A flower basket cleaning device for silicon wafer flower basket production

Abstract

The present invention discloses a flower basket cleaning device for silicon wafer flower basket production, which relates to the technical field of silicon wafer flower baskets, including a flower basket cylinder, a cylinder cover and a control device, and also includes a longitudinal groove, a placement groove and a fixing mechanism for fixing the silicon wafer flower basket to be cleaned, a cleaning mechanism for cleaning the silicon wafer flower basket on the fixing mechanism, and a driving mechanism for cooperating with the cleaning mechanism to improve the cleaning effect of the notch of the silicon wafer flower basket. The device is provided with a transmission part and an adjustment part, so that the fixed rotating drum fixedly connected to the first roller moves up and down, so that the auxiliary liquid spraying column rotatably connected to the fixed rotating drum moves up and down, and then the auxiliary liquid spraying column rotates and moves up and down while spraying the cleaning liquid to the silicon wafer flower basket, so that the cleaning liquid can be sprayed more comprehensively on each notch of the silicon wafer flower basket, and at the same time, the sprayed cleaning liquid can impact the dust and impurities in the notch in different directions, which is conducive to removing the dust and impurities in the notch of the silicon wafer flower basket.

Description

Technical Field

[0001] The invention relates to the technical field of silicon wafer flower baskets, in particular to a flower basket cleaning device for silicon wafer flower basket production. Background Art

[0002] Wafer baskets are an indispensable tool in semiconductor manufacturing. They are used to safely store and transport silicon wafers. These baskets must be kept extremely clean because any particles or contamination may cause damage to the silicon wafers, thus affecting yield and chip quality.

[0003] During the manufacturing process of silicon wafer baskets, dust and impurities will adhere to the surface. If the dust and impurities on the surface are not cleaned up, it will affect the subsequent silicon wafers and even cause damage to the silicon wafers. Therefore, it is necessary to clean the dust and impurities on the surface of the silicon wafer basket. However, the current cleaning equipment cannot clean up the dust and impurities on the grooves of the silicon wafer basket used to clamp the silicon wafers when cleaning the silicon wafer basket, which will affect the subsequent transportation of the silicon wafers. Therefore, improvement is urgently needed. Summary of the invention

[0004] In view of the deficiencies in the prior art, the object of the present invention is to provide a flower basket cleaning device for silicon wafer flower basket production, aiming to solve the above-mentioned technical problems.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] A flower basket cleaning device for silicon wafer flower basket production, comprising a flower basket cylinder, a cylinder cover and a control device, wherein the cylinder cover is arranged on the flower basket cylinder, the control device is detachably fixedly connected to the flower basket cylinder, and further comprising:

[0007] There are two longitudinal grooves, and the two longitudinal grooves are symmetrically opened on the inner wall surface of the flower basket tube;

[0008] There are two placement slots, and the two placement slots are respectively located directly below the longitudinal slot, and the placement slots are connected to the longitudinal slot;

[0009] A fixing mechanism is located in the basket tube and is electrically connected to the control device, and is used to fix the silicon wafer basket to be cleaned. The fixing mechanism includes:

[0010] There are two hydraulic telescopic rods, and the two hydraulic telescopic rods are respectively arranged in the two placement grooves and electrically connected to the control device;

[0011] A support rod is arranged at one end of the hydraulic telescopic rod close to the longitudinal groove and is fixedly connected to the hydraulic telescopic rod;

[0012] A lifting frame is located in the flower basket tube and is slidably connected to the longitudinal groove, and a surface of the lifting frame close to the support rod is fixedly connected to the support rod;

[0013] A lifting part, disposed on the lifting frame and electrically connected to the control device;

[0014] There are two clamping parts, and the two clamping parts are symmetrically arranged on the lifting part;

[0015] A cleaning mechanism is disposed in the basket tube and electrically connected to the control device, and is used to clean the silicon wafer basket on the fixing mechanism. The cleaning mechanism includes:

[0016] There are multiple drain troughs for collecting the cleaning liquid after cleaning the silicon wafer basket;

[0017] A drainage pipe, fixedly arranged on the flower basket tube and connected to the drainage trough;

[0018] A support block is located in the flower basket tube and is detachably fixedly connected to the flower basket tube;

[0019] A water pump is disposed on the support block and is detachably fixedly connected to the support block, and the water pump is electrically connected to the control device;

[0020] A liquid inlet pipe is fixedly arranged on the flower basket tube and is connected to the water pump, and is used to transport cleaning liquid for cleaning the silicon wafer flower basket to the water pump;

[0021] The first cleaning part has a plurality of first cleaning parts, and the plurality of first cleaning parts are evenly distributed in the flower basket tube and are electrically connected to the control device, and are used to clean the silicon wafer flower basket clamped by the clamping plate. The first cleaning part includes:

[0022] There are multiple first branch pipes, and the multiple first branch pipes are fixedly arranged on the water pump;

[0023] A liquid collecting ring disk is fixedly arranged on the first branch pipe and communicated with the first branch pipe, and is used for storing cleaning liquid for cleaning the silicon wafer basket;

[0024] There are multiple liquid delivery hoses, and the multiple liquid delivery hoses are evenly arranged on the liquid collecting ring disk, and the liquid delivery hoses are connected to the liquid collecting ring disk;

[0025] There are multiple connecting plates, and the multiple connecting plates are evenly distributed in the flower basket tube, and the multiple connecting plates are fixedly connected to the flower basket tube;

[0026] There are multiple auxiliary liquid spraying columns, and the multiple auxiliary liquid spraying columns are rotatably connected with adjacent connecting plates. The auxiliary liquid spraying columns are inserted into the through grooves on the clamping plates, and the auxiliary liquid spraying columns are provided with multiple evenly distributed auxiliary liquid spraying holes;

