The invention discloses a glass spherical surface
ultrasound focused
cavitation reinforcement
microreactor which comprises a substrate with a micro flow channel groove, a shallow groove and micro concave points and a
system formed by the combination of glass wafers forming structures of glass micro flow channel cavities and spherical glass
micro cavities corresponding to the micro flow channel groove and the shallow groove, wherein the
system comprises a micro reaction cavity, a micro
air chamber, a micro flow channel, an
ultrasound excitation source, a fluid inlet and a fluid outlet; and in the structure, ultrasonic wave is utilized to be focused on the micro
air chamber, and the
cavitation reinforcement effect is realized. The invention also discloses a preparation method of the glass spherical surface
ultrasound focused
cavitation reinforcement
microreactor. The preparation method of the glass spherical surface ultrasound focused cavitation reinforcement
microreactor comprises the following steps of: firstly
etching the micro flow channel groove and the micro concave points on a
silicon substrate; adding a
calcium bicarbonate solution in the grooves, then evaporating and heating, thereby obtaining a
calcium carbonate high-temperature out-gassing agent finally; then carrying out
anodic bonding on the
silicon substrate with etched grooves and micro concave points and
borosilicate glass wafers so as to form a sealed cavity body; and heating, releasing
positive pressure generated by gases released by the high-temperature out-gassing agent so as to form small
micro cavities. The glass spherical surface ultrasound focused cavitation reinforcement microreactor and the preparation method of the glass spherical surface ultrasound focused cavitation reinforcement microreactor provided by the invention have the advantages of good
controllability and good cavitation effect.