Liquid scraping device and chip cleaning mechanism

Abstract

The present invention relates to a liquid scraping device and a cleaning mechanism for a chip, belonging to the technical field of chip cleaning. The liquid scraping device includes a first scraping plate and a driving mechanism; the first scraping plate is used to be arranged between the chip and the liquid supply assembly, and the liquid supply assembly is used to add a liquid reagent to the chip; the first scraping plate includes a first main body portion and a first liquid scraping portion, and the first liquid scraping portion faces the liquid supply assembly and protrudes from the first main body portion; the driving mechanism is connected to the first main body portion and is used to drive the first scraping plate to move so that the first liquid scraping portion scrapes off the residual liquid reagent on the liquid supply assembly. The residual liquid reagent on the liquid supply assembly can be cleaned by the liquid scraping device, solving the problem that the residual reagent on the liquid supply assembly cannot be cleaned by the existing chip cleaning method.

Description

Technical Field

[0001] The present invention relates to the technical field of chip cleaning, and in particular, to a liquid scraping device and a chip cleaning mechanism. Background Art

[0002] With the development of biological DNA synthesis technology, the existing artificial synthesis technology can no longer meet the growing market demand, and there is an urgent need for a high-throughput chip synthesizer. The chip synthesizer uses piezoelectric printing method for synthesis. Specifically, the ink in the ink cartridge is replaced with four kinds of base synthesis reagents respectively. After the support is coated, the computer controls the inkjet printer to spray specific types of synthesis reagents onto the predetermined area of the chip surface, and then completes the synthesis process through steps such as rinsing, deprotection, and coupling.

[0003] In steps such as chip rinsing and deprotection, the corresponding liquid reagents are generally sprayed on the chip surface by means of a liquid supply and distribution plate with one input and multiple outputs. After a specific time of reaction, it is necessary to clean the liquid reagents on the chip surface, and at the same time ensure that there is no liquid hanging phenomenon at the liquid outlet holes of the liquid supply and distribution plate, to avoid the dripping of the hanging liquid reagent onto the upper surface of the chip. However, the current chip cleaning method can only clean the residual liquid reagents on the chip surface, and cannot clean the liquid outlet holes of the distribution plate. Therefore, the residual liquid reagents at the liquid outlet holes may fall onto the chip surface, resulting in chip contamination. Summary of the Invention

[0004] The present invention provides a liquid scraping device and a chip cleaning mechanism to solve the technical problem that the existing chip cleaning method cannot clean the residual liquid reagents on the distribution plate.

[0005] According to one aspect of the present invention, a liquid scraping device is provided, including a first scraper and a driving mechanism; the first scraper is used to be arranged between the chip and the liquid supply component, and the liquid supply component is used to add liquid reagents to the chip; the first scraper includes a first main body part and a first liquid scraping part, and the first liquid scraping part faces the liquid supply component and protrudes from the first main body part; the driving mechanism is connected to the first main body part and is used to drive the first scraper to move, so that the first liquid scraping part scrapes off the residual liquid reagents on the liquid supply component.

[0006] The liquid scraping device provided by the present invention includes a first scraping plate and a driving mechanism. The first scraping plate includes a first main body portion and a first liquid scraping portion provided on the first main body portion. When a liquid reagent is added to the chip via a liquid supply component and the cleaning is completed, the driving mechanism can drive the first main body portion and the first liquid scraping portion to move between the chip and the liquid supply component, so that the residual liquid reagent on the liquid supply component can be scraped off by the first liquid scraping portion, solving the technical problem that the residual reagent on the liquid supply component cannot be cleaned in the existing chip cleaning method.

[0007] In a further preferred solution, the first scraping plate further includes a first diversion groove, and the first diversion groove is provided on the first main body portion; the first liquid scraping portion is connected to a part of the first main body portion surrounding the first diversion groove.

[0008] In this solution, the first diversion groove is provided on the first main body portion, and the first diversion groove is attached to the first liquid scraping portion. After the residual liquid reagent on the liquid supply component is scraped off by the first liquid scraping portion, the liquid reagent will flow along the side wall of the first liquid scraping portion into the first diversion groove, so as to collect the scraped liquid reagent and avoid polluting the surrounding environment of the chip with the liquid reagent.

[0009] In a further preferred solution, the first diversion groove includes a first diversion section and a second diversion section, and the second diversion section is located at one end of the first diversion section and communicates with the first diversion section; the first scraping plate further includes a first diversion portion, and the first diversion portion protrudes from the first main body portion and is connected to a part of the first main body portion surrounding the second diversion section and is located between the second diversion section and the chip in a first direction, and is used to limit the flow direction of the liquid reagent flowing out of the second diversion section.

[0010] In this solution, after the liquid reagent scraped off by the first liquid scraping portion enters the first diversion groove, it will flow along the first diversion section and the second diversion section. Since the first diversion portion is attached to the second diversion section and is located between the second diversion section and the chip in the first direction, when the liquid reagent flows in the second diversion section, the first diversion portion can block the liquid reagent and prevent the liquid reagent from dripping onto the chip surface and causing chip contamination.

[0011] In a further preferred solution, the first main body portion forms a cavity and is provided with an air outlet and an air inlet, the air outlet and the air inlet communicate with the cavity, and the air outlet faces the chip; the liquid scraping device further includes a blowing mechanism, and the blowing mechanism communicates with the air inlet and is used to blow air toward the chip through the air inlet, the cavity, and the air outlet.

