A diborane purification device

Abstract

The present application relates to a diborane purification device, including a tower body, a condensing mechanism and a reboiling mechanism, wherein a feed pipe is fixedly installed on the side wall of the tower body, a partition is fixedly installed on the inner bottom wall of the tower body, and the partition divides the bottom side of the tower body into a static zone and a boiling zone, and multiple heat exchange mechanisms are fixedly installed inside the tower body, and the heat exchange mechanisms are used to discharge the liquid into the boiling zone after the gas and liquid exchange heat, and the condensing mechanism is installed on the top side of the tower body, and the condensing mechanism is used to cool and liquefy the gas and then discharge it back to the tower body, and the bottom side of the tower body is connected to the reboiling mechanism, and the reboiling mechanism is used to heat the liquid in the boiling zone and then discharge it into the static zone, and the bottom side of the tower body is fixedly installed with a first recovery pipe, and the first recovery pipe is connected to the static zone. The present application has the effect of improving the purity of diborane after each distillation.

Description

Technical Field

[0001] The present application relates to the field of separation equipment, and in particular to a diborane purification device. Background Art

[0002] As an important chemical raw material, diborane is widely used in semiconductor manufacturing, metal surface treatment and other fields. With the continuous advancement of industrial technology, the requirements for the purity of diborane are getting higher and higher.

[0003] Distillation is the most commonly used traditional method for purifying diborane. A distillation tower is used for distillation and storage of diborane. Diborane carrying impurities is passed into the distillation tower, and diborane flows downward as a liquid inside the distillation tower. Then diborane enters the reboiler from the bottom of the distillation tower for heating. Since diborane has a high boiling point and impurities have a low boiling point, the impurities carried by diborane evaporate, and part of the diborane also evaporates together. Then the steam is discharged from the reboiler into the distillation tower, and the liquid is taken out from the reboiler. The impurity content in the liquid is reduced, thereby improving the purity of diborane. The vaporized impurities and diborane in the distillation tower move upward, and then the vaporized impurities and diborane enter the condenser from the top side of the distillation tower for cooling and return to the distillation tower. Diborane has a high boiling point, and the content of diborane in the liquid returning to the distillation tower is high. According to the purity requirements of diborane, a multi-stage distillation tower is generally set up to purify the mixture to obtain high-purity diborane.

[0004] Liquid diborane is directly taken out from the reboiler, which provides less time for impurities to evaporate, resulting in a high impurity content in the diborane after it is taken out from the reboiler, thereby reducing the purity of the diborane after each distillation. Summary of the invention

[0005] In order to improve the purity of diborane after each distillation, the present application provides a diborane purification device.

[0006] The present application provides a diborane purification device, which adopts the following technical solution:

[0007] A diborane purification device comprises a tower body, a condensing mechanism and a reboiling mechanism. A feed pipe is fixedly installed on the side wall of the tower body. A partition is fixedly installed on the inner bottom wall of the tower body. The partition divides the bottom side of the tower body into a static zone and a boiling zone. A plurality of heat exchange mechanisms are fixedly installed inside the tower body. The heat exchange mechanisms are used to discharge the liquid into the boiling zone after heat exchange between gas and liquid. The condensing mechanism is installed on the top side of the tower body. The condensing mechanism is used to cool and liquefy the gas and then discharge it back to the tower body. The bottom side of the tower body is connected to the reboiling mechanism. The reboiling mechanism is used to heat the liquid in the boiling zone and then discharge it into the static zone. A first recovery pipe is fixedly installed on the bottom side of the tower body. The first recovery pipe is connected to the static zone.

[0008] By adopting the above technical scheme, diborane containing impurities is added to the tower body from the feed pipe, and the diborane flows downward and enters the boiling zone. The diborane inside the boiling zone enters the reboiling mechanism for heating and is then sent to the static zone. The heated diborane is further evaporated in the static zone, thereby facilitating the evaporation and upward movement of the impurities. Thereafter, the diborane inside the static zone is taken out through the first recovery pipe. The heated mixed solution is evaporated in the static zone, thereby facilitating the discharge of the impurities from the static zone after vaporization, thereby improving the purity of the diborane after each distillation.

[0009] Optionally, a plurality of first guide plates are arranged at intervals from top to bottom inside the static area, and the plurality of first guide plates are alternately installed on two opposite inner walls of the static area from top to bottom, and baffles are fixedly installed on both sides of the first guide plates.

[0010] By adopting the above technical solution, after the reboiling mechanism discharges diborane into the static zone, diborane is guided by the first guide plate and shielded by the baffle plate, and diborane gradually flows to the bottom side of the static zone in an S shape, thereby extending the moving path of diborane and increasing the evaporation time of impurities. At the same time, the first guide plate spreads the diborane, thereby accelerating the evaporation of impurities.

[0011] Optionally, a floating plate is provided inside the static area, the floating plate is located below each of the first guide plates, a guide block is fixedly installed around the floating plate, and a guide groove for the guide block to rise and fall and slide is opened on the inner wall of the static area.

