An efficient silicon material feeding device for a single-crystal silicon growth furnace

Abstract

The present application discloses a high-efficiency silicon material feeding device for a single-crystal silicon growth furnace, which includes a loading unit and a closing unit. The loading unit includes a top ring part, a first ring part, a second ring part, a material barrel, a fixed pipe, a bottom ring, and a plurality of first connecting rods; both the top and bottom of the material barrel are open; the closing unit includes a bottom cover, a lifting rod, and a connecting part. The feeding device of the present application can be efficiently applied to the secondary feeding of a single-crystal silicon growth furnace, so that the feeding is convenient and the production efficiency of the single-crystal silicon growth furnace is improved. And during secondary feeding, there is no need to prepare an additional flange part, so it is more convenient to use and the operation is simpler. The feeding device of the present application has a material storage state and a feeding state, so that the stability is higher during material storage and the feeding operation is more convenient during feeding.

Description

Technical Field

[0001] The present invention relates to the technical field of single-crystal silicon production and processing, and more specifically, to an efficient silicon material feeding device for a single-crystal silicon growth furnace. Background Art

[0002] The Czochralski method is a commonly used method for preparing single-crystal silicon. During the crystal pulling process, polycrystalline silicon raw materials are placed in a quartz crucible inside a single-crystal furnace. After being heated and melted, by controlling the temperature gradient and the crystal pulling speed, the silicon melt gradually grows into a single-crystal silicon rod under the guidance of a seed crystal. Since the polycrystalline silicon raw materials are in a piled state when initially loaded into the quartz crucible, occupying a relatively large space, and the volume will shrink significantly after melting, resulting in a relatively large space remaining in the upper part of the quartz crucible. Therefore, in order to improve the production efficiency and output of the single-crystal furnace, one or more feedings are required.

[0003] When the existing feeding device is feeding, an additional flange part is required. Thus, during the secondary feeding, the flange part is placed at the top opening of the furnace body. When the feeding device descends, the protruding ring outside the barrel can be placed on the flange part, so that the height of the barrel is limited. The lifting rod continues to descend, and thus the bottom cover can be opened to realize the feeding of the silicon material in the barrel. Due to the need to use an additional flange part, the operation is more complex and less convenient. In addition, when the silicon material is stored in the barrel but not yet used for feeding, in some cases, the bottom cover may accidentally open, resulting in the leakage of the silicon material, bringing inconvenience to the production. Summary of the Invention

[0004] The present invention aims to overcome the defects of the prior art and provides an efficient silicon material feeding device for a single-crystal silicon growth furnace.

[0005] To achieve the above object, the present invention provides the following technical solution: A silicon material feeding device includes a loading unit and a closing unit. The loading unit includes a top ring part, a first ring part, a second ring part, a barrel, a fixed pipe, a bottom ring, and a plurality of first connecting rods connecting the top ring part and the first ring part; the first ring part is fixedly connected to the outer side wall of the barrel, the second ring part is fixedly connected to the outer side wall at the bottom end of the barrel, the bottom ring is fixedly connected to the inner side wall at the bottom end of the barrel, both the top end and the bottom end of the barrel are open, the fixed pipe is fixedly connected to the top ring part through a plurality of first radial rods, and the fixed pipe is fixedly connected to the bottom ring through a plurality of second radial rods; the closing unit includes a bottom cover, a lifting rod fixedly connected to the bottom cover and passing through the fixed pipe, and a connecting part fixed to the top end of the lifting rod.

[0006] Thus, as the lifting rod moves up and down, the bottom cover can close or open the bottom end of the barrel. And the lifting rod moves up and down inside the fixed pipe, avoiding friction between the lifting rod and the silicon material.

[0007] Further, the bottom ring has an inverted frustum-shaped surface, a circumferential surface connected to the inverted frustum-shaped surface, a frustum-shaped surface connected to the circumferential surface, and an annular surface connected to the frustum-shaped surface; the bottom cover includes a first cylindrical block connected to the lifting rod, a frustum-shaped block connected to the first cylindrical block, and a second cylindrical block connected to the frustum-shaped block.

