The utility model provides a production device of electronic-grade
hydrogen phosphide. The production device comprises a full-automatic
aluminum phosphide feeding
system, a
sulfuric acid metering tank, a constant-temperature reaction kettle, a purification cooling
system, a heavy component removal purification column, a
cold trap collection device, a light component removal purification column, a low-temperature filling
system, an
inert gas purging system, a vacuum system and a
tail gas
treatment system. The method comprises the following steps: quantitatively adding
aluminum phosphide into a constant-temperature reaction kettle, slowly adding
sulfuric acid into the constant-temperature reaction kettle through a metering tank, reacting to generate
hydrogen phosphide gas, and removing particulate matters, acid mist,
moisture,
arsenic hydride,
hydrogen sulfide,
carbon dioxide,
carbon monoxide,
alkane,
silane and
ethylene in the
hydrogen phosphide gas through pre-cooling, deep cooling, heavy component removal,
cold trap and light component removal to obtain the electronic-grade
hydrogen phosphide special gas with the purity of 99.9999%. And feeding
tail gas generated in the purification process into a
tail gas
treatment system, absorbing the tail gas through a two-stage
tower, and discharging the tail gas after reaching the standard.