A composite laser damage platform with multiple online monitoring functions

Abstract

This invention relates to the study of laser damage mechanisms and constructs a composite laser damage platform comprising an energy detector, a temperature sensor, and a high-speed camera. This platform enables real-time detection of laser energy and sample temperature, as well as the capture of shadow sequences depicting the sample damage process. The specific construction process of the platform is as follows: An optical path is designed, and optical components such as mirrors and focusing lenses are used to focus the lasers emitted by a continuous laser and a nanosecond laser onto the sample surface placed on a three-dimensional motion platform, ensuring that both laser beams are focused at the same point, achieving composite laser damage. A green laser emits a 532nm continuous laser beam, which passes through a beam expander and a mirror, penetrating the sample surface perpendicular to the continuous laser beam path. The collected laser information is then sent to the high-speed camera via an attenuator and camera lens. A beam splitter is added to the optical paths of the continuous laser and the nanosecond laser. The split laser beam is then directed to an energy probe for energy detection. A temperature sensor is connected to a temperature probe, which is positioned close to the sample to achieve real-time sample temperature detection. The delay control between the continuous laser, the nanosecond laser, and the high-speed camera in this platform is achieved through coordinated control using DG535 and DG645 sensors.

Description

Technical Field

[0001] This invention relates to the field of laser damage research, and particularly to the investigation of the mechanism of composite laser damage. Background Technology

[0002] Laser technology is one of the major inventions of the 20th century. In recent years, with the rapid development of laser technology, the global laser industry has developed rapidly. Due to the ultrafast interaction time characteristics and transient high-energy injection characteristics of lasers, as well as the ability to modulate laser interaction, lasers have made breakthrough progress in various fields, such as ultrafast single-lens 3D topographic mapping, ultrafast light fields, 3D direct photolithography to stabilize perovskite nanocrystal glass, welding of hard and brittle materials, and laser metal additive manufacturing. In manufacturing industries such as automobiles, electronics, aviation, aerospace, and biomedicine, these technologies have basically completed the upgrading of traditional processes and entered the era of "light processing". Today, although the rapid development of picosecond and femtosecond lasers has enabled them to demonstrate significant quality advantages in nano- and micro-manufacturing, their efficiency in processing high-hardness materials is low and equipment costs are high due to the limitation of ultrafast laser single-pulse energy, making it difficult to meet the needs of industrial applications. Nanosecond lasers are less expensive than ultrafast lasers, but their high peak power density can easily lead to plasma shielding, which limits the energy coupled with the material and makes it difficult to meet processing requirements. Millisecond laser pulses with large pulse energy have high material removal efficiency, but the large pulse energy leads to significant thermal effects, insufficient sputtering removal of molten material, and micropores are often accompanied by defects such as large aperture, large taper, and microcracks.

[0003] The peak power and pulse energy of a laser pulse play a crucial role in determining the quality and efficiency of laser processing. This means that neither short-pulse nor long-pulse lasers can simultaneously achieve both processing quality and efficiency. Current research indicates that composite laser processing technology, by focusing laser pulses with different peak powers and pulse energies onto the same point on the sample, can achieve high peak power and high pulse energy laser output. Because it possesses both the high energy of long-pulse lasers and the high peak power of short-pulse lasers, it is recommended as a reliable tool for high-quality, high-efficiency material processing. Currently, most domestic composite laser damage platforms are functionally limited and lack online monitoring methods, which is detrimental to the study of composite laser damage mechanisms. How to achieve multifunctionality in composite laser damage platforms is a new requirement for further improving composite laser processing technology.