[0012] By adopting the above technical solution, the floating plate floats on the liquid surface of diborane inside the static zone, and the diborane falls into the floating plate after flowing through each first guide plate, and the floating plate buffers the diborane. The diborane discharged from the first guide plate into the bottom side of the static zone is buffered by the floating plate, so that the diborane discharged from the first guide plate is conveniently gathered on the liquid surface of the diborane inside the static zone, thereby reducing the disturbance of the diborane discharged from the first guide plate to the diborane inside the static zone. When the diborane in the static zone is taken out by the first recovery pipe, the diborane in the lower static zone has a longer static time, thereby improving the purity of the diborane taken out from the static zone.

[0013] Optionally, the reboiler mechanism includes a reboiler, a first liquid discharge pipe and a first reflux pipe, wherein the first liquid discharge pipe is fixedly installed between the bottom side of the tower body and the bottom side of the reboiler, the first liquid discharge pipe is connected to the boiling zone, and the first reflux pipe is fixedly installed between the side wall of the reboiler and the side wall of the tower body.

[0014] By adopting the above technical solution, the diborane in the boiling zone enters the reboiler from the first liquid discharge pipe, and the reboiler heats the diborane and sends it to the first reflux pipe. Then the first reflux pipe sends the diborane to the static zone, so that the reboiler can send the diborane to the static zone.

[0015] Optionally, the first return pipe is a rectangular tube, and a water storage plate is provided at one end of the first return pipe close to the tower body. The side wall of the water storage plate is abutted against the inner wall of the first return pipe. The inner wall of the first return pipe is provided with a slide groove for the water storage plate to rise and fall and slide. The water storage plate is installed with a driving assembly, and the driving assembly is used to drive the water storage plate to rise and fall.

[0016] By adopting the above technical solution, the driving component drives the water storage plate to move downward and abuts against the inner bottom wall of the first reflux pipe, thereby stopping the liquid diborane from flowing from the reboiler to the static zone, thereby facilitating the reboiler to fully heat the diborane. After that, the liquid level inside the reboiler continues to rise, and the driving component drives the water storage plate to move upward, so that the liquid diborane is discharged from the reboiler into the static zone.

[0017] Optionally, the driving assembly includes a first rotating seat, a second rotating seat, a first pressure rod, a second pressure rod and a floating block, the first rotating seat and the second rotating seat are both fixedly mounted on the inner bottom wall of the first return pipe, the rod body of the first pressure rod is rotatably mounted on the first rotating seat, the rod body of the second pressure rod is rotatably mounted on the second rotating seat, one end of the first pressure rod is hinged to the top side of the water storage plate, the other end of the first pressure rod is located below one end of the second pressure rod, and the floating block is fixedly mounted on the other end of the second pressure rod.

[0018] By adopting the above technical solution, after the liquid level inside the reboiler gradually rises, the liquid level inside the first reflux pipe will also rise, so that the float moves upward. The float drives the second pressure rod to squeeze the first pressure rod downward, and the first pressure rod drives the water storage plate to move upward, so as to facilitate the control of the rise of the water storage plate. After the water storage plate rises, liquid diborane is discharged from the reboiler into the static area, so that the liquid level inside the first reflux pipe drops. After the liquid level inside the first reflux pipe drops, the water storage plate squeezes the first pressure rod downward, so as to facilitate driving the water storage plate to move downward.

[0019] Optionally, a driving plate is fixedly mounted on the top side of the floating block, and the driving plate is used for gas blowing. A magnetic block is fixedly mounted on the top side of the first reflux pipe, and the magnetic block is used for attracting the driving plate.

[0020] By adopting the above technical solution, after the float is moved upward by the buoyancy of liquid diborane, the position of the drive plate rises and the magnetic block attracts the drive plate. Afterwards, when the gas impurities are discharged into the tower body along the first reflux pipe, the gas impurities push the drive plate, thereby applying an upward driving force to the end of the second pressure rod close to the float. Afterwards, after the liquid level inside the first reflux pipe drops, the driving force applied by the gas impurities and the magnetic force of the magnetic block keep the end of the second pressure rod close to the float tilted upward, thereby facilitating the liquid diborane to enter the static area from the first reflux pipe. After the liquid level inside the first reflux pipe drops further, the magnetic force of the magnetic block and the buoyancy of the float cannot allow the second pressure rod to continue to tilt upward, and the end of the second pressure rod close to the float moves downward.

[0021] Optionally, the reboiler includes a tank body, an upper mounting plate, a lower mounting plate, a liquid guide pipe, a water inlet pipe and a water outlet pipe, wherein one end of the first liquid discharge pipe away from the tower body and one end of the first reflux pipe away from the tower body are fixedly connected to the side wall of the tank body, one end of the water inlet pipe and one end of the water outlet pipe are fixedly connected to the side wall of the tank body, the upper mounting plate and the lower mounting plate are fixedly installed inside the tank body, the lower mounting plate is located at a position higher than the end of the first liquid discharge pipe away from the tower body, the water inlet pipe is located at a height higher than the lower mounting plate, the water outlet pipe is located at a height higher than the water inlet pipe, the upper mounting plate is located at a height higher than the water outlet pipe, the end of the first reflux pipe away from the tower body is located at a height higher than the upper mounting plate, there are multiple liquid guide pipes, each of which is fixedly passed through the upper mounting plate and the lower mounting plate, and the liquid guide pipe is used to connect the space of the tank body located on the side opposite to each other of the upper mounting plate and the lower mounting plate.