[0027] A fixed rotating drum is rotatably arranged at one end of the auxiliary liquid spraying column away from the drum cover;

[0028] A first wheel plate is fixedly arranged on an end of the fixed rotating drum away from the drum cover;

[0029] A first roller, rotatably disposed on the first wheel plate;

[0030] A first liquid spray valve is disposed on the auxiliary liquid spray column and is electrically connected to the control device. The first liquid spray valve is connected to the liquid delivery hose and is used to control the liquid delivery hose to pressurize and deliver the cleaning liquid for cleaning the silicon wafer basket into the auxiliary liquid spray column;

[0031] The second cleaning part is arranged on the water pump and is used to cooperate with the first cleaning part to clean the silicon wafer basket clamped by the clamping plate;

[0032] The driving mechanism is arranged in the flower basket tube and is electrically connected to the control device, and is used for cooperating with the cleaning mechanism to improve the cleaning effect of the notches of the silicon wafer flower basket.

[0033] Preferably, the lifting part comprises:

[0034] A motor sealing cover is arranged on the surface of the lifting frame close to the cylinder cover and is detachably fixedly connected to the lifting frame;

[0035] A first motor is located in the motor sealing cover and is detachably fixedly connected to the lifting frame, and the first motor is electrically connected to the control device;

[0036] A double-headed screw is located in the lifting frame, and one end of the double-headed screw close to the first motor is fixedly connected to the output end of the first motor, and one end of the double-headed screw away from the first motor is rotatably connected to the lifting frame, and the threads on both sides of the double-headed screw rotate in opposite directions.

[0037] Preferably, the clamping portion comprises:

[0038] A threaded block is slidably disposed in the lifting frame and is threadedly connected to the double-headed screw;

[0039] A connecting plate, fixedly arranged on the threaded block;

[0040] An annular plate, fixedly disposed between the two connecting plates, and the annular plate is fixedly connected to the connecting plates on both sides;

[0041] The clamping plates are provided in plurality and are evenly distributed on the annular plate. The clamping plates are fixedly connected to the annular plate, and a through slot is provided in the middle of the clamping plates.

[0042] Preferably, the second cleaning unit comprises:

[0043] A second branch pipe is fixedly arranged on the water pump;

[0044] A second liquid spray valve is disposed on the second branch pipe and is detachably fixedly connected to the second branch pipe and is electrically connected to the control device, and is used to control the second branch pipe to pressurize and deliver cleaning liquid into the main liquid spray column;

[0045] The main liquid spray column is fixedly arranged on the second branch pipe and communicated with the second branch pipe, and a plurality of evenly distributed main liquid spray holes are opened on the main liquid spray column.

[0046] Preferably, the driving mechanism comprises:

[0047] An annular sealing plate is located inside the flower basket tube and is fixedly connected to the flower basket tube, and is used to prevent the cleaning liquid from entering the closed space formed by the annular sealing plate and the cleaning tube;

[0048] There are a plurality of second motors, and the plurality of second motors are evenly distributed in the closed space, and the second motors are electrically connected to the control device;

[0049] A driving gear, fixedly disposed on an output end of the second motor;

[0050] The transmission part is located in the flower basket tube and is electrically connected to the control device, and is used to drive the auxiliary liquid spray column to move up and down reciprocatingly;

[0051] The rotating part is arranged on the transmission part and cooperates with the transmission part to drive the auxiliary liquid spray column to rotate.

[0052] Preferably, the transmission part comprises:

[0053] A wheel groove is provided on the surface of the basket tube provided with a drainage groove;

[0054] A transmission gear ring, located in the flower basket tube and meshing with the driving gear;

[0055] There are multiple connecting rods, and the multiple connecting rods are evenly arranged on the surface of the transmission gear ring close to the wheel groove;

[0056] A second wheel plate, fixedly disposed on a surface of the connecting rod close to the wheel groove;

[0057] A second roller is rotatably disposed on the second wheel plate, and the second roller is rollingly connected to the wheel groove;

[0058] There are multiple built-in grooves, and the multiple built-in grooves are evenly distributed on the surface of the transmission gear ring close to the auxiliary spray column;

[0059] There are multiple adjusting parts, and the multiple adjusting parts are arranged one by one in the built-in groove. The adjusting parts are electrically connected to the control device and are used to adjust the amplitude of the up and down movement of the auxiliary spray column.

[0060] Preferably, the rotating part comprises:

[0061] There are multiple connecting blocks, and the multiple connecting blocks are evenly distributed on the transmission gear ring, and the connecting blocks are fixedly connected to the transmission gear ring;

[0062] A rotating gear ring, fixedly disposed on the connecting block;

[0063] The matching gear is fixedly arranged on the auxiliary liquid spraying column, and the matching gear is meshed with the rotating gear ring.

[0064] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0065] 1. The device is provided with a transmission part and an adjustment part, so that the arc-shaped top block arranged in the built-in groove rotates around the axis of the transmission gear ring, and the first roller moves up and down through the cooperation between the arc-shaped top block and the first roller, thereby driving the fixed rotating drum fixedly connected to the first roller to move up and down, so that the auxiliary liquid spray column rotatably connected to the fixed rotating drum moves up and down, and then the auxiliary liquid spray column rotates and reciprocates up and down while spraying cleaning liquid to the silicon wafer basket. On the one hand, the cleaning liquid can be sprayed more comprehensively on each notch of the silicon wafer basket, and on the other hand, the sprayed cleaning liquid can impact the dust and impurities in the notch in different directions, which is more conducive to removing the dust and impurities in the notch of the silicon wafer basket.

