A cleaning device based on multilayer laminar silicon material

Abstract

The present application relates to the technical field of silicon material cleaning, and particularly relates to a cleaning device based on multi-layer advection silicon material. The cleaning device comprises a fixing device, a liquid outlet device, a backflow pump fixedly connected between the outer wall of the liquid outlet device and the inner wall of the fixing device, an output end of the backflow pump fixedly connected with the outer wall of the liquid outlet device, a liquid suction pipe fixedly connected between the outer wall of the liquid suction pipe and the input end of the backflow pump, a splicing device slidably connected between the outer wall of the splicing device and the outer wall of the fixing device, and a circulating track formed by the fixing device and the splicing device. The cleaning liquid is circulated and flows, and is extracted by the backflow pump for recycling. The cleaning liquid flows to accelerate the cleaning process of the silicon material, reduce the time required for cleaning the internal impurities of the silicon material, and finally make the liquid flow stably through the surface of the silicon material, so that the silicon material is cleaned by advection.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon material cleaning, and in particular to a cleaning device based on multi-layer advection silicon material. Background Art

[0002] The large amount of recycled silicon materials such as heads, tails, and edges generated during silicon wafer production requires a cleaning process before they can be reused. Due to the different sources of recycled silicon materials, the shapes of the recycled silicon materials are irregular, and there are a large number of defects such as gaps and holes in the silicon materials. As a result, a large amount of cleaning liquid remains in the cleaned silicon materials and cannot be effectively removed, seriously affecting the quality of the recycled silicon materials. Traditional cleaning methods have many problems. Cleaning efficiency is generally low, and it takes a long time to remove impurities from the silicon materials. Moreover, during the cleaning process, the liquid flow is easily turbulent, and high-speed liquid flow may cause impact on the silicon materials, causing silicon materials to stack up and affecting the cleaning effect. At the same time, the lack of effective anti-backflow measures may lead to unstable flow of the cleaning liquid, which in turn affects the cleaning quality. In addition, it is difficult to flexibly control the flow rate of the cleaning liquid, the water level height, and the cleaning method.

[0003] The present invention constructs a circulation track by arranging a fixing device and a splicing device, and cooperates with a reflux pump to realize the recycling of cleaning liquid and speed up the cleaning process; the blocking rods of the liquid storage box in the liquid outlet device are arranged in a trapezoidal shape, which effectively buffers the high-speed liquid flow and prevents the silicon material from being impacted; the horizontal flow cleaning device ensures that the liquid flows stably over the surface of the silicon material for horizontal flow cleaning; the anti-backflow device is based on a special structure, does not require additional power to achieve anti-backflow and makes the cleaning liquid more evenly distributed; the flow control device can flexibly control the flow rate, circulation process and water level of the cleaning liquid to realize different cleaning methods; the present invention provides an efficient, stable and flexible solution for silicon material cleaning. Summary of the Invention

[0004] In view of the deficiencies of the prior art, the present invention solves the technical problems thereof by adopting the following technical solutions: a cleaning device based on multi-layer horizontal flow silicon material, comprising: a fixing device; a liquid outlet device, wherein the outer wall of the liquid outlet device is fixedly connected to the inner wall of the fixing device with a reflux pump, and the output end of the reflux pump is fixedly connected to the outer wall of the liquid outlet device; a liquid extraction pipe, wherein the outer wall of the liquid extraction pipe is fixedly connected to the input end of the reflux pump; a splicing device, wherein the outer wall of the splicing device is slidably connected to the outer wall of the fixing device; the fixing device comprises a fixing seat, a reflux groove is provided in the wall of the fixing seat, a flow control device is fixedly connected to the outer wall of the fixing seat, a connecting groove is provided in the wall of the fixing seat, an anti-overflow groove is provided above the connecting groove, and the anti-overflow groove is provided in the wall of the fixing seat, A guide plate is symmetrically provided at the bottom end of the fixed seat, a connecting groove is provided above the guide plate, and the connecting groove is symmetrically opened in the wall of the fixed seat, and a plug-in groove is provided on the side wall inside the fixed seat; the splicing device includes a movable seat, and a force-bearing groove is provided on the side wall outside the movable seat, and a waterproof ring is fixedly connected to the side wall inside the movable seat, and a guide plate is fixedly connected to the outer wall of the bottom of the waterproof ring, and a positioning plate is fixedly connected to the outer wall of the top of the guide plate, and a horizontal flow cleaning device is fixedly connected to the side wall of the positioning plate. The fixing device and the splicing device are formed into a circulating track to promote the circulation of the cleaning liquid, and the reflux pump is cooperated to extract the cleaning liquid for recycling. Through the flow cleaning, the cleaning process of the silicon material is accelerated, and the time required for cleaning impurities inside the silicon material is reduced.

