrate in real time whether the engraved lines of the master grating are perpendicular to the reference plane during the grating replication process, thereby improving the detection and correction efficiency and the verticality pass rate of the finished product replication grating. The present invention has a simple structure, convenient operation and high accuracy.

[0025] Among them, the grating replication method to improve verticality utilizes the diffraction characteristics of the grating itself. Through multi-dimensional calibration, the -1st, 0th, 1st and other diffraction order spots of the master grating are located on the same contour line in the plane, realizing the vertical self-calibration of the replicated grating line direction and the reference plane. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 is a schematic structural diagram of a grating replication device with improved verticality provided according to an embodiment of the first aspect of the present invention;

[0027] Figure 2 is based on Figure 1 A schematic diagram of an optical path of a grating replication device with improved verticality provided by the illustrated embodiment;

[0028] Figure 3 is a schematic flow chart of a grating replication method for improving verticality provided according to an embodiment of the second aspect of the present invention;

[0029] Figure 4 is based on Figure 3 The illustrated embodiment provides a schematic flow chart of using a half-reflecting half-mirror to correct the optical path of a grating replication device for improving verticality;

[0030] Figure 5 is based on Figure 3 The illustrated embodiment provides a schematic diagram of a process for replicating a grating using substrate glass processing.

[0031] Reference numerals include:

[0032] 1 Laser, 2 Half-reflective half-mirror, 3 Grating carrying device, 31 Three-dimensional translation stage, 32 Rotating stage, 33 Coupled angular stage, 34 Adapter plate, 35 Grating clamping plate, 4 Display plane, 5 Master grating. DETAILED DESCRIPTION

[0033] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description, the same modules are represented by the same reference numerals. In the case of the same reference numerals, their names and functions are also the same. Therefore, the detailed description thereof will not be repeated.

[0034] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation of the present invention.

[0035] Refer to the following Figures 1 to 5 A grating replication device and method for improving verticality are described according to some embodiments of the present invention.

[0036] like Figure 1 to Figure 2 As shown, a grating replication device for improving verticality provided by an embodiment of the first aspect of the present invention is arranged on an optical platform, and the grating replication device for improving verticality includes a laser 1, a half-reflecting half-mirror 2, a grating carrying device 3 and a display plane 4. The laser 1 is used to emit a laser beam along the X-axis direction. The half-reflecting half-mirror 2 is tiltedly arranged in front of the laser 1, and the half-reflecting half-mirror 2 is used to split the laser beam to generate reflected light and transmitted light, so as to realize the optical path correction of the grating. The grating carrying device 3 is used to carry the master grating 5, and can adjust the posture of the master grating 5 by multi-dimensional coupling during the grating replication process; the grating carrying device 3 is arranged in the direction of the reflected light, so that the reflected light can be emitted to the surface of the master grating 5. The display plane 4 is arranged in front of the half-reflecting half-mirror 2 along the Y-axis direction, and the display plane 4 is used to receive the diffracted light and the transmitted light generated by the reflected light on the surface of the master grating 5, so as to visually observe the bright spots of the diffracted light of each order, such as -1 order, 0 order, 1 order, etc. of the master grating 5. Therefore, during the grating replication process, it is possible to calibrate in real time whether the engraved lines of the master grating 5 are perpendicular to the reference plane, and adjust the multi-dimensional posture of the master grating 5, thereby improving the detection and correction efficiency and the qualified rate of the finished product replication grating.

[0037] The X-axis direction is the direction in which the laser beam is emitted by the laser 1 , the Y-axis direction is the vertical direction, and the Z-axis direction is the direction perpendicular to both the X-axis and the Y-axis.

[0038] like Figure 1As shown, the grating carrying device 3 includes a three-dimensional displacement stage 31, a rotating stage 32, a coupled angle stage 33, an adapter plate 34 and a grating clamping plate 35. The three-dimensional displacement stage 31 is provided with an X-axis guide rail, a Y-axis guide rail and a Z-axis guide rail. The rotating stage 32 is connected to the three-dimensional displacement stage 31 so that the X-axis guide rail, the Y-axis guide rail and the Z-axis guide rail can be used to move the rotating stage 32 along the X-axis direction, the Y-axis direction and the Z-axis direction respectively. The rotating stage 32 is used to adjust the yaw of the master grating 5. The coupled angle stage 33 is connected to the rotating stage 32 through the adapter plate 34. The coupled angle stage 33 is used to adjust the pitch of the master grating 5. The grating clamping plate 35 is used to clamp master gratings 5 ​​of different sizes, so as to quickly copy master gratings 5 ​​of different sizes and expand the scope of use.

