A replaceable sleeve air inlet valve for processing wafers

Abstract

An air intake valve with a replaceable sleeve comprises a valve body, wherein the valve body comprises a main channel with an air inlet at the upper end and an air outlet at the lower end and a side air inlet that penetrates the main channel from the side wall of the valve body, a side air inlet hole is formed at the intersection between the side air inlet and the main channel, a sleeve that penetrates from the upper end to the lower end is arranged in the main channel, the sleeve penetrates from the air outlet and is fitted on the inner wall of the main channel, and a side hole matching the side air inlet hole is opened on the side wall of the sleeve. The present invention prevents the inner wall of the main channel from being too thickly crystallized and thus affecting the processing of semiconductors by installing and replacing the sleeve, and the piston scraper arranged inside the sleeve can be rotated, thereby further improving the device's ability to remove crystals.

Description

Technical Field

[0001] The invention relates to the field of semiconductor manufacturing, specifically to the technical field of wafer epitaxial processing, and in particular to a replaceable sleeve air inlet valve for processing wafers. Background Art

[0002] The vertical low-pressure furnace tube is a key equipment for integrated circuit chip manufacturing. Its core working area is a vertically placed cylindrical quartz glass tube. After heating, the maximum temperature inside the tube can reach 1000°C. Batches of wafers in a quartz container (quartz boat) are sent into the quartz tube by an automatic robot arm, and then various high-purity gases are input to complete the gas chemical reaction and deposition process at the set temperature.

[0003] The following is an analysis of the formation mechanism of microparticles using the silicon nitride process as an example. The silicon nitride process usually reacts in a vacuum quartz chamber, that is, dichlorosilane (SiH2Cl2) and ammonia (NH3) are introduced as reaction gases. In addition to the silicon nitride (Si3N4) required for the process, the final product also includes additional products of ammonium chloride (NH4Cl) and hydrogen (H2). Silicon nitride is deposited on the surface of the wafer to form a dense film required for the process. When the temperature drops below 520°C, ammonium chloride crystallizes from the gaseous state to a light yellow powder, which generates one of the microparticles that we hope to avoid. As the required silicon nitride film thickness continues to increase, the ammonium chloride particles in the equipment continue to accumulate. In order to ensure the quality of the chip, the number of microparticles in the quartz tube must be strictly controlled. Summary of the invention

[0004] The present invention aims to solve the problems existing in the above-mentioned prior art and provides a replaceable sleeve air inlet valve for processing wafers. A replaceable sleeve is installed in the main channel to avoid crystals from being directly generated on the inner wall of the main channel, thereby making it easier to remove the crystals, thereby avoiding excessively thick crystals in the valve body from affecting subsequent production and safety.

[0005] The present invention solves its technical problems by adopting a technical solution: This replaceable sleeve air inlet valve for processing wafers includes a valve body, the valve body includes an air inlet at the upper end, an air outlet at the lower end, and a main channel that is numerically connected up and down, and a side air inlet duct that penetrates into the main channel from the side wall of the valve body, and a side air inlet hole is formed at the intersection of the side air inlet duct and the main channel. A sleeve that is connected up and down is arranged in the main channel, the sleeve penetrates from the air outlet and is fitted on the inner wall of the main channel, and a side hole matching the side air inlet hole is opened on the side wall of the sleeve.

[0006] For further improvement, the maximum transverse aperture of the side hole is located at the lower part of the side hole, the transverse aperture of the side hole in the middle and upper part expands in an arc shape from top to bottom, and the transverse aperture of the side hole in the lower part decreases in an arc shape from top to bottom, so that most of the air intake is controlled in the lower part; the side hole in the middle and upper part forms an outer inclined hole wall tilted outward on the thick wall of the sleeve, and the side hole in the lower part forms an inner inclined hole wall tilted inward on the thick wall of the sleeve, and the downward inclined hole wall guides the air intake downward. By setting the side hole in the above structure, it is possible to effectively prevent a large amount of gas loss in the side air intake duct.

[0007] To be further improved, the sleeve includes an upper sleeve portion that cooperates with the inner wall of the main channel, a middle sleeve portion that passes through the lower end of the main channel, and a lower sleeve portion whose outer wall is provided with a groove.

