PVD Coating Preparation Equipment for Cemented Carbide Tools

Abstract

The present invention relates to the technical field of metal material coating, specifically a PVD coating preparation device for cemented carbide cutting tools. The present invention includes a frame and a cavity shell. A through-channel is horizontally penetrated through the middle of the bottom of the cavity shell, and a driving displacement mechanism is installed at the position of the frame corresponding to the through-channel; the driving displacement mechanism includes a first screw rod rotatably installed on the top of the frame and a support seat located at the top of the first screw rod. A sliding strip threadedly sleeved on the outside of the first screw rod is fixedly provided in the middle of the bottom of the support seat. T-shaped partitions are fixedly provided in the middle and at both ends of the top end surface of the support seat, and through-slots are opened on both sides of the bottom end of each T-shaped partition; a workpiece bearing mechanism is provided between every two adjacent T-shaped partitions, a sputtering coating mechanism is provided inside the cavity shell, and a linkage mechanism for controlling the linkage action of the workpiece bearing mechanism and the sputtering coating mechanism is provided on the cavity shell. The present invention can realize the synchronous progress of material replacement and repeated sputtering coating layer by layer, improving the efficiency and film-forming quality of sputtering coating.

Description

Technical Field

[0001] The present invention relates to the technical field of metal material coating, and specifically to a PVD coating preparation device for cemented carbide cutting tools. Background Art

[0002] In the machinery manufacturing industry, due to a series of excellent properties such as high hardness, wear resistance, good strength and toughness, heat resistance, and corrosion resistance, cemented carbide cutting tools are widely used as cutting tool materials, such as turning tools, milling cutters, planing cutters, drills, boring cutters, etc. However, under the load of its specific working environment, the machining part of the cutting tool is prone to surface failure, resulting in damage to the cutting tool. Therefore, it is necessary to improve the surface performance of the machining part of the cutting tool. Currently, the PVD (Physical Vapor Deposition) technology is mostly used to deposit a hard protective layer on the surface of the substrate to enhance the surface performance of the machining part of the cutting tool.

[0003] The prior art discloses a Chinese patent with the publication number CN 219689817 U (IPC classification number is C23C4 / 06): a plasma alloy powder cladding device, and discloses a negative pressure suction nozzle. By controlling the lifting and moving of the cladding device through the negative pressure suction nozzle, the powder adsorption of workpieces with different heights can be adapted, and the range of powder splashing can be reduced.

[0004] However, the above prior art still has certain defects. That is, during use, the powder layer thickness adsorbed in the central region of the adsorption force on the workpiece surface is significantly higher than the powder layer thickness adsorbed in the edge region of the adsorption force, resulting in uneven powder thickness on the workpiece surface and affecting the cladding quality and the subsequent use performance of the workpiece. Summary of the Invention

[0005] The purpose of the present invention is to provide a PVD coating preparation device for cemented carbide cutting tools to solve the problems raised in the above background art.

[0006] The purpose of the present invention can be achieved by the following technical solutions:

[0007] A PVD coating preparation device for cemented carbide cutting tools includes a frame and a cavity shell. A gas supply component and a vacuum component are provided at the top of the cavity shell. A through-channel is horizontally penetrated through the middle of the bottom of the cavity shell, and a drive conversion mechanism for switching work positions is installed at the top of the frame corresponding to the position of the through-channel;

[0008] The drive conversion mechanism includes a first screw rod rotatably installed on the top of the frame and a support seat located at the top of the first screw rod. A slide bar threadedly sleeved on the outside of the first screw rod is fixedly provided in the middle of the bottom of the support seat. T-shaped partitions are fixedly provided in the middle and at both ends of the top end surface of the support seat, and through-slots are opened on both sides of the bottom end of each T-shaped partition;

[0009] A workpiece bearing mechanism for carrying the tool to be processed is provided between every two adjacent T-shaped partitions. A sputtering coating mechanism for coating the processing part of the tool to be processed is provided inside the cavity shell. A linkage mechanism for controlling the linkage action of the workpiece bearing mechanism and the sputtering coating mechanism is provided on the cavity shell.

[0010] In a preferred embodiment, the workpiece bearing mechanism includes a support plate fixed between two adjacent T-shaped partitions. A plurality of annular sunk grooves evenly distributed in a ring shape are formed at the top of the support plate. A plurality of cylinders concentric with the corresponding annular sunk grooves are rotatably installed through the support plate at the top through bearings. A first gear is fixedly sleeved on the outer side of one end of each cylinder extending to the bottom of the support plate. A slot is formed at the top end of each cylinder.

[0011] A clamping assembly for clamping and fixing the tool to be processed is movably installed inside each annular sunk groove. A steering assembly for driving the tool to be processed to rotate is movably installed at the bottom of the support plate.

[0012] In a preferred embodiment, the clamping assembly includes a first ring plate rotatably installed inside the annular sunk groove through a bearing and a second ring plate suspended above the first ring plate. A U-shaped frame is fixedly provided at the top of the first ring plate. The bottom ends of both ends of the U-shaped frame movably penetrate through the second ring plate. A spring telescopic rod is fixedly installed between the second ring plate and the first ring plate. An elastic clamping member is installed inside the U-shaped frame.

[0013] In a preferred embodiment, the elastic clamping member includes two extrusion plates fixed to the top of the second ring plate and two clamping blocks located inside the U-shaped frame. Slide grooves are formed on both sides of the U-shaped frame. A straight rod is fixedly provided inside each slide groove. Sliders slidably connected to the corresponding slide grooves are fixedly connected to both sides of the clamping block. The slider is slidably sleeved on the outer side of the corresponding straight rod. A first spring fixedly connected to the slider and the inner wall of the groove is movably sleeved on the outer sides of both ends of the straight rod.

