A high flow diaphragm valve for semiconductor manufacturing

Abstract

The present invention discloses a large flow diaphragm valve for semiconductor manufacturing, which relates to the technical field of high-purity gas valves for semiconductor manufacturing, and solves the problem of small flow coefficient of diaphragm valves. The diaphragm valve includes a valve body, a diaphragm, a valve seat assembly, a valve stem, a valve sleeve and a handle. The valve body has an inlet flow channel and an outlet flow channel. The diaphragm and the valve body surround a receiving cavity. The valve stem is fixedly connected to the valve seat assembly. The valve stem includes a valve stem body and a valve stem convex portion. The valve sleeve is sleeved on the valve stem body and slides relative to the valve stem body. The handle is sleeved on the outer periphery of the valve sleeve and rotates synchronously with the valve sleeve in the circumferential direction. When the handle rotates, the valve sleeve rotates around the axis of the valve stem body and approaches or moves away from the inlet flow channel, driving the valve stem convex portion to approach or move away from the inlet flow channel, and the valve stem is used to drive the valve seat assembly to abut or separate from the inner wall of the valve body, and the valve seat assembly is used to close or open the outlet of the inlet flow channel. The diaphragm valve of the present invention is used to increase the flow coefficient of the diaphragm valve and improve the outlet flow of the diaphragm valve.

Description

Technical Field

[0001] The present invention relates to the technical field of high-purity gas valves for semiconductor manufacturing, and in particular to a diaphragm valve. Background Art

[0002] Diaphragm valve is a special type of shut-off valve. It is used in a variety of working media, especially in situations containing suspended particles or chemically corrosive media, because of its simple structure, low fluid resistance and good sealing performance. For example, diaphragm valves can be used in many semiconductor process supporting equipment such as crystal growth, epitaxy, oxidation, diffusion, CVD, etc., and can also be used in supporting equipment such as ultra-high purity gas and low-concentration standard gas and mixed gas preparation.

[0003] However, the flow coefficient of the existing diaphragm valve is small, and the outlet flow is small. When the existing diaphragm valve is switched to the open state, the diaphragm head needs to be driven by the handle to rotate and squeeze the diaphragm. Under the action of friction, the diaphragm head will drive the diaphragm to rotate, thereby deforming the diaphragm, causing the surface roughness of the diaphragm to increase, increasing the possibility of leakage and affecting the service life of the diaphragm. Moreover, when the diaphragm is deformed, it may rub against other components on the side of the diaphragm facing the outlet flow channel, etc., increasing the particulate matter entering the airflow and polluting the gas flowing through the diaphragm valve. Summary of the invention

[0004] The object of the present invention is to provide a large flow diaphragm valve for semiconductor manufacturing, which is used to increase the flow coefficient of the diaphragm valve and improve the outlet flow of the diaphragm valve.

[0005] In order to achieve the above-mentioned purpose, the present invention provides a large-flow diaphragm valve for semiconductor manufacturing, including a valve body, a diaphragm, a valve seat assembly, a valve stem, a valve sleeve and a handle. The valve body has an inlet flow channel and an outlet flow channel. The diaphragm is sealed and connected to the valve body, and the diaphragm and the valve body surround a receiving chamber. When the diaphragm valve is in an open state, the inlet flow channel and the outlet flow channel are both connected to the receiving chamber. The valve seat assembly is arranged in the receiving chamber. The valve stem is fixedly connected to the valve seat assembly, and the diaphragm seal is arranged between the valve stem and the valve seat assembly. The valve stem includes a valve stem body and a valve stem protrusion located on the circumferential side of one end of the valve stem body facing the valve seat assembly. The valve sleeve is sleeved on the valve stem body and slides relative to the valve stem body. The handle is sleeved on the outer periphery of the valve sleeve and rotates synchronously with the valve sleeve in the circumferential direction. When the handle is rotated, the valve sleeve rotates around the axis of the valve stem body and moves closer to or away from the inlet flow channel, driving the convex part of the valve stem to move closer to or away from the inlet flow channel; the valve stem is used to drive the valve seat assembly to abut or separate from the inner wall of the valve body, and the valve seat assembly is used to close or open the outlet of the inlet flow channel or the inlet of the outlet flow channel.

[0006] Compared with the prior art, the present invention provides a large flow diaphragm valve for semiconductor manufacturing. By turning the handle, the valve sleeve is driven to move downward, and then a downward force is applied to the convex part of the valve stem, so that the valve stem moves downward, driving the valve seat assembly fixedly connected to the valve stem to abut against the inner wall of the valve body, thereby blocking the outlet of the inlet flow channel or the inlet of the outlet flow channel. That is, the outlet of the inlet flow channel or the inlet of the outlet flow channel is closed to block the airflow, so that the diaphragm valve is in a closed state. Of course, the valve stem can also be moved upward to separate the valve seat assembly from the inner wall of the valve body, thereby opening the outlet of the inlet flow channel or the inlet of the outlet flow channel, and opening the channel between the outlet of the inlet flow channel and the inlet of the outlet flow channel, so that the diaphragm valve is in an open state.

[0007] By adjusting the way the valve seat assembly abuts or separates from the inner wall of the valve body, the distance between the valve seat assembly and the inner wall of the valve body can be adjusted to ensure a larger gas flow channel, reduce the resistance to gas flow in the diaphragm valve, and reduce the pressure loss when the gas flows through the valve, thereby improving the flow coefficient. Moreover, after the valve seat assembly is separated from the valve body, the gas can first flow into the accommodating cavity in all directions along the gap between the valve seat assembly and the valve body, and then flow through the accommodating cavity to the outlet gas channel. Compared with the prior art, the airflow directly hits the diaphragm, which can further reduce the pressure loss when the gas flows through the valve and improve the flow coefficient. This can then increase the outlet flow of the diaphragm valve.