[0008] The main channel includes an upper ventilation chamber and a lower ventilation chamber, and the side air inlet is located in the lower ventilation chamber; the inner diameter of the lower ventilation chamber is larger than the inner diameter of the upper ventilation chamber, and a first end face is formed at the connection between them, and the top of the upper sleeve is against the first end face; the outer diameter of the upper sleeve matches the inner diameter of the lower ventilation chamber, and the inner diameter of the upper sleeve matches the inner diameter of the upper ventilation chamber. The first end face can accurately align the side hole on the sleeve with the side air inlet, preventing a gap between them from causing a large amount of gas leakage.

[0009] Further improvement, the outer wall size of the middle part of the sleeve is larger than the outer wall size of the upper part of the sleeve, and a second end face is formed at the connection between them, and the second end face acts on the lower end of the main channel. The second end face can prevent the sleeve from going too deep into the valve body, further improving the accuracy of installing the sleeve.

[0010] Further improvement, the upper side wall of the sleeve and the side wall of the ventilation lower chamber are both provided with matching positioning holes, and the fixing parts are inserted into the positioning holes. The positioning holes can ensure that the side holes and the side air inlet holes can be aligned without gaps to cause gas leakage, and the fixing parts can ensure that the side holes and the side air inlet holes are always aligned without gaps in the working state.

[0011] Further improvement, when the top end of the sleeve is fixed between the first end face or the side wall of the sleeve, there is a gap between the second end face and the lower end of the main channel, and a sealing gasket is arranged in the gap. The sealing gasket can further improve the sealing performance of the device and improve the utilization rate of the gas.

[0012] Further improvement also includes a piston scraper that is movably installed up and down in the main channel. The piston scraper includes a driving rod at the upper end for connecting with the piston rod and a scraper installed at the lower end of the driving rod. The inner wall of the main channel is flush with the inner wall of the sleeve, and the lower end of the scraper is provided with a cutting edge that is fitted with the inner wall of the main channel.

[0013] To be further improved, the scraper includes a driving connection part connected to the driving rod at the upper end and a cutting part fixedly connected to the lower end of the driving connection part and gradually extending from top to bottom toward the inner wall of the main channel, the cutting edge is arranged at the lower end of the cutting part, and a movable channel vertically arranged up and down is opened on the inner side of the driving connection part, a spiral track is arranged on the inner wall of the movable channel, a group of driving blocks relatively arranged and slidably connected in the spiral track are arranged on the driving rod, a boss part is arranged on the outer side of the driving rod, and an elastic connecting member arranged between the boss part and the scraper is installed at the lower end of the boss part.

[0014] For further improvement, a group of connecting impact grooves are opened on the spiral track, and the connecting impact grooves connect two adjacent spiral tracks above and below. The connecting impact grooves are set at an angle of 90°-160° with the driving block with the center of the active channel as the center of the circle.

[0015] To be further improved, a slag discharge channel connected to the movable channel is provided on the inner side of the cutting part, a blade deformation groove which is roughly vertically arranged and penetrates the cutting part downward is provided on the side wall of the cutting part, a plurality of chip removal holes arranged at intervals are provided on the cutting part, and a rotating cutting edge which protrudes downward and is connected to the side wall of the blade deformation groove is provided at the lower end of the cutting part.

[0016] The beneficial effects of the present invention are as follows: a replaceable sleeve is designed in the valve body, and the inner wall of the main channel in the valve body is covered by the inner wall of the sleeve, so that the crystals in the valve body are adsorbed on the inner wall of the sleeve, and the crystals can be quickly removed by simply replacing the sleeve, thereby avoiding excessive thickness of the crystals in the valve body; at the same time, a piston scraper that can rotate and impact the crystals is provided in the valve body, which can further scrape off the crystals in the valve body, thereby ensuring the subsequent safe production of the valve body. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the present invention;

[0018] Figure 2 is a schematic diagram of the structure of the sleeve;

[0019] Figure 3 It is the left side view of the sleeve;

[0020] Figure 4 for Figure 3 View in AA direction;

[0021] Figure 5 It is a structural schematic diagram of the valve body;

[0022] Figure 6 It is a schematic diagram of the structure of the piston scraper;

[0023] Figure 7 This is an exploded view of the piston scraper;

[0024] Figure 8 is a top view of the piston scraper;

[0025] Fig. 9 for Figure 8 View in the BB direction.

