A holographic microscopic measurement method and device

Abstract

The present invention discloses a holographic microscopic measurement method and device, which relates to the field of optical imaging and digital holographic technology. It is used to solve the problems that the existing digital holographic measurement method has a single detection mode, two-dimensional and three-dimensional detection cannot be performed simultaneously, and the existing multi-mode detection device requires time-sharing or multiple detectors for measurement, resulting in low measurement efficiency, poor data synchronization and high system complexity. It includes: a first rectangular aperture, which is used to shape the first transmitted light so that the first transmitted light forms a rectangular beam; a second splitting part, which is used to divide the first transmitted light into an object light and a reference light with a spacing; a second rectangular aperture, which is used to intercept the object light and the reference light to obtain a non-overlapping part of the reference light, and an overlapping part where a part of the object light and a part of the reference light overlap; an image detector, which is used to collect an off-axis hologram formed by the overlapping part and a micrograph formed by the non-overlapping part of the reference light.

Description

Technical Field

[0001] The present invention relates to the technical field of optical imaging and digital holography, and more specifically to a holographic microscopic measurement method and device. Background Art

[0002] Microscopy technology provides two-dimensional and three-dimensional observation methods for micro-scale samples through imaging and quantitative measurement, and its lateral resolution can reach the micrometer to nanometer level. The core of digital holographic measurement technology is to achieve accurate measurement of the three-dimensional morphology of objects by recording and reconstructing the phase and amplitude information of the light field. It has the advantages of non-contact, full-field and fast, and is widely used in biological cell observation, particle field testing and microstructure measurement. However, the existing technology faces some limitations, which constrains digital holographic measurement technology in practical applications. In particular, the existing digital holographic measurement technology can usually only work in a single mode, that is, it can only perform three-dimensional measurements. This limits its application in scenarios where it is necessary to obtain two-dimensional images and three-dimensional morphological information at the same time. For example, in the dynamic monitoring of biological cells, it is necessary to obtain two-dimensional images and three-dimensional structural change information of cells at the same time.

[0003] The patent "A common optical path phase shift digital holographic microscopy measurement device" uses a flat crystal to realize common optical path phase shift holography, but requires piezoelectric ceramic drive to realize phase shift; the patent "A common optical path off-axis digital holographic microscopy device with adjustable shear amount" realizes common optical path off-axis holography through beam expansion collimator and isosceles triangle prism adjustment, but its optical path structure is relatively complex; the patent "A dual-channel phase shift phase measurement device combined with digital holography and differential interference" can also obtain corresponding micrographs through ordinary microscopic imaging components, but the device requires four detectors to collect images separately to obtain these three measurement results; a certain paper provides "A phase and fluorescence dual-mode microscopy measurement device", which can be used to obtain phase and fluorescence dual-mode image information of the sample to be tested, but the device requires two detectors to collect quantitative phase images and fluorescence images respectively to realize dual-mode detection. Existing digital holographic measurement methods can either only perform three-dimensional detection, or realize two-dimensional and three-dimensional detection in time or region, which means that two-dimensional measurement needs to be performed first, and then switched to three-dimensional measurement mode, or multiple detectors are required to perform simultaneously. These measurement methods have problems such as low measurement efficiency, poor data synchronization and high system complexity.

[0004] In summary, the existing digital holographic measurement methods have the problems of a single detection mode, two-dimensional and three-dimensional detection cannot be performed simultaneously, and the multi-mode detection device requires time-sharing or multiple detectors for measurement, resulting in low measurement efficiency, poor data synchronization and high system complexity. Summary of the invention

[0005] The embodiment of the present invention provides a holographic microscopic measurement method and device, which is used to solve the problems of existing digital holographic measurement methods, such as a single detection mode, inability to perform two-dimensional and three-dimensional detections at the same time, and the need for time-sharing or multiple detectors for measurement in a multi-mode detection device, resulting in low measurement efficiency, poor data synchronization, and high system complexity.