[0022] By adopting the above technical solution, the liquid diborane inside the tank body enters the space of the tank body below the lower mounting plate from the first liquid discharge pipe, and then the liquid diborane below the lower mounting plate enters the inside of the liquid guide pipe, the liquid diborane inside the liquid guide pipe flows to the top of the upper mounting plate, and then the liquid diborane above the upper mounting plate enters the static area from the first reflux pipe.

[0023] The heating agent for heating enters between the upper mounting plate and the lower mounting plate from the water inlet pipe, and the heating liquid for heating heats the diborane inside the liquid guide pipe, thereby facilitating the heating of the liquid diborane. The heating agent between the upper mounting plate and the lower mounting plate is then discharged from the water outlet pipe.

[0024] Optionally, a plurality of second guide plates are fixedly installed in sequence from top to bottom inside the tank body, the second guide plates are located between the water inlet pipe and the water outlet pipe, the second guide plates are provided with guide ports, and the guide ports on the plurality of second guide plates are alternately arranged on both sides of the second guide plates.

[0025] By adopting the above technical solution, the heating agent is guided by the second guide plate, so that the heating agent flows in an S shape inside the tank body, thereby facilitating the heating liquid to heat the diborane and then discharge it from the water outlet pipe.

[0026] Optionally, a floating rod is passed through the inside of the liquid guide tube, and the rod body of the floating rod is provided with a plurality of storage grooves, and a stirring block is hinged inside the storage groove; a plurality of driving rings are fixedly installed on the inner wall of the liquid guide tube, and the top side of the driving ring is used to abut against the free side of the stirring block, the cross-sectional area of ​​the stirring block gradually decreases from the middle to the two sides, and the cross-sectional area of ​​the stirring block is triangular; a driving rod is fixedly installed on the bottom end of the floating rod, and the driving rod sliding sleeve is provided with a driving sleeve, and the bottom end of the driving sleeve is fixedly installed on the inner bottom wall of the tank body, and a driving block is fixedly installed on the bottom end of the driving rod, and the inner wall of the driving sleeve is provided with a driving groove for the driving block to slide, and the driving groove is gradually lowered along the circumference of the sleeve, and an electromagnet is fixedly installed on the bottom side of the tank body, and the electromagnet is used to attract the driving rod.

[0027] By adopting the above technical solution, the electromagnet starts to attract the driving rod to descend, the driving rod drives the floating rod to descend, and the stirring block is rotated out of the storage tank due to the resistance of the liquid diborane. At the same time, the driving block cooperates with the driving tank, so that the floating rod rotates when it descends. The floating rod drives the stirring block to rotate, so as to facilitate the stirring of the liquid diborane inside the liquid guide tube, and then facilitate the heating agent to heat the liquid diborane.

[0028] After the electromagnet is turned off, the driving rod rises due to the buoyancy, and the driving rod drives the floating rod to rise. The stirring is resisted by the liquid diborane and returns to the inside of the storage tank, thereby reducing the thrust of the stirring block driving the liquid diborane to flow upward.

[0029] In summary, the present application includes at least one of the following beneficial technical effects:

[0030] Liquid diborane is heated by the reboiling mechanism and then discharged into the static zone. The liquid diborane is static inside the static zone. Then, the liquefied diborane is taken out from the static zone through the first recovery pipe. The liquid diborane is static in the static zone, thereby increasing the evaporation time of impurities and improving the purity of diborane after each distillation.

[0031] When the reboiling mechanism discharges the liquefied diborane into the static zone, the liquefied diborane falls into the first guide plate, and the liquefied diborane spreads on the first guide plate, thereby facilitating the evaporation of impurities;

[0032] The water storage plate is driven down by the driving assembly to block the liquefied diborane from flowing from the reboiler into the static zone, thereby facilitating the reboiler to heat the liquefied diborane and further facilitating the evaporation of impurities carried by the liquefied diborane. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1It is a schematic diagram of the overall structure of Example 1 of the present application;

[0034] Figure 2 is a cross-sectional view of the tower body of Example 1 of the present application;

[0035] Figure 3 yes Figure 2 A magnified view at point A;

[0036] Figure 4 yes Figure 2 Enlarged view at B;

[0037] Figure 5 is an exploded view of the heat exchange mechanism of Example 1 of the present application;

[0038] Figure 6 is a schematic structural diagram of a reboiler according to Example 2 of the present application;

[0039] Figure 7 yes Figure 6 Section view at AA

[0040] Figure 8 yes Figure 7 Enlarged view at C;

[0041] Fig. 9 is a schematic structural diagram of a stirring block according to Example 2 of the present application;

[0042] Fig.10 yes Figure 7 Enlarged view at D.

