A mechanical semi-suspended piezoelectric beam positioning device

Abstract

The present invention discloses a mechanical semi-suspended piezoelectric light beam positioning device, which belongs to the field of light beam control technology and includes a driving mechanism, a radial buffer mechanism, and a laser emitting mechanism. While utilizing the piezoelectric ceramics in the driving mechanism to control the deflection of the cross beam, the radial buffer mechanism is also used to realize the sliding of the cross beam in the X and Y directions. When the cross beam deflects, the resistance in the orthogonal direction is reduced by sliding, thereby improving the degree of freedom in the orthogonal direction during dynamic operation and realizing a larger displacement deflection at a higher frequency at the output end of the laser emitting mechanism. The mechanical semi-suspended piezoelectric light beam positioning device of the present invention has a simple structure and a reasonable design. It can effectively reduce the reaction force of the cross beam during the deflection process, improve the operating frequency and deflection displacement, and at the same time improve the axial degree of freedom of the device, making the device more flexible and convenient, and having good application prospects and promotion value.

Description

Technical Field

[0001] The present invention belongs to the technical field of light beam control, and in particular relates to a mechanical semi-suspended piezoelectric light beam positioning device. Background Art

[0002] Laser phased array technology is a cutting-edge laser beam synthesis technology. It achieves coherent synthesis of high beam quality by controlling beam tilt, polarization, phase, delay, etc., and realizes scanning and focusing of laser beams, thereby achieving precise strike and processing of targets. It is widely used in material processing, medical surgery, national defense and other fields.

[0003] Since the laser phased array requires the use of array lasers, the first thing to consider when synthesizing the array laser is the tilt of the laser beam in each aperture. At the same time, due to the influence of atmospheric turbulence, the laser beam needs to be able to adjust its position at a high frequency within a certain range to ensure the coherent synthesis effect.

[0004] Traditional beam tilt control methods use fast mirrors. However, because fast mirrors rely on light reflection and employ piezoelectric actuators for high-precision mirror control, their size and weight impact the overall size and weight of the coherent combining system. Consequently, a subsequent proposal proposed the use of a piezoelectric bimorph, mechanically connected to the fiber tip, to drive the fiber tip's tilt. Furthermore, as the power of single-aperture fiber lasers increases, quartz end caps are used as the final output structure to meet the requirements for high-power output from the fiber tip. This increases the output end face area and improves the overall power handling capability. However, the use of quartz end caps reduces the operating frequency and displacement. This is primarily due to the size and weight of the quartz end caps and the fact that the traditional piezoelectric bimorph tilt structure uses an integrated metal cross-beam as the connection between the fiber tip and the quartz end cap. When the piezoelectric ceramic moves, the cross-beam drives the output end face. However, when all arms of the integrated cross-beam move in a particular direction, they provide a reaction force, thereby limiting the operating frequency and tilt displacement. Summary of the Invention

[0005] In response to one or more of the above-mentioned defects or improvement needs in the prior art, the present invention provides a mechanical semi-suspended piezoelectric beam positioning device, which can realize the deflection of the output end of the laser emitting mechanism, reduce the reaction during the deflection process, improve the operating frequency of the device, and increase the deflection displacement.

[0006] To achieve the above-mentioned object, the present invention provides a mechanical semi-suspended piezoelectric light beam positioning device, which includes a driving mechanism, a radial buffer mechanism and a laser emitting mechanism;

[0007] As a further improvement of the present invention, the driving mechanism includes a piezoelectric ceramic and a cross beam; two piezoelectric ceramics are spaced apart in the X direction and the Y direction, respectively, and one end of each piezoelectric ceramic is fixed to the base, and the other end is slidably connected to the cross beam through a radial buffer mechanism, and the cross beam can deflect in the X direction and the Y direction under the drive of the piezoelectric ceramic;

[0008] The radial buffer mechanism includes two first radial slide rails and two second radial slide rails, the two first radial slide rails are spaced apart in the X direction and extend along the Y direction, one side of the first radial slide rails is connected to the piezoelectric ceramic in the X direction, and the other side is slidably connected to the cross beam, and the cross beam can slide along the extension direction of the first radial slide rails; the two second radial slide rails are spaced apart in the Y direction and extend along the X direction, one side of the second radial slide rails is connected to the piezoelectric ceramic in the Y direction, and the other side is slidably connected to the cross beam, and the cross beam can slide along the extension direction of the second radial slide rails;

[0009] The output end of the laser emitting mechanism is fixedly connected to the cross beam so as to deflect along with the cross beam.