[0008] In addition, the valve sleeve and the valve stem body slide relative to each other. When the handle is turned, the valve sleeve rotates around the axis of the valve stem body, that is, the valve sleeve does not drive the valve stem to rotate together. The diaphragm and the valve stem located between the valve stem and the valve seat assembly will not rotate relative to each other, ensuring that the valve stem and the pressed diaphragm do not produce rotational friction, and the diaphragm will not be rotated and deformed, so as to ensure that the surface roughness of the diaphragm is always good, and the reliability and life are improved. It is not easy to generate particulate matter, avoiding contamination of the gas flowing through the diaphragm valve.

[0009] In some possible embodiments, the valve seat assembly includes a valve seat and a sealing ring. The valve seat is fixedly connected to the valve stem. Exemplarily, the valve stem and the valve seat assembly are threadedly fastened. Alternatively, the valve stem and the valve seat assembly can be welded. The sealing ring is fixedly arranged at one end of the valve seat away from the valve stem, and when the valve seat assembly closes the outlet of the inlet flow channel or the inlet of the outlet flow channel, the sealing ring is used to seal the valve seat and the inner wall of the valve body.

[0010] In some possible embodiments, the outlet of the inlet flow channel is located at the first inner wall of the valve body, the inlet of the outlet flow channel is located at the second inner wall of the valve body, and the first inner wall intersects with the second inner wall. The angle formed by the center line of the inlet flow channel and the center line of the outlet flow channel, that is, the angle between the inlet flow channel and the outlet flow channel is α; wherein: 0<α≤90°. Exemplarily, the angle α between the inlet flow channel and the outlet flow channel can be 5°, 10°, 20°, 30°, 40°, 44°, 50°, 60°, 70°, 80°, 90°, etc. Preferably, the angle α between the inlet flow channel and the outlet flow channel can be 44°. Angle α greater than 0° is conducive to the fluidity of the gas, that is, the higher the flow coefficient of the diaphragm valve.

[0011] Alternatively, in some other possible implementations, the outlet of the inlet flow channel and the inlet of the outlet flow channel are both located on the first inner wall of the valve body; the angle between the inlet flow channel and the outlet flow channel is α, where: α=0°, that is, the inlet flow channel is parallel to the outlet flow channel. The inlet flow channel and the outlet flow channel extend in the same direction, which can reduce the size of the valve body.

[0012] In some possible embodiments, the valve stem includes a valve stem body and a valve stem protrusion located on the circumferential side of one end of the valve stem body facing the valve seat. The diaphragm valve also includes a nut and a lock nut. The nut is sleeved on the outer periphery of the valve sleeve and is threadedly connected to the valve sleeve; the nut abuts against the valve stem protrusion. The lock nut is fixedly connected to the valve body, and a first through hole is provided in the lock nut that penetrates the lock nut along the axial direction of the valve stem. The inner wall surface of the first through hole cooperates with the outer wall of the nut. The first through hole is used to limit the rotation of the nut, and the nut and the lock nut are slidably connected along the axis of the first through hole.

[0013] In some possible implementations, the diaphragm valve further includes a gasket, which is disposed between the nut and the protruding portion of the valve stem, and the nut abuts against the protruding portion of the valve stem through the gasket.

[0014] In some possible embodiments, the valve stem includes a valve stem body and a valve stem protrusion located on the circumferential side of one end of the valve stem body facing the valve seat. The diaphragm valve also includes a turntable, a pressure block, a connecting rod and a lock nut. The valve sleeve is sleeved on the valve stem body. The turntable is located on the side of the valve sleeve facing the diaphragm and is fixedly connected to the valve sleeve. A plurality of first ball grooves are provided on the side of the turntable facing the diaphragm. The pressure block is located on the side of the turntable facing the diaphragm, and a plurality of second ball grooves are provided on the side of the pressure block facing the turntable. One end of the connecting rod has a first sphere, each of which is rotatably arranged in a first ball groove, and the other end of the connecting rod has a second sphere, each of which is rotatably arranged in a second ball groove. The lock nut is fixedly connected to the valve body, and a first through hole is provided in the lock nut that penetrates the lock nut along the axial direction of the valve stem, and the inner wall surface of the first through hole cooperates with the outer wall of the pressure block, and the first through hole is used to limit the rotation of the pressure block, and the pressure block and the lock nut are slidably connected along the axis of the first through hole.

[0015] In some possible embodiments, the valve stem includes a valve stem body and a valve stem protrusion located at one end of the valve stem body facing the valve seat. The diaphragm valve also includes a gasket and a lubricating layer. The valve sleeve is sleeved on the valve stem body. The gasket is arranged between the valve sleeve and the valve stem protrusion, and the gasket abuts against the valve stem protrusion. The lubricating layer is arranged between the valve sleeve and the gasket.

[0016] In some possible implementations, a limit groove is provided around the end of the valve stem away from the diaphragm. The diaphragm valve also includes a limiter, one end of which is located in the limit groove and the other end protrudes from the valve stem; the limiter abuts against the end of the valve sleeve away from the diaphragm.