[0005] Preferably, the connecting groove is connected to the reflux groove, the reflux groove is connected to the anti-overflow groove, the side walls of the waterproof ring and the side walls of the positioning plate are slidingly connected to the side walls of the guide plate, the outer wall of the bottom of the guide plate is slidingly connected to the outer wall of the top of the guide plate, and the inner wall of the fixed seat is fixedly connected to the outer wall of the liquid extraction tube.

[0006] Preferably, the horizontal flow cleaning device includes a fixed box, the inner wall of the fixed box is fixedly connected to the limiting frame, the inner wall of the limiting frame is plugged with an anti-backflow device, the inner wall of the fixed box is slidably connected to the placement frame, the side walls of the placement frame are symmetrically provided with water grooves, the inner wall of the fixed box is slidably connected to a pressure plate, the outer wall of the bottom of the pressure plate contacts the outer wall of the top of the placement frame, the outer wall of the fixed box is plugged with the inner wall of the fixed seat through the plug-in groove, the side wall of the fixed box is fixedly connected to the side wall of the positioning plate, and a horizontal flow cleaning device is provided. The fixed box is positioned by the plug-in groove to stably wrap the liquid outlet position, so that the liquid flow is stably input and the liquid flow stably flows through the surface of the silicon material, thereby performing horizontal flow cleaning on the silicon material.

[0007] Preferably, the anti-backflow device includes an insertion block, the outer wall of the insertion block is connected to the outer wall of the limit frame through an anti-slip groove, and the anti-slip groove is opened on the outer wall of the insertion block, the inner wall of the insertion block is symmetrically provided with auxiliary guide grooves, the inner wall of the insertion block is provided with a corrugated groove, and the inner wall of the insertion block is fixedly connected with a diversion column. When the anti-backflow device is provided, when the fluid flows forward, the shape of the corrugated groove will guide the fluid forward, and the auxiliary guide grooves symmetrical on both sides can increase the water flow rate and make the cleaning liquid more evenly distributed. During the cleaning process, this structure can reduce the poor cleaning effect caused by liquid flow turbulence, ensure the efficient multi-layer horizontal flow cleaning, and do not require additional power to assist in anti-backflow, saving equipment operating costs.

[0008] Preferably, the liquid outlet device includes a liquid inlet pipe, the inner wall of the liquid inlet pipe is fixedly connected to a diverter pipe, the outer wall of the diverter pipe is fixedly connected to a liquid storage box, the inner wall of the liquid storage box is fixedly connected to a blocking rod, the inner wall of the liquid storage box is fixedly connected to a connecting square tube, the outer wall of the liquid inlet pipe is fixedly connected to the output end of the reflux pump, the outer wall of the connecting square tube is fixedly connected to the inner wall of the fixing seat through a connecting groove, the side wall outside the liquid storage box is fixedly connected to the side wall inside the fixing seat, and a liquid outlet device is provided. The blocking rods in the liquid storage box are arranged in a trapezoidal shape and the number decreases successively, so that there are more blocking rods close to the liquid inlet position of the diverter pipe, which can effectively buffer the high-speed liquid flow that has just entered, quickly reduce the liquid flow speed, avoid liquid flow turbulence, cause impact on silicon material, and prevent silicon material stacking.

[0009] Preferably, the flow control device includes a fixed plate, the outer wall of the top of the fixed plate is fixedly connected to a servo motor, the output end of the servo motor is fixedly connected to a worm, the outer wall of the fixed plate is fixedly connected to a positioning frame, the inner wall of the positioning frame is slidably connected to a valve, the inner wall of the valve is rotatably connected to a threaded rod, the outer wall of the threaded rod is threadedly connected to an internally threaded cylinder, the side wall outside the internally threaded cylinder is fixedly connected to a worm gear, the worm gear is meshed with the worm, the outer wall of the internally threaded cylinder is rotatably connected to the inner wall of the positioning frame, the outer wall of the positioning frame and the outer wall of the fixed plate are both fixedly connected to the outer wall of the fixed seat, a flow control device is provided to control the flow rate and circulation process of the cleaning liquid inside the cleaning device, drive the valve to slide in the positioning frame, realize the control of the water level height, and control the cleaning liquid to perform circulating horizontal cleaning and soaking, thereby realizing cleaning in different ways.