[0066] 2. The device is provided with a rotating part, so that the auxiliary liquid spray column can rotate while spraying the cleaning liquid to the silicon wafer basket. As a result, when the cleaning liquid is sprayed to the silicon wafer basket, the sprayed cleaning liquid also rotates around the axis of the auxiliary liquid spray column, thereby increasing the kinetic energy of the sprayed cleaning liquid, thereby improving the cleaning effect of the cleaning liquid on the silicon wafer basket groove, and improving the cleaning efficiency of the silicon wafer basket groove to a certain extent. BRIEF DESCRIPTION OF THE DRAWINGS

[0067] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0068] Figure 1 The invention shows a three-dimensional structural schematic diagram of a flower basket cleaning device for producing silicon wafer flower baskets.

[0069] Figure 2 A front view of a flower basket cleaning device for producing silicon wafer flower baskets is shown.

[0070] Figure 3 Shows Figure 2 AA section view in.

[0071] Figure 4 The invention shows a schematic diagram of the internal structure of a flower basket cleaning device for producing silicon wafer flower baskets.

[0072] Figure 5 A cross-sectional view of a turnbuckle is shown.

[0073] Figure 6 A partial structural schematic diagram of a flower basket cleaning device for silicon wafer flower basket production is shown.

[0074] Figure 7 The schematic diagram of the structure of the cleaning mechanism and the driving mechanism is shown.

[0075] Figure 8 A partial structural schematic diagram of the fixing mechanism is shown.

[0076] Fig. 9 An exploded view of some structures in the cleaning mechanism and the driving mechanism is shown.

[0077] Fig.10 Shows Figure 4 A schematic diagram of the enlarged local structure at point A in the middle.

[0078] Fig.11 Shows Figure 4 A magnified schematic diagram of the local structure at point B in the middle.

[0079] Legend:

[0080] 1. Flower basket tube; 2. Tube cover; 3. Control device; 4. Vertical groove; 5. Placement groove; 6. Hydraulic telescopic rod; 7. Support rod; 8. Lifting frame; 9. Motor sealing cover; 10. First motor; 11. Double-headed screw; 12. Thread block; 13. Connecting plate; 14. Annular plate; 15. Clamping plate; 16. Through groove; 17. Drainage groove; 18. Drainage pipe; 19. Support block; 20. Water pump; 21. Liquid inlet pipe; 22. First branch pipe; 23. Liquid collecting ring plate; 24. Liquid delivery hose; 25. Connecting plate; 26. Auxiliary spray column; 27 , auxiliary liquid spray hole; 28, fixed drum; 29, first wheel plate; 30, first roller; 31, first liquid spray valve; 32, second branch pipe; 33, second liquid spray valve; 34, main liquid spray column; 35, main liquid spray hole; 36, annular sealing plate; 37, second motor; 38, driving gear; 39, wheel groove; 40, transmission gear ring; 41, connecting rod; 42, second wheel plate; 43, second roller; 44, built-in groove; 45, connecting block; 46, rotating gear ring; 47, matching gear; 48, hydraulic push rod; 49, arc top block. DETAILED DESCRIPTION

[0081] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0082] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0083] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may also be a component centered. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may also be a component centered. When a component is considered to be "set on" another component, it may be directly set on the other component or there may also be a component centered. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0084] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0085] Reference Figures 1 to 11 The present invention further describes an embodiment of a flower basket cleaning device for producing silicon wafer flower baskets.

[0086] A flower basket cleaning device for silicon wafer flower basket production, comprising a flower basket cylinder 1, a cylinder cover 2 and a control device 3, wherein the cylinder cover 2 is arranged on the flower basket cylinder 1, and the control device 3 is detachably fixedly connected to the flower basket cylinder 1, and further comprising:

[0087] There are two longitudinal grooves 4, and the two longitudinal grooves 4 are symmetrically opened on the inner wall surface of the flower basket tube 1;

[0088] There are two placement grooves 5, and the two placement grooves 5 are respectively located directly below the longitudinal groove 4, and the placement grooves 5 are connected to the longitudinal groove 4;

[0089] Reference Figures 1 to 11 , a fixing mechanism, located in the basket tube 1 and electrically connected to the control device 3, for fixing the silicon wafer basket to be cleaned;

[0090] The fixing mechanism comprises:

[0091] There are two hydraulic telescopic rods 6, and the two hydraulic telescopic rods 6 are respectively arranged in the two placement slots 5 and electrically connected to the control device 3;

[0092] A support rod 7 is arranged at one end of the hydraulic telescopic rod 6 close to the longitudinal groove 4 and is fixedly connected to the hydraulic telescopic rod 6;

[0093] A lifting frame 8 is located in the flower basket tube 1 and is slidably connected to the longitudinal groove 4, and the surface of the lifting frame 8 close to the support rod 7 is fixedly connected to the support rod 7;

[0094] A lifting part, which is arranged on the lifting frame 8 and is electrically connected to the control device 3;

[0095] The lifting part comprises:

[0096] The motor sealing cover 9 is arranged on the surface of the lifting frame 8 close to the cylinder cover 2 and is detachably fixedly connected to the lifting frame 8;

[0097] A first motor 10 is located in the motor sealing cover 9 and is detachably fixedly connected to the lifting frame 8. The first motor 10 is electrically connected to the control device 3;

[0098] The double-headed screw 11 is located in the lifting frame 8, and one end of the double-headed screw 11 close to the first motor 10 is fixedly connected to the output end of the first motor 10, and the end of the double-headed screw 11 away from the first motor 10 is rotatably connected to the lifting frame 8, and the threads on both sides of the double-headed screw 11 rotate in opposite directions.