[0017] In some possible embodiments, a groove is provided on the handle, and the diaphragm valve is further provided with a display plate and a handle cover. The display plate is provided in the groove. Exemplarily, the display plate is fixedly connected to the valve stem by screws. Alternatively, the display plate is bonded to the valve stem. The display plate has a scale showing the flow rate of the diaphragm valve. The handle cover is provided at the open end of the groove and is fixedly connected to the handle. An observation hole is provided on the handle cover, and the observation hole is used to expose a part of the scale, and different flow rates are displayed as the handle is rotated.

[0018] In some possible implementations, the diaphragm valve further includes a diaphragm pressing block, which is located on a side of the diaphragm away from the valve seat assembly, and is connected to the valve body and abuts against the diaphragm to ensure sealing between the diaphragm and the valve body.

[0019] In some possible implementations, the valve body further has at least one clearing flow channel, and the clearing flow channel is communicated with the accommodating chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0021] Figure 1 A cross-sectional view of a diaphragm valve provided by an embodiment of the present invention;

[0022] Figure 2 for Figure 1 An exploded view of a diaphragm valve is shown;

[0023] Figure 3 for Figure 1 The schematic diagram of the structure of the diaphragm valve shown in FIG. 1 is a schematic diagram of the structure of the diaphragm valve after the lock nut and the valve body are removed;

[0024] Figure 4 A cross-sectional view of another diaphragm valve provided by an embodiment of the present invention;

[0025] Figure 5 for Figure 4 An exploded view of a diaphragm valve is shown;

[0026] Figure 6 for Figure 4 The schematic diagram of the structure of the diaphragm valve shown in FIG. 1 is a schematic diagram of the structure of the diaphragm valve after the lock nut and the valve body are removed;

[0027] Figure 7 for Figure 4 The schematic diagram of the structure of the diaphragm valve after the rotary plate, the pressure block and the connecting rod are combined;

[0028] Figure 8 for Figure 4 A cross-sectional view of the assembly of a rotary disc, a pressure block and a connecting rod in a diaphragm valve shown;

[0029] Fig. 9 A cross-sectional view of another diaphragm valve provided by an embodiment of the present invention;

[0030] Fig.10 A top view of another diaphragm valve provided in an embodiment of the present invention.

[0031] Reference numerals:

[0032] 1-valve body; 101-inlet flow channel; 102-outlet flow channel; 103-first inner wall; 104-second inner wall; 105-clearing flow channel; 2-diaphragm; 3-valve seat assembly; 31-valve seat; 32-sealing ring; 4-valve stem; 41-valve stem body; 411-limiting groove; 42-valve stem convex part; 5-accommodating cavity; 6-inlet joint; 7-outlet joint; 8-valve sleeve; 9-lock nut; 91-first through hole; 10- Nut; 11-handle; 111-groove; 12-limiting piece; 13-gasket; 14-turntable; 141-first ball groove; 15-pressure block; 151-second ball groove; 16-connecting rod; 161-first sphere; 162-second sphere; 17-lubricating layer; 18-diaphragm pressure block; 19-display plate; 191-scale; 20-handle cover; 201-observation hole; 21-pan head screw; 22-flat end locking screw. DETAILED DESCRIPTION

[0033] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0034] It should be noted that when an element is referred to as being "fixed on" or "set on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0035] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0036] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0037] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the term "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0038] Diaphragm valves can be used in integrated circuit manufacturing, optoelectronic device manufacturing, semiconductor material technology, and ultra-high purity gas analysis. They are particularly suitable for the main valve of the integrated gas circuit or the gas pipeline that requires a large flow of gas. The existing diaphragm valve currently covers or opens the inlet flow channel by deforming the diaphragm. After the airflow impacts the diaphragm, only the airflow flowing toward the side where the outlet flow channel is located has a small loss. When the airflow facing away from the location of the outlet flow channel impacts the diaphragm, the loss is large. This makes the flow coefficient of the existing diaphragm valve small, and its outlet flow is small without changing its size. In addition, in the prior art, the diaphragm head is driven to rotate and squeeze the diaphragm by the handle. Under the action of friction, the diaphragm head will drive the diaphragm to rotate, thereby making the diaphragm, causing the surface roughness of the diaphragm to increase, increasing the possibility of leakage, and affecting the service life of the diaphragm. Moreover, when the diaphragm is deformed, it may rub against other components located on the side of the diaphragm facing the outlet flow channel, etc., increasing the particulate matter entering the airflow and polluting the gas flowing through the diaphragm valve.

[0039] In order to solve the above problems, Figure 1As shown, a large flow diaphragm valve for semiconductor manufacturing provided by an embodiment of the present invention includes a valve body 1, a diaphragm 2, a valve seat assembly 3 and a valve stem 4. The valve body 1 has an inlet flow channel 101 and an outlet flow channel 102. The diaphragm 2 is sealed and connected to the valve body 1, and the diaphragm 2 and the valve body 1 surround a receiving chamber 5. When the diaphragm valve is in an open state, the inlet flow channel 101 and the outlet flow channel 102 are both connected to the receiving chamber 5. The valve seat assembly 3 is arranged in the receiving chamber 5. The valve stem 4 is fixedly connected to the valve seat assembly 3, and the diaphragm 2 is sealed and arranged between the valve stem 4 and the valve seat assembly 3. The valve stem 4 includes a valve stem body 41 and a valve stem protrusion 42 located on the circumferential side of one end of the valve stem body 41 facing the valve seat assembly 3. The valve sleeve 8 is sleeved on the valve stem body 41 and slides relative to the valve stem body 41. The handle 11 is sleeved on the outer periphery of the valve sleeve 8 and rotates synchronously with the valve sleeve 8 in the circumferential direction. When the handle 11 rotates, the valve sleeve 8 rotates around the axis of the valve stem body 41 and moves closer to or away from the intake air duct 101, driving the valve stem protrusion 42 to move closer to or away from the intake air duct 101; the valve stem 4 is used to drive the valve seat assembly 3 to abut or separate from the inner wall of the valve body 1, and the valve seat assembly 3 is used to close or open the outlet of the intake air duct 101.