[0043] Explanation of the reference numerals: 1. tower body; 2. feed pipe; 3. partition; 4. static zone; 5. boiling zone; 6. reboiling mechanism; 61. reboiler; 611. tank body; 612. upper mounting plate; 613. lower mounting plate; 614. liquid guide pipe; 615. water inlet pipe; 616. water outlet pipe; 62. first liquid discharge pipe; 63. first reflux pipe; 7. first recovery pipe; 8. first guide plate; 9. baffle; 10. floating plate; 11. guide block; 12. guide groove; 13. water storage plate; 14. slideway; 15. driving assembly; 151. first rotating seat; 152. second rotating seat; 153. first pressure rod; 154. second pressure rod; 155. floating plate Block; 16, driving plate; 17, condensing mechanism; 171, condenser; 172, reflux tank; 173, second drain pipe; 174, first exhaust pipe; 175, second exhaust pipe; 176, second reflux pipe; 18, heat exchange mechanism; 181, tower plate; 182, downcomer; 183, float valve; 184, overflow plate; 19, first air vent; 20, second air vent; 21, air baffle; 22, magnetic block; 23, second guide plate; 24, guide port; 25, float rod; 26, storage tank; 27, stirring block; 28, driving ring; 29, driving rod; 30, driving sleeve; 31, driving block; 32, driving tank; 33, electromagnet. DETAILED DESCRIPTION

[0044] The following is combined with Figure 1-10 This application is described in further detail. Example 1

[0045] The embodiment of the present application discloses a diborane purification device.

[0046] Reference Figure 1 , Figure 2 A diborane adsorption purification device comprises a tower body 1, and a feed pipe 2 is fixedly installed on the side wall of the tower body 1. A partition 3 is fixedly installed on the inner bottom wall of the tower body 1, and the partition 3 divides the bottom side of the tower body 1 into a static zone 4 and a boiling zone 5. The tower body 1 is provided with a reboiler mechanism 6, and the reboiler mechanism 6 comprises a reboiler 61, a first liquid discharge pipe 62 and a first reflux pipe 63. The first liquid discharge pipe 62 is fixedly installed between the bottom side of the tower body 1 and the bottom side of the reboiler 61, the first liquid discharge pipe 62 is connected to the boiling zone 5, and the first reflux pipe 63 is fixedly installed between the side wall of the reboiler 61 and the side wall of the tower body 1.

[0047] After diborane is prepared, there are impurities. The prepared diborane is pressurized and cooled into liquid and then stored. After that, the liquid diborane carrying impurities is added to the tower body 1 from the feed pipe 2, and the liquid diborane falls into the boiling zone 5. After that, the liquid diborane enters the reboiler 61 from the first liquid discharge pipe 62, and the reboiler 61 heats the liquid diborane. The boiling point of diborane is high, and the boiling point of impurities is low. When the reboiler 61 heats the liquid diborane, the impurities are mainly evaporated into gas. After that, the gaseous impurities return to the inside of the tower body 1 through the first reflux pipe 63 and flow upward; the liquid diborane returns to the tower body 1 from the first reflux pipe 63 and falls into the static zone 4. The liquid diborane heated by the reboiler 61 is left to stand in the static zone 4, thereby increasing the time for the impurities to evaporate, thereby improving the purity of the liquid diborane.

[0048] Reference Figure 2 A first recovery pipe 7 is fixedly installed on the bottom side of the tower body 1, and the first recovery pipe 7 is connected to the static zone 4. After the liquid diborane is static in the static zone 4, the liquid diborane is taken out through the first reflux pipe 63.

[0049] Reference Figure 2 , Figure 3 A plurality of first guide plates 8 are arranged at intervals from top to bottom inside the static zone 4. The plurality of first guide plates 8 are alternately installed on the two opposite inner side walls of the static zone 4 from top to bottom, and baffles 9 are fixedly installed on both sides of the first guide plates 8. When the liquid diborane enters the static zone 4 from the first reflux pipe 63, the liquid diborane falls into the first guide plate 8, and is guided by the first guide plate 8 and the baffle 9, and the liquid diborane flows downward in an S shape. The first guide plate 8 is conducive to spreading the liquid diborane, thereby facilitating the evaporation of impurities into gas, thereby improving the purity of the diborane inside the static zone 4.

[0050] Reference Figure 3 A floating plate 10 is arranged inside the static zone 4, and the floating plate 10 is located below each first guide plate 8. A guide block 11 is fixedly installed on the peripheral side of the floating plate 10, and a guide groove 12 for the guide block 11 to slide up and down is opened on the inner wall of the static zone 4.

[0051] The guide block 11 cooperates with the guide groove 12 to facilitate the lifting and lowering movement of the floating plate 10. The floating plate 10 is subjected to the buoyancy of the liquid diborane, and the diborane will float on the liquid surface of the liquid diborane in the static area 4. After the liquid diborane flows downward along the first guide plate 8, it first falls into the floating plate 10, and the floating plate 10 plays a buffering role. Then the liquid diborane diffuses from the floating plate 10 and flows into the liquid diborane gathered at the bottom side of the static area 4, thereby reducing the disturbance of the diborane at the bottom side of the static area 4. By reducing the disturbance of the diborane at the bottom side of the static area 4, it is convenient for the impurities carried by the liquid diborane that has just flowed into the bottom side of the static area 4 to evaporate on the liquid surface.

[0052] Reference Figure 1 , Figure 4The first return pipe 63 is a rectangular pipe, and a water storage plate 13 is arranged at one end of the first return pipe 63 close to the tower body 1. The side wall of the water storage plate 13 is pressed against the inner wall of the first return pipe 63, and a slide groove 14 is provided on the inner wall of the first return pipe 63 for the water storage plate 13 to slide up and down.