[0014] In a preferred embodiment, the steering assembly includes a column cylinder rotatably installed at the bottom of the support plate through a bearing. A second gear meshing with the first gear is fixedly sleeved on the outer side of the column cylinder. A column rod is movably inserted into the column cylinder. A round plate is fixedly connected to one end of the column rod extending outside the column cylinder. A ring groove is formed on the outer side of the round plate.

[0015] Two spiral grooves symmetrically arranged about the column rod are formed inside the column cylinder. Convex columns are respectively fixedly provided at the positions corresponding to the two spiral grooves on the outer side of one end of the column rod extending into the column cylinder. The two convex columns are respectively slidably connected inside the corresponding spiral grooves.

[0016] In a preferred embodiment, the linkage mechanism includes through grooves and cross grooves formed on both sides of the cavity housing. Earcaps are movably inserted through the inner sides of the two through grooves. A ring bracket is fixedly connected between the two earcaps. Cross lifting plates are movably inserted through the two cross grooves. Transverse plates are fixedly provided at positions corresponding to the cross lifting plates on both sides of the inner cavity of the cavity housing. A cylinder is fixedly installed at the bottom of the transverse plate, and the end of the telescopic end of the cylinder is fixedly connected to the corresponding cross lifting plate;

[0017] The linkage mechanism further includes brackets fixed on both sides outside the cavity housing. A third gear is rotatably installed on each of the two brackets. Straight racks are fixedly connected to the ends of the two earcaps extending outside the cavity housing. L-shaped racks are fixedly connected to the ends of the two cross lifting plates extending outside the cavity housing. The straight racks and the L-shaped racks are both meshed with the third gear at their respective positions.

[0018] In a preferred embodiment, the sputtering coating mechanism includes a disk suspended above the ring bracket. A plurality of L-shaped cylinders evenly distributed in a ring shape are fixedly connected between the disk and the ring bracket. An installation frame is movably sleeved outside each L-shaped cylinder. A sputtering head is detachably installed at the bottom end of each installation frame, and a protection component is provided outside each installation frame;

[0019] A servo motor is fixedly installed on the top of the disk. A second screw rod is fixedly connected to the end of the output shaft of the servo motor. A ring block is threadedly sleeved outside the second screw rod. A swing arm is hingedly installed between the top end of each installation frame and the ring block.

[0020] In a preferred embodiment, the protection component includes connecting arms fixed on both sides of the installation frame. A frame plate is fixedly connected between the two connecting arms. A frame sleeve is movably sleeved inside the frame plate. A round hole is vertically formed through the top of the frame sleeve;

[0021] Side plates are fixedly provided on both sides of the frame sleeve. Round rods movably penetrating through the corresponding side plates are fixedly provided at positions corresponding to the side plates on the outer sides of the two connecting arms. A third spring fixedly connecting the corresponding connecting arm and the side plate is movably sleeved outside the round rod.

[0022] In a preferred embodiment, the workpiece carrying mechanism further includes an auxiliary control component arranged on the top of the support plate. The auxiliary control component includes a ring pipe and a T-shaped column that are concentrically arranged and fixed on the top of the support plate, and the T-shaped column is arranged inside the ring pipe. A stop member is provided between the T-shaped column and the ring pipe;

[0023] The auxiliary control component further includes a lifting disk located above the support plate. Arc-shaped clamping grooves are formed at positions corresponding to each second ring plate on the outer side of the lifting disk. Each second ring plate is movably connected inside the corresponding arc-shaped clamping groove.

[0024] In a preferred embodiment, the stopper includes a push ring movably sleeved outside the T-shaped column and a T-shaped block movably penetrating through the side surface of the annular tube. A second spring is fixedly connected between one end of the T-shaped block located inside the annular tube and the inner wall of the annular tube. And a trapezoidal groove is vertically penetrated and opened at the top of one end of the T-shaped block located inside the annular tube. A pressure strip is fixedly provided at the position of the bottom of the push ring corresponding to the trapezoidal groove, and the bottom end of the pressure strip extends into the trapezoidal groove.

[0025] Advantages of the present invention:

[0026] 1. In the present invention, when the cylinder is used to push the cross-shaped lifting plate to drive the circular plate to reciprocate up and down, the convex column sliding along the corresponding spiral groove on the outer side of the column rod drives the column cylinder to rotate, and the meshing setting between the first gear and the second gear is used to drive the cutter to rotate. At the same time, the L-shaped rack that reciprocates up and down with the cross-shaped lifting plate drives the third gear at the corresponding position to rotate forward and reverse alternately, so as to drive the corresponding straight rack to reciprocate up and down, and then drive the ring support to reciprocate up and down. The sputtering coating mechanism that reciprocates up and down with the ring support coats the coating area on the surface of the rotating cutter with corresponding non-ferrous metal coatings, such as titanium nitride coating, titanium carbonitride coating, etc.;

[0027] 2. In the present invention, by using the driving and swapping mechanism to drive the two workpiece carrying mechanisms to alternately flow between the material changing station and the sputtering coating station, the material changing and sputtering coating can be carried out synchronously, improving the efficiency of sputtering coating;

[0028] 3. In the present invention, the mounting frame is set as an adjustable structure, and the relative position between the sputtering head on the mounting frame and the target cutter can be adjusted according to the actual coating requirements, improving the applicability of the equipment. At the same time, the protective component arranged on the mounting frame can define the coating area to prevent the sputtered target material from depositing on the inner wall of the cavity shell and the formed film area or unformed film area outside the area where the film is being deposited;

[0029] 4. In the present invention, by setting the auxiliary control component, the states of the cutters at multiple clamping stations can be controlled synchronously, facilitating quick replacement. Description of the drawings