[0040] It should be noted that the above embodiments Figure 1 The figure shows that the valve seat assembly 3 closes or opens the outlet of the inlet flow channel 101. In other embodiments of the present application, the valve seat assembly 3 can also be used to close or open the inlet of the outlet flow channel 102. The present application embodiment is not specifically limited.

[0041] In the opening and closing process of the large flow diaphragm valve for semiconductor manufacturing provided by the embodiment of the present invention, by rotating the handle 11, the valve sleeve 8 is driven to move downward, and then a downward force is applied to the valve stem protrusion 42, so that the valve stem 4 moves downward, so that the valve seat assembly 3 fixedly connected to the valve stem 4 abuts against the inner wall of the valve body 1, and then blocks the outlet of the inlet flow channel 101 or the inlet of the outlet flow channel 102. That is, the outlet of the inlet flow channel 101 or the inlet of the outlet flow channel 102 is closed to block the airflow, so that the diaphragm valve is in a closed state. Of course, the valve stem 4 can also be moved upward to separate the valve seat assembly 3 from the inner wall of the valve body 1, and then the outlet of the inlet flow channel 101 or the inlet of the outlet flow channel 102 is opened, and the channel between the outlet of the inlet flow channel 101 and the inlet of the outlet flow channel 102 is opened, so that the diaphragm valve is in an open state.

[0042] Compared with the prior art, the present invention provides a large flow diaphragm valve for semiconductor manufacturing. By adjusting the way in which the valve seat assembly 3 abuts or separates from the inner wall of the valve body 1, the distance between the valve seat assembly 3 and the inner wall of the valve body 1 can be adjusted to ensure that the gas flow channel is larger, reduce the resistance of the gas flowing in the diaphragm valve, and the smaller the pressure loss when the gas flows through the valve, the higher the flow coefficient. Moreover, after the valve seat assembly 3 is separated from the valve body 1, the gas can first flow into the accommodating chamber 5 in all directions along the gap between the valve seat assembly 3 and the valve body 1, and then flow to the outlet flow channel 102 through the accommodating chamber 5. Compared with the prior art, the airflow directly hits the diaphragm 2, which can further reduce the pressure loss when the gas flows through the valve, thereby improving the flow coefficient. In addition, when the diaphragm valve size is the same, the outlet flow of the diaphragm valve is increased.

[0043] The valve sleeve 8 slides relative to the valve stem body 41. When the handle 11 rotates, the valve sleeve 8 rotates around the axis of the valve stem body 41, that is, the valve sleeve 8 does not drive the valve stem 4 to rotate together. The diaphragm 2 and the valve stem 4 located between the valve stem 4 and the valve seat assembly 3 will not rotate relative to each other, ensuring that the valve stem 4 and the pressed diaphragm 2 do not generate rotational friction, and the surface roughness of the diaphragm 2 is always good, and the reliability and life are improved. It is not easy to generate particulate matter, avoiding pollution of the gas flowing through the diaphragm valve.

[0044] In addition, the diaphragm 2 is sealingly arranged between the valve stem 4 and the valve seat assembly 3, and the diaphragm 2 is sealingly connected to the valve body 1, thereby ensuring that the accommodating cavity 5 is separated from the side where the valve stem 4 is located, ensuring the sealing effect of this part, avoiding gas leakage from the side where the valve stem 4 is located, and ensuring the air tightness of the diaphragm valve.

[0045] For example, the valve stem 4 and the valve seat assembly 3 may be fixedly connected by a flat-end locking screw 22. Alternatively, the valve stem 4 and the valve seat assembly 3 may be welded. This embodiment of the present application is not specifically limited.

[0046] As a possible way to achieve this, Figure 1 As shown, in the above-mentioned diaphragm valve, the valve seat assembly 3 includes a valve seat 31 and a sealing ring 32. The valve seat 31 is fixedly connected to the valve stem 4. The sealing ring 32 is fixedly arranged at the end of the valve seat 31 away from the valve stem 4. When the valve seat assembly 3 closes the outlet of the inlet flow channel 101 or the inlet of the outlet flow channel 102, the sealing ring 32 is used to seal the valve seat 31 and the inner wall of the valve body 1. The sealing ring 32 ensures the sealing performance when the valve seat assembly 3 abuts against the inner wall of the valve body 1, thereby preventing the diaphragm valve from leaking when it is closed.

[0047] For example, there is a gap between the circumference of the valve seat 31 and the inner wall of the sealed cavity. In this way, the gas flowing from the outlet of the inlet flow channel 101 to the surroundings can flow to the inlet of the outlet flow channel 102 through the gap between the circumference of the valve seat 31 and the inner wall of the sealed cavity, thereby reducing the air flow resistance.