[0010] As a further improvement of the present invention, the cross beam includes a beam body and a beam end; the output end of the laser emitting mechanism is fixedly connected to the beam body; the beam ends are arranged in four numbers and are arranged in an annular direction along the outer periphery of the beam body, and one end of the beam end is connected to the outer peripheral wall of the beam body, and the other end is slidably connected to the radial buffer mechanism.

[0011] As a further improvement of the present invention, the first radial slide rail and the second radial slide rail are both columnar structures, and a sliding hole is extended in the middle of the columnar structure, and a card slot is provided on the side wall of the sliding hole;

[0012] Correspondingly, one end of the beam end facing away from the beam body passes through the clamping groove and is slidably clamped in the sliding hole, so that the beam end can slide back and forth along the extending direction of the sliding hole.

[0013] As a further improvement of the present invention, the cross section of the sliding hole is circular, and the end of the beam end away from one end of the beam body is spherical or cylindrical coaxial with the sliding hole.

[0014] As a further improvement of the present invention, the extended length of the sliding hole is not greater than the radial width of the piezoelectric ceramic, and the extended length of the sliding hole is not less than the maximum displacement of the radial deflection of the piezoelectric ceramic.

[0015] As a further improvement of the present invention, the radial buffer mechanism also includes a connecting member, the first radial slide rail and the second radial slide rail are connected to the piezoelectric ceramic through the connecting member, and the connecting member and the first radial slide rail, the connecting member and the second radial slide rail are respectively combined to form a T-shaped structure.

[0016] As a further improvement of the present invention, the laser emitting mechanism includes a quartz end cap and an energy transmission optical fiber; the quartz end cap is fixed on the cross beam, and one end thereof is connected to the energy transmission optical fiber, and the other end serves as the output end of the laser emitting mechanism to output the light beam.

[0017] As a further improvement of the present invention, an optical fiber fixing mechanism is further provided on the base, the optical fiber fixing mechanism includes a hollow tube, and a through hole matching the outer diameter of the hollow tube is provided on the base, one end of the hollow tube is fixedly inserted into the through hole, and the end of the energy transmitting optical fiber facing away from the quartz end cap is inserted into and fixed in the hollow tube.

[0018] As a further improvement of the present invention, an axial movement mechanism is further provided between the piezoelectric ceramic and the radial buffer mechanism;

[0019] The axial movement mechanism is fixed on the piezoelectric ceramic, and a sliding groove extending in the axial direction is provided on the axial movement mechanism. One end of the connecting member is slidably connected in the sliding groove and can slide along the extension direction of the sliding groove.

[0020] As a further improvement of the present invention, the extension length of the slide groove is 0.5 mm to 2 mm.

[0021] The above-mentioned improved technical features can be combined with each other as long as they do not conflict with each other.

[0022] In general, the above technical solutions conceived by the present invention have the following beneficial effects compared with the prior art:

[0023] (1) The mechanical semi-suspended piezoelectric beam positioning device of the present invention not only controls the deflection of the cross beam by using piezoelectric ceramics, but also realizes the sliding of the cross beam in the X and Y directions through a radial buffer mechanism. When the cross beam deflects, the resistance in the orthogonal direction is reduced by sliding, thereby improving the degree of freedom in the orthogonal direction during dynamic operation, and realizing a larger displacement deflection at a higher frequency at the output end of the laser emission mechanism.

[0024] (2) The mechanical semi-suspended piezoelectric beam positioning device of the present invention realizes focus adjustment in a small range by setting an axial movement mechanism, which provides more margin for system adjustment and increases the axial adjustment capability of the device.

[0025] (3) The mechanical semi-suspended piezoelectric beam positioning device of the present invention fixes one end of the energy transmission optical fiber on the base by using a fixing mechanism, thereby achieving semi-fixation of the laser emission mechanism, thereby preventing the energy transmission optical fiber from twisting during the deflection of the quartz end cap and affecting the reliability of transmission between the energy transmission optical fiber and the quartz end cap.