[0010] The beneficial effects of the present invention are as follows:

[0011] 1. The present invention forms a circulating track by setting a fixing device and a splicing device to promote the circulation of the cleaning liquid. The reflux pump is used to extract the cleaning liquid for recycling. Through the flow cleaning, the cleaning process of the silicon material is accelerated and the time required to clean the impurities inside the silicon material is reduced.

[0012] 2. The present invention provides a liquid outlet device, and the blocking rods in the liquid storage box are arranged in a trapezoidal shape and the number decreases successively, so that the number of blocking rods close to the liquid inlet position of the diversion pipe is large, which can effectively buffer the high-speed liquid flow that has just entered, quickly reduce the liquid flow speed, avoid liquid flow turbulence, cause impact on the silicon material, and prevent silicon material stacking.

[0013] 3. The present invention provides a horizontal flow cleaning device. The fixed box is positioned in the plug-in slot to stably wrap the liquid outlet position, so that the liquid flow is stably input and flows stably over the surface of the silicon material, thereby performing horizontal flow cleaning on the silicon material.

[0014] 4. The present invention sets an anti-backflow device. When the fluid flows in the forward direction, the shape of the corrugated groove will guide the fluid forward. The auxiliary guide grooves symmetrical on both sides can increase the water flow rate and make the cleaning liquid more evenly distributed. During the cleaning process, this structure can reduce the poor cleaning effect caused by liquid flow turbulence, ensure the efficient multi-layer horizontal flow cleaning, and do not require additional power to assist in anti-backflow, saving equipment operating costs.

[0015] 5. The present invention controls the flow rate and circulation process of the cleaning liquid inside the cleaning device by setting a flow control device, drives the valve to slide in the positioning frame, realizes the control of the water level height, and can control the cleaning liquid to circulate horizontally for cleaning and soaking, thereby realizing different cleaning methods. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a front view of the present invention;

[0017] Figure 2 It is a structural schematic diagram of the fixing device of the present invention;

[0018] Figure 3 It is a schematic diagram of the local structure of the fixing seat of the present invention;

[0019] Figure 4 It is a structural schematic diagram of the flow control device of the present invention;

[0020] Figure 5 It is a structural schematic diagram of the liquid discharge device of the present invention;

[0021] Figure 6 It is a structural schematic diagram of the splicing device of the present invention;

[0022] Figure 7 is an exploded view of the advection cleaning device of the present invention;

[0023] Figure 8 It is a cross-sectional view of the backflow prevention device of the present invention.

[0024] In the figure: 1. Fixing device; 2. Liquid outlet device; 3. Reflux pump; 4. Liquid extraction pipe; 5. Splicing device; 11. Fixing seat; 12. Reflux groove; 13. Flow control device; 14. Connecting groove; 15. Guide plate; 16. Anti-overflow groove; 17. Connecting groove; 18. Connecting groove; 131. Fixing plate; 132. Servo motor; 133. Worm; 134. Worm gear; 135. Internal threaded barrel; 136. Threaded rod; 137. Valve; 138. Positioning frame; 21. Liquid inlet pipe; 22. Diverter pipe; 23. Liquid storage box; 24. Blocking rod; 25. Connecting square tube; 51. Moving seat; 52. Force groove; 53. Waterproof ring; 54. Guide plate; 55. Positioning plate; 56. Horizontal flow cleaning device; 561. Fixing box; 562. Limiting frame; 563. Anti-backflow device; 564. Placement frame; 565. Water trough; 566. Pressing plate; 5631. Insert block; 5632. Anti-slip groove; 5633. Auxiliary guide groove; 5634. Corrugated groove; 5635. Diverter column. DETAILED DESCRIPTION

[0025] The present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for purposes of illustration and description and are not intended to be exhaustive or to limit the invention to the disclosed forms. Many modifications and variations will be apparent to those skilled in the art. The embodiments are chosen and described to better illustrate the principles of the invention and its practical application, and to enable those skilled in the art to understand the invention and design various embodiments with various modifications suitable for specific applications.