[0048] In some embodiments, Figure 1 As shown, in the above-mentioned diaphragm valve, the outlet of the inlet flow channel 101 is located at the first inner wall 103 of the valve body 1, and the inlet of the outlet flow channel 102 is located at the second inner wall 104 of the valve body 1, and the first inner wall 103 intersects with the second inner wall 104. The angle formed by the center line of the inlet flow channel 101 and the center line of the outlet flow channel 102, that is, the angle between the inlet flow channel 101 and the outlet flow channel 102 is α; wherein: 0<α≤90°. Exemplarily, the angle α between the inlet flow channel 101 and the outlet flow channel 102 can be 5°, 10°, 20°, 30°, 40°, 44°, 50°, 60°, 70°, 80°, 90°, etc. Preferably, as Figure 1 As shown, the included angle α between the inlet channel 101 and the outlet channel 102 is 44°. When the included angle between the inlet channel 101 and the outlet channel 102 is 0, after the gas flows out from the outlet of the inlet channel 101, the airflow direction needs to be turned 180° before it can flow into the outlet channel 102. In the diaphragm valve provided in the embodiment of the present application, the outlet of the inlet flow channel 101 is located on the first inner wall 103 of the valve body 1, and the inlet of the outlet flow channel 102 is located on the second inner wall 104 of the valve body 1. The first inner wall 103 intersects with the second inner wall 104, and the angle α between the inlet flow channel 101 and the outlet flow channel 102 is greater than 0. After the gas flows into the accommodating chamber 5 from the outlet of the inlet flow channel 101 located on the first inner wall 103, the direction of the gas flow required to turn is less than 180° during the process of flowing from the gap between the valve seat assembly 3 and the first inner wall 103 of the valve body 1 to the inlet of the outlet flow channel 102. Therefore, the gas flow pressure loss is small, further improving the flow coefficient of the diaphragm valve and improving the outlet flow of the diaphragm valve. In addition, the angle α between the inlet flow channel 101 and the outlet flow channel 102 is less than or equal to 90°, which prevents the outlet flow channel 102 from extending to the side where the valve stem 4 is located, making the height dimension required for the valve body 1 larger, which is not conducive to product miniaturization.

[0049] Alternatively, in other embodiments, the outlet of the inlet flow channel 101 and the inlet of the outlet flow channel 102 are both located on the first inner wall 103 of the valve body 1; the angle between the inlet flow channel 101 and the outlet flow channel 102 is α, where: α=0°, that is, the inlet flow channel 101 is parallel to the outlet flow channel 102. The inlet flow channel 101 and the outlet flow channel 102 extend in the same direction, which can reduce the size of the valve body 1.

[0050] As a possible way to achieve this, Figure 1 As shown, the diaphragm valve may further include an air inlet connector 6 and an air outlet connector 7. The air inlet connector 6 is communicated with the air inlet flow channel 101 and is fixedly connected to the valve body 1. The air outlet connector 7 is communicated with the air outlet flow channel 102 and is fixedly connected to the valve body 1. The diaphragm valve may be connected to other devices via the air inlet connector 6 and the air outlet connector 7.

[0051] In some embodiments, Figure 1 , Figure 2 and Figure 3 As shown, in the above-mentioned diaphragm valve, the diaphragm valve also includes a lock nut 9 and a nut 10. The nut 10 is sleeved on the outer periphery of the valve sleeve 8 and is threadedly connected to the valve sleeve 8; the nut 10 abuts against the valve stem protrusion 42. The lock nut 9 is fixedly connected to the valve body 1, and a first through hole 91 is provided in the lock nut 9 that penetrates the lock nut 9 along the axial direction of the valve stem 4. The inner wall surface of the first through hole 91 cooperates with the outer wall of the nut 10. The first through hole 91 is used to limit the rotation of the nut 10, and the nut 10 and the lock nut 9 are slidably connected along the axis of the first through hole 91. Exemplarily, the nut 10 can be a hexagonal nut, and the first through hole 91 is a hexagonal hole that cooperates with the hexagonal nut. Alternatively, the nut 10 can be an elliptical nut, and the first through hole 91 is an elliptical hole that cooperates with the elliptical nut. Of course, the nut 10 can also be other shapes, such as: square, triangle, pentagon, etc., and the first through hole 91 can limit the rotation of the nut 10. The handle 11 is sleeved on the outer circumference of the valve sleeve 8, and the handle 11 rotates synchronously with the valve sleeve 8 in the circumferential direction. Exemplarily, the handle 11 and the valve sleeve 8 can be fixed by screws.

[0052] Rotate the handle 11 to rotate the valve sleeve 8. Due to the restriction of the first through hole 91 on the rotation of the nut 10, the nut 10 sleeved on the outer periphery of the valve sleeve 8 and threadedly connected to the valve sleeve 8 cannot rotate with the valve sleeve 8. Under the action of the threaded connection, the nut 10 moves downward with the rotation of the valve sleeve 8, and drives the valve stem 4 to move downward, driving the valve seat 31 and the sealing ring 32 to press the inner wall of the valve body 1 to cut off the air flow channel. In this way, the nut 10 that is screwed down only generates axial downward pressure on the valve stem protrusion 42 of the valve stem 4, and does not generate rotational force. The diaphragm 2 that is pressed down by the valve stem 4 does not generate rotational friction, and the surface roughness of the diaphragm 2 is always good, and the reliability and life are improved. It is not easy to generate particulate matter, avoiding contamination of the gas flowing through the diaphragm valve.

[0053] Further, in some embodiments, the upper portion of the first through hole 91 is circular, used to guide the circular outer circumference of the valve sleeve 8, and the lower portion of the first through hole 91 is a shape that matches the outer portion of the nut 10. The aperture of the lower portion of the first through hole 91 is larger than the aperture of the upper portion. In this way, during assembly, the nut 10 can be inserted into the first through hole 91 from the lower portion of the first through hole 9 from bottom to top.