[0012] In this solution, gas is blown into the cavity of the first main body through the air supply mechanism, so that the air outlet of the first main body can blow air outwards. When the driving mechanism drives the first main body to move between the chip and the liquid supply component, air can be blown onto the entire surface of the chip through the air outlet of the first main body. Thus, not only can the residual liquid reagent on the liquid supply component be cleaned, but also the function of drying the chip can be realized, thereby improving the cleaning effect of the chip and making the chip cleaning cleaner.

[0013] In a further preferred solution, the liquid scraping device further includes a second scraper; the second scraper includes a second main body portion and a second liquid scraping portion. The second liquid scraping portion faces the liquid supply component and protrudes from the second main body portion. The second main body portion is connected to the first main body portion of the first scraper; when the driving mechanism drives the first scraper to move, at least one of the first liquid scraping portion and the second liquid scraping portion is used to scrape off the liquid reagent on the liquid supply component.

[0014] In this solution, when the driving mechanism drives the first scraper to move, the second scraper moves accordingly. At this time, the first main body portion can blow air to dry the chip surface, and at the same time, the residual liquid reagent on the liquid supply component is scraped off by the first liquid scraping portion and / or the second liquid scraping portion. Thus, the second scraper can cooperate with the first scraper to scrape off the residual liquid reagent on the liquid supply component, thereby ensuring that the residual liquid reagent on the liquid supply component is cleaned up.

[0015] In a further preferred solution, the second main body portion and the first main body portion together enclose the air outlet.

[0016] Since the volume of the chip is small, when designing the air outlet, its size is generally controlled to be small, for example, controlled at the millimeter or even micron level, which is beneficial to accurately blowing air onto the chip surface through the air outlet. In this solution, enclosing the air outlet with the second main body portion and the first main body portion is beneficial to designing the size and structure of the air outlet, and can also reduce the manufacturing and forming difficulty of the liquid scraping device.

[0017] In a further preferred solution, the driving mechanism includes a power unit, a mounting frame, and an adjusting frame; the mounting frame is connected to the power unit; the adjusting frame is connected to the first scraper. The adjusting frame is provided with a first adjusting groove, and the adjusting frame is connected to the mounting frame via the first adjusting groove. The first adjusting groove is used to adjust the mounting height of the adjusting frame and the first scraper; the power unit is used to drive the mounting frame, the adjusting frame, and the first scraper to move.

[0018] In this solution, the first squeegee is installed on the adjusting frame, and the mounting frame is connected to the power unit. When the power unit drives the mounting frame to move, the adjusting frame and the first squeegee thereon can move accordingly, so as to drive the first squeegee to move between the liquid supply component and the chip. Moreover, a first adjusting groove is provided on the adjusting frame, so that the mounting frame can be connected to different parts of the first adjusting groove, thereby adjusting the relative height between the mounting frame and the adjusting frame and the first squeegee, and thus realizing the adjustment of the mounting height of the first squeegee.

[0019] According to another aspect of the present invention, there is provided a cleaning mechanism for a chip, the cleaning mechanism comprising a waste liquid recovery device, a liquid supply component and the above-mentioned liquid scraping device; the liquid supply component is used to add a liquid reagent to the chip; the first liquid scraping part of the liquid scraping device is used to scrape off the residual liquid reagent on the liquid supply component; the waste liquid recovery device is used to carry the chip and recover the liquid reagent scraped off by the first squeegee of the liquid scraping device.

[0020] According to the cleaning mechanism for a chip provided by the present invention, which comprises a waste liquid recovery device, a liquid supply component and a liquid scraping device, by using the liquid supply component to add a liquid reagent to the surface of the chip, the chip can be cleaned. After the cleaning is completed, the first squeegee is driven by a driving mechanism to move between the chip and the liquid supply component, and a relative movement will occur between the first liquid scraping part of the first squeegee and the liquid supply component, so as to scrape off the residual liquid reagent on the liquid supply component, avoiding the problem that the residual liquid reagent on the liquid supply component directly drips onto the chip surface and contaminates the chip, and solving the technical problem that the existing cleaning method cannot clean the residual liquid reagent on the liquid supply component.

[0021] In a further preferred solution, the waste liquid recovery device comprises a main body and a liquid return cover; the main body is provided with a waste liquid tank and a liquid discharge channel, and the liquid discharge channel is communicated with the waste liquid tank and is used to discharge the liquid reagent in the waste liquid tank; the liquid return cover is arranged in the waste liquid tank and together with the corresponding part of the waste liquid tank encloses a collection chamber, and an opening is provided at the circumferential edge of the liquid return cover, and the opening is communicated with the collection chamber for collecting waste liquid.

[0022] In this solution, the waste liquid tank provided on the main body can collect and store the waste liquid after the chip is cleaned, and then the waste liquid collected in the waste liquid tank can be discharged and processed through the liquid discharge channel provided in the main body. Moreover, the liquid return cover is arranged in the waste liquid tank and encloses a collection chamber with the waste liquid tank. When the waste liquid enters the collection chamber through the opening at the circumferential edge of the liquid return cover, the liquid return cover can block the waste liquid in the collection chamber to reduce the volatilization of the waste liquid, and the problem of environmental pollution caused by the volatilization of the waste liquid can be avoided.

[0023] In a further preferred embodiment, the liquid supply assembly includes a liquid supply swing rod, a liquid distribution plate, and a driving component; the liquid distribution plate is connected to the liquid supply swing rod, and the liquid distribution plate is provided with a liquid distribution groove and liquid outlet holes; the driving component is connected to the liquid supply swing rod and is used to drive the liquid supply swing rod and the liquid distribution plate to move so that the liquid outlet holes move above the chip.