[0026] Example: See Figure 1 - Figure 8The present invention provides a technical solution: a cleaning device based on multi-layer horizontal flow silicon material, comprising: a fixing device 1; a liquid outlet device 2, the outer wall of the liquid outlet device 2 is fixedly connected to the inner wall of the fixing device 1, and the output end of the reflux pump 3 is fixedly connected to the outer wall of the liquid outlet device 2; a liquid extraction pipe 4, the outer wall of the liquid extraction pipe 4 is fixedly connected to the input end of the reflux pump 3; a splicing device 5, the outer wall of the splicing device 5 is slidably connected to the outer wall of the fixing device 1; the fixing device 1 comprises a fixing seat 11, a reflux groove 12 is opened in the wall of the fixing seat 11, a flow control device 13 is fixedly connected to the outer wall of the fixing seat 11, a connecting groove 14 is opened in the wall of the fixing seat 11, an anti-overflow groove 16 is arranged above the connecting groove 14, and the anti-overflow groove 16 is opened in the wall of the fixing seat 11, a guide plate 15 is symmetrically arranged at the bottom end of the interior of the fixing seat 11, a connecting groove 17 is arranged above the guide plate 15, and the connecting groove 17 is symmetrically opened in the wall of the fixing seat 11 The side wall inside the fixed seat 11 is provided with a plug-in groove 18; the splicing device 5 includes a movable seat 51, and the side wall outside the movable seat 51 is provided with a force groove 52. The side wall inside the movable seat 51 is fixedly connected with a waterproof ring 53, and the outer wall at the bottom of the waterproof ring 53 is fixedly connected with a guide plate 54, and the outer wall at the top of the guide plate 54 is fixedly connected with a positioning plate 55. The side wall of the positioning plate 55 is fixedly connected with a horizontal flow cleaning device 56. The fixing device 1 is the basic component that connects the entire device. At the same time, the reflux groove 12, connecting groove 14, anti-overflow groove 16, guide plate 15, connecting groove 17 and other structures in the fixed seat 11 are used in conjunction with each other. Among them, the connecting groove 17 is connected to the reflux groove 12 and the anti-overflow groove 16. This design is conducive to the circulation of cleaning liquid inside the cleaning device composed of the fixing device 1 and the splicing device 5, and the liquid extraction pipe 4 is connected to the liquid outlet device 2 through the reflux pump 3. The reflux pump 3 can extract the cleaning liquid for recycling.

[0027] The connecting groove 17 is connected to the reflux groove 12, the reflux groove 12 is connected to the anti-overflow groove 16, the side walls of the waterproof ring 53 and the side walls of the positioning plate 55 are slidingly connected to the side walls of the guide plate 15, the outer wall of the bottom of the guide plate 15 is slidingly connected to the outer wall of the top of the guide plate 54, and the inner wall of the fixing seat 11 is fixedly connected to the outer wall of the liquid extraction tube 4.

[0028] The horizontal flow cleaning device 56 includes a fixed box 561, the inner wall of the fixed box 561 is fixedly connected to the limit frame 562, the inner wall of the limit frame 562 is plugged with an anti-backflow device 563, the inner wall of the fixed box 561 is slidably connected to the placement frame 564, the side wall of the placement frame 564 is symmetrically provided with a water channel 565, the inner wall of the fixed box 561 is slidably connected to the pressure plate 566, the outer wall of the bottom of the pressure plate 566 contacts the outer wall of the top of the placement frame 564, and the outer wall of the fixed box 561 is connected to the fixed seat 1 through the insertion groove 18. 1 is plugged into the inner wall of the fixing box 561, and the side wall of the positioning plate 55 is fixedly connected. The fixing box 561 in the horizontal flow cleaning device 56 provides an installation position for other components, wherein the placement frame 564 is used to place the silicon material. When placed, the silicon material is flatly laid on the top of the bottom end of the placement frame 564. The water groove 565 on its side wall facilitates the circulation of the cleaning liquid, and the water groove 565 on one side is opposite to the connecting square tube 25. The fixing box 561 is positioned in the insertion groove 18 to stably wrap the liquid outlet position, so that the liquid flow is stably input.