[0004] This invention achieves multifunctionality in a composite laser damage platform by adding a high-speed camera, energy detector, and temperature sensor to a traditional composite laser damage optical path. A shadow imaging optical path is constructed using optical components. A green laser emits a 532nm continuous laser beam, which passes through a beam expander and a reflector, penetrating the sample surface perpendicular to the continuous laser path. The collected laser data is then fed into a high-speed camera via an attenuator and camera lens, enabling online monitoring of the sample damage process. A beam splitter is added to the optical paths of the continuous laser and the nanosecond laser to construct an energy detection optical path. The split laser beam is then fed into an energy probe for energy detection. A temperature sensor and a temperature probe form a temperature monitoring system to monitor the sample temperature in real time. Summary of the Invention

[0005] To address the aforementioned problems, this invention provides a composite laser damage platform with multiple online monitoring functions. By adding a shadow imaging optical path, an energy detector, and a temperature sensor to a traditional composite laser damage platform, this platform can not only perform composite laser damage but also achieve three online monitoring functions: shadow imaging, energy detection, and temperature monitoring. This solves the problem of the current composite laser damage platforms having limited functionality.

[0006] To achieve the above objectives, the present invention provides a composite laser damage platform with multiple online monitoring functions. The construction of this platform includes the following steps:

[0007] Using optical components such as mirrors and focusing lenses, a composite damage optical path is constructed according to the designed optical path. The red indicator light is turned on, and the angle of the mirror is adjusted to focus the indicator light of the continuous laser and the nanosecond laser onto the sample surface placed on the three-dimensional motion platform, ensuring that the continuous and nanosecond laser beams are focused at the same point to achieve laser composite damage.

[0008] Adjust the shadow imaging optical path to emit a 532nm continuous laser from the green laser. The laser beam passes through a beam expander and a reflector, perpendicular to the continuous laser path and through the sample surface. Then, the laser beam that has collected information is sent to a high-speed camera through optical components such as an attenuator and a camera lens. When adjusting the optical path, the optical path is collimated using an aperture.

[0009] A beam splitter is added to the optical path of continuous laser and nanosecond laser to direct the split laser beam into an energy probe. The energy is detected by an energy detector. A temperature sensor is connected to the temperature probe, and the temperature probe is brought close to the sample to achieve real-time temperature detection of the sample.

[0010] Finally, the DG535 and DG645 settings were debugged, and the DG535 and DG645 were used to coordinate the control of the delay between the continuous laser, nanosecond laser and high-speed camera on this platform.

[0011] Furthermore, the laser can be a millisecond laser or a femtosecond laser, in addition to continuous laser and nanosecond laser.

[0012] Furthermore, the continuous green light is a common information light source, and can also be replaced with other information light sources as needed.

[0013] Furthermore, the camera lens functions to focus the green light that has collected information onto the high-speed camera, and can also be replaced with an eyepiece to increase the magnification.

[0014] Furthermore, the purpose of the DG535 and DG645 collaborative control is to achieve delay control between the continuous laser, nanosecond laser, and high-speed camera, and it can also be replaced by other delay controllers.

[0015] In summary, compared with existing technical solutions, the above technical solutions of the present invention have the following main advantages:

[0016] In addition to achieving composite laser damage using continuous and nanosecond lasers, the composite laser damage platform can also achieve single continuous and single nanosecond laser damage through the control system, greatly improving convenience compared to traditional single laser damage platforms.

[0017] Compared to traditional composite laser damage platforms, the platform described in this invention adds a shadow imaging optical path, enabling the imaging of molten material sputtering, shock waves, and plasma phenomena during the damage process. The magnification of the camera lens (or eyepiece), as well as the shutter speed and delay time of the high-speed camera, can be adjusted according to the phenomenon to be studied. This function helps us study the dynamic process of composite damage.

[0018] The platform's online real-time monitoring function (energy detection and temperature sensing) enables real-time monitoring of laser energy and sample temperature. Based on the monitoring data, laser parameters can be adjusted promptly to achieve experimental results, significantly improving convenience compared to offline detection. Furthermore, the real-time monitoring function also serves as a degree of hazard warning.

[0019] This invention effectively realizes the multifunctionality of the composite laser damage platform, which can collect image, energy and temperature information while performing damage, and has significant technical advantages. Attached Figure Description

[0020] Appendix Figure 1 A diagram of the composite laser platform system with multiple online monitoring functions for the invention.