[0054] Furthermore, if Figure 1 and Figure 2As shown, a limiting groove 411 is provided around the end of the valve stem body 41 away from the diaphragm 2. The diaphragm valve also includes a limiting member 12, one end of which is located in the limiting groove 411, and the other end protrudes from the side of the valve stem 4; the limiting member 12 abuts against the end of the valve sleeve 8 away from the diaphragm 2. When the handle 11 is rotated in the opposite direction to rotate the valve sleeve 8 in the opposite direction, the valve sleeve 8 moves upward, and an upward force is generated on the valve stem 4 through the limiting member 12, so that the valve stem 4 moves upward, thereby driving the valve seat 31 and the sealing ring 32 to move upward, and opening the channel between the outlet of the inlet flow channel 101 and the inlet of the outlet flow channel 102.

[0055] Furthermore, if Figure 1 and Figure 2 As shown, the diaphragm valve further includes a gasket 13. The gasket 13 is disposed between the nut 10 and the valve stem protrusion 42, and the nut 10 abuts against the valve stem protrusion 42 through the gasket 13. Through the gasket 13, when the outer diameter of the valve stem protrusion 42 is smaller than the inner diameter of the nut 10, the downward force generated by the nut 10 can also be transferred to the valve stem protrusion 42.

[0056] In other embodiments, Figure 4 , Figure 5 and Figure 6 As shown, in the above-mentioned diaphragm valve, the diaphragm valve further includes a rotating disk 14, a pressure block 15, a plurality of connecting rods 16, and a lock nut 9. The rotating disk 14 is located on the side of the valve sleeve 8 facing the diaphragm 2 and is fixedly connected to the valve sleeve 8. Figure 7 and Figure 8 As shown, the rotating disk 14 faces the diaphragm 2 (as shown in FIG. Figure 4 A plurality of first ball grooves 141 are provided on one side of the rotary disk 14 facing the diaphragm 2. The pressing block 15 is located on the side of the rotary disk 14 facing the diaphragm 2. A plurality of second ball grooves 151 are provided on the side of the pressing block 15 facing the rotary disk 14. One end of each connecting rod 16 has a first sphere 161, and each first sphere 161 can be rotatably disposed in a first ball groove 141. The other end of each connecting rod 16 has a second sphere 162, and each second sphere 162 can be rotatably disposed in a second ball groove 151. The lock nut 9 is fixedly connected to the valve body 1. A first through hole 91 is provided in the lock nut 9 and passes through the lock nut 9 along the axial direction of the valve stem 4. The inner wall surface of the first through hole 91 cooperates with the outer wall of the pressing block 15. The first through hole 91 is used to limit the rotation of the pressing block 15. The pressing block 15 and the lock nut 9 are slidably connected along the axis of the first through hole 91. Exemplarily, the pressing block 15 can be a polygonal prism, and the first through hole 91 is a polygonal hole that cooperates with the polygonal prism. For example, the pressing block 15 may be a hexagonal prism, and the first through hole 91 is a hexagonal hole that matches the hexagonal prism. Alternatively, the pressing block 15 may be an ellipse, and the first through hole 91 is an ellipse that matches the pressing block 15. Of course, the pressing block 15 may also be other shapes, as long as the first through hole 91 can limit the rotation of the pressing block 15. The handle 11 is sleeved on the outer periphery of the valve sleeve 8, and the handle 11 rotates synchronously with the valve sleeve 8 in the circumferential direction.

[0057] The handle 11 is rotated to rotate the valve sleeve 8, thereby driving the rotating disk 14 to rotate. Since the first through hole 91 restricts the rotation of the pressing block 15, the pressing block 15 cannot rotate with the valve sleeve 8. At this time, the rotating disk 14 and the pressing block 15 rotate relative to each other, thereby causing the connecting rod 16 between the rotating disk 14 and the pressing block 15 to rotate. Figure 7 The tilted state shown is as follows Figure 8 The vertical state shown in the figure moves, and the distance between the rotating disk 14 and the pressing block 15 increases. Then the pressing block 15 moves downward, and drives the valve stem 4 to move downward, driving the valve seat 31 and the sealing ring 32 to press the inner wall of the valve body 1 to cut off the air flow channel. In this way, the pressing block 15 only generates axial downward pressure on the valve stem protrusion 42 of the valve stem 4, and does not generate rotational force. The diaphragm 2 pressed down by the valve stem 4 does not generate rotational friction, and the surface roughness of the diaphragm 2 is always good, and the reliability and life are improved. It is not easy to generate particulate matter, avoiding pollution of the gas flowing through the diaphragm valve.

[0058] Exemplarily, one end of the valve stem 4 may pass through the pressure block 15, the rotating disk 14 and the valve sleeve 8. The structural stability of the valve stem 4, the pressure block 15, the rotating disk 14 and the valve sleeve 8 is ensured.

[0059] Furthermore, if Figure 4 and Figure 5 As shown, a limiting groove 411 is provided around the end of the valve stem 4 away from the diaphragm 2. The diaphragm valve also includes a limiting member 12, one end of which is located in the limiting groove 411, and the other end protrudes from the side of the valve stem 4; the limiting member 12 abuts against the end of the valve sleeve 8 away from the diaphragm 2. When the handle 11 is rotated in the opposite direction to rotate the valve sleeve 8 in the opposite direction, the valve sleeve 8 moves upward, and an upward force is generated on the valve stem 4 through the limiting member 12, so that the valve stem 4 moves upward, thereby driving the valve seat 31 and the sealing ring 32 to move upward, and opening the channel between the outlet of the inlet flow channel 101 and the inlet of the outlet flow channel 102.