[0026] Explanation of the accompanying drawings: valve body 1, air inlet 2, air outlet 3, main channel 4, side air inlet 5, side air inlet hole 6, sleeve 7, side hole 8, outer inclined hole wall 9, inner inclined hole wall 10, sleeve upper part 11, sleeve middle part 12, slot 13, sleeve lower part 14, ventilation upper chamber 15, ventilation lower chamber 16, first end face 17, second end face 18, positioning hole 19, fixing part 20, sealing gasket 21, piston scraper 22, drive rod 22-1, scraper 22-2, cutting edge 23, drive connecting part 24, cutting part 25, movable channel 26, spiral track 27, drive block 28, connecting impact groove 29, slag discharge channel 30, sheet deformation groove 31, chip removal hole 32, rotating cutting edge 33, boss part 34, elastic connecting part 35. DETAILED DESCRIPTION

[0027] The present invention will be further described below in conjunction with the accompanying drawings:

[0028] Refer to the attached Figure 1 As shown: the present embodiment discloses a replaceable sleeve air inlet valve for processing wafers, comprising a valve body 1, the valve body 1 comprising an air inlet 2 at the upper end, an air outlet 3 at the lower end, and a main channel 4 vertically extending from top to bottom, and a side air inlet 5 penetrating from the side wall of the valve body 1 into the main channel 4, a side air inlet hole 6 is formed at the intersection of the side air inlet 5 and the main channel 4, when in use, different reaction gases are introduced from the air inlet 2 and the side air inlet 5 respectively for mixing, the gases in the present embodiment are dichlorosilane and ammonia, and the corresponding silicon nitride is deposited on the surface of the wafer, and when the temperature drops below 520°C after the reaction is completed, ammonium chloride crystallizes from the gaseous state into a light yellow powder and is adsorbed on the inner wall of the channel at the lower end of the main channel 4, thereby affecting the processing of the wafer, and at the same time, ammonium chloride is easily decomposed by heat to produce ammonia, and thus has a certain combustion risk under specific conditions; correspondingly, in order to adsorb excessive ammonium chloride crystals in the main channel 4 in the present embodiment, as Figure 1 As shown, in this embodiment, a sleeve 7 is provided in the main channel 4 which passes through from top to bottom. The sleeve 7 is inserted from the air outlet and is fitted on the inner wall of the main channel 4. A side hole 8 matching the side air inlet 6 is provided on the side wall of the sleeve 7. The sleeve 7 is detachably installed on the inner side of the main channel 4, so that ammonium chloride can be adsorbed on the inner wall of the sleeve 7 during crystallization, thereby cleaning the ammonium chloride crystals in the main channel 4 by replacing the sleeve 7.

[0029] Further, such as Figure 1As shown, the side air inlet 5 in this embodiment is installed on the main channel 4 in an inclined state. At the same time, in order to guide the gas entering the side air inlet 5 and prevent a large amount of gas leakage from the connection between the side air inlet 5 and the sleeve 7, in this embodiment, the maximum transverse aperture of the side hole 8 is located at the lower part of the side hole 8, the transverse aperture of the side hole 8 in the middle and upper part expands in an arc shape from top to bottom, and the transverse aperture of the side hole 8 in the lower part decreases in an arc shape from top to bottom, so that the side air inlet 5 controls most of the intake volume in the lower part when transmitting gas; and the side hole 8 in the middle and upper part forms an outer inclined hole wall 9 inclined outward on the upper part, and the side hole 8 in the lower part forms an inner inclined hole wall 10 inclined inward on the thick wall of the sleeve 7, and the downward inclined hole wall guides the downward intake.

[0030] like Figure 2 , Figure 3 and Figure 4 As shown, the sleeve 7 in this embodiment includes a sleeve upper portion 11 that cooperates with the inner wall of the main channel 4, a sleeve middle portion 12 that passes through the lower end of the main channel 4, and a sleeve lower portion 14 with a slot 13 on the outer wall, wherein the side hole 8 is opened on the sleeve upper portion 11.