[0026] (4) The mechanical semi-suspended piezoelectric light beam positioning device of the present invention has a simple structure and reasonable design. It can effectively reduce the reaction force of the cross beam during the deflection process, improve the working frequency and deflection displacement, and at the same time improve the axial degree of freedom of the device, making the device more flexible and convenient, and has good application prospects and promotion value. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0028] Figure 1 2 is a side view schematic diagram of the mechanical semi-suspended piezoelectric light beam positioning device according to an embodiment of the present invention;

[0029] Figure 2 2 is a front view structural diagram of a mechanical semi-suspended piezoelectric light beam positioning device according to an embodiment of the present invention;

[0030] In all the drawings, the same figure marks represent the same technical features, specifically: 1. Quartz end cap; 2. Radial buffer mechanism; 201. First radial slide rail; 2011. First sliding hole; 202. Second radial slide rail; 2021. Second sliding hole; 203. Connector; 3. Axial moving mechanism; 301. Slide groove; 4. Cross beam; 401. Beam body; 402. Beam end; 5. Piezoelectric ceramic; 6. Base; 7. Optical fiber fixing mechanism; 8. Energy transmission optical fiber. DETAILED DESCRIPTION

[0031] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only intended to illustrate the present invention and are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

[0032] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0033] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0034] In the present invention, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0035] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0036] Example:

[0037] See also Figures 1 and 2The mechanical semi-suspended piezoelectric beam positioning device in the preferred embodiment of the present invention includes a driving mechanism, a radial buffer mechanism 2 and a laser emitting mechanism, so that the output end of the laser emitting mechanism is driven by the driving mechanism to deflect, and when the output end of the laser emitting mechanism deflects, the radial buffer mechanism 2 is used to buffer in the orthogonal direction, so as to ensure the stability of the overall structure while reducing the mechanical resistance in the orthogonal direction during the deflection process, thereby achieving a deflection with a larger displacement.

[0038] Specifically, if Figure 1 As shown in the figure, the driving mechanism in the preferred embodiment includes a piezoelectric ceramic 5 and a cross beam 4; wherein, two piezoelectric ceramics 5 are arranged at intervals along the X direction and two are also arranged at intervals along the Y direction. At the same time, a base 6 is provided on one side of the piezoelectric ceramic 5, and one end of each piezoelectric ceramic 5 is fixed to the base 6 to support the piezoelectric ceramic 5 through the base 6.

[0039] Correspondingly, the other ends of the four piezoelectric ceramics 5 are simultaneously slidably connected to the cross beam 4 through the radial buffer mechanism 2, so that the piezoelectric ceramics 5 drive the cross beam 4 to deflect along the X direction and the Y direction, and the radial buffer mechanism 2 buffers the mechanical resistance of the cross beam 4 in the direction orthogonal to the deflection.

[0040] It can be understood that the axial direction in the preferred embodiment of the present invention is the extension direction of the piezoelectric ceramic 5. Figure 1 As shown, the direction from left to right is the axial direction; the radial direction is perpendicular to the axial direction and includes the orthogonal X direction and Y direction in the radial plane, as shown in FIG. Figure 2 As shown in .

[0041] Specifically, if Figure 2 As shown in the figure, the cross beam 4 in the preferred embodiment is made of a lightweight metal material, including a beam body 401 and a beam end 402 that are connected to each other; wherein, the beam body 401 is in the shape of a hollow ring, and the inner diameter of the ring matches the outer diameter of the output end of the laser emitting mechanism, so that the output end of the laser emitting mechanism is fixedly penetrated on the beam body 401; the beam ends 402 are arranged to be evenly spaced along the outer peripheral wall of the beam body 401 in the circumferential direction as four, each beam end 402 corresponds to a piezoelectric ceramic 5, and one end thereof is connected to the outer peripheral wall of the beam body 401, and the other end is slidably connected to the radial buffer mechanism 2.

[0042] Furthermore, the radial buffer mechanism 2 in the preferred embodiment includes a first radial slide rail 201 and a second radial slide rail 202; wherein, two first radial slide rails 201 are arranged at intervals along the X direction and extend along the Y direction, one side of which is connected to the piezoelectric ceramic 5 correspondingly arranged along the X direction, and the other end is slidably connected to the beam end 402, so that the cross beam 4 can slide along the extension direction of the first radial slide rail 201; accordingly, two second radial slide rails 202 are arranged at intervals along the Y direction and extend along the X direction, one end of which is connected to the piezoelectric ceramic 5 correspondingly arranged along the Y direction, and the other end is slidably connected to the beam end 402, so that the cross beam 4 can slide along the extension direction of the second radial slide rail 202.