[0006] An embodiment of the present invention provides a holographic microscopic measurement device, comprising:

[0007] A light source part, which is used to provide a parallel light beam to the first light splitting part;

[0008] A first light splitting part, which is used to reflect the parallel light beam from the light source part to form a first reflected light, the first reflected light is reflected by the microscope objective lens and the sample to be measured to form a second reflected light, the second reflected light passes through the first light splitting part to form a first transmitted light, and the first transmitted light carries the surface information of the sample to be measured;

[0009] A first rectangular aperture, located on a transmitted light side of the first light splitting part, and used for shaping the first transmitted light so that the first transmitted light forms a rectangular beam;

[0010] A second light splitting part, which is located at the light exit side of the first rectangular aperture and is used to split the first transmitted light into object light and reference light with a spacing;

[0011] a second rectangular aperture, located at the light exiting side of the second light splitting part, for intercepting the object light and the reference light to obtain a non-overlapping portion of the reference light and an overlapping portion where a portion of the object light and a portion of the reference light overlap;

[0012] The image detector is used to collect the off-axis hologram formed by the overlapping part and the micrograph formed by the non-overlapping part of the reference light.

[0013] Preferably, the second light splitting part is a birefringent crystal, and the first transmitted light passes through the birefringent crystal to form two beams of object light and reference light with orthogonal polarization states and parallel propagation directions; or

[0014] The second light splitting part is a dual polarization grating, and the first transmitted light passes through the dual polarization grating to form two beams of object light and reference light, whose polarization directions are perpendicular to each other and whose propagation directions are parallel to each other; or

[0015] The second light splitting part is a parallel plate, and the first transmitted light passes through the parallel plate to form two beams of object light and reference light that are parallel to each other but at different positions.

[0016] Preferably, the light source part comprises a laser light source, a beam expander, a pinhole stop and a collimator which are sequentially located between the laser light source and the first light splitting part.

[0017] Preferably, the first light splitting part is a light splitting prism.

[0018] An embodiment of the present invention provides a holographic microscopic measurement method, comprising:

[0019] The first transmitted light carrying the surface information of the sample to be measured through the first light splitting part is shaped by the first rectangular aperture so that the first transmitted light forms a rectangular beam;

[0020] The first transmitted light passes through the second light splitting part to form an object light and a reference light with a spacing, and the object light and the reference light are intercepted by a second rectangular aperture to obtain a non-overlapping reference light and an overlapping part where a part of the object light and a part of the reference light overlap;

[0021] The non-overlapping part of the reference light and the overlapping part form a micrograph and an off-axis hologram after passing through an imaging lens.

[0022] Preferably, after the non-overlapping part of the reference light and the overlapping part form a micrograph and an off-axis hologram through an imaging lens, it further comprises: the micrograph is used as a focusing reference of the off-axis hologram and is collected by an image detector simultaneously with the off-axis hologram.

[0023] An embodiment of the present invention provides a computer device, comprising a memory and a processor, wherein the memory stores a computer program, and when the computer program is executed by the processor, the processor executes any one of the above-mentioned holographic microscopy measurement methods.

[0024] An embodiment of the present invention provides a computer-readable storage medium storing a computer program. When the computer program is executed by a processor, the processor executes any one of the above-mentioned holographic microscopy measurement methods.