[0024] In this embodiment, the liquid distribution plate can supply liquid evenly to the surface of the chip, which is beneficial to cleaning the surface of the chip evenly to improve the cleaning effect. Moreover, by driving the liquid supply swing rod through the driving component, the relative positions of the liquid supply swing rod and the liquid distribution plate and the chip can be adjusted, facilitating the supply of liquid to the entire surface of the chip by the liquid distribution plate, and the liquid supply swing rod and the liquid distribution plate can be moved away when placing and removing the chip, thereby improving the chip cleaning efficiency.

[0025] In summary, the scraping device and the chip cleaning mechanism provided by the present invention have at least the following beneficial effects: The chip cleaning mechanism provided by the present invention at least includes a waste liquid recovery device, a liquid supply assembly, and a scraping device. The scraping device includes a first scraping plate and a driving mechanism. The first scraping plate includes a first main body portion and a first liquid scraping portion provided on the first main body portion. After the chip cleaning is completed, the driving mechanism can drive the first main body portion and the first liquid scraping portion to move between the chip and the liquid supply assembly, so that the residual liquid reagent on the liquid supply assembly is scraped off by the first liquid scraping portion, avoiding the cleaning reagent from falling onto the chip surface and causing pollution. Thus, the scraping device and the cleaning mechanism provided by the present invention can clean the liquid supply assembly, solving the technical problem that the existing chip cleaning method cannot clean the residual liquid reagent on the liquid supply assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0027] Figure 1 It is a three-dimensional structural schematic diagram of the cleaning mechanism provided by an embodiment of the present invention;

[0028] Figure 2 It is a three-dimensional structural schematic diagram of the cleaning mechanism provided by an embodiment of the present invention from another angle;

[0029] Figure 3 It is a front view structural schematic diagram of the cleaning mechanism provided by an embodiment of the present invention;

[0030] Figure 4Schematic top view of the cleaning mechanism provided by the embodiment of the present invention;

[0031] Figure 5 Schematic internal structure diagram of the cleaning mechanism provided by the embodiment of the present invention;

[0032] Figure 6 Schematic three-dimensional structure diagram of the liquid scraping device provided by the embodiment of the present invention;

[0033] Figure 7 Schematic three-dimensional structure diagram of the liquid scraping device from another angle provided by the embodiment of the present invention;

[0034] Figure 8 Schematic top view of the liquid scraping device provided by the embodiment of the present invention;

[0035] Figure 9 Schematic exploded structure diagram of the liquid scraping device provided by the embodiment of the present invention;

[0036] Figure 10 Schematic structure diagram of the first scraper provided by the embodiment of the present invention;

[0037] Figure 11 Schematic connection structure diagram of the first scraper and the seal provided by the embodiment of the present invention;

[0038] Figure 12 Schematic three-dimensional structure diagram of the waste liquid recovery device provided by the embodiment of the present invention;

[0039] Figure 13 Installation schematic diagram of the chip and the waste liquid recovery device provided by the embodiment of the present invention;

[0040] Figure 14 Schematic structure diagram of the main body provided by the embodiment of the present invention;

[0041] Figure 15 Schematic structure diagram of the liquid return cover provided by the embodiment of the present invention;

[0042] Figure 16 Schematic bottom view of the liquid return cover provided by the embodiment of the present invention;

[0043] Figure 17 Schematic rear view of the waste liquid recovery device provided by the embodiment of the present invention;

[0044] Figure 18 Schematic top view of the waste liquid recovery device provided by the embodiment of the present invention;

[0045] Figure 19 For Figure 18 Schematic cross-sectional structure diagram of the B-B plane in

[0046] Figure 20 is Figure 18 a schematic cross-sectional structure diagram of the C-C plane in

[0047] Figure 21 is Figure 18 a schematic cross-sectional structure diagram of the D-D plane in

[0048] Figure 22 a schematic structure diagram of the liquid supply component provided by the embodiment of the present invention;

[0049] Figure 23 a schematic bottom view structure diagram of the liquid supply swing rod and the liquid distribution plate provided by the embodiment of the present invention;

[0050] Figure 24 a schematic structure diagram of the liquid distribution plate provided by the embodiment of the present invention.

[0051] The reference numerals are as follows:

[0052] A, chip;

[0053] 100, liquid scraping device; 110, first scraping plate; 111, first main body; 1111, cavity; 1112, air outlet; 1113, air inlet; 1114, installation groove; 112, first liquid scraping part; 113, first diversion groove; 1131, first diversion section; 1132, second diversion section; 114, first diversion part; 120, driving mechanism; 121, power unit; 122, mounting rack; 123, adjusting rack; 1231, first adjusting groove; 1232, second adjusting groove; 130, second scraping plate; 131, second main body; 132, second liquid scraping part; 133, second diversion groove; 1331, third diversion section; 1332, fourth diversion section; 134, second diversion part; 140, seal; 150, first baffle;

[0054] 200, waste liquid recovery device; 210, body; 211, waste liquid tank; 212, liquid discharge channel; 212a, liquid inlet; 213, first connection hole; 214, first air suction channel; 220, liquid return cover; 221, liquid return groove; 222, installation part; 223, diversion part; 223a, opening; 224, installation hole; 230, support seat; 240, fixing frame; 241, second connection hole; 250, mounting bracket; 251, bracket main body; 252, second air suction channel; 260, collection chamber;

[0055] 300, liquid supply component; 310, liquid supply swing rod; 311, liquid inlet hole; 320, liquid distribution plate; 321, liquid distribution groove; 322, liquid outlet hole; 330, driving component; 331, first driving part; 332, second driving part; 340, second baffle. Detailed implementation manners

[0056] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present invention.