[0039] Specifically, the X-axis guide rail of the three-dimensional translation stage 31 is fixed, and the Y-axis guide rail is used to adjust the distance between the master grating 5 and the optical platform along the Y-axis direction, and a space is reserved for fine-tuning the yaw and pitch of the master grating 5; the Z-axis guide rail is used to adjust the displacement of the master grating 5 along the Z-axis direction. The three-dimensional translation stage 31 can be a manual three-dimensional translation stage 31, or an automatic three-dimensional translation stage 31 that is easy to remotely control.

[0040] like Figure 3 As shown, a grating replication method for improving verticality provided in an embodiment of the second aspect of the present invention comprises:

[0041] S102: Assemble the grating replication device with improved verticality provided according to the embodiment of the first aspect.

[0042] Specifically, assembling a grating replication device with improved verticality comprises the following steps:

[0043] S102-2: Fix the laser 1 and the three-dimensional translation stage 31 on the optical platform respectively, fix the X-axis guide rail of the three-dimensional translation stage 31, use the Y-axis guide rail to adjust the distance between the master grating 5 and the optical platform along the Y-axis direction, and reserve space for fine-tuning the yaw and pitch of the master grating 5; use the Z-axis guide rail to adjust the displacement of the master grating 5 along the Z-axis direction.

[0044] S102 - 4 : Connect the rotating table 32 above the three-dimensional translation table 31 , connect the coupled angular table 33 above the rotating table 32 using the adapter plate 34 , and fix the grating clamping plate 35 above the coupled angular table 33 .

[0045] S102-6: Place the display plane 4 at a suitable position along the Y-axis direction, place the half-reflective half-mirror 2 at an angle between the laser 1 and the display plane 4, and clamp and fix the master grating 5 on the grating clamping plate 35.

[0046] S104: Use the half-reflecting half-mirror 2 to correct the optical path of the grating replication device to improve the verticality.

[0047] S106: Using the substrate glass to process and replicate the grating.

[0048] like Figure 2 and Figure 4 As shown, a half-reflective half-mirror 2 is used to correct the optical path of a grating replication device for improving verticality, including:

[0049] S104-2: Clamp the master grating 5 on the grating clamping plate 35 according to the posture when it is used in the spectrometer, so that the engraved lines of the master grating 5 are arranged along the Y-axis direction.

[0050] S104 - 4 : Adjust the pitch of the master grating 5 so that the bright spots of the reflected light and the transmitted light on the display plane 4 coincide with each other, and determine the contour lines according to the laser emission point of the laser 1 , the bright spots on the master grating 5 and the bright spots on the display plane 4 .

[0051] Specifically, a laser 1 is used to illuminate a half-reflecting mirror 2. The laser beam emitted by the laser 1 is split into reflected light and transmitted light after passing through the half-reflecting mirror 2. The reflected light produces zero-order reflection after reaching point A on the master grating 5, and a bright spot is displayed on the display plane 4. The pitch of the master grating 5 is adjusted so that the bright spots of the reflected light and the transmitted light on the display plane 4 coincide.

[0052] At this time, the laser emission point of the laser 1, the bright spot on the master grating 5 and the bright spot on the display plane 4 are at the same height, that is, the plane where the laser beam emitted by the laser 1 and the light reflected by the master grating 5 are located is perpendicular to the engraved lines on the surface of the master grating 5.

[0053] S104-6: Adjust the position of the master grating 5 so that the bright spots of the -2nd, -1st, 1st and 2nd order diffraction lights coincide with the contour lines, determine the position of the master grating 5 and fix the master grating 5.

[0054] Specifically, according to the grating diffraction principle, there are bright spots of -2, -1, 1, and 2 on the display plane 4. The position of the master grating 5 is adjusted so that the bright spots of -2, -1, 1, and 2 coincide with the contour lines, that is, the light spots of each diffraction order are located on the same horizontal line in the plane, that is, the bottom surface of the master grating 5 is determined to be perpendicular to the contour surface determined according to the contour lines. If the straight line connecting the light spots of each diffraction order on the display plane 4 is inclined, it means that the engraved direction of the master grating 5 is not perpendicular to the reference plane.

[0055] like Figure 5 As shown, the grating is replicated using substrate glass processing, including:

[0056] S106 - 2 : Apply reagent on the bottom surface of the master grating 5 and the substrate glass, and apply ultraviolet curing glue on the bottom surface of the master grating 5 .

[0057] S106-4: Adjust the Z-axis guide rail so that the bottom surface of the master grating 5 contacts the substrate glass.

[0058] S106-6: The optical path of the grating replication device with improved verticality is calibrated again to verify the position of the master grating 5 at this time. After adjustment, the master grating 5 is fixed using the grating clamping plate 35.

[0059] S106-8: Use an ultraviolet light source to irradiate the ultraviolet curing glue until it is completely cured, and separate the master grating 5 from the substrate glass, so as to obtain a high verticality and high-quality replica grating.