[0025] The embodiment of the present invention provides a holographic microscopic measurement method and device, the device comprising a light source part, which is used to provide a parallel light beam to a first light splitting part; the first light splitting part, which is used to reflect the parallel light beam from the light source part to form a first reflected light, the first reflected light is reflected by a microscope objective lens and a sample to be measured to form a second reflected light, the second reflected light is passed through the first light splitting part to form a first transmitted light, the first transmitted light carries the surface information of the sample to be measured; a first rectangular aperture, which is located on the transmitted light side of the first light splitting part, and is used to shape the first transmitted light so that the first transmitted light forms a rectangular light beam; a second light splitting part, which is located on the light exit side of the first rectangular aperture, and is used to divide the first transmitted light into an object light and a reference light with a spacing; a second rectangular aperture, which is located on the light exit side of the second light splitting part, and is used to intercept the object light and the reference light to obtain a non-overlapping part of the reference light and an overlapping part where a part of the object light and a part of the reference light overlap; an image detector, which is used to collect an off-axis hologram formed by the overlapping part and a micrograph formed by the non-overlapping part of the reference light. The device can separate the first transmitted light carrying the surface information of the sample to be measured into object light and reference light through the second light splitting part. By collecting a single image, the detection results of the two modes of micrograph and off-axis hologram can be obtained at the same time, realizing synchronous dual-mode detection, greatly improving the detection efficiency, realizing common optical path interference, and increasing the anti-interference ability of the measuring device; furthermore, the micrograph formed by the non-overlapping part of the reference light in the holographic microscopic measurement device can be used as the focusing reference of the off-axis hologram formed after the overlap of part of the object and part of the reference light, which is conducive to finding the focusing position. The device solves the problems of the existing digital holographic measurement method that the detection mode is single and two-dimensional and three-dimensional detection cannot be carried out simultaneously, and solves the defect that the multi-mode detection device needs to measure in time-sharing or with multiple detectors, thereby improving the measurement efficiency, data synchronization, and reducing the high complexity of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 A schematic diagram of the structure of a holographic microscopic measurement device provided by an embodiment of the present invention;

[0028] Figure 2 It is a schematic diagram of a light beam after the light beam is intercepted without using the first rectangular aperture in the prior art;

[0029] Figure 3 A schematic diagram of a light beam after the light beam is intercepted by the first rectangular aperture provided in an embodiment of the present invention;

[0030] Figure 4 A schematic diagram of a birefringent crystal provided in an embodiment of the present invention to implement beam shearing and replication;

[0031] Figure 5 A schematic diagram of a dual polarization grating for realizing beam shearing and replication provided by an embodiment of the present invention;

[0032] Figure 6 A schematic structural diagram of a holographic microscopic measurement device using a dual polarization grating provided in an embodiment of the present invention;

[0033] Figure 7 A schematic diagram of a parallel plate implementing beam shearing and replication provided by an embodiment of the present invention;

[0034] Figure 8 A schematic structural diagram of a holographic microscopic measurement device using parallel plates provided in an embodiment of the present invention;

[0035] Fig. 9 A schematic diagram of a light spot shape formed by the overlap of object light and reference light provided in an embodiment of the present invention;

[0036] Fig.10 A schematic diagram of a light beam after light beam interception by a second rectangular aperture provided in an embodiment of the present invention;

[0037] Among them, 1~laser light source, 2~beam expander, 3~pinhole aperture, 4~collimator, 5~plane reflector, 6~sample to be measured, 7~microscope objective, 8~first beam splitting part, 9~first rectangular aperture, 10-1~birefringent crystal, 10-2~dual polarization grating, 10-3~parallel plate, 11~polarizer, 12~second rectangular aperture, 13~imaging lens, 14~image detector, 15~computer, 20~first polarization grating, 21~second polarization grating, 30~overlapping part, 31~reference light, 32~non-overlapping part of reference light, 33~object light. DETAILED DESCRIPTION

[0038] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0039] The following combination Figure 1 to Figure 10 , a holographic microscopic measurement device provided by an embodiment of the present invention is introduced in detail.

[0040] like Figure 1 As shown, the device mainly includes: a light source part, a first light splitting part 8, a first rectangular aperture 9, a second light splitting part, a second rectangular aperture 12 and an image detector 14. Specifically, the light source part is used to provide a parallel light beam to the first light splitting part 8; the first light splitting part 8 is used to reflect the parallel light beam from the light source part to form a first reflected light, and further, the first reflected light is irradiated onto the surface of the sample to be tested 6 through the microscope objective 7, and is reflected by the sample to be tested 6 to form a second reflected light, and the second reflected light passes through the microscope and the first light splitting part 8 to form a first transmitted light. In the embodiment of the present invention, the first transmitted light carries the surface information of the sample to be tested 6.

