The invention relates to a synthesis and purification method of
arsine. The method comprises the following steps: 1. putting
zinc powder and
arsenic powder into a
quartz vessel, uniformly mixing, putting into a stainless steel reaction tank, vacuumizing, introducing high-purity
inert gas, and pressurizing and heating to obtain
zinc arsenide powder; 2, putting the
zinc arsenide powder into a reactor, and adding dilute
sulfuric acid to react to generate crude
arsine gas; 3, introducing the crude
arsine gas into an adsorption device to obtain arsine gas; 4, arsine gas is captured through a liquidnitrogen
cold trap, the arsine gas is condensed into liquid arsine, non-condensable gas is pumped out through a
vacuum pump, a
liquid nitrogen tank outside the cold hydrazine is taken down, arsine isvolatilized, and pure arsine gas is obtained; and 5, introducing the pure arsine gas into a pre-treated clean
steel cylinder for storage to obtain a finished product. Impurities in arsine gas can beeffectively reduced, the purity of arsine is improved, and meanwhile, the addition of an adsorbent and the selection of a
molecular sieve are carried out in one device, so that the reaction efficiencycan be improved.