[0029] The anti-backflow device 563 includes an insert block 5631. The outer wall of the insert block 5631 is plugged into the outer wall of the limit frame 562 through an anti-slip groove 5632. The anti-slip groove 5632 is provided on the outer wall of the insert block 5631. Auxiliary guide grooves 5633 are symmetrically provided on the inner wall of the insert block 5631. A corrugated groove 5634 is provided on the inner wall of the insert block 5631. A diverter column 5635 is fixedly connected to the inner wall of the insert block 5631. The auxiliary guide groove 5633, the corrugated groove 5634 and the diverter column 5635 are provided on the inner wall of the insert block 5631 to guide the water flow and prevent the backflow of the horizontal flow. The specific process is to form a Tesla valve through the corrugated groove 5634 and the diverter column 5635. Due to the Tesla valve structure, the cleaning fluid flows relatively smoothly in the forward direction, but is greatly hindered in the reverse flow, thereby preventing backflow. During forward flow, the fluid can flow relatively naturally along specific bends and branch paths in the channel of the Tesla valve. During reverse flow, the fluid needs to overcome complex bends, corners and mutual interference between fluids. When the fluid passes through the bends of the corrugated groove 5634, vortices and recirculation areas will be generated. These areas will hinder the reverse movement of the fluid, resulting in a significant increase in the resistance to reverse flow.

[0030] The liquid outlet device 2 includes a liquid inlet pipe 21, the inner wall of the liquid inlet pipe 21 is fixedly connected to a shunt pipe 22, the outer wall of the shunt pipe 22 is fixedly connected to a liquid storage box 23, the inner wall of the liquid storage box 23 is fixedly connected to a blocking rod 24, the inner wall of the liquid storage box 23 is fixedly connected to a connecting square tube 25, the outer wall of the liquid inlet pipe 21 is fixedly connected to the output end of the reflux pump 3, the outer wall of the connecting square tube 25 is fixedly connected to the inner wall of the fixing seat 11 through the connecting groove 14, the side wall outside the liquid storage box 23 is fixedly connected to the side wall inside the fixing seat 11, and under the pressure provided by the reflux pump 3, the liquid is cleared. After the washing liquid moves upward along the liquid inlet pipe 21, it reaches the position of the diversion pipe 22. Similarly, under the action of pressure, the washing liquid enters the diversion pipe 22 and is diverted into the liquid storage box 23. The blocking rods 24 in the liquid storage box 23 can play a certain diversion and buffering role. This is because the blocking rods 24 are arranged in a trapezoidal shape and the number decreases successively. This arrangement makes the number of blocking rods 24 close to the liquid inlet position of the diversion pipe 22 large, which can effectively buffer the high-speed liquid flow that has just entered, quickly reduce the liquid flow speed, avoid liquid flow turbulence, cause impact on the silicon material, and prevent silicon material stacking.

[0031] The flow control device 13 includes a fixed plate 131, the outer wall of the top of the fixed plate 131 is fixedly connected to a servo motor 132, the output end of the servo motor 132 is fixedly connected to a worm 133, the outer wall of the fixed plate 131 is fixedly connected to a positioning frame 138, the inner wall of the positioning frame 138 is slidably connected to a valve 137, the inner wall of the valve 137 is rotatably connected to a threaded rod 136, the outer wall of the threaded rod 136 is threadedly connected to an internal threaded cylinder 135, the outer side wall of the internal threaded cylinder 135 is fixedly connected to a worm gear 134, and the worm gear 138 is fixedly connected to the outer wall of the worm gear 134. 4 is engaged with the worm 133, the outer wall of the internally threaded barrel 135 is rotatably connected to the inner wall of the positioning frame 138, the outer wall of the positioning frame 138 and the outer wall of the fixing plate 131 are fixedly connected to the outer wall of the fixing seat 11, the servo motor 132 of the flow control device 13 drives the worm 133 to rotate, the worm 133 is engaged with the worm wheel 134, thereby rotating the internally threaded barrel 135, and the internally threaded barrel 135 is threadedly connected to the threaded rod 136, thereby driving the valve 137 to slide in the positioning frame 138 to control the water level.