[0008] Further, it further includes a rotating unit; there are a plurality of groove portions at the first ring portion, and a first rotating block is installed in the groove portions. The first rotating block is connected to a first abutting plate and a second abutting plate; there are a plurality of through groove portions at the second ring portion, and a second rotating block is installed in the through groove portions. The second rotating block is connected to a third abutting plate and a fourth abutting plate; the first abutting plate, the second abutting plate, the third abutting plate, and the fourth abutting plate each include a flat plate and an arc-shaped plate connected to the flat plate; there are a plurality of limiting grooves at the first ring portion, and a first limiting block is fixed at one end of the limiting groove, and a second limiting block is fixed at the other end; the rotating unit includes an upper rotating portion, a lower rotating portion, and a plurality of second connecting rods connecting the upper rotating portion and the lower rotating portion. The upper rotating portion includes two first rotating rings and a first connecting column connecting the two first rotating rings. A plurality of L-shaped plates and a plurality of limiting insertion blocks inserted into the limiting grooves are connected to the first rotating ring located above. The L-shaped plate has a locking bolt capable of locking the relative position of the upper rotating portion and the first ring portion, and the end of the locking bolt can abut against the upper surface of the first ring portion; the lower rotating portion includes two second rotating rings and a second connecting column connecting the two second rotating rings; a plurality of third limiting blocks are fixed to the second ring portion. The third limiting block includes an L-shaped block connected to the second ring portion and a sliding insertion block connected to the L-shaped block; the sliding insertion block is located between the two second rotating rings.

[0009] Further, both the number of the groove portions and the first rotating block is 6.

[0010] Further, both the number of the through groove portions and the second rotating block is 4.

[0011] Further, the number of the limiting grooves, the limiting insertion blocks, and the third limiting blocks is all 4.

[0012] Further, the number of the L-shaped plates is 2.

[0013] Further, the number of both the first connecting rod and the second connecting rod is 4.

[0014] Further, the feeding device can be in a stock storage state and a feeding state. In the stock storage state, the first rotating block is received in the groove portion, the limiting insertion block abuts against the first limiting block, the first connecting column abuts against the first abutting plate, one end of the second rotating block is located below the bottom cover so that the bottom cover cannot move downward, and the second connecting column abuts against the third abutting plate. In the feeding state, one end of the first rotating block is located outside the groove portion, the first connecting column abuts against the second abutting plate, the limiting insertion block abuts against the second limiting block, the second rotating block is not located below the bottom cover, the bottom cover can move downward, and the second connecting column abuts against the fourth abutting plate.

[0015] Further, both ends of the first rotating block and the second rotating block are arc-shaped.

[0016] Thereby, the friction between the rotating block and other components during movement can be reduced.

[0017] Further, the second connecting rod includes a first straight rod connected to the upper rotating portion, a first arc-shaped rod connected to the first straight rod, a second arc-shaped rod connected to the first arc-shaped rod, and a second straight rod connecting the second arc-shaped rod and the lower rotating portion.

[0018] Further, the outer diameter of the upper rotating portion is larger than the outer diameter of the lower rotating portion.

[0019] Thereby, the shape of the second connecting rod enables better cooperation between the upper rotating portion and the lower rotating portion.

[0020] Further, a limiting ring portion capable of abutting against the top end of the fixed pipe is fixed at the lifting rod.

[0021] Thereby, the limiting ring portion can limit the descending height of the lifting rod, thereby limiting the descending height of the bottom cover and avoiding excessive descent of the bottom cover.

[0022] Further, the connecting portion includes a cylindrical connecting block connected to the lifting rod and a U-shaped plate connected to the connecting block, and the U-shaped plate has two through holes.

[0023] Thereby, it is convenient to connect the hoisting equipment.

[0024] Advantageous effects:

[0025] 1. The feeding device of the present application can be efficiently applied to the secondary feeding of a single crystal growth furnace, so that the feeding is convenient and the production efficiency of the single crystal growth furnace is improved.

[0026] 2. The feeding device of the present application does not require an additional flange portion during secondary feeding, so it is more convenient to use and the operation is simpler.

[0027] 3. The feeding device of the present application has a stock storage state and a feeding state, so the stability during stock storage is higher and the feeding operation is more convenient during feeding. Description of the Drawings

[0028] Figure 1 Schematic diagram of the feeding device in the stock storage state;

[0029] Figure 1A Enlarged view of area 1A;

[0030] Figure 1B Enlarged view of area 1B;

[0031] Figure 2 Schematic diagram of the feeding device in the feeding state;

[0032] Figure 2A Enlarged view of area 2A;

[0033] Figure 2B Enlarged view of area 2B;

[0034] Figure 3 Schematic diagram of the feeding device in the feeding state from another perspective;

[0035] Figure 3A Enlarged view of area 3A;

[0036] Figure 3B Enlarged view of area 3B;

[0037] Figure 4 Schematic diagram when the bottom cover is opened for feeding;

[0038] Figure 4A Enlarged view of area 4A;

[0039] Figure 5 Schematic diagram when the bottom cover is opened for feeding from another perspective;

[0040] Figure 5A Enlarged view of area 5A;

[0041] Figure 6 Schematic diagram of the separation of the components of the feeding device;

[0042] Figure 6A Enlarged view of area 6A;

[0043] Figure 6B Enlarged view of area 6B;

[0044] Figure 6C Enlarged view of area 6C;

[0045] Figure 6D Enlarged view of area 6D.