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, for those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings;

[0031] Figure 1 is the overall structural schematic diagram of the present invention;

[0032] Figure 2 is the partial structural schematic diagram of the present invention;

[0033] Figure 3 It is a schematic diagram of the cavity shell structure of the present invention;

[0034] Figure 4 It is a schematic diagram of the driving and transposition mechanism structure of the present invention;

[0035] Figure 5 It is a schematic diagram of the first perspective structure of the workpiece carrying mechanism of the present invention;

[0036] Figure 6 It is a schematic diagram of the second perspective structure of the workpiece carrying mechanism of the present invention;

[0037] Figure 7 It is an exploded schematic diagram of the workpiece carrying mechanism of the present invention;

[0038] Figure 8 It is a schematic diagram of the clamping component structure of the present invention;

[0039] Figure 9 It is a schematic diagram of the partial structure of the auxiliary control component of the present invention;

[0040] Figure 10 It is a schematic diagram of the cross-sectional structure of the steering component of the present invention;

[0041] Figure 11 It is a schematic diagram showing the cooperation of the linkage mechanism and the sputtering coating mechanism of the present invention;

[0042] Figure 12 It is a schematic diagram of the protective component structure of the present invention.

[0043] The reference numerals in the figures are as follows: 1, frame; 2, cavity shell; 3, through-channel; 4, drive and position-changing mechanism; 41, first screw; 42, support; 43, slide bar; 44, T-shaped partition; 45, through-groove; 5, workpiece bearing mechanism; 51, support plate; 52, annular sunk groove; 53, clamping assembly; 531, first ring plate; 532, U-shaped frame; 533, second ring plate; 534, spring telescopic rod; 535, clamping block; 536, slider; 537, extrusion plate; 538, straight rod; 539, first spring; 54, cylinder; 55, first gear; 56, steering assembly; 561, column cylinder; 562, second gear; 563, column rod; 564, spiral groove; 565, circular plate; 566, annular groove; 57, auxiliary control assembly; 571, annular pipe; 572, T-shaped column; 573, push ring; 574, pressing strip; 575, T-shaped block; 576, trapezoidal groove; 577, second spring; 578, lifting disc; 6, linkage mechanism; 61, cross plate; 62, cylinder; 63, cross lifting plate; 64, annular support; 65, ear plate; 66, straight rack; 67, L-shaped rack; 68, third gear; 69, through-groove; 610, cross-groove; 7, sputtering coating mechanism; 71, disc; 72, L-shaped cylinder; 73, ring block; 74, second screw; 75, protection assembly; 751, connecting arm; 752, frame plate; 753, frame sleeve; 754, round hole; 755, side plate; 756, round rod; 757, third spring; 76, mounting bracket; 77, swing arm; 78, sputtering head; 8, gas supply assembly; 9, vacuum assembly. Detailed implementation mode

[0044] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0045] The PVD coating of the present invention is one of the high corrosion-resistant and wear-resistant protective coatings in the new material industry. Among them, the PVD coating of cemented carbide tools belongs to a part of the high corrosion-resistant and wear-resistant protective coatings in non-ferrous metal materials, and is used to improve the surface performance of cemented carbide tools, specifically including titanium nitride coating, titanium carbonitride coating, titanium aluminum nitride or aluminum titanium nitride coating.

[0046] The PVD coating preparation equipment for cemented carbide tools of the present invention is mainly used for coating the drill bits in cemented carbide tools.

[0047] Embodiment 1

[0048] Refer to the attached drawings of the specification Figures 1-4, A PVD coating preparation device for a cemented carbide tool according to an embodiment of the present invention includes a frame 1 and a chamber shell 2. An air supply component 8 for supplying argon gas to the inside of the chamber shell 2 in a vacuum state and a vacuum component 9 for evacuating and breaking the vacuum inside the chamber shell 2 are provided at the top of the chamber shell 2. A through-channel 3 is horizontally penetrated through the middle of the bottom of the chamber shell 2, and a driving and switching mechanism 4 for switching work positions is installed at the position of the frame 1 corresponding to the through-channel 3;

[0049] The driving and switching mechanism 4 includes a screw rod 41 rotatably installed at the top of the frame 1 and driven by a driving motor and a support 42 located at the top of the screw rod 41. A slide bar 43 threadedly sleeved on the outside of the screw rod 41 is fixedly provided in the middle of the bottom of the support 42. T-shaped partitions 44 are fixedly provided in the middle and at both ends of the top surface of the support 42. The support 42 can be divided into two working areas by using the three T-shaped partitions 44, and by driving the screw rod 41 to rotate by the driving motor, the tools to be processed in the two working areas above the support 42 can enter the inside of the chamber shell 2 alternately. Through grooves 45 are opened on both sides of the bottom end of each T-shaped partition 44. Among them, the distance between the opposite sides of two adjacent T-shaped partitions 44 is equal to the length of the through-channel 3, and the two ends of the through-channel 3 can be blocked by using two adjacent T-shaped partitions 44 arranged adjacent to each other;

[0050] A workpiece carrying mechanism 5 for carrying the tools to be processed is provided between every two adjacent T-shaped partitions 44. A sputtering coating mechanism 7 for coating the processing part of the tool to be processed is provided inside the chamber shell 2. A linkage mechanism 6 for controlling the linkage action of the workpiece carrying mechanism 5 and the sputtering coating mechanism 7 is provided on the chamber shell 2.

