Heat treatment device

By using infrared temperature imager and carbon dioxide laser in the heat treatment device, the low temperature area of ​​the processed part is monitored and supplemented in real time, the problem of uneven temperature during the heat treatment process is solved, and the processing quality and thermal consistency are improved.

CN118999150BActive Publication Date: 2025-02-11SHANGHAI WANZE PRECISION CASTING CO LTD
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Patent Information

Application Number
CN202411488120.0
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-10-24
Publication Date
2025-02-11
Estimated Expiration
2044-10-24

AI Technical Summary

Technical Problem

During the heat treatment process, due to the uneven temperature in the furnace, the processed parts are prone to cracking during heating and cooling, especially thin-walled castings. In addition, different volumes and shapes of the processed parts lead to local high or low temperatures, and these problems of local uneven temperatures occur in different locations.

Method used

A heat treatment device is used, which includes a furnace, an infrared temperature imager and a carbon dioxide laser. The infrared temperature imager is connected to the industrial control machine through a video signal input interface, and takes the temperature image of the processed parts in real time to find the low-temperature area. The carbon dioxide laser adjusts the angle of the gimbal and aligns with the light-transmitting window to replenish heat to the low-temperature area.

Benefits of technology

The temperature of the processed part is accurately supplemented at pixel-level fixed point, avoiding the problem of temperature unevenness due to volume and shape, improving the thermal consistency of the heat treatment process, and ensuring high-quality treatment of the processed part.

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Abstract

The present invention relates to the field of heat treatment technology. A heat treatment device includes a furnace, an observation window is provided on the furnace body of the furnace, and quartz glass is inlaid on the observation window; it also includes an industrial computer, the industrial computer is connected to an infrared temperature imager and a first pan-tilt, the first pan-tilt is set outside the furnace body, and the infrared temperature imager is installed on the first pan-tilt; the infrared temperature imager faces the quartz glass; a light-transmitting window is provided on the furnace body of the furnace; the industrial computer is connected to a second pan-tilt and a carbon dioxide laser; a carbon dioxide laser is fixed on the second pan-tilt, and the light outlet of the carbon dioxide laser faces the light-transmitting window. The industrial computer captures the temperature image of the workpiece through the infrared temperature imager, finds the low-temperature area of ​​the workpiece, adjusts the carbon dioxide laser to face the low-temperature area, and starts the carbon dioxide laser to perform supplementary heating.
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Description

Technical Field

[0001] The invention relates to the technical field of heat treatment, and in particular to a heat treatment device. Background Art

[0002] During the heat treatment process, if the temperature in the furnace is uneven, the workpiece in the furnace is very likely to crack during the heating and cooling process, especially thin-walled castings. In addition, due to the differences in the volume and shape of the workpieces, the temperature in the furnace will inevitably have local high or low temperatures, and the locations of local high and low temperatures will vary depending on the workpieces. Summary of the invention

[0003] The purpose of this section is to summarize some aspects of the embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the abstract of the specification and the title of the invention of this application to avoid blurring the purpose of this section, the abstract of the specification and the title of the invention, and such simplifications or omissions cannot be used to limit the scope of the present invention.

[0004] The object of the present invention is to provide a heat treatment device to solve at least one of the above technical problems.

[0005] The technical problem solved by the present invention can be achieved by adopting the following technical solutions:

[0006] A heat treatment device comprises a furnace, wherein an observation window is provided on the furnace body of the furnace, and the observation window is inlaid with quartz glass; and an industrial computer having at least three control signal output interfaces;

[0007] The video signal input interface of the industrial computer is connected to the infrared temperature imager;

[0008] One of the control signal output interfaces of the industrial computer is connected to a first pan-tilt platform, the first pan-tilt platform is set up outside the furnace body, and the infrared temperature imager is installed on the first pan-tilt platform;

[0009] The infrared temperature imager has an imaging lens, a light-transmitting tube with a tube wall shielding is provided in front of the imaging lens, the viewing window of the light-transmitting tube faces the quartz glass of the observation window, the length of the light-transmitting tube is 1 cm-5 cm, and the area of ​​the observation window is at least 5 times the area of ​​the tube opening of the light-transmitting tube;

[0010] The first pan / tilt head drives the light-transmitting tube to change its orientation angle by no less than 30 degrees up and down and no less than 30 degrees left and right. Within the angle change range, the viewing window of the light-transmitting tube always faces the quartz glass, ensuring that the infrared temperature imager always captures the temperature image of the workpiece in the furnace body.