[0099] The device is provided with a lifting part, so that the device can adjust the distance between the clamping plates 15 on the upper and lower sides, so that the device can be used to clamp and fix silicon wafer baskets of different sizes, which improves the application range of the device to a certain extent.

[0100] There are two clamping parts, and the two clamping parts are symmetrically arranged on the lifting part;

[0101] The clamping portion comprises:

[0102] A threaded block 12 is slidably disposed in the lifting frame 8 and is threadedly connected to the double-headed screw 11;

[0103] A connecting plate 13, fixedly disposed on the threaded block 12;

[0104] An annular plate 14 is fixedly disposed between the two connecting plates 13, and the annular plate 14 is fixedly connected to the connecting plates 13 on both sides;

[0105] There are multiple clamping plates 15 , and the multiple clamping plates 15 are evenly distributed on the annular plate 14 . The clamping plates 15 are fixedly connected to the annular plate 14 , and a through slot 16 is formed in the middle of the clamping plates 15 .

[0106] Reference Figures 1 to 11 When working, the cylinder cover 2 is opened and then the hydraulic telescopic rod 6 is controlled to start by the control device 3, so that the lifting frame 8 fixedly connected to the hydraulic telescopic rod 6 slides in the longitudinal groove 4 until the lifting frame 8 slides out of the longitudinal groove 4, and then the staff places the silicon wafer basket to be cleaned on the clamping plate 15 on the lower side. It should be noted that the shape of the silicon wafer basket cleaned by this device is similar to a C-shaped silicon wafer basket.

[0107] Then the staff controls the first motor 10 to start through the control device 3, so that the double-headed screw 11 fixedly connected to the output end of the first motor 10 rotates, and the threaded transmission between the double-headed screw 11 and the two threaded blocks 12 in the lifting frame 8 is coordinated so that the connecting plate 13 fixedly connected to the two threaded blocks 12 drives the annular plate 14 to approach each other, so that the clamping plates 15 on the upper and lower sides approach each other, until the clamping plates 15 on the upper and lower sides clamp and fix the silicon wafer basket to be cleaned, and then the staff controls the hydraulic telescopic rod 6 to retract through the control device 3, so that the lifting frame 8 slides into the basket tube 1 until the lifting frame 8 slides to its original position.

[0108] Reference Figures 1 to 11 , a cleaning mechanism, which is arranged in the flower basket tube 1 and is electrically connected to the control device 3, and is used to clean the silicon wafer flower basket on the fixing mechanism;

[0109] The cleaning mechanism comprises:

[0110] There are multiple drain tanks 17 for collecting the cleaning liquid after cleaning the silicon wafer basket;

[0111] A drainage pipe 18 is fixedly arranged on the flower basket tube 1 and communicated with the drainage groove 17;

[0112] The support block 19 is located in the flower basket tube 1 and is detachably fixedly connected to the flower basket tube 1;

[0113] A water pump 20 is disposed on the support block 19 and is detachably fixedly connected to the support block 19. The water pump 20 is electrically connected to the control device 3.

[0114] A liquid inlet pipe 21 is fixedly arranged on the flower basket tube 1 and is connected to the water pump 20, and is used to deliver cleaning liquid for cleaning the silicon wafer flower basket to the water pump 20;

[0115] There are multiple first cleaning parts, and the multiple first cleaning parts are evenly distributed in the flower basket tube 1 and are electrically connected to the control device 3, and are used to clean the silicon wafer flower basket clamped by the clamping plate 15;

[0116] The first cleaning unit comprises:

[0117] There are multiple first branch pipes 22, and the multiple first branch pipes 22 are fixedly disposed on the water pump 20;

[0118] The liquid collecting ring plate 23 is fixedly disposed on the first branch pipe 22 and communicated with the first branch pipe 22, and is used to store the cleaning liquid for cleaning the silicon wafer basket;

[0119] There are multiple liquid delivery hoses 24, and the multiple liquid delivery hoses 24 are evenly arranged on the liquid collecting ring plate 23, and the liquid delivery hoses 24 are connected to the liquid collecting ring plate 23;

[0120] There are multiple connecting plates 25, and the multiple connecting plates 25 are evenly distributed in the flower basket tube 1, and the multiple connecting plates 25 are fixedly connected to the flower basket tube 1;

[0121] There are multiple auxiliary liquid spraying columns 26, and the multiple auxiliary liquid spraying columns 26 are rotatably connected to the adjacent connecting plates 25. The auxiliary liquid spraying columns 26 are inserted into the through grooves 16 on the clamping plate 15, and the auxiliary liquid spraying columns 26 are provided with multiple evenly distributed auxiliary liquid spraying holes 27;

[0122] A fixed rotating drum 28 is rotatably disposed at one end of the auxiliary liquid spray column 26 away from the drum cover 2;

[0123] The first wheel plate 29 is fixedly arranged on the end of the fixed rotating drum 28 away from the drum cover 2;

[0124] A first roller 30 is rotatably disposed on the first wheel plate 29;

[0125] The first liquid spray valve 31 is arranged on the auxiliary liquid spray column 26 and is electrically connected to the control device 3. The first liquid spray valve 31 is connected to the liquid delivery hose 24 and is used to control the liquid delivery hose 24 to pressurize and deliver the cleaning liquid for cleaning the silicon wafer basket into the auxiliary liquid spray column 26.