[0057] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present invention, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0058] In the present invention, unless otherwise clearly specified and defined, the terms "mounted", "connected", "coupled", "fixed", etc. shall be construed in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0059] In the present invention, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0060] In the description of this specification, the description referring to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0061] Please refer to Figures 1 to 24 , according to the cleaning mechanism of the chip provided by the embodiment of the present invention, it at least includes a liquid scraping device 100, a waste liquid recovery device 200, and a liquid supply component 300. The liquid supply component 300 is used to add a liquid reagent to the surface of the chip A, so as to clean the chip A. Among them, the chip A can be a porous biochip with a porous structure or a non-porous biochip with a planar structure, preferably a non-porous biochip. The liquid scraping device 100 is arranged to move between the chip A and the liquid supply component 300. The liquid scraping device 100 is used to blow air on the surface of the chip A and is used to scrape off the residual liquid reagent on the liquid supply component 300. The waste liquid recovery device 200 is used to carry the chip A and recover the liquid reagent scraped off by the liquid scraping device 100.

[0062] Through the above structural design, when the chip A needs to be cleaned, the chip A can be placed on the waste liquid recovery device 200, and cleaning reagents such as ACN (acetonitrile reagent), TCA (trichloroacetic acid), etc. are added to the upper surface of the chip A through the liquid supply component 300. The added cleaning reagents can clean the impurities on the surface of the chip A. After the cleaning is completed, by controlling the movement of the liquid scraping device 100 between the upper surface of the chip A and the liquid supply component 300, the residual cleaning reagent on the liquid supply component 300 can be scraped off, avoiding the cleaning reagent from falling onto the surface of the chip A and causing contamination.

[0063] As a further preferred implementation, on the basis of the above solution, in the specific embodiment of the present invention, one or more of the following additions or combinations can also be included.

[0064] In some alternative embodiments, the liquid scraping device 100 includes a first scraper 110 and a driving mechanism 120. The first scraper 110 is used to be arranged between the chip A and the liquid supply component 300, and the driving mechanism 120 is used to drive the first scraper 110 to move.

[0065] Refer to Figures 5 to 11, the first squeegee 110 includes a first main body portion 111 and a first liquid scraping portion 112. The first liquid scraping portion 112 faces the liquid supply assembly 300 and protrudes from the first main body portion 111. The driving mechanism 120 is connected to the first main body portion 111. After the chip A is cleaned, the driving mechanism 120 can drive the first main body portion 111 and the first liquid scraping portion 112 to move between the chip A and the liquid supply assembly 300, so that the first liquid scraping portion 112 scrapes off the residual liquid reagent on the liquid supply assembly 300.

[0066] In some alternative embodiments, the first squeegee 110 further includes a first diversion groove 113. The first diversion groove 113 is provided in the first main body portion 111; the first liquid scraping portion 112 is connected to a part of the first main body portion 111 that encloses the first diversion groove 113.

[0067] For example, the first liquid scraping portion 112 can be in a plate shape, and the first diversion groove 113 is in a long strip shape and fits against the side wall of the first liquid scraping portion 112. When the driving mechanism 120 drives the first liquid scraping portion 112 to move, the first liquid scraping portion 112 can guide the cleaning reagent scraped off from the liquid supply assembly 300 into the first diversion groove 113, which can prevent the cleaning reagent from splashing everywhere and polluting the environment.

[0068] In some alternative embodiments, the first diversion groove 113 includes a first diversion section 1131 and a second diversion section 1132. The second diversion section 1132 is located at one end of the first diversion section 1131 and communicates with the first diversion section 1131. The first squeegee 110 further includes a first diversion portion 114. The first diversion portion 114 protrudes from the first main body portion 111 and is connected to a part of the first main body portion 111 that encloses the second diversion section 1132, and is located between the second diversion section 1132 and the chip A in a first direction, where the first direction is the length direction of the first squeegee 110, that is, the width direction of the cleaning mechanism.

[0069] Refer to Figures 6 to 9 , the first diversion section 1131 is located on the top surface of the first main body portion 111, the second diversion section 1132 is located on the side surface of the first main body portion 111, and the first liquid scraping portion 112 is connected to a part of the first main body portion 111 that encloses the first diversion section 1131. Thus, the cleaning reagent scraped off by the first liquid scraping portion 112 first flows into the first diversion section 1131, then into the second diversion section 1132, and finally flows out through the second diversion section 1132 and drops into the waste liquid recovery device 200. Due to the provision of the first diversion portion 114, the cleaning reagent will be blocked by the first diversion portion 114 when flowing through the second diversion section 1132, so that the cleaning reagent can be prevented from flowing upward above the chip A, and further, the cleaning reagent can be prevented from dropping onto the upper surface of the chip A and causing pollution to the chip A.

[0070] In some optional embodiments, the bottom of the first flow guide section 1131 is set to a structure with a high middle and low ends. Therefore, the bottom of the first flow guide section 1131 is set to an inclined structure, and the cleaning reagent can quickly flow to the second flow guide sections 1132 on both sides of the first main body 111 after entering the first flow guide section 1131, thereby improving the diversion efficiency of the cleaning reagent.

[0071] In some optional embodiments, the first body 111 is formed with a cavity 1111 and is provided with an air outlet 1112 and an air inlet 1113, the air outlet 1112 and the air inlet 1113 are connected to the cavity 1111, and the air outlet 1112 is arranged facing the chip A. The wiper device 100 further includes an air supply mechanism (not shown), which is connected to the air inlet 1113 and is used to blow air toward the chip A through the air inlet 1113, the cavity 1111, and the air outlet 1112.