[0011] A light-transmitting window is provided on the furnace body of the melting furnace, and quartz glass is inlaid on the light-transmitting window. The light-transmitting window is located below the observation window, and the distance between the light-transmitting window and the observation window is greater than 5 cm and less than 10 cm.

[0012] One of the control signal output interfaces of the industrial computer is connected to the second PTZ;

[0013] One of the control signal output interfaces of the industrial computer also controls a connected carbon dioxide laser;

[0014] A carbon dioxide laser is fixed on the second pan / tilt, the light outlet of the carbon dioxide laser faces the light-transmitting window, and a specific elastic light shield is installed between the light outlet of the carbon dioxide laser and the light-transmitting window to prevent the infrared laser from being reflected and projected outward;

[0015] The second pan / tilt head drives the light outlet of the carbon dioxide laser to change its direction angle by no less than 30 degrees up and down and no less than 30 degrees left and right. Within the angle change range, the light outlet is always facing the light-transmitting window to ensure that the infrared laser always irradiates the workpiece in the furnace body.

[0016] The working process is:

[0017] The furnace heats the workpiece. During the heating process, the industrial computer controls the first pan / tilt to drive the infrared temperature imager to capture the temperature image of the workpiece and find the low-temperature area of ​​the workpiece. The low-temperature area refers to an area in a temperature image that is lower than the average temperature of the workpiece.

[0018] The industrial computer adjusts the second pan / tilt to drive the light outlet of the carbon dioxide laser to move so that the emitted laser is directed toward the low-temperature area, and starts the carbon dioxide laser to perform supplementary heating;

[0019] Then, the industrial computer continues to control the first pan / tilt platform to drive the infrared temperature imager to capture the temperature image of the workpiece and continue to search for the low temperature area of ​​the workpiece;

[0020] After the industrial computer finds the new low-temperature area, the second pan / tilt is adjusted again to move the light outlet of the carbon dioxide laser so that the emitted laser is directed toward the new low-temperature area, and the carbon dioxide laser is started for supplementary heating.

[0021] Innovation 1: Due to the volume and shape of the processed aviation parts, if the temperature is not supplemented during the heating process, there will be uneven temperature, which will affect the processing quality. The present invention uses an infrared temperature imager to find the low-temperature area in real time, and uses a carbon dioxide laser to supplement the heat in the low-temperature area, so that the processed parts can avoid the problem of uneven temperature due to volume and shape, and form a technical solution with automatic feedback and automatic processing, pixel-level fixed-point precise temperature supplement, so that the processed parts have higher thermal consistency during the heat treatment process.

[0022] Innovation 2: The overall heating of aviation parts for heat treatment has extremely high requirements for thermal consistency and crystal phase accuracy. In the heating treatment of aviation parts, this technology has significant technological advancement and important technical significance.

[0023] Innovation point 3: The existing technology mostly uses temperature sensors to detect the temperature changes in the furnace. When using temperature sensors to detect the temperature in the furnace, the temperature sensors are often fixed on the side walls of the furnace. On the one hand, there is a difference in the thermal conductivity of the side walls of the furnace and the thermal conductivity of the air in the furnace. On the other hand, there is a difference in the temperature of the side walls of the furnace and the temperature of the air in the furnace, which leads to untimely and inaccurate actual measurement results. More importantly, it is impossible to measure the temperature of the surface of the casting. The present invention uses an infrared temperature imager to detect the temperature changes in the furnace. Not only are the measurement results timely and accurate, but the temperature of the surface of the casting can also be measured.

[0024] Innovation point 4: During the heating process, there is currently no solution for adjusting the local temperature. The present invention uses a carbon dioxide laser to adjust the local temperature, which can not only adjust the local temperature but also adjust the position accurately.