[0126] During operation, the water pump 20 delivers the cleaning liquid to the main liquid spray column 34, and at the same time, the water pump 20 also delivers the cleaning liquid to the liquid collecting ring disk 23 through the first branch pipe 22, and then the cleaning liquid is delivered to the liquid delivery hose 24 connected to the liquid collecting ring disk 23, and the first liquid spray valve 31 is opened by the control device 3, so that the cleaning liquid in the liquid delivery hose 24 is pressurized and delivered to the auxiliary liquid spray column 26, and finally the cleaning liquid is sprayed on the silicon wafer basket to be cleaned through the auxiliary liquid spray hole 27 on the auxiliary liquid spray column 26, so as to clean the groove of the silicon wafer basket.

[0127] Reference Figures 1 to 11 The second cleaning part is arranged on the water pump 20 and is used for cleaning the silicon wafer basket clamped by the clamping plate 15 in cooperation with the first cleaning part.

[0128] The second cleaning unit comprises:

[0129] The second branch pipe 32 is fixedly mounted on the water pump 20;

[0130] The second liquid spray valve 33 is disposed on the second branch pipe 32 and is detachably fixedly connected to the second branch pipe 32 and is electrically connected to the control device 3, and is used to control the second branch pipe 32 to pressurize and deliver the cleaning liquid into the main liquid spray column 34;

[0131] The main liquid spray column 34 is fixedly disposed on the second branch pipe 32 and communicated with the second branch pipe 32 , and a plurality of evenly distributed main liquid spray holes 35 are formed on the main liquid spray column 34 .

[0132] During operation, the staff controls the water pump 20 to start through the control device 3, and the external cleaning liquid is transported to the water pump 20 through the liquid inlet pipe 21. The water pump 20 transports the cleaning liquid to the main spray column 34 through the second branch pipe 32, and then the cleaning liquid is finally sprayed on the silicon wafer basket to be cleaned through the main spray hole 35 on the main spray column 34, thereby cleaning the grooves of the silicon wafer basket to be cleaned.

[0133] Reference Figures 1 to 11 , a driving mechanism is disposed in the flower basket tube 1 and is electrically connected to the control device 3, and is used to cooperate with the cleaning mechanism to improve the cleaning effect of the notch of the silicon wafer flower basket;

[0134] The driving mechanism comprises:

[0135] The annular sealing plate 36 is located in the flower basket tube 1 and is fixedly connected to the flower basket tube 1, and is used to prevent the cleaning liquid from entering the closed space formed by the annular sealing plate 36 and the cleaning tube;

[0136] There are multiple second motors 37, and the multiple second motors 37 are evenly distributed in the closed space, and the second motors 37 are electrically connected to the control device 3;

[0137] A driving gear 38 is fixedly disposed on the output end of the second motor 37;

[0138] The transmission part is located in the flower basket tube 1 and is electrically connected to the control device 3, and is used to drive the auxiliary liquid spray column 26 to move up and down;

[0139] The transmission part comprises:

[0140] The wheel groove 39 is formed on the surface of the basket tube 1 provided with the drainage groove 17;

[0141] The transmission gear ring 40 is located in the flower basket tube 1 and meshes with the driving gear 38;

[0142] There are multiple connecting rods 41, and the multiple connecting rods 41 are evenly arranged on the surface of the transmission gear ring 40 close to the wheel groove 39;

[0143] A second wheel plate 42 is fixedly disposed on a surface of the connecting rod 41 close to the wheel groove 39;

[0144] A second roller 43 is rotatably disposed on the second wheel plate 42, and the second roller 43 is rollingly connected to the wheel groove 39;

[0145] With such arrangement, when the transmission gear ring 40 rotates, the second roller 43 slides in the wheel groove 39, thereby preventing the transmission gear ring 40 from directly contacting the flower basket tube 1, thereby greatly reducing the smoothness of the rotation of the transmission gear ring 40, thereby improving the cleaning effect of the device on the silicon wafer flower basket notch to a certain extent.

[0146] There are multiple built-in grooves 44, and the multiple built-in grooves 44 are evenly distributed on the surface of the transmission gear ring 40 close to the auxiliary spray column 26;

[0147] Reference Figures 1 to 11 , a rotating part, which is arranged on the transmission part and cooperates with the transmission part to drive the auxiliary liquid spray column 26 to rotate;

[0148] The rotating part comprises:

[0149] There are multiple connecting blocks 45, and the multiple connecting blocks 45 are evenly distributed on the transmission gear ring 40, and the connecting blocks 45 are fixedly connected to the transmission gear ring 40;

[0150] A rotating gear ring 46 is fixedly disposed on the connecting block 45;

[0151] The matching gear 47 is fixedly disposed on the auxiliary liquid spraying column 26 , and the matching gear 47 is meshed with the rotating gear ring 46 .

