Glass spherical surface ultrasound focused cavitation reinforcement microreactor and preparation method thereof

A technology of ultrasonic focusing and microreactor, applied in the direction of chemical/physical/physicochemical processes of energy application, can solve repeatability and low reaction efficiency, energy waste, cavitation bubble appearance time, position uncertainty or randomness etc.

Inactive Publication Date: 2013-04-03
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The formation of cavitation bubbles leads to uncertainty or randomness in the time and location of cavitation bubbles, which leads to low repeatability and reaction efficiency of experiments.
Moreover, the energy required to cause cavitation is relatively high, so energy is wasted

Method used

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  • Glass spherical surface ultrasound focused cavitation reinforcement microreactor and preparation method thereof
  • Glass spherical surface ultrasound focused cavitation reinforcement microreactor and preparation method thereof
  • Glass spherical surface ultrasound focused cavitation reinforcement microreactor and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0035] A method for preparing a microfluidic grid on-chip experimental system integrating a spherical glass cavity focused ultrasonic transmitter, comprising the following steps:

[0036] In the first step, a 5000 ? oxide layer is oxidized on a single-sided polished silicon wafer by a combination of dry and wet oxygen. The polished surface is spin-coated with AZ P4620 photoresist, exposed and developed to remove the photoresist that needs to be etched on the surface of the microcavity. Use Si micromachining technology to etch microchannel grooves and shallow grooves on a 4-inch Si wafer. The microchannel grooves connect the shallow grooves. The silicon wafer used can be a standard thickness silicon wafer with a thickness of 500 microns. The depth of the above-mentioned shallow grooves is 50-150 microns, the width of the small shallow grooves is 100-1000 microns, and the width of the large shallow grooves is 1000-10000 microns. Their shapes are square or circular, and the diamet...

Embodiment 2

[0046] A method for preparing a microfluidic grid on-chip experimental system integrating a spherical glass cavity focused ultrasonic transmitter, comprising the following steps:

[0047] In the first step, a 5000 ? oxide layer is oxidized on a single-sided polished silicon wafer by a combination of dry and wet oxygen, and the polished surface is spin-coated with AZ P4620 photoresist, exposed and developed to remove the photoresist that needs to be etched on the surface of the microcavity. Use Si micromachining technology to etch microchannel grooves and shallow grooves on a 4-inch Si wafer. The microchannel grooves connect the shallow grooves. The silicon wafer used can be a standard thickness silicon wafer with a thickness of 500 microns. The depth of the above-mentioned shallow grooves is 50-150 microns, the width of the small shallow grooves is 100-1000 microns, and the width of the large shallow grooves is 1000-10000 microns. Their shapes are square or circular, and the di...

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Abstract

The invention discloses a glass spherical surface ultrasound focused cavitation reinforcement microreactor which comprises a substrate with a micro flow channel groove, a shallow groove and micro concave points and a system formed by the combination of glass wafers forming structures of glass micro flow channel cavities and spherical glass micro cavities corresponding to the micro flow channel groove and the shallow groove, wherein the system comprises a micro reaction cavity, a micro air chamber, a micro flow channel, an ultrasound excitation source, a fluid inlet and a fluid outlet; and in the structure, ultrasonic wave is utilized to be focused on the micro air chamber, and the cavitation reinforcement effect is realized. The invention also discloses a preparation method of the glass spherical surface ultrasound focused cavitation reinforcement microreactor. The preparation method of the glass spherical surface ultrasound focused cavitation reinforcement microreactor comprises the following steps of: firstly etching the micro flow channel groove and the micro concave points on a silicon substrate; adding a calcium bicarbonate solution in the grooves, then evaporating and heating, thereby obtaining a calcium carbonate high-temperature out-gassing agent finally; then carrying out anodic bonding on the silicon substrate with etched grooves and micro concave points and borosilicate glass wafers so as to form a sealed cavity body; and heating, releasing positive pressure generated by gases released by the high-temperature out-gassing agent so as to form small micro cavities. The glass spherical surface ultrasound focused cavitation reinforcement microreactor and the preparation method of the glass spherical surface ultrasound focused cavitation reinforcement microreactor provided by the invention have the advantages of good controllability and good cavitation effect.

Description

technical field [0001] The invention relates to a microreactor and a preparation method, in particular to a glass spherical ultrasonic focusing cavitation enhanced microreactor and a preparation method. [0002] Background technique [0003] Microreactors are becoming more and more important both in laboratory-scale biological or chemical reactions and in industrial production. The microstructure of microreactors has many advantages: increasing the efficiency of biological or chemical reaction research, reducing the amount of reactants to save costs. Sonochemical technology mainly refers to the process of using ultrasonic waves to accelerate chemical reactions and increase chemical yields. The essence of sonochemical technology is ultrasonic cavitation, including the emergence of cavitation nuclei, the growth of cavitation bubbles, and the bursting of cavitation bubbles. Ultrasonic microreactors have excellent heat and mass transfer capabilities, and can achieve instant u...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J19/10
Inventor 尚金堂徐佳峰邹羽
Owner SOUTHEAST UNIV
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