[0025] Preferably, at least three gas pipelines are provided outside the furnace, at least three gas guide ports are opened on the side wall of the furnace, and at least three ports of at least three gas pipelines are connected to at least three gas guide ports through at least three electrically controlled valves respectively;

[0026] At least three of the air guide ports are respectively provided with nozzles facing the workpiece;

[0027] At least three of the gas guide ports are evenly arranged from top to bottom on the furnace body;

[0028] The industrial computer controls and connects the at least three electrically controlled valves respectively;

[0029] The working process is:

[0030] In the process of cooling the workpiece, the industrial computer controls the first pan / tilt to drive the infrared temperature imager to capture the temperature image of the workpiece and find the high temperature area of ​​the workpiece. The high temperature area refers to an area with a temperature image higher than the average temperature of the workpiece.

[0031] The industrial computer records the cooling areas corresponding to the at least three electrically controlled valves in advance;

[0032] The industrial computer determines the location of the high temperature area by analyzing the temperature imaging;

[0033] When the high temperature area is located in the cooling area corresponding to one of the electric control valves, the industrial computer opens the corresponding electric control valve to introduce gas for temperature reduction compensation.

[0034] Innovation point 1: This solution can effectively avoid the problem of uneven temperature during the cooling process of the workpiece due to the volume and shape of the workpiece, thereby improving the processing quality.

[0035] Innovation point 2: The present invention can not only evenly increase the temperature, but also evenly reduce the temperature, which can ultimately effectively prevent the workpiece from cracking.

[0036] Preferably, the gas delivery pipe is spirally wound outside the furnace, so that the furnace is protected by the gas delivery pipe.

[0037] Preferably, a three-way valve is further included, wherein the first port of the three-way valve is connected to the gas pipe, the second port is connected to the liquid argon supply device, and the third port is connected to the vacuum device; a first solenoid valve is provided between the three-way valve and the liquid argon supply device, and a second solenoid valve is provided between the three-way valve and the vacuum device. The present invention can control the opening and closing states of the first solenoid valve and the second solenoid valve, so that while part of the gas pipe delivers liquid argon into the furnace, part of the gas pipe sucks argon out of the furnace, thereby avoiding excessive internal pressure in the furnace. In addition, the three-way valve can effectively reduce the setting of the gas guide port, ensuring the structural strength and manufacturing difficulty of the furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them:

[0039] Figure 1 It is a partial structural schematic diagram of the present invention;

[0040] Figure 2 It is a schematic diagram of the external structure of the melting furnace of the present invention;

[0041] Figure 3 It is a schematic diagram of the internal structure of the melting furnace of the present invention;

[0042] Figure 4 It is a schematic diagram of the structure of the connection between the air guide pipe and the air guide port. DETAILED DESCRIPTION

[0043] In order to make the above-mentioned objects, features and advantages of the present invention more understandable, the specific implementation modes of the present invention are described in detail below in conjunction with the accompanying drawings.

[0044] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0045] Secondly, the present invention is described in detail with reference to the schematic diagram. When describing the embodiments of the present invention in detail, for the sake of convenience, the cross-sectional diagrams showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0046] Embodiment 1, a heat treatment device, including a furnace, an observation window is opened on the furnace body of the furnace, and quartz glass is inlaid on the observation window. A heat treatment device also includes an industrial computer, which has at least three control signal output interfaces. The video signal input interface of the industrial computer is connected to the infrared temperature imaging. One of the control signal output interfaces of the industrial computer is connected to the first pan-tilt, the first pan-tilt is set outside the furnace body, and the infrared temperature imager is installed on the first pan-tilt; the infrared temperature imager has an imaging lens, a light-transmitting tube with a tube wall shielding is set in front of the imaging lens, the viewing window of the light-transmitting tube faces the quartz glass of the observation window, the length of the light-transmitting tube is 1cm-5cm, and the area of ​​the observation window is at least 5 times the area of ​​the tube mouth of the light-transmitting tube. The first pan-tilt drives the light-transmitting tube to change its orientation angle by not less than 30 degrees up and down, not less than 30 degrees left and right, and within the angle change range, the viewing window of the light-transmitting tube always faces the quartz glass, ensuring that the infrared temperature imager always captures the temperature imaging of the workpiece in the furnace body. A light-transmitting window is provided on the furnace body of the melting furnace, and quartz glass is inlaid on the light-transmitting window. The light-transmitting window is located below the observation window, and the distance between them is greater than 5 cm and less than 10 cm. One of the control signal output interfaces of the industrial computer is connected to the second pan-tilt. One of the control signal output interfaces of the industrial computer also controls the connection of a carbon dioxide laser. A carbon dioxide laser is fixed on the second pan-tilt, and the light outlet of the carbon dioxide laser faces the light-transmitting window. A specific elastic light shield is installed between the light outlet of the carbon dioxide laser and the light-transmitting window to prevent the infrared laser from being reflected and projected outward. The second pan-tilt drives the light outlet of the carbon dioxide laser to change its direction angle by no less than 30 degrees up and down, and no less than 30 degrees left and right. In the range of this angle change, the light outlet always faces the light-transmitting window to ensure that the infrared laser always irradiates the workpiece in the furnace body.