[0152] Reference Figures 1 to 11When working, when the main liquid spray column 34 sprays the cleaning liquid onto the surface of the silicon wafer basket to be cleaned, the control device 3 controls the second motor 37 to start, so that the driving gear 38 fixedly connected to the output end of the second motor 37 rotates, and the driving gear 38 is meshed with the transmission gear ring 40, so that the transmission gear ring 40 rotates, and then drives the connecting block 45 fixedly connected to the transmission gear ring 40 to rotate around the axis of the transmission gear ring 40, so that the rotating gear ring 46 fixedly connected to the connecting block 45 rotates, and the rotating gear ring 46 and the matching gear are engaged. The meshing between the gears 47 drives the matching gear 47 to rotate, thereby causing the auxiliary liquid spray column 26 fixedly connected to the matching gear 47 to rotate, so that the auxiliary liquid spray column 26 can rotate while spraying the cleaning liquid to the silicon wafer basket, so that when the cleaning liquid is sprayed to the silicon wafer basket, the sprayed cleaning liquid also rotates around the axis of the auxiliary liquid spray column 26, thereby increasing the kinetic energy of the sprayed cleaning liquid, which is conducive to the cleaning liquid to clean up the dust and impurities attached to the notch of the silicon wafer basket, thereby improving the cleaning liquid on the silicon wafer basket. The cleaning effect of the notch on the basket improves the cleaning efficiency of the notch on the silicon wafer basket to a certain extent; at the same time, when the transmission gear ring 40 rotates, the arc-shaped top block 49 set in the built-in groove 44 rotates around the axis of the transmission gear ring 40, and the first roller 30 is moved up and down through the cooperation between the arc-shaped top block 49 and the first roller 30, thereby driving the fixed rotating drum 28 fixedly connected to the first roller 30 to move up and down, so that the auxiliary liquid spray column 26 rotatably connected to the fixed rotating drum 28 moves up and down, and then the auxiliary liquid spray column 26 moves toward the silicon wafer flower basket. The basket sprays the cleaning liquid while rotating and moving up and down, so that the cleaning liquid can be sprayed more comprehensively on each notch of the silicon wafer basket. At the same time, compared with the fixed method of spraying the cleaning liquid on the notch of the silicon wafer basket, the spraying direction of the cleaning liquid is fixed. The auxiliary liquid spray column 26 in the present device can rotate and move up and down while spraying the cleaning liquid on the silicon wafer basket, so that the sprayed cleaning liquid can impact the dust and impurities in the notch in different directions, which is more conducive to removing the dust and impurities in the notch of the silicon wafer basket.

[0153] Reference Figures 1 to 11 There are multiple adjusting parts, and the multiple adjusting parts are arranged one by one in the built-in groove 44. The adjusting parts are electrically connected to the control device 3 and are used to adjust the amplitude of the up and down movement of the auxiliary spray column 26.

[0154] The adjustment unit comprises:

[0155] A hydraulic push rod 48, wherein the hydraulic push rod 48 is located in the built-in groove 44 and is electrically connected to the control device 3;

[0156] The arc-shaped top block 49 is slidably disposed in the built-in groove 44 , and the surface of the arc-shaped top block 49 close to the hydraulic push rod 48 is fixedly connected to the hydraulic push rod 48 .

[0157] The device is provided with an adjustment part. When working, the control device 3 controls the hydraulic push rod 48 to start, so that the arc-shaped top block 49 fixedly connected to the hydraulic push rod 48 slides, and then the distance between the top of the arc-shaped top block 49 and the surface of the transmission gear ring 40 close to the cylinder cover 2 is adjusted, thereby adjusting the amplitude of the up and down movement of the auxiliary liquid spray column 26, so that the device can be used for cleaning the notches of different silicon wafer flower baskets, thereby improving the application range of the device to a certain extent.

[0158] Working principle: Refer to Figures 1 to 11 When working, the cylinder cover 2 is opened and then the hydraulic telescopic rod 6 is started by the control device 3, so that the lifting frame 8 fixedly connected to the hydraulic telescopic rod 6 slides in the longitudinal groove 4 until the lifting frame 8 slides out of the longitudinal groove 4, and then the staff places the silicon wafer basket to be cleaned on the clamping plate 15 at the lower side;

[0159] Then the staff controls the first motor 10 to start through the control device 3, so that the double-headed screw 11 fixedly connected to the output end of the first motor 10 rotates, and the double-headed screw 11 and the two threaded blocks 12 in the lifting frame 8 cooperate with each other through the threaded transmission, so that the connecting plate 13 fixedly connected to the two threaded blocks 12 drives the annular plate 14 to approach each other, so that the clamping plates 15 on the upper and lower sides approach each other, until the clamping plates 15 on the upper and lower sides clamp and fix the silicon wafer basket to be cleaned, and then the staff controls the hydraulic telescopic rod 6 to contract through the control device 3, so that the lifting frame 8 slides into the basket tube 1 until the lifting frame 8 slides to the original position;

[0160] Then the staff controls the water pump 20 to start through the control device 3, and the external cleaning liquid is transported to the water pump 20 through the liquid inlet pipe 21. The water pump 20 transports the cleaning liquid to the main liquid spray column 34 through the second branch pipe 32, and then the cleaning liquid is finally sprayed on the silicon wafer basket to be cleaned through the main liquid spray hole 35 on the main liquid spray column 34, so as to clean the notch on the silicon wafer basket to be cleaned; while the water pump 20 transports the cleaning liquid to the main liquid spray column 34, the water pump 20 also transports the cleaning liquid to the liquid collecting ring disk 23 through the first branch pipe 22, and then the cleaning liquid is transported to the liquid delivery hose 24 connected to the liquid collecting ring disk 23, and the first liquid spray valve 31 is opened through the control device 3, so that the cleaning liquid in the liquid delivery hose 24 is pressurized and transported to the auxiliary liquid spray column 26, and finally the cleaning liquid is sprayed on the notch of the silicon wafer basket to be cleaned through the auxiliary liquid spray hole 27 on the auxiliary liquid spray column 26, so as to further clean the notch of the silicon wafer basket;