[0051] It should be noted that in the present invention, the driving and switching mechanism 4 is used to alternately let two groups of tools to be processed enter the inside of the chamber shell 2, evacuate the inside of the chamber shell 2 to a vacuum working state, and introduce argon gas. Then, gas discharge is generated by applying a high voltage to form plasma. The argon ions in these plasmas are accelerated under the action of an electric field and bombard the surface of the target material on the sputtering coating mechanism 7, so that the atoms on the surface of the target material are ejected under the bombardment of the argon ions, forming a sputtering phenomenon. The ejected target atoms or molecules fly towards the surface of the processing part of the tool and deposit to form a thin film there.

[0052] Specifically, as Figures 5-8As shown in the figure, the workpiece bearing mechanism 5 includes a pallet 51 fixed between two adjacent T-shaped partitions 44. Among them, the width of the pallet 51 is equal to the width of the through-channel 3, and a sealing layer is coated on the contact area between the surface of the pallet 51 and the T-shaped partition 44 and the inner side of the cavity shell 2, which is beneficial to ensuring that the vacuum working state inside the cavity 2 is not damaged during the subsequent sputtering coating process. A plurality of annular sinking grooves 52 evenly distributed in a ring shape are formed at the top of the pallet 51, and a plurality of cylinders 54 concentric with the corresponding annular sinking grooves 52 are rotatably installed through the pallet 51 at the top through bearings. A gear one 55 is fixedly sleeved on the outer side of one end of each cylinder 54 extending to the bottom of the pallet 51, and a slot for placing the tool to be processed is formed at the top of each cylinder 54;

[0053] A clamping assembly 53 for clamping and fixing the tool to be processed is movably installed in each annular sinking groove 52. The clamping assembly 53 includes a first ring plate 531 rotatably installed in the annular sinking groove 52 through a bearing and a second ring plate 533 suspended above the first ring plate 531. A U-shaped frame 532 is fixedly arranged at the top of the first ring plate 531, and the bottoms of both ends of the U-shaped frame 532 movably penetrate through the second ring plate 533. A spring telescopic rod 534 is fixedly installed between the second ring plate 533 and the first ring plate 531. Among them, the spring telescopic rod 534 includes a sleeve fixedly connected to the first ring plate 531 and a rod sleeve fixedly connected to the second ring plate 533. The bottom end of the rod sleeve is movably inserted into the sleeve, and the spring telescopic rod 534 further includes a connecting spring fixedly connected between the first ring plate 531 and the second ring plate 533. The connecting spring is sleeved outside the sleeve, and an elastic clamping member is installed inside the U-shaped frame 532;

[0054] The elastic clamping member includes two extrusion plates 537 fixed to the top of the second ring plate 533 and two clamping blocks 535 located inside the U-shaped frame 532. Among them, the tops of the opposite sides of the two extrusion plates 537 and the bottoms of the opposite sides of the two clamping blocks 535 are both provided with flared inclined surfaces. Chute grooves are formed on both sides of the U-shaped frame 532, and a straight rod 538 is fixedly arranged inside each chute groove. Sliders 536 slidably installed inside the corresponding chute grooves are fixedly connected to both sides of the clamping block 535, and the sliders 536 are slidably sleeved outside the corresponding straight rod 538. A first spring 539 fixedly connected to the slider 536 and the inner wall of the groove is movably sleeved outside both ends of the straight rod 538. Among them, the elastic coefficient of the connecting spring is greater than that of the first spring 539, so that when the connecting spring is in a natural state, the vertical surfaces of the opposite sides of the two clamping blocks 535 are attached to the vertical surfaces of the opposite sides of the two extrusion plates 537. At this time, the two clamping blocks 535 are in a state of clamping the tool to be processed (as Figure 8 shown), and the first spring 539 is in a stretched state in this state.

[0055] It should be noted that during the process of clamping and fixing the tool to be processed, the elastic clamping member is first adjusted to its initial state, that is, the connecting spring on the spring telescopic rod 534 is in a compressed state under the action of an external force. The extrusion plate 537 and the second annular plate 533 move downward along the two ends of the U-shaped frame 532 together with the compressed connecting spring, so that the two clamping blocks 535 move away from each other under the restoring force of the corresponding first spring 539. During this process, the inclined surfaces on the clamping blocks 535 remain in contact with the inclined surfaces on the corresponding extrusion plates 537, and the top end of the extrusion plate 537 is always located above the U-shaped frame 532.

[0056] When clamping and fixing the tool to be processed, the installation end of the target tool is inserted into the slot inside the top of the corresponding cylinder 54 after passing through the cavity between the two relatively arranged clamping blocks 535, and then the external force applied to the second annular plate 533 is removed, so that the second annular plate 533 moves upward under the restoring force of the connecting spring on the spring telescopic rod 534, and at the same time drives the two extrusion plates 537 to move upward synchronously. During this process, as the extrusion plates 537 gradually move upward, they will gradually push the two relatively arranged clamping blocks 535 to move towards each other and stretch the corresponding first spring 539 until the compressed connecting spring returns to its natural state. At this time, the two relatively arranged clamping blocks 535 complete the clamping of the installation end of the tool in the slot at their respective positions, and the processing part of the tool is located above the horizontal plane where the top end of the extrusion plate 537 is located.

[0057] Specifically, as Figures 6-7 and Figure 10 shown, a steering assembly 56 for driving the tool to be processed to rotate is movably installed at the bottom of the support plate 51. The steering assembly 56 includes a column cylinder 561 rotatably installed at the bottom of the support plate 51 through a bearing. A second gear 562 meshing with the first gear 55 is fixedly sleeved on the outer side of the column cylinder 561. A column rod 563 is movably inserted into the column cylinder 561. One end of the column rod 563 extending outside the column cylinder 561 is fixedly connected with a circular plate 565. An annular groove 566 is formed on the outer side of the circular plate 565. Among them, the annular groove 566 can be used to insert a driving member installed on the linkage mechanism 6 to push the circular plate 565 to move up and down, and there is no need to deliberately adjust and align the insertion direction.