[0053] The water storage plate 13 is equipped with a driving assembly 15, which includes a first rotating seat 151, a second rotating seat 152, a first pressure rod 153, a second pressure rod 154 and a floating block 155. The first rotating seat 151 and the second rotating seat 152 are both fixedly mounted on the inner bottom wall of the first reflux pipe 63, the rod body of the first pressure rod 153 is rotatably mounted on the first rotating seat 151, and the rod body of the second pressure rod 154 is rotatably mounted on the second rotating seat 152. One end of the first pressure rod 153 is hinged to the top side of the water storage plate 13, the other end of the first pressure rod 153 is located below one end of the second pressure rod 154, and the floating block 155 is fixedly mounted on the other end of the second pressure rod 154. The floating block 155 is a hollow structure, so that the weight of the floating block 155 is reduced, and then the floating block 155 floats upward after the liquid level inside the first reflux pipe 63 rises.

[0054] At the beginning, the water storage plate 13 is driven by gravity to abut against the inner bottom wall of the first reflux pipe 63 to block water. The water storage plate 13 drives the second pressure rod 154 to rotate through the first pressure rod 153, and the end of the second pressure rod 154 close to the floating block 155 is downward, so that the floating block 155 moves downward. Liquid diborane generates gaseous impurities after being heated by the reboiler 61. When the gaseous impurities flow from the first reflux pipe 63 to the tower body 1, the gaseous impurities are blown toward the floating block 155. Since the end of the second pressure rod 154 close to the floating block 155 is downward, the gaseous impurities exert a downward force on the floating block 155.

[0055] After the liquid diborane is heated by the reboiler 61, the liquid diborane needs to flow from the first reflux pipe 63 into the static zone 4. However, the liquid diborane is blocked by the water storage plate 13, and the liquid diborane cannot flow from the first reflux pipe 63 into the static zone 4. Then, the liquid diborane gathers inside the reboiler 61, the liquid level inside the reboiler 61 gradually rises, and the buoyancy of the floating block 155 gradually increases.

[0056] When the buoyancy of the float 155 is sufficient to overcome its own gravity, the force applied to the float 155 by the water storage plate 13 after being transmitted by the first pressure rod 153 and the second pressure rod 154, and the downward force applied to the float 155 by the gas impurities, the float 155 moves upward, and then drives the water storage plate 13 to move upward after being transmitted by the first pressure rod 153 and the second pressure rod 154.

[0057] After the water storage plate 13 moves upward, the liquid diborane flows from the bottom of the water storage plate 13 and enters the static zone 4. During the gradual upward movement of the water storage plate 13, after the amount of liquid diborane discharged to the static zone 4 is greater than the amount of liquid diborane flowing from the boiling zone 5 to the reboiler zone, the liquid level inside the reboiler 61 begins to drop, and at the same time, the second pressure rod 154 becomes higher at one end close to the floating block 155 and lower at the other end. When the second pressure rod 154 becomes higher at one end close to the floating block 155, gas impurities exert an upward force on the floating block 155, thereby reducing the liquid level inside the reboiler 61. After the water storage plate 13 drops, the water storage plate 13 drops immediately.

[0058] As the liquid diborane flows from the bottom of the water storage plate 13 into the static zone 4, the liquid level inside the reboiler 61 gradually decreases. After the buoyancy of the floating block 155 is insufficient to drive the water storage plate 13 to move upward, the water storage plate 13 descends again and abuts against the inner bottom wall of the first reflux pipe 63. The water storage plate 13 is repeatedly raised and lowered, thereby increasing the time for the liquefied diborane to stay in the reboiler 61, thereby increasing the time for heating the liquefied diborane.

[0059] Reference Figure 4 A driving plate 16 is fixedly mounted on the top side of the floating block 155 , and the driving plate 16 is used for blowing by the gas. The driving plate 16 blows the impurities in the gas, thereby increasing the force applied by the gas impurities to the floating block 155 .

[0060] The outer top wall of the first reflux pipe 63 is fixedly mounted with a magnetic block 22, which is used to provide magnetic force for the driving plate 16 to rise, thereby reducing the situation in which the float 155 immediately drops after the liquid level in the first reflux pipe 63 drops. Generally, the first reflux pipe 63 is wrapped with a heat-insulating material, and the magnetic block 22 is outside the heat-insulating material.

[0061] Reference Figure 1 The tower body 1 is provided with a condensing mechanism 17, which includes a condenser 171, a reflux tank 172, a second drain pipe 173, a first exhaust pipe 174, a second exhaust pipe 175, and a second reflux pipe 176. The first exhaust pipe 174 is fixedly installed between the condenser 171 and the top side of the tower body 1, and the second drain pipe 173 is fixedly installed between the condenser 171 and the reflux tank 172. The second reflux pipe 176 is fixedly installed between the bottom side of the reflux tank 172 and the side wall of the tower body 1, and the second exhaust pipe 175 is fixedly installed on the top side of the reflux tank 172.

[0062] When the gas impurities move upward inside the tower body 1, the gas impurities will carry part of the diborane. The gas impurities enter the condenser 171 from the first exhaust pipe 174, and the condenser 171 cools the gas impurities. Since diborane has a high boiling point, diborane is easily liquefied after condensation. Thereafter, the liquefied diborane and gas impurities enter the reflux tank 172 through the second drain pipe 173. The second exhaust pipe 175 takes out and recycles the gasified impurities inside the reflux tank 172, and the liquefied diborane returns to the inside of the tower body 1 through the second reflux pipe 176, thereby reducing waste.