[0047] The working process is:

[0048] The furnace heats the workpiece. During the heating process, the industrial computer controls the first pan-tilt to drive the infrared temperature imager to capture the temperature image of the workpiece and find the low-temperature area of ​​the workpiece. The low-temperature area refers to the area below the average temperature of the workpiece in a temperature image. The industrial computer adjusts the second pan-tilt to drive the light outlet of the carbon dioxide laser to move so that the emitted laser is directed toward the low-temperature area, and starts the carbon dioxide laser for supplementary heating. Then, the industrial computer continues to control the first pan-tilt to drive the infrared temperature imager to capture the temperature image of the workpiece and continue to find the low-temperature area of ​​the workpiece. After the industrial computer finds a new low-temperature area, it adjusts the second pan-tilt again to drive the light outlet of the carbon dioxide laser to move so that the emitted laser is directed toward the new low-temperature area, and starts the carbon dioxide laser for supplementary heating.

[0049] Example 2, reference Figure 1-Figure 4On the basis of Example 1, at least three gas pipes 2 are provided outside the furnace 1, and at least three gas inlets 11 are opened on the side wall of the furnace. At least three ports of at least three gas pipes are connected to at least three gas inlets through at least three electrically controlled valves. At least three gas inlets are respectively provided with nozzles facing the workpiece. At least three gas inlets are evenly arranged from top to bottom on the furnace body. In addition to being arranged up and down, the gas inlets 11 can also be arranged in a ring shape with equal intervals around the central axis of the furnace 1, such as Figure 1 shown.

[0050] The industrial computer controls and connects at least three electric control valves respectively.

[0051] The working process is:

[0052] In the process of cooling the workpiece, the industrial computer controls the first pan / tilt to drive the infrared temperature imager to capture the temperature image of the workpiece and find the high temperature area of ​​the workpiece. The high temperature area refers to the area with a temperature image higher than the average temperature of the workpiece. The industrial computer records the cooling area corresponding to at least three electric control valves in advance. The industrial computer determines the location of the high temperature area by analyzing the temperature image. When the high temperature area is located in the cooling area corresponding to one of the electric control valves, the industrial computer opens the corresponding electric control valve to pass gas for temperature reduction compensation.

[0053] The gas delivery pipe 2 of the present invention is coiled outside the furnace 1 , and the gas in the gas delivery pipe 2 can make the temperature of each part of the furnace 1 more uniform.

[0054] A three-way valve 3 is provided on the gas pipeline 2, and the gas pipeline 2 is connected to the liquid argon supply device 4 and the vacuum device 5 through the three-way valve 3. A first solenoid valve is provided between the three-way valve 3 and the liquid argon supply device 4, and a second solenoid valve is provided between the three-way valve 3 and the vacuum device 5; the three-way valve 3 can effectively reduce the setting of the gas guide port 11, and ensure the structural strength and manufacturing difficulty of the melting furnace 1. The present invention can control the opening and closing states of the first solenoid valve and the second solenoid valve, while part of the gas pipeline 2 transports liquid argon into the melting furnace 1, while part of the gas pipeline 2 sucks argon out of the melting furnace 1, thereby avoiding excessive internal pressure of the melting furnace 1. Preferably, each gas pipeline is connected to a liquid argon supply device, so that the liquid argon flow at the gas guide port can be more conveniently controlled by controlling the gas output of the liquid argon supply device.