[0058] Two spiral grooves 564 that are centrally symmetrically arranged with respect to the column rod 563 are formed on the inner side of the column cylinder 561. Among them, the bottom ends of the spiral grooves 564 are sealed, so that after the driving member completely disengages from the annular groove 566 on the circular plate 565, the column rod 563 will not disengage from the column cylinder 561, and the position where the circular plate 565 is located in this state is the initial position of the driving member. Corresponding to the positions of the two spiral grooves 564, convex columns are respectively fixedly provided on the outer side of the end of the column rod 563 extending into the column cylinder 561, and the two convex columns are respectively slidably connected to the corresponding spiral grooves 564.

[0059] It should be noted that during the process of driving the tools on multiple workstations to rotate synchronously and automatically during the sputtering coating process, after the workpiece carrying mechanism 5 carrying the tool to be processed enters the sputtering coating workstation inside the cavity shell 2, one end of the driving part on the linkage mechanism 6 is inserted into the annular groove 566 on the circular plate 565, and the power end connecting the driving part is used to make the driving part perform a reciprocating lifting motion, thereby driving the top end of the column rod 563 to perform a reciprocating lifting motion inside the column barrel 561. Since the convex column will perform synchronous lifting and lowering motion with the column rod 563, and the convex column slides along the spiral groove 564 on the inner side of the column barrel 561, when the column rod 563 performs the lifting and lowering motion, the convex column is used to drive the column barrel 561 to rotate, thereby driving the second gear 562 outside the column barrel 561 to rotate, and using the rotating second gear 562 to drive the first gear 55 on each cylinder 54 to rotate, and further driving the first annular plate 531 at the tool insertion workstation to rotate, so as to drive the target tool to rotate automatically;

[0060] Furthermore, an anti-slip cushion layer can be added to the surface of the end of the driving part inserted into the annular groove 566 for limiting the circular plate 565 after inserting the driving part, so that the circular plate 565 will not rotate relative to the driving part during the process of driving the first gear 55 to rotate by the second gear 562, thereby ensuring the smooth progress of the lifting process.

[0061] Specifically, as Figures 1-2 and Figure 11 shown, the linkage mechanism 6 includes through grooves 69 and cross grooves 610 opened on both sides of the cavity shell 2. Ear plates 65 are movably inserted through the inner sides of the two through grooves 69, and an annular support 64 for carrying the sputtering coating mechanism 7 is fixedly connected between the two ear plates 65. Cross lifting plates 63 are movably inserted through the two cross grooves 610. Among them, the cross lifting plate 63 is the aforementioned driving part, and the distance between the opposite ends of the two cross lifting plates 63 is equal to the inner diameter of the annular groove 566. Horizontal plates 61 are fixedly provided at the positions corresponding to the cross lifting plates 63 on both sides of the inner cavity of the cavity shell 2. A cylinder 62 is fixedly installed at the bottom of the horizontal plate 61, and the end of the telescopic end of the cylinder 62 is fixedly connected to the corresponding cross lifting plate 63. Among them, when the cross lifting plate 63 is in the initial state (i.e., the horizontal plane height where the annular groove 566 is located when the circular plate 565 is at the lowest point position), the through groove 45 on the T-shaped partition plate 44 is exactly opposite to the corresponding cross lifting plate 63;

[0062] The linkage mechanism 6 further includes brackets fixed on both outer sides of the cavity shell 2. On each of the two brackets, a third gear 68 is rotatably installed. One end of each of the two ear plates 65 extending to the outside of the cavity shell 2 is fixedly connected to a straight rack 66. One end of each of the two cross-shaped lifting plates 63 extending to the outside of the cavity shell 2 is fixedly connected to an L-shaped rack 67. The straight rack 66 and the L-shaped rack 67 are both engaged with the third gear 68 at their respective positions. When the cross-shaped lifting plate 63 reciprocates up and down to drive the driving circular plate 565, the ring support 64 will also drive the sputtering coating mechanism 7 carried above it to reciprocate up and down.

[0063] It should be noted that during the process of using the linkage mechanism 6 to drive the workpiece carrying mechanism 5 and the sputtering coating mechanism 7 on the sputtering coating station to perform linkage actions, the workpiece carrying mechanism 5 carrying the tool to be processed enters the cavity shell 2. After evacuating the cavity shell 2 to a vacuum working state, argon is introduced into the vacuum chamber. Then, gas discharge is generated by applying a high voltage to form plasma. At the same time, the control cylinder 62 is controlled to drive the cross-shaped lifting plate 63 to perform reciprocating lifting motion, so that the tools at multiple stations rotate synchronously. And during the process of the cross-shaped lifting plate 63 reciprocating up and down, the L-shaped rack 67 that reciprocates up and down with the cross-shaped lifting plate 63 will drive the third gear 68 at its position to rotate forward and backward alternately, thereby driving the corresponding straight rack 66 to perform reciprocating lifting motion, and further driving the ring support 64 to perform reciprocating lifting motion, so that the sputtering coating mechanism 7 that reciprocates up and down with the ring support 64 coats the coating area on the surface of the rotating tool layer by layer repeatedly.