[0046] Description of the reference numerals in the drawings: top ring portion 1; first ring portion 2; groove portion 2.1; limiting groove 2.2; first limiting block 2.3; second limiting block 2.4; second ring portion 3; through groove portion 3.1; third limiting block 3.2; L-shaped block 3.2.1; sliding insertion block 3.2.2; barrel 4; fixed pipe 5; first radial rod 5.1; second radial rod 5.2; bottom ring 6; inverted frustum-shaped surface 6.1; circumferential surface 6.2; frustum-shaped surface 6.3; circular ring surface 6.4; first connecting rod 7; bottom cover 8; first cylindrical block 8.1; frustum-shaped block 8.2; second cylindrical block 8.3; lifting rod 9; limiting ring portion 9.1; connecting portion 10; connecting block 10.1; U-shaped plate 10.2; through hole 10.3; first rotating block 11; first abutting plate 11.1; second abutting plate 11.2; second rotating block 12; third abutting plate 12.1; fourth abutting plate 12.2; first rotating ring 13.1; first connecting column 13.2; L-shaped plate 13.3; locking bolt 13.4; limiting insertion block 13.5; second rotating ring 14.1; second connecting column 14.2; second connecting rod 15; first straight rod 15.1; first arc-shaped rod 15.2; second arc-shaped rod 15.3; second straight rod 15.4. Detailed implementation manners

[0047] The embodiments of the present invention will be described in detail below. Examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are intended to explain the present invention and should not be construed as a limitation to the present invention.

[0048] The present invention provides an efficient silicon material feeding device for a single crystal silicon growth furnace as shown in the figure, which includes a loading unit and a sealing unit. The loading unit includes a top ring portion 1, a first ring portion 2, a second ring portion 3, a material cylinder 4, a fixed pipe 5, a bottom ring 6, and a plurality of first connecting rods 7 connecting the top ring portion 1 and the first ring portion 2; the first ring portion 2 is fixedly connected to the outer side wall of the material cylinder 4, the second ring portion 3 is fixedly connected to the outer side wall of the bottom end of the material cylinder 4, the bottom ring 6 is fixedly connected to the inner side wall of the bottom end of the material cylinder 4, both the top end and the bottom end of the material cylinder 4 are open, the fixed pipe 5 is fixedly connected to the top ring portion 1 through a plurality of first radial rods 5.1, and the fixed pipe 5 is fixedly connected to the bottom ring 6 through a plurality of second radial rods 5.2; the sealing unit includes a bottom cover 8, a lifting rod 9 fixedly connected to the bottom cover 8 and passing through the fixed pipe 5, and a connecting portion 10 fixed to the top end of the lifting rod 9. The bottom ring 6 has an inverted frustum-shaped surface 6.1, a circumferential surface 6.2 connected to the inverted frustum-shaped surface, a frustum-shaped surface 6.3 connected to the circumferential surface, and an annular surface 6.4 connected to the frustum-shaped surface; the bottom cover 8 includes a first cylindrical block 8.1 connected to the lifting rod 9, a frustum-shaped block 8.2 connected to the first cylindrical block, and a second cylindrical block 8.3 connected to the frustum-shaped block.It further includes a rotating unit; there are a plurality of groove portions 2.1 at the first ring portion 2, and a first rotating block 11 is installed in the groove portion. The first rotating block 11 is connected with a first abutting plate 11.1 and a second abutting plate 11.2; there are a plurality of through groove portions 3.1 at the second ring portion 3, and a second rotating block 12 is installed in the through groove portion. The second rotating block 12 is connected with a third abutting plate 12.1 and a fourth abutting plate 12.2; the first abutting plate 11.1, the second abutting plate 11.2, the third abutting plate 12.1 and the fourth abutting plate 12.2 all include a flat plate and an arc-shaped plate connected to the flat plate; there are a plurality of limiting grooves 2.2 at the first ring portion 2, one end of the limiting groove is fixed with a first limiting block 2.3, and the other end is fixed with a second limiting block 2.4; the rotating unit includes an upper rotating portion, a lower rotating portion and a plurality of second connecting rods 15 connecting the upper rotating portion and the lower rotating portion. The upper rotating portion includes two first rotating rings 13.1 and a first connecting column 13.2 connecting the two first rotating rings. A plurality of L-shaped plates 13.3 and a plurality of limiting insertion blocks 13.5 inserted into the limiting grooves are connected to the first rotating ring located above. A locking bolt 13.4 capable of locking the relative position of the upper rotating portion and the first ring portion 2 is provided at the L-shaped plate, and the end of the locking bolt can abut against the upper surface of the first ring portion 2; the lower rotating portion includes two second rotating rings 14.1 and a second connecting column 14.2 connecting the two second rotating rings; a plurality of third limiting blocks 3.2 are fixed to the second ring portion 3. The third limiting block includes an L-shaped block 3.2.1 connected to the second ring portion 3 and a sliding insertion block 3.2.2 connected to the L-shaped block; the sliding insertion block 3.2.2 is located between the two second rotating rings 14.1.