[0043] During actual operation, when the piezoelectric ceramic 5 drives the cross beam 4 to move along the X direction, the mechanical resistance encountered by the cross beam 4 in the Y direction is buffered by the sliding cooperation between the beam end 402 and the first radial slide rail 201, thereby reducing the resistance of the cross beam 4 in the Y direction; accordingly, when the piezoelectric ceramic 5 drives the cross beam 4 to move along the Y direction, the mechanical resistance encountered by the cross beam 4 in the X direction is buffered by the sliding cooperation between the beam end 402 and the second radial slide rail 202, thereby reducing the resistance of the cross beam 4 in the X direction, thereby achieving the cross beam 4 to deflect. Under the buffering of the radial buffer mechanism 2, the overall structure can be fixed in the steady state, and the degree of freedom in the orthogonal direction can be guaranteed in the dynamic state. While ensuring positioning and deflection in two directions, the mechanical resistance of the cross beam 4 in the orthogonal direction is reduced. At the same time, through the suspension drive of the piezoelectric ceramic 5, the limitations of other structures are reduced, and a larger displacement deflection can be achieved while achieving a larger and higher operating frequency.

[0044] Preferably, the first radial slide rail 201 and the second radial slide rail 202 are both columnar structures, a sliding hole is extended in the middle of the columnar structure, and a card slot is opened on the side wall of the sliding hole, and the end of the beam end 402 facing away from the beam body 401 is passed through the card slot and slidably clamped in the sliding hole, so that the two ends can slide back and forth along the extension direction of the sliding hole, thereby realizing a sliding connection between the beam end 402 and the first radial slide rail 201 and the second radial slide rail 202.

[0045] Specifically, if Figure 1As shown in the figure, a first sliding hole 2011 is provided in the middle of the first radial slide rail 201, which extends continuously along the Y direction, and a first clamping groove extending along the Y direction is provided on the side wall of the first sliding hole 2011, and the corresponding beam end 402, one end away from the beam body 401, passes through the first clamping groove and is slidably clamped in the first sliding hole 2011; a second sliding hole 2021 is provided in the middle of the second radial slide rail 202, which extends continuously along the X direction, and a second clamping groove extending along the X direction is provided on the side wall of the second sliding hole 2021, and the corresponding beam end 402, one end away from the beam body 401, passes through the second clamping groove and is slidably clamped in the second sliding hole 2021.

[0046] During actual setting, the cross-section of the first sliding hole 2011 and the second sliding hole 2021 can be set to be circular, and the end of the beam end 402 away from the beam body 401 can be set to be spherical or cylindrical, and its outer diameter is matched with the corresponding first sliding hole 2011 or second sliding hole 2021 through tolerance. Preferably, the outer diameter dimension tolerance of the end of the beam end 402 away from the beam body 401 is -0.05mm~+0.05mm, and preferably, the tolerance of the first sliding hole 2011 and the second sliding hole 2021 and the end of the beam end 402 is between +0.05mm~+0.1mm, so as to realize the rolling or sliding clearance match between the cross beam 4 and the radial buffer mechanism 2, and at the same time, limit the cross beam 4 to only move in the radial plane relative to the radial buffer mechanism 2.

[0047] Of course, the cross-sections of the first sliding hole 2011 and the second sliding hole 2021 can also be set to polygonal shapes, and the end of the beam end 402 away from the beam body 401 can be set to a shape with a matching cross-section, as long as mutual sliding in the specified direction can be achieved.

[0048] Preferably, the extension length of the first radial slide rail 201 and the second radial slide rail 202 is not greater than the radial width of the piezoelectric ceramic 5 , and is not less than the maximum displacement of the radial deflection of the piezoelectric ceramic 5 .

[0049] Preferably, the radial buffer mechanism 2 further includes a connector 203, so as to connect the first radial slide rail 201 and the second radial slide rail 202 to the piezoelectric ceramic 5 through the connector 203, and the connector 203 and the first radial slide rail 201, the connector 203 and the second radial slide rail 202 are respectively combined to form a T-shaped structure. Figure 2 As described above, the end of the connecting member 203 facing away from the piezoelectric ceramic 5 is connected to the middle of the outer side wall of the corresponding first radial slide rail 201 or the second radial slide rail 202.