[0064] Specifically, as Figures 11-12 shown, the sputtering coating mechanism 7 includes a disk 71 suspended above the ring support 64. A plurality of L-shaped cylinders 72 evenly distributed in a ring are fixedly connected between the disk 71 and the ring support 64. An installation frame 76 is movably sleeved outside each L-shaped cylinder 72. A sputtering head 78 is detachably installed at the bottom end of each installation frame 76. Among them, the sputtering head 78 is the core part of film deposition, specifically including a radio frequency power supply, a sputtering target, and a magnetic field generating device, which enables the sputtering target to generate particles under the action of the power supply, and uses the magnetic field to guide these ions to bombard the target, so that the target atoms are deposited on the surface of the machining area of the tool (the part of this sputtering film formation applies existing mature technologies and will not be described in detail here);

[0065] A servo motor is fixedly installed on the top of the disk 71. The end of the output shaft of the servo motor is fixedly connected to a second screw 74. A ring block 73 is threadedly sleeved outside the second screw 74. A swing arm 77 is hingedly installed between the top end of each installation frame 76 and the ring block 73.

[0066] It should be noted that during the process of sputtering coating the machining surface of the target tool by the sputtering coating mechanism 7, first, according to the actual coating requirements, the servo motor is controlled to drive the second screw rod 74 to rotate, so that the ring block 73 moves up and down along the second screw rod 74, and the lifting change of the ring block 73 is used to adjust the included angle between the swing arm 77 and the mounting bracket 76, thereby adjusting the relative position of the mounting bracket 76 on the L-shaped cylinder 72, that is, adjusting the distance between the sputtering head 78 and the target tool. Then, the sputtering head 78 is started to work, and the coating of the tool is completed along with the reciprocating lifting of the ring support 64;

[0067] Furthermore, a limiting component can be additionally provided at the connection between the mounting bracket 76 and the L-shaped cylinder 72 or between the second screw rod 74 and the ring block 73 (for example, a limiting strip is added to the mounting bracket 76 or the ring block 73, and at the same time, a limiting groove matching the limiting strip is opened on the surface of the L-shaped cylinder 72 or the second screw rod 74, which is not specifically shown in the drawings). When the second screw rod 74 rotates, it can only drive the ring block 73 to move up and down in the vertical direction, so as to ensure that the mounting bracket 76 does not deflect during the sliding along the L-shaped cylinder 72.

[0068] Embodiment 2

[0069] Refer to the attached drawings of the specification Figures 11-12 For a PVD coating preparation device of a cemented carbide tool according to an embodiment of the present invention, a protective component 75 is provided on the outside of each mounting bracket 76. The protective component 75 includes connecting arms 751 fixed on both sides of the mounting bracket 76. A frame plate 752 is fixedly connected between the two connecting arms 751. A frame sleeve 753 is movably sleeved inside the frame plate 752. A circular hole 754 with a diameter equal to the outer diameter of the target tool is vertically penetrated through the top of the frame sleeve 753. Among them, the setting of the frame sleeve 753 limits the sputtering area to the inner area of the frame sleeve 753, which can prevent the sputtered target material from depositing in the area outside the frame sleeve 753 and increasing the subsequent cleaning work. At the same time, it can also prevent the sputtered target material from depositing in the formed film area or the unformed film area outside the area where the film is being deposited, thus affecting the final film forming quality;

[0070] Both sides of the frame sleeve 753 are fixedly provided with side plates 755. At positions corresponding to the side plates 755 on the outer sides of the two connecting arms 751, round rods 756 are fixedly provided which movably penetrate through the corresponding side plates 755. A third spring 757 which fixedly connects the corresponding connecting arm 751 and the side plate 755 is movably sleeved on the outer side of the round rod 756. Among them, when the third spring 757 is in a natural state, one end of the round rod 756 close to the side plate 755 still remains in a state of movably penetrating through the corresponding side plate 755 (it is planned to set this state as the farthest distance between the mounting bracket 76 and the target tool, and the closest distance is set as the closest point where the side of the frame plate 752 away from the mounting bracket 76 is tangent to the circular hole 754 away from the mounting bracket 76). And in this state, the end of the frame sleeve 753 away from the mounting bracket 76 is in a fitting state with the inner wall of the ring support 64, that is, the clamped and fixed tool is aligned with the circular hole 754 on the frame sleeve 753.

[0071] It should be noted that during the process of sputter coating the machining part of the target tool, first, according to the film formation requirements, the servo motor is controlled to drive the second screw rod 74 to adjust the distance between the sputtering head 78 and the target tool. Then, while the cross lifting plate 63 makes a reciprocating lift, the ring support 64 is driven to make a reciprocating lift. During this process, the top end of the target tool passes through the circular hole 754 at the bottom end of the frame sleeve 753 and enters the sputtering area inside the frame sleeve 753. Then, during the reciprocating lift of the ring support 64, the machining part of the target tool is coated in a reciprocating manner in alternating positive and negative directions in circles.

[0072] Embodiment 3

[0073] Refer to the attached drawings of the specification Figure 7 and Figure 9 In a PVD coating preparation device for a cemented carbide tool according to an embodiment of the present invention, the workpiece bearing mechanism 5 further includes an auxiliary control component 57 arranged on the top of the pallet 51. The auxiliary control component 57 includes an annular tube 571 and a T-shaped column 572 which are concentrically arranged and fixed on the top of the pallet 51, and the T-shaped column 572 is arranged inside the annular tube 571. A stop member is provided between the T-shaped column 572 and the annular tube 571;

[0074] The auxiliary control component 57 further includes a lifting disk 578 located above the pallet 51. Arc-shaped clamping grooves are formed at positions corresponding to each second ring plate 533 on the outer side of the lifting disk 578. Each second ring plate 533 is movably connected inside the corresponding arc-shaped clamping groove, so that during the lifting of the lifting disk 578, multiple second ring plates 533 can be driven to lift synchronously, realizing synchronous control of the clamping states of the clamping blocks 535 at multiple clamping stations;