[0031] Reference Figure 2 : The main channel 4 includes an upper ventilation chamber 15 at the upper end and a lower ventilation chamber 16 at the lower end, and the side air inlet 6 is provided on the lower ventilation chamber 16. The inner diameter of the lower ventilation chamber 16 is larger than the inner diameter of the upper ventilation chamber 15 and a first end face 17 is formed at the connection therebetween. The top end of the upper sleeve portion 11 is pressed against the first end face 17, and the upper limit position of the sleeve 7 can be achieved through the first end face 17 to ensure the positioning and installation of the sleeve 7; at the same time, in this embodiment, the side walls of the upper sleeve portion 11 and the side walls of the lower ventilation chamber 16 are provided with matching positioning holes 19, and the fixing member 20 is inserted into the positioning hole 19, and the fixing member 20 and the positioning hole 19 can be arranged in an interference fit, so that the fixing member 20 can be effectively fixed after being inserted into the positioning hole 19; at the same time When the outer end of the fixing member 20 is exposed outside the positioning hole 19, it is convenient to remove the fixing member 20 during disassembly, thereby realizing the detachable connection between the sleeve 7 and the main channel 4 while maintaining a stable connection; the outer wall size of the middle part 12 of the sleeve is larger than the outer wall size of the upper part 11 of the sleeve, and a second end face 18 is formed at the connection therebetween, and the second end face 18 acts on the lower end of the main channel 4, and when the top end of the upper part 11 of the sleeve in this embodiment is pressed against the first end face 17 or the side wall of the upper part 11 of the sleeve and the side wall of the ventilation lower chamber 16 are fixed by a pin, there is a gap between the second end face 18 and the lower end of the main channel 4, and a sealing gasket 21 is arranged in the gap, thereby ensuring the sealed connection between the sleeve 7 and the lower end of the main channel 4 to prevent gas from leaking out from the connection.

[0032] Furthermore, if Figure 1As shown, in order to ensure the complete removal of the crystals in the main channel 4, the intake valve in this embodiment also includes a piston scraper 22 movably installed in the main channel 4, the piston scraper 22 includes a drive rod 22-1 at the upper end for detachably connecting with the piston rod and a scraper 22-2 installed at the lower end of the drive rod 22-1, the inner wall of the main channel 4 is flush with the inner wall of the sleeve 7, and the lower end of the scraper 22-2 is provided with a cutting edge 23 that is fitted with the inner wall of the main channel 4; when it is necessary to remove the crystals, the drive rod 22-1 is connected to the piston rod. The piston rod in this embodiment can be a linear reciprocating motion device such as an electric push rod and a pneumatic cylinder. The piston rod drives the piston scraper 22 to move to the lower end of the main channel 4, and then the crystals on the inner wall of the main channel 4 and the inner wall of the sleeve 7 are scraped off by the cutting edge 23 at the lower end of the scraper 22-2.

[0033] like Figure 6 As shown, in order to facilitate the crystallized powder on the outside of the scraper 22-2 to fall out of the air outlet 3 of the main channel 4, a slag discharge channel 30 connected to the movable channel 26 is provided on the inner side of the cutting portion 25 in this embodiment, and a plurality of chip discharge holes 32 arranged at intervals are opened on the cutting portion 25, so that the crystallized powder on the outside of the scraper 22-2 can enter the slag discharge channel 30 through the chip discharge holes 32, and then fall downward from the slag discharge channel 30.