[0072] For example, the air supply mechanism may include a blower, a vacuum pump, etc., which are connected to the air inlet 1113 of the first main body 111 through a pipeline. When the chip A needs to be dried, gas is transported into the cavity 1111 of the first main body 111 through the air supply mechanism and the air inlet 1113, so that air is blown toward the surface of the chip A through the air outlet 1112, thereby achieving the function of drying the chip A.

[0073] Furthermore, the air outlet 1112 is configured to be long and parallel to one side of the chip, so that it can match the periphery of the square chip A, thereby evenly blowing air to all parts of the surface of the chip A. Moreover, the width of the air outlet 1112 can be configured to be at the millimeter level or even at the micrometer level, which is conducive to adapting to the size of the chip A, thereby accurately blowing air to the surface of the chip A.

[0074] In some optional embodiments, the scraper device 100 further includes a second scraper 130. The second scraper 130 includes a second main body 131 and a second scraper 132, the second scraper 132 faces the liquid feeding assembly 300 and protrudes from the second main body 131, and the second main body 131 is connected to the first main body 111 of the first scraper 110. When the driving mechanism 120 drives the first main body 111 to move, the second main body 131 and the second scraper 132 move accordingly, and at this time, at least one of the first scraper 112 and the second scraper 132 is used to scrape off the liquid reagent on the liquid feeding assembly 300.

[0075] In some optional embodiments, the first scraping portion 112 and the second scraping portion 132 have the same structure. In this case, the first scraping portion 112 and the second scraping portion 132 can scrape off the liquid reagent on the liquid feeding component 300 at the same time, thereby ensuring that the residual liquid reagent on the liquid feeding component 300 is cleaned.

[0076] In some alternative embodiments, the second squeegee 130 further includes a second diversion groove 133 disposed in the second main body 131; the second liquid scraping portion 132 is connected to a portion of the second main body 131 that encloses the second diversion groove 133. When the driving mechanism 120 drives the second liquid scraping portion 132 to move, the second liquid scraping portion 132 can guide the cleaning reagent scraped off from the liquid supply assembly 300 into the second diversion groove 133, thereby preventing the cleaning reagent from splashing everywhere and polluting the environment.

[0077] In some alternative embodiments, the second diversion groove 133 includes a third diversion section 1331 and a fourth diversion section 1332. The fourth diversion section 1332 is located at one end of the third diversion section 1331 and communicates with the third diversion section 1331. The second squeegee 130 further includes a second diversion portion 134 that protrudes from the second main body 131 and is connected to a portion of the second main body 131 that encloses the fourth diversion section 1332, and is located between the fourth diversion section 1332 and the chip A in the first direction, and is used to restrict the flow direction of the liquid reagent flowing out of the fourth diversion section 1332.

[0078] Refer to Figure 6 and Figure 8 , the first diversion groove 113 and the second diversion groove 133 are respectively located on opposite sides of the first liquid scraping portion 112 and the second liquid scraping portion 132. When the first squeegee 110 and the second squeegee 130 move forward between the chip A and the liquid supply assembly 300, the first liquid scraping portion 112 of the first squeegee 110 is used to scrape off the liquid reagent, and at this time the liquid reagent flows into the first diversion groove 113. When the first squeegee 110 and the second squeegee 130 move backward between the chip A and the liquid supply assembly 300, the second liquid scraping portion 132 of the second squeegee 130 is used to scrape off the liquid reagent, and at this time the liquid reagent flows into the second diversion groove 133. It should be understood that the forward and backward directions are only used to represent opposite movement directions, that is, when the first squeegee 110 and the second squeegee 130 move in a certain direction, the first squeegee 110 functions, and when the first squeegee 110 and the second squeegee 130 move in the direction opposite to this certain direction, the second squeegee 130 functions, which can improve the liquid scraping efficiency.

[0079] In some alternative embodiments, the second main body 131 and the first main body 111 together enclose an air outlet 1112, which is beneficial to designing the size and structure of the air outlet 1112, and can also reduce the manufacturing and forming difficulty of the first squeegee 110 and the second squeegee 130.

[0080] In some alternative embodiments, the first main body 111 is provided with a mounting groove 1114; the liquid scraping device 100 further includes a seal 140 disposed in the mounting groove 1114 to seal and connect the second squeegee 130 and the first squeegee 110.

[0081] Reference Figure 10 and Figure 11 As shown in FIGS. and, the installation groove 1114 is provided on the side of the first squeegee 110 facing the second squeegee 130. Both the installation groove 1114 and the seal 140 are U-shaped and surround the periphery of the air outlet 1112. After the first squeegee 110, the second squeegee 130 and the seal 140 are connected and formed, the installation groove 1114 and the seal 140 can effectively seal the periphery of the air outlet 1112, thereby preventing air leakage between the first squeegee 110 and the second squeegee 130.

[0082] In some alternative embodiments, the driving mechanism 120 includes a power unit 121, a mounting bracket 122 and an adjusting bracket 123; the mounting bracket 122 is connected to the power unit 121; the adjusting bracket 123 is connected to the first squeegee 110, and the adjusting bracket 123 is provided with a first adjusting groove 1231, and the adjusting bracket 123 is connected to the mounting bracket 122 via the first adjusting groove 1231.