[0063] Reference Figure 2 , Figure 5 A plurality of heat exchange mechanisms 18 are fixedly installed on one side of the tower body 1 from top to bottom, and the heat exchange mechanism 18 includes a tower plate 181, a downcomer 182, a float valve 183 and two overflow plates 184. The peripheral side of the tower plate 181 is fixedly connected to the inner wall of the tower body 1, and the two overflow plates 184 are relatively fixedly installed on the top side of the tower plate 181. The portion of the tower plate 181 between the two overflow plates 184 is provided with a plurality of first vents 19, and there are a plurality of float valves 183, and the float valves 183 are arranged one by one corresponding to the first vents 19. The float valve 183 is installed in the first vent 19 in a lifting manner.

[0064] The downcomer 182 is fixedly passed through the tower plate 181, and the top side of the downcomer 182 is flush with the top side of the overflow plate 184. The downcomers 182 of two adjacent heat exchange mechanisms 18 are alternately located on the sides of the two overflow plates 184 that are away from each other, and the bottom side of the downcomer 182 of the upper heat exchange mechanism 18 is located at a lower height than the top side of the overflow plate 184 of the lower heat exchange mechanism 18.

[0065] Liquid diborane moves downward inside the tower body 1 and falls on the tower plate 181. It is limited by two overflow plates 184, so that the liquid diborane gathers on the tower plate 181. The gas impurities move upward and lift the float valve 183, and then the gas impurities diffuse to the surroundings. The heat in the gas impurities is transferred to the liquid diborane, so that the impurities carried by the liquid diborane evaporate, thereby improving the purity of the liquid diborane. After the height of the liquid diborane accumulated on the tower plate 181 is higher than the overflow plate 184, the liquid diborane enters the next tower plate 181 from the downcomer 182. After the bottom tower plate 181, the downcomer 182 discharges the liquid diborane into the boiling zone 5.

[0066] Reference Figure 2 , Figure 5 A second vent hole 20 is provided on the top side of the float valve 183, and an air baffle plate 21 is provided inside the second vent hole 20. The air baffle plate 21 is gradually lowered from the middle to both sides and is inclined, the middle of the air baffle plate 21 is higher than the top side of the float valve 183, and both sides of the air baffle plate 21 are fixedly connected to the inner wall of the second vent hole 20.

[0067] Part of the gas impurities are ejected from the second vent hole 20 and then blocked by the air baffle 21 . The gas impurities move to both sides of the air baffle 21 , thereby facilitating heat exchange between the gas impurities and the liquid diborane above the float valve 183 .

[0068] The implementation principle of a diborane purification device in the embodiment of the present application is as follows: diborane containing impurities is added to the tower body 1 from the feed pipe 2 in liquid form. The heat-transforming mechanism sends the liquid diborane to the boiling zone 5, and then the reboiling mechanism 6 heats the liquid diborane in the boiling zone 5 and sends it to the static zone 4. The impurities carried by the heated liquid diborane evaporate, and by standing in the static zone 4, the evaporation time of the impurities is increased, thereby reducing the impurities carried by the liquid diborane in the static zone 4. The liquid diborane is then recovered through the first recovery pipe 7. Since the setting of the static zone 4 increases the evaporation time of the impurities, the purity of the diborane is improved. Example 2

[0069] The embodiment of the present application discloses a diborane purification device.

[0070] Reference Figure 6 , Figure 7 The difference between a diborane purification device of an embodiment of the present application and Example 1 is that a reboiler 61 includes a tank body 611, an upper mounting plate 612, a lower mounting plate 613, a liquid guide pipe 614, a water inlet pipe 615 and a water outlet pipe 616.

[0071] One end of the first liquid discharge pipe 62 away from the tower body 1 and one end of the first return pipe 63 away from the tower body 1 are both fixedly connected to the side wall of the tank body 611. One end of the water inlet pipe 615 and one end of the water outlet pipe 616 are both fixedly connected to the side wall of the tank body 611. The upper mounting plate 612 and the lower mounting plate 613 are both fixedly mounted inside the tank body 611, and the lower mounting plate 613 is located higher than the end of the first liquid discharge pipe 62 away from the tower body 1. The height of the water inlet pipe 615 is higher than the lower mounting plate 613, and the height of the water outlet pipe 616 is higher than the water inlet pipe 615. The height of the upper mounting plate 612 is higher than the water outlet pipe 616, and the height of the end of the first return pipe 63 away from the tower body 1 is higher than the upper mounting plate 612. There are multiple liquid guiding tubes 614 , which are fixedly passed through the upper mounting plate 612 and the lower mounting plate 613 . The liquid guiding tubes 614 are used to connect the space of the tank body 611 located on the side away from each other between the upper mounting plate 612 and the lower mounting plate 613 .

[0072] Liquid diborane enters the tank 611 from the first liquid discharge pipe 62 and is located below the lower mounting plate 613. Then, the liquid diborane below the lower mounting plate 613 enters the liquid guide pipe 614. The liquid diborane then moves from the liquid guide pipe 614 to the top of the upper mounting plate 612. The liquid diborane above the upper mounting plate 612 enters the static zone 4 from the first reflux pipe 63.