[0041] In practical applications, the parallel light beam from the light source is a circular light beam. When the off-axis hologram and micrograph obtained by the circular light beam enter the image detector, the proportion of the off-axis hologram will be greater than that of the micrograph. Figure 2 As shown in FIG. 1 , the proportion of the two images formed by the circular light beam not intercepted by the first rectangular aperture is unequal, which is not conducive to the target surface utilization of the image detector on the one hand, and is not conducive to the separate processing of the off-axis hologram and the micrograph on the other hand. In the embodiment of the present invention, in order to solve the above problems, preferably, a first rectangular aperture is provided on the transmitted light side of the first light splitting part, and the first transmitted light is shaped by the first rectangular aperture to shape the first transmitted light of the circular light beam into a rectangular light beam. The proportion of the off-axis hologram and the micrograph formed subsequently by the shaped rectangular light beam is 1:1, as shown in FIG. Figure 3 As shown, the ratio of the two images obtained after the circular light beam passes through the first rectangular aperture is 1:1. In the embodiment of the present invention, by setting the first rectangular aperture, the utilization rate of the target surface of the image detector is increased, and the subsequent separation and processing of the micrograph and the hologram are facilitated.

[0042] It should be noted that the first light splitting part provided in the embodiment of the present invention is a light splitting prism.

[0043] In the embodiment of the present invention, although the first transmitted light is shaped into a rectangular beam by the first rectangular aperture 9 after passing through the first rectangular aperture, its essence is still the first transmitted light, so the first transmitted light shaped into a rectangular beam by the first rectangular aperture 9 is still called the first transmitted light.

[0044] Furthermore, in order to be able to cut and copy the first transmitted light, that is, the first transmitted light is divided into object light and reference light, preferably, a second splitting part is set on the light output side of the first rectangular aperture, and the second splitting part can split the first transmitted light into two parts to obtain object light and reference light with a spacing.

[0045] In an embodiment of the present invention, the first transmitted light can be divided into object light and reference light with a spacing based on the second splitting part, and the object light and the reference light can be intercepted based on the second rectangular aperture to obtain non-overlapping partial reference light and overlapping parts of partial object light and partial reference light. The non-overlapping partial reference light and overlapping parts of partial object light and partial reference light are respectively formed into a micrograph and an off-axis hologram through an imaging lens, and the image detector can collect the micrograph and the off-axis hologram at the same time. Through the above arrangement, common optical path interference is realized, and the stability and anti-interference ability of the optical system are increased.

[0046] For example, the second light splitting part provided in the embodiment of the present invention may be a birefringent crystal, such as Figure 4 As shown, when the first transmitted light enters the birefringent crystal 10-1, due to the anisotropy of the birefringent crystal 10-1, the first transmitted light will be decomposed into O light and E light. Since the O light and the E light have different refractive indices, they will propagate along different paths when propagating in the birefringent crystal 10-1. Specifically, after the first transmitted light enters the birefringent crystal 10-1, it will usually be split into two independent light beams, which are parallel to each other but slightly separated, and the polarization directions are perpendicular to each other. In the embodiment of the present invention, the first transmitted light will be split into two light beams by the birefringent crystal 10-1, namely, the object light and the reference light, that is, the beam shearing and replication are achieved by the birefringent crystal 10-1.

[0047] It should be noted that Figure 1 The second light splitting part in the holographic microscopy measuring device shown is a birefringent crystal 10-1.

[0048] For example, the second light splitting part provided in the embodiment of the present invention can be a dual polarization grating, which has diffraction characteristics and polarization characteristics, and can split the first transmitted light into two object light and reference light beams with different angles and directions, thereby realizing the shearing and copying of the light beam. Specifically, Figure 5 As shown, after the object light passes through the first polarization grating 20, it is divided into two circularly polarized lights of different angles and directions, and then passes through the second polarization grating 21 to form two light beams with mutually perpendicular polarization directions and mutually parallel propagation directions, thereby realizing the shearing and copying of the light beams. Figure 6 The second light splitting part in the holographic microscopy measuring device shown is a double polarization grating 10 - 2 , and the double polarization grating 10 - 2 includes a first polarization grating 20 and a second polarization grating 21 .