[0083] Reference Figure 3 and Figure 5 As shown in FIGS. and, the first adjusting groove 1231 on the adjusting bracket 123 is arranged along the height direction of the cleaning mechanism. Thus, the mounting bracket 122 can be connected to different positions of the first adjusting groove 1231 by bolts, so as to adjust the mounting height of the adjusting bracket 123 and the first squeegee 110. The power unit 121 may include a motor and a lead screw, and the mounting bracket 122 is connected to the lead screw. The motor and the lead screw can drive the mounting bracket 122 to move, thereby driving the adjusting bracket 123 and the first squeegee 110 to move, so that the first squeegee 110 moves between the liquid supply assembly 300 and the chip A.

[0084] In some alternative embodiments, the liquid scraping device 100 further includes a first baffle 150, and the first baffle 150 is arranged at both ends of the first squeegee 110 and connected to the adjusting bracket 123. In a state where the liquid supply assembly 300 adds a liquid reagent to the surface of the chip A, the first baffle 150 is located on the side of the chip A and is used to block the cleaning reagent to prevent the cleaning reagent from splashing around when dropping onto the surface of the chip A.

[0085] In some alternative embodiments, the adjusting bracket 123 is provided with a second adjusting groove 1232, and the first baffle 150 is connected to the adjusting bracket 123 via the second adjusting groove 1232. Moreover, the second adjusting groove 1232 is arranged along the height direction of the cleaning mechanism. Thus, the first baffle 150 can be connected to different positions of the second adjusting groove 1232 by bolts, so as to adjust the mounting height of the first baffle 150, so that the first baffle 150 can effectively block the cleaning reagent.

[0086] In some alternative embodiments, please refer to Figures 12 to 21, the waste liquid recovery device 200 provided by the embodiment of the present invention includes a main body 210 and a liquid return hood 220; the main body 210 is provided with a waste liquid tank 211 and a liquid discharge channel 212. The waste liquid tank 211 can collect and store the waste liquid after the chip A is cleaned, and the liquid discharge channel 212 is communicated with the waste liquid tank 211 and is used to discharge the waste liquid in the waste liquid tank 211 for recycling; the liquid return hood 220 is arranged in the waste liquid tank 211 and together with the corresponding part of the waste liquid tank 211 encloses a collection chamber 260. An opening 223a is provided at the circumferential edge of the liquid return hood 220 for forming a gap through which the waste liquid can pass between the liquid return hood 220 and the bottom surface of the waste liquid tank 211. The liquid inlet 212a of the liquid discharge channel 212 is communicated with the collection chamber 260.

[0087] In this embodiment, during the chip cleaning process, after the cleaning waste liquid enters the waste liquid tank 211, it will enter the collection chamber 260 through the opening 223a at the circumferential edge of the liquid return hood 220, and finally be discharged through the liquid discharge channel 212 for subsequent recycling. Thus, the liquid return hood 220 can block the waste liquid in the collection chamber 260 to reduce the volatilization during the waste liquid recycling process, and can avoid the problem of environmental pollution caused by the volatilization of the waste liquid, especially suitable for collecting and recycling volatile waste liquid.

[0088] In some optional embodiments, the liquid discharge channel 212 has a liquid inlet 212a which is communicated with the collection chamber 260, and a liquid return groove 221 is provided on the surface of the liquid return hood 220 facing the liquid inlet 212a.

[0089] Refer to Figures 12 to 14 , the liquid return hood 220 is arranged in the waste liquid tank 211 and above the liquid inlet 212a, and the liquid return hood 220 can block the waste liquid at the liquid inlet 212a. When the waste liquid in the collection chamber 260 enters the liquid discharge channel 212 through the liquid inlet 212a, the liquid return hood 220 can be used to reduce the volatilization of the waste liquid at the liquid inlet 212a. Moreover, a liquid return groove 221 is provided on the bottom surface of the liquid return hood 220. Since the liquid return groove 221 is recessed into the liquid return hood 220, when the waste liquid in the collection chamber 260 volatilizes, it will gather in the liquid return groove 221, causing the pressure in the collection chamber 260 to increase, thereby inhibiting the volatilization of the waste liquid in the collection chamber 260 and achieving the effect of further reducing the volatilization of the waste liquid.

[0090] In some optional embodiments, the liquid return hood 220 is arranged to gradually shrink from near to far away from the liquid inlet 212a.

[0091] For example, the liquid return hood 220 can be roughly in the shape of a quadrangular pyramid. When the waste liquid is transported into the waste liquid tank 211 and reaches the upper surface of the liquid return hood 220, the waste liquid can quickly flow along the surface of the liquid return hood 220 to the circumferential edge of the liquid return hood 220 and enter the collection chamber 260 through the opening 223a around the liquid return hood 220, thereby improving the waste liquid collection efficiency.

[0092] In some optional embodiments, the liquid return hood 220 includes a plurality of mounting portions 222 and a plurality of guide portions 223 , wherein the plurality of mounting portions 222 are arranged at intervals, and the guide portions 223 are connected between adjacent mounting portions 222 , and an opening 223 a is provided on the circumferential edge of each guide portion 223 .

[0093] Reference Figure 13 and Figure 14 The bottom surface of the liquid return cover 220 is rectangular, and the liquid return cover 220 includes four mounting portions 222 and four flow guide portions 223. The four mounting portions 222 are respectively arranged at the four corners of the bottom surface of the liquid return cover 220, and the four flow guide portions 223 are respectively arranged at the four sides of the bottom surface of the liquid return cover 220, so that four openings 223a are formed around the liquid return cover 220. Waste liquid can flow into the collection chamber 260 from the opening 223a on any side of the liquid return cover 220, thereby further improving the waste liquid collection efficiency.