[0049] The number of the groove parts 2.1 and the first rotating blocks 11 is 6 each; the number of the through groove parts 3.1 and the second rotating blocks 12 is 4 each; the number of the limiting grooves 2.2, the limiting insertion blocks 13.5 and the third limiting blocks 3.2 is 4 each; the number of the L-shaped plates 13.3 is 2; the number of the first connecting rods 7 and the second connecting rods 15 is 4 each. The feeding device can be in a material storage state and a feeding state. In the material storage state, the first rotating blocks 11 are received in the groove parts 2.1, the limiting insertion blocks 13.5 abut against the first limiting blocks 2.3, the first connecting columns 13.2 abut against the first abutting plates 11.1, one ends of the second rotating blocks 12 are located below the bottom cover 8 so that the bottom cover 8 cannot move downwards, and the second connecting columns 14.2 abut against the third abutting plates 12.1; in the feeding state, one ends of the first rotating blocks 11 are located outside the groove parts 2.1, the first connecting columns 13.2 abut against the second abutting plates 11.2, the limiting insertion blocks 13.5 abut against the second limiting blocks 2.4, the second rotating blocks 12 are not located below the bottom cover 8, the bottom cover 8 can move downwards, and the second connecting columns 14.2 abut against the fourth abutting plates 12.2. Both ends of the first rotating blocks 11 and the second rotating blocks 12 are arc-shaped; the second connecting rod 15 includes a first straight rod 15.1 connected to the upper rotating part, a first arc rod 15.2 connected to the first straight rod, a second arc rod 15.3 connected to the first arc rod, and a second straight rod 15.4 connecting the second arc rod and the lower rotating part. A limiting ring part 9.1 capable of abutting against the top end of the fixed pipe 5 is fixed at the lifting rod 9. The connecting part 10 includes a cylindrical connecting block 10.1 connected to the lifting rod 9 and a U-shaped plate 10.2 connected to the connecting block. The U-shaped plate has two through holes 10.3.

[0050] Working principle: For the feeding device of the present application, as shown in the figure, the feeding device can be lifted to the auxiliary chamber of the single crystal growth furnace through the hoisting connecting part, and then the feeding device is lowered. In the feeding state, since a plurality of first rotating blocks extend outwards, the end parts of the first rotating blocks can be placed on the opening at the top of the single crystal growth furnace, so that the second ring part cannot continue to descend (i.e., the barrel cannot continue to descend), but the lifting rod can continue to descend, so as Figure 3 shown, the bottom cover can descend, so as to open the bottom of the barrel, and thus the silicon material can be discharged. The limiting ring part can limit the descending height of the bottom cover to prevent the bottom cover from descending excessively. The shape of the bottom cover and the shape of the bottom ring in the barrel can be better matched, so that when storing materials, the bottom cover can better seal the bottom end of the barrel, and as Figure 1As shown, in the stock storage state, one end of the second rotating block is located below the bottom cover and can abut against the lower surface of the bottom cover, so that the bottom cover cannot move downward in this state, thus avoiding the situation of material leakage caused by accidental opening of the bottom cover. The sliding plug, the limiting plug, the limiting groove, the first limiting block and the second limiting block can realize the installation and limitation of the rotating unit, and the rotation amplitude of the rotating unit is limited by the first limiting block and the second limiting block. By rotating the L-shaped plate, the rotation of the rotating unit can be realized, and by locking the bolt, the relative position of the rotating unit and the first circular ring part can be locked, so that the feeding device can be easily switched between the stock storage state and the feeding state.

[0051] Although the present invention has been illustrated and described with respect to the preferred embodiments, those skilled in the art should understand that various changes and modifications can be made to the present invention as long as they do not exceed the scope defined by the claims of the present invention.