[0055] A nozzle 6 is provided in the furnace 1. The nozzle 6 is arc-shaped. The first port of the nozzle 6 is connected to the gas guide port 11, and the second port of the nozzle 6 is located between the side wall and the central axis of the furnace 1. The nozzle 6 is used to guide the direction of the gas flow. It is particularly preferred that when liquid argon is filled, the nozzle 6 allows the liquid argon to impact the melt in the furnace 1, causing the melt to move, thereby accelerating the cooling rate and making the temperature of the melt more uniform.

[0056] A discharge port and a return port are provided at the lower portion of the side wall of the furnace 1, and the discharge port and the return port are connected via a circulation pipe 7, and the circulation pipeline is located outside the furnace 1; the circulation pipe 7 can be used to accelerate the flow of the molten material in the furnace 1, and the external circulation pipe 7 can reduce the pressure and temperature fluctuations inside the furnace 1, and reduce the safety hazards caused by overheating or excessive pressure. When in use, first adjust the second port of the nozzle 6 to an appropriate height, then before the furnace 1 is evacuated before the solution treatment, the three-way valve 3 is switched to the vacuum device 5 and the nozzle 6 are connected through the gas pipe 2, the second solenoid valve is opened, the vacuum device 5 and the furnace 1 are evacuated, and after the vacuum is completed, the second solenoid valve is closed, and then when the solution treatment is carried out to the cooling stage, the three-way valve 3 is switched to the liquid argon supply device 4 and the nozzle 6 are connected through the gas pipe 2, the first solenoid valve is opened, and the liquid argon supply device 4 uses argon gas cooling to lower the temperature of the furnace 1; then carry out aging treatment, vacuum the furnace 1 in the same way before heating, and use argon gas cooling to lower the temperature of the furnace 1 in the same way when cooling.

[0057] The light-transmitting port can be opened on the top of the furnace or at the air guide port. When opened on the top of the furnace, the observation window and the light-transmitting port can be combined into one. At this time, preferably, the first pan-tilt is in the shape of a disc, the second pan-tilt is in the shape of a ring, the infrared temperature imager is connected to the center of the first pan-tilt, and the infrared temperature imager can rotate around the connection. The carbon dioxide laser is fixed on the second pan-tilt, and the carbon dioxide laser can not only rotate around the connection, but also rotate around the infrared temperature imager driven by the second pan-tilt. This structure has the following beneficial effects: 1. Only one carbon dioxide laser and one infrared temperature imager can cover a large area in the furnace, thereby reducing the difficulty of installation and equipment cost. 2. The space under the second pan-tilt can be used to supplement the field of view of the infrared temperature imager, thereby increasing the field of view of the infrared temperature imager. 3. The carbon dioxide laser can be rotated to a local lower temperature, thereby shortening the distance from the carbon dioxide laser to the heated area, thereby improving the heating effect. 4. The structure is simple and convenient for overall installation. At this time, the light-transmitting port and the observation window are also combined, and a larger area of ​​high-temperature resistant glass can be selected. Because the area of ​​the high-temperature resistant glass is increased, it is convenient to improve the shape and structure of the high-temperature resistant glass.

[0058] The industrial computer controls the connection of the liquid argon supply device 4 and the vacuum device 5. The control system determines the temperature distribution in the furnace based on the image obtained by the infrared temperature imager, and then adjusts the working conditions of the liquid argon supply device 4 and the vacuum device 5 based on the temperature distribution, ultimately making the furnace more evenly heated and cooled, and ultimately effectively preventing the casting from cracking.

[0059] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present invention, which should all be included in the scope of the claims of the present invention.

