The method comprises the following steps: mixing
germane raw material gas and an added first
azeotrope in a mixing
tower 1, feeding the mixture into an azeotropic
tower 1, extracting an azeotropic component from the top of the azeotropic
tower 1, extracting an azeotropic component from the side line of the azeotropic tower 1, feeding the azeotropic component into a mixing tower 2, mixing, feeding the azeotropic component into an azeotropic tower 2, and feeding the azeotropic component into an azeotropic tower 1; a second
azeotrope is extracted from the top of an azeotropic tower 2, a second azeotropic component is extracted from the side line of the azeotropic tower 2 and enters a product tower, an electronic-grade 7N
germane product is extracted from the top of the product tower, and a heavy component is extracted from the bottom of the product tower. The device comprises a mixing tower 1, an azeotropic tower 1, an azeotropic tower 1 condenser, an azeotropic tower 1
reboiler, a mixing tower 2, an azeotropic tower 2, an azeotropic tower 2 condenser, an azeotropic tower 2
reboiler, a product tower, a product tower condenser and a product tower
reboiler. By adopting the special rectification purification method and device for the electronic grade 7N
germane, the purity of the treated 7N germane product is greater than 99.99999%, the ethane content is less than 0.1 ppb, the
ethylene content is less than 0.1 ppb, and the
carbon dioxide content is less than 0.1 ppb.