Claims

1. An efficient silicon material feeding device for a single-crystal silicon growth furnace, characterized in that, It includes a charging unit and a closing unit. The charging unit includes a top ring portion, a first ring portion, a second ring portion, a barrel, a fixed pipe, a bottom ring, and a plurality of first connecting rods connecting the top ring portion and the first ring portion; the first ring portion is fixedly connected to the outer side wall of the barrel, the second ring portion is fixedly connected to the outer side wall at the bottom end of the barrel, the bottom ring is fixedly connected to the inner side wall at the bottom end of the barrel, both the top end and the bottom end of the barrel are open, the fixed pipe is fixedly connected to the top ring portion through a plurality of first radial rods, and the fixed pipe is fixedly connected to the bottom ring through a plurality of second radial rods; the closing unit includes a bottom cover, a lifting rod fixedly connected to the bottom cover and passing through the fixed pipe, and a connecting portion fixed to the top end of the lifting rod. The bottom ring has an inverted frustum-shaped surface, a circumferential surface connected to the inverted frustum-shaped surface, a frustum-shaped surface connected to the circumferential surface, and an annular surface connected to the frustum-shaped surface; the bottom cover includes a first cylindrical block connected to the lifting rod, a frustum-shaped block connected to the first cylindrical block, and a second cylindrical block connected to the frustum-shaped block. The high-efficiency silicon material feeding device for a single-crystal growth furnace further includes a rotating unit; there are a plurality of groove portions at the first ring portion, and a first rotating block is installed in the groove portion. The first rotating block is connected to a first abutting plate and a second abutting plate; there are a plurality of through groove portions at the second ring portion, and a second rotating block is installed in the through groove portion. The second rotating block is connected to a third abutting plate and a fourth abutting plate; the first abutting plate, the second abutting plate, the third abutting plate, and the fourth abutting plate all include a flat plate and an arc-shaped plate connected to the flat plate; there are a plurality of limiting grooves at the first ring portion, a first limiting block is fixed at one end of the limiting groove, and a second limiting block is fixed at the other end; the rotating unit includes an upper rotating portion, a lower rotating portion, and a plurality of second connecting rods connecting the upper rotating portion and the lower rotating portion. The upper rotating portion includes two first rotating rings and a first connecting column connecting the two first rotating rings. A plurality of L-shaped plates and a plurality of limiting insertion blocks inserted into the limiting grooves are connected to the first rotating ring located above. The L-shaped plate has a locking bolt capable of locking the relative position of the upper rotating portion and the first ring portion. The end of the locking bolt can abut against the upper surface of the first ring portion; the lower rotating portion includes two second rotating rings and a second connecting column connecting the two second rotating rings; a plurality of third limiting blocks are fixed to the second ring portion. The third limiting block includes an L-shaped block connected to the second ring portion and a sliding insertion block connected to the L-shaped block; the sliding insertion block is located between the two second rotating rings. A limiting ring portion capable of abutting against the top end of the fixed pipe is fixed to the lifting rod.

2. The high-efficiency silicon material feeding device for a single-crystal silicon growth furnace according to claim 1, wherein The number of the groove portions and the first rotating blocks is 6 each; the number of the through groove portions and the second rotating blocks is 4 each; the number of the limiting grooves, the limiting insertion blocks, and the third limiting blocks is 4 each; the number of the L-shaped plates is 2; the number of the first connecting rods and the second connecting rods is 4 each.

3. The high-efficiency silicon material feeding device for a single-crystal silicon growth furnace according to claim 1, characterized in that The feeding device can be in a material storage state and a feeding state. In the material storage state, the first rotating block is received in the groove portion, the limiting insertion block abuts against the first limiting block, the first connecting column abuts against the first abutting plate, one end of the second rotating block is located below the bottom cover so that the bottom cover cannot move downward, and the second connecting column abuts against the third abutting plate; in the feeding state, one end of the first rotating block is located outside the groove portion, the first connecting column abuts against the second abutting plate, the limiting insertion block abuts against the second limiting block, the second rotating block is not located below the bottom cover, the bottom cover can move downward, and the second connecting column abuts against the fourth abutting plate.

4. The high-efficiency silicon material feeding device for a single-crystal silicon growth furnace according to claim 1, wherein, Both ends of the first rotating block and the second rotating block are arc-shaped; the second connecting rod includes a first straight rod connected to the upper rotating portion, a first arc-shaped rod connected to the first straight rod, a second arc-shaped rod connected to the first arc-shaped rod, and a second straight rod connecting the second arc-shaped rod and the lower rotating portion.

5. The high-efficiency silicon material feeding device for a single-crystal silicon growth furnace according to claim 1, wherein The connecting portion includes a cylindrical connecting block connected to the lifting rod and a U-shaped plate connected to the connecting block, and the U-shaped plate has two through holes.

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