The utility model belongs to the field of
semiconductor material manufacturing, and particularly relates to an
arsenic hydride and
phosphine adsorption
tower, which comprises a
tower body and a circulation port at the bottom of the
tower body, a sealing box is mounted at the bottom of the tower body, the sealing box is hermetically connected with the circulation port through a filter
cartridge, a cleaning groove is mounted in the sealing box, and a push block is mounted at the output end of the cleaning groove; an annular powerful
magnet is installed on the push block, a synchronous sleeve is installed on the outer side of the filter cylinder in a sliding mode, an iron sheet is installed in the synchronous sleeve, and the iron sheet and the powerful
magnet are attracted. According to the spraying circulating
system,
manganese crystals are prevented from entering the spraying circulating
system in the mode that the filter cylinder is additionally arranged on the circulating opening, the cleaning groove is started to push the powerful
magnet to slide in the filter cylinder, the powerful magnet on the push block can attract the powerful magnet in the synchronous sleeve, the push block can drive the synchronous sleeve to move synchronously, and therefore the
manganese crystals are prevented from entering the spraying circulating
system. And the synchronous sleeve moves to clean
manganese crystals blocked on the outer wall of the filter
cartridge, so that the circulating efficiency of the spraying liquid is improved.