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Technology for preparing high-purity diborane in rectification and adsorption combined purifying mode

A process technology, the technology of diborane, is applied in the technical field of preparing high-purity diborane by means of rectification and adsorption combined purification, which can solve problems such as pollution, and achieve the effects of convenient use and reasonable design.

Inactive Publication Date: 2010-08-25
TIANJIN TAIHENG GASES
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This technology is not only reasonable in process and simple in preparation, but also in good quality. The purity of diborane produced is as high as 5N (99.999%), and it solves the problem of environmental pollution.

Method used

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  • Technology for preparing high-purity diborane in rectification and adsorption combined purifying mode
  • Technology for preparing high-purity diborane in rectification and adsorption combined purifying mode

Examples

Experimental program
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Embodiment Construction

[0009] With reference to Fig. 1, feed gas inlet pipe (1), the reboiler (2) of external reboiler heating mantle (10), the packing tower (3) of external packing tower cooling jacket (9), condenser (4), Low boiling impurity discharge pipe (5), liquid product (high purity B 2 h 6 ) take-out pipe (6), product receiving tank (7), high-boiling impurity discharge pipe (8), and valve (11) are assembled into one body by connecting pipeline (12) according to their system functions.

[0010] The invention adopts a process method for preparing high-purity diborane by low-temperature adsorption, rectification, separation and purification with a filling agent.

[0011] (1) Source and composition of raw materials

[0012] This method is applicable to the thick B that described method prepares 2 h 6 . rough B 2 h 6 , containing ratio B 2 h 6 H with a low boiling point 2 , N 2 , O 2 , Ar, CH 4 and other impurities, and than B 2 h 6 High boiling point (C 2 h 5 )2O, CH 3 Cl, C ...

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Abstract

The invention discloses technology for preparing high-purity diborane in a rectification and adsorption combined purifying mode, which is mainly characterized in that a feed gas inlet pipe, a reboiler outside which a reboiler heating jacket is arranged, a filled tower outside which a filled tower cooling jacket is arranged, a condenser, a low-boiling impurity discharge pipe, a liquid product (high-purity B2H6) take-out pipe, a product receiving groove, a high-boiling impurity discharge pipe and a valve are assembled together through a connecting pipeline according to the system function. The technology has reasonable design and convenient use, and is ideal high-purity diborane preparation technology.

Description

Technical field [0001] The invention relates to a process technology for preparing high-purity diborane, an alkane chemical product, in particular to a process technology for preparing high-purity diborane by a combination purification method of rectification and adsorption, which is suitable for chemical synthesis of diborane. Background technique [0002] At present, microelectronics technology is the main cornerstone of modern information technology and military technology, and it is one of the key factors to promote scientific and technological progress, industrial development, economic take-off and social advancement. Integrated circuit is the core of microelectronics technology, and its development level and industrial scale have become an important symbol to measure a country's economic strength. Electronic specialty gases (such as diborane), especially high-purity electronic gases as a new category of electronic chemical materials, are important factors restricting t...

Claims

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Application Information

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IPC IPC(8): C01B6/10C01B6/34
Inventor 李中元
Owner TIANJIN TAIHENG GASES
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