[0050] Furthermore, the output end of the laser emitting mechanism is fixed on the cross beam 4 so as to deflect along with the cross beam 4 under the drive of the piezoelectric ceramic 5 .

[0051] Specifically, the laser emitting mechanism in the preferred embodiment includes a quartz end cap 1 and an energy transmission optical fiber 8, wherein the energy transmission optical fiber 8 and the quartz end cap 1 are connected by fusion splicing, and the end of the quartz end cap 1 facing away from the energy transmission optical fiber 8 serves as the output end of the laser emitting mechanism; at the same time, the quartz end cap 1 is fixed to the cross beam 4 by mechanical means or photocuring adhesive, so that the output end of the quartz end cap 1 is driven by the cross beam 4 to perform positioning and deflection.

[0052] In actual configuration, the outer circumference of the quartz end cap 1 is set to match the size of the hollow ring of the beam body 401. By fixing the quartz end cap 1 within the hollow ring, a fixed connection between the quartz end cap 1 and the cross beam 4 is achieved. In a preferred embodiment, the quartz end cap 1 is fixed to the hollow ring of the cross beam 4 using UV-curable adhesive. The diameter tolerance of the quartz end cap 1 is -0.05mm to 0mm, and the matching tolerance between the quartz end cap 1 and the hollow ring is preferably 0mm to +0.05mm to ensure the matching accuracy between the two.

[0053] Preferably, an axial moving mechanism 3 is also provided between the radial buffer mechanism 2 and the piezoelectric ceramic 5. The axial moving mechanism 3 extends axially, one end of which is fixed on the piezoelectric ceramic 5, and the other end is slidingly connected to the radial buffer mechanism 2, so that the radial buffer mechanism 2 can be moved axially through the axial moving mechanism 3, thereby driving the output end of the quartz end cap 1 on the cross beam 4 to move axially, so that during the system adjustment process, the position of the output end can be adjusted through the axial moving mechanism 3, thereby realizing a small range of focus adjustment, providing more margin for system adjustment, and increasing the axial adjustment capability of the device.

[0054] Specifically, the axial movement mechanism 3 is made of a lightweight metal material and is provided with an axially extending slide groove 301. One end of the connector 203 is slidably connected within the slide groove 301, allowing the connector 203 to slide along the extension direction of the slide groove 301. Preferably, the length of the slide groove 301 is 0.5 mm to 2 mm.

[0055] like Figure 1 As shown in the figure, a through hole is provided on the base 6, and the energy transmission optical fiber 8 passes through the through hole on the base 6 and is connected to the quartz end cap 1. Preferably, an optical fiber fixing mechanism 7 is also provided on the base 6, and one end of the energy transmission optical fiber 8 is fixed by the optical fiber fixing mechanism 7 to avoid twisting between the quartz end cap 1 and the energy transmission optical fiber 8 when the quartz end cap 1 deflects.

[0056] Preferably, the optical fiber fixing mechanism 7 includes a hollow tube, which extends along the arrangement direction of the energy transmission optical fiber 8, and preferably the extension length is not less than three times the thickness of the base 6, and the inner diameter of the hollow tube is matched with the inner diameter of the through hole, so that one end of the hollow tube is fixedly inserted into the through hole of the base 6 through a flange; accordingly, the end of the energy transmission optical fiber 8 facing away from the quartz end cap 1 is inserted into the hollow tube and glued and fixed, so as to achieve the fixation of one end of the energy transmission optical fiber 8.

[0057] Further preferably, a plurality of equidistant screw holes are provided on the hollow tube along its extension direction, so as to adjust the distance that one end of the hollow tube extends into the through hole of the base 6 according to actual needs.

[0058] The mechanical semi-suspended piezoelectric light beam positioning device of the present invention has a simple structure and reasonable design. It can effectively reduce the reaction force of the cross beam during the deflection process, improve the operating frequency and deflection displacement, and at the same time improve the axial degree of freedom of the device, making the device more flexible and convenient, and has good application prospects and promotion value.