[0073] The heating agent for heating diborane is injected into the tank 611 from the water inlet pipe 615 and is located between the upper mounting plate 612 and the lower mounting plate 613. The heating agent then heats the liquid diborane in the liquid guide tube 614, and then the heating agent is discharged from the water outlet pipe 616.

[0074] Reference Figure 7 , Figure 8 A plurality of second guide plates 23 are fixedly installed in the tank body 611 from top to bottom, and the second guide plates 23 are located between the water inlet pipe 615 and the water outlet pipe 616. The second guide plates 23 are provided with guide ports 24, and the guide ports 24 on the plurality of second guide plates 23 are alternately arranged on both sides of the second guide plates 23. After the heating agent enters the tank body 611, the heating agent is guided by the second guide plates 23, so that the heating agent flows in an S shape inside the tank body 611. After the heating agent flows in an S shape, it is discharged from the water outlet pipe 616.

[0075] Reference Figure 7 , Figure 8 A floating rod 25 is inserted into the interior of the liquid guiding tube 614, and the floating rod 25 floats by adopting a hollow structure to reduce weight. The rod body of the floating rod 25 is provided with a plurality of receiving grooves 26. A stirring block 27 is hinged inside the receiving groove 26. A plurality of driving rings 28 are fixedly mounted on the inner wall of the liquid guiding tube 614. The top side of the driving ring 28 is used to abut against the free side of the stirring block 27. The driving ring 28 is conducive to increasing the contact area between the heating agent and the liquid diborane, thereby facilitating the heating of the liquid diborane.

[0076] Reference Figure 8 , Fig. 9 The cross-sectional area of ​​the stirring block 27 gradually decreases from the middle to both sides. The cross-sectional area of ​​the stirring block 27 is triangular, and one side of the stirring block 27 is straightly arranged. The straight side of the stirring block 27 is arranged facing.

[0077] Reference Figure 7 , Fig.10 The bottom end of the floating rod 25 is fixedly mounted with a driving rod 29, and the driving rod 29 is slidably sleeved with a driving sleeve 30, and the bottom end of the driving sleeve 30 is fixedly mounted on the inner bottom wall of the tank body 611. The bottom end of the driving rod 29 is fixedly mounted with a driving block 31, and the inner wall of the driving sleeve 30 is provided with a driving groove 32 for the driving block 31 to slide, and the driving groove 32 is gradually lowered along the circumference of the sleeve. An electromagnet 33 is fixedly mounted on the bottom side of the tank body 611, and the electromagnet 33 is used to attract the driving rod 29.

[0078] The implementation principle of a diborane purification device according to an embodiment of the present application is as follows: the electromagnet 33 is started, and the electromagnet 33 attracts the driving rod 29, so that the floating rod 25 moves downward. When the floating rod 25 moves downward, the stirring block 27 and the driving ring 28 squeeze each other, and the stirring block 27 is also subject to the upward resistance of the liquid diborane, so that the stirring block 27 rotates upward. At the same time, the driving groove 32 cooperates with the driving block 31, so that the floating rod 25 rotates when it descends. The stirring block 27 rotates upward and extends out of the receiving groove 26, and the floating rod 25 rotates again, so that the stirring block 27 stirs the liquid diborane inside the liquid conduit 614, thereby facilitating the heating agent to heat the liquid diborane inside the liquid conduit 614 and improving the uniformity of heating.

[0079] The electromagnet 33 is turned off, and the floating rod 25 is moved upward by the buoyancy. When the floating rod 25 moves upward, the gravity of the stirring block 27 and the downward resistance of the liquid diborane cause the stirring block 27 to rotate downward and enter the receiving tank 26. The stirring block 27 rotates downward and enters the receiving tank 26, thereby reducing the stirring block 27 pushing the liquid diborane to flow upward, thereby increasing the time that the liquid diborane stays in the liquid guide tube 614 for heating.