[0032] Working principle:

[0033] When in use, the fixing device 1 is the basic component that connects the entire device. At the same time, the reflux groove 12, connecting groove 14, anti-overflow groove 16, guide plate 15, connecting groove 17 and other structures in the fixing seat 11 are used in conjunction with each other. Among them, the connecting groove 17 is connected to the reflux groove 12 and the anti-overflow groove 16. This design is conducive to the circulation of the cleaning liquid inside the cleaning device composed of the fixing device 1 and the splicing device 5. The liquid extraction pipe 4 is connected to the liquid outlet device 2 through the reflux pump 3. The reflux pump 3 can extract the cleaning liquid for recycling. During the cleaning process, the cleaning liquid submerges the uppermost horizontal flow cleaning device 56, and the anti-overflow groove 16 is provided to prevent the cleaning liquid from overflowing from both sides of the fixing device 1.

[0034] During the liquid circulation process, the starting position of the cleaning liquid is at the liquid outlet device 2, and the liquid inlet pipe 21 receives the cleaning liquid output by the reflux pump 3. Under the pressure provided by the reflux pump 3, the cleaning liquid moves upward along the liquid inlet pipe 21 and reaches the position of the diverter pipe 22. Similarly, under the action of pressure, the cleaning liquid enters the diverter pipe 22 and is diverted to the liquid storage box 23. The blocking rod 24 in the liquid storage box 23 can play a certain role in guiding and buffering. This is because the blocking rods 24 are arranged in a trapezoidal shape and the number decreases in sequence. This arrangement makes the number of blocking rods 24 close to the liquid inlet position of the diverter pipe 22 large, which can effectively buffer the liquid just entering The high-speed liquid flow quickly reduces the liquid flow speed, avoids liquid flow turbulence, impacts the silicon material, and prevents silicon material from stacking. As the liquid flow advances toward the interior of the liquid storage box 23, the number of blocking rods 24 decreases, allowing the liquid flow to smoothly transition to the subsequent area, forming a relatively stable horizontal flow, thereby making the cleaning liquid evenly distributed in the liquid storage box 23, thereby reducing the degree of turbulence of the liquid flow when passing through the connecting square tube 25, making the cleaning process more efficient and safe, and also helping to improve the cleaning quality, thereby ensuring the stability of the multi-layer horizontal flow cleaning effect, so that the connecting square tube 25 stably transports the cleaning liquid to the horizontal flow cleaning device 56;

[0035] The positioning plate 55 above the guide plate 54 is connected to the horizontal flow cleaning device 56. The fixed box 561 in the horizontal flow cleaning device 56 provides an installation position for other components. The placement frame 564 is used to place the silicon material. When placing it, the silicon material is flat on the top of the bottom end of the placement frame 564. The water groove 565 on its side wall facilitates the circulation of the cleaning liquid, and the water groove 565 on one side is directly opposite the connecting square tube 25. The fixed box 561 is positioned in the plug-in slot 18 to stably wrap the liquid outlet position, so that the liquid flow is stably input and flows stably over the surface of the silicon material to perform horizontal cleaning on the silicon material. The setting of the pressure plate 566 ensures the fixation of the placement frame 564.

[0036] The insertion block 5631 of the anti-backflow device 563 is inserted with the limiting frame 562 through the anti-escape groove 5632 to ensure stable installation. The auxiliary flow guide groove 5633, the corrugated groove 5634 and the flow dividing column 5635 arranged on the inner wall of the insertion block 5631 are used to guide the water flow and prevent the horizontal flow from backflowing. The specific process forms a Tesla valve through the corrugated groove 5634 and the flow dividing column 5635. Since the structure of the Tesla valve makes the cleaning liquid relatively smooth in forward flow and is greatly hindered in reverse flow, the stability and unidirectionality of the horizontal cleaning are ensured. The smoothness of the Tesla valve in forward flow and the hindering in reverse flow are mainly based on its special geometric structure. In principle, in forward flow, the fluid can flow naturally along the specific curved and branched path in the channel of the Tesla valve, while in reverse flow, the fluid needs to overcome complex bends, corners and mutual interference between fluids. When the fluid passes through the bend of the corrugated groove 5634, eddy and backflow area are generated, which hinders the reverse movement of the fluid, resulting in increased resistance to reverse flow. Therefore, when the fluid flows in reverse, the corrugated structure causes the fluid to collide, turn and other complex flow changes, thereby hindering the reverse movement of the fluid and making the resistance to reverse flow much greater than the resistance to forward flow. When the fluid flows forward, the shape of the corrugated groove 5634 guides the fluid to flow forward, and the symmetrical auxiliary flow guide grooves 5633 on both sides can increase the water flow and make the cleaning liquid more evenly distributed. In the cleaning process, this structure can reduce the poor cleaning effect caused by turbulent liquid flow, ensure efficient multi-layer horizontal cleaning, reduce liquid energy loss, make the flow of the cleaning liquid more in line with the requirements of horizontal cleaning, and further improve the cleaning quality of the silicon material. Moreover, no additional power is needed to assist in preventing backflow, saving equipment operation cost.