[0059] It will be easily understood by those skilled in the art that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A mechanical semi-suspended piezoelectric beam positioning device, characterized in that: It includes a driving mechanism, a radial buffer mechanism and a laser emitting mechanism; The driving mechanism includes piezoelectric ceramics and a cross beam; two piezoelectric ceramics are spaced apart in the X and Y directions, and one end of each piezoelectric ceramic is fixed to the base, and the other end is slidably connected to the cross beam through a radial buffer mechanism. The cross beam can deflect in the X and Y directions under the drive of the piezoelectric ceramics; The radial buffer mechanism includes two first radial slide rails and two second radial slide rails, the two first radial slide rails are spaced apart in the X direction and extend along the Y direction, one side of the first radial slide rails is connected to the piezoelectric ceramic in the X direction, and the other side is slidably connected to the cross beam, and the cross beam can slide along the extension direction of the first radial slide rails; the two second radial slide rails are spaced apart in the Y direction and extend along the X direction, one side of the second radial slide rails is connected to the piezoelectric ceramic in the Y direction, and the other side is slidably connected to the cross beam, and the cross beam can slide along the extension direction of the second radial slide rails; The output end of the laser emitting mechanism is fixedly connected to the cross beam so as to deflect along with the cross beam.

2. The mechanical semi-suspended piezoelectric beam positioning device according to claim 1, characterized in that: The cross beam includes a beam body and a beam end; the output end of the laser emitting mechanism is fixedly connected to the beam body; the beam ends are arranged in four numbers and are arranged in an annular direction along the outer periphery of the beam body, and one end of the beam end is connected to the outer peripheral wall of the beam body, and the other end is slidably connected to the radial buffer mechanism.

3. The mechanical semi-suspended piezoelectric beam positioning device according to claim 2, characterized in that: The first radial slide rail and the second radial slide rail are both columnar structures, and a sliding hole is extended in the middle of the columnar structure, and a card slot is provided on the side wall of the sliding hole; Correspondingly, one end of the beam end facing away from the beam body passes through the clamping groove and is slidably clamped in the sliding hole, so that the beam end can slide back and forth along the extending direction of the sliding hole.

4. The mechanical semi-suspended piezoelectric beam positioning device according to claim 3, characterized in that: The cross section of the sliding hole is circular, and the end of the beam end away from one end of the beam body is spherical or cylindrical and coaxial with the sliding hole.

5. The mechanical semi-suspended piezoelectric beam positioning device according to claim 3, characterized in that: The extended length of the sliding hole is not greater than the radial width of the piezoelectric ceramic, and the extended length of the sliding hole is not less than the maximum displacement of the radial deflection of the piezoelectric ceramic.

6. The mechanical semi-suspended piezoelectric beam positioning device according to claim 1, characterized in that: The radial buffer mechanism further includes a connecting member, the first radial slide rail and the second radial slide rail are connected to the piezoelectric ceramic via the connecting member, and the connecting member and the first radial slide rail, the connecting member and the second radial slide rail are respectively combined to form a T-shaped structure.

7. The mechanical semi-suspended piezoelectric beam positioning device according to any one of claims 1 to 6, characterized in that: The laser emitting mechanism includes a quartz end cap and an energy transmission optical fiber; the quartz end cap is fixed on the cross beam, and one end thereof is connected to the energy transmission optical fiber, and the other end serves as the output end of the laser emitting mechanism to output a light beam.

8. The mechanical semi-suspended piezoelectric beam positioning device according to claim 7, characterized in that: An optical fiber fixing mechanism is also provided on the base, and the optical fiber fixing mechanism includes a hollow tube, and a through hole matching the outer diameter of the hollow tube is provided on the base, one end of the hollow tube is fixedly inserted into the through hole, and the end of the energy transmission optical fiber facing away from the quartz end cap is inserted into and fixed in the hollow tube.

9. The mechanical semi-suspended piezoelectric light beam positioning device according to claim 6, characterized in that: An axial movement mechanism is also provided between the piezoelectric ceramic and the radial buffer mechanism; The axial movement mechanism is fixed on the piezoelectric ceramic, and a sliding groove extending in the axial direction is provided on the axial movement mechanism. One end of the connecting member is slidably connected in the sliding groove and can slide along the extension direction of the sliding groove.

10. The mechanical semi-suspended piezoelectric light beam positioning device according to claim 9, characterized in that: The extension length of the slide groove is 0.5mm~2mm.

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