[0161] When the main liquid spray column 34 sprays the cleaning liquid onto the surface of the silicon wafer basket to be cleaned, the control device 3 controls the second motor 37 to start, so that the driving gear 38 fixedly connected to the output end of the second motor 37 rotates, and the driving gear 38 is meshed with the transmission gear ring 40, so that the transmission gear ring 40 rotates, and then drives the connecting block 45 fixedly connected to the transmission gear ring 40 to rotate around the axis of the transmission gear ring 40, so that the rotating gear ring 46 fixedly connected to the connecting block 45 rotates, and the rotating gear ring 46 is meshed with the matching gear 47, thereby driving the matching gear 47. The auxiliary liquid spray column 26 rotates, thereby rotating the auxiliary liquid spray column 26 fixedly connected to the matching gear 47, so that the auxiliary liquid spray column 26 can rotate while spraying the cleaning liquid to the silicon wafer basket, so that when the cleaning liquid is sprayed to the silicon wafer basket, the sprayed cleaning liquid also rotates around the axis of the auxiliary liquid spray column 26, thereby increasing the kinetic energy of the sprayed cleaning liquid, which is conducive to the cleaning liquid cleaning the dust and impurities attached to the notch of the silicon wafer basket, thereby improving the cleaning effect of the cleaning liquid on the notch of the silicon wafer basket, and to a certain extent improving the cleaning efficiency of the notch of the silicon wafer basket;

[0162] At the same time, when the transmission gear ring 40 rotates, the arc-shaped top block 49 arranged in the built-in groove 44 rotates around the axis of the transmission gear ring 40, and the arc-shaped top block 49 cooperates with the first roller 30, so that the first roller 30 moves up and down, thereby driving the fixed rotating drum 28 fixedly connected to the first roller 30 to move up and down, so that the auxiliary liquid spray column 26 rotatably connected to the fixed rotating drum 28 moves up and down, and then the auxiliary liquid spray column 26 rotates and reciprocates up and down while spraying cleaning liquid to the silicon wafer basket. On the one hand, the cleaning liquid can be sprayed more comprehensively on each notch of the silicon wafer basket, and on the other hand, the sprayed cleaning liquid can impact dust and impurities in the notch in different directions, which is more conducive to removing dust and impurities in the notch of the silicon wafer basket.

[0163] The above description of the embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A flower basket cleaning device for silicon wafer flower basket production, comprising a flower basket cylinder (1), a cylinder cover (2) and a control device (3), wherein the cylinder cover (2) is arranged on the flower basket cylinder (1), and the control device (3) is detachably fixedly connected to the flower basket cylinder (1), characterized in that: Also includes: There are two longitudinal grooves (4), and the two longitudinal grooves (4) are symmetrically opened on the inner wall surface of the flower basket tube (1); There are two placement grooves (5), and the two placement grooves (5) are respectively located directly below the longitudinal groove (4), and the placement grooves (5) are connected to the longitudinal groove (4); A fixing mechanism is located in the flower basket tube (1) and is electrically connected to the control device (3) and is used to fix the silicon wafer flower basket to be cleaned. The fixing mechanism comprises: There are two hydraulic telescopic rods (6), and the two hydraulic telescopic rods (6) are respectively arranged in the two placement grooves (5) and are electrically connected to the control device (3); A support rod (7) is arranged at one end of the hydraulic telescopic rod (6) close to the longitudinal groove (4) and is fixedly connected to the hydraulic telescopic rod (6); A lifting frame (8) is located in the flower basket tube (1) and is slidably connected to the longitudinal groove (4), and a surface of the lifting frame (8) close to the support rod (7) is fixedly connected to the support rod (7); A lifting part, arranged on the lifting frame (8) and electrically connected to the control device (3); There are two clamping parts, and the two clamping parts are symmetrically arranged on the lifting part; A cleaning mechanism is arranged in the flower basket tube (1) and is electrically connected to the control device (3) and is used to clean the silicon wafer flower basket on the fixing mechanism. The cleaning mechanism comprises: A plurality of drainage troughs (17) are provided for collecting cleaning liquid after cleaning the silicon wafer basket; A drainage pipe (18) is fixedly mounted on the flower basket tube (1) and is connected to the drainage groove (17); A support block (19) is located inside the flower basket tube (1) and is detachably fixedly connected to the flower basket tube (1); a water pump (20) disposed on the support block (19) and detachably fixedly connected to the support block (19); the water pump (20) being electrically connected to the control device (3); A liquid inlet pipe (21) is fixedly mounted on the flower basket tube (1) and is connected to the water pump (20) and is used to deliver cleaning liquid for cleaning the silicon wafer flower basket to the water pump (20); The first cleaning parts are provided in plurality and are evenly distributed in the flower basket tube (1) and are electrically connected to the control device (3) and are used for cleaning the silicon wafer flower basket clamped by the clamping plate (15). The first cleaning parts include: There are a plurality of first branch pipes (22), and the plurality of first branch pipes (22) are fixedly arranged on the water pump (20); A liquid collecting ring disk (23) is fixedly mounted on the first branch pipe (22) and is in communication with the first branch pipe (22), and is used to store cleaning liquid for cleaning the silicon wafer basket; A plurality of liquid delivery hoses (24) are provided, and the plurality of liquid delivery hoses (24) are evenly arranged on the liquid collecting ring disk (23), and the liquid delivery hoses (24) are in communication with the liquid collecting ring disk (23); A plurality of connecting plates (25) are provided, and the plurality of connecting plates (25) are evenly distributed in the flower basket tube (1), and the plurality of connecting plates (25) are fixedly connected to the flower basket tube (1); A plurality of auxiliary liquid spraying columns (26) are provided, and the plurality of auxiliary liquid spraying columns (26) are rotatably connected to adjacent connecting plates (25), the auxiliary liquid spraying columns (26) are inserted into the through grooves (16) on the clamping plates (15), and the auxiliary liquid spraying columns (26) are provided with a plurality of evenly distributed auxiliary liquid spraying holes (27); A fixed rotating drum (28) rotatably disposed at an end of the auxiliary liquid spray column (26) away from the drum cover (2); A first wheel plate (29) is fixedly arranged on an end of the fixed rotating drum (28) away from the drum cover (2); A first roller (30) rotatably disposed on the first wheel plate (29); a first liquid spray valve (31) disposed on the auxiliary liquid spray column (26) and electrically connected to the control device (3); the first liquid spray valve (31) being in communication with the liquid delivery hose (24) and being used to control the liquid delivery hose (24) to pressurize and deliver cleaning liquid for cleaning the silicon wafer basket into the auxiliary liquid spray column (26); A second cleaning part, arranged on the water pump (20), and used to cooperate with the first cleaning part to clean the silicon wafer basket clamped by the clamping plate (15); The driving mechanism is arranged in the flower basket tube (1) and is electrically connected to the control device (3), and is used to cooperate with the cleaning mechanism to improve the cleaning effect of the notches of the silicon wafer flower basket.