[0037] The moving seat 51 of the split device 5 can slide on the outer wall of the fixed seat 11 of the fixed device 1. In actual use, the fixed seat 11 is fixed in position, the moving seat 51 is placed on the movable activity plate, and the force receiving groove 52 on the moving seat 51 receives the pushing force and pulling force for quickly disassembling and splitting the cleaning device. The waterproof ring 53 inside the moving seat 51 plays a waterproof role to prevent the cleaning liquid from overflowing the moving seat 51, and the flow guide plate 54 at the bottom of the waterproof ring 53 cooperates with the guide plate 15 to provide a flow channel for the flow of the cleaning liquid. At this time, the cleaning liquid flowing out of the anti-backflow device 563 enters the flow channel composed of the waterproof ring 53, the flow guide plate 54, the positioning plate 55, the guide plate 15, the fixed seat 11 and the fixed plate 131. Since backflow is prevented, after the cleaning liquid is discharged, it moves to both sides and finally passes through the flow control device 13 to enter the backflow groove 12 through the communication groove 17, completing the overall circulation of the cleaning liquid. Through the flow of the cleaning liquid, the cleaning process of the silicon material is accelerated, and the time required to clean the impurities inside the silicon material is reduced.

[0038] A flow control device 13 is provided to control the flow rate and circulation process of the cleaning liquid inside the cleaning device. The servo motor 132 of the flow control device 13 drives the worm 133 to rotate, and the worm 133 engages with the worm wheel 134, thereby rotating the internal threaded barrel 135. The internal threaded barrel 135 is threadedly connected to the threaded rod 136, thereby driving the valve 137 to slide in the positioning frame 138 to achieve control of the water level height. The cleaning liquid can be controlled to perform circulating horizontal cleaning and soaking, realizing different cleaning methods, making the cleaning process more stable and efficient.

[0039] Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without making creative work should fall within the scope of protection of the present invention. Structures, devices, and operating methods not specifically described and explained in the present invention are implemented in accordance with conventional means in the field unless otherwise specified or limited.

Claims

1. A cleaning device based on multi-layer advection silicon material, characterized in that: include: Fixture (1); A liquid outlet device (2), wherein the outer wall of the liquid outlet device (2) is fixedly connected to the inner wall of the fixing device (1) A reflux pump (3), wherein the output end of the reflux pump (3) is fixedly connected to the outer wall of the liquid outlet device (2); A liquid extraction pipe (4), wherein the outer wall of the liquid extraction pipe (4) is fixedly connected to the input end of the reflux pump (3); A splicing device (5), wherein the outer wall of the splicing device (5) is slidably connected to the outer wall of the fixing device (1); The fixing device (1) comprises a fixing seat (11), a reflux groove (12) is provided in the wall of the fixing seat (11), a flow control device (13) is fixedly connected to the outer wall of the fixing seat (11), a connecting groove (14) is provided in the wall of the fixing seat (11), an anti-overflow groove (16) is provided above the connecting groove (14), and the anti-overflow groove (16) is provided in the wall of the fixing seat (11), a guide plate (15) is symmetrically provided at the bottom end of the interior of the fixing seat (11), a connecting groove (17) is provided above the guide plate (15), and the connecting groove (17) is symmetrically provided in the wall of the fixing seat (11), and a plug-in groove (18) is provided on the side wall of the interior of the fixing seat (11); The splicing device (5) includes a movable seat (51), a side wall outside the movable seat (51) is provided with a force-bearing groove (52), a side wall inside the movable seat (51) is fixedly connected to a waterproof ring (53), an outer wall at the bottom of the waterproof ring (53) is fixedly connected to a guide plate (54), an outer wall at the top of the guide plate (54) is fixedly connected to a positioning plate (55), and a side wall of the positioning plate (55) is fixedly connected to a horizontal flow cleaning device (56); The horizontal flow cleaning device (56) comprises a fixed box (561), the inner wall of the fixed box (561) is fixedly connected to a limit frame (562), the inner wall of the limit frame (562) is plugged with an anti-backflow device (563), the inner wall of the fixed box (561) is slidably connected to a placement frame (564), the side wall of the placement frame (564) is symmetrically provided with a water trough (565), and the inner wall of the fixed box (561) is slidably connected to a pressure plate (566); The anti-backflow device (563) comprises an insertion block (5631), the outer wall of the insertion block (5631) is plugged into the outer wall of the limit frame (562) via an anti-slip groove (5632), and the anti-slip groove (5632) is provided on the outer wall of the insertion block (5631), the inner wall of the insertion block (5631) is symmetrically provided with auxiliary guide grooves (5633), the inner wall of the insertion block (5631) is provided with a corrugated groove (5634), and the inner wall of the insertion block (5631) is fixedly connected with a diversion column (5635).