[0094] In some optional embodiments, the bottom surface of the waste liquid tank 211 is tapered, and the liquid inlet 212a is located at the lowest point of the bottom surface of the waste liquid tank 211. Thus, the waste liquid flowing into the collection chamber 260 can quickly flow into the liquid inlet 212a, so that the waste liquid collected in the waste liquid tank 211 can be discharged through the liquid discharge channel 212 and subsequently recycled.

[0095] In some optional embodiments, the waste liquid recovery device 200 further includes a support base 230, which is connected to the body 210 and is located on a side of the body 210 away from the waste liquid tank 211. The support base 230 can support the body 210 and serve as an installation base for the waste liquid recovery device 200, so that the waste liquid recovery device 200 can be installed in any application scenario.

[0096] In some optional embodiments, the main body 210 is provided with a first connecting hole 213; the waste liquid recovery device 200 also includes a fixing frame 240, which is arranged in the waste liquid tank 211 and is provided with a second connecting hole 241, and the second connecting hole 241 is connected to the first connecting hole 213; the support seat 230 is connected to the main body 210 and the fixing frame 240 through the first connecting hole 213 and the second connecting hole 241.

[0097] Reference Figure 18 and Figure 20, there are four fixing brackets 240 provided inside the waste liquid tank 211. The fixing brackets 240 are cylindrical and stand inside the waste liquid tank 211. There are four first connection holes 213 provided inside the main body 210, and all the first connection holes 213 are arranged in one-to-one correspondence with the second connection holes 241. The support base 230 is provided with threaded holes, and threads are provided inside both the first connection holes 213 and the second connection holes 241. Bolts can be passed through the first connection holes 213, the second connection holes 241, and the threaded holes, so as to realize connecting the fixing brackets 240 to the support base 230 through threaded cooperation, so as to install and fix the main body 210. And, since the fixing brackets 240 protrude from the bottom surface of the waste liquid tank 211, it can prevent the waste liquid in the waste liquid tank 211 from flowing into the first connection holes 213 and the second connection holes 241 to cause corrosion.

[0098] Furthermore, the fixing brackets 240 and the main body 210 are integrally formed, which can make the installation of the fixing brackets 240 more stable, thereby enhancing the connection stability between the support base 230 and the main body 210. It should be understood that in other alternative embodiments, the fixing brackets 240 can be separately formed from the main body 210, and then the fixing brackets 240 are installed inside the waste liquid tank 211 through connection methods such as welding.

[0099] In some alternative embodiments, the waste liquid recovery device 200 further includes an installation bracket 250, and the installation bracket 250 stands inside the waste liquid tank 211; the liquid return cover 220 is provided with an installation hole 224, one end of the installation bracket 250 is connected to the bottom surface of the waste liquid tank 211, and the other end passes through the installation hole 224.

[0100] Refer to Figure 12 , Figure 15 , Figure 18 and Figure 21 , there are four installation brackets 250 provided inside the waste liquid tank 211, so as to form a stable support for the chip A. One installation hole 224 is respectively provided on each of the four installation parts 222 of the liquid return cover 220, so as to facilitate each installation bracket 250 to pass through the corresponding installation hole 224, so that the liquid return cover 220 is sleeved on the installation bracket 250 through the installation hole 224, thereby ensuring that the liquid return cover 220 is stably installed inside the waste liquid tank 211.

[0101] In some alternative embodiments, a first air suction channel 214 is provided inside the main body 210; the installation bracket 250 includes a bracket main body 251 and a second air suction channel 252 penetrating the bracket main body 251. The second air suction channel 252 is communicated with the first air suction channel 214 and is externally connected to a negative pressure device via the first air suction channel 214.

[0102] For example, the negative pressure device can be a vacuum pump. Through the negative pressure device, air can be drawn into the first air suction channel 214 and the second air suction channel 252, so as to adsorb the chip A on the mounting bracket 250 by using negative pressure. Thus, the chip A can be stably fixed on the mounting bracket 250 without causing damage to the chip A.

[0103] In some alternative embodiments, the liquid supply assembly 300 includes a liquid supply swing rod 310, a liquid distribution plate 320, and a driving component 330. The liquid distribution plate 320 is connected to the liquid supply swing rod 310. The liquid distribution plate 320 is provided with a liquid distribution groove 321 and liquid outlet holes 322. The driving component 330 is connected to the liquid supply swing rod 310. By means of the driving component 330, the liquid supply swing rod 310 and the liquid distribution plate 320 can be driven to move, so that the liquid outlet holes 322 move above the chip A or move away from above the chip A.

[0104] Referring to Figures 1 to 5 、 Figures 22 to 24 , the liquid distribution plate 320 is nested on the lower surface of the liquid supply swing rod 310. The liquid supply swing rod 310 is provided with a liquid inlet hole 311. The liquid distribution groove 321 of the liquid distribution plate 320 is communicated with the liquid inlet hole 311, and is used for dividing the incoming liquid into sixteen paths evenly and discharging them from the sixteen liquid outlet holes 322 onto the surface of the chip A respectively. Thus, through the liquid distribution plate 320, liquid can be supplied to the surface of the chip A evenly, which is beneficial to cleaning the surface of the perforated chip A evenly to improve the cleaning effect.

[0105] It should be noted that in other alternative embodiments, the number of the liquid outlet holes 322 is not limited to sixteen. For example, the liquid distribution groove 321 can be configured to divide the incoming liquid into four paths, eight paths, thirty-two paths and other structural forms, and correspondingly set four, eight, thirty-two liquid outlet holes 322, or the corresponding number of liquid outlet holes 322 can also be set according to the actual cleaning requirements.