[0075] The stopper includes a push ring 573 movably sleeved outside the T-shaped column 572 and a plurality of T-shaped blocks 575 movably penetrating through the side surface of the annular pipe 571 and evenly distributed in a ring shape. A second spring 577 is fixedly connected between one end of the T-shaped block 575 located inside the annular pipe 571 and the inner wall of the annular pipe 571. And a trapezoidal groove 576 is vertically penetrated and opened at the top of one end of the T-shaped block 575 located inside the annular pipe 571. A pressure strip 574 is fixedly arranged at the position corresponding to the trapezoidal groove 576 at the bottom of the push ring 573. The bottom end of the pressure strip 574 extends into the trapezoidal groove 576. Among them, the top of the end of the T-shaped block 575 extending outside the annular pipe 571 is set as an inclined surface. And when the second spring 577 is in a natural state, the diameter of the circle formed by the farthest points of the ends of the plurality of T-shaped blocks 575 extending outside the annular pipe 571 is greater than the inner ring diameter of the center of the lifting disc 578. And the lower end of the inclined surface of the bottom end of the pressure strip 574 is in contact with the upper end of the inclined surface on the trapezoidal groove 576. At the same time, when the clamping block 535 is in a state of clamping and fixing the corresponding tool, the height of the lifting disc 578 is above the T-shaped block 575.

[0076] It should be noted that during the disassembly and assembly of the target tool, press down the push ring 573 to synchronously lower a plurality of pressure strips 574 and squeeze the inclined surface of the trapezoidal groove 576 on the T-shaped block 575, so that the corresponding T-shaped block 575 contracts towards the inside of the annular pipe 571, and at the same time stretches the second spring 577 at the corresponding position. Wait until the diameter of the circle formed by the farthest points of the ends of the plurality of T-shaped blocks 575 extending outside the annular pipe 571 is less than the inner ring diameter of the center of the lifting disc 578. Then press down the lifting disc 578, thereby driving a plurality of second annular plates 533 to squeeze the corresponding spring telescopic rods 534 downward until the lifting disc 578 descends above the T-shaped block 575. Then remove the pressure on the lifting disc 578, and let the T-shaped block 575 reset under the restoring force of the corresponding second spring 577, so that the diameter of the circle formed by the farthest points of the ends of the plurality of T-shaped blocks 575 extending outside the annular pipe 571 is greater than the inner ring diameter of the center of the lifting disc 578, and use the protruding T-shaped block 575 to position the lifting disc 578;

[0077] After the installation end of the tool to be processed passes through the cavity between the two relatively arranged clamping blocks 535 and is inserted into the slot inside the cylinder 54, press the push ring 573 again to release the positioning state of the end of the T-shaped block 575 extending outside the annular pipe 571 on the lifting disc 578, and let the lifting disc 578 reset under the restoring force of the spring telescopic rod 534. Use the rising extrusion plate 537 to squeeze the corresponding clamping block 535 to clamp the target tool, and the tool replacement is convenient and fast.

[0078] In the above technical solution, the drive motor mentioned uses a TECO servo drive with the model number JSDL2-10A1; the cylinder 62 mentioned uses a single-acting cylinder with the model number DSA25N200; the servo motor mentioned uses a servo drive with the model number JSMA-PUC02D.

[0079] The above has shown and described the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed.