[0080] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A diborane purification device, characterized in that: The tower body (1) comprises a tower body (1), a condensing mechanism (17) and a reboiling mechanism (6), wherein a feed pipe (2) is fixedly mounted on the side wall of the tower body (1), a partition (3) is fixedly mounted on the inner bottom wall of the tower body (1), the partition (3) divides the bottom side of the tower body (1) into a static zone (4) and a boiling zone (5), a plurality of heat exchange mechanisms (18) are fixedly mounted inside the tower body (1), the heat exchange mechanisms (18) are used to discharge the liquid into the boiling zone (5) after heat exchange between gas and liquid, the condensing mechanism (17) is mounted on the top side of the tower body (1), the condensing mechanism (17) is used to cool and liquefy the gas and then discharge it back to the tower body (1), the bottom side of the tower body (1) is connected to the reboiling mechanism (6), the reboiling mechanism (6) is used to heat the liquid in the boiling zone (5) and then discharge it into the static zone (4), and a first recovery pipe (7) is fixedly mounted on the bottom side of the tower body (1), the first recovery pipe (7) is connected to the static zone (4); The reboiling mechanism (6) comprises a reboiler (61), a first liquid discharge pipe (62) and a first reflux pipe (63), wherein the first liquid discharge pipe (62) is fixedly installed between the bottom side of the tower body (1) and the bottom side of the reboiler (61), the first liquid discharge pipe (62) is communicated with the boiling zone (5), and the first reflux pipe (63) is fixedly installed between the side wall of the reboiler (61) and the side wall of the tower body (1); The reboiler (61) comprises a tank body (611), an upper mounting plate (612), a lower mounting plate (613), a liquid guide pipe (614), a water inlet pipe (615) and a water outlet pipe (616); one end of the first liquid discharge pipe (62) away from the tower body (1) and one end of the first reflux pipe (63) away from the tower body (1) are both fixedly connected to the side wall of the tank body (611); one end of the water inlet pipe (615) and one end of the water outlet pipe (616) are both fixedly connected to the side wall of the tank body (611); the upper mounting plate (612) and the lower mounting plate (613) are both fixedly mounted inside the tank body (611); the lower mounting plate (613) is located at a position higher than the first liquid discharge pipe (614). 2) an end away from the tower body (1), the water inlet pipe (615) is located at a height higher than the lower mounting plate (613), the water outlet pipe (616) is located at a height higher than the water inlet pipe (615), the upper mounting plate (612) is located at a height higher than the water outlet pipe (616), the end of the first return pipe (63) away from the tower body (1) is located at a height higher than the upper mounting plate (612), a plurality of liquid guide pipes (614) are fixedly passed through the upper mounting plate (612) and the lower mounting plate (613), and the liquid guide pipes (614) are used to connect the space of the tank body (611) located on the side of the upper mounting plate (612) and the lower mounting plate (613) that are away from each other; A floating rod (25) is inserted into the liquid guiding tube (614), and a plurality of receiving grooves (26) are provided on the rod body of the floating rod (25). A stirring block (27) is hingedly connected inside the receiving groove (26). A plurality of driving rings (28) are fixedly installed on the inner wall of the liquid guiding tube (614). The top side of the driving ring (28) is used to abut against the free side of the stirring block (27). The cross-sectional area of ​​the stirring block (27) gradually decreases from the middle to the two sides. The cross-sectional area of ​​the stirring block (27) is triangular. The bottom end of the floating rod (25) is fixedly installed with a driving rod (29), the driving rod (29) sliding sleeve is provided with a driving sleeve (30), the bottom end of the driving sleeve (30) is fixedly installed on the inner bottom wall of the tank body (611), the bottom end of the driving rod (29) is fixedly installed with a driving block (31), the inner wall of the driving sleeve (30) is provided with a driving groove (32) for the driving block (31) to slide, and the driving groove (32) is gradually lowered along the circumference of the sleeve, and an electromagnet (33) is fixedly installed on the bottom side of the tank body (611), and the electromagnet (33) is used to attract the driving rod (29).

2. A diborane purification device according to claim 1, characterized in that: A plurality of first guide plates (8) are arranged at intervals from top to bottom inside the static zone (4); the plurality of first guide plates (8) are alternately installed from top to bottom on two opposite inner side walls of the static zone (4); baffle plates (9) are fixedly installed on both sides of the first guide plates (8).

3. A diborane purification device according to claim 2, characterized in that: A floating plate (10) is arranged inside the static zone (4), the floating plate (10) being located below each of the first guide plates (8), a guide block (11) being fixedly mounted on the peripheral side of the floating plate (10), and a guide groove (12) for the guide block (11) to be lifted and slid is provided on the inner wall of the static zone (4).

4. A diborane purification device according to claim 1, characterized in that: The first return pipe (63) is a rectangular pipe. A water storage plate (13) is provided at one end of the first return pipe (63) close to the tower body (1). The side wall of the water storage plate (13) is in contact with the inner wall of the first return pipe (63). The inner wall of the first return pipe (63) is provided with a slide groove (14) for the water storage plate (13) to slide up and down. The water storage plate (13) is installed with a driving assembly (15). The driving assembly (15) is used to drive the water storage plate (13) to move up and down.

5. A diborane purification device according to claim 4, characterized in that: The driving assembly (15) comprises a first rotating seat (151), a second rotating seat (152), a first pressure rod (153), a second pressure rod (154) and a floating block (155); the first rotating seat (151) and the second rotating seat (152) are both fixedly mounted on the inner bottom wall of the first return pipe (63); the rod body of the first pressure rod (153) is rotatably mounted on the first rotating seat (151); the rod body of the second pressure rod (154) is rotatably mounted on the second rotating seat (152); one end of the first pressure rod (153) is hinged to the top side of the water storage plate (13); the other end of the first pressure rod (153) is located below one end of the second pressure rod (154); and the floating block (155) is fixedly mounted on the other end of the second pressure rod (154).

6. A diborane purification device according to claim 5, characterized in that: A driving plate (16) is fixedly mounted on the top side of the floating block (155), and the driving plate (16) is used for gas blowing. A magnetic block (22) is fixedly mounted on the top side of the first return pipe (63), and the magnetic block (22) is used for attracting the driving plate (16).

7. A diborane purification device according to claim 1, characterized in that: A plurality of second guide plates (23) are fixedly installed in sequence from top to bottom inside the tank body (611); the second guide plates (23) are located between the water inlet pipe (615) and the water outlet pipe (616); the second guide plates (23) are provided with guide ports (24); and the guide ports (24) on the plurality of second guide plates (23) are alternately arranged on both sides of the second guide plates (23).

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