2. The cleaning device based on multi-layer advection silicon material according to claim 1, characterized in that: The communicating groove (17) is connected to the reflux groove (12), and the reflux groove (12) is connected to the anti-overflow groove (16). The side walls of the waterproof ring (53) and the side walls of the positioning plate (55) are both slidably connected to the side walls of the guide plate (15). The outer wall of the bottom of the guide plate (15) is slidably connected to the outer wall of the top of the guide plate (54). The inner wall of the fixing seat (11) is fixedly connected to the outer wall of the liquid extraction pipe (4).

3. The cleaning device based on multi-layer advection silicon material according to claim 1, characterized in that: The outer wall of the bottom of the pressing plate (566) contacts the outer wall of the top of the placement frame (564), the outer wall of the fixing box (561) is plugged into the inner wall of the fixing seat (11) through the plug-in slot (18), and the side wall of the fixing box (561) is fixedly connected to the side wall of the positioning plate (55).

4. The cleaning device based on multi-layer flat flow silicon material according to claim 1, characterized in that: The liquid outlet device (2) comprises a liquid inlet pipe (21), the inner wall of the liquid inlet pipe (21) is fixedly connected to a diversion pipe (22), the outer wall of the diversion pipe (22) is fixedly connected to a liquid storage box (23), the inner wall of the liquid storage box (23) is fixedly connected to a blocking rod (24), and the inner wall of the liquid storage box (23) is fixedly connected to a connecting square pipe (25).

5. The cleaning device based on multi-layer advection silicon material according to claim 4, characterized in that: The outer wall of the liquid inlet pipe (21) is fixedly connected to the output end of the reflux pump (3), the outer wall of the connecting square tube (25) is fixedly connected to the inner wall of the fixing seat (11) through the connecting groove (14), and the outer side wall of the liquid storage box (23) is fixedly connected to the inner side wall of the fixing seat (11).

6. The cleaning device based on multi-layer advection silicon material according to claim 1, characterized in that: The flow control device (13) includes a fixed plate (131), the outer wall of the top of the fixed plate (131) is fixedly connected to a servo motor (132), the output end of the servo motor (132) is fixedly connected to a worm (133), the outer wall of the fixed plate (131) is fixedly connected to a positioning frame (138), the inner wall of the positioning frame (138) is slidably connected to a valve (137), the inner wall of the valve (137) is rotatably connected to a threaded rod (136), the outer wall of the threaded rod (136) is threadedly connected to an internal threaded barrel (135), and the outer side wall of the internal threaded barrel (135) is fixedly connected to a worm gear (134).

7. The cleaning device based on multi-layer flat flow silicon material according to claim 6, characterized in that: The worm wheel (134) is meshed with the worm (133), the outer wall of the internal threaded cylinder (135) is rotatably connected to the inner wall of the positioning frame (138), and the outer wall of the positioning frame (138) and the outer wall of the fixing plate (131) are both fixedly connected to the outer wall of the fixing seat (11).

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