2. The device for cleaning a basket for producing a silicon wafer basket according to claim 1, characterized in that: The lifting part comprises: A motor sealing cover (9) is arranged on a surface of the lifting frame (8) close to the cylinder cover (2) and is detachably fixedly connected to the lifting frame (8); A first motor (10) is located in the motor sealing cover (9) and is detachably fixedly connected to the lifting frame (8); the first motor (10) is electrically connected to the control device (3); A double-headed screw (11) is located in the lifting frame (8), and one end of the double-headed screw (11) close to the first motor (10) is fixedly connected to the output end of the first motor (10), and one end of the double-headed screw (11) away from the first motor (10) is rotationally connected to the lifting frame (8), and the threads on both sides of the double-headed screw (11) have opposite rotation directions.

3. The device for cleaning a basket for producing a silicon wafer basket according to claim 2, characterized in that: The clamping portion comprises: A threaded block (12) is slidably disposed in the lifting frame (8) and is threadably connected to the double-headed screw (11); A connecting plate (13) fixedly disposed on the threaded block (12); An annular plate (14) is fixedly disposed between the two connecting plates (13), and the annular plate (14) is fixedly connected to the connecting plates (13) on both sides; The clamping plates (15) are provided in plurality, and the plurality of clamping plates (15) are evenly distributed on the annular plate (14); the clamping plates (15) are fixedly connected to the annular plate (14); and a through slot (16) is provided in the middle of the clamping plates (15).

4. The device for cleaning a basket for producing a silicon wafer basket according to claim 3, characterized in that: The second cleaning unit comprises: A second branch pipe (32) fixedly mounted on the water pump (20); a second liquid spray valve (33) disposed on the second branch pipe (32) and detachably fixedly connected to the second branch pipe (32), and electrically connected to the control device (3), and used for controlling the second branch pipe (32) to pressurize and deliver cleaning liquid into the main liquid spray column (34); The main liquid spray column (34) is fixedly arranged on the second branch pipe (32) and is in communication with the second branch pipe (32), and a plurality of evenly distributed main liquid spray holes (35) are formed on the main liquid spray column (34).

5. The device for cleaning a basket for producing a silicon wafer basket according to claim 4, characterized in that: The driving mechanism comprises: an annular sealing plate (36), located inside the flower basket tube (1) and fixedly connected to the flower basket tube (1), and used to prevent cleaning liquid from entering the closed space formed by the annular sealing plate (36) and the cleaning tube; A second motor (37), including a plurality of second motors (37) evenly distributed in the closed space, wherein the second motor (37) is electrically connected to the control device (3); A driving gear (38) fixedly disposed on an output end of the second motor (37); A transmission part, located in the flower basket tube (1) and electrically connected to the control device (3), and used to drive the auxiliary liquid spray column (26) to move up and down reciprocatingly; The rotating part is arranged on the transmission part and cooperates with the transmission part to drive the auxiliary liquid spray column (26) to rotate.

6. The device for cleaning a basket for producing a silicon wafer basket according to claim 5, characterized in that: The transmission part comprises: A wheel groove (39) is formed on the surface of the basket tube (1) provided with the drainage groove (17); A transmission gear ring (40) is located in the flower basket tube (1) and meshes with the driving gear (38); There are a plurality of connecting rods (41), and the plurality of connecting rods (41) are evenly arranged on a surface of the transmission gear ring (40) close to the wheel groove (39); A second wheel plate (42) is fixedly disposed on a surface of the connecting rod (41) close to the wheel groove (39); A second roller (43) is rotatably disposed on the second wheel plate (42), and the second roller (43) is rollingly connected to the wheel groove (39); There are a plurality of built-in grooves (44), and the plurality of built-in grooves (44) are evenly distributed on the surface of the transmission gear ring (40) close to the auxiliary liquid spray column (26); There are a plurality of adjustment parts, and the plurality of adjustment parts are arranged one by one in the built-in groove (44). The adjustment parts are electrically connected to the control device (3) and are used to adjust the amplitude of the up and down movement of the auxiliary liquid spray column (26).

7. The device for cleaning a basket for producing a silicon wafer basket according to claim 6, characterized in that: The rotating part comprises: A plurality of connection blocks (45) are provided, and the plurality of connection blocks (45) are evenly distributed on the transmission gear ring (40), and the connection blocks (45) are fixedly connected to the transmission gear ring (40); A rotating gear ring (46) fixedly disposed on the connecting block (45); A matching gear (47) is fixedly disposed on the auxiliary liquid spray column (26), and the matching gear (47) is meshed with the rotating gear ring (46).

Images