[0021] Explanation of reference numerals in the attached figures: 1-Control system; 2-Continuous laser; 3-Nanosecond laser; 4-Beam splitter; 5-Energy probe; 6-Energy detector; 7-Reflector; 8-Focusing lens; 9-Temperature sensor; 10-Temperature probe; 11-Green laser; 12-Beam expander; 13-Sample; 14-Three-dimensional motion platform; 15-Camera lens; 16-High-speed camera. Detailed Implementation

[0022] To make the technical problems, solutions, and points to be solved by this invention clearer, a detailed description will be provided below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the description of these embodiments is intended to aid in understanding the invention but does not constitute a limitation thereof. Furthermore, the technical features involved in the various embodiments of the invention described below can be combined with each other as long as they do not conflict with each other.

[0023] This invention addresses the problem of limited functionality in existing composite laser damage platforms by providing a composite laser damage platform that includes multiple online monitoring functions.

[0024] The structure of an example provided by the present invention is shown in the figure, consisting of a control system 1; a continuous laser 2; a nanosecond laser 3; a beam splitter 4; an energy probe 5; an energy detector 6; a reflector 7; a focusing lens 8; a temperature sensor 9; a temperature probe 10; a green laser 11; a beam expander 12; a sample 13; a three-dimensional motion platform 14; a camera lens 15; and a high-speed camera 16.

[0025] The continuous laser 2 and nanosecond laser 3, after passing through the reflector 7 and focusing lens 8, are focused together on a point on the surface of sample 13 placed on the three-dimensional motion platform 14, forming a continuous laser damage optical path and a nanosecond laser damage optical path, respectively, which together constitute a composite laser damage optical path. The green laser 11, beam expander 12, camera lens 15, and high-speed camera 16 are located on the same optical path, forming a shadow imaging optical path. The control system 1 is connected to the continuous laser 2, nanosecond laser 3, and high-speed camera 16 to control the time delay between them. The beam splitter 4, energy probe 5, and energy detector 6 form an energy detection optical path, with one set placed in each of the continuous laser damage optical path and the nanosecond laser damage optical path to detect laser energy. The temperature sensor 9 and temperature probe 10 constitute a temperature monitoring system for monitoring the sample temperature.

[0026] After the optical path is properly adjusted, sample 13 is placed on the three-dimensional motion platform 14, ensuring that the continuous laser and nanosecond laser act on the same point on the sample. The green laser 11 and high-speed camera 16 are turned on, and the three-dimensional motion platform 14 is controlled to move sample 13 until a clear image of sample 13 appears in the high-speed camera 16. The delay between the continuous laser 2, nanosecond laser 3, and high-speed camera 16 is controlled using DG535 and DG645 in the control system, and the energy detector 6 and temperature sensor 9 are turned on for real-time monitoring. Thus, this platform can be used to perform composite laser damage on the sample and achieve three online monitoring functions: shadow imaging, energy detection, and temperature monitoring.

Claims

1. A composite laser damage platform incorporating multiple online monitoring functions, characterized in that, include: By using a reflector and a focusing lens, the lasers emitted by a continuous laser and a nanosecond laser are focused onto the sample surface placed on a three-dimensional motion platform according to the designed optical path, ensuring that the two laser beams are focused at the same point, forming a continuous laser damage optical path and a nanosecond laser damage optical path respectively. The two together form a composite laser damage optical path to achieve laser composite damage. A green laser emits a 532 nm continuous laser beam, which passes through a beam expander and a reflector, perpendicular to the continuous laser beam path and through the sample surface. It is then focused by an attenuator and a camera lens onto a high-speed camera, enabling online monitoring of the sample damage process. The green laser, beam expander, camera lens, and high-speed camera are located on the same optical path, forming a shadow imaging optical path. A beam splitter is added to the optical path of both continuous laser and nanosecond laser. The split laser beam is then directed into an energy probe, enabling real-time detection of laser energy in both optical paths. A temperature sensor is connected to the temperature probe to achieve real-time detection of sample temperature. This allows for the collection of image, energy, and temperature information while damage is being performed. In this platform, the coordinated control of delays between the continuous laser, nanosecond laser, and high-speed camera is achieved through DG535 and DG645.

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