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Technology of method for preparing high purity diborane by way of adsorption, separation and purification

A technology of adsorption separation and process technology, which is applied in the technical field of adsorption separation and purification to prepare high-purity diborane, can solve problems such as pollution, and achieve the effects of convenient use, convenient operation and high yield

Inactive Publication Date: 2011-01-26
TIANJIN TAIYUAN INDAL GAS
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  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This technology is not only reasonable in process and simple in preparation, but also in good quality. The purity of diborane produced is as high as 5N (99.999%), and it solves the problem of environmental pollution.

Method used

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  • Technology of method for preparing high purity diborane by way of adsorption, separation and purification
  • Technology of method for preparing high purity diborane by way of adsorption, separation and purification

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Embodiment Construction

[0012] refer to figure 1 , rough B 2 h 6 (Diborane) gas cylinder (1), drier (2), adsorber (3), vacuum pump (4), tail gas absorber (5), product collector (6) according to their system functions through connecting pipelines (7) ) assembled into one body.

[0013] The invention adopts the process method for preparing high-purity diborane by means of adsorption, separation and purification.

[0014] Mainly, the crude diborane is continuously supplied by the device of the present invention that produces diborane, and according to the impurity content of the crude diborane, the B 2 h 6 CH in 4 , CO 2 etc., to prepare high-purity diborane, which is liquefied and vaporized to form a finished product.

[0015] Its advantages are high product yield, high purity (99.0%-99.9%), less impurities and easy separation. Except for the product itself, there are no other harmful and toxic by-products, and the operation is more convenient. It is the preparation of high-purity diborane idea...

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Abstract

The invention discloses a technology of a method for preparing high purity diborane by way of adsorption, separation and purification, which is formed mainly by using a coarse B2H6 (diborane) cylinder, a dryer, an adsorber, a vacuum pump, a tail gas absorber and a product collector which are integrated by connecting pipes according to the system functions thereof. The technology of the invention is an ideal high purity diborane preparation technology, and has the advantages of reasonable design and convenient use.

Description

Technical field [0001] The invention relates to a process for preparing high-purity diborane, an alkane chemical product, in particular to a process for preparing high-purity diborane by means of adsorption, separation and purification, which is suitable for chemical synthesis of diborane. Background technique [0002] At present, microelectronics technology is the main cornerstone of modern information technology and military technology, and it is one of the key factors to promote scientific and technological progress, industrial development, economic take-off and social advancement. Integrated circuit is the core of microelectronics technology, and its development level and industrial scale have become an important symbol to measure a country's economic strength. Electronic specialty gases (such as diborane), especially high-purity electronic gases as a new category of electronic chemical materials, are important factors restricting the reliability and yield of integrated ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B6/10B01D53/04
Inventor 李中元
Owner TIANJIN TAIYUAN INDAL GAS
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