Claims

1. A heat treatment device, comprising a furnace, wherein an observation window is provided on the furnace body of the furnace, and the observation window is inlaid with quartz glass; characterized in that: It also includes an industrial computer, which has at least three control signal output interfaces; The video signal input interface of the industrial computer is connected to the infrared temperature imager; One of the control signal output interfaces of the industrial computer is connected to a first pan-tilt platform, the first pan-tilt platform is set up outside the furnace body, and the infrared temperature imager is installed on the first pan-tilt platform; The infrared temperature imager has an imaging lens, a light-transmitting tube with a tube wall shielding is provided in front of the imaging lens, the viewing window of the light-transmitting tube faces the quartz glass of the observation window, the length of the light-transmitting tube is 1 cm-5 cm, and the area of ​​the observation window is at least 5 times the area of ​​the tube opening of the light-transmitting tube; The first pan / tilt head drives the light-transmitting tube to change its orientation angle by no less than 30 degrees up and down and no less than 30 degrees left and right. Within the angle change range, the viewing window of the light-transmitting tube always faces the quartz glass, ensuring that the infrared temperature imager always captures the temperature image of the workpiece in the furnace body. A light-transmitting window is provided on the furnace body of the melting furnace, and quartz glass is inlaid on the light-transmitting window. The light-transmitting window is located below the observation window, and the distance between the light-transmitting window and the observation window is greater than 5 cm and less than 10 cm. One of the control signal output interfaces of the industrial computer is connected to the second PTZ; One of the control signal output interfaces of the industrial computer also controls a connected carbon dioxide laser; A carbon dioxide laser is fixed on the second pan / tilt, the light outlet of the carbon dioxide laser faces the light-transmitting window, and a specific elastic light shield is installed between the light outlet of the carbon dioxide laser and the light-transmitting window to prevent the infrared laser from being reflected and projected outward; The second pan / tilt head drives the light outlet of the carbon dioxide laser to change its direction angle by no less than 30 degrees up and down and no less than 30 degrees left and right. Within the angle change range, the light outlet is always facing the light-transmitting window to ensure that the infrared laser always irradiates the workpiece in the furnace body. The working process is: The furnace heats the workpiece. During the heating process, the industrial computer controls the first pan / tilt to drive the infrared temperature imager to capture the temperature image of the workpiece and find the low-temperature area of ​​the workpiece. The low-temperature area refers to an area in a temperature image that is lower than the average temperature of the workpiece. The industrial computer adjusts the second pan / tilt to drive the light outlet of the carbon dioxide laser to move so that the emitted laser is directed toward the low-temperature area, and starts the carbon dioxide laser to perform supplementary heating; Then, the industrial computer continues to control the first pan / tilt platform to drive the infrared temperature imager to capture the temperature image of the workpiece and continue to search for the low temperature area of ​​the workpiece; After the industrial computer finds the new low-temperature area, the second pan / tilt is adjusted again to drive the light outlet of the carbon dioxide laser to move so that the emitted laser is directed toward the new low-temperature area, and the carbon dioxide laser is started to perform supplementary heating; At least three gas pipelines are arranged outside the furnace, at least three gas guide ports are opened on the side wall of the furnace, and at least three ports of at least three gas pipelines are connected to at least three gas guide ports through at least three electrically controlled valves respectively; At least three of the air guide ports are respectively provided with nozzles facing the workpiece; At least three of the gas guide ports are evenly arranged from top to bottom on the furnace body; The industrial computer controls and connects the at least three electrically controlled valves respectively; The working process is: In the process of cooling the workpiece, the industrial computer controls the first pan / tilt to drive the infrared temperature imager to capture the temperature image of the workpiece and find the high temperature area of ​​the workpiece. The high temperature area refers to an area with a temperature image higher than the average temperature of the workpiece. The industrial computer records the cooling areas corresponding to the at least three electrically controlled valves in advance; The industrial computer determines the location of the high temperature area by analyzing the temperature imaging; When the high temperature area is located in the cooling area corresponding to one of the electric control valves, the industrial computer opens the corresponding electric control valve to pass gas for cooling compensation; It also includes a three-way valve, a first port of the three-way valve is connected to the gas pipe, a second port is connected to the liquid argon supply device, and a third port is connected to the vacuum device; a first solenoid valve is provided between the three-way valve and the liquid argon supply device, and a second solenoid valve is provided between the three-way valve and the vacuum device.

2. A heat treatment device according to claim 1, characterized in that: The gas delivery pipe is spirally wound outside the furnace.

Citation Information

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