[0049] For example, the second light splitting part provided in the embodiment of the present invention may be a parallel plate, which achieves the shearing and duplication of the light beam by the light beam deviation caused by refraction and reflection. Figure 7 As shown, after the first transmitted light is reflected and refracted multiple times by the parallel plate 10 - 3 , two beams of object light and reference light are generated which are parallel to each other but at different positions. Figure 8 The second light splitting part in the holographic microscopy measuring device shown is a parallel plate 10-3.

[0050] Furthermore, if Figure 1 As shown, the polarizing plate 11 disposed on the light-emitting side of the second beam splitter is used to convert two beams of orthogonally polarized object light and reference light into object light and reference light having the same vibration direction.

[0051] In the embodiment of the present invention, before the object light and the reference light with the same vibration direction enter the second rectangular aperture, part of the object light and part of the reference light overlap, so the light spot formed after the object light and the reference light overlap includes three parts, such as Fig. 9 As shown, the three parts are: the overlapping part 30 where part of the object light and part of the reference light overlap, the non-overlapping part of the reference light 32, and the non-overlapping part of the object light. In the embodiment of the present invention, in order to obtain only the overlapping part 30 where part of the object light and part of the reference light overlap and the non-overlapping part of the reference light 32, preferably, a second rectangular aperture 12 is provided on the light exiting side of the second light splitting part. After the object light 33 and the reference light 31 pass through the second rectangular aperture 12, the non-overlapping part of the object light can be intercepted, and only the overlapping part 30 where part of the object light and part of the reference light overlap and the non-overlapping part of the reference light 32 are retained. The pattern formed by the object light and the reference light intercepted by the second rectangular aperture 12 is as shown in FIG. Fig.10 shown.

[0052] Furthermore, the overlapping part of the partial object light and the partial reference light retained after being intercepted by the second rectangular aperture, as well as the non-overlapping part of the reference light, are simultaneously received by the target surface of the image detector after passing through the imaging lens, that is, the image detector receives the off-axis hologram formed by the overlapping part and the micrograph formed by the non-overlapping part of the reference light.

[0053] It should be noted that the light source part provided in the embodiment of the present invention, such as Figure 1 As shown, it mainly includes a laser light source 1, a beam expander 2, a pinhole diaphragm 3 and a collimator 4, which are sequentially located between the laser light source 1 and the first light splitting part 8. It should be noted that if the first light splitting part 8 and the laser light source 1 are not arranged on the same straight line, the light source part also includes a plane reflector 5, through which the propagation direction of the collimated light beam can be changed. Here, the number of the plane reflectors 5 is not limited.

[0054] It should be noted that the holographic microscopic measurement device provided by the embodiment of the present invention is Figure 1 As shown, it also includes a computer 15, which is electrically connected to the light source part and the image detector 14. An imaging lens 13 is arranged in front of the image detector 14; a microscope objective lens 7 is also arranged in front of the sample 6 to be tested.

[0055] In order to more clearly introduce the holographic microscopic measurement device provided by the embodiment of the present invention, the holographic microscopic measurement method based on the holographic microscopic measurement device is introduced below. Specifically, the method includes the following steps:

[0056] Step 101, a first transmitted light carrying surface information of a sample to be measured is shaped by a first rectangular aperture through a first light splitting part, so that the first transmitted light forms a rectangular beam;

[0057] Step 102, the transmitted light passes through the second light splitting part to form an object light and a reference light with a spacing, and after the object light and the reference light pass through the second rectangular aperture and are intercepted, a non-overlapping portion of the reference light and an overlapping portion where a portion of the object light and a portion of the reference light overlap are obtained;

[0058] Step 103: The non-overlapping part of the reference light and the overlapping part pass through an imaging lens to form a micrograph and an off-axis hologram.