[0034] Furthermore, the scraper 22-2 in this embodiment includes a driving connection part 24 connected to the driving rod 22-1 at the upper end and a cutting part 25 fixedly connected to the lower end of the driving connection part 24 and gradually extending from top to bottom toward the inner wall of the main channel 4, and the cutting edge 23 is arranged at the lower end of the cutting part 25, wherein the driving connection part 24 and the cutting part 25 are integrally formed, and an active channel 26 vertically arranged up and down is opened on the inner side of the driving connection part 24, and the active channel 26 is arranged in a circular structure, and a spiral track 27 is arranged on the inner wall of the active channel 26, and a group of driving blocks 28 arranged relatively and slidably connected in the spiral track 27 are provided on the driving rod 22-1. In this embodiment, there are two driving blocks 28 and they are symmetrically arranged relative to the center of the driving rod 22-1, and a boss part 34 is provided on the outer side of the driving rod 22-1, and a spring arranged between the boss part 34 and the scraper 22-2 is installed at the lower end of the boss part 34 The elastic connecting member 35 in this embodiment can be a compression spring; when the piston scraper 22 moves downward and contacts the crystal and stops moving, the driving rod 22-1 compresses the elastic connecting member 35 and moves downward relatively. Since the driving rod 22-1 is detachably fixedly connected to the piston rod, the driving rod 22-1 cannot rotate when in use. When the driving rod 22-1 is driven and pressed downward, the scraper 22-2 is rotated under the action of the driving block 28 and the spiral track 27, and the crystal at the lower end is cut by the rotating scraper 22-2. At the same time, in this embodiment, a blade deformation groove 31 is provided on the side wall of the cutting portion 25 in a substantially vertical direction and penetrating downwardly through the cutting portion 25, so that when the cutting portion 25 is rotating and cutting, the cutting portion 25 can have a certain deformation space to prevent the cutting portion 25 from being deformed and damaged due to force during use. At the same time, Figure 6 and Figure 7 As shown, in this embodiment, the lower end of the cutting portion 25 is provided with a rotating cutting edge 33 which is protruding downward and connected to the side wall of the blade deformation groove 31. When the cutting portion 25 rotates clockwise from top to bottom, the rotating cutting edge 33 is arranged on the right side of the blade deformation groove 31; on the contrary, when the cutting portion 25 rotates counterclockwise from top to bottom, the rotating cutting edge 33 is arranged on the left side of the blade deformation groove 31; further, as Figure 6 and Figure 7 As shown, the upper end of the blade deformation groove 31 in this embodiment is connected to one of the chip removal holes 32, and the diameter of the chip removal hole 32 is larger than the width of the blade deformation groove 31, so that the cutting part 25 has a larger deformation space when used for cutting.

[0035] like Figure 7As shown, in order to better remove the crystals, a group of connecting impact grooves 29 are opened on the spiral track 27 in this embodiment. In this embodiment, the number of connecting impact grooves 29 and the number of driving blocks 28 are correspondingly set to 2; specifically, the connecting impact grooves 29 in this embodiment are connected to the upper and lower adjacent spiral tracks 27, and the connecting impact grooves 29 are set at an angle of 90°-160° with the driving block 28 with the center of the active channel 26 as the center of the circle. In this embodiment, the connecting impact grooves 29 and the active channel 26 are set at an angle of 90°; and then During the rotation of the scraper 22-2, when the connecting impact groove 29 rotates to a position opposite to the driving block 28, the driving block 28 moves downward along the connecting impact groove 29 to the spiral track 27 at the lower end under the action of the driving rod 22-1. When the driving block 28 enters the spiral track 27 at the lower end, the downward movement of the driving rod 22-1 will cause the driving block 28 to collide with the spiral track 27 at the lower end, thereby indirectly realizing the cutting part 25 to impact the crystals on the inner wall of the lower main channel 4 or the sleeve 7, thereby further scraping the crystals off the inner wall.

[0036] Certain words are used in the specification and claims of the present invention to refer to specific products. It should be understood by those skilled in the art that manufacturers may refer to the same component by different names. It is not intended to distinguish between components that have the same function but different names. In the following specification and patent scope, the words "comprise", "have" and "include" are open-ended words and should be interpreted as "including but not limited to...".

[0037] The above is a preferred embodiment of the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the principle of the present invention. These improvements and modifications are also considered to be within the scope of protection of the present invention.