[0060] like Figure 2 As shown in the figure, the offset angle of the replica grating is quantitatively analyzed and calculated. O is the incident point of the laser beam emitted by laser 1 on the semi-reflective mirror 2, A is the diffraction point on the master grating 5, B To display the transmitted light spot on plane 4, B 1 is the diffraction spot on the display plane 4, C for A The projection of the point in the vertical direction on the laser beam emitted by laser 1, θ To copy the offset angle of the grating lines, we can get:

[0061] sin -1 ( AC / AB 1)≈tan -1 ( AC / B 1 C )= θ ,

[0062] in, AC is the distance between the diffraction point on the master grating 5 and the laser beam emitted by the laser 1 in the Y-axis direction, AB 1 is the distance between the diffraction point on the master grating 5 and the diffraction spot on the display plane 4, B 1 C It is the distance between the diffraction spot on the display plane 4 and the diffraction point on the master grating 5 in the X-axis direction.

[0063] Although the embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and cannot be understood as limiting the present invention. Those skilled in the art may change, modify, replace and modify the above embodiments within the scope of the present invention.

[0064] The above specific implementations of the present invention do not constitute a limitation on the protection scope of the present invention. Any other corresponding changes and modifications made based on the technical concept of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A grating replication device for improving verticality, characterized in that: include: A laser (1), wherein the laser (1) is used to emit a laser beam; A half-reflecting half-mirror (2), the half-reflecting half-mirror (2) being arranged obliquely in front of the laser (1), the half-reflecting half-mirror (2) being used to split the laser beam to generate reflected light and transmitted light; A grating carrying device (3), the grating carrying device (3) being used to carry a master grating (5), the grating carrying device (3) being arranged in the direction of the reflected light so that the reflected light can be emitted to the surface of the master grating (5); A display plane (4), the display plane (4) being arranged in front of the half-reflecting half-mirror (2), the display plane (4) being used to receive the diffracted light generated by the reflected light on the surface of the master grating (5) and the transmitted light; Wherein, the grating carrying device (3) comprises: A three-dimensional displacement platform (31), wherein the three-dimensional displacement platform (31) is provided with an X-axis guide rail, a Y-axis guide rail and a Z-axis guide rail; a rotating table (32), the rotating table (32) being connected to the three-dimensional displacement table (31), so that the X-axis guide rail, the Y-axis guide rail and the Z-axis guide rail can be used to move the rotating table (32) along the X-axis direction, the Y-axis direction and the Z-axis direction respectively, and the rotating table (32) is used to adjust the deflection of the master grating (5); A coupled angle table (33), the coupled angle table (33) being connected to the rotating table (32) via an adapter plate (34), the coupled angle table (33) being used to adjust the pitch of the master grating (5); A grating clamping plate (35), wherein the grating clamping plate (35) is used to clamp the master grating (5).

2. A grating replication method for improving verticality, characterized in that: include: Assembling the grating replication device with improved verticality according to claim 1; Using the half-reflecting half-mirror (2) to perform optical path correction on the grating replication device for improving verticality; The grating is replicated using substrate glass processing.

3. The grating replication method for improving verticality according to claim 2, characterized in that: Using the half-reflecting half-mirror (2) to correct the optical path of a grating replication device with improved verticality comprises: Clamping the master grating (5) on the grating clamping plate (35) so that the engraved lines of the master grating (5) are arranged along the Y-axis direction; The pitch of the master grating (5) is adjusted so that the bright spots of the reflected light and the transmitted light on the display plane (4) coincide with each other, and the contour lines are determined according to the laser emission point of the laser (1), the bright spots on the master grating (5) and the bright spots on the display plane (4); The position of the master grating (5) is adjusted so that the bright spots of the -2nd order, -1st order, 1st order and 2nd order diffraction lights coincide with the contour lines, the position of the master grating (5) is determined and the master grating (5) is fixed.

4. The grating replication method for improving verticality according to claim 2, characterized in that: Replicating gratings using substrate glass processing includes: Applying a reagent on the bottom surface of the master grating (5) and the substrate glass, and applying a UV curing glue on the bottom surface of the master grating (5); Adjusting the Z-axis guide rail so that the bottom surface of the master grating (5) contacts the substrate glass; Re-calibrating the optical path of the grating replication device with improved verticality; The ultraviolet curing glue is irradiated with an ultraviolet light source until it is completely cured, and the master grating (5) is separated from the substrate glass, thereby obtaining the replica grating.

5. The grating replication method for improving verticality according to claim 3, characterized in that: The quantitative analysis and calculation of the offset angle of the replica grating is as follows: sin -1 ( AC / AB 1)≈tan -1 ( AC / B 1 C )= θ , in, AC is the distance in the Y-axis direction between the diffraction point on the master grating (5) and the laser beam emitted by the laser (1), AB 1 is the distance between the diffraction point on the master grating (5) and the diffraction spot on the display plane (4), B 1 C is the distance between the diffraction spot on the display plane (4) and the diffraction point on the master grating (5) in the X-axis direction, θ is the offset angle of the lines of the replica grating.

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