[0059] It should be noted that before step 101, the light beam from the laser light source passes through the beam expander, the pinhole diaphragm and the collimator to form collimated light, the collimated light is reflected by the first light splitting part to form a first reflected light, the first reflected light is reflected by the microscope objective and the sample to be measured to form a second reflected light, the second reflected light returns along a long path, passes through the first light splitting part to form a first transmitted light, and the first transmitted light here carries the surface information of the sample to be measured.

[0060] In step 101, the first transmitted light passes through a first rectangular aperture to form a rectangular light beam, where the first rectangular aperture is arranged on the light emitting side of the transmitted light of the first light splitting part.

[0061] In step 102, the first transmitted light passes through the second splitting part to form an object light and a reference light with a spacing. After the object light and the reference light pass through the polarizer, they form an object light and a reference light with the same vibration direction. Furthermore, after the object light and the reference light pass through the second rectangular aperture, the non-overlapping part of the object light is cut off to obtain the non-overlapping part of the reference light and the overlapping part where part of the object light and part of the reference light overlap.

[0062] Step 103, the non-overlapping part of the reference light and the overlapping part form a micrograph and an off-axis hologram after passing through an imaging lens, and are simultaneously collected by an image detector, that is, a micrograph and an off-axis hologram are formed on a target surface of the image detector.

[0063] In summary, an embodiment of the present invention provides a holographic microscopic measurement method and device, the device comprising a light source part, which is used to provide a parallel light beam to a first light splitting part; the first light splitting part, which is used to reflect the parallel light beam from the light source part to form a first reflected light, the first reflected light is reflected by a microscope objective lens and a sample to be measured to form a second reflected light, the second reflected light is passed through the first light splitting part to form a first transmitted light, the first transmitted light carries the surface information of the sample to be measured; a first rectangular aperture, which is located on the transmitted light side of the first light splitting part, and is used to shape the first transmitted light so that the first transmitted light forms a rectangular light beam; a second light splitting part, which is located on the light exit side of the first rectangular aperture, the first transmitted light forms an object light and a reference light with a spacing after passing through the second light splitting part; a second rectangular aperture, which is located on the light exit side of the second light splitting part, and is used to intercept the object light and the reference light to obtain a non-overlapping part of the reference light and an overlapping part where a part of the object light and a part of the reference light overlap; an image detector, which is used to collect an off-axis hologram formed by the overlapping part and a micrograph formed by the non-overlapping part of the reference light. The device can separate the first transmitted light carrying the surface information of the sample to be measured into object light and reference light through the second light splitting part. By collecting a single image, the detection results of the two modes of micrograph and off-axis hologram can be obtained at the same time, realizing synchronous dual-mode detection, greatly improving the detection efficiency, realizing common optical path interference, and increasing the anti-interference ability of the measuring device due to the simple structure of the measuring device; furthermore, the micrograph formed by the non-overlapping part of the reference light in the holographic microscopic measurement device can be used as the focusing reference of the off-axis hologram formed after the overlap of part of the object and part of the reference light, which is conducive to finding the focusing position. The device solves the problems of the existing digital holographic measurement method that the detection mode is single and two-dimensional and three-dimensional detection cannot be carried out simultaneously, and solves the defect that the multi-mode detection device needs to measure in time-sharing or with multiple detectors, improving the measurement efficiency, data synchronization, and reducing the high complexity of the system.

[0064] Another embodiment of the present invention also provides a computer device, which includes: a processor and a memory; the memory is used to store computer program code, and the computer program code includes computer instructions; when the processor executes the computer instructions, the electronic device executes each step of the holographic microscopy measurement method shown in the above method embodiment.

[0065] Another embodiment of the present invention further provides a computer-readable storage medium, in which computer instructions are stored. When the computer instructions are executed on a computer device, the computer device executes each step of the holographic microscopy measurement method shown in the above method embodiment.