[0106] In some alternative embodiments, the driving component 330 includes a first driving member 331 and a second driving member 332. The first driving member 331 and the second driving member 332 can be a motor, a cylinder, etc. The first driving member 331 is used for driving the liquid supply swing rod 310 to rotate around the height direction of the cleaning mechanism as an axis, and the second driving member 332 is used for driving the liquid supply swing rod 310 to move along the height direction of the cleaning mechanism. When it is necessary to clean the chip A, the first driving member 331 and the second driving member 332 can be used to drive the liquid supply swing rod 310 and the liquid distribution plate 320 to move above the chip A, so as to facilitate adding a cleaning reagent to the upper surface of the chip A. After the cleaning is completed, the first driving member 331 and the second driving member 332 can be used to move the liquid supply swing rod 310 and the liquid distribution plate 320 away from above the chip A, so as to facilitate taking and placing the chip A on the waste liquid recovery device 200.

[0107] In some alternative embodiments, the liquid supply assembly 300 further includes a second baffle 340, which is connected to the liquid supply swing rod 310 and protrudes from the liquid supply swing rod 310 toward the chip A. When the liquid supply assembly 300 adds a liquid reagent to the surface of the chip A, the second baffle 340 is located on the side of the chip A and is used to block the cleaning reagent, thereby preventing the cleaning reagent from splashing around when it drips onto the surface of the chip A.

[0108] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present invention.

Claims

1. A liquid scraping device, characterized in that, it includes a first scraper and a driving mechanism; the first scraper is arranged between the chip and the liquid supply component, and the liquid supply component is used to add liquid reagent to the chip; the first scraper includes a first main body part and a first liquid scraping part, and the first liquid scraping part faces the liquid supply component and protrudes from the first main body part; the driving mechanism is connected to the first main body part and is used to drive the first scraper to move, so that the first liquid scraping part scrapes off the residual liquid reagent on the liquid supply component; the first scraper further includes a first diversion groove, and the first diversion groove is arranged on the first main body part; the first liquid scraping part is connected to the part of the first main body part that encloses the first diversion groove; the first diversion groove includes a first diversion section and a second diversion section, and the second diversion section is located at one end of the first diversion section and is communicated with the first diversion section; the first scraper further includes a first diversion part, the first diversion part protrudes from the first main body part and is connected to the part of the first main body part that encloses the second diversion section, and is located between the second diversion section and the chip in the first direction, and is used to limit the flow direction of the liquid reagent flowing out of the second diversion section, and the first direction is the length direction of the first scraper.

2. The liquid scraping device according to claim 1, characterized in that, the first main body part forms a cavity and is provided with an air outlet and an air inlet, the air outlet and the air inlet are communicated with the cavity, and the air outlet faces the chip; the liquid scraping device further includes a air supply mechanism, the air supply mechanism is communicated with the air inlet, and is used to blow air towards the chip through the air inlet, the cavity, and the air outlet.

3. The liquid scraping device according to claim 2, characterized in that, the liquid scraping device further includes a second scraper; the second scraper includes a second main body part and a second liquid scraping part, the second liquid scraping part faces the liquid supply component and protrudes from the second main body part, and the second main body part is connected to the first main body part of the first scraper; when the driving mechanism drives the first scraper to move, at least one of the first liquid scraping part and the second liquid scraping part is used to scrape off the liquid reagent on the liquid supply component.

4. The liquid scraping device according to claim 3, characterized in that, the second main body part and the first main body part together enclose the air outlet.

5. The liquid scraping device according to claim 1, characterized in that, the driving mechanism includes a power unit, a mounting frame and an adjusting frame; the mounting frame is connected to the power unit; the adjusting frame is connected to the first scraper, the adjusting frame is provided with a first adjusting groove, the adjusting frame is connected to the mounting frame through the first adjusting groove, and the first adjusting groove is used to adjust the mounting height of the adjusting frame and the first scraper; the power unit is used to drive the mounting frame, the adjusting frame and the first scraper to move.

6. A cleaning mechanism for a chip, characterized in that, the cleaning mechanism includes a waste liquid recovery device, a liquid supply component and the liquid scraping device according to any one of claims 1-5; The liquid supply component is used to add liquid reagents to the chip; The first liquid scraping part of the liquid scraping device is used to scrape off the residual liquid reagents on the liquid supply component; The waste liquid recovery device is used to carry the chip and recover the liquid reagents scraped off by the first scraper of the liquid scraping device.

7. The cleaning mechanism of the chip according to claim 6, characterized in that the waste liquid recovery device includes a main body and a liquid return cover; the main body is provided with a waste liquid tank and a liquid discharge channel, and the liquid discharge channel is communicated with the waste liquid tank for discharging the liquid reagents in the waste liquid tank; the liquid return cover is arranged in the waste liquid tank and together with the corresponding part of the waste liquid tank forms a collection chamber, and an opening is provided at the circumferential edge of the liquid return cover, and the opening is communicated with the collection chamber for collecting waste liquid.

8. The cleaning mechanism of the chip according to claim 7, characterized in that the liquid supply component includes a liquid supply swing rod, a liquid distribution plate and a driving component; the liquid distribution plate is connected to the liquid supply swing rod, and the liquid distribution plate is provided with a liquid distribution groove and a liquid outlet hole; the driving component is connected to the liquid supply swing rod and is used to drive the liquid supply swing rod and the liquid distribution plate to move so that the liquid outlet hole moves above the chip.

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