[0060] In some other embodiments, Fig. 9 As shown, in the above-mentioned diaphragm valve, the diaphragm valve further includes a gasket 13 and a lubricating layer 17. The gasket 13 is arranged between the valve sleeve 8 and the valve stem protrusion 42, and the gasket 13 abuts against the valve stem protrusion 42. The lubricating layer 17 is arranged between the valve sleeve 8 and the gasket 13. The handle 11 is sleeved on the outer periphery of the valve sleeve 8, and the handle 11 and the valve sleeve 8 rotate synchronously in the circumferential direction.

[0061] The lubricating layer 17 is arranged between the valve sleeve 8 and the gasket 13, which can reduce the friction between the valve sleeve 8 and the gasket 13. When the valve sleeve 8 rotates and moves downward, the valve sleeve 8 will not drive the gasket 13 to rotate due to the friction, and will not drive the valve stem 4 to rotate, thus protecting the diaphragm 2 pressed down by the valve stem 4 from generating rotational friction, and making the surface roughness of the diaphragm 2 always better, and improving reliability and life. It is not easy to generate particulate matter, avoiding contamination of the gas flowing through the diaphragm valve.

[0062] Furthermore, if Figure 1 , Figure 4 as well as Fig. 9 As shown, the outer peripheral side of the valve sleeve 8 is also threadedly connected to the lock nut 9. The lock nut 9 is fixedly connected to the valve body 1, and when the valve sleeve 8 rotates, the valve sleeve 8 moves toward or away from the valve body 1, thereby driving other components to move, so as to achieve the abutment or separation of the valve seat assembly 3 and the inner wall of the valve body 1.

[0063] The above implementation example Figure 1 , Figure 4 as well as Fig. 9 As shown, the example is to drive the valve stem 4 and the valve seat assembly 3 to move by manually rotating the handle 11. When the handle 11 is rotated to different angles, the distance between the valve seat assembly 3 and the inner wall of the valve body 1 can be adjusted, thereby not only controlling the opening or closing of the diaphragm valve, but also adjusting the size of the diaphragm valve opening to control the flow rate. In other embodiments of the present application, the movement of the valve stem 4 and the valve seat assembly 3 can also be controlled by electric means or the like. The embodiments of the present application are not specifically limited.

[0064] As a possible way to achieve this, Figure 1 As shown, in the above-mentioned diaphragm valve, the diaphragm valve further includes a diaphragm pressing block 18. The diaphragm pressing block 18 is located on the side of the diaphragm 2 away from the valve seat assembly 3, and the diaphragm pressing block 18 is connected to the valve body 1 and abuts against the diaphragm 2. The diaphragm pressing block 18 is used to support the diaphragm 2 to prevent the diaphragm 2 from being excessively deformed upward due to excessive air pressure in the valve, thereby causing damage to the diaphragm 2.

[0065] In some embodiments, Figure 1 As shown, in the above-mentioned diaphragm valve, a groove 111 is provided on the handle 11, and the diaphragm valve further includes a display panel 19 and a handle cover 20. The display panel 19 is disposed in the groove 111. The handle cover 20 is disposed at the open end of the groove 111 and is fixedly connected to the handle 11. Fig.10As shown, the display plate 19 has a scale 191 for displaying the flow rate of the diaphragm valve. The handle cover 20 is provided with an observation hole 201, and the observation hole 201 is used to expose a part of the scale 191. When the handle 11 rotates, the handle cover 20 is driven to rotate. At this time, the handle cover 20 and the display plate 19 will rotate relative to each other, so that the observation hole 201 exposes different parts of the scale 191, thereby indicating the opening degree of the diaphragm valve.

[0066] For example, the scale 191 may be a plurality of circles arranged from small to large on the display panel 19 to indicate the degree of opening of the diaphragm valve from small to large. Of course, the scale 191 may also be a scale line with a numerical value, and the size of the numerical value may indicate the size of the degree of opening of the diaphragm valve.

[0067] As a possible implementation method, the display plate 19 can be fixedly connected to the end of the valve stem 4 away from the diaphragm 2. For example, the display plate 19 is connected to the valve stem 4 by a pan head screw 21. The valve stem 4 does not rotate when it moves up and down. When the handle cover 20 rotates with the handle 11, the handle cover 20 and the display plate 19 rotate relatively, so that the observation hole 201 exposes different parts of the scale 191, thereby indicating the opening degree of the diaphragm valve.

[0068] As a possible way to achieve this, Fig.10 As shown, in the above-mentioned diaphragm valve, the valve body 1 further has at least one clearing flow channel 105 , and the clearing flow channel 105 is communicated with the accommodating chamber 5 .

[0069] For example, when waste gas or attached water vapor remains in the gas path, the outlet of the inlet flow channel 101 of the diaphragm valve is closed, and then high-purity nitrogen, rare gas or other gas required to flow in the gas path is introduced into the cleaning flow channel 105, and the gas passes through the inside of the valve body 1 and is discharged from the outlet flow channel 102 to achieve cleaning of the gas path.

[0070] As another example, Fig.10 As shown, there can be two cleaning channels 105. When waste gas remains in the valve body 1 or water vapor is attached to the valve body 1, high-purity nitrogen, rare gas or other gas required for the gas path can be introduced into one cleaning channel 105, and the gas passes through the inside of the valve body 1 and is discharged from the other cleaning channel 105 to achieve cleaning of the valve body 1.