Claims

1. A PVD coating preparation device for a cemented carbide tool, comprising a frame (1) and a chamber shell (2), wherein a gas supply component (8) and a vacuum component (9) are provided on the top of the chamber shell (2), characterized in that: A running channel (3) is horizontally penetrated through the middle of the bottom of the chamber shell (2), and a driving shifting mechanism (4) for switching workstations is installed at a position corresponding to the running channel (3) on the top of the frame (1); The driving shifting mechanism (4) comprises a screw rod (41) rotatably mounted on the top of the frame (1) and a bracket (42) located on the top of the screw rod (41); a sliding bar (43) threadedly sleeved on the outside of the screw rod (41) is fixedly provided at the middle of the bottom of the bracket (42); a T-shaped partition (44) is fixedly provided at the middle of the top surface and at both ends of the bracket (42); and each T-shaped partition (44) is provided with a through groove (45) on both sides of the bottom end; A workpiece carrying mechanism (5) for carrying a tool to be processed is provided between each two adjacent T-shaped partitions (44); a sputtering coating mechanism (7) for coating a processing portion of the tool to be processed is provided inside the chamber shell (2); and a linkage mechanism (6) for controlling the workpiece carrying mechanism (5) and the sputtering coating mechanism (7) to perform linkage actions is provided on the chamber shell (2); The workpiece bearing mechanism (5) comprises a support plate (51) fixed between two adjacent T-shaped partition plates (44), a plurality of annular grooves (52) evenly distributed in an annular shape are formed on the top of the support plate (51), and a plurality of cylinders (54) arranged concentrically with the annular grooves (52) are rotatably mounted on the top of the support plate (51) via bearings, a gear (55) is fixedly sleeved on the outer side of one end of each cylinder (54) extending to the bottom of the support plate (51), and a slot is formed on the top of each cylinder (54); A clamping assembly (53) for clamping and fixing the tool to be processed is movably installed inside each of the annular sink grooves (52), and a steering assembly (56) for driving the tool to be processed to rotate is movably installed at the bottom of the support plate (51); The steering assembly (56) comprises a column (561) rotatably mounted on the bottom of the support plate (51) via a bearing, a second gear (562) meshing with the first gear (55) is fixedly sleeved on the outside of the column (561), a column rod (563) is movably inserted inside the column (561), one end of the column rod (563) extending to the outside of the column (561) is fixedly connected to a circular plate (565), and an annular groove (566) is provided on the outside of the circular plate (565); The column tube (561) has two spiral grooves (564) arranged symmetrically about the column rod (563) on the inner side thereof, and convex columns are fixedly provided at positions corresponding to the two spiral grooves (564) on the outer side of one end of the column rod (563) extending into the column tube (561), and the two convex columns are slidably connected to the inside of the corresponding spiral grooves (564); The linkage mechanism (6) comprises a through slot (69) and a cross slot (610) formed on both sides of the cavity shell (2); ear plates (65) are movably inserted into the inner sides of the two through slots (69); a ring bracket (64) is fixedly connected between the two ear plates (65); a cross lifting plate (63) is movably inserted into the inner sides of the two cross slots (610); a transverse plate (61) is fixedly provided at positions corresponding to the cross lifting plates (63) on both sides of the inner cavity of the cavity shell (2); a cylinder (62) is fixedly installed at the bottom of the transverse plate (61); and a telescopic end of the cylinder (62) is fixedly connected to the corresponding cross lifting plate (63); The linkage mechanism (6) further comprises brackets fixed on both sides of the outside of the cavity shell (2), and gear three (68) is rotatably mounted on the two brackets; one end of the two ear plates (65) extending to the outside of the cavity shell (2) is fixedly connected to a spur rack (66); one end of the two cross lifting plates (63) extending to the outside of the cavity shell (2) is fixedly connected to an L-shaped rack (67), and the spur rack (66) and the L-shaped rack (67) are both meshed with gear three (68) at their respective positions; The sputtering coating mechanism (7) comprises a disk (71) suspended above a ring support (64); a plurality of L-shaped cylinders (72) evenly distributed in an annular shape are fixedly connected between the disk (71) and the ring support (64); a mounting frame (76) is movably sleeved on the outside of each L-shaped cylinder (72); a sputtering head (78) is detachably mounted on the bottom end of each mounting frame (76); and a protective component (75) is provided on the outside of each mounting frame (76); The protection component (75) comprises connecting arms (751) fixed on both sides of the mounting frame (76); a frame plate (752) is fixedly connected between the two connecting arms (751); a frame sleeve (753) is movably sleeved inside the frame plate (752); and a circular hole (754) is vertically penetrated through the top of the frame sleeve (753); Side plates (755) are fixedly provided on both sides of the frame sleeve (753); round rods (756) that movably penetrate the side plates (755) at the positions corresponding to the side plates (755) on the outsides of the two connecting arms (751) are fixedly provided; and spring three (757) that fixedly connects the corresponding connecting arms (751) and the side plates (755) is movably provided on the outsides of the round rods (756); A servo motor is fixedly mounted on the top of the disc (71), a screw rod 2 (74) is fixedly connected to the end of the output shaft of the servo motor, a ring block (73) is threadedly sleeved on the outer side of the screw rod 2 (74), and a swing arm (77) is hingedly mounted between the top of each mounting frame (76) and the ring block (73).

2. The PVD coating preparation equipment for cemented carbide tools according to claim 1, characterized in that: The clamping assembly (53) comprises a ring plate 1 (531) rotatably mounted inside the annular sink groove (52) via a bearing and a ring plate 2 (533) suspended above the ring plate 1 (531); a U-shaped frame (532) is fixedly mounted on the top of the ring plate 1 (531); and both ends of the bottom of the U-shaped frame (532) are movably connected through the ring plate 2 (533); a spring telescopic rod (534) is fixedly mounted between the ring plate 2 (533) and the ring plate 1 (531); and an elastic clamping member is mounted on the inner side of the U-shaped frame (532).

3. The PVD coating preparation device for cemented carbide tools according to claim 2, characterized in that: The elastic clamping member comprises two squeezing plates (537) fixed on the top of the second ring plate (533) and two clamping blocks (535) located on the inner side of the U-shaped frame (532). Slide grooves are provided on both sides of the U-shaped frame (532), and a straight rod (538) is fixedly provided inside each slide groove. Slide blocks (536) slidably installed inside the corresponding slide grooves are fixedly connected on both sides of the clamping blocks (535), and the slide blocks (536) are slidably sleeved on the outer side of the straight rod (538). The outer sides of both ends of the straight rod (538) are movably sleeved with springs (539) fixedly connected to the slide blocks (536) and the inner wall of the groove.

4. The PVD coating preparation device for cemented carbide tools according to claim 2, characterized in that: The workpiece bearing mechanism (5) further comprises an auxiliary control assembly (57) arranged on the top of the support plate (51), the auxiliary control assembly (57) comprising an annular tube (571) and a T-shaped column (572) fixed to the top of the support plate (51) and arranged concentrically, the T-shaped column (572) being arranged inside the annular tube (571), and a stopper being provided between the T-shaped column (572) and the annular tube (571); The auxiliary control assembly (57) further comprises a lifting plate (578) located above the support plate (51), and an arc-shaped card holder groove is provided on the outer side of the lifting plate (578) at a position corresponding to each ring plate 2 (533), and each ring plate 2 (533) is movably connected to the inside of the corresponding arc-shaped card holder groove.

5. The PVD coating preparation device for cemented carbide tools according to claim 4, characterized in that: The stopper comprises a push ring (573) movably sleeved on the outside of the T-shaped column (572) and a T-shaped block (575) movably penetrated on the side of the ring tube (571); a second spring (577) is fixedly connected between one end of the T-shaped block (575) located inside the ring tube (571) and the inner wall of the ring tube (571); a trapezoidal groove (576) is vertically penetrated through the top of one end of the T-shaped block (575) located inside the ring tube (571); a pressure strip (574) is fixedly provided at the bottom of the push ring (573) at a position corresponding to the trapezoidal groove (576); and the bottom end of the pressure strip (574) extends into the trapezoidal groove (576).

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