Claims

1. A replaceable sleeve air inlet valve for processing wafers, comprising a valve body (1), the valve body (1) comprising an air inlet (2) at the upper end, an air outlet (3) at the lower end, a main channel (4) vertically extending from top to bottom, and a side air inlet (5) penetrating from the side wall of the valve body (1) into the main channel (4), a side air inlet hole (6) being formed at the intersection of the side air inlet (5) and the main channel (4), wherein: A sleeve (7) is provided in the main channel (4) and passes through the main channel (4). The sleeve (7) is inserted from the air outlet (3) and is fitted on the inner wall of the main channel (4). A side hole (8) matching the side air inlet hole (6) is provided on the side wall of the sleeve (7). The sleeve (7) comprises an upper sleeve portion (11) matched with the inner wall of the main channel (4), a middle sleeve portion (12) extending from the lower end of the main channel (4), and a lower sleeve portion (14) having a slot (13) on the outer wall. The side hole (8) is provided on the upper sleeve portion (11). The main channel (4) comprises an upper ventilation chamber (15) at the upper end and a lower ventilation chamber (16) at the lower end. The side air inlet hole (6) is provided on the lower ventilation chamber (16). The side wall of the upper sleeve portion (11) and the side wall of the lower ventilation chamber (16) are both provided with matching positioning holes (19). A fixing member (20) is inserted into the positioning hole (19). The fixing member (20) and the positioning hole (19) are arranged in an interference fit. It also includes a piston scraper (22) movably mounted in the main channel (4), the piston scraper (22) including a driving rod (22-1) at the upper end thereof connected to the piston rod and a scraper (22-2) mounted at the lower end of the driving rod (22-1), the inner wall of the main channel (4) being flush with the inner wall of the sleeve (7), and the lower end of the scraper (22-2) being provided with a cutting edge (23) that is arranged in contact with the inner wall of the main channel (4); The scraper (22-2) comprises a driving connection part (24) whose upper end is connected to the driving rod (22-1) and a cutting part (25) fixedly connected to the lower end of the driving connection part (24) and extending gradually from top to bottom toward the inner wall of the main channel (4); the cutting edge (23) is arranged at the lower end of the cutting part (25); a movable channel (26) arranged vertically up and down is opened on the inner side of the driving connection part (24); a spiral track (27) is arranged on the inner wall of the movable channel (26); a group of driving blocks (28) arranged opposite to each other and slidably connected in the spiral track (27) are arranged on the driving rod (22-1); a boss part (34) is arranged on the outer side of the driving rod (22-1); an elastic connecting member (35) arranged between the boss part (34) and the scraper (22-2) is installed at the lower end of the boss part (34); A slag discharge channel (30) communicating with the movable channel (26) is provided inside the cutting portion (25); a blade deformation groove (31) penetrating downwardly through the cutting portion (25) is provided on the side wall of the cutting portion (25) in a substantially vertical direction; a plurality of chip discharge holes (32) arranged at intervals are provided on the cutting portion (25); and a rotating cutting edge (33) protruding downwardly and connected to the side wall of the blade deformation groove (31) is provided at the lower end of the cutting portion (25).

2. The replaceable sleeve air inlet valve for processing wafers according to claim 1, characterized in that: The maximum transverse aperture of the side hole (8) is located at the lower part of the side hole (8); the transverse aperture of the side hole (8) in the middle and upper part expands in an arc shape from top to bottom, and the transverse aperture of the side hole (8) in the lower part decreases in an arc shape from top to bottom, so that most of the air intake is controlled in the lower part; the side hole (8) in the middle and upper part forms an outer inclined hole wall (9) tilted outward on the upper part, and the side hole (8) in the lower part forms an inner inclined hole wall (10) tilted inward on the thick wall of the sleeve (7), and the downwardly inclined hole wall guides the air intake downward.

3. The replaceable sleeve air inlet valve for wafer processing according to claim 1, characterized in that: The inner diameter of the ventilation lower chamber (16) is greater than the inner diameter of the ventilation upper chamber (15), and a first end surface (17) is formed at the connection between them. The top end of the sleeve upper part (11) rests on the first end surface (17); the outer diameter of the sleeve upper part (11) matches the inner diameter of the ventilation lower chamber (16), and the inner diameter of the sleeve upper part (11) matches the inner diameter of the ventilation upper chamber (15).

4. The replaceable sleeve air inlet valve for wafer processing according to claim 1, characterized in that: The outer wall size of the middle part (12) of the sleeve is larger than the outer wall size of the upper part (11) of the sleeve, and a second end surface (18) is formed at the connection between them, and the second end surface (18) acts on the lower end of the main channel (4).

5. The replaceable sleeve air inlet valve for wafer processing according to claim 1, characterized in that: When the top end of the sleeve upper portion (11) is pressed against the first end surface (17) or the side wall of the sleeve upper portion (11) and the side wall of the ventilation lower chamber (16) and fixed by a pin, a gap is formed between the second end surface (18) and the lower end of the main channel (4), and a sealing gasket (21) is arranged in the gap.

6. The replaceable sleeve air inlet valve for wafer processing according to claim 1, characterized in that: The spiral track (27) is provided with a group of connecting impact grooves (29), the connecting impact grooves (29) are arranged to connect two adjacent spiral tracks (27) above and below, and the connecting impact grooves (29) are arranged with the center of the movable channel (26) as the center of the circle and at an angle of 90°-160° with the driving block (28).

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