[0071] In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in a suitable manner in any one or more embodiments or examples.

[0072] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A high flow diaphragm valve for semiconductor manufacturing, characterized in that: include: A valve body (1) having an inlet flow channel (101) and an outlet flow channel (102); The diaphragm (2) is sealed and connected to the valve body (1); the diaphragm (2) and the valve body (1) enclose a receiving chamber (5); when the diaphragm valve is in an open state, the inlet flow channel (101) and the outlet flow channel (102) are both in communication with the receiving chamber (5); A valve seat assembly (3) is arranged in the accommodating cavity (5); A valve stem (4) is fixedly connected to the valve seat assembly (3), and the diaphragm (2) is sealingly arranged between the valve stem (4) and the valve seat assembly (3); the valve stem (4) comprises a valve stem body (41) and a valve stem protrusion (42) located on the circumferential side of one end of the valve stem body (41) facing the valve seat assembly (3); A valve sleeve (8) is sleeved on the valve stem body (41) and slides relative to the valve stem body (41); A handle (11) is sleeved on the outer circumference of the valve sleeve (8) and rotates synchronously with the valve sleeve (8) in the circumferential direction; When the handle (11) is rotated, the valve sleeve (8) rotates around the axis of the valve stem body (41) and moves closer to or farther from the inlet flow channel (101), driving the valve stem protrusion (42) to move closer to or farther from the inlet flow channel (101); The valve stem (4) is used to drive the valve seat assembly (3) to abut against or separate from the inner wall of the valve body (1), and the valve seat assembly (3) is used to close or open the outlet of the inlet flow channel (101) or the inlet of the outlet flow channel (102); The diaphragm valve further comprises: A rotating disk (14) is located on a side of the valve sleeve (8) facing the diaphragm (2) and is fixedly connected to the valve sleeve (8); a plurality of first ball grooves (141) are formed on a side of the rotating disk (14) facing the diaphragm (2); A pressing block (15) is located on a side of the rotating disk (14) facing the diaphragm (2), and a plurality of second ball grooves (151) are formed on the side of the pressing block (15) facing the rotating disk (14); A plurality of connecting rods (16), each of the connecting rods (16) having a first sphere (161) at one end, each of the first spheres (161) being rotatably disposed in one of the first sphere grooves (141), and each of the connecting rods (16) having a second sphere (162) at the other end, each of the second spheres (162) being rotatably disposed in one of the second sphere grooves (151); A lock nut (9) is fixedly connected to the valve body (1), and a first through hole (91) is formed in the lock nut (9) and penetrates the lock nut (9) axially along the valve stem (4). The inner wall surface of the first through hole (91) cooperates with the outer wall of the pressure block (15). The first through hole (91) is used to limit the rotation of the pressure block (15), and the pressure block (15) and the lock nut (9) are slidably connected along the axis of the first through hole (91).

2. The large flow diaphragm valve for semiconductor manufacturing according to claim 1, characterized in that: The valve seat assembly (3) comprises: A valve seat (31) fixedly connected to the valve stem (4); A sealing ring (32) is fixedly arranged at one end of the valve seat (31) facing away from the valve stem (4), and when the valve seat assembly (3) closes the outlet of the inlet flow channel (101) or the inlet of the outlet flow channel (102), the sealing ring (32) is used to seal the valve seat (31) and the inner wall of the valve body (1).

3. The large flow diaphragm valve for semiconductor manufacturing according to claim 1, characterized in that: The outlet of the inlet flow channel (101) is located on the first inner wall (103) of the valve body (1), and the inlet of the outlet flow channel (102) is located on the second inner wall (104) of the valve body (1), and the first inner wall (103) and the second inner wall (104) intersect; the included angle between the inlet flow channel (101) and the outlet flow channel (102) is α, wherein: 0<α≤90°; Alternatively, the outlet of the inlet flow channel (101) and the inlet of the outlet flow channel (102) are both located on the first inner wall (103) of the valve body (1); the included angle between the inlet flow channel (101) and the outlet flow channel (102) is α, where α=0°.

4. The large flow diaphragm valve for semiconductor manufacturing according to claim 1, characterized in that: The diaphragm valve further comprises: A gasket (13) is arranged between the valve sleeve (8) and the valve stem protrusion (42), and the gasket (13) abuts against the valve stem protrusion (42); A lubricating layer (17) is provided between the valve sleeve (8) and the gasket (13).

5. The large flow diaphragm valve for semiconductor manufacturing according to claim 1, characterized in that: A limiting groove (411) is provided on the circumferential side of one end of the valve stem (4) facing away from the diaphragm (2); The diaphragm valve further comprises: A limiting member (12), one end of the limiting member (12) being located in the limiting groove (411) and the other end protruding from the circumference of the valve stem (4); the limiting member (12) abuts against an end of the valve sleeve (8) facing away from the diaphragm (2).

6. The large flow diaphragm valve for semiconductor manufacturing according to claim 1, characterized in that: The handle (11) is provided with a groove (111), and the diaphragm valve further comprises: A display plate (19) is disposed in the groove (111), and the display plate (19) has a scale (191) for displaying the flow rate of the diaphragm valve; A handle cover (20) is arranged at the open end of the groove (111) and is fixedly connected to the handle (11); an observation hole (201) is provided on the handle cover (20), and the observation hole (201) is used to expose a part of the scale (191).

7. The large flow diaphragm valve for semiconductor manufacturing according to claim 1, characterized in that: The valve body (1) has at least one clearing flow channel (105), and the clearing flow channel (105) is connected to the accommodating chamber (5).

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