[0066] Although the preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present invention.

[0067] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A holographic microscopic measurement device, characterized in that: include: A light source part, which is used to provide a parallel light beam to the first light splitting part; A first light splitting part, which is used to reflect the parallel light beam from the light source part to form a first reflected light, the first reflected light is reflected by the microscope objective lens and the sample to be measured to form a second reflected light, the second reflected light passes through the first light splitting part to form a first transmitted light, and the first transmitted light carries the surface information of the sample to be measured; A first rectangular aperture, located on a transmitted light side of the first light splitting part, and used for shaping the first transmitted light so that the first transmitted light forms a rectangular beam; A second light splitting part, which is located at the light exit side of the first rectangular aperture, is used to copy and cut the first transmitted light to form an object light and a reference light with a spacing, and the object light and the reference light both carry the surface information of the sample to be measured; a second rectangular aperture, located at the light exiting side of the second light splitting part, for intercepting the object light and the reference light to obtain a non-overlapping portion of the reference light and an overlapping portion where a portion of the object light and a portion of the reference light overlap; An image detector, which is used to collect the off-axis hologram formed by the overlapping portion and the micrograph formed by the non-overlapping portion of the reference light; Among them, the light source part includes a laser light source, a beam expander, a pinhole diaphragm and a collimator which are sequentially located between the laser light source and the first beam splitting part; the light beam from the laser light source forms collimated light after passing through the beam expander, the pinhole diaphragm and the collimator, and the collimated light forms first reflected light after being reflected by the first beam splitting part.

2. The device according to claim 1, characterized in that The second light splitting part is a birefringent crystal, and the first transmitted light passes through the birefringent crystal to form two beams of object light and reference light with orthogonal polarization states and parallel propagation directions; or The second light splitting part is a dual polarization grating, and the first transmitted light passes through the dual polarization grating to form two beams of object light and reference light, whose polarization directions are perpendicular to each other and whose propagation directions are parallel to each other; or The second light splitting part is a parallel plate, and the first transmitted light passes through the parallel plate to form two beams of object light and reference light that are parallel to each other but at different positions.

3. The device according to claim 1, characterized in that The first light splitting part is a light splitting prism.

4. A detection method based on the holographic microscopic measurement device according to any one of claims 1 to 3, characterized in that: include: The first transmitted light carrying the surface information of the sample to be measured through the first light splitting part is shaped by the first rectangular aperture so that the first transmitted light forms a rectangular beam; The first transmitted light is copied and sheared by the second light splitting part to form an object light and a reference light with a spacing, and the object light and the reference light both carry surface information of the sample to be measured; the object light and the reference light are intercepted by the second rectangular aperture to obtain a non-overlapping part of the reference light and an overlapping part where a part of the object light and a part of the reference light overlap; The non-overlapping part of the reference light and the overlapping part form a micrograph and an off-axis hologram after passing through an imaging lens; Among them, the light beam from the laser light source forms collimated light after passing through the beam expander, the pinhole diaphragm and the collimator. The collimated light forms the first reflected light after being reflected by the first light splitting part. The first reflected light forms the second reflected light after being reflected by the microscope objective and the sample to be measured. The second reflected light returns along the long path and transmits through the first light splitting part to form the first transmitted light.

5. The method according to claim 4, characterized in that After the non-overlapping part of the reference light and the overlapping part form a micrograph and an off-axis hologram through an imaging lens, the method further includes: the micrograph is used as a focusing reference for the off-axis hologram and is collected by an image detector simultaneously with the off-axis hologram.

6. A computer device, characterized in that: The computer device includes a memory and a processor, the memory stores a computer program, and when the computer program is executed by the processor, the processor executes the detection method according to any one of claims 4 to 5.

7. A computer-readable storage medium, characterized in that: A computer program is stored, and when the computer program is executed by a processor, the processor executes the detection method as